CN103568005B - Dual-translation orthogonal decoupling parallel micro-positioning platform - Google Patents
Dual-translation orthogonal decoupling parallel micro-positioning platform Download PDFInfo
- Publication number
- CN103568005B CN103568005B CN201310575994.5A CN201310575994A CN103568005B CN 103568005 B CN103568005 B CN 103568005B CN 201310575994 A CN201310575994 A CN 201310575994A CN 103568005 B CN103568005 B CN 103568005B
- Authority
- CN
- China
- Prior art keywords
- motion
- fixed platform
- motion workbench
- branched chains
- branched chain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Transmission Devices (AREA)
Abstract
The invention provides a dual-translation orthogonal decoupling parallel micro-positioning platform which comprises a motion workbench, a fixed platform, four pairs of motion branched chains and two driving branched chains, wherein the motion branched chains and the driving branched chains are connected between the motion workbench and the fixed platform. The dual-translation orthogonal decoupling parallel micro-positioning platform is characterized in that the motion workbench is a cube, two adjacent side faces of the motion workbench are provided with horizontal semicircular grooves, the fixed platform is a rectangular block with a square groove in the middle, one ends of the motion branched chains are correspondingly connected with the four side faces of the motion workbench, the other ends of the motion branched chains are correspondingly connected with the four side faces of the square groove of the fixed platform, the two drive branched chains are drive blocks, wherein two side faces opposite to each other of the two drive branched chains are respectively provided with a horizontal semicircular groove and circular pressing marks, the side face, with the horizontal semicircular groove, of each drive block is pressed on the side face, with the horizontal semi circular groove, of the motion workbench through a hard ball, and the side face, with the circular concave marks, of the drive block is connected with the fixed platform through a piezoelectric ceramic driver. The dual-translation orthogonal decoupling parallel micro-positioning platform can completely achieve completely-decoupled dual-freedom degree translation, and the motion branched chains enhance the rigidity and bearing capacity of the micro-positioning platform.
Description
Technical field
The invention belongs to manufacturing technology field, specifically relate to a kind of two translation orthogonal decoupling parallel micromotion platforms.
Background technology
Parallel micromotion platform has the advantages such as the rigidity of structure is large, displacement resolution is high, fast response time, compact conformation, be widely used in various micro-nano navigation system, as Ultra-precision Turning, scanning probe microscopy, MEMS(microelectromechanical systems), the field such as bioengineering, Aero-Space, and play the effect wanted emphatically.
Current lot of domestic and international researcher has carried out correlative study work in succession, and Ellis proposition parallel institution as inching operation manipulator, and is applied to biotechnology and microsurgery; Magnani and Pernette have studied the flexible hinge form of revolute pair, moving sets, Hooke's hinge and ball pivot; Kallio have developed three-freedom microoperation parallel robot; Lee is studied the freedom degree parallel connection micromotion mechanism realizing a movement two rotation.At home, BJ University of Aeronautics & Astronautics have developed the six degree of freedom connection in series-parallel micro-manipulating robot of two-stage decoupling zero and the micro-manipulating robot of freedom degree parallel connection Delta mechanism; Harbin Institute of Technology successively have developed 6-PSS and 6-SPS six-freedom parallel Stewart jiggle robot.Application number be 01128916.3,00100197.3,00100198.1,201110366086.6,201010216326.X, 201010175965.6 patent document in disclose " new type series-parallel connection jogging robot, " four-freedom four-shaft structure decoupling parallel jiggle robot ", " vernier robot with decoupled parallel three freedoms and three-axle structure ", " motion of one dimension micromotion platform ", " two-degree of freedom translation parallel decoupling micromotion platform ", " a kind of two-dimensional micromotion stage ".
Although there are many scholar's research parallel micromotion platforms both at home and abroad, these achievements in research and patented technology meet certain kinematic accuracy requirement mostly, but do not consider how micromotion platform effectively improves the problem of its rigidity when large bearing capacity, structurally do not realize full decoupled yet.
