CN115614616A - Single-drive bipolar displacement amplifier and displacement amplification device for optical axis adjustment - Google Patents

Single-drive bipolar displacement amplifier and displacement amplification device for optical axis adjustment Download PDF

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Publication number
CN115614616A
CN115614616A CN202211264893.1A CN202211264893A CN115614616A CN 115614616 A CN115614616 A CN 115614616A CN 202211264893 A CN202211264893 A CN 202211264893A CN 115614616 A CN115614616 A CN 115614616A
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CN
China
Prior art keywords
displacement amplifier
drive bipolar
base
lever
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211264893.1A
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Chinese (zh)
Inventor
石岩
马立斌
雒仲祥
邹凯
王�锋
黄祖鑫
张永红
尹新启
李国会
徐宏来
杨钧兰
龚宇
周彦卿
欧龙
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Institute of Applied Electronics of CAEP
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Institute of Applied Electronics of CAEP
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Publication date
Application filed by Institute of Applied Electronics of CAEP filed Critical Institute of Applied Electronics of CAEP
Priority to CN202211264893.1A priority Critical patent/CN115614616A/en
Publication of CN115614616A publication Critical patent/CN115614616A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/04Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/04Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/06Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
    • F16M11/12Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting in more than one direction
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/16Details concerning attachment of head-supporting legs, with or without actuation of locking members thereof
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention discloses a single-drive bipolar displacement amplifier and a displacement amplifying device for optical axis adjustment, wherein the single-drive bipolar displacement amplifier comprises a base, a primary lever, a secondary lever and a driver; the base and the primary lever are of L-shaped structures; one end of the primary lever is connected with one end of the base through a first flexible hinge, and the other end of the primary lever is connected with the hinged end of the secondary lever through a third flexible hinge; the hinged end of the secondary lever is also connected with the end part of the base through a second flexible hinge; the driver pushes the first-stage lever to rotate around the base through the first flexible hinge, the other end of the first-stage lever pushes the second-stage lever to rotate around the base through the second flexible hinge, and displacement amplification of the free end of the second-stage lever is completed. The single-drive bipolar displacement amplifier realizes displacement amplification of the driver through the structural arrangement of the base, the primary lever and the secondary lever.

