CN106737597B - A kind of XYZ three-freedom degree precisions positioner - Google Patents
A kind of XYZ three-freedom degree precisions positioner Download PDFInfo
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- CN106737597B CN106737597B CN201710019564.3A CN201710019564A CN106737597B CN 106737597 B CN106737597 B CN 106737597B CN 201710019564 A CN201710019564 A CN 201710019564A CN 106737597 B CN106737597 B CN 106737597B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/08—Programme-controlled manipulators characterised by modular constructions
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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Abstract
A kind of XYZ three-freedom degree precisions positioner, including XY moving bases and Z axis motion module, Z axis motion module are installed on XY moving bases；XY moving bases include substrate, and substrate is provided with gearshift and motion platform, and gearshift is provided with two groups, and gearshift is located at X-axis and Y-axis respectively；Gearshift is the compliant mechanism provided with piezoelectric ceramics；Gearshift includes lever left, right lever, input mounting blocks and output end mounting blocks；Substrate offers the first holding tank, gearshift is installed on the first holding tank, the lower end of lever left and right lever is articulated with the lower cell wall of the first holding tank by hinge, and the used hinge of left lower of the lower right side of lever left and right lever is hinged with input mounting blocks；The right upper portion of lever left and the left upper portion of right lever are hinged with output end mounting blocks by straight beam type flexible hinge；Output end mounting blocks are installed by straight beam type flexible hinge and motion platform.
Description
Technical field
The present invention relates to nanometer technique field, and in particular to a kind of XYZ three-freedom degree precisions positioner.
Background technology
With growing, the continuous improvement of nanometer technology of science and technology, in order to pursue the quality of life of quality, permitted
It is multi-field that higher requirement is proposed to micro/nano level locating platform.Such as Ultra-precision Turning manufacturing industry, 3D printing, biological cell work
Journey, chip litho machine and lead sewing machine etc. have higher precision and dimension requirement to micro-nano platform.
Based on a kind of flexible mechanical position with grade stroke, nano-precision of the differential lever amplification principle design of three-level
Shift amplifier, current three-dimensional platform have the disadvantage that；Tri- directions of XYZ are in the presence of motion coupling, especially in high acceleration at a high speed
In the case of, Z-direction dancing is obvious, and complicated assembling is difficult.
The content of the invention
For drawbacks described above, it is an object of the invention to propose a kind of three-degree of freedom flexible hinge displacement amplifier, expand
Original operating space, more adapt to the demand such as micro-nano operation detection in reality.Meet high accuracy, big stroke, height in practice
Bandwidth and multivariant purpose.
To use following technical scheme up to this purpose, the present invention：
A kind of XYZ three-freedom degree precisions positioner, including XY moving bases and Z axis motion module, the Z axis move mould
Block is installed on the XY moving bases；
The XY moving bases include substrate, and the substrate is provided with gearshift and motion platform, institute's displacement apparatus
Provided with two groups, institute's displacement apparatus is located at X-axis and Y-axis respectively；Institute's displacement apparatus is the compliant mechanism provided with piezoelectric ceramics E；
Institute's displacement apparatus includes lever left, right lever, input mounting blocks and output end mounting blocks；The substrate opens up
There is the first holding tank, institute's displacement apparatus is installed on first holding tank, and the lower end of the lever left and right lever passes through hinge
Chain is articulated with the lower cell wall of first holding tank, the used hinge of left lower of the lower right side of the lever left and right lever
Chain is hinged with input mounting blocks；The right upper portion of the lever left and the left upper portion of right lever pass through straight beam type flexible hinge
Chain is hinged with the output end mounting blocks；The output end mounting blocks are pacified by straight beam type flexible hinge and the motion platform
Dress.
Further, the substrate offers the second holding tank, and the motion platform is arranged at second holding tank, institute
Four sides of motion platform are stated by straight beam type flexible hinge respectively with input mounting blocks and being arranged at described second and accommodating
The decoupling fixed block connection of groove cell wall；
The left side of second holding tank and rear side are respectively equipped with the first holding tank for being mounted with gearshift, and described second
The preceding cell wall and right cell wall of holding tank are respectively equipped with the decoupling fixed block.
It is preferred that the decoupling fixed block includes fixed block and straight beam type flexible hinge, the fixed block both sides pass through straight
Beam type flexible hinge is installed on the side wall of the inner side of the second holding tank two corresponding to the fixed block both sides.
