CN102107370B - Compensation mechanism - Google Patents

Compensation mechanism Download PDF

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Publication number
CN102107370B
CN102107370B CN201010577312A CN201010577312A CN102107370B CN 102107370 B CN102107370 B CN 102107370B CN 201010577312 A CN201010577312 A CN 201010577312A CN 201010577312 A CN201010577312 A CN 201010577312A CN 102107370 B CN102107370 B CN 102107370B
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China
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flexible hinge
walking
leg
unit
compensation
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CN102107370A (en
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王珉
蒋红宇
余路
王宇波
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Commercial Aircraft Corp of China Ltd
Shanghai Aircraft Manufacturing Co Ltd
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Commercial Aircraft Corp of China Ltd
Shanghai Aircraft Manufacturing Co Ltd
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Abstract

The invention discloses a compensation mechanism, which comprises a first directional motion piece, a second directional motion piece, a first flexible hinge and a second flexible hinge, wherein the first flexible hinge and the second flexible hinge respectively form a four-connecting rod structure having two first directional connecting rods and two second directional connecting rods; the first directional motion piece is fixedly connected with one of the first directional connecting rods of the first flexible hinge; the second directional motion piece is fixedly connected with one of the second directional connecting rods of the second flexible hinge; and the other one of the first directional connecting rods of the first flexible hinge is fixedly connected with the other one of the second directional connecting rods of the second flexible hinge. The compensation mechanism is particularly used for a walking and positioning device and provides stable motion compensation on an XY plane through a simple structure, so that an actuator in the walking and positioning device can be aligned with the normal direction of a workpiece.

Description

Compensation mechanism
Technical field
The present invention relates to compensation mechanism, especially, relate to the compensation mechanism that is used on a kind of walking positioning device.
Background technology
In order to satisfy the requirement of present generation aircraft high life, guarantee the security and the reliability of mechanical connection, the developing direction that the riveting technology becomes mounting technology is bored in automation drilling even automation.As the novel automatic assembly system, through the ambulation positioning device of a kind of pair of framework eight leg formulas, mix corresponding end effector, can be adsorbed in the surface of aircraft product, automatic drilling is carried out at the mechanical connection position.
In this mechanism, can realize the motion of X, Y, Z direction; Yet; If this mechanism can guarantee that at the target place main shaft overlaps with the rigging position normal direction of surface of the work, then also need A (rotate) direction, B (rotating) around the Y direction around directions X the motion of direction is so that thus the framework of this mechanism can tilt and adjusts the actuator on the framework around the front and back pitching of Y direction around directions X.Yet, in inclination or elevating movement, for example in the process of steeving backward of Y axle; If two the up-down legs in rear end on hypothesis inner frame or the outside framework are fixed; Two up-down legs of front end will extend, and in the process of elongation, the terminal vacuum cup of all up-down legs but is adsorbed on the surface of the work always; Be again vertical relation between framework and the up-down leg simultaneously, then the up-down leg of inevitable requirement front end has the fine motion displacement could guarantee that this motion of steeving can realize on directions X.In like manner, if framework has the fine motion displacement could guarantee that banking motion can realize on the Y direction around the X axle inevitable requirement up-down leg that tilts then.
Present motion, mainly divide two kinds: a kind of mechanism that is based on one type of line slideway, another kind is based on the linkage that flexible hinge is formed.Wherein, line slideway mechanism can realize a certain direction or the big stroke motion of both direction; Flexure hinge mechanism is through elastic deformation and then realize a certain direction or the accurate travel incognito journey motion of both direction; It is as small size, the friction of nothing machinery, no gap and the high transmission mechanism of autokinesis; Be widely applied to the occasion of various requirement micro-displacement or angular displacement and hi-Fix, like the application of flexible hinge at one Chinese patent application CN200910084022.X.Yet, be the demand that guide rail mechanism or flexure hinge mechanism all can't be realized above-mentioned relevant fine motion displacement.
Summary of the invention
For the fine motion compensation of X, Y direction is provided, the present invention proposes a kind of compensation mechanism, it comprises: first direction movement parts, second direction movement parts, first flexible hinge and second flexible hinge.Wherein, First flexible hinge and second flexible hinge all form the four-bar linkage structure with two first direction connecting rods and two second direction connecting rods; One of them of the first direction connecting rod of said first direction movement parts and said first flexible hinge is fixedly connected; One of them of the second direction connecting rod of the second direction movement parts and second flexible hinge is fixedly connected, and another of the second direction connecting rod of another in the first direction connecting rod of first flexible hinge and second flexible hinge is fixedly connected.
