CN101530999A - Micro-nano working platform of five-dimensional mobile orthogonal structure - Google Patents
Micro-nano working platform of five-dimensional mobile orthogonal structure Download PDFInfo
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- CN101530999A CN101530999A CN200910049398A CN200910049398A CN101530999A CN 101530999 A CN101530999 A CN 101530999A CN 200910049398 A CN200910049398 A CN 200910049398A CN 200910049398 A CN200910049398 A CN 200910049398A CN 101530999 A CN101530999 A CN 101530999A
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Abstract
The invention relates to a micro-nano working platform of five-dimensional mobile orthogonal structure, belonging to the robotics field and comprising bases, a workbench, P-4S branched chains, piezoelectric actuators and four PSS branched chains. Each base corresponding to each branched chain is provided with a parallel plate elasticity sliding joint, each elasticity parallel plate sliding joint is provided with a piezoelectric actuator, the extending direction of the piezoelectric actuator is the same as the moving direction of the elasticity parallel plate sliding joint. The bases are connected with the workbench by one P-4S branched chain in direction Z driven by a single piezoelectric actuator; the bases and the workbench are respectively connected with two PSS branched chains in directions X and Y driven by a double piezoelectric actuator, each two PSS branched chains are mutually parallel and respectively arranged along the direction vertical to two P-4S branched chains, the symmetrical axes of the branched chains of each group are orthogonal at the initial position. The invention features simple structure, displacement decoupling and huge bearing capacity and can realize five degree-of-freedom micromotion of zero fraction and zero clearance.
Description
Technical field
What the present invention relates to is the device in a kind of Robotics field, and specifically, what relate to is a kind of micro-nano working platform of five-dimensional mobile orthogonal structure.
Background technology
The parallel micro-manipulator robot has sub-micron to nano level positioning accuracy, in Precision Machining, Electronic Packaging, fiber alignment, biological and fields such as genetic engineering, material science and Aero-Space, all have broad application prospects, and the problem of Chinese scholars concern especially.Since in 1962, after Ellis had at first proposed to adopt the micro-manipulating robot of Piezoelectric Ceramic, the research of jiggle robot had caused the attention of Chinese scholars.Hara and Sugimoto proposition in 1989 have also been studied a kind of jiggle robot that replaces conventional hinge with flexible hinge; Si Taodun (Stoughton) has designed a kind of jiggle robot of being made up of two parallel institutions, and each parallel institution is made up of six piezoelectric type elements; The Kallio of Holland has developed the 3-DOF parallel micromotion robot by hydraulic drive system drives; The Pernette of Switzerland etc. has designed a kind of 6-DOF jiggle robot in parallel, is used for locating single-mode fiber on succession optical fiber egative film.A kind of full flexible parallel connection micro-manipulating robot of 6-DOF that adopts piezoelectric ceramic actuator has been developed on peak etc. at home, the 2-2-2 orthohormbic structure that has been characterized in adopting the PSS side chain to constitute.Liu Pingan etc. have studied a kind of freedom degree parallel connection jiggle robot of two translations, one rotational structure.The subject matter that these jiggle robots exist is: the complex structure that has, the demarcation difficulty that has, the displacement decoupling zero difficulty that has.
Find through literature search prior art, " the moving condition design of asymmetric three translation parallel mechanism " that Yang Qizhi etc. delivered on the 112nd page of the 37th the 10th phase of volume of " agricultural mechanical journal " October in 2006, propose in this article to design a kind of novel asymmetrical three translation parallel mechanism according to screw theory, its deficiency is that structure is asymmetric, can not realize isotropism, demarcate difficulty.And at present the research of jiggle robot also mainly concentrates on Three Degree Of Freedom jiggle robot and six-freedom micro displacement robot, to the research of jiggle robot with four-degree-of-freedom and five degree of freedom also seldom.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, propose a kind of micro-nano working platform of five-dimensional mobile orthogonal structure.This operating desk has five degree of freedom, and has structure decoupling, the rigidity height, and bearing capacity is strong, and advantages such as no hysteresis have really realized the integrated design and the making of mechanism.
