CN108581986B - Integrated fully-flexible parallel three-dimensional precision displacement platform - Google Patents
Integrated fully-flexible parallel three-dimensional precision displacement platform Download PDFInfo
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- CN108581986B CN108581986B CN201810377656.3A CN201810377656A CN108581986B CN 108581986 B CN108581986 B CN 108581986B CN 201810377656 A CN201810377656 A CN 201810377656A CN 108581986 B CN108581986 B CN 108581986B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H21/00—Gearings comprising primarily only links or levers, with or without slides
- F16H21/10—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane
- F16H21/44—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying or interconverting oscillating or reciprocating motions
Abstract
The invention discloses an integrated fully-flexible parallel three-dimensional precision displacement table, which consists of an outer layer fixed frame, a middle layer nested table moving frame and an inner layer nested table moving frame. The outer layer fixed frame and the middle layer nested shifting frame are flexibly connected through a circumferential hinge, and a load platform on the inner layer nested shifting frame arranged in the middle layer nested shifting frame can move along the x-axis direction after force is applied to the middle layer nested shifting frame. Meanwhile, the middle-layer and inner-layer nested transfer table frame is formed by combining plate-shaped supports and can be regarded as a symmetrical parallel four-bar mechanism and a four-bar mechanism which are connected by a flexible hinge; the movement of the load platform along the y-axis direction is realized by applying force to the four-bar linkage; the load platform moves along the z-axis direction by applying force to the symmetrical parallel four-bar mechanism. The invention has compact structure, can realize 50nm positioning precision, adopts full flexible hinge connection and can avoid positioning error introduced by mechanical assembly.
Description
Technical Field
The invention belongs to the technical field of precision displacement, and particularly relates to an integrated fully-flexible parallel three-dimensional precision displacement platform.
Background
With the rapid development of science and technology, the requirements of the fields of optical and optoelectronic engineering, metering science and technology, bioscience engineering, optical mechanical and electrical integration and the like on the precision displacement technology are more and more strict, a precision motion platform plays an important role in the fields of modern high-precision production and manufacturing and scientific research, and the technical level of the positioning precision of the precision motion platform is closely related to the development of the technical fields of high-precision production and manufacturing, precision measurement, the production level of a super-large-scale integrated circuit and the like. For example, in the manufacture of a fiber optic gyroscope, a precision displacement table is required to guide the alignment coupling of an optical fiber and a Y waveguide chip, and the optical power loss caused by alignment errors is reduced, so that the output signal-to-noise ratio of the gyroscope is improved.
The precision displacement platform can be divided into two types according to the stroke size and the positioning precision of the precision displacement platform: a small-stroke and ultra-high-precision motion platform and a large-stroke and high-precision motion platform. The precise motion platform driven by the piezoelectric ceramic type and the electrothermal deformation type generally has the characteristics of small stroke and ultrahigh precision, the stroke is about tens of microns, and the displacement resolution can reach a nanometer level; the stroke of the motion platform based on the traditional mechanical displacement transmission mode can reach more than millimeter level, but the motion platform has the characteristic of smaller precision.
The current solutions for large-stroke precision motion platforms are mainly divided into two types: single stage feed and two stage feed. The single-stage feeding uses piezoelectric ceramics as a driving element, and displacement is amplified by combining a multi-stage lever structure based on a flexible hinge so as to achieve the purpose of large stroke. The other scheme adopts a two-stage feeding mode, namely a mode of combining a coarse motion platform and a fine motion platform, so as to meet the required positioning precision and stroke range. Compared with single-stage feeding, the large-stroke displacement table fully combines the mature large-stroke displacement table technology and the high-precision displacement table technology, and the research technology difficulty and risk are reduced. However, the displacement table is generally complex in structure and high in maintenance cost, and compared with a single-stage feeding scheme, the control difficulty is increased, and the cost is higher. Therefore, the research of the invention of the motion platform with low cost, high precision and large stroke is significant.
