CN101286369A - X-Y-Z three freedom degree tandem type nanometer grade microposition workstation - Google Patents
X-Y-Z three freedom degree tandem type nanometer grade microposition workstation Download PDFInfo
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- CN101286369A CN101286369A CNA2008100385530A CN200810038553A CN101286369A CN 101286369 A CN101286369 A CN 101286369A CN A2008100385530 A CNA2008100385530 A CN A2008100385530A CN 200810038553 A CN200810038553 A CN 200810038553A CN 101286369 A CN101286369 A CN 101286369A
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Abstract
The invention discloses a serially-connected nano-scale micro positioning workbench which has X-Y-Z three-dimensional freedom degrees and comprises a base, a movable platform, an X-directional displacement amplifier, a Y-directional displacement amplifier and a Z-directional displacement amplifier; furthermore, the base, the Z-directional displacement amplifier, the Y-directional displacement amplifier, the X-directional displacement amplifier and the movable platform are sequentially connected into a serially-connected structure, and the displacements are respectively controlled between the freedom degrees; wherein, the X-directional displacement amplifier and the Y-directional displacement amplifier have the same structure. The serially-connected nano-scale micro positioning workbench has compact structure and large delivery stroke range, one point on the movable platform can reach any point in the delivery stroke range, and the serially-connected nano-scale micro positioning workbench can be applied to various occasions with strict space restriction and larger displacement requirement.
Description
Technical field
The present invention relates to the table mechanism of microposition and microoperation in a kind of micro mechanical technology, be specifically related to a kind of X-Y-Z three freedom degree tandem type nanometer grade mini positioning platform, can be applicable to fields such as electron device manufacturing, biomedicine, precision measurement.
Background technology
Microposition, microoperation technology are the important research contents of MEMS (micro electro mechanical system) (MEMS) technology, and it can provide the necessary technical and equipment for nano measurement, nano-manipulation, nanometer assembling.Many microposition worktable have been arranged at present, all be as driver mostly with piezoelectric ceramics (PZT), it is big that piezoelectric ceramics has rigidity, thrust output is big, frequency response is fast, many advantages such as displacement resolution and precision height, but unit length output displacement is little, so common also very little by the table stroke of its driving; Between the degree of freedom of multiple degrees of freedom worktable coupling is arranged, cause control complicated; Working table structure is compact inadequately, and size is too big, and whole worktable need take bigger space.
Find China Patent No.: 200420103170.4 titles: a kind of plane three-freedom degree precision locating platform through literature search to prior art.This patent disclosure a kind of implementation method of three-freedom degree precision locating platform.This mechanism comprises that three displacement amplifying mechanisms and three displacement transducers thereof outwards are 120 degree angles and distribute along the output stage center, moves in a plane.Because this patent only designed the one-level amplification, and three compliant mechanisms are placed in the same plane, and stroke is very little.It adopts parallel-connection structure, and coupling is arranged between three degree of freedom.In addition, China Patent No.: 01202336.1, title: the automatic locating platform of 3 freedom degree ultra-precise, also adopted three one-level displacement amplifying mechanisms in this patent, three mechanisms adopt parallel-connection structure, and the output movement direction is vertical direction.In described two kinds of locating platforms, the former has only the freedom of motion of horizontal direction, the latter has only the degree of freedom of vertical direction, is so limited down on the motion platform and can arrive the optional position, space, and the freedom degree parallel connection coupling has also brought difficulty to control in addition.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, a kind of X-Y-Z three freedom degree tandem type nanometer grade microposition worktable is provided, has designed two kinds of multistage enlargers, can realize the big enlargement factor in the small size, three degree of freedom forms cascaded structure, not coupling.Compact conformation of the present invention, the delivery stroke scope is big, on the motion platform a bit can arrive in the stroke range more arbitrarily, can apply to various have strict space constraint, the occasions of bigger displacement demand.
The present invention is achieved by the following technical solutions:
The present invention includes: pedestal, motion platform, X to displacement amplifier, Y to displacement amplifier, Z to displacement amplifier.Here X, Y, Z refer to three change in coordinate axis direction of Descartes's rectangular coordinate system.Pedestal, Z connect to displacement amplifier, moving platform to displacement amplifier, X in order successively to displacement amplifier, Y, form cascaded structure, do not have coupling between each degree of freedom, can control displacement respectively, and control procedure is simple and easy.The output displacement of motion platform be each displacement amplifier displacement vector and.