Summary of the invention
The object of this invention is to provide a kind of two translation orthogonal decoupling parallel micromotion platforms that can overcome above-mentioned defect, there is higher stiffness and bearing capacity.Its technical scheme is:
A kind of two translation orthogonal decoupling parallel micromotion platforms, comprise motion workbench, fixed platform, be connected to four movement branched chain being positioned at top between motion workbench and fixed platform, be connected to four movement branched chain being positioned at below between motion workbench and fixed platform and two driving side chains, it is characterized in that: motion workbench is a square, and adjacent two center side all have horizontal semi-circular groove, fixed platform is the rectangular block having square groove in the middle of, four movement branched chain being positioned at top be connected between motion workbench and fixed platform are uniform with the line of four movement branched chain all about end face on motion workbench and bottom surface geometric center being positioned at below, all movement branched chain are " bow " font spring chain, one end of four movement branched chain above being positioned at is corresponding with four sides of motion workbench respectively to be connected, its other end is corresponding with four sides of the square groove of fixed platform respectively to be connected, the upper end face being positioned at " bow " font end face of four movement branched chain of top and motion workbench is coplanar, one end of four movement branched chain below being positioned at is corresponding with four sides of motion workbench respectively to be connected, its other end is corresponding with four sides of the square groove of fixed platform respectively to be connected, the bottom surface being positioned at " bow " font bottom surface of four movement branched chain of below and motion workbench is coplanar, article two, drive side chain to be the drive block having horizontal semi-circular groove and circular indentations two opposite flanks respectively, drive block there is the side of horizontal semi-circular groove by hard ball and motion workbench there being the lateral surface compressing of horizontal semi-circular groove, drive block there is the side of circular indentations be connected with fixed platform by piezoelectric ceramic actuator.
Compared with prior art, its advantage is in the present invention: (1) adopts " bow " font spring chain as side chain, by side chain quadrature arrangement, can realize full decoupled two-degree of freedom translation, have the advantages such as control algolithm is simple, dynamic characteristic is good; (2) the four pairs of side chains be arranged between motion workbench and fixed platform greatly strengthen rigidity and the bearing capacity of micromotion platform, meet the requirement of Precision Machining and location under high-bearing capacity.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention.
In figure: 1, motion workbench 2, movement branched chain 3, fixed platform 4, piezoelectric ceramic actuator 5, drive block 6, hard ball.
Detailed description of the invention
Motion workbench 1 is a square, and adjacent two center side all have horizontal semi-circular groove, fixed platform 3 is the rectangular block having square groove in the middle of, four movement branched chain 2 being positioned at top be connected between motion workbench 1 and fixed platform 3 are all uniform about the line of end face and bottom surface geometric center on motion workbench 1 with four movement branched chain 2 being positioned at below, all movement branched chain 2 are " bow " font spring chain, one end of four movement branched chain 2 above being positioned at is corresponding with four sides of motion workbench 1 respectively to be connected, its other end is corresponding with four sides of the square groove of fixed platform 3 respectively to be connected, the upper end face being positioned at " bow " font end face of four movement branched chain 2 of top and motion workbench 1 is coplanar, one end of four movement branched chain 2 below being positioned at is corresponding with four sides of motion workbench 1 respectively to be connected, its other end is corresponding with four sides of the square groove of fixed platform 3 respectively to be connected, the bottom surface being positioned at " bow " font bottom surface of four movement branched chain 2 of below and motion workbench 1 is coplanar, article two, drive side chain to be the drive block 5 having horizontal semi-circular groove and circular indentations two opposite flanks respectively, drive block 5 there is the side of horizontal semi-circular groove by 1 lateral surface compressing having a horizontal semi-circular groove on hard ball 6 and motion workbench, drive block 5 there is the side of circular indentations be connected with fixed platform 3 by piezoelectric ceramic actuator 4.