Disclosure of Invention
Aiming at the problems, the invention provides an integrated fully-flexible parallel three-dimensional precision displacement table which comprises an outer layer fixed frame, a middle layer nested table moving frame and an inner layer nested table moving frame.
Wherein, the outer layer fixed frame is flexibly connected with the peripheral frame of the middle layer nested shifting platform frame through a circumferential hinge; the force is applied to the peripheral frame along the x axis, so that the load platform on the inner-layer nested shifting platform frame arranged in the middle-layer nested shifting platform frame moves along the x axis;
the middle-layer nested shifting table frame is also provided with a driving frame formed by combining plate-shaped supports, and the driving frame is provided with a set of symmetrical parallel four-bar mechanism connected by a flexible hinge according to the condition that each plate-shaped support is a connecting rod; and the movement of the load platform along the z-axis direction is realized by applying a force in the y-axis direction to the symmetrical parallel four-bar linkage mechanism.
The inner-layer nested platform moving frame is also combined by a plate-shaped bracket and also comprises a loading platform; each plate-shaped support is a connecting rod, and the inner-layer nested moving platform frame is provided with a set of four-connecting-rod mechanisms connected by flexible hinges; and the movement of the load platform along the y-axis direction is realized by applying a force in the y-axis direction to the four-bar linkage.
The invention has the advantages that:
1. according to the integrally-configured fully-flexible parallel three-dimensional precision displacement platform, a fully-flexible hinge structure is adopted, so that the three-dimensional precision displacement platform can be integrally processed, and a positioning error caused by mechanical assembly is avoided;
2. according to the integrated fully-flexible parallel three-dimensional precision displacement platform, the displacement of the middle-layer nested platform frame and the inner-layer load platform is reduced by using a lever structure, and the positioning precision of 50nm is realized;
3. the integrally-configured fully-flexible parallel three-dimensional precision displacement platform uses the symmetrical parallel mechanism, realizes the structural layout of the multilayer frame which is symmetrical up and down, symmetrical left and right and symmetrical front and back, reduces the rigidity of the main motion direction, increases the rigidity of the non-motion direction, thereby reducing the asymmetrical offset and inhibiting the parasitic error of the non-motion direction;
4. according to the fully flexible parallel three-dimensional precision displacement platform with the integrated structure, 4 groups of springs are symmetrically arranged along the movement direction to apply pre-tightening force, so that the return error of the displacement platform is eliminated;
5. according to the integrated fully-flexible parallel three-dimensional precision displacement platform, the rigid connecting rod is generated in the vertical direction of the driving rod of the middle-layer four-bar structure, so that the force application direction is changed into the horizontal direction, and is the same as the force application direction of the inner layer, so that the two driving motors can be arranged side by side up and down and horizontally, and the integral structure is more compact.
6. According to the integrated fully-flexible parallel three-dimensional precision displacement table, three layers of frames are mutually orthogonally nested, so that orthogonal movement in three directions is guaranteed without mutual interference, the directions of the middle-layer connecting rod and the inner-layer connecting rod are parallel, and the middle-layer connecting rod and the outer-layer connecting rod are not shielded mutually, so that the structure is compact, and the linear cutting processing is facilitated;
7. according to the integrated fully flexible parallel three-dimensional precision displacement platform, different flexible hinge structures are arranged on the outer layer, the middle layer and the inner layer according to different strokes and precision requirements in three directions, so that the movement with the strokes in the three directions being large first and then small and the precision being coarse first and then fine is realized.