Described X is identical to the displacement amplifier structure with Y to displacement amplifier, includes: the rectangular configuration framework that four rigidity straight-bars are connected into, two rigidity straight-bars of rectangle inside, a piezoelectric ceramic actuator, a micrometer adjusting screw.Form the four edges of the rigidity straight-bar of rectangular configuration framework as this rectangle, adjacent edge connects with flexible hinge.Wherein long limit is as the fixed edge of this direction displacement amplifier, and its opposite side is as motion output limit.Fixed edge stretches out the rigid frame of a L font to rectangle inside, and this rigid frame and rectangle fixed edge are same rigid body.Space between rigid frame and the fixed edge holds piezoelectric ceramic actuator.The rear end face of piezoelectric ceramic actuator is withstood by the micrometer adjusting screw that screws in from the threaded hole of rigid frame, and it is top that front end face withstands the arc of first rigidity straight-bar middle part.This first rigidity straight-bar amplifies as the first order displacement of this direction, and the one end connects with flexible hinge and rectangle fixed edge, and the other end connects with the middle part of second rigidity straight-bar with flexible hinge.This second rigidity straight-bar amplifies as the second level displacement of this direction, and the one end connects with the end of L font rigid frame with flexible hinge, and the other end connects with an adjacent side of flexible hinge and rectangle fixed edge.This adjacent side amplifies as the third level displacement of this direction.
Described Z comprises to displacement amplifier: four rectangular configuration framework, a right-angle triangle member, a ceramic driver, micrometer adjusting screws that the rigidity straight-bar is connected into.Form the four edges of the rigidity straight-bar of rectangular configuration framework as this rectangle, adjacent edge connects with flexible hinge.Wherein minor face is as the fixed edge of this direction displacement amplifier, and its opposite side is as motion output limit.Fixed edge stretches out the rigid frame of a converse to rectangle inside, and this rigid frame and rectangle fixed edge are same rigid body.The space of converse rigid frame the inside holds piezoelectric ceramic actuator.The rear end face of piezoelectric ceramic actuator is withstood by the micrometer adjusting screw that screws in from the threaded hole of rigid frame, and it is top that front end face withstands the arc of middle part of a right-angle side of triangle member.This rigidity right-angle triangle member amplifies as the first order displacement of this direction, and its summit, right angle connects with flexible hinge with the end of rigid frame, and an adjacent side of the end of it another right-angle side and rectangle fixed edge connects with flexible hinge.This adjacent side amplifies as the second level displacement of this direction.
X to displacement amplifier and Y when displacement amplifier moves: the rectangle frame horizontal positioned.The straight-bar that contacts with piezoelectric ceramic actuator in the rectangle frame is first straight-bar, and another root straight-bar is second.As fulcrum, first straight-bar rotated around fulcrum when piezoelectric ceramic actuator promoted, thereby promoted second straight-bar with the gentle hinge of connection of it and rectangle fixed edge for first straight-bar.Second straight-bar, rotates around this fulcrum when promoted by first straight-bar as fulcrum with the gentle hinge of connection of it and brace summer, thereby promotes the rectangle minor face that connects with it.This rectangle minor face, rotates around this fulcrum when being subjected to second straight-bar and promoting as fulcrum with the gentle hinge of the connection of itself and fixed edge, does the motion that is parallel to fixed edge thereby drive regular-shape motion output limit.X is that three grades of displacements are amplified to displacement amplifier and Y to displacement amplifier.
When Z moved to displacement amplifier: rectangle frame was vertically placed, and fixed edge and motion output limit are in vertical direction.As fulcrum, piezoelectric ceramic actuator promotes a right-angle side to right-angle triangle, and triangle is rotated around fulcrum with the gentle hinge at place, right angle, and another right-angle side moves upward, and promotes an adjacent side of motion fixed edge.This adjacent side, rotates around this fulcrum when promoted by right-angle triangle as fulcrum with the gentle hinge of the connection of itself and fixed edge, does the vertical direction motion thereby drive regular-shape motion output limit.Z is that the two-stage displacement is amplified to displacement amplifier.
The equal utilization structure compactness of the revolute pair of described enlarger, do not have machinery friction, gapless flexible hinge pair, design go up should guarantee all flexible hinge kinematic pairs main stressed be pulling force, avoid excessive detrusion enough high with the rigidity of guaranteeing enlarger.