The present invention is achieved by the following technical solutions, the present invention includes pedestal, workbench, a P-4S (1 moving sets and 4 ball pairs) side chain, piezoelectric ceramic actuator and four PSS (1 moving sets and 2 ball pairs) side chain.Link to each other with two pairs of PSS side chains by a P-4S side chain that is made of flexible hinge between pedestal and the workbench, the every pair of PSS side chain and PSS side chain in the same way parallel by two formed.It is secondary and be connected with workbench by the elasticity ball pivot respectively to be provided with parallel-plate resilient movement on the corresponding pedestal of each side chain.Each elasticity parallel-plate moving sets respectively disposes a piezoelectric ceramic actuator, and its axis respectively with x, y, three reference axis of z parallel, and represent rectilinear direction, horizontal line direction and vertical line direction respectively.On the Z direction that single piezoelectric ceramic actuator drives, is connected by a P-4S side chain between pedestal and the workbench, on the X and Y direction of double piezoelectric ceramic driver drives, be connected by two PSS flexibility side chains respectively between pedestal and the workbench.Per two PSS side chains be parallel to each other and respectively along and the perpendicular direction of two P-4S side chains arrange.The axis of symmetry that initial position is respectively organized side chain is vertical mutually.By a P-4S side chain and four PSS side chains workbench 1 is driven, realize the rotation that reaches around Z axle and Y-axis of moving along X, Y, three directions of Z.
Described each P-4S side chain comprises: the first elasticity parallel-plate moving sets, first connecting rod, first ball pivot, second ball pivot, the 3rd ball pivot, the 4th ball pivot, second connecting rod, third connecting rod, the 4th connecting rod and the 5th connecting rod.First ball pivot, second ball pivot, the 3rd ball pivot and the 4th ball pivot and first connecting rod, second connecting rod, third connecting rod and workbench are formed 4S mechanism, each elasticity 4S mechanism links to each other with workbench by second ball pivot and the 3rd ball pivot, links by first ball pivot and the 4th ball pivot and first connecting rod.Elasticity 4S mechanism links to each other by first connecting rod with the first elasticity parallel-plate moving sets, and the first elasticity parallel-plate moving sets links to each other with pedestal with the 5th connecting rod by the 4th connecting rod.
Described each PSS side chain comprises: the second elasticity parallel-plate moving sets, the 5th ball pivot, the 6th ball pivot, the 6th connecting rod, seven-link assembly and the 8th connecting rod.Link to each other by the 6th connecting rod between the 5th ball pivot and the 6th ball pivot, the 6th ball pivot directly links to each other with the second elasticity parallel-plate moving sets.Whole PSS side chain links to each other with workbench by the 5th ball pivot, links to each other with pedestal with the 8th connecting rod by seven-link assembly.
Entire mechanism body of the present invention is formed by a block of material integral cutting, on the corresponding pedestal of each side chain, directly process five parallel-plate resilient movement pairs, and dispose five piezoelectric ceramic actuators, by a P-4S side chain and four PSS side chains workbench is driven, to realize the rotation that reaches around Z axle and Y-axis of moving along X, Y, three directions of Z.The present invention can realize not having friction, no gap, three-dimensional unlubricated and that do not have a hysteresis moves and two dimension is rotated, and can be widely used in fields such as fiber alignment, nano impression, life and genetic engineering and little assembling.
Description of drawings
Fig. 1 is the micro-nano working platform of five-dimensional mobile orthogonal structure schematic diagram
Fig. 2 is the structure diagram of P-4S side chain
Fig. 3 is the structure diagram of PSS side chain
Among the figure: 1 is pedestal, and 2 is workbench, and 3 is the P-4S side chain, and 4 is piezoelectric ceramic actuator, 5 is the PSS side chain, and 6 is first connecting rod, and 7 is first ball pivot, and 8 is second connecting rod, 9 is second ball pivot, and 11 is the 3rd ball pivot, and 12 is third connecting rod, and 13 is the 4th ball pivot, 14 is the 4th connecting rod, and 15 is the 5th connecting rod, and 16 is the first elasticity parallel-plate moving sets, 18 is the 5th ball pivot, and 19 is the 6th connecting rod, and 20 is the 6th ball pivot, 21 is the second elasticity parallel-plate moving sets, and 20 is seven-link assembly, and 17 is the 8th connecting rod.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment micro-nano working platform of five-dimensional mobile orthogonal structure device people can realize three-dimensional moving and the two dimension rotation, its body is the non-assembly of time processing moulding, comprises pedestal 1, workbench 2, P-4S side chain 3, piezoelectric ceramic actuator 4 and four PSS side chains 5.Link to each other with two pairs of PSS side chains by a P-4S side chain 3 that is made of flexible hinge between pedestal 1 and the workbench 2, the every pair of PSS side chain and PSS side chain 5 in the same way parallel by two formed.On five corresponding pedestals 1 of side chain, directly process five elasticity parallel-plate moving sets and be connected with workbench 2 by the elasticity ball pivot that integral body processes.Piezoelectric ceramic actuator 4 of each elasticity parallel-plate moving sets configuration, the flexible direction of piezoelectric ceramic actuator 4 is identical with the moving direction of elasticity parallel-plate moving sets.On the Z direction that single piezoelectric ceramic actuator 4 drives, be connected by a P-4S side chain 3 between pedestal 1 and the workbench 2; On X and Y direction that double piezoelectric ceramic driver 4 drives, be connected by two PSS side chains 5 respectively between pedestal 1 and the workbench 2.Drive by a P-4S side chain 3 and 5 pairs of workbench 2 of four PSS side chains, to realize the rotation that reaches around Z axle and Y-axis of moving along X, Y, three directions of Z.