Drawings
FIG. 1 is a side sectional view of the whole structure of a fully flexible parallel three-dimensional precision displacement table of the invention;
FIG. 2 is a top view of the overall structure of the fully flexible parallel three-dimensional precision displacement table of the present invention;
FIG. 3 is a schematic structural diagram of a middle-layer nested stage moving frame and an inner-layer nested stage moving frame in the fully flexible parallel three-dimensional precision displacement stage of the invention;
FIG. 4 is a diagram showing the installation positions of flexible hinges in a middle nested transfer table frame 2 and an inner nested transfer table frame of the fully flexible parallel three-dimensional precision transfer table of the integrated configuration of the invention;
FIG. 5 is a schematic diagram of a symmetrical parallel four-bar linkage mechanism formed between an outer layer fixed frame and a middle layer nested moving platform frame in the fully flexible parallel three-dimensional precision moving platform of the integrated configuration of the invention;
FIG. 6 is a schematic diagram of a parallel four-bar linkage mechanism formed in a middle-layer nested stage frame in the fully flexible parallel three-dimensional precision displacement stage of the present invention;
FIG. 7 is a schematic view of a four-bar linkage mechanism formed in an inner-layer nested stage moving frame in the fully flexible parallel three-dimensional precision displacement stage of the integrated configuration of the present invention.
In the figure: 1-a rectangular frame structure; 2-nesting the moving platform frame in the middle layer; 3-nesting the inner layer of the platform moving frame; 4-connecting the boss; 5-an outer layer flexible hinge; 6-middle flexible hinge; 7-inner layer flexible hinge; 101-a lug; 201-middle layer peripheral frame; 202-a drive frame; 203-C type frame; 203 a-C type frame upper hinge table; 203 b-a lower hinge table of the C-shaped frame; 301-inner layer support; 302-a load platform; 303-a platform support plate; 304-interposer.
Concrete real-time mode
The present invention will be described in further detail with reference to the accompanying drawings.
The invention discloses an integrated fully-flexible parallel three-dimensional precision displacement table, which comprises an outer layer fixed frame 1, a middle layer nested table moving frame 2 and an inner layer nested table moving frame 3, and is shown in figure 1.
As shown in fig. 2, the outer layer fixing frame is a rectangular frame structure 1, displacement table mounting lugs 101 are designed on opposite side walls, and holes are formed in the lugs 101 for fixing the fully flexible parallel three-dimensional precision displacement table and the operation platform through bolts. The middle-layer nested shifting frame 2 is provided with a rectangular middle-layer peripheral frame 201 which is arranged inside the outer-layer fixed frame, and four circumferential side surfaces of the middle-layer nested shifting frame are respectively arranged in parallel with four circumferential surfaces of the outer-layer fixed frame.
The four corners of the inner side of the outer layer fixed frame 1 and the outer side of the middle layer peripheral frame 201 are designed with connecting bosses 4, and the outer layer fixed frame 1 is connected with the connecting bosses 4 at the same corners of the middle layer peripheral frame 201 through outer layer flexible hinges 5, so that flexible connection is formed between the four corners of the outer layer fixed frame 1 and the middle layer peripheral frame 201. The outer layer flexible hinge 5 is a flexible hinge formed by two reeds and a switching block; the two reeds are fixed on the same side of the switching block in parallel. Two adjacent sides of the outer layer fixed frame 1 and the middle layer peripheral frame 201 are respectively parallel to an xy plane and a yz plane; the leaf of the outer flexible hinge 5 is arranged parallel to the yz-axis plane when the outer flexible hinge 5 is mounted.
As shown in fig. 3 and 4, the middle layer peripheral frame 201 further includes a driving frame 202 formed by combining a plurality of plate-shaped brackets, and the plate-shaped brackets are flexibly connected to each other. The plate-shaped bracket comprises brackets A-D; are respectively and sequentially arranged along the y-axis direction, and are parallel to the xz-axis plane in the initial state. Wherein, the bracket B and the bracket C are arranged in a moving channel arranged on the middle layer peripheral frame 201, and a certain gap is arranged between the circumferential direction and the moving channel. The support D and the middle peripheral frame 201 are relatively fixed and can be designed as an integral structure.
The top of the bracket B is provided with a C-shaped frame 203 with an integrated structure; the bottom surface of the C-shaped frame 203 is connected with the top end of the bracket B. The outer wall of the top of the C-shaped frame 203 is designed with a C-shaped frame upper hinge table 203 a. The top end of the bracket D is designed with a top plate D1 parallel to the xy-axis plane and a hinged plate D2 parallel to the xz-axis plane. Meanwhile, the top of the C-shaped frame 203 is surrounded by a top plate D1, a hinge plate D2 and a bracket D.