Description

Single-drive bipolar displacement amplifier and displacement amplification device for optical axis adjustment
Technical Field
The invention belongs to the technical field of drive amplification, and particularly relates to a single-drive bipolar displacement amplifier and a displacement amplification device for optical axis adjustment.
Background
The existing electric optical axis adjusting mirror has the disadvantages of large structure size, low adjusting precision and poor stability. Therefore, a displacement adjusting device with a small size and high precision for the optical axis adjusting mirror structure is demanded.
Disclosure of Invention
The invention aims to: in order to overcome the problems of the prior art, the invention discloses a single-drive bipolar displacement amplifier, which realizes displacement amplification of a driver through the structural arrangement of a base, a primary lever and a secondary lever.
The purpose of the invention is realized by the following technical scheme:
a single-drive bipolar displacement amplifier comprises a base, a primary lever, a secondary lever and a driver; wherein, the base and the first-level lever are of L-shaped structures; one end of the primary lever is connected with one end of the base through a first flexible hinge, and the other end of the primary lever is connected with the hinged end of the secondary lever through a third flexible hinge; the hinged end of the secondary lever is also connected with the end part of the base through a second flexible hinge; the driver pushes the first-stage lever to rotate around the base through the first flexible hinge, the other end of the first-stage lever pushes the second-stage lever to rotate around the base through the second flexible hinge, and displacement amplification of the free end of the second-stage lever is completed.
According to a preferred embodiment, the driver is a voice coil motor or a piezo-ceramic material.
According to a preferred embodiment, the driver is fixed to the base.
According to a preferred embodiment, the driver is embedded in the base plate.
According to a preferred embodiment, the primary lever pushes the secondary lever via a third flexible hinge to rotate around the base via a second flexible hinge.
On the other hand, the invention also discloses:
a displacement amplification apparatus for optical axis adjustment, the displacement amplification apparatus comprising: the circuit comprises a first single-drive bipolar displacement amplifier, a second single-drive bipolar displacement amplifier and a mirror bracket; the first single-drive bipolar displacement amplifier is vertically arranged, the second single-drive bipolar displacement amplifier is horizontally arranged, the fixed end of the second single-drive bipolar displacement amplifier is fixed at the free end of the first single-drive bipolar displacement amplifier, and the pitching and deflecting adjustment of the second single-drive bipolar displacement amplifier is completed through the first single-drive bipolar displacement amplifier; the lens bracket is fixed at the free end of a second single-drive bipolar displacement amplifier, and the horizontal deflection adjustment of the lens bracket is completed through the second single-drive bipolar displacement amplifier; the first single-drive bipolar displacement amplifier and the second single-drive bipolar displacement amplifier adopt the structure of the single-drive bipolar displacement amplifier.
According to a preferred embodiment, the displacement amplification device further comprises a fixed seat, and the fixed seat is of a plate-shaped structure; and the fixed end of the first single-drive bipolar displacement amplifier is vertically fixed on the fixed seat.
According to a preferred embodiment, the fixing base is provided with a plurality of through holes for receiving fixing bolts.
According to a preferred embodiment, the second single-drive bipolar displacement amplifier is fixedly connected with the first single-drive bipolar displacement amplifier through a bolt.
According to a preferred embodiment, the mirror holder is fixedly connected to the second single-drive bipolar displacement amplifier via a bolt.
The aforementioned main aspects of the invention and their respective further alternatives may be freely combined to form a plurality of aspects, all of which are aspects that may be adopted and claimed by the present invention. The skilled person in the art can understand that there are many combinations, which are all the technical solutions to be protected by the present invention, according to the prior art and the common general knowledge after understanding the scheme of the present invention, and the technical solutions are not exhaustive herein.
The invention has the beneficial effects that:
the single-drive bipolar displacement amplifier adopts the driver to drive the elastic body to enable the elastic body to generate rotary deformation around the flexible hinge, so that the free end of the elastic body generates displacement, and the amplified output of the displacement of the driver is realized at the free end of the elastic body. And moreover, the traditional piezoelectric ceramic displacement driving structural form is changed into a bipolar displacement amplifying structural form, the piezoelectric ceramic adjusting angle is increased, and the application range of the piezoelectric ceramic is expanded.
The displacement amplification device for optical axis adjustment completes the multi-dimensional optical axis adjustment of the spectacle frame or the fixed lens on the spectacle frame based on the reasonable assembly and application of the single-drive bipolar displacement amplifier. In addition, the displacement amplifying device achieves the purposes of reducing the structural overall dimension, improving the adjustment precision and enhancing the stability by using the single-drive bipolar displacement amplifier.
Drawings
FIG. 1 is a schematic diagram of the schematic structure of a single-drive bipolar displacement amplifier of the present invention;
fig. 2 is a front view of the displacement amplification apparatus for optical axis adjustment of the present invention;
FIG. 3 is an exploded view of the displacement amplifying device for optical axis adjustment according to the present invention;
the device comprises a fixed seat 0, a first single-drive bipolar displacement amplifier 1, a second single-drive bipolar displacement amplifier 2, a 3-spectacle frame, a base 41, a first-level lever 42, a second-level lever 43, a driver 44, a first flexible hinge 45, a second flexible hinge 46 and a third flexible hinge 47.
Detailed Description
The following embodiments of the present invention are provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It should be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "suspended" and the like do not imply that the components are absolutely horizontal or suspended, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, it should be noted that, in the present invention, if the specific structures, connection relationships, position relationships, power source relationships, and the like are not written in particular, the structures, connection relationships, position relationships, power source relationships, and the like related to the present invention can be known by those skilled in the art without creative work on the basis of the prior art.
Example 1:
referring to fig. 1, there is shown a single drive bipolar displacement amplifier comprising a base 41, a primary lever 42, a secondary lever 43 and a driver 44.
Wherein, the base 41 and the first-level lever 42 are of L-shaped structures; one end of the primary lever 42 is connected with one end of the base 41 through a first flexible hinge 45, and the other end of the primary lever 42 is connected with the hinged end of the secondary lever 43 through a third flexible hinge 47.
The hinged end of the secondary lever 43 is also connected to the end of the base 41 via a second flexible hinge 46.