Preferably, said first direction movement parts and said second direction movement parts are respectively slide rail.
More preferably, said compensation mechanism comprises the cross rail, and said slide rail is the slide rail in the said cross rail.
More preferably, the slide rail in the said cross rail all is fixedly connected with second flexible hinge with said first flexible hinge through a connecting piece.
More preferably, said fixed connection is that welding, screwing, bolt connect one of them person.
Preferably, common " returning " font that is similar to of forming of said first flexible hinge and second flexible hinge.
Preferably, common " Lu " font that is similar to of forming of said first flexible hinge and second flexible hinge.
Preferably, the breach of said first flexible hinge and second flexible hinge is circular arc type, straight beam type or ellipse.
Preferably, said compensation mechanism is applied in a kind of walking positioning device.
The characteristics of this position compensation are: be generally less than 5mm on each direction, than the little one magnitude of general straight-line stroke, also than the big one magnitude of general micromotion mechanism stroke; This compensation will be adjusted according to the angle of reality adjustment in real time, is that the up-down of up-down leg produces the passive compensation that the position at the sucker place of framework and up-down leg concerns; This mechanism is small and exquisite, and architecture quality is not too much increased; There is not the gap in this mechanism yet, thereby mechanism precision is not exerted an influence.
Compensation mechanism of the present invention; Be particularly useful for the passive compensation mechanism in the walking positioning device, use simpler structure to provide motion compensation stably on the XY plane so that the actuator in the walking positioning device can align with the normal orientation of workpiece.
Description of drawings
Fig. 1 is the installation diagram of walking positioning device according to the preferred embodiment of the present invention;
Axis side view when Fig. 2 does not cooperate for walking mechanism among Fig. 1;
Fig. 3 is the axis side view of the axisymmetric part of the relative X in the first walking unit of walking mechanism among Fig. 2;
Fig. 4 is the axis side view of the second walking unit of walking mechanism among Fig. 2;
Fig. 5 is the axis side view of the part of the second walking unit of walking mechanism among Fig. 4 and the enlarged drawing of compensation mechanism;
Fig. 6 is equipped with the axis side view of detent mechanism for the second walking unit of walking mechanism among Fig. 4;
Fig. 7 is the axis side view at the positioning unit of first direction location that is used for of detent mechanism among Fig. 6;
Fig. 8 is the installation diagram of up-down leg among Fig. 1;
Fig. 9 is the explosive view of up-down leg among Fig. 8;
Figure 10 is the profile of up-down leg among Fig. 8;
Figure 11 is installed on the installation diagram of up-down leg connecting plate and framework connecting plate for compensation mechanism;
Figure 12 a is the front view of Figure 11;
Figure 12 b is the rearview of Figure 11;
Figure 12 c is the vertical view of Figure 11;
Figure 13 is the explosive view of Figure 11.
Similar features among the different figure is by similar Reference numeral indication.
The specific embodiment
The relation of directions X hereinafter described, Y direction and Z direction does, directions X is vertical each other at horizontal plane with the Y direction, and the Z direction is all vertical with the Y direction with directions X at vertical plane, still, be appreciated that X, Y and Z direction all be refer to and nonspecific.
As shown in Figure 1, walking positioning device (10) comprises walking mechanism (11), detent mechanism (12), actuator (not shown) and central processing unit (not shown).The assembly area of appointment can advanced and arrive to the instruction that said walking mechanism (11) is sent according to central processing unit on the surface of workpiece; Said detent mechanism (12) is used for carrying out accurate X, Y to the location in the assembly area; Promptly seek X, Y coordinate and actuator is moved to the specified coordinate place according to instruction that central processing unit sent; Said actuator has performance element such as boring bar tool; It is holed like normal direction according to the assembling executable operations that the instruction of central processing unit is correlated with on the surface of workpiece.
Below, the structure of walking mechanism (11) is described in conjunction with Fig. 2, Fig. 3, Fig. 4 and Fig. 5 particularly.
Walking mechanism (11) comprises the first walking unit (11a), the second walking unit (11b) and driver element (11c).