Further, the output end mounting blocks upper and bottom section is held positioned at second holding tank and first respectively
Receive groove, the upper part both sides of the output end mounting blocks are installed on the output end mounting blocks both sides by straight beam type flexible hinge
The side wall of the corresponding inner side of second holding tank two.
It is preferred that the Z axis motion module includes base and is vertically installed on the amplifying device arranged side by side of the base, it is described
At least provided with two groups, the central shaft of amplifying device arranged side by side intersects amplifying device arranged side by side described in two groups, is set in cross；
The amplifying device side by side includes one-level enlarger and two level enlarger, and the one-level enlarger includes a left side
The lever of side first and the lever of the right first, are provided with room between the lever of the left side first and the lever of the right first；The left side
The right side bottom surface of first lever is articulated with the base, the left side bottom of the lever of the right first by rounding straight beam type hinge
Face is articulated with the base by rounding straight beam type hinge；
The one-level enlarger also includes left side the first displacement conductive bar and the first displacement of right side conductive bar, the left side
First displacement conductive bar lower end is articulated with by hinge on the right of the upper surface of the lever of the left side first, the displacement of right side first
Conductive bar lower end is articulated with the upper surface left side of the lever of the right first by hinge；
The one-level enlarger also includes input platform, and the input platform is in rectangular-shape, first, the left side
Move the upper end of conductive bar and the first displacement of right side conductive bar respectively by hinge be articulated with the input platform base the left side and
The right；
The bottom plate is provided with the piezoelectric ceramics, and the piezoelectric ceramics end is pushed against in the input platform lower surface.
Further, the two level enlarger includes left side second displacement conductive bar and right side second displacement conductive bar,
The two level enlarger also includes left column and right column；
The left side second displacement conductive bar lower end is articulated with the left side the first lever upper surface left side, institute by hinge
The lower end for stating right side second displacement conductive bar is articulated with the right of the first lever of the right upper surface by hinge；
The two level enlarger also includes the lever of the left side second and the lever of the right second, the lever of the left side second and the right side
The horizontal setting of the lever of side second；The left side of the lever of the left side second is articulated with institute by rounding straight beam type hinge
Left column is stated, the upper end of the left side second displacement conductive bar is articulated with the thick stick of the left side second by rounding straight beam type hinge
The left side of bar bottom surface；The right side of the lever of the right second is articulated with the right column, the right side second by hinge
The upper end for moving conductive bar is articulated with the right of the lever of the right second by hinge；
The right of the upper surface of the lever of the left side second is provided with output end side chain, the upper surface of the lever of the right second
The left side is provided with output end side chain, and the bottom surface left side of the output end and the right are hingedly connected to the output end branch on the left side and the right
Chain.
It is preferred that two groups of left columns and two groups of right column tops are mutually supported by lateral connection post, the lateral connection
Post is interconnected to frame-shaped.
It is preferred that the hinge is circular arc flexible hinge, the second hinge is rounding straight beam type hinge.
Gearshift employs structure for amplifying, i.e., the small displacement of piezoelectric ceramics is zoomed into larger displacement, from
And make the direction of motion that there is bigger stroke；And axle motion module is arranged on moving base, that is, three-freedom degree precision positioning is formed,
So as to meet the positioning requirements of the big stroke of multiple degrees of freedom simultaneously；Use two knots of decoupling fixed block and straight beam type flexible hinge
Structure, you can it is existing input coupling phenomenon to solve moving base in motion, so as to improve the transmitting accuracy of motion platform；Pass through
Straight beam type flexible hinge and straight beam type flexible hinge connect in length and breadth, you can motion platform is had enough frees degree not in motion
Coupling is formed, enough straight beam type flexible hinges are connected by fixed block, while ensures the straight beam type flexible hinge being connected with each other
Chain has enough intensity；Set using two groups of symmetrical expression structure for amplifying, and by amplifying type structure in cross, so that device
More compact structure, stability is more preferable, and integral rigidity is bigger, and substantially eliminates coupling error；Circular arc type flexible hinge has larger
Slewing area, and mechanical friction is not present, also with the high and gapless advantage of autokinesis, it is adapted to close fine motion to adjust
Whole, hinge is more convenient for being driven using circular arc type flexible hinge；The kinematic accuracy of straight beam type flexible hinge is higher, but movement travel by
To very big limitation, the rotation of slight amplitude can only be realized.Most common form is around an axle elastic bending, and this elasticity
Deformation is reversible, and when not applying active force, circular arc flexible hinge can reset rapidly.
