CN1693028A - Large range nanometer grade step piezoelectric micromotion working platform, and its driving and controlling system - Google Patents
Large range nanometer grade step piezoelectric micromotion working platform, and its driving and controlling system Download PDFInfo
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- CN1693028A CN1693028A CN 200510013559 CN200510013559A CN1693028A CN 1693028 A CN1693028 A CN 1693028A CN 200510013559 CN200510013559 CN 200510013559 CN 200510013559 A CN200510013559 A CN 200510013559A CN 1693028 A CN1693028 A CN 1693028A
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Abstract
A piezoelectrically micromoving working platform with big stroke (more than 10 mm) and nanostep is composed of platform, base, guide track on said platform, guide track block moving along said guide track, and the driver unit arranged at the end of said guide track block and consisting of clamper and driver. Said clamper can be extended or shrinked when electric current flows through it, so performing the clamping and releasing actions.
Description
Technical field
The present invention relates to nano measurement and nanometer positioning, particularly a kind of large range nanometer grade step piezoelectric micromotion working platform.Be applicable to field of nanometer technology, fields such as particularly nano-machine processing, nano measurement, electron device production, Micro Electro Mechanical System, nano material, biomedicine.
Background technology
Little driving, location technology are the hot issues of various countries, world today research, are one of gordian techniquies in nano measurement and the process technology, no matter are nano measurement or nanometer positioning, all need a little drive system.The performance quality of microdrive directly has influence on and measures or locating accuracy.So-called microdrive refers to the device and the device that can produce little driving action.Microdrive is the important component part in little driving, the positioning system.Emphasis direction that famous both at home and abroad university and laboratory are all studied the research of the design of relevant microdrive, processing, manufacturing technology, measuring technology etc. as micromechanics and breach.Piezo-electric motor is the next-generation drive that development in recent years is got up, be a kind of micro positioner that utilizes the piezoelectric ceramics inverse piezoelectric effect to make, advantage such as have that volume is little, thrust is big, precision is high, displacement resolution is high and frequency response is fast, and do not generate heat, not producing noise, is desirable micro-displacement sensor.Its appearance has driven the develop rapidly such as VLSI (very large scale integrated circuit) processing, precision optics control, superfinishing, microscopic analysis, artificial intelligence control etc., is bringing into play very important effect in leading-edge fields such as national defence, microelectronics, Aeronautics and Astronautics.Though piezo-electric motor has reached the level of using, and is difficult to use in wider scope owing to price comparison is expensive, change the structure of motor and select suitable material can further reduce the cost of motor.In this case, develop a kind of simple in structure, cost is low, debug easily, piezoelectric micromotion device that kinematic accuracy is high, in the precision measurement technical field certain researching value and realistic meaning is arranged still.
Summary of the invention
Technical matters to be solved by this invention is, overcomes deficiency of the prior art, provide a kind of simple in structure, debug easily, large range nanometer grade step piezoelectric micromotion working platform that kinematic accuracy is high.Another technical matters to be solved by this invention is, provide a kind of simple in structure, debug easily, large range nanometer grade step piezoelectric micromotion working platform driving control system that kinematic accuracy is high.
For solving the problems of the technologies described above, large range nanometer grade step piezoelectric micromotion working platform of the present invention comprises base.Described
Base is provided with way block, and way block is provided with guide rail, and guide rail is connected with the platform that can move along this guide rail; The end of described way block is provided with driver element, and driver element is made up of binding clasp and driver, and binding clasp produces and stretches or drawdown deformation when its electrifying electrodes, is used to finish clamping and loosening up.
Described driver element is 2, and 2 unit symmetries are placed.
Described binding clasp is the stacked block piezoelectric crystal of multi-disc.
Described driver is block piezoelectric ceramics.
Be provided with contiguous block between described binding clasp and the driver.
For solving the problems of the technologies described above, large range nanometer grade step piezoelectric micromotion working platform driving control system of the present invention, comprise single-chip microcomputer and the program storage that is connected with this single-chip microcomputer, latch, digital to analog converter, code translator, keyboard and display circuit, program storage memory contains control program; Two pins of the P1 mouth of described single-chip microcomputer regularly negate are used for producing and exporting chronologically 2 road square waves; Described digital to analog converter is used for producing and exporting chronologically 2 road triangular waves; Above-mentioned 4 road timing waveforms drive large range nanometer grade step piezoelectric micromotion working platform after direct current amplifier amplifies.
