CN103395059A - Three-freedom-degree flexible topology decoupling parallel-connection micro displacement platform - Google Patents
Three-freedom-degree flexible topology decoupling parallel-connection micro displacement platform Download PDFInfo
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- CN103395059A CN103395059A CN2013102819249A CN201310281924A CN103395059A CN 103395059 A CN103395059 A CN 103395059A CN 2013102819249 A CN2013102819249 A CN 2013102819249A CN 201310281924 A CN201310281924 A CN 201310281924A CN 103395059 A CN103395059 A CN 103395059A
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Abstract
A three-freedom-degree flexible topology decoupling parallel-connection micro displacement platform comprises a static platform body (1) and a movable platform body (2), and is characterized in that the movable platform body (2) is connected with the static platform body (1) through a first supporting chain (3), a second supporting chain (4) and a third supporting chain (5), the first supporting chain (3), the second supporting chain (4) and the third supporting chain (5) are respectively connected with the movable platform body (2) and the static platform body (1) through flexible hinges, the first supporting chain (3) is driven by a first drive (6), the second supporting chain (4) is driven by a second drive (7), and the third supporting chain (5) is driven by a third drive (8). According to the three-freedom-degree flexible topology decoupling parallel-connection micro displacement platform, the origin position of the movable platform body is fixed through the first drive and the second drive, the third drive determines the angle of the movable platform body moving around the origin position, the platform has partial decoupling characteristics, solving difficulty of kinematics of a mechanism and dynamics is reduced, real-time control is easy to achieve, a whole modularized machining structure is simple and has an assembling-free characteristic, and positioning and repetition precision of micro displacement of the micro displacement platform is improved.
Description
Technical field
The invention belongs to MEMS precision drive technical field, specifically just relate to a kind of three-degree of freedom flexible topology decoupling parallel micromotion platform that can realize the decoupling zero function, improved the transmission accuracy of MEMS transmission.
Background technology
Micromotion platform is the usual means in micro-nano field, and it has advantages of that precision is high in location and motion, be widely used in the fields such as electromechanical industries, bioengineering and Minimally Invasive Surgery.Micromotion platform is used widely in the small machine industry of similar camera, mobile phone and so on, micromotion platform often uses flexible hinge bindiny mechanism, flexible hinge is before and after nineteen sixties, development due to aeronautical and space technology, to realizing the supporting construction of intrinsic deflection among a small circle, not only propose high-resolution requirement, gone back on claimed structure the requirement with microminaturization.People after the resiliency supported experimental exploring through to all types of, develop progressively that volume is little, machinery-free friction, gapless, flexible hinge flexibly moves.The characteristic that flexure hinge mechanism has utilized elastomeric material micro-strain and certainly replied, eliminated idle running and the mechanical friction in the transmission process, can obtain the displacement resolution of superelevation.Flexible hinge is widely used in the instrument and meters such as gyroscope, accelerometer, precision balance, guided missile control, and has obtained unprecedented high accuracy and stability.Flexible hinge mainly contains two types, straight beam type flexible hinge and circular arc type flexible hinge.Straight beam type flexible hinge has larger slewing area, but its kinematic accuracy is poor, and center of rotation has obvious deflection in rotation process.As shown in Figure 1, the kinematic accuracy of circular arc type flexible hinge is higher, but movement travel is very restricted, and can only realize the rotation of small amplitude.Prevailing form is around an axle elastic bending, and reversible during this strain.Flexible hinge is used for doing around axle the finite angular displacements of compound movement, and its feature is: machinery-free friction, gapless, autokinesis are high.
the symmetry of parallel institution, the advantage such as high accuracy and high strength makes it be applied to the micromotion platform field, Chinese scholars has also successively designed the jiggle robot of some parallel institution formulas, but it is nano level that existing jiggle robot transmission requires sometimes, the traditional micromotion platform ubiquity complex structure that causes design research and development at present, demarcate difficulty, the defect of mobile decoupling difficulty, Chinese patent 201010216326.X discloses a kind of two-degree of freedom translation parallel decoupling micromotion platform of micro-electromechanical system field, comprise: piezoelectric ceramic actuator, two drive side chain and corresponding auxiliary side chain thereof, workbench and fixed frame, wherein: two driving side chains and corresponding auxiliary side chain thereof are symmetrically distributed in respectively directions X and the Y-direction of workbench in twos.This invention relies on the symmetry of decoupling zero function, stiffness characteristics and the platform and integrally structure of Composite Double straight parallel plate hinge, thereby reaches the function of eliminating coupling and parasitic displacement, realizes the two dimensional motion of motion platform.But at first this technology can only realize the two-degree of freedom translation parallel decoupling function, is secondly complex structure, the decoupling zero difficulty.