Brief description of the drawings
Fig. 1 is the overall structure diagram of one embodiment of the present of invention；
Fig. 2 is the XY moving base structural representations of one embodiment of the present of invention；
Fig. 3 is the Z axis motion module sectional view of one embodiment of the present of invention；
Fig. 4 is the amplifying device structural representation arranged side by side of one embodiment of the present of invention；
Fig. 5 is the axle motion module oblique mining figure of one embodiment of the present of invention.
Wherein：XY moving bases 100, substrate 110, the first holding tank 120, the second holding tank 130, decoupling fixed block 140,
Z axis motion module 200, base 210, gearshift 300, lever left 310, right lever 320, input mounting blocks 330, output end
Mounting blocks 340, motion platform 400, amplifying device arranged side by side 500, one-level enlarger 510, the first lever of the left side 511, the right
One lever 512, the first displacement of left side conductive bar 513, the first displacement of right side conductive bar 514, input platform 515, two level enlarger
Structure 520, left side second displacement conductive bar 521, right side second displacement conductive bar 522, the second lever of the left side 523, the thick stick of the right second
Bar 524, left column 530, right column 540, hinge A, straight beam type flexible hinge B, rounding straight beam type hinge C, output end side chain
D, piezoelectric ceramics E.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
As Figure 1-5, a kind of XYZ three-freedom degree precisions positioner, including XY moving bases 100 and Z axis motion mould
Block 200, the Z axis motion module 200 are installed on the XY moving bases 100；
The XY moving bases 100 include substrate 110, and the substrate 110 is provided with gearshift 300 and motion platform
400, institute's displacement apparatus 300 is provided with two groups, and institute's displacement apparatus 300 is located at X-axis and Y-axis respectively；Institute's displacement apparatus 300 is
Compliant mechanism provided with piezoelectric ceramics E；
Institute's displacement apparatus 300 includes lever left 310, right lever 320, input mounting blocks 330 and output end mounting blocks
340；The substrate 110 offers the first holding tank 120, and institute's displacement apparatus 300 is installed on first holding tank 120, institute
The lower end for stating lever left 310 and right lever 320 is articulated with the lower cell wall of first holding tank 120, the left thick stick by hinge A
The used hinge A of the left lower of the lower right side of bar 310 and right lever 320 is hinged with input mounting blocks 330；The left thick stick
The right upper portion of bar 310 and the left upper portion of right lever 320 are hinged with the output end by straight beam type flexible hinge B and installed
Block 340；The output end mounting blocks 340 are installed by straight beam type flexible hinge B and the motion platform 400.
XY moving bases 100 by 300 integrated setting of gearshift, make device globality more preferably by substrate, and phase
Do not allow in transmission to be also easy to produce deformation for, so as to lift displacement transmitted precision, gearshift 300 employs amplification
Structure, i.e., the small displacements of piezoelectric ceramics E are zoomed into larger displacement, so that the XY directions of motion have bigger row
Journey；And Z axis motion module 200 is arranged on XY moving bases 100, that is, three-freedom degree precision positioning is formed, so as to simultaneously full
The positioning requirements of the sufficient big stroke of multiple degrees of freedom.
Wherein, the substrate 110 offers the second holding tank 130, and the motion platform 400 is arranged at described second and accommodated
Groove 130, four sides of the motion platform 400 are by straight beam type flexible hinge B respectively with input mounting blocks 330 and setting
Connected in the decoupling fixed block 140 of the cell wall of the second holding tank 130；
The left side of second holding tank 130 and rear side are respectively equipped with the first holding tank for being mounted with gearshift 300
120, the preceding cell wall and right cell wall of second holding tank 130 are respectively equipped with the decoupling fixed block 140.
By straight beam type flexible hinge B and input mounting blocks 330 and described the is arranged at around motion platform 400
The decoupling fixed block 140 of the cell wall of two holding tank 130 connects, i.e., one end input displacement when, in addition both ends can also be affected so as to
It is subjected to displacement, uses decoupling fixed block 140 and straight beam type flexible hinge two structures of B, you can solves XY moving bases 100 and transporting
Dynamic is existing input coupling phenomenon, so as to improve the transmitting accuracy of motion platform 400.
In addition, the decoupling fixed block 140 includes fixed block and straight beam type flexible hinge B, the fixed block both sides pass through
Straight beam type flexible hinge B is installed on the side wall of 130 liang of inner sides of the second holding tank corresponding to the both sides of fixed block 140.