Described driving control system is carried out following steps: a, beginning when the operation control program; B, initialization; C, demonstration ± 00H000U; D, setpoint frequency, magnitude of voltage; E, demonstration 00F0000; F, setting step number; G, calculation of parameter; H, timer initialization; I, setting mode of motion; J, by with the setting mode of motion that gives an order, the forwardflag=1 that moves ahead retreats forwardflag=0, continueflag=1 continuously, single step continueflag=0; K, execution; L, end.
Compared with prior art, the present invention has following technique effect: (one) is owing to adopt platform---guide tracked structure, directly make workbench produce nano level Motion Resolution power, total kilometres can reach tens millimeters, and change traditional single driver structure into the dual drive structure, be equipped with four tunnel suitable drive signals, realized continuously and smoothly's motion of piezoelectric micromotion working platform; (2) the present invention combines with scanning probe microscopy (SPM), can be used in the detection of microelectromechanicpositioning product, microelectronic product, also can combine with the nano-machine process, and process is controlled in real time.
Description of drawings
Fig. 1 is the structural representation of large range nanometer grade step piezoelectric micromotion working platform of the present invention;
Fig. 2 is the motion principle figure of large range nanometer grade step piezoelectric micromotion working platform of the present invention;
Fig. 3 is the driving voltage waveform figure of large range nanometer grade step piezoelectric micromotion working platform driving control system of the present invention;
Fig. 4 is the system hardware structure figure of large range nanometer grade step piezoelectric micromotion working platform driving control system of the present invention;
Fig. 5 is the control program process flow diagram of large range nanometer grade step piezoelectric micromotion working platform driving control system of the present invention;
Fig. 6 is an experimental provision connection diagram of the present invention;
Fig. 7 is that displacement is with frequency variation curve;
Fig. 8 is that displacement is with the change in voltage curve;
Fig. 9 is the displacement curve of large range nanometer grade step piezoelectric micromotion working platform of the present invention.
Reference numeral: the 1st, driver 2 is that binding clasp 3 is that platform 4 is that contiguous block 5 is way blocks
Embodiment
The following drawings elaborates to the present invention.
The embodiment of large range nanometer grade step piezoelectric micromotion working platform of the present invention:
As shown in Figure 1, piezoelectric micromotion working platform of the present invention comprises platform 3, way block 5, base, two binding clasps 2 and two drivers 1.In two binding clasps, the binding clasp on the left side is C among the figure
1, the binding clasp on the right is C among the figure
2In two drivers, the driver on the left side is A among the figure
1, the driver on the right is A among the figure
2Form a unit by a binding clasp and a driver.Folder so with two unit symmetry placements, so both strengthened the driving force of micromotion working platform, has increased traveling comfort because principle, the structure of these two unit and the function that should satisfy are in full accord again, and simple in structure, easy for installation.Be provided with contiguous block 4 between tight device 2 and the driver 1.Way block 5 is arranged on the base, and way block 5 is provided with guide rail, and platform 3 can move along this guide rail.Driver element is arranged on the two ends of way block, and binding clasp produces and stretches or drawdown deformation when its electrifying electrodes, is used to finish clamping and loosening up.
For binding clasp, selected the stacked block piezoelectric crystal of the bigger multi-disc of deformation for use, when giving the electrifying electrodes of piezoelectric crystal piece, they can produce distortion-stretching, extension simultaneously or shrink, and finish the action that clamps and loosen platform.For driver, selected block piezoelectric ceramics, suitably select institute's making alive (voltage that can bear according to different piezoelectric ceramics applies voltage), make it to satisfy the requirement that produces moderate finite deformation and driving force.
The supply voltage waveform that matches with above-mentioned motion principle as shown in Figure 3.Fig. 3 top is to supply with binding clasp C
1, C
2The voltage waveform of piezoelectric crystal piece, and Fig. 3 below is to supply with driver A
1, A
2The voltage waveform of block piezoelectric crystal.When zone of transition Tr, because C
1And C
2Clamp simultaneously, so A
1Push away and A
2Pull-shaped one-tenth is made a concerted effort, and drives platform motion simultaneously.Because A
1, A
2Overlap joint in the motion and what supply with driver is triangular wave so the motor motion state is continuous uniform motion, thereby has guaranteed the stationarity of moving.If with C
1With C
2, A
1With A
2When drive waveforms is exchanged simultaneously, platform will move round about.
