CN109256175B - High-precision large-stroke space translation micro-positioning platform - Google Patents
High-precision large-stroke space translation micro-positioning platform Download PDFInfo
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- CN109256175B CN109256175B CN201811323431.6A CN201811323431A CN109256175B CN 109256175 B CN109256175 B CN 109256175B CN 201811323431 A CN201811323431 A CN 201811323431A CN 109256175 B CN109256175 B CN 109256175B
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Abstract
The invention provides a high-precision large-stroke space translation micro-positioning platform, which can solve the problems that the existing concentrated compliance type micro-positioning platform is easy to have stress concentration and is difficult to realize millimeter-level large stroke on the premise of high precision. The device comprises a base, a movable platform and three flexible branched chains, wherein the three flexible branched chains are in orthogonal arrangement, two ends of each flexible branched chain are fixedly connected to the base and the movable platform respectively, voice coil motor drivers for driving the flexible branched chains are further arranged on the base, and each flexible branched chain comprises a driving pair, a first passive pair and a second passive pair; the driving pair, the first driven pair and the second driven pair are composed of symmetrically arranged composite flexible moving pairs, each composite flexible moving pair comprises two groups of flexible reeds, the two flexible reeds of the same group are parallel to each other, and the flexible reeds are connected through a rigid connecting piece.
Description
Technical Field
The invention relates to the field of flexible mechanisms, in particular to a high-precision large-stroke space translation micro-positioning platform.
Background
The flexible mechanism is a novel mechanism for transmitting motion by utilizing elastic deformation of materials, and the kinematic pair in the mechanism is of an integrated flexible structure, so that the defects of assembly errors, friction, abrasion, gaps and the like affecting the service life and the precision of the mechanism are avoided. Along with the further improvement of the requirements of the fields of micro-manufacture of microelectronic and optoelectronic components, micro-electromechanical systems, bioengineering and the like on the positioning precision, the flexible mechanism is widely applied in the micro-positioning field and has immeasurable prospect, wherein the space translation micro-positioning platform is widely applied to the three-dimensional scanning, micro-nano operation, advanced sensing and other systems of an atomic force microscope. At present, a new configuration design with large travel, high precision and motion decoupling is a research hotspot of a spatial translational micro-positioning platform.
The space translation micro-positioning platform can be divided into a centralized flexible micro-positioning platform and a distributed flexible micro-positioning platform, wherein the centralized flexible micro-positioning platform has more research and the distributed flexible micro-positioning platform has less research. The three-translation orthogonal decoupling parallel micro-motion platform disclosed in the invention patent with the patent number ZL200620162291.5 and the space three-dimensional moving full-flexible parallel micro-motion platform disclosed in the invention with the patent number ZL201510228721.2 belong to a concentrated flexible micro-positioning platform, and the branched chains used by the platform are of flexible hinge structures with notches, so that stress concentration is easy to occur at the notches, and complete decoupling cannot be realized among all motion degrees of freedom, so that millimeter-level large stroke is difficult to ensure on the premise of high precision.
Disclosure of Invention
Aiming at the technical problems that the existing concentrated flexibility type micro-positioning platform is provided with a flexible hinge structure with a notch, stress concentration is easy to occur at the notch, complete decoupling cannot be realized among all the motion degrees of freedom, and millimeter-level large-stroke is difficult to ensure on the premise of high precision, the invention provides a high-precision large-stroke space translational micro-positioning platform, which belongs to a distributed flexibility type micro-positioning platform, has no stress concentration problem, can realize complete decoupling, and can realize millimeter-level large-stroke while having high positioning precision.
The technical scheme is as follows: the utility model provides a high accuracy large stroke space translation micro-positioning platform, its includes base, moves platform and three flexible branched chain, three flexible branched chain is the quadrature and arranges, flexible branched chain's both ends are respectively rigid coupling the base with move on the platform, its characterized in that: the base is also provided with voice coil motor drivers respectively used for driving the flexible branched chains, and the flexible branched chains comprise a driving pair, a first passive pair and a second passive pair; the driving pair, the first driven pair and the second driven pair are composed of symmetrically arranged composite flexible moving pairs, each composite flexible moving pair comprises two groups of flexible reeds, the two flexible reeds of the same group are parallel to each other, one end of each flexible reed of the first group is connected through a first rigid connecting piece, one end of each flexible reed of the second group is connected through a second rigid connecting piece, and the other ends of the two flexible reeds are arranged in the same direction and are connected through a third rigid connecting piece; the first rigid connecting piece of the driving pair is fixedly connected to the base, the second rigid connecting piece of the driving pair and the voice coil motor driver are respectively connected to the first rigid connecting piece of the first driven pair, the second rigid connecting piece of the first driven pair is connected to the first rigid connecting piece of the second driven pair, and the second rigid connecting piece of the second driven pair is fixedly connected with the movable platform; and the deformation directions of the flexible reeds in the driving pair, the first driven pair and the second driven pair are orthogonal.