Because decoupling fixed block 140 has higher flexibility ratio, simplest mode is by straight beam type flexible hinge B here
Connected in length and breadth with straight beam type flexible hinge B, you can make motion platform 400 there are enough frees degree not form coupling in motion,
Enough straight beam type flexible hinge B are connected by fixed block, while ensure that the straight beam type flexible hinge B being connected with each other has enough
Intensity.
Wherein, the upper and bottom section of output end mounting blocks 340 is located at second holding tank 130 and first respectively
Holding tank 120, the upper part both sides of the output end mounting blocks 340 are installed on the output end by straight beam type flexible hinge B
The side wall of second holding tank corresponding to the both sides of mounting blocks 340,130 liang of inner sides.
Make device make 400 4 end faces of motion platform that all there is the higher free degree using this structure, and then make motion
Four end faces of platform 400 all have the function of decoupling, in the case of only moving one in X-axis or Y-axis, other three ends
Face will not also form coupling, ensure that displacement transmitted accuracy.
In addition, the Z axis motion module 200 includes base 210 and is vertically installed on the amplification arranged side by side dress of the base 210
500 are put, at least provided with two groups, the central shaft of amplifying device 500 arranged side by side intersects the amplifying device 500 side by side described in two groups, is in
Cross is set；
The amplifying device 500 side by side includes one-level enlarger 510 and two level enlarger 520, the one-level amplification
Mechanism 510 includes the first lever of the left side 511 and the first lever of the right 512, first lever of the left side 511 and the lever of the right first
Room is provided between 512；The right side bottom surface of first lever of the left side 511 is articulated with described by rounding straight beam type hinge C
Base 210, the left side bottom surface of first lever of the right 512 are articulated with the base 210 by rounding straight beam type hinge C；
The one-level enlarger 510 also includes the first displacement of left side conductive bar 513 and the first displacement of right side conductive bar
514, the upper surface that the lower end of the first displacement of left side conductive bar 513 is articulated with first lever of the left side 511 by hinge is right
Side, the upper surface that the lower end of the first displacement of right side conductive bar 514 is articulated with first lever of the right 512 by hinge are left
Side；
The one-level enlarger also includes input platform 515, and the input platform 515 is in rectangular-shape, the left side
The upper end of first displacement conductive bar 513 and the first displacement of right side conductive bar 514 is articulated with the input platform by hinge A respectively
The left side and the right of 515 bottom surfaces；
The bottom plate is provided with the piezoelectric ceramics E, and the piezoelectric ceramics E ends are pushed against in the input following table of platform 515
Face.
One-level enlarger directly hair is exaggerated piezoelectric ceramics E displacement, and piezoelectric ceramics E displacement will input platform
515 are jacked up, and the first displacement conductive bar 513 of left side and the first displacement of right side conductive bar 514 are driven so as to input platform 515, and then
Displacement is exaggerated by the first lever of the left side 511 and the first lever of the right 512；The first lever of the subsequent left side 511 and the right
First lever 512 drives left side second displacement conductive bar 521 and right side second displacement conductive bar 522；Put using two groups of symmetrical expressions
Big structure, and amplifying type structure is set in cross, so that the more compact structure of device, stability is more preferable, integral rigidity
It is bigger, and substantially eliminate coupling error.
As the supplement to above-mentioned technology, the two level enlarger 520 includes left side second displacement conductive bar 521 and the right side
Side second displacement conductive bar 522, the two level enlarger 520 also include left column 530 and right column 540；
The lower end of left side second displacement conductive bar 521 is articulated with the upper surface of the first lever of the left side 511 by hinge
The left side, the lower end of the right side second displacement conductive bar 522 are articulated with the upper surface of the first lever of the right 512 by hinge A
The right；
The two level enlarger 520 also includes the second lever of the left side 523 and the second lever of the right 524, the left side
The 524 horizontal setting of two levers 523 and the second lever of the right；The left side of second lever of the left side 523 passes through rounding
Angle straight beam type hinge C is articulated with the left column 530, and the upper end of the left side second displacement conductive bar 521 is straight by rounding
Beam type hinge C is articulated with the left side of the bottom surface of the second lever of the left side 523；The right side of second lever of the right 524 passes through
Hinge A is articulated with the right column 540, and the upper end of the right side second displacement conductive bar 522 is articulated with the right side by hinge A
The right of the second lever of side 524；
The right of the upper surface of second lever of the left side 523 is provided with output end side chain D, second lever of the right 524
The upper surface left side be provided with output end side chain D, the bottom surface left side of the output end and the right are hingedly connected to the left side and the right
Output end side chain D.