The connection mode of the supports A-D is that the top end of the support A is connected with the top of the support B through a middle-layer flexible hinge 6 to form flexible connection. The top end of the bracket C is provided with a middle-layer flexible hinge 6 which is connected with the top end of the bracket B and the bracket D through the middle-layer flexible hinge 6 to form flexible connection. The two sides of the C-shaped frame upper hinge platform 203a are respectively connected with the top of the bracket D and the hinge plate D2 through a middle layer flexible hinge 6 to form flexible connection. The middle flexible hinges 6 at the two sides of the hinge table 203a on the C-shaped frame are symmetrical to the middle flexible hinges 6 at the two sides of the bracket B.
The inner-layer nested stage moving frame 3 comprises an inner-layer bracket 301, a loading platform 302, a platform supporting plate 303, an adapter plate 304 and a C-shaped frame lower hinge table 203b designed on the outer wall at the bottom of the C-shaped frame 203. The inner layer bracket 301 is arranged along the z-axis direction, is adjacent to the bracket a, and is arranged in a moving channel arranged on the middle layer peripheral frame 201, and a certain gap is formed between the circumferential direction and the moving channel. The load platform 302 is a table top parallel to the xz-axis plane; platform backup pad 303 sets up with load platform 302 is perpendicular, and platform backup pad 303 is on a parallel with xy axial plane setting, and platform backup pad 303 bottom surface design has load platform hinge station 305.
The platform support plate 303 and the adapter plate 304 are both located inside the C-shaped frame 203, and the connection mode of each part is as follows: the top of the inner layer bracket 301 is respectively connected with the load platform hinge table 305 and one side of the C-shaped frame lower hinge table 203 through two inner layer flexible hinges 7 to form flexible connection. The other sides of the load platform hinge station 305 and the C-frame lower hinge station 203b are connected to the adapter plate 304 by inner layer flexible hinges 7, respectively.
The inner layer flexible hinge 7 is only a reed and is arranged along the y-axis direction. The outer layer flexible hinge 6 is a flexible hinge formed by two reeds and a switching block; the two reeds are coplanar and fixed at the opposite side of the adapter block. When the outer layer flexible hinge 6 is installed, the reed is arranged along the y-axis direction; and the switching block in the outer layer flexible hinge 6 at the top end of the bracket C can be designed into an integral structure with the top end of the bracket C.
The tail end of the bracket B is provided with a motor mounting position for mounting a first stepping motor; meanwhile, a through hole is formed in the tail end of the support B, so that an output shaft of the first stepping motor penetrates through the support B. Force in the y-axis direction is applied to the tail end of the inner layer support 301 through the first stepping motor, and the force application position is a high-hardness ejector block arranged in a groove in the tail end of the inner layer support 301, so that displacement errors caused by force application deformation of the first stepping motor to the inner layer support 301 are reduced. A motor mounting table is designed on the middle-layer peripheral frame 201 and used for mounting a second stepping motor; similarly, the motor mounting plate is provided with a hole so that the output shaft of the second stepping motor passes through the motor mounting plate. And a force in the y-axis direction is applied to the tail end of the bracket C through a second stepping motor, and the force application position is positioned on a high-hardness ejector block arranged in a groove at the tail end of the bracket C, and the high-hardness ejector block is also arranged at the tail end of the bracket C. Two side surfaces of the outer layer fixed frame 1 along the x-axis direction are provided with motor mounting positions for mounting a third stepping motor. Meanwhile, the left side and the right side of the outer layer fixed frame 1 are provided with holes, so that the output shaft of the third stepping motor can penetrate through the outer layer fixed frame 1. And applying force along the x-axis direction to the two sides of the middle layer peripheral frame 201 by a third stepping motor, wherein the force application position is positioned on high-hardness jacking blocks arranged in grooves on the two sides of the middle layer nested shifting table frame 2. The x-axis direction stroke depends on the length of the outer flexible hinge 5 spring. And the third step motor is installed in combination with the working space of the actual situation, and is selectively installed on two sides, so that the use is more flexible.