It is further characterized by:
the driving pair, the first passive pair and the second passive pair are integrally formed.
The first rigid connecting piece is a U-shaped connecting piece, the second rigid connecting piece is a thick plate connecting piece, the third rigid connecting piece is a thin plate connecting piece, flanges extending inwards are respectively arranged at two ends of the U-shaped connecting piece, one ends of a first group of two flexible reeds are respectively connected with the two flanges, the second group of flexible reeds are inserted between the two flexible reeds of the first group in parallel, one ends, close to the flanges, of the flexible reeds are connected through the thick plate connecting piece, the thick plate connecting piece extends out of the U-shaped connecting piece, the other ends of the two groups of flexible reeds are connected through the thin plate connecting piece, and a gap is reserved between the thin plate connecting piece and the inner bottom surface of the U-shaped connecting piece.
The driving pair comprises four composite flexible moving pairs, and the first driven pair and the second driven pair comprise two composite flexible moving pairs; the two composite flexible moving pairs in the second passive pair are oppositely arranged, and the first rigid connecting pieces and the second rigid connecting pieces in the two composite flexible moving pairs are correspondingly connected one by one; two composite flexible moving pairs in the first passive pair are symmetrically arranged at middle positions of the left side and the right side of the second passive pair; four of the driving pairs are respectively arranged on the upper side and the lower side of two of the first driven pairs, and the four composite flexible moving pairs are distributed in a rectangular shape.
The voice coil motor driver is installed on the base through a mounting bracket, the mounting bracket and the voice coil motor driver are both positioned on the outer side of the base, the mounting bracket is fixedly connected on the base, the fixed end of the voice coil motor driver is fixedly connected on the mounting bracket, the driving end of the voice coil motor driver vertically penetrates through the base and then is connected with a driving connecting rod, and two ends of the driving connecting rod are fixedly connected with the left end and the right end of the first passive pair respectively.
Three of the flexible branches are spatially rotated 90 ° relative to each other.
The beneficial effects of the invention are as follows:
the flexible branched chain of the space translation micro-positioning platform is formed by sequentially connecting a driving pair, a first driven pair and a second driven pair in series, the driving pair, the first driven pair and the second driven pair are respectively formed by symmetrically arranged composite flexible movable pairs, the composite flexible movable pairs comprise two groups of flexible reeds, the two flexible reeds of the same group are parallel to each other, the two flexible reeds of the same group are connected through a rigid connecting piece, the flexible reeds of different groups are connected through the rigid connecting piece to realize reverse series connection, and the deformation directions of the flexible reeds in the driving pair, the first driven pair and the second driven pair are orthogonal, so that the distributed flexibility type space translation micro-positioning platform is formed, the deformation of materials can be uniformly distributed on the whole reeds, and therefore, the stress concentration phenomenon is avoided.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the connection of a voice coil motor driver, mounting bracket, drive link and flexible branches;
FIG. 3 is a schematic structural view of a flexible branch;
fig. 4 is a schematic structural view of a composite flexible mobile pair.
Reference numerals: 1-a base; 2-a movable platform; 3-flexible branches; 4-voice coil motor driver; 5-flexible reed; 6-rigid connection one; 7-a second rigid connection; 8-a third rigid connection; 9-mounting a bracket; 10-a drive link; 30-a composite flexible mobile pair; 31-active pair; 32-a first passive pair; 33-a second passive pair; 61-flange.