The said first walking unit (11a) has the outside framework (100) and the up-down leg (200) of rigidity.Said outside framework (100) is made up of two crossbeams parallel on directions X (101); Said crossbeam (101) is substantially cuboid; It has medial surface (101a), end face (101b) and end faces of both sides (101c); Have several holes on the said medial surface (101a), two are fixed on the medial surface (101a) of crossbeam via several securing members such as screw at walking guide rail (102) parallel on the directions X.Selectively, said driver element (11c) is a motor leading screw driving mechanism, and particularly, it comprises running motor (103), shaft coupling (104), walking leading screw (105) and feed screw nut (106).Shaft coupling (104) is connected the output shaft of running motor (103) with walking leading screw (105); Feed screw nut (106) rotatably is fixed on the walking leading screw (105), and a holder (107) and a supporting seat (108) are fixed in running motor (103) and walking leading screw (105) on the end face (101b).Two all L-shaped stators (109) are used for outside framework (100) and up-down leg (200) are interfixed.More excellent ground also has compensation mechanism (11d) between said outside framework (100) and the said up-down leg (200), and an end of aforementioned L shaped stator (109) is fixed on the outside framework (100), and the other end is fixed on the compensation mechanism (11d) that is connected with the leg that goes up and down (200).Above-mentioned outside framework also can be fixedly connected sequentially and be formed rectangular frame by four crossbeams, and said driver element can adopt other type of drive, like the line motor driving mechanism.
The said second walking unit (11b) has the inner frame (300) and the up-down leg (200) of rigidity.Said inner frame (300) by four crossbeams (301) that are cuboid substantially in turn head and the tail be fixed together and form the quadra structure.Wherein, said crossbeam (301) all has medial surface (301a), end face (301b) and lateral surface (301c).The lateral surface (301c) that makes progress two crossbeams (301) parallel at X is fixed with two slide blocks (302) respectively.For the ease of understanding; Slide block among the figure (302) combines with walking guide rail (102); When outside framework (100) and inner frame (300) when being assembled together, the groove on the slide block (302) of inner frame (300) can cooperatively interact together with the walking guide rail (102) of outside framework (100) and can upwards slide at X along walking guide rail (102).Said four up-down legs (200) are fixed in the inboard of inner frame (300) by L-shaped stator (109) respectively and are close proximity to the bight of quadra structure respectively.A wherein end of said stator (109) is fixed on the medial surface (301a) of crossbeam (301), and the other end is fixed on the up-down leg (200).One nut contiguous block (303) is fixed on the end face (301b) of a crossbeam (301) with slide block (302).More excellent ground also has compensation mechanism (11d) between said inner frame (300) and the said up-down leg (200), and an end of aforementioned fixation sheet (109) is fixed on the inner frame (300), and the other end is fixed on the compensation mechanism (11d) that is connected with the leg that goes up and down (200).
Selectively; Said driver element also can be provided with in the following manner; That is: motor is connected with shaft coupling with leading screw and is fixed in the second walking unit through a supporting seat and holder; Feed screw nut rotatably is fixed on the leading screw, and a nut contiguous block one end is fixed in feed screw nut, and the other end is fixed in the first walking unit.
Selectively, the walking guide rail can be arranged on the lateral surface of inner frame of the second walking unit, and correspondingly, slide block can be arranged on the medial surface of outside framework of the first walking unit, like this, still can realize the object of the invention.
In the present invention, use the mode of slide block-guide rail to realize the guiding between the first walking unit and the second walking unit, be appreciated that other guidance mode of the prior art can be used at this.
In addition; In embodiments of the present invention, the first walking unit is the structure of outside framework and up-down leg, and the second walking unit is the structure of inner frame and up-down leg; In other embodiment; The first walking unit also can be the structure of outside framework and up-down leg, and simultaneously, the second walking unit is the structure of inner frame and up-down leg.In other words; Can be provided with like this: the first walking unit has square inner frame; The walking guide rail is arranged at the lateral surface of inner frame respectively; The second walking unit has square outside framework, and slide block is arranged at corresponding to the walking guide rail of the first walking unit on the medial surface of outside framework of the second walking unit; The up-down leg lays respectively at the end of outside framework and inner frame, on the direction perpendicular to outside framework or inner frame, extends, and the one of which end is fixed on outside framework or the inner frame, and the other end is fixed on the workpiece separatably.
It will be appreciated by those skilled in the art that; When inside and outside framework is the frame structure that four crossbeams are connected in sequence; Can outside outside framework, connect the third line again and walk the unit, this third line is walked unit class and is similar to the first walking unit in the embodiment of the present invention, and on direction of travel just perpendicular to the first walking unit; It is identical or similar with connection and type of drive between the second walking unit with the first walking unit with connection between the first walking unit and type of drive that the third line is walked the unit; The difference leg that only is respectively to go up and down in the walking process is different with absorption between the workpiece or the order that breaks away from, like this, walking mechanism not only can be on workpiece towards X to walking; And can be in upwards walking of Y, the domain of walk will be bigger automatically.