When the integrated fully-flexible parallel three-dimensional precision displacement platform works, a third stepping motor on one side applies force to the middle-layer peripheral frame 201, so that the load platform 302 can translate along the x-axis movement direction; as shown in fig. 5, in the translation process, a symmetrical parallel four-bar linkage connected by an outer flexible hinge 5 may be disposed between four corners of the outer fixed frame 1 and the middle peripheral frame 201, so as to realize the displacement of the load platform 302 along the x-axis direction. The second stepping motor applies force to the bracket C along the y-axis direction, so that the load platform 302 can translate along the z-axis direction; as shown in fig. 6, in the process of translation, the visual hinge plate D2, the top plate D1, the bracket D, the bracket a, and the 4 symmetrically distributed middle-layer flexible hinges 5 are parallel four-bar linkages, so that the load platform 302 can be translated along the z-axis movement direction while the parasitic displacement of the y-axis is suppressed, and the length ratio of the bracket C to the middle-layer flexible hinge 6 with the top end designed as an integral structure is 10:1, thereby forming a structure of 10:1, the positioning precision of the second stepping motor is improved by ten times, and the positioning precision of 50nm is realized. The amount of travel along the z-axis is dependent on the overall length of the mid-layer flexible hinge 6. The load platform 302 can be translated along the y-axis movement direction by driving the first stepping motor to apply force to the inner layer bracket 301 along the y-axis direction. As shown in fig. 7, in the translation process, a four-bar linkage connected by 4 flexible hinges may be considered between the inner support 301, the platform support plate 303, the adapter plate 304 and the bottom surface of the C-shaped frame 203, so as to realize the translation of the load platform 302 along the y-axis movement direction; and stent 301 is divided into an upper segment a2 and a lower segment a1 by a middle flexible hinge 6 between the top of stent a and the top of stent B along the z-axis direction, the length ratio of a1 to a2 is designed to be 10:1, also constituting 10:1, the positioning precision of 50nm is achieved. The amount of travel along the y-axis is dependent upon the length of section a2 on inner stent 301.
In the outer layer fixed frame 1 and the middle layer peripheral frame 201, the side edges at two sides of the middle layer flexible hinge 6 are connected by the springs arranged at equal intervals along the y-axis direction, so that the end part of the output shaft of the third stepping motor is tightly attached to the middle layer peripheral frame 201, and the return error caused by the reciprocating motion of the load platform 302 along the x-axis is reduced. Similarly, the support C is connected with the bottom of the support D through a spring arranged along the z-axis direction, so that the end part of a driving shaft of the second stepping motor is tightly attached to the support C, and the return error caused by the reciprocating motion of the displacement table along the z-axis is reduced. The spring connection is arranged between the inner layer support 301 and the bottom of the support A along the z-axis direction, so that the end part of the driving shaft of the first stepping motor is tightly attached to the inner layer support 301, and the return error caused by the reciprocating motion of the displacement table along the y axis is reduced.