Summary of the invention
The objective of the invention is for existing micro electronmechanical field little transmission platform kinematics Dynamics Coupling degree high, control algolithm is complicated, be difficult to reach requirement of real-time control, a kind of three-degree of freedom flexible topology decoupling parallel micromotion platform is provided, position and angle have Decoupling Characteristics, have improved the transmission accuracy of micromotion platform
Technical scheme
In order to realize above-mentioned technical purpose, the present invention designs a kind of three-degree of freedom flexible topology decoupling parallel micromotion platform, it comprises silent flatform and moving platform, it is characterized in that: described moving platform is connected with silent flatform with the 3rd side chain by the first side chain, the second side chain, all by flexible hinge, be connected between the first side chain, the second side chain, the 3rd side chain and moving platform and silent flatform, the first side chain is subjected to the first driver drives, the second side chain is subjected to the second driver drives, and the 3rd side chain is subjected to the 3rd driver drives;
The first driver, the second driver and the 3rd driver are contained on silent flatform respectively.
Beneficial effect
The present invention both can pass through the first driver and the second driver drives moving platform translation planar, after also can utilizing simultaneously startup the first driver and the second driver to reach balance, starting the 3rd driver makes moving platform realize that between moving platform and connecting rod three, the flexible hinge central point rotates, this mechanism constantly has the partly decoupled characteristic, reduce kinematics of mechanism and dynamic (dynamical) difficulty that solves, be easy to real-time control.This device simply has by integral module formula processing structure the characteristics of exempting to assemble, and has improved location and the repeatable accuracy of micromotion platform micrometric displacement.，
Description of drawings
Accompanying drawing 1 is circular arc flexible hinge structural representation.
Accompanying drawing 2 is structural representations of the present invention.
The specific embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
Embodiment
As shown in Figure 2, a kind of three-degree of freedom flexible topology decoupling parallel micromotion platform, it comprises silent flatform 1 and moving platform 2, wherein, described moving platform 2 is connected with silent flatform 1 with the 3rd side chain 5 by the first side chain 3, the second side chain 4, all by flexible hinge, is connected between the first side chain 3, the second side chain 4, the 3rd side chain 5 and moving platform 2 and silent flatform 1, and the first side chain 3 is subjected to the first driver 6 drivings, the second side chain 4 is driven by the second driver 7, and the 3rd side chain 5 is driven by the 3rd driver 8;
The first driver 6, the second driver 7 and the 3rd driver 8 are contained in respectively on silent flatform 1.
Described the first side chain 3 comprises connecting rod 1, connecting rod 2 302 and connecting rod 3 303, and described the second side chain 4 comprises connecting rod 4 401, and described the 3rd side chain 5 comprises connecting rod 5 501 and connecting rod 6 502;
Between described connecting rod 1 and connecting rod 2 302, between connecting rod 2 302 and connecting rod 3 303, between connecting rod 3 303 and connecting rod 4 401, all by flexible hinge, connect between connecting rod 5 501 and connecting rod 6 502, connecting rod 1, connecting rod 4 401 are connected with connecting rod and 502 are connected with silent flatform 1 by flexible hinge respectively;
Described connecting rod 3 303 is connected with connecting rod and 501 by flexible hinge, with moving platform 2, is connected.
The 3rd driver 8 drive link 6 502.
Described the first driver 6, the second driver 7 and the 3rd driver 8 are all piezoelectric ceramic actuator or leading screw fine motion driver.
the present invention not only can be by the first driver 6 effects and connecting rod 1, thereby the second driver 7 acts on connecting rod 4 401 and realizes the planar purpose of translation of moving platform 2, can also realize simultaneously, the purpose that between moving platform 2 moving platforms 2 and connecting rod 3 303, flexible hinge central point A rotates, it rotates implementation procedure is to apply driving force by the first driver 6 and 7 pairs of the first side chains 3 of the second driver and the second side chain 4, according to the motion-promotion force compatibility principle, the 3rd 8 pairs of drivers the 3rd side chain executes 5 while adding driving force, moving platform 2 can moving platform 2 and connecting rod 3 303 between flexible hinge central point A rotate.
The calculating of traditional Three Degree Of Freedom micromotion platform displacement need to solve the ternary Nonlinear System of Equations eight times, solving complexity is high, the moving displacement equation of mechanism of the present invention only needs two quadratic equation with one unknown, a quadratic equation with one unknown determines the moving platform origin position, and second quadratic equation with one unknown determines the rotational angle of moving platform around initial point.Namely the one the second side chains determine the origin position A of moving platform, and the 3rd side chain determines the rotational angle that moving platform is ordered around A.Therefore the displacement of the 3rd side chain is very little on the center of rotation impact of moving platform, the maximum displacement rate of change by finite element analysis in working space is all less than 2.6%, and this displacement can be ignored.Prove the Decoupling Characteristics that micromotion platform of the present invention has displacement and the anglec of rotation, reduced kinematics of mechanism and dynamic (dynamical) difficulty that solves, be easy to real-time control.