The concrete structure of said up-down leg (200) and compensation mechanism (11d) will be addressed in the back.
Below, in conjunction with Fig. 6 and Fig. 7 the structure of detent mechanism (12) is described particularly.
Referring to Fig. 6, said detent mechanism (12) comprises the positioning unit (12a) that is used in first direction location, is used for the positioning unit (12b) in the second direction location.In embodiment of the present invention, said first direction be X to, said second direction be Y to, X is to vertical to each other with Y.In conjunction with Fig. 7, said X to positioning unit (12a) have X to driven unit (400) and X to guide (500).Particularly, said X to driven unit (400) be motor leading screw driving mechanism, it comprise X to motor (401), shaft coupling (402), X to leading screw (403) and feed screw nut (404).Said X to guide (500) be along the guide plate (501) of X to the strip that extends, have two on the side of guide plate (501) and make progress parallel X to guide rail (502) at X, the two ends of guide plate (501) also have a bump contacted chip (503) respectively.Have holder fixing lug boss (504) and slide block fixing lug boss (505) on a slice of said brace (503), another bump contacted chip relative with it has supporting seat fixing lug boss (506) and slide block fixing lug boss (505).Wherein, Be fixed with two slide blocks (507) on the said every slide block fixing lug boss (505) respectively; Said X is fixed on the holder fixing lug boss (504) to motor (401) and holder (509); Supporting seat (510) is fixed on the supporting seat fixing lug boss (506), and said X rotatably is fixed on the actuator installing plate (12c) to the feed screw nut (404) on the leading screw (403).Corresponding to aforementioned X to guide rail (502); Said actuator installing plate (12c) has two slide blocks (508) that have groove on the side, the groove of said two slide blocks (508) and X to guide rail (502) thus the said slide block (508) that mutually combines can slide in guide rail (502) at X.The slide block of being fixed on the brace (503) at guide plate (501) two ends (507) matches to guide rail (700) with the following Y that will be illustrated respectively.
Said Y to positioning unit have Y to driven unit (600) and Y to guide rail (700).Particularly, said Y to driven unit (600) be motor leading screw driving mechanism, it comprise Y to motor (601), shaft coupling (602), Y to leading screw (603) and feed screw nut (604).Said Y is separately positioned on two on Y makes progress the medial surface (301a) of parallel crossbeam (301) to guide rail (700), and on each medial surface, is provided with two Y to guide rail (700).Wherein, supporting seat (605) and holder (606) are separately fixed at the both sides of the end face (301b) of crossbeam (301), and Y rotatably is fixed on the crossbeam through supporting seat (605) and holder (606) to leading screw (603).Y is connected through shaft coupling (602) to leading screw (603) with Y to the output shaft of motor (601), the feed screw nut (604) of Y on leading screw (603) with fix through nut contiguous block (511) to a brace (503) of motor (401) away from X.
Be appreciated that X to driven unit and Y to driven unit can also adopt other drive form, for example line motor drives.
Below, the structure of up-down leg (200) is described in conjunction with Fig. 8, Fig. 9 and Figure 10 particularly.
Said up-down leg (200) has leg fixed part (200a), leg lifting unit (200b), is located at up-down driver element (200c) and the terminal extracting actuator (200d) of said leg lifting unit between said leg fixed part (200a) and the leg lifting unit (200b).
Particularly; As shown in Figure 9; Leg fixed part (200a) is substantially a hollow housing, and the top of this housing has hole (201) and to the fixing lug boss (202) of upper process, the housing bottom has opening (203); Be provided with two slide blocks (204) (for the ease of understanding, the slide block among the figure is in the state that combines with guide rail) abreast in the left and right sides of the inner surface in the inner part of housing.Leg lifting unit (200b) is the drawer-like of opening laterally; The top is provided with the hole (not shown); The bottom is provided with hole (205); Said top also is installed with a stator (207) with centre bore (206), and said leg lifting unit (200b) also is provided with two parallel Z to guide rail (208) in a longitudinal direction corresponding to the slide block (204) of leg fixed part (200a).Selectively, up-down driver element (200c) is a motor leading screw driving mechanism.Said motor leading screw driving mechanism comprise Z to motor (209), shaft coupling (210), Z to leading screw (211) and feed screw nut (212).Z is fixed on the fixing lug boss (202) of leg fixed part (200a) to motor (209); Shaft coupling (210) is positioned between the housing end face of fixing lug boss (202) and leg fixed part (200a) of leg fixed part (200a); Z is connected and rotatably fixing by the holder (213) that is fixed in leg fixed part (200a) top end face to motor drive shaft through shaft coupling (210) and Z to an end of leading screw (211); The other end passes the topped hole of hole (206) and leg lifting unit (200b) on the stator (207) of hole (201), leg lifting unit (200b) of leg fixed part (200a) and rotatably fixing by the supporting seat (214) that is fixed in leg fixed part (200a) medial surface, and feed screw nut (212) is fixed with each other through the stator (207) of securing member such as screw and leg lifting unit (200b).Leg lifting unit (200b) is connected with an end of connecting rod (217) through the ball bearing of being located in the hole, bottom (205) (216), and the other end of connecting rod (217) is connected with extracting actuator (200d), and preferably, said extracting actuator is a vacuum cup.