Because piezoelectric has advantages such as little, the no thermal source of volume, ultrahigh resolution, therefore can be used for realizing little driving.The present invention has carried out technological improvement on the basis of " looper principle ", produce four tunnel pumping signals by control system, adopts novel " push away-drawing " principle to realize the nanoscale continuously and smoothly motion of micromotion working platform." push away-draw " principle as shown in Figure 2.Piezoelectric micromotion working platform is by two binding clasp C
1, C
2With two driver A
1, A
2Form.As binding clasp C
1During clamping, binding clasp C
2Loosen, simultaneously driver A
1Expand, the platform that promotes micromotion working platform is to left movement, at this moment, and driver A
2Expand (this is a preliminary activities); Next step is as binding clasp C
2During clamping, step up device C
1Then be in relaxation state, driver A
2Shrink, because C
2Clamping, so pull on moving platform to left movement, driver A simultaneously
1Shrink (this also is a preliminary activities); Next step, the same first step, i.e. C
1Clamp C
2Loosen A
2And A
1Expand, promote platform motion ...And so forth, alternately " push away " and " drawing ", thereby make platform continuous motion left constantly.
Large range nanometer grade step piezoelectric micromotion working platform driving control system embodiment of the present invention:
Large range nanometer grade step piezoelectric micromotion working platform driving control system of the present invention as shown in Figure 4, it is used to produce four road timing waveforms shown in Figure 3, promptly exports two-way triangular wave, two-way square wave, and chronologically output.Four road timing waveforms that control system produces are added on the piezo-electric motor after direct current amplifier amplifies, make its finish advance or retreat, functions such as single step or continuous motion.What hardware system adopted is 8031 single-chip computer control systems, and the output of square wave is to get with two pins timing negates of P1 mouth, and triangular wave then is the sync buffering output acquisition by two D/A conversion chip DAC0832 that extend out.What keyboard and demonstration were selected for use is 8279 chips.Direct current amplifier is to adopt four road dc high voltage amplifiers that are exclusively used in piezoelectric ceramics.Software systems adopt Keil C advanced language programming, produce required waveform with the timer interrupt mode.The control program process flow diagram as shown in Figure 5.
Performance test is as follows:
Fig. 6 is the used experimental provision connection diagram of piezo-electric motor performance test.What capacitance gage was selected for use is JDC-2000 type high-accuracy capacitor micrometer, and its resolving power can reach 4nm/mV.Utilize above device, the kinetic characteristic of large range nanometer grade step piezoelectric micromotion working platform of the present invention is tested.
The relation experiment of piezoelectric micromotion working platform moving displacement and driving frequency: in the experiment, keep driving voltage amplitude constant, change the driving voltage frequency.In the frequency range of 1～40Hz, the every change of frequency 5Hz carries out one-shot measurement, respectively at the piezoelectric micromotion working platform single step displacement that records under 200V and the 100V driving voltage and the relation curve between the driving frequency as shown in Figure 7.As seen from Figure 7, when driving voltage amplitude one timing, the step pitch of piezoelectric micromotion working platform reduces with the raising of driving frequency.
The relation experiment of piezoelectric micromotion working platform moving displacement and driving voltage: the driving voltage fixed-frequency is at 5Hz, the every raising of driving voltage amplitude 50V measures once, and piezoelectric micromotion working platform single step displacement that records and the relation curve between the driving voltage are as shown in Figure 8.As seen from Figure 8, when one timing of driving voltage frequency, the step pitch of piezoelectric micromotion working platform increases with the increase of driving voltage.
The actuating speed test of piezoelectric micromotion working platform: found through experiments, the movement velocity of piezoelectric micromotion working platform is not only relevant with the size of driving voltage, and is also relevant with driving frequency.In rated voltage, actuating speed is monotone increasing with the increase of driving voltage.Table 1 is depicted as under the 200V driving voltage, the movement velocity of the micromotion working platform during the different driving frequency.As can be seen from Table 1, the movement velocity of this piezoelectric micromotion working platform can reach 13.86 μ m/s.Strengthen voltage and can further improve actuating speed, but will see that used piezoelectric element allows great driving voltage, otherwise can damage piezoelectric element, even cause puncture.