Claims (1)
1. a translation orthogonal decoupling parallel micromotion platform, comprise motion workbench (1), fixed platform (3), be connected to four movement branched chain (2) being positioned at top between motion workbench (1) and fixed platform (3), be connected between motion workbench (1) and fixed platform (3) be positioned at below four movement branched chain (2) and two drive side chain, it is characterized in that: motion workbench (1) is a square, and adjacent two center side all have horizontal semi-circular groove, fixed platform (3) is the rectangular block having square groove in the middle of, be connected to the line that four movement branched chain (2) being positioned at top between motion workbench (1) and fixed platform (3) and four movement branched chain (2) being positioned at below all go up end face and bottom surface geometric center about motion workbench (1) uniform, all movement branched chain (2) are " bow " font spring chain, one end of four movement branched chain (2) above being positioned at is corresponding with four sides of motion workbench (1) respectively to be connected, its other end is corresponding with four sides of the square groove of fixed platform (3) respectively to be connected, the upper end face being positioned at " bow " font end face of four movement branched chain (2) of top and motion workbench (1) is coplanar, one end of four movement branched chain (2) below being positioned at is corresponding with four sides of motion workbench (1) respectively to be connected, its other end is corresponding with four sides of the square groove of fixed platform (3) respectively to be connected, the bottom surface being positioned at " bow " font bottom surface of four movement branched chain (2) of below and motion workbench (1) is coplanar, article two, drive side chain to be the drive block (5) having horizontal semi-circular groove and circular indentations two opposite flanks respectively, drive block (5) there is the side of horizontal semi-circular groove have the lateral surface compressing of horizontal semi-circular groove by hard ball (6) and (1) on motion workbench, drive block (5) there is the side of circular indentations be connected with fixed platform (3) by piezoelectric ceramic actuator (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310575994.5A CN103568005B (en) | 2013-11-18 | 2013-11-18 | Dual-translation orthogonal decoupling parallel micro-positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310575994.5A CN103568005B (en) | 2013-11-18 | 2013-11-18 | Dual-translation orthogonal decoupling parallel micro-positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103568005A CN103568005A (en) | 2014-02-12 |
| CN103568005B true CN103568005B (en) | 2015-07-15 |
Family
ID=50041154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310575994.5A Expired - Fee Related CN103568005B (en) | 2013-11-18 | 2013-11-18 | Dual-translation orthogonal decoupling parallel micro-positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103568005B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104196952B (en) * | 2014-07-14 | 2016-01-13 | 西安电子科技大学 | The miniature flexible hinge vibration reduction platform of two-freedom and oscillation damping method |
| CN105988021A (en) * | 2015-02-05 | 2016-10-05 | 中国科学院沈阳自动化研究所 | Optical super-resolution dynamic imaging system and method based on microlens modified probe |
| CN104842343B (en) * | 2015-05-25 | 2020-08-07 | 山东理工大学 | Direct-drive type one-rotation three-translation micro-operation robot |
| CN105643604B (en) * | 2016-03-25 | 2018-06-12 | 西安电子科技大学 | A kind of submissive system of four-degree-of-freedom fine motion |
| CN107356190B (en) * | 2017-07-20 | 2019-06-18 | 北京航天控制仪器研究所 | A kind of two degrees of freedom micro-displacement |
| CN108074625A (en) * | 2017-12-29 | 2018-05-25 | 苏州迈客荣自动化技术有限公司 | A kind of micromotion platform |
| CN109878593B (en) * | 2018-11-21 | 2021-07-27 | 南京航空航天大学 | Multi-mode flexible robot and control method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6675671B1 (en) * | 2002-05-22 | 2004-01-13 | Sandia Corporation | Planar-constructed spatial micro-stage |