Be appreciated that up-down driver element of the present invention also can adopt other type of drive, for example the line motor driving mechanism.
In addition, also two parallel guide rails can be set on the leg fixed part, the leg lifting unit be provided with the leg fixed part on guide rail two slide blocks combining and can slide along guide rail.Get final product so long as can realize the guide effect between leg fixed part and the leg lifting unit.
The following operation principle of explanation up-down leg (200) earlier.
Up-down leg (200) is accepted after the order of motion, can start Z to motor (209) from the relevant Z of central processing unit; Z drives Z to motor (209) through shaft coupling (210) and rotates to leading screw (211); Z drives feed screw nut (212) in upwards translation up and down of Z again to leading screw (211); Because feed screw nut (212) is fixed together with leg lifting unit (200b); The Z of leg lifting unit (200b) mutually combines with the slide block (204) of leg fixed part (200a) again to guide rail (208) slidably, thus feed screw nut (212) can drive leg lifting unit (200b) at leg fixed part (200a) upper edge Z to slip, thereby can be provided in the accurate movement control that Z makes progress.Because leg lifting unit (200b) is connected through ball bearing (216) with the connecting rod that is connected to vacuum cup (217), thereby can guarantee the universal rotation about 10 degree.Further, up-down leg (200) is accepted relevant XY from central processing unit after the order of motion, thereby the stress level that can control in the vacuum cup can optionally unclamp vacuum cup and vacuum cup and surface of the work are sucked.Particularly, can understand with reference to the motion of following relevant walking mechanism (11).
When walking mechanism (11) and up-down leg (200) receive from the relevant XY of central processing unit after the order of motion; The up-down leg (200) of the first walking unit (11a) in the walking mechanism (11) is fixed with workpiece; The up-down leg (200) of the second walking unit (11b) breaks away from workpiece; Thereupon, driver element (11c) in the walking mechanism (11) drives the walking along the first walking unit (11a) of the second walking unit (11b), reach predetermined stroke after; The second walking unit (11b) stops; Its up-down leg (200) is fixed with workpiece, and the up-down leg (200) of the first walking unit (11a) breaks away from workpiece, walks along the second walking unit (11b) and reach predetermined stroke in driver element (11c) the meeting driving first walking unit (11a).This process of continuing just can arrive predetermined assembly area, more specifically explains below in conjunction with concrete parts.
The most at the beginning, this device is placed in surface of the work, relies on vacuum cup to adsorb mutually with surface of the work.
When central processing unit sends mobile order; The terminal vacuum cup of up-down leg (200) on the inner frame (300) all unclamps; Leg lifting unit (200b) along leg fixed part (200a) at Z to rising a predetermined stroke; Running motor (103) drives walking leading screw (105) through shaft coupling (104) and turns clockwise; Walking leading screw (105) drives feed screw nut (106) and is expert at and holds level with both hands on the leading screw (105) movingly to the right, because feed screw nut (106) fixes through nut contiguous block (303) and inner frame (300), and the slide block (302) of inner frame (300) combines with the walking guide rail (102) of outside framework (100) slidably; Therefore, nut contiguous block (303) will drive inner frame (300) and moves to right-hand member along the walking guide rail (102) of outside framework (100).After inner frame (300) moved to a predetermined stroke, inner frame (300) stopped, and the leg lifting unit (200b) of the up-down leg (200) on it descends along leg fixed part (200a), and its terminal vacuum cup is adsorbed on the workpiece.Meanwhile, the terminal vacuum cup of the up-down leg (200) on the outside framework (100) all unclamps, and leg lifting unit (200b) rises along leg fixed part (200a); Running motor (103) drives walking leading screw (105) and is rotated counterclockwise; Because inner frame this moment (300) is motionless, the walking leading screw (105) that is rotated counterclockwise inner frame (300) relatively moves right, and moves right thereby drive outside framework (100); After reaching predetermined stroke; Outside framework (100) stops, and (200b's leg lifting unit of the up-down leg (200) on it descends along leg fixed part (200a), and its terminal vacuum cup is adsorbed on the workpiece.Like this, said walking mechanism (11) has just been accomplished the walking of a stroke.So repeated multiple times can arrive predetermined assembly area.