The driver 44 pushes the primary lever 42 to rotate around the base 41 through the first flexible hinge 45, so that the other end of the primary lever 42 pushes the secondary lever 43 to rotate around the base 41 through the second flexible hinge 46, and displacement amplification of the free end of the secondary lever 43 is completed.
Further, the primary lever 42 pushes the secondary lever 43 to rotate around the base 41 via the second flexible hinge 46 via the third flexible hinge 47.
Preferably, the driver 44 is a voice coil motor or a piezo ceramic material. The piezoelectric ceramic drive has the advantages of high control precision, high response speed, low power consumption and the like, is not easy to be interfered by electromagnetism, and has wide application in the aspects of actuation, transduction, sensing and the like.
Preferably, the driver 44 is fixed on the base 41. Further, the driver 44 is embedded in the plate of the base 41.
Through in the plate body with embedded in base 41 piezoceramics driver, reduced the overall dimension of structure, improved the adjustment accuracy, strengthened stability.
The single-drive bipolar displacement amplifier adopts the driver to drive the elastic body to enable the elastic body to generate rotary deformation around the flexible hinge, so that the free end of the elastic body generates displacement, and the amplified output of the displacement of the driver is realized at the free end of the elastic body. And moreover, the traditional piezoelectric ceramic displacement driving structural form is changed into a bipolar displacement amplifying structural form, the piezoelectric ceramic adjusting angle is increased, and the application range of the piezoelectric ceramic is expanded.
Example 2
Based on embodiment 1, referring to fig. 2 and 3, the invention also discloses: a displacement amplification apparatus for optical axis adjustment, the displacement amplification apparatus comprising: a first single-drive bipolar displacement amplifier 1, a second single-drive bipolar displacement amplifier 2 and a mirror bracket 3. The first single-drive bipolar displacement amplifier 1 and the second single-drive bipolar displacement amplifier 2 adopt the structure of the single-drive bipolar displacement amplifier described in embodiment 1.
The first single-drive bipolar displacement amplifier 1 is vertically arranged, the second single-drive bipolar displacement amplifier 2 is horizontally arranged, the fixed end of the second single-drive bipolar displacement amplifier 2 is fixed at the free end of the first single-drive bipolar displacement amplifier 1, and the pitching deflection adjustment of the second single-drive bipolar displacement amplifier 2 is completed through the first single-drive bipolar displacement amplifier 1.
The mirror bracket 3 is fixed at the free end of the second single-drive bipolar displacement amplifier 2, and the horizontal deflection adjustment of the mirror bracket 3 is completed through the second single-drive bipolar displacement amplifier 2. That is, the first single-drive bipolar displacement amplifier 1 and the second single-drive bipolar displacement amplifier 2 realize the pitch and horizontal yaw adjustment of the mirror holder.
Preferably, the displacement amplification device further comprises a fixed seat 0, and the fixed seat 0 is of a plate-shaped structure; the fixed end of the first single-drive bipolar displacement amplifier 1 is vertically fixed on the fixed seat 0.
Preferably, a plurality of through holes for accommodating fixing bolts are formed in the fixing base 0.
Preferably, the second single-drive bipolar displacement amplifier 2 is fixedly connected with the first single-drive bipolar displacement amplifier 1 through a bolt.
Preferably, the lens frame 3 is fixedly connected with the second single-drive bipolar displacement amplifier 2 through a bolt.
The displacement amplification device for optical axis adjustment of the invention completes the multi-dimensional optical axis adjustment of the spectacle frame or the lens fixed on the spectacle frame based on the reasonable assembly and application of the single-drive bipolar displacement amplifier. In addition, the displacement amplifying device achieves the purposes of reducing the structural overall dimension, improving the adjustment precision and enhancing the stability by using the single-drive bipolar displacement amplifier.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. A single-drive bipolar displacement amplifier, characterized in that it comprises a base (41), a primary lever (42), a secondary lever (43) and a driver (44);
wherein the base (41) and the primary lever (42) are of L-shaped structures;
one end of the primary lever (42) is connected with one end of the base (41) through a first flexible hinge (45), and the other end of the primary lever (42) is connected with the hinged end of the secondary lever (43) through a third flexible hinge (47);
the hinged end of the secondary lever (43) is also connected with the end of the base (41) through a second flexible hinge (46);
the driver (44) pushes the primary lever (42) to rotate around the base (41) through the first flexible hinge (45), so that the other end of the primary lever (42) pushes the secondary lever (43) to rotate around the base (41) through the second flexible hinge (46), and displacement amplification of the free end of the secondary lever (43) is completed.
2. A single drive bipolar displacement amplifier according to claim 1 wherein the driver (44) is a voice coil motor or a piezo-ceramic material.
3. A single-drive bipolar displacement amplifier as claimed in claim 1, wherein said driver (44) is fixed to a base (41).
4. A single drive bipolar displacement amplifier according to claim 3 in which the driver (44) is embedded in the body of the base (41).
5. A single drive bipolar displacement amplifier according to claim 1, wherein the primary lever (42) pushes the secondary lever (43) via a third flexible hinge (47) to rotate around the base (41) via a second flexible hinge (46).
6. A displacement amplification apparatus for optical axis adjustment, comprising: the device comprises a first single-drive bipolar displacement amplifier (1), a second single-drive bipolar displacement amplifier (2) and a mirror bracket (3);
the first single-drive bipolar displacement amplifier (1) is vertically arranged, the second single-drive bipolar displacement amplifier (2) is horizontally arranged,
the fixed end of the second single-drive bipolar displacement amplifier (2) is fixed at the free end of the first single-drive bipolar displacement amplifier (1), and the pitching and deflecting adjustment of the second single-drive bipolar displacement amplifier (2) is completed through the first single-drive bipolar displacement amplifier (1);
the lens bracket (3) is fixed at the free end of a second single-drive bipolar displacement amplifier (2), and the horizontal deflection adjustment of the lens bracket (3) is completed through the second single-drive bipolar displacement amplifier (2);
the first single-drive bipolar displacement amplifier (1) and the second single-drive bipolar displacement amplifier (2) adopt the structure of the single-drive bipolar displacement amplifier as claimed in claims 1 to 5.
7. The displacement amplification device according to claim 6, further comprising a fixing base (0), wherein the fixing base (0) is a plate-shaped structure;
the fixed end of the first single-drive bipolar displacement amplifier (1) is vertically fixed on the fixed seat (0).
8. The displacement amplification device according to claim 7, characterized in that the holder (0) is provided with through-holes for receiving fixing bolts.
9. The displacement amplification device according to claim 6, wherein the second single-drive bipolar displacement amplifier (2) is fixedly connected with the first single-drive bipolar displacement amplifier (1) through bolts.
10. The displacement amplification device according to claim 6, wherein the frame (3) is fixedly connected to the second single-drive bipolar displacement amplifier (2) by means of bolts.
CN202211264893.1A 2022-10-17 2022-10-17 Single-drive bipolar displacement amplifier and displacement amplification device for optical axis adjustment Pending CN115614616A (en)