At initial position, the axis direction of two pairs of PSS side chains is parallel with Y-axis with the X-axis of whole orthohormbic structure micro-nano operating desk respectively, and the axis direction of P-4S side chain 3 is parallel with the Z axle of whole orthohormbic structure micro-nano operating desk, and each is organized the side chain axis direction and is arranged vertically mutually.The driving direction of piezoelectric ceramic actuator 4 parallels with the coordinate system axis direction all the time.
As shown in Figure 2, be the partial structurtes figure of P-4S side chain 3.Each P-4S side chain 3 consists of the following components: the first elasticity parallel-plate moving sets 16, first connecting rod 6, first ball pivot 7, second ball pivot 9, the 3rd ball pivot 11 and the 4th ball pivot 13, second connecting rod 8, third connecting rod 12, the 4th connecting rod 14 and the 5th connecting rod 15.First ball pivot 7, second ball pivot 9, the 3rd ball pivot 11 and the 4th ball pivot 13 and first connecting rod 6, second connecting rod 8, third connecting rod 12 and workbench 2 are formed 4S mechanism, each elasticity 4S mechanism links to each other with workbench 2 by second ball pivot 9 and the 3rd ball pivot 11, links with first connecting rod 6 by first ball pivot 7 and the 4th ball pivot 13.Elasticity 4S mechanism links to each other by first connecting rod 6 with the first elasticity parallel-plate moving sets 16, and the first elasticity parallel-plate moving sets 16 links to each other with pedestal 1 with the 5th connecting rod 15 by the 4th connecting rod 14.
As shown in Figure 3, be the partial structurtes figure of PSS side chain 5.Each PSS side chain 5 consists of the following components: the second elasticity parallel-plate moving sets 21, the 5th ball pivot 18, the 6th ball pivot 20, the 6th connecting rod 19, seven-link assembly 10 and the 8th connecting rod 17.Link to each other by the 6th connecting rod 19 between the 5th ball pivot 18 and the 6th ball pivot 20, the 6th ball pivot 20 directly links to each other with the second elasticity parallel-plate moving sets 21.Whole PSS side chain links to each other with workbench 2 by the 5th ball pivot 18, links to each other with pedestal 1 with the 8th connecting rod 17 by seven-link assembly 10.
Power up and make each piezoelectric ceramic actuator 4 all be in the half trip state to determine initial zero, the voltage that only need increase or reduce piezoelectric ceramic actuator 4 on the respective direction in the time of need carrying out positive negative direction mobile gets final product.Carry out timing signal and can be earlier calculate theoretical stroke on all directions, compensate by ANSYS finite element analysis and actual measurement then with method of geometry.When the parallel a pair of PSS side chain of axis and X-axis along the displacement of axis X direction when identical, then this micro-nano operating desk can moving along directions X, and when two PSS side chains that be parallel to each other along the displacement of axis X direction not simultaneously, then may produce simultaneously around the rotation of Y-axis and along X-axis move or around the pure rotation of Y-axis.When the parallel a pair of PSS side chain of axis and Y-axis along the displacement of axis Y direction when identical, then this micro-nano operating desk can moving along the Y direction, and when two PSS side chains that be parallel to each other along the displacement of axis Y direction not simultaneously, then may produce simultaneously around the rotation of Z axle and along Y-axis move or around the pure rotation of Z axle.Because the P-4S side chain lacks a rotary freedom around its 4S mechanism place plane normal, so this micro-nano operating desk can only be realized the rotation that reaches along Y-axis and Z axle of moving along X, Y, three directions of Z.This micro-nano operating desk has been realized the integrated design and the manufacturing of mechanism, and has simple in structure, displacement decoupling zero, no gap, need not lubricate and advantage such as bearing capacity is big.
Claims (3)
1, a kind of micro-nano working platform of five-dimensional mobile orthogonal structure, it is characterized in that comprising pedestal, workbench, a P-4S side chain, piezoelectric ceramic actuator and four PSS side chains, link to each other with two pairs of PSS side chains by a P-4S side chain between pedestal and the workbench, the every pair of PSS side chain and PSS side chain in the same way parallel by two formed, on the corresponding pedestal of each side chain, respectively be provided with a parallel-plate resilient movement pair, each elasticity parallel-plate moving sets respectively is provided with a piezoelectric ceramic actuator, the flexible direction of piezoelectric ceramic actuator is identical with the moving direction of elasticity parallel-plate moving sets, on the Z direction that single piezoelectric ceramic actuator drives, be connected by a P-4S side chain between pedestal and the workbench; On the X and Y direction of double piezoelectric ceramic driver drives, be connected by two PSS side chains respectively between pedestal and the workbench, per two PSS side chains be parallel to each other and respectively along and the perpendicular direction of two P-4S side chains arrange that the axis of symmetry that initial position is respectively organized side chain is vertical mutually.