Though walking mechanism (11) arrives predetermined assembly area, but on behalf of actuator, this just can carry out fittage, because fittage is normally carried out at a specified coordinate point as holing.That is, also need this moment detent mechanism (12) in predetermined assembly area, to find this coordinate points.
Below, just combine concrete parts to explain how detent mechanism (12) moves after walking mechanism (11) arrives predetermined assembly area.
Central processing unit calculates actuator distance objective position at X upwards and the distance that makes progress at Y and send move to motor (401) and Y to motor (601) to the X of detent mechanism (12) according to current actuator position.X to motor (401) thus can clockwise or be rotated counterclockwise after receiving instruction and drive X through shaft coupling (402) and rotate to leading screw (403); Simultaneously; X moves up at X to the rotating band movable wire thick stick nut (404) of leading screw (403); Because feed screw nut (404) is fixing with actuator installing plate (12c); And actuator installing plate (12c) combines to guide rail (502) with X on the guide plate (501) through the slide block (508) of side slidably, and therefore, feed screw nut (404) just drives actuator installing plate (12c) and advances or retreat to guide rail (502) along X.Likewise; Y to motor (601) thus can clockwise or be rotated counterclockwise after receiving instruction and drive Y through shaft coupling (602) and rotate to leading screw (603); Simultaneously; Y moves up at Y to the rotating band movable wire thick stick nut (604) of leading screw (603), because the brace (503) of feed screw nut (604) and guide plate (501) one ends fixes through nut contiguous block (511), and guide plate (501) two ends are passed through the slide block (507) of connecting plate (503) and combined slidably to guide rail (700) with Y on the inner frame (300); Therefore, feed screw nut (604) just drives guide plate (501) and moves to guide rail (700) along Y.Like this, detent mechanism (12) just can move to assigned address with actuator.
After moving to assigned address along curved surface; Be installed in actuator on the actuator installing plate (12c) detect the normal direction of assigned address and the X through inner frame (300) to motor (401) and Y to motor (601) carry out once more X to Y to fine setting; Simultaneously; Through Z to motor (209) carry out Z to the fine setting of a angle (promptly around the X rotational axis direction), b angle (promptly around the Y rotational axis direction), thereby the main shaft that guarantees actuator overlaps with the normal direction of assigned address.
In addition, when normal direction was adjusted, the compensation mechanism that framework and up-down leg are linked together can carry out the position compensation of XY direction.At this, compensation mechanism is as a standalone module, and its design alteration can't have influence on the miscellaneous part of this device, and this mechanism also can adjust angular range according to normal direction and change.
Below, will be specifically the visible subsidy structure of repaying mechanism (11d).
In conjunction with Fig. 2 and Fig. 5, compensation mechanism (11d) is arranged between the framework (100,300) and up-down leg (200) of walking positioning device (10), is used to compensate the shift in position that is caused by the normal direction adjustment, and as shown in the figure, dotted line inside is exactly compensation mechanism among Fig. 5.
Referring to Figure 11-13, compensation mechanism (11d) mainly comprises first direction movement parts (20), second direction movement parts (30), first flexible hinge (40) and second flexible hinge (50).Wherein, First flexible hinge (40) and second flexible hinge (50) all form the four-bar linkage structure with two first direction connecting rods and two second direction connecting rods; One of them of the first direction connecting rod of said first direction movement parts (20) and said first flexible hinge (40) is fixedly connected; One of them of the second direction connecting rod of second direction movement parts (30) and second flexible hinge (50) is fixedly connected, and another of the second direction connecting rod of another in the first direction connecting rod of first flexible hinge (40) and second flexible hinge (50) is fixedly connected.Here, first direction refers to directions X, and second direction refers to the Y direction.Directions X movement parts and Y direction movement parts are preferably slide rail.
In compensation mechanism of the present invention (11d); First direction movement parts (20) and second direction movement parts (30) have adopted has X to slide rail (21), the Y cross rail (24) to slide rail (22) and slide block (23); When Z does not hope again X, Y when moving the too much restriction of do, to adopt cross rail (24) to play and resist the effect of Z to load to having than big load simultaneously.