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CN202211264893.1A CN115614616A (en) 2022-10-17 2022-10-17 Single-drive bipolar displacement amplifier and displacement amplification device for optical axis adjustment

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101286369A (en) * 2008-06-05 2008-10-15 上海交通大学 X-Y-Z three freedom degree tandem type nanometer grade microposition workstation
WO2011144591A1 (en) * 2010-05-17 2011-11-24 Mindray Medical Sweden Ab Mechanical amplifier, system of said amplifiers and method for mechanically amplification of a motion
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN108761961A (en) * 2018-05-23 2018-11-06 西北工业大学 A method of realizing space camera focusing with flexible amplification mechanism
CN210780604U (en) * 2019-11-04 2020-06-16 潍坊聚德电子有限公司 Miniature clamp
CN112388370A (en) * 2020-11-13 2021-02-23 山东大学日照智能制造研究院 Piezoelectric ceramic driven large-stroke constant-force fast knife servo device
CN113856997A (en) * 2021-11-09 2021-12-31 上海盛普机械制造有限公司 Bilateral actuating injection dispensing valve with two-stage amplification mechanism and glue injection method thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101286369A (en) * 2008-06-05 2008-10-15 上海交通大学 X-Y-Z three freedom degree tandem type nanometer grade microposition workstation
WO2011144591A1 (en) * 2010-05-17 2011-11-24 Mindray Medical Sweden Ab Mechanical amplifier, system of said amplifiers and method for mechanically amplification of a motion
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN108761961A (en) * 2018-05-23 2018-11-06 西北工业大学 A method of realizing space camera focusing with flexible amplification mechanism
CN210780604U (en) * 2019-11-04 2020-06-16 潍坊聚德电子有限公司 Miniature clamp
CN112388370A (en) * 2020-11-13 2021-02-23 山东大学日照智能制造研究院 Piezoelectric ceramic driven large-stroke constant-force fast knife servo device
CN113856997A (en) * 2021-11-09 2021-12-31 上海盛普机械制造有限公司 Bilateral actuating injection dispensing valve with two-stage amplification mechanism and glue injection method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘敏;张宪民;: "基于类Ⅴ型柔性铰链的微位移放大机构", 光学精密工程, no. 04, 15 April 2017 (2017-04-15), pages 467 - 476 *

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