The displacement amplifier of all directions all uses identical stacked piezoelectric ceramic actuator to drive, and the driver rear end is withstood by a micrometer adjusting screw, and the micrometer adjusting screw effect is to regulate elasticity, applies prestress, the displacement just of adjustment movement platform.
Compared with prior art, characteristics of the present invention are: multistage displacement is amplified, and (can finish very big stroke output (can greater than 100 * 100 * 100 μ m) less than 45 * 45 * 44mm) in very little volume; All revolute pairs adopt flexible hinge, do not have the machinery friction; There is not coupling between the degree of freedom; Adopt piezoelectric ceramic actuator, resolution height (nanoscale).
Description of drawings
Fig. 1 is the three-dimensional view of X-Y-Z three freedom degree tandem type nanometer grade microposition worktable;
Fig. 2 is the left view of Z to displacement amplifier;
Fig. 3 is the vertical view of Y to displacement amplifier;
Fig. 4 is the three-dimensional view of X to displacement amplifier;
Wherein: the 1-pedestal; 2-Z is to displacement amplifier; 3-Y is to displacement amplifier; 4-X is to displacement amplifier; The 5-motion platform; The first to the 16 rigidity straight- bar 6,7,8,13,14,15,17,20,21,22,23,25,28,29,30,31; 12-converse rigid frame; 18,26-L font rigid frame; 9-right-angle triangle member; 10-first piezoelectric ceramic actuator; 19-second piezoelectric ceramic actuator, 27-the 3rd piezoelectric ceramic actuator; 11-Z is to micrometer adjusting screw; 16-Y is to micrometer adjusting screw; 24-X is to micrometer adjusting screw.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises pedestal 1, and Z is to displacement amplifier 2, and Y is to displacement amplifier 3, and X is to displacement amplifier 4, and motion platform 5, above each several part connect in order successively, form cascaded structure.
As Fig. 2, Z comprises to displacement amplifier 2: the rectangular configuration framework that the first rigidity straight-bar 6, the second rigidity straight-bar 7, the 3rd rigidity straight-bar 8, the 4th rigidity straight-bar 13 are connected into, the converse rigid frame 12 that stretches out from the first rigidity straight-bar 6, right-angle triangle member 9,10, one micrometer adjusting screws 11 of first ceramic driver.The first rigidity straight-bar 6 is fixed part (being fixed on the pedestal 1), and the 4th rigidity straight-bar 13 is the motion output block.Z adopts two-stage to amplify to displacement amplifier 2, and the first order is a right-angle triangle member 9, and place, right angle flexible hinge is a rotating fulcrum; The second level is the 3rd rigidity straight-bar 8, and its rotating fulcrum is the flexible hinge that the 3rd rigidity straight-bar 8 and the first rigidity straight-bar 6 connect.The front end face of first piezoelectric ceramic actuator 10 contacts with right-angle triangle member 9 lines, and Z screws in to the threaded hole of micrometer adjusting screw 11 from converse rigid frame 12, withstands the rear end face of first piezoelectric ceramic actuator 10.
As Fig. 3, Y comprises to displacement amplifier 3: the rectangular configuration framework that the 5th rigidity straight-bar 14, the 6th rigidity straight-bar 15, the 7th rigidity straight-bar 17, the tenth rigidity straight-bar 22 are connected into, the L font rigid frame 18 that stretches out from the 5th rigidity straight-bar 14, the 8th rigidity straight-bar 20 of rectangle inside, the 9th rigidity straight-bar 21, the second piezoelectric ceramic actuators 19, Y are to micrometer adjusting screw 16.The 7th rigidity straight-bar 17 is fixed part (being fixed on Z on the motion output limit 13 of displacement amplifier 2), and the 6th rigidity straight-bar 15 is the motion output block.Y adopts three grades of enlargers to displacement amplifier 3: the 8th rigidity straight-bar 20, the 9th rigidity straight-bar 21, the tenth rigidity straight-bar 22, and they are arranged in parallel, and the rigidity straight-bar of adjacent amplifier stage connects with flexible hinge-bar-flexible hinge structure.One end of these rigidity straight-bars is a flexible hinge revolute pair structure, as rotating fulcrum.These amplify the supports flexible hinge lateral arrangement of rigidity straight-bars, avoid vertically when arranging flexible hinge detrusion excessive and reduce the rigidity of displacement amplifier.Y screws in to the threaded hole of micrometer adjusting screw 16 from L font rigid frame 18, withstands the rear end face of second piezoelectric ceramic actuator 19.