2, micro-nano working platform of five-dimensional mobile orthogonal structure according to claim 1, it is characterized in that, described each P-4S side chain comprises: the first elasticity parallel-plate moving sets, first connecting rod, first ball pivot, second ball pivot, the 3rd ball pivot, the 4th ball pivot, second connecting rod, third connecting rod, the 4th connecting rod and the 5th connecting rod, first ball pivot wherein, second ball pivot, the 3rd ball pivot and the 4th ball pivot and first connecting rod, second connecting rod, third connecting rod and workbench are formed 4S mechanism, each elasticity 4S mechanism links to each other with workbench by second ball pivot and the 3rd ball pivot, link by first ball pivot and the 4th ball pivot and first connecting rod, elasticity 4S mechanism links to each other by first connecting rod with the first elasticity parallel-plate moving sets, and the first elasticity parallel-plate moving sets links to each other with pedestal with the 5th connecting rod by the 4th connecting rod.
3, micro-nano working platform of five-dimensional mobile orthogonal structure according to claim 1, it is characterized in that, described each PSS side chain comprises: the second elasticity parallel-plate moving sets, the 5th ball pivot, the 6th ball pivot, the 6th connecting rod, seven-link assembly and the 8th connecting rod, wherein link to each other by the 6th connecting rod between the 5th ball pivot and the 6th ball pivot, the 6th ball pivot directly links to each other with the second elasticity parallel-plate moving sets, whole PSS side chain links to each other with workbench by the 5th ball pivot, and links to each other with pedestal with the 8th connecting rod by seven-link assembly.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103486413A (en) * | 2013-10-11 | 2014-01-01 | 天津理工大学 | Three-freedom-degree decoupling large-stroke micro-positioning platform |
| CN103552066A (en) * | 2013-11-18 | 2014-02-05 | 山东理工大学 | Deviation prevention type elastic moving pair |
| CN104090359A (en) * | 2014-07-10 | 2014-10-08 | 中国科学院国家天文台南京天文光学技术研究所 | Five-freedom-degree auxiliary lens adjusting mechanism of astronomical telescope working in extreme environment |
| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109857163A (en) * | 2019-03-25 | 2019-06-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of plane and straight line displacement monitoring control system |
| CN109949856A (en) * | 2019-03-15 | 2019-06-28 | 天津理工大学 | A kind of Modularized 6 freedom degree precise jiggle mechanism based on flexible hinge |
| CN113125094A (en) * | 2019-12-31 | 2021-07-16 | 上海交通大学 | Six-degree-of-freedom micro-vibration device based on flexible mechanism |
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2009
- 2009-04-16 CN CN200910049398A patent/CN101530999A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103486413A (en) * | 2013-10-11 | 2014-01-01 | 天津理工大学 | Three-freedom-degree decoupling large-stroke micro-positioning platform |
| CN103486413B (en) * | 2013-10-11 | 2016-02-10 | 天津理工大学 | Three freedom decoupling Long Distances mini positioning platform |
| CN103552066A (en) * | 2013-11-18 | 2014-02-05 | 山东理工大学 | Deviation prevention type elastic moving pair |
| CN103552066B (en) * | 2013-11-18 | 2015-07-01 | 山东理工大学 | Deviation prevention type elastic moving pair |
| CN104090359A (en) * | 2014-07-10 | 2014-10-08 | 中国科学院国家天文台南京天文光学技术研究所 | Five-freedom-degree auxiliary lens adjusting mechanism of astronomical telescope working in extreme environment |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| CN109256175B (en) * | 2018-11-08 | 2023-04-28 | 江南大学 | High-precision large-stroke space translation micro-positioning platform |
| CN109256174B (en) * | 2018-11-08 | 2023-06-06 | 江南大学 | High-precision space translation micro-positioning platform |
| CN109949856A (en) * | 2019-03-15 | 2019-06-28 | 天津理工大学 | A kind of Modularized 6 freedom degree precise jiggle mechanism based on flexible hinge |
| CN109949856B (en) * | 2019-03-15 | 2021-01-29 | 天津理工大学 | Modularized six-degree-of-freedom precise micro-motion mechanism based on flexible hinge |
| CN109857163A (en) * | 2019-03-25 | 2019-06-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of plane and straight line displacement monitoring control system |
| CN113125094A (en) * | 2019-12-31 | 2021-07-16 | 上海交通大学 | Six-degree-of-freedom micro-vibration device based on flexible mechanism |
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Open date: 20090916 |