The different frequency travelling speed relatively under the table 1 200V voltage
| Frequency (Hz) | ??1Hz | ??5Hz | ??10Hz | ??15Hz | ??20Hz | ??25Hz | ??30Hz | ??35Hz | ??40Hz |
| Average step pitch (nm) | ??1669.4 | ??483.5 | ??348.8 | ??326.4 | ??339.4 | ??322.65 | ??359.4 | ??345.2 | ??346.5 |
| Speed (nm/s) | ??1669.4 | ??2417.5 | ??3488 | ??4896 | ??6788 | ??7255 | ??10782 | ??12082 | ??13860 |
The linearity of piezoelectric micromotion working platform motion: find by a large amount of experiments, though what this piezoelectric micromotion working platform adopted is the motion principle that push away-draws relay-type, but because system design cleverly, the moving displacement that has guaranteed this micromotion working platform is linear, and promptly this motor has been realized continuously and smoothly's motion.Fig. 9 is under the driving voltage of 200V, 30Hz, the piezoelectric micromotion working platform moving displacement curve that records.During measurement, control its motion, record one secondary data of every two step of motion of micromotion working platform by the piezoelectric micromotion working platform controller.As seen from Figure 9, the moving displacement of piezoelectric micromotion working platform is linear.
The bearing capacity of piezoelectric micromotion working platform: in the experiment, apply the voltage of 200V, 1Hz to micromotion working platform, counterweight added from little weight be placed on the micromotion working platform, the registration of observing capacitance gage simultaneously changes, and the maximum load capacity that records piezoelectric micromotion working platform at last is 24N.
The minimum step pitch of piezoelectric micromotion working platform: find in the experiment, when piezoelectric micromotion working platform was lower than 5V at driving voltage, fluctuation of service had the motionless phenomenon of stagnation, therefore, we fetch data the displacement that records under metastable 5V, the 10Hz voltage as minimum step pitch.It is as shown in table 2 to record data.
Whenever 2 step displacements of advancing under table 2 5V, the 10Hz
| Experiment number | ??1 | ??2 | ??3 | ??4 | ??5 | ??6 | ??7 | ??8 | ??9 | ??10 |
| 2 step displacements (nm) | ??48 | ??32 | ??40 | ??56 | ??40 | ??32 | ??32 | ??24 | ??32 | ??36 |
As can be seen from Table 2, the minimum step pitch of piezoelectric micromotion working platform of the present invention on average can reach 18.4nm.If the piezoelectric element with small deformation is done driver, and further improves driving frequency, can obtain littler step pitch.
Piezoelectric micromotion working platform range of operation: apply 200V, 1Hz voltage, select the continuous motion mode, make the piezoelectric micromotion working platform motion.Motion through about 110 minutes time, reach minimum contact condition between the clamp device of piezoelectric micromotion working platform and the platform end face, stop motion, the moving displacement amount that measure piezoelectric micromotion working platform this moment is 11mm, and the maximum magnitude that therefore can draw the piezoelectric micromotion working platform operation is 11mm.
The present invention adopts " push away-drawing " relay motion principle based on the novelty of inchworm motion principle, reaches structural design cleverly by whistle control system, has realized at the uniform velocity continuous motion, and has obtained the good motion linearity.The stroke of this micromotion working platform can reach 11mm, can reach millimeters up to a hundred in theory, in fact depends primarily on the size of platform.
The step pitch of this micromotion working platform increases along with the increase of driving voltage, reduces along with the raising of driving frequency, and minimum step pitch can reach nanoscale.By regulating the amplitude and the frequency of driving voltage, can change the actuating speed of micromotion working platform, can reach 13.86 μ m/s the soonest.The particle carrying capacity of this micromotion working platform can reach 24N, and favorable actual application prospect is arranged.
Claims (7)
1, a kind of large range nanometer grade step piezoelectric micromotion working platform comprises base, it is characterized in that, described base is provided with way block, and way block is provided with guide rail, and guide rail is connected with the platform that can move along this guide rail; The end of described way block is provided with driver element, and driver element is made up of binding clasp and driver, and binding clasp produces and stretches or drawdown deformation when its electrifying electrodes, is used to finish clamping and loosening up.
2, a kind of large range nanometer grade step piezoelectric micromotion working platform according to claim 1 is characterized in that, described driver element is 2, and 2 unit symmetries are placed.
3, a kind of large range nanometer grade step piezoelectric micromotion working platform according to claim 1 is characterized in that, described binding clasp is the stacked block piezoelectric crystal of multi-disc.
4, a kind of large range nanometer grade step piezoelectric micromotion working platform according to claim 1 is characterized in that, described driver is block piezoelectric ceramics.