| CN101862966A (en) * | 2010-07-02 | 2010-10-20 | 上海交通大学 | Two-degree of freedom translation parallel decoupling micromotion platform |
| CN102059693A (en) * | 2010-11-05 | 2011-05-18 | 山东理工大学 | Dual-translation microoperating platform comprising quadrate elastic pair |
| CN102664045A (en) * | 2012-05-17 | 2012-09-12 | 合肥工业大学 | 16-bartwo-dimensional no-coupling micro displacement worktable |
| CN102962683A (en) * | 2012-11-22 | 2013-03-13 | 上海交通大学 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03115892A (en) * | 1989-09-29 | 1991-05-16 | Hitachi Constr Mach Co Ltd | Micromotion mechanism |
| WO2006050560A1 (en) * | 2004-11-11 | 2006-05-18 | Adelaide Research And Innovation | Parallel micromanipulator and control method |
-
2013
- 2013-11-18 CN CN201310575994.5A patent/CN103568005B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6675671B1 (en) * | 2002-05-22 | 2004-01-13 | Sandia Corporation | Planar-constructed spatial micro-stage |
| CN101862966A (en) * | 2010-07-02 | 2010-10-20 | 上海交通大学 | Two-degree of freedom translation parallel decoupling micromotion platform |
| CN102059693A (en) * | 2010-11-05 | 2011-05-18 | 山东理工大学 | Dual-translation microoperating platform comprising quadrate elastic pair |
| CN102664045A (en) * | 2012-05-17 | 2012-09-12 | 合肥工业大学 | 16-bartwo-dimensional no-coupling micro displacement worktable |
| CN102962683A (en) * | 2012-11-22 | 2013-03-13 | 上海交通大学 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103568005A (en) | 2014-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103568005B (en) | Dual-translation orthogonal decoupling parallel micro-positioning platform | |
| CN100484728C (en) | Three-translation orthogonal decoupling parallel micromotion platform | |
| CN103552061B (en) | Parallel micro-motion platform with one translational degree of freedom and two rotational degrees of freedom | |
| CN103021472B (en) | Plane parallel type three-freedom-degree precise positioning work table | |
| CN202428438U (en) | Six-freedom-degree parallel connection micro robot | |
| CN101531002B (en) | Micro-nano working platform of four-dimensional mobile orthogonal structure | |
| CN101362336A (en) | Two-degree of freedom translational parallel manipulator by redundant actuation | |
| CN101733754B (en) | Three-dimensionally moved decoupling micro-manipulating robot | |
| CN101491899A (en) | Five freedom-degree paralleled robot | |
| CN104526687A (en) | Three-movement one-rotation four-degree-of-freedom decoupling parallel-connected mechanism | |
| CN102626921B (en) | Non-concurrent axis symmetric two-rotation one-movement parallel mechanism with two-degree of freedom planar subchains | |
| CN103486413A (en) | Three-freedom-degree decoupling large-stroke micro-positioning platform | |
| CN101530999A (en) | Micro-nano working platform of five-dimensional mobile orthogonal structure | |
| CN105196280A (en) | Redundant drive type three-horizontal-movement micro-operation robot | |
| CN103395059A (en) | Three-freedom-degree flexible topology decoupling parallel-connection micro displacement platform | |
| CN201669702U (en) | Five-degree-of-freedom parallel manipulator mechanism | |
| CN201109120Y (en) | Microposition platform for 2dof parallel structure | |
| CN107471201A (en) | A kind of relative freedom is three structural redundancy parallel robot mechanism | |
| CN104999452A (en) | Three-freedom-degree micro-operation robot | |
| CN102059693B (en) | Dual-translation microoperating platform comprising quadrate elastic pair | |
| CN104999457A (en) | Large-stroke three-freedom-degree micro-operation robot | |
| CN1092097C (en) | Vernier robot with decoupled parallel three freedoms and three-axle structure | |
| CN105291092B (en) | Self-aligning three-rotation parallel robot with plane pair | |
| CN200991901Y (en) | Three flat-moving orthogonal decoupling paralled connecting micromovement platform | |
| CN103586863A (en) | Planar three-degree-of-freedom parallel micro-positioning platform of symmetric structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150715 Termination date: 20151118 |
|
| EXPY | Termination of patent right or utility model |