As Fig. 4, X comprises to displacement amplifier 4: the rectangular configuration framework that the 11 rigidity straight-bar the 23, the 12 rigidity straight-bar the 25, the 13 rigidity straight-bar the 25, the 16 rigidity straight-bar 31 is connected into, the L font rigid frame 26 that stretches out from the 12 rigidity straight-bar 25,30, one piezoelectric ceramic actuators of the 14 rigidity straight-bar the 29, the 15 rigidity straight-bar 27 of rectangle inside, a micrometer adjusting screw 24.The 12 rigidity straight-bar 25 is fixed part (being fixed on Y on the motion output limit 15 of displacement amplifier 3), and the 13 rigidity straight-bar 25 is the motion output block.X adopts three grades of enlargers to displacement amplifier 4: the 14 rigidity straight-bar the 29, the 15 rigidity straight-bar the 30, the 16 rigidity straight-bar 31, and they are arranged in parallel, and the rigidity straight-bar of adjacent amplifier stage connects with flexible hinge-bar-flexible hinge structure.One end of these rigidity straight-bars is a flexible hinge revolute pair structure, as rotating fulcrum.These amplify the supports flexible hinge lateral arrangement of rigidity straight-bars, avoid vertically when arranging flexible hinge detrusion excessive and reduce the rigidity of displacement amplifier.Micrometer adjusting screw 24 screws in from the threaded hole of L font rigid frame 26, withstands the rear end face of the 3rd piezoelectric ceramic actuator 27.
Coupled in series: Z is screwed on pedestal 1 to the first rigidity straight-bar 6 of displacement amplifier 2, Y is screwed in Z on the 4th rigidity straight-bar 13 of displacement amplifier 2 to the 7th rigidity straight-bar 17 of displacement amplifier 3, X is screwed in Y on the 6th rigidity straight-bar 15 of displacement amplifier 3 to the 12 rigidity straight-bar 25 of displacement amplifier 4, and motion platform 5 is screwed in X on the 13 rigidity straight-bar 25 of displacement amplifier 4.
During work, if add driving voltage to the 3rd piezoelectric ceramic actuator 27 of displacement amplifier 4 for X, 27 elongations of the 3rd piezoelectric ceramic actuator, elongation through three grades of amplifications after, make X do the directions X translation motion with respect to the 12 rigidity straight-bar 25, do the directions X motion thereby drive motion platform 5 to the 13 rigidity straight-bar 25 of displacement amplifier 4; If add driving voltage to second piezoelectric ceramic actuator 19 of displacement amplifier 3 for Y, 19 elongations of second piezoelectric ceramic actuator, elongation through three grades of amplifications after, make Y do the translation motion of Y direction with respect to the 7th rigidity straight-bar 17, do the motion of Y direction to displacement amplifier 4 and motion platform 5 thereby drive motion X to the 6th rigidity straight-bar 15 of displacement amplifier 3; If add driving voltage to first piezoelectric ceramic actuator 10 of displacement amplifier 2 for Z, 10 elongations of first piezoelectric ceramic actuator, behind the elongation process two-stage enlarger, make Z do the translation motion of Z direction with respect to the first rigidity straight-bar 6, do the motion of Z direction to displacement amplifier 3, X to displacement amplifier 4 and motion platform 5 thereby drive Y to the 4th rigidity straight-bar 13 of displacement amplifier 4.Three degree of freedom does not have coupling, and the stroke of three directions all is proportional to the driving voltage of respective drivers, can control respectively.
The selected driver size A of present embodiment * B * L=5 * 5 * 18mm, 100V driving voltage bottom offset 15 ± 10% μ m, 120V driving voltage assign maximum displacement 18 ± 10% μ m, rigidity 50N/ μ m).
The main part of the displacement amplifier in the present embodiment can the line cutting processing, and material is an aluminium alloy, and whole micro displacement workbench processing is simple and easy, and assembly precision requires low, cheap for manufacturing cost.