Detailed Description
1-4, the high-precision large-stroke space translational micro-positioning platform comprises a base 1, a movable platform 2 and three flexible branched chains 3, wherein in FIG. 1, the base 1 consists of three orthogonal planes, and the movable platform 2 consists of three orthogonal connecting rods, so that the structure is convenient to assemble; the three flexible branched chains 3 are orthogonally arranged, two ends of the flexible branched chains 3 are fixedly connected to the base 1 and the movable platform 2 respectively, and voice coil motor drivers 4 for driving the flexible branched chains 3 are arranged on the base 1 respectively; the flexible branched chain 3 comprises an active pair 31, a first passive pair 32 and a second passive pair 33; the driving pair 31, the first driven pair 32 and the second driven pair 33 are composed of symmetrically arranged composite flexible moving pairs 30, each composite flexible moving pair 30 comprises two groups of flexible reeds 5, the two flexible reeds 5 of the same group are parallel to each other, one ends of the two flexible reeds 5 of the first group are connected through a first rigid connecting piece 6, one ends of the two flexible reeds 5 of the second group are connected through a second rigid connecting piece 7, and the other ends of the two flexible reeds 5 of the second group are arranged in the same direction and are connected through a third rigid connecting piece 8; the first rigid connecting piece 6 of the driving pair 31 is fixedly connected to the base 1 through a screw, the second rigid connecting piece 7 of the driving pair 31 and the voice coil motor driver 4 are respectively connected to the first rigid connecting piece 6 of the first driven pair 32, the second rigid connecting piece 7 of the first driven pair 32 is connected to the first rigid connecting piece 6 of the second driven pair 33, the second rigid connecting piece 7 of the second driven pair 33 is fixedly connected with the driven platform 2 through a screw, and the deformation directions of the flexible reeds 5 in the driving pair 31, the first driven pair 32 and the second driven pair 33 are orthogonal. The platform disclosed by the invention has the advantages that the driving pair 31, the first driven pair 32 and the second driven pair 33 are integrally formed, the structure is compact, and the assembly error is reduced.
Referring to fig. 4, the first rigid connecting member 6 is a U-shaped connecting member, the second rigid connecting member 7 is a thick plate connecting member, the third rigid connecting member 8 is a thin plate connecting member, two ends of the U-shaped connecting member are respectively provided with flanges 61 extending inwards, one ends of the first group of two flexible reeds 5 are respectively connected with the two flanges 61, the second group of flexible reeds 5 are inserted between the first group of two flexible reeds 5 in parallel and one ends of the second group of flexible reeds close to the flanges 61 are connected through the thick plate connecting member, the thick plate connecting member extends out of the U-shaped connecting member, the other ends of the two groups of flexible reeds 5 are connected through the thin plate connecting member, and a gap is reserved between the thin plate connecting member and the inner bottom surface of the U-shaped connecting member. The design is simple in structure and convenient to process of the composite flexible moving pair.
Referring to fig. 3, the driving pair 31 includes four complex flexible moving pairs 30, and the first and second driven pairs 32 and 33 each include two complex flexible moving pairs 30; the two composite flexible moving pairs 30 in the second passive pair 33 are oppositely arranged, and the first rigid connecting pieces 6 and the second rigid connecting pieces 7 in the two composite flexible moving pairs 30 are connected in a one-to-one correspondence manner, so that the two composite flexible moving pairs 30 in the second passive pair 33 are connected into a whole; two composite flexible moving pairs 30 in the first passive pair 32 are symmetrically arranged at middle positions of the left side and the right side of the second passive pair 33, and thick plate connecting pieces of the first passive pair 32 extend out of the U-shaped connecting pieces and are connected with the side walls of the U-shaped connecting pieces of the second passive pair 33; four compound flexible sliding pairs 30 in the driving pair 31 are respectively arranged on the upper side and the lower side of two compound flexible sliding pairs 30 in the first driven pair 32, the four compound flexible sliding pairs 30 are distributed in a rectangular shape, and thick plate connecting pieces of the driving pair 31 extend out of the U-shaped connecting pieces and are connected with the side walls of the U-shaped connecting pieces of the first driven pair 32. By the design, the deformation directions of the flexible reeds 5 in the driving pair 31, the first driven pair 32 and the second driven pair 33 are orthogonal, the flexible branched chain structure is more compact and reasonable, parasitic errors during deformation of the kinematic pair can be effectively eliminated, and the kinematic formation is large, so that the platform motion is completely decoupled, and the millimeter-level large stroke can be realized while the positioning accuracy is high.
Referring to fig. 1 and 2, the voice coil motor driver 4 is mounted on the base 1 through a mounting bracket 9, the mounting bracket 9 and the voice coil motor driver 4 are both located on the outer side of the base 1, the mounting bracket 9 is fixedly connected on the base 1 through screws, the fixed end of the voice coil motor driver 4 is fixedly connected on the mounting bracket 9, the driving end of the voice coil motor driver 4 vertically passes through the base 1 and then is connected with a driving connecting rod 10, the driving connecting rod 10 is in a U-shaped rod-shaped structure, the driving connecting rod 10 is sleeved on the outer side of the first passive pair 32, and two ends of the driving connecting rod 10 are fixedly connected on the bottom surface of the U-shaped connecting piece of the first passive pair 32 through screws respectively.