Left side second displacement conductive bar 521 and right side second displacement conductive bar 522 drive the second lever of the left side 523 and the right
After second lever 524, the second lever of the left side 523 and the second lever of the right 524 again amplify displacement, output is delivered to
End；One-level enlarger adds two level enlarger, forms the symmetrical structure for amplifying of two level, its more compact structure, integral rigidity is more
Greatly, and coupling error is substantially eliminated, more adapts to the demand in reality.Meet the purpose of high-speed high-precision motion in practice.
In addition, two groups of left columns 530 and two groups of tops of right column 540 are mutually supported by lateral connection post, the transverse direction
Connecting pole is interconnected to frame-shaped.
Frame like structure makes the more compact structure of device, and then makes the external support structure of device more reliable, during displacement is transmitted,
Avoid left column 530 and right column 540 to produce deformation as far as possible, displacement is accurately delivered to output end.
In addition, the hinge A is circular arc flexible hinge, the second hinge B is rounding straight beam type hinge.
Circular arc type flexible hinge has larger slewing area, and mechanical friction is not present, also with autokinesis height
With gapless advantage, it is adapted to close fine motion adjustment, hinge A is more convenient for being driven using circular arc type flexible hinge；Straight beam type is flexible
The kinematic accuracy of hinge is higher, but movement travel is very restricted, and can only realize the rotation of slight amplitude.Most common shape
Formula is around an axle elastic bending, and this elastic deformation is reversible, and when not applying active force, circular arc flexible hinge can
It is rapid to reset.
The technical principle of the present invention is described above in association with specific embodiment.These descriptions are intended merely to explain the present invention's
Principle, and limiting the scope of the invention can not be construed in any way.Based on explanation herein, the technology of this area
Personnel would not require any inventive effort the other embodiments that can associate the present invention, and these modes are fallen within
Within protection scope of the present invention.
Claims (7)
- A kind of 1. XYZ three-freedom degree precisions positioner, it is characterised in that：It is described including XY moving bases and Z axis motion module Z axis motion module is installed on the XY moving bases；The XY moving bases include substrate, and the substrate is provided with gearshift and motion platform, and institute's displacement apparatus is provided with Two groups, institute's displacement apparatus is located at X-axis and Y-axis respectively；Institute's displacement apparatus is the compliant mechanism provided with piezoelectric ceramics；Institute's displacement apparatus includes lever left, right lever, input mounting blocks and output end mounting blocks；The substrate offers One holding tank, institute's displacement apparatus are installed on first holding tank, and the lower end of the lever left and right lever is cut with scissors by hinge It is connected to the lower cell wall of first holding tank, the used hinge hinge of left lower of the lower right side of the lever left and right lever It is connected to input mounting blocks；The right upper portion of the lever left and the left upper portion of right lever are cut with scissors by straight beam type flexible hinge It is connected to the output end mounting blocks；The output end mounting blocks are installed by straight beam type flexible hinge and the motion platform.
- 2. XYZ three-freedom degree precisions positioner according to claim 1, it is characterised in that：The substrate offers Two holding tanks, the motion platform are arranged at second holding tank, and four sides of the motion platform are soft by straight beam type Property hinge is respectively with input mounting blocks and being arranged at the decoupling fixed block of the second holding tank cell wall and being connected；The left side of second holding tank and rear side are respectively equipped with the first holding tank for being mounted with gearshift, and described second accommodates The preceding cell wall and right cell wall of groove are respectively equipped with the decoupling fixed block.
- 3. XYZ three-freedom degree precisions positioner according to claim 2, it is characterised in that：The decoupling fixed block bag Fixed block and straight beam type flexible hinge are included, the fixed block both sides are installed on the fixed block both sides by straight beam type flexible hinge The side wall of the corresponding inner side of second holding tank two.
- 4. XYZ three-freedom degree precisions positioner according to claim 2, it is characterised in that：The output end mounting blocks Upper and bottom section is located at second holding tank and the first holding tank, the upper part both sides of the output end mounting blocks respectively The side wall of the inner side of the second holding tank two corresponding to the output end mounting blocks both sides is installed on by straight beam type flexible hinge.