Claims (1)
1. The three-dimensional accurate displacement platform of the full flexible parallel connection of a body configuration, its characterized in that: comprises an outer layer fixed frame, a middle layer nested platform moving frame and an inner layer nested platform moving frame;
wherein, the outer layer fixed frame is flexibly connected with the middle layer peripheral frame of the middle layer nested shifting platform frame through a circumferential hinge; the load platform on the inner-layer nested shifting platform frame arranged in the middle-layer nested shifting platform frame moves along the x-axis direction by applying force to the middle-layer peripheral frame along the x-axis direction;
the middle-layer nested shifting table frame is also provided with a driving frame formed by combining plate-shaped supports, and the driving frame is provided with a set of symmetrical parallel four-bar mechanism connected by a flexible hinge according to the condition that each plate-shaped support is a connecting rod; the force in the y-axis direction is applied to the symmetrical parallel four-bar mechanism, so that the load platform moves in the z-axis direction; the inner-layer nested platform moving frame is also combined by a plate-shaped bracket and also comprises a loading platform; each plate-shaped support is a connecting rod, and the inner-layer nested moving platform frame is provided with a set of four-connecting-rod mechanisms connected by flexible hinges; the movement of the load platform along the y-axis direction is realized by applying a force in the y-axis direction to the four-bar linkage;
connecting bosses are designed at four corners of the inner side of the outer layer fixed frame and the outer side of the middle layer peripheral frame, and the connecting bosses at the same corners of the outer layer fixed frame and the middle layer peripheral frame are connected through outer layer flexible hinges, so that flexible connection is formed between the four corners of the outer layer fixed frame and the four corners of the middle layer peripheral frame; the outer layer flexible hinge is a flexible hinge formed by two reeds and a switching block; the two reeds are fixed on the same side of the switching block in parallel; making two adjacent sides of the outer layer fixed frame and the middle layer peripheral frame respectively parallel to an xy plane and a yz plane; when the outer layer flexible hinge is installed, the reed of the outer layer flexible hinge is arranged in parallel to the yz axis plane;
a driving frame formed by combining a plurality of plate-shaped brackets is arranged in the middle-layer peripheral frame, and the plate-shaped brackets are flexibly connected; the plate-shaped bracket comprises brackets A-D; are respectively and sequentially arranged along the y-axis direction, and are parallel to the xz-axis plane in the initial state; wherein, the bracket B and the bracket C are arranged in a moving channel arranged on the middle peripheral frame, and a certain gap is arranged between the circumference direction and the moving channel; the bracket D and the middle-layer peripheral frame are relatively fixed;
the top of the bracket B is designed with a C-shaped frame with an integrated structure; the bottom surface of the C-shaped frame is connected with the top end of the bracket B; the outer wall of the top of the C-shaped frame is provided with a C-shaped frame upper hinge table; the top end of the bracket D is provided with a top plate (D1) parallel to the xy-axis plane and a hinge plate (D2) parallel to the xz-axis plane; meanwhile, the top of the C-shaped frame is surrounded by a top plate (D1), a hinge plate (D2) and a bracket D;
the supports A-D are connected in a manner that the top end of the support A is connected with the top of the support B through a middle-layer flexible hinge to form flexible connection; the top end of the bracket C is provided with a middle-layer flexible hinge which is connected with the top end of the bracket B and the bracket D through the middle-layer flexible hinge to form flexible connection; the two sides of the upper hinge table of the C-shaped frame are respectively connected with the top of the support D and a hinge plate (D2) through a middle-layer flexible hinge to form flexible connection; the middle-layer flexible hinges on two sides of the hinge table on the C-shaped frame are symmetrical to the middle-layer flexible hinges on two sides of the support B;
the inner-layer nested platform moving frame comprises an inner-layer bracket, a load platform, a platform supporting plate, a transfer plate and a C-shaped frame lower hinge platform designed on the outer wall of the bottom of the C-shaped frame; the inner layer bracket is arranged along the z-axis direction, is adjacent to the bracket A, is arranged in a moving channel arranged on the middle layer peripheral frame, and has a certain gap with the moving channel in the circumferential direction; the load platform is a table top parallel to the xz axis plane; the platform supporting plate is perpendicular to the load platform, the platform supporting plate is arranged parallel to the xy-axis plane, and the bottom surface of the platform supporting plate is provided with a load platform hinge platform;