Claims (4)
1. three-degree of freedom flexible topology decoupling parallel micromotion platform, it comprises silent flatform (1) and moving platform (2), it is characterized in that: described moving platform (2) is by the first side chain (3), the second side chain (4) is connected with silent flatform (1) with the 3rd side chain (5), the first side chain (3), the second side chain (4), all by flexible hinge, be connected between the 3rd side chain (5) and moving platform (2) and silent flatform (1), the first side chain (3) is driven by the first driver (6), the second side chain (4) is driven by the second driver (7), the 3rd side chain (5) is driven by the 3rd driver (8),
Described the first driver (6), the second driver (7) and the 3rd driver (8) are contained in respectively on silent flatform (1).
2. a kind of three-degree of freedom flexible topology decoupling parallel micromotion platform as claimed in claim 1, it is characterized in that: described the first side chain (3) comprises connecting rod one (301), connecting rod two (302) and connecting rod three (303), described the second side chain (4) comprises connecting rod four (401), and described the 3rd side chain (5) comprises connecting rod five (501) and connecting rod six (502);
Between described connecting rod one (301) and connecting rod two (302), between connecting rod two (302) and connecting rod three (303), between connecting rod three (303) and connecting rod four (401), all by flexible hinge, connect between connecting rod five (501) and connecting rod six (502), connecting rod one (301), connecting rod four (401) are connected with connecting rod (502) be connected with silent flatform (1) by flexible hinge respectively;
Described connecting rod three (303) are connected with connecting rod (501) be connected with moving platform (2) by flexible hinge.
3. a kind of three-degree of freedom flexible topology decoupling parallel micromotion platform as claimed in claim 2, it is characterized in that: described the first driver (6) drive link one (301), the second driver (7) drive link four (401), the 3rd driver (8) drive link six (502).
4. a kind of three-degree of freedom flexible topology decoupling parallel micromotion platform as described in claim 1 or 3, it is characterized in that: described the first driver (6), the second driver (7) and the 3rd driver (8) are all piezoelectric ceramic actuator or leading screw fine motion driver.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104358976A (en) * | 2014-10-22 | 2015-02-18 | 中国科学院苏州生物医学工程技术研究所 | Flexible hinge micro-angle adjustment table for precise optical detection |
| CN104526683A (en) * | 2014-12-30 | 2015-04-22 | 天津福云天翼科技有限公司 | Three-freedom-degree swing platform based on parallel mechanism |
| CN104925738A (en) * | 2015-06-30 | 2015-09-23 | 宁波大学 | Piezoelectric micro-platform capable of amplifying based on flexible hinge |
| CN105690358A (en) * | 2016-04-18 | 2016-06-22 | 河北工业大学 | Flexible inching operation mechanism |
| CN116092571A (en) * | 2022-12-15 | 2023-05-09 | 齐鲁工业大学 | Three-degree-of-freedom flexible parallel motion platform and system |
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| JPH03115892A (en) * | 1989-09-29 | 1991-05-16 | Hitachi Constr Mach Co Ltd | Micromotion mechanism |
| CN1645518A (en) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | Planar three freedom meek precisively positioning platform |
| WO2006050560A1 (en) * | 2004-11-11 | 2006-05-18 | Adelaide Research And Innovation | Parallel micromanipulator and control method |
| CN103021472A (en) * | 2012-12-03 | 2013-04-03 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
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2013
- 2013-07-05 CN CN201310281924.9A patent/CN103395059B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03115892A (en) * | 1989-09-29 | 1991-05-16 | Hitachi Constr Mach Co Ltd | Micromotion mechanism |
| WO2006050560A1 (en) * | 2004-11-11 | 2006-05-18 | Adelaide Research And Innovation | Parallel micromanipulator and control method |
| CN1645518A (en) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | Planar three freedom meek precisively positioning platform |
| CN103021472A (en) * | 2012-12-03 | 2013-04-03 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104358976A (en) * | 2014-10-22 | 2015-02-18 | 中国科学院苏州生物医学工程技术研究所 | Flexible hinge micro-angle adjustment table for precise optical detection |
| CN104526683A (en) * | 2014-12-30 | 2015-04-22 | 天津福云天翼科技有限公司 | Three-freedom-degree swing platform based on parallel mechanism |
| CN104925738A (en) * | 2015-06-30 | 2015-09-23 | 宁波大学 | Piezoelectric micro-platform capable of amplifying based on flexible hinge |
| CN105690358A (en) * | 2016-04-18 | 2016-06-22 | 河北工业大学 | Flexible inching operation mechanism |
| CN116092571A (en) * | 2022-12-15 | 2023-05-09 | 齐鲁工业大学 | Three-degree-of-freedom flexible parallel motion platform and system |
| CN116092571B (en) * | 2022-12-15 | 2024-03-26 | 齐鲁工业大学 | Three-degree-of-freedom flexible parallel motion platform and system |
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| CN103395059B (en) | 2016-04-06 |
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