See fig. 1, three flexible branches 3 are rotated 90 ° in space, so designed that the platform is completely isotropic, and the same motion capability of the movable platform in three translation directions can be ensured no matter how the base is placed.
When the voice coil motor driver 4 works, the voice coil motor driver 4 drives the corresponding flexible branched chains 3, so that the movable platform 2 connected with the flexible branched chains 3 moves horizontally along the axial direction of the voice coil motor driver 4, and the three flexible branched chains 3 are completely decoupled and are not mutually influenced.
Claims (3)
1. The utility model provides a high accuracy large stroke space translation micro-positioning platform, its includes base, moves platform and three flexible branched chain, three flexible branched chain is the quadrature and arranges, flexible branched chain's both ends are respectively rigid coupling the base with move on the platform, its characterized in that: the base is also provided with voice coil motor drivers respectively used for driving the flexible branched chains, and the flexible branched chains comprise a driving pair, a first passive pair and a second passive pair; the driving pair, the first driven pair and the second driven pair are composed of symmetrically arranged composite flexible moving pairs, each composite flexible moving pair comprises two groups of flexible reeds, the two flexible reeds of the same group are parallel to each other, one end of each flexible reed of the first group is connected through a first rigid connecting piece, one end of each flexible reed of the second group is connected through a second rigid connecting piece, and the other ends of the two flexible reeds are arranged in the same direction and are connected through a third rigid connecting piece; the first rigid connecting piece of the driving pair is fixedly connected to the base, the second rigid connecting piece of the driving pair and the voice coil motor driver are respectively connected to the first rigid connecting piece of the first driven pair, the second rigid connecting piece of the first driven pair is connected to the first rigid connecting piece of the second driven pair, and the second rigid connecting piece of the second driven pair is fixedly connected with the movable platform; the deformation directions of the flexible reeds in the driving pair, the first driven pair and the second driven pair are orthogonal;
the first rigid connecting piece is a U-shaped connecting piece, the second rigid connecting piece is a thick plate connecting piece, the third rigid connecting piece is a thin plate connecting piece, flanges extending inwards are respectively arranged at two ends of the U-shaped connecting piece, one ends of the first group of two flexible reeds are respectively connected with the two flanges, the second group of flexible reeds are inserted between the two flexible reeds of the first group in parallel, one ends of the flexible reeds, which are close to the flanges, are connected through the thick plate connecting piece, the thick plate connecting piece extends out of the U-shaped connecting piece, the other ends of the two groups of flexible reeds are connected through the thin plate connecting piece, and a gap is reserved between the thin plate connecting piece and the inner bottom surface of the U-shaped connecting piece;
the driving pair comprises four composite flexible moving pairs, and the first driven pair and the second driven pair comprise two composite flexible moving pairs; the two composite flexible moving pairs in the second passive pair are oppositely arranged, and the first rigid connecting pieces and the second rigid connecting pieces in the two composite flexible moving pairs are correspondingly connected one by one; two composite flexible moving pairs in the first passive pair are symmetrically arranged at middle positions of the left side and the right side of the second passive pair; four composite flexible moving pairs in the driving pair are respectively arranged on the upper side and the lower side of two composite flexible moving pairs in the first driven pair, and the four composite flexible moving pairs are distributed in a rectangular shape;
three of the flexible branches are spatially rotated 90 ° relative to each other.
2. The high-precision large-stroke space translational micro positioning platform as set forth in claim 1, wherein: the driving pair, the first passive pair and the second passive pair are integrally formed.
3. The high-precision large-stroke space translational micro positioning platform as set forth in claim 1, wherein: the voice coil motor driver is installed on the base through a mounting bracket, the mounting bracket and the voice coil motor driver are both positioned on the outer side of the base, the mounting bracket is fixedly connected on the base, the fixed end of the voice coil motor driver is fixedly connected on the mounting bracket, the driving end of the voice coil motor driver vertically penetrates through the base and then is connected with a driving connecting rod, and two ends of the driving connecting rod are fixedly connected with the left end and the right end of the first passive pair respectively.
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