the platform supporting plate and the adapter plate are both positioned inside the C-shaped frame, and the connecting modes of all the parts are as follows: the top of the inner layer support is respectively connected with the hinge table of the load platform and one side of the lower hinge table of the C-shaped frame through two inner layer flexible hinges to form flexible connection; the other sides of the hinge platform of the load platform and the lower hinge platform of the C-shaped frame are respectively connected with the adapter plate through inner-layer flexible hinges;
the inner layer flexible hinge is only a reed and is arranged along the y-axis direction; the outer layer flexible hinge is a flexible hinge formed by two reeds and a switching block; the two reeds are coplanar and fixed at the opposite sides of the switching block; when the outer layer flexible hinge is installed, the reed is arranged along the y-axis direction;
the tail end of the bracket B is provided with a motor mounting position for mounting a first stepping motor; meanwhile, a through hole is formed in the tail end of the support B, so that an output shaft of the first stepping motor penetrates through the support B; a force in the y-axis direction is applied to the tail end of the inner layer support through the first stepping motor, and the force application position is located on a high-hardness ejector block arranged in a groove in the tail end of the inner layer support, so that the displacement error caused by the force application deformation of the first stepping motor to the inner layer support is reduced; a motor mounting table is designed on the middle peripheral frame and used for mounting a second stepping motor; similarly, the motor mounting table is provided with a hole so that the output shaft of the second stepping motor passes through the motor mounting table; applying force in the y-axis direction to the tail end of the bracket C through a second stepping motor, wherein the force application position is located on a high-hardness ejector block arranged in a groove at the tail end of the bracket C; two side surfaces of the outer layer fixed frame along the x-axis direction are provided with motor mounting positions for mounting a third stepping motor; meanwhile, holes are formed in the left side and the right side of the outer layer fixing frame, so that an output shaft of the third stepping motor can penetrate through the outer layer fixing frame; applying force along the x-axis direction to the two sides of the middle layer peripheral frame through a third stepping motor, wherein the force application position is positioned on high-hardness jacking blocks arranged in grooves on the two sides of the middle layer nested shifting table frame; the stroke in the x-axis direction depends on the length of the outer layer flexible hinge spring leaf;
the bracket C is connected with the bottom of the bracket D by a spring arranged along the z-axis direction; the outer layer fixed frame is connected with the side edge of the middle layer peripheral frame of the middle layer nested shifting table frame by springs arranged at equal intervals along the y-axis direction;
a third stepping motor on one side applies force to the middle-layer peripheral frame to realize translation of the load platform along the movement direction of the x axis; in the translation process, the four corners of the outer layer fixed frame and the middle layer peripheral frame can be regarded as symmetrical parallel four-bar linkage mechanisms connected through an outer layer flexible hinge, so that the displacement of the load platform along the x-axis direction is realized; the second stepping motor applies force to the bracket C along the y-axis direction, so that the load platform can translate along the z-axis direction; in the translation process, the visual hinged plate (D2), the top plate (D1), the bracket D, the bracket A and 4 symmetrically distributed middle-layer flexible hinges are of a parallel four-bar mechanism, so that the translation of the load platform along the z-axis motion direction is realized, and the parasitic displacement of the y-axis is inhibited; the first stepping motor is driven to apply force to the inner layer support along the y-axis direction, so that the load platform can translate along the y-axis movement direction; in the translation process, the inner layer support, the platform supporting plate, the adapter plate and the bottom surface of the C-shaped frame can be regarded as a four-bar mechanism connected through 4 flexible hinges, so that the load platform can be translated along the y-axis movement direction.
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| CN114198481B (en) * | 2021-12-16 | 2023-11-10 | 北京航空航天大学 | Parallel two-degree-of-freedom precise motion executing mechanism based on flexible hinge |
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| CZ299124B6 (en) * | 2001-06-18 | 2008-04-30 | Kovosvit Mas A.S. | Parallel positioning mechanism, particularly for metal cutting and/or handling and/or measuring |
| CN101424879B (en) * | 2008-12-12 | 2010-10-13 | 厦门大学 | Resistance straining feedback type closed-loop two-dimension flexible hinge work bench |
| CN102708930B (en) * | 2012-05-29 | 2013-11-27 | 合肥工业大学 | Three-dimensional decoupled micro-displacement stage with floating driver |
| CN104742046B (en) * | 2015-03-24 | 2017-06-23 | 中国科学院长春光学精密机械与物理研究所 | A kind of two degrees of freedom flexibility precise guide mechanism in parallel |
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