- 5. XYZ three-freedom degree precisions positioner according to claim 1, it is characterised in that：The Z axis motion module bag Include base and be vertically installed on the amplifying device arranged side by side of the base, described amplifying device is at least provided with two groups side by side, two groups of institutes The central shaft for stating amplifying device arranged side by side intersects, and is set in cross；The amplifying device side by side includes one-level enlarger and two level enlarger, and the one-level enlarger includes the left side the One lever and the lever of the right first, are provided with room between the lever of the left side first and the lever of the right first；The left side first The right side bottom surface of lever is articulated with the base by rounding straight beam type hinge, and the left side bottom surface of the lever of the right first leads to Cross rounding straight beam type hinge and be articulated with the base；The one-level enlarger also includes left side the first displacement conductive bar and the first displacement of right side conductive bar, the left side first Displacement conductive bar lower end is articulated with by hinge on the right of the upper surface of the lever of the left side first, the displacement of right side first conduction Bar lower end is articulated with the upper surface left side of the lever of the right first by hinge；The one-level enlarger also includes input platform, and the input platform is in rectangular-shape, and the displacement of left side first passes The upper end of guide rod and the first displacement of right side conductive bar is articulated with the left side and the right of the input platform base by hinge respectively；Bottom plate is provided with the piezoelectric ceramics, and the piezoelectric ceramics end is pushed against in the input platform lower surface.
- 6. XYZ three-freedom degree precisions positioner according to claim 5, it is characterised in that：The two level enlarger Including left side second displacement conductive bar and right side second displacement conductive bar, the two level enlarger also includes left column and the right side is stood Post；The left side second displacement conductive bar lower end is articulated with the left side the first lever upper surface left side, the right side by hinge The lower end of side second displacement conductive bar is articulated with the right of the first lever of the right upper surface by hinge；The two level enlarger also includes the lever of the left side second and the lever of the right second, the lever of the left side second and the right The horizontal setting of two levers；The left side of the lever of the left side second is articulated with the left side by rounding straight beam type hinge Column, the upper end of the left side second displacement conductive bar are articulated with the second lever of left side bottom by rounding straight beam type hinge The left side in face；The right side of the lever of the right second is articulated with the right column by hinge, and the right side second displacement passes The upper end of guide rod is articulated with the right of the lever of the right second by hinge；The right of the upper surface of the lever of the left side second is provided with output end side chain, the upper surface left side of the lever of the right second Provided with output end side chain, the bottom surface left side of the output end and the right are hingedly connected to the output end side chain on the left side and the right.
- 7. XYZ three-freedom degree precisions positioner according to claim 6, it is characterised in that：Two groups of left columns and two groups Right column top is mutually supported by lateral connection post, and the lateral connection post is interconnected to frame-shaped.
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107009194A (en) * | 2017-06-02 | 2017-08-04 | 广东工业大学 | A kind of fast tool servo |
| CN109215730B (en) * | 2018-10-15 | 2024-05-28 | 安徽理工大学 | Displacement reversing amplifying mechanism based on flexible hinge |
| CN109502542B (en) * | 2018-10-23 | 2020-07-10 | 广东工业大学 | Multi-degree-of-freedom nanometer positioning platform based on compliant parallel mechanism |
| CN109650327B (en) * | 2018-11-07 | 2021-03-12 | 天津大学 | Flat plate type three-dimensional large-stroke nano operating platform |
| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
| CN113404806B (en) * | 2021-07-07 | 2022-07-08 | 四川大学 | Active vibration damping device based on metamaterial |
| WO2024000776A1 (en) * | 2022-06-30 | 2024-01-04 | 北京华卓精科科技股份有限公司 | Positioning apparatus for loading and unloading and lithography device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2003194976A (en) * | 2001-12-28 | 2003-07-09 | Sigma Koki Kk | Small displacement device |
| CN103225728B (en) * | 2013-04-24 | 2014-12-24 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN104595642B (en) * | 2015-01-06 | 2016-05-04 | 山东大学 | A kind of two degrees of freedom Piezoelectric Driving nanopositioning stage |
| CN105931675B (en) * | 2016-04-13 | 2018-04-03 | 天津大学 | A kind of parallel xyz Three Degree Of Freedoms mini positioning platform |
| CN106082114B (en) * | 2016-08-24 | 2019-03-15 | 广东工业大学 | A kind of flexible big stroke micro-nano technology equipment |
| CN106113022B (en) * | 2016-08-24 | 2019-02-22 | 广东工业大学 | A kind of single-freedom and flexible mini positioning platform |
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