Claims (5)
1, a kind of X-Y-Z three freedom degree tandem type nanometer grade microposition worktable, it is characterized in that, comprise: pedestal, motion platform, X to displacement amplifier, Y to displacement amplifier, Z to displacement amplifier, described pedestal, Z connect to displacement amplifier, moving platform to displacement amplifier, X successively to displacement amplifier, Y, form cascaded structure, control displacement between each degree of freedom respectively, wherein:
Described X is identical to the displacement amplifier structure with Y to displacement amplifier, include: four rectangular configuration frameworks that the rigidity straight-bar is connected into, two rigidity straight-bars of rectangle inside, a piezoelectric ceramic actuator, a micrometer adjusting screw, form the four edges of the rigidity straight-bar of rectangular configuration framework as this rectangle, adjacent edge connects with flexible hinge, wherein long limit is as the fixed edge of this direction displacement amplifier, its opposite side is as motion output limit, fixed edge stretches out the rigid frame of a L font to rectangle inside, this rigid frame and rectangle fixed edge are same rigid body, space between rigid frame and the fixed edge is provided with piezoelectric ceramic actuator, the rear end face of piezoelectric ceramic actuator is withstood by the micrometer adjusting screw that the threaded hole from rigid frame screws in, it is top that front end face withstands the arc of first rigidity straight-bar middle part, this first rigidity straight-bar amplifies as the first order displacement of this direction, the one end connects with flexible hinge and rectangle fixed edge, the other end connects with the middle part of second rigidity straight-bar with flexible hinge, this second rigidity straight-bar amplifies as the second level displacement of this direction, the one end connects with the end of L font rigid frame with flexible hinge, the other end connects with an adjacent side of flexible hinge and rectangle fixed edge, and this adjacent side amplifies as the third level displacement of this direction;
Described Z comprises to displacement amplifier: four rectangular configuration frameworks that the rigidity straight-bar is connected into, a right-angle triangle rigid member, a ceramic driver, a micrometer adjusting screw, form the four edges of the rigidity straight-bar of rectangular configuration framework as this rectangle, adjacent edge connects with flexible hinge, wherein minor face is as the fixed edge of this direction displacement amplifier, its opposite side is as motion output limit, fixed edge stretches out the rigid frame of a converse to rectangle inside, this rigid frame and rectangle fixed edge are same rigid body, the space of converse rigid frame the inside is provided with piezoelectric ceramic actuator, the rear end face of piezoelectric ceramic actuator is withstood by the micrometer adjusting screw that the threaded hole from rigid frame screws in, it is top that front end face withstands the arc of middle part of a right-angle side of triangle member, this rigidity right-angle triangle member amplifies as the first order displacement of this direction, its summit, right angle connects with flexible hinge with the end of rigid frame, an adjacent side of the end of it another right-angle side and rectangle fixed edge connects with flexible hinge, and this adjacent side amplifies as the second level displacement of this direction.
2, X-Y-Z three freedom degree tandem type nanometer grade microposition worktable according to claim 1, it is characterized in that, described X is after adding driving voltage on the piezoelectric ceramic actuator of displacement amplifier, the piezoelectric ceramic actuator elongation, elongation through three grades of amplifications after, make X do the directions X translation motion with respect to fixed edge, do the directions X motion thereby drive motion platform to the motion output limit of displacement amplifier.
3, X-Y-Z three freedom degree tandem type nanometer grade microposition worktable according to claim 1, it is characterized in that, described Y is after adding driving voltage on the piezoelectric ceramic actuator of displacement amplifier, the piezoelectric ceramic actuator elongation, elongation through three grades of amplifications after, make Y do the translation motion of Y direction with respect to fixed edge, do the motion of Y direction to displacement amplifier and motion platform thereby drive motion X to the motion output limit of displacement amplifier.
4, X-Y-Z three freedom degree tandem type nanometer grade microposition worktable according to claim 1, it is characterized in that, described Z is after adding driving voltage on the piezoelectric ceramic actuator of displacement amplifier, the piezoelectric ceramic actuator elongation, behind the elongation process two-stage enlarger, make Z do the translation motion of Z direction with respect to fixed edge, do the motion of Z direction to displacement amplifier, X to displacement amplifier and motion platform thereby drive Y to the motion output limit of displacement amplifier.
5, X-Y-Z three freedom degree tandem type nanometer grade microposition worktable according to claim 1 is characterized in that, the stroke of described X, Y, Z direction all is proportional to the driving voltage of respective drivers.