5, a kind of large range nanometer grade step piezoelectric micromotion working platform according to claim 1 is characterized in that, is provided with contiguous block between described binding clasp and the driver.
6, a kind of large range nanometer grade step piezoelectric micromotion working platform driving control system, it is characterized in that, described driving control system comprises single-chip microcomputer and the program storage that is connected with this single-chip microcomputer, latch, digital to analog converter, code translator, keyboard and display circuit, and program storage memory contains control program; Two pins of the P1 mouth of described single-chip microcomputer regularly negate are used for producing and exporting chronologically 2 road square waves; Described digital to analog converter is used for producing and exporting chronologically 2 road triangular waves; Above-mentioned 4 road timing waveforms drive large range nanometer grade step piezoelectric micromotion working platform after direct current amplifier amplifies.
7, a kind of large range nanometer grade step piezoelectric micromotion working platform driving control system according to claim 6 is characterized in that, described driving control system is carried out following steps: a, beginning when the operation control program; B, initialization; C, demonstration ± 00H000U; D, setpoint frequency, magnitude of voltage; E, demonstration 00F0000; F, setting step number; G, calculation of parameter; H, timer initialization; I, setting mode of motion; J, by with the setting mode of motion that gives an order, the forwardflag=1 that moves ahead retreats forwardflag=0, continueflag=1 continuously, single step continueflag=0; K, execution; L, end.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101083440B (en) * | 2006-05-29 | 2010-07-07 | 天津大学 | Rotary type piezoelectric micro-angle driving apparatus |
| CN101837850A (en) * | 2010-04-26 | 2010-09-22 | 吴雪刚 | Needle extractor for aluminum-plastic packaged acupuncture needle |
| CN102744716A (en) * | 2011-07-29 | 2012-10-24 | 沈阳大学 | Ultrasonic high precision linear working table |
| CN103912766A (en) * | 2014-03-28 | 2014-07-09 | 南京航空航天大学 | Planar piezoelectric-driven platform with three degrees of freedom and method for driving planar piezoelectric-driven platform to move |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN105240656A (en) * | 2015-08-26 | 2016-01-13 | 苏州大学张家港工业技术研究院 | Unidimensional large-stroke precise positioning platform |
| CN105988021A (en) * | 2015-02-05 | 2016-10-05 | 中国科学院沈阳自动化研究所 | Optical super-resolution dynamic imaging system and method based on microlens modified probe |
| CN115143151A (en) * | 2022-08-16 | 2022-10-04 | 山东大学 | Zero-friction and zero-leakage hydraulic actuator and driving system |
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2005
- 2005-05-26 CN CN 200510013559 patent/CN1693028A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101083440B (en) * | 2006-05-29 | 2010-07-07 | 天津大学 | Rotary type piezoelectric micro-angle driving apparatus |
| CN101837850A (en) * | 2010-04-26 | 2010-09-22 | 吴雪刚 | Needle extractor for aluminum-plastic packaged acupuncture needle |
| CN102744716A (en) * | 2011-07-29 | 2012-10-24 | 沈阳大学 | Ultrasonic high precision linear working table |
| CN103912766A (en) * | 2014-03-28 | 2014-07-09 | 南京航空航天大学 | Planar piezoelectric-driven platform with three degrees of freedom and method for driving planar piezoelectric-driven platform to move |
| CN103912766B (en) * | 2014-03-28 | 2015-10-28 | 南京航空航天大学 | Planar three freedom piezoelectric drive platform and motion driving method thereof |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN105988021A (en) * | 2015-02-05 | 2016-10-05 | 中国科学院沈阳自动化研究所 | Optical super-resolution dynamic imaging system and method based on microlens modified probe |
| CN105240656A (en) * | 2015-08-26 | 2016-01-13 | 苏州大学张家港工业技术研究院 | Unidimensional large-stroke precise positioning platform |
| CN105240656B (en) * | 2015-08-26 | 2017-09-26 | 苏州大学 | One-dimensional big stroke precision locating platform |
| CN115143151A (en) * | 2022-08-16 | 2022-10-04 | 山东大学 | Zero-friction and zero-leakage hydraulic actuator and driving system |
| CN115143151B (en) * | 2022-08-16 | 2023-05-09 | 山东大学 | Friction-free zero-leakage hydraulic actuator and driving system |
| US11933327B2 (en) | 2022-08-16 | 2024-03-19 | Shandong University | Hydraulic actuator with no friction and zero leakage, and its drive system |
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