Above-mentioned flexible hinge is widely used in fields such as precision optical machinery, accurate measurement, micron technology and nanometer technology at present; It is to rely on the distortion of flexible element to come transmitting moving and power; Its material adopts metal material (like spring steel) usually, and the middle part of flexible hinge is comparatively weak, under moment loading, can produce significantly angular flexibility distortion; Therefore, can in frame for movement, play the effect of hinge.By form, flexible hinge can be divided into monolateral and bilateral shape, and by notch geometry, it can be divided into straight beam formula, (partly) circular arc type, elliptic, parabolic etc.Flexible hinge has advantage: simple in structure, motion steadily, need not to lubricate, no rollback idle running, do not have rub, high accuracy.In the present invention, mainly utilized the flexible hinge compact conformation, the characteristics stably of moving, after the compensation mechanism motion compensation, can return to original state through the elastic recovery characteristic of flexible hinge.First flexible hinge and second flexible hinge can adopt circular arc type, straight beam type or disciform breach.Wherein, the kinematic accuracy of the flexible hinge of circular arc type breach is higher, but movement travel receives very big restriction, can only realize the rotation of small amplitude; The flexible hinge of straight beam type breach has bigger slewing area, but kinematic accuracy is relatively poor, and center of rotation has tangible deflection in rotation process; The flexible hinge of ellipse breach is the above two compromise.In compensation mechanism of the present invention, the breach of described first flexible hinge (40) and second flexible hinge (50) is circular arc type.
Shown in figure 13; First flexible hinge (40) is positioned at the inside of second flexible hinge (50) and fixes through the second direction connecting rod (51) of a first direction connecting rod (41) with second flexible hinge (50), and the dual hinge structure after fixing is " returning " font substantially.Selectively; First flexible hinge (40) also can be positioned at the outside of second flexible hinge (50); Imagination is turned to the left side of second direction connecting rod (51) to first flexible hinge (40) among the figure along the second direction connecting rod (51) of second flexible hinge (50) of its connection, and the hinge arrangement of such being " Lu " font still can be realized the object of the invention.Being appreciated that first flexible hinge (40) and second flexible hinge (50) can be as shown in the figure small one and large one, also can be identical size.
In conjunction with Figure 11; Y is fixed on the horizontal connecting portion (109a) of brace (109) to slide rail (22); X interfixes through threaded fastener such as screw to the rail fixing part (25a) of slide rail (21) and up-down leg connecting plate (25); Rail fixing part (25a) fixes through the first direction connecting rod (42) of welding manner and first flexible hinge (40) again; A vertical connecting portion (26a) of framework connecting plate (26) fixes with the vertical connecting portion (109b) of brace (109); A horizontal connecting portion (26b) welds with the second direction connecting rod (52) of second flexible hinge (50) mutually, and another the vertical connecting portion of framework connecting plate (26) and the framework of walking positioning device fix.Wherein, up-down leg connecting plate (25) can be made different shapes according to actual needs with framework connecting plate (26).
Under suitable driving force; Link motion will take place for " frame " with the part that fixes with framework connecting plate (26) in second flexible hinge (50); Again because the rigidity of flexible hinge remainder except arc gap is very big; Therefore, second flexible hinge (50) moves upward at Y haply, though Y to motion produced X to displacement also since very I to ignore.In like manner; First flexible hinge (40) is very big in the Y rigidity that makes progress; Under suitable driving force, it can be that link motion takes place " frame " with second flexible hinge (50), and moves upward at X haply; Even X to motion produced Y to displacement, also since Y can ignore to displacement is very small.
Detect when central processing unit and promptly send framework (100,300) after the normal orientation of workpiece around directions X or around the Y direction or simultaneously around the instruction of X, the motion of Y direction; Thereby; The leg rising (or decline) of partly going up and down tilts framework (100,300) or front and back pitching or the existing motion that tilts and the front and back pitching is arranged; Like this, between framework (100,300) and the up-down leg (200) relative motion will take place.That is, between up-down leg connecting plate (25) and the framework connecting plate (26) in the Y direction or at directions X or not only in the Y direction but also in directions X generation relative motion.Under suitable driving force effect; The slide block (23) that up-down leg connecting plate (25) just drives cross rail (24) moves upward at Y to slide rail (22) along Y, because up-down leg connecting plate (25) interfixes with first flexible hinge (40), first flexible hinge (40) is fixing with second flexible hinge (50) again; So; Up-down leg connecting plate (25) will make second flexible hinge (50) " follow " as drive source and do link motion, when reach Y to compensation rate after, the said mechanism stop motion; When taking seriously suction disk detachment surface of the work, because the elastic force of flexible hinge, up-down leg (200) and framework (100,300) return to initial position relation again.In like manner, under suitable driving force effect, the X that up-down leg connecting plate (25) just drives cross rail (24) to slide rail (21) along slide block (23) thus X move upward drive first flexible hinge (40) " follow " do link motion and realize X to compensation.The stack of X to upwards all compensating with Y then through above-mentioned action be appreciated that if can realize.