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| CN101770182B (en) * | 2010-01-22 | 2011-06-22 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN102107370A (en) * | 2010-12-07 | 2011-06-29 | 中国商用飞机有限责任公司 | Compensation mechanism |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN101769730B (en) * | 2010-01-22 | 2012-07-25 | 西安工业大学 | Workpiece leveling and centering device |
| CN102969031A (en) * | 2012-12-12 | 2013-03-13 | 中国科学院光电技术研究所 | Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable |
| CN103177774A (en) * | 2013-01-30 | 2013-06-26 | 西安交通大学 | Flexible micrometric and angular displacement piezoelectric actuating platform with two degrees of freedom |
| CN104464838A (en) * | 2014-12-16 | 2015-03-25 | 苏州大学 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
| CN106077852A (en) * | 2016-08-04 | 2016-11-09 | 苏州大学 | Electrochemical machining system |
| CN107240423A (en) * | 2017-07-13 | 2017-10-10 | 中国科学院苏州生物医学工程技术研究所 | Three-dimensional manometer workbench based on flexible hinge |
| WO2017198047A1 (en) * | 2016-05-17 | 2017-11-23 | 西安交通大学 | Piezoelectric ceramic driven three-freedom-degree angle adjustment apparatus and adjustment method |
| CN107673305A (en) * | 2017-09-20 | 2018-02-09 | 宁波大学 | A kind of two translations one rotate freedom degree parallel connection flexible structure piezoelectric micromotion platform |
| CN109723945A (en) * | 2019-01-10 | 2019-05-07 | 北京机械设备研究所 | A kind of accurate direction platform based on flexible parallelogram mechanism |
| CN112838786A (en) * | 2019-11-22 | 2021-05-25 | 北京大学 | Linear motor with precise driving and positioning functions |
| CN115614616A (en) * | 2022-10-17 | 2023-01-17 | 中国工程物理研究院应用电子学研究所 | Single-drive bipolar displacement amplifier and displacement amplification device for optical axis adjustment |
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- 2008-06-05 CN CN2008100385530A patent/CN101286369B/en not_active Expired - Fee Related
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| CN101769730B (en) * | 2010-01-22 | 2012-07-25 | 西安工业大学 | Workpiece leveling and centering device |
| CN101770182B (en) * | 2010-01-22 | 2011-06-22 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN102107370A (en) * | 2010-12-07 | 2011-06-29 | 中国商用飞机有限责任公司 | Compensation mechanism |
| CN102107370B (en) * | 2010-12-07 | 2012-10-17 | 中国商用飞机有限责任公司 | Compensation mechanism |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102969031A (en) * | 2012-12-12 | 2013-03-13 | 中国科学院光电技术研究所 | Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable |
| CN102969031B (en) * | 2012-12-12 | 2015-06-17 | 中国科学院光电技术研究所 | Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable |
| CN103177774A (en) * | 2013-01-30 | 2013-06-26 | 西安交通大学 | Flexible micrometric and angular displacement piezoelectric actuating platform with two degrees of freedom |
| CN104464838A (en) * | 2014-12-16 | 2015-03-25 | 苏州大学 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
| CN105931675B (en) * | 2016-04-13 | 2018-04-03 | 天津大学 | A kind of parallel xyz Three Degree Of Freedoms mini positioning platform |
| WO2017198047A1 (en) * | 2016-05-17 | 2017-11-23 | 西安交通大学 | Piezoelectric ceramic driven three-freedom-degree angle adjustment apparatus and adjustment method |
| CN106077852A (en) * | 2016-08-04 | 2016-11-09 | 苏州大学 | Electrochemical machining system |
| CN106077852B (en) * | 2016-08-04 | 2018-05-15 | 苏州大学 | Electrochemical machining system |
| CN107240423A (en) * | 2017-07-13 | 2017-10-10 | 中国科学院苏州生物医学工程技术研究所 | Three-dimensional manometer workbench based on flexible hinge |
| CN107673305A (en) * | 2017-09-20 | 2018-02-09 | 宁波大学 | A kind of two translations one rotate freedom degree parallel connection flexible structure piezoelectric micromotion platform |
| CN107673305B (en) * | 2017-09-20 | 2019-12-13 | 宁波大学 | Two-translation one-rotation three-freedom-degree parallel flexible structure piezoelectric micromotion platform |
| CN109723945A (en) * | 2019-01-10 | 2019-05-07 | 北京机械设备研究所 | A kind of accurate direction platform based on flexible parallelogram mechanism |
| CN112838786A (en) * | 2019-11-22 | 2021-05-25 | 北京大学 | Linear motor with precise driving and positioning functions |
| CN115614616A (en) * | 2022-10-17 | 2023-01-17 | 中国工程物理研究院应用电子学研究所 | Single-drive bipolar displacement amplifier and displacement amplification device for optical axis adjustment |
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