Selectively; As shown in the figure, in four compensation mechanisms of inner frame (300), a compensation mechanism upwards all is fixed at X, Y; A compensation mechanism upwards all can compensate at X, Y; A compensation mechanism is made X only and is made Y only to compensation to compensation, a compensation mechanism, and four compensation mechanisms of outside framework all can be confirmed the uniqueness that compensates in upwards compensation of X, Y like this.
At last, do not receive extraneous effect of dust in order to make this device, the flying chip that produces during especially for fear of assembling influences the precision of device, and this device can also be provided with a protective cover.
The present invention is limited to the illustrative embodiments that in specification and accompanying drawing, appears never in any form.All combinations of the embodiment that illustrates and describe (part) are interpreted as clearly to incorporate within this specification and be interpreted as clearly and fall in the scope of the present invention.And in the scope of summarizing like claims of the present invention, a lot of distortion are possible.In addition, should any reference marker in claims be configured to limit scope of the present invention.

Claims (9)

1. compensation mechanism; Comprise: first direction movement parts, second direction movement parts, first flexible hinge and second flexible hinge; Wherein, First flexible hinge and second flexible hinge all form the four-bar linkage structure with two first direction connecting rods and two second direction connecting rods; One of them of the first direction connecting rod of said first direction movement parts and said first flexible hinge is fixedly connected, and one of them of the second direction connecting rod of the second direction movement parts and second flexible hinge is fixedly connected, and another of the second direction connecting rod of another in the first direction connecting rod of first flexible hinge and second flexible hinge is fixedly connected.
2. mechanism according to claim 1, wherein, said first direction movement parts and said second direction movement parts are respectively slide rail.
3. mechanism according to claim 2, wherein, said compensation mechanism comprises the cross rail, said slide rail is the slide rail in the said cross rail.
4. mechanism according to claim 3, wherein, the slide rail in the said cross rail all is fixedly connected with second flexible hinge with said first flexible hinge through a connecting piece.
5. mechanism according to claim 4, wherein, the slide rail in the said cross rail is that welding, screwing, bolt are connected one of them person through a connecting piece with the form of said first flexible hinge and the fixed connection of second flexible hinge.
6. mechanism according to claim 1, wherein, common " returning " font that is similar to of forming of said first flexible hinge and second flexible hinge.
7. mechanism according to claim 1, wherein, common " Lu " font that is similar to of forming of said first flexible hinge and second flexible hinge.
8. mechanism according to claim 1, wherein, the breach of said first flexible hinge and second flexible hinge is circular arc type, straight beam type or ellipse.
9. mechanism according to claim 1, wherein, said compensation mechanism is applied in a kind of walking positioning device.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5472029A (en) * 1994-08-09 1995-12-05 Ketch; Andrew D. Saw guide
EP1048924A2 (en) * 1999-04-28 2000-11-02 Juri F. Jourtchenko High-precision work table for a projector
CN101286369A (en) * 2008-06-05 2008-10-15 上海交通大学 X-Y-Z three freedom degree tandem type nanometer grade microposition workstation
CN101417424A (en) * 2008-11-22 2009-04-29 燕山大学 Three-dimensional translation micro-operation hand
CN101786269A (en) * 2010-01-26 2010-07-28 重庆大学 Micrometer-nanometer transmission platform

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5472029A (en) * 1994-08-09 1995-12-05 Ketch; Andrew D. Saw guide
EP1048924A2 (en) * 1999-04-28 2000-11-02 Juri F. Jourtchenko High-precision work table for a projector
CN101286369A (en) * 2008-06-05 2008-10-15 上海交通大学 X-Y-Z three freedom degree tandem type nanometer grade microposition workstation
CN101417424A (en) * 2008-11-22 2009-04-29 燕山大学 Three-dimensional translation micro-operation hand
CN101786269A (en) * 2010-01-26 2010-07-28 重庆大学 Micrometer-nanometer transmission platform

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
王红艳 等.基于柔性铰链结构的二维微动工作台研究.《机床与液压》.2007,第35卷(第4期), *
陈时锦 等.基于柔性铰链的微位移工作台性能分析与优化设计.《机械设计》.2004,第21卷(第7期), *

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