CN114294322B - Quasi-zero rigidity flexible guide mechanism based on passive compensation structure - Google Patents
Quasi-zero rigidity flexible guide mechanism based on passive compensation structure Download PDFInfo
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- CN114294322B CN114294322B CN202111651875.4A CN202111651875A CN114294322B CN 114294322 B CN114294322 B CN 114294322B CN 202111651875 A CN202111651875 A CN 202111651875A CN 114294322 B CN114294322 B CN 114294322B
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Abstract
The invention provides a quasi-zero rigidity flexible guide mechanism based on a passive compensation structure, and belongs to the technical field of precision instruments and machinery. The problem of current flexible guiding mechanism can't guarantee large stroke constant force output is solved. It includes indirect drive part, direct drive part, second order spring subassembly, first order spring subassembly, passive folding spring subassembly, negative stiffness compensation spring subassembly and linear electric motor drive module, direct drive part left and right sides tip links to each other with two indirect drive part through two first order spring subassemblies respectively, the both ends inboard of two indirect drive parts links to each other with two fixed modules through two second order spring subassemblies respectively, include first order reed in the first order spring subassembly, include the second order reed in the second order spring subassembly, the both ends outside of two indirect drive parts all is provided with passive folding spring subassembly, passive folding spring subassembly is fixed through folding reed fixed subassembly.
Description
Technical Field
The invention belongs to the technical field of precision instruments and machinery, and particularly relates to a quasi-zero rigidity flexible guide mechanism based on a passive compensation structure.
Background
The extreme ultraviolet lithography machine is the most advanced lithography machine at the present stage. The equipment adopts extreme ultraviolet light with the wavelength of 13.5nm as a working light source, and can greatly improve the resolution ratio during photoetching. The extreme ultraviolet light is almost not transparent to all substances and has a refractive index close to 1, so that an illumination system, an objective lens system, a motion system and the like of the extreme ultraviolet lithography machine are required to be placed in vacuum. The guide mechanism of the motion system of the extreme ultraviolet lithography machine needs to have the applicability of a vacuum environment and simultaneously realize long-stroke, high-speed, high-acceleration and high-precision motion, however, common guide mechanisms such as a ball screw guide mechanism, an air floatation guide mechanism and a magnetic levitation guide mechanism cannot be applied to the extreme ultraviolet lithography machine due to the self characteristics and the difficulty in maintenance. The flexible mechanism has the advantages of high precision, no need of cooling, no mechanical friction, no need of lubrication, no cable and the like, and becomes a preferred scheme of the guide mechanism of the extreme ultraviolet lithography machine motion system. The common flexible mechanism has the defects of small stroke, resilience and the like. Therefore, the design of the flexible guide mechanism with long stroke and quasi-zero rigidity is the key of the structural design of a motion system in the extreme ultraviolet lithography machine.
The existing flexible guide mechanism has the defect that the requirements of constant force and high precision cannot be met while a large stroke is possessed. However, in order to ensure high speed, high precision and stability of movement in the motion system of the EUV lithography machine, the motion system needs to overcome the control problem caused by the large deformation resilience force generated by the long-stroke flexible mechanism, which requires a quasi-zero stiffness flexible guide mechanism capable of outputting a constant force in a large stroke in the motion system of the EUV lithography machine.
Disclosure of Invention
In view of this, the present invention provides a quasi-zero stiffness flexible guide mechanism based on a passive compensation structure, so as to solve the problem that the conventional flexible guide mechanism cannot ensure a large-stroke constant-force output.
In order to achieve the purpose, the invention adopts the following technical scheme: the utility model provides a quasi-zero rigidity flexible guiding mechanism based on passive compensation structure, it includes indirect drive part, direct drive part, second order reed subassembly, first order reed subassembly, passive folding reed subassembly, negative rigidity compensation reed subassembly and linear electric motor drive module, direct drive part left and right sides tip links to each other with two indirect drive parts through two first order reed subassemblies respectively, two indirect drive part's both ends inboard links to each other with two fixed modules through two second order reed subassemblies respectively, include the first order reed in the first order reed subassembly, include the second order reed in the second order reed subassembly, the both ends outside of two indirect drive parts all is provided with passive folding reed subassembly, passive folding reed subassembly is fixed through folding reed fixed subassembly, direct drive part left and right sides middle part is connected with a negative rigidity compensation reed subassembly respectively, negative rigidity compensation reed subassembly is fixed through negative rigidity reed fixed subassembly, linear electric motor drive module links to each other with the direct drive part, the direct drive part bottom is provided with linear grating chi feedback module, indirect drive part bottom is provided with gravity compensation module.
Furthermore, the second-order reed assembly further comprises a second-order reed connecting piece, a second-order reed fixing piece and a second-order reed cushion block, two ends of the second-order reed are connected with the second-order reed fixing piece through the second-order reed cushion block respectively, the second-order reed fixing piece is connected with the second-order reed connecting piece, and the second-order reed connecting piece is installed on the indirect driving part and the fixing module respectively.
Furthermore, first order reed subassembly still includes first order reed connecting piece, first order reed mounting and first order reed cushion, first order reed quantity is a plurality of, equally divide between the both ends of a plurality of first order reeds and do not link to each other through first order reed cushion, first order reed both ends outside is connected with first order reed mounting respectively, first order reed mounting links to each other with first order reed connecting piece, first order reed connecting piece is installed respectively on direct drive part and indirect drive part.
Furthermore, the gravity compensation module comprises a magnet A connecting piece, a magnet A, a magnet B and a magnet B fixing piece, wherein the magnet A connecting piece is connected with the bottom of the indirect driving part, the magnet A is connected with the magnet A connecting piece, the magnet B is connected with the magnet B fixing piece, and the magnet A and the magnet B are opposite in homopolar.
Furthermore, passive folding reed subassembly is including buckling reed, reed connecting block and reed staggered arrangement arrange, the reed both ends link to each other with the reed connecting block respectively, and two reed connecting blocks of outermost end link to each other with indirect drive part and folding reed fixed subassembly through buckling the reed respectively.
Furthermore, the negative stiffness compensation reed assembly comprises a plurality of negative stiffness compensation reed connecting pieces, negative stiffness compensation reed fixing pieces, negative stiffness compensation reed cushion blocks and negative stiffness compensation reeds, the negative stiffness compensation reeds are connected between the two ends of the negative stiffness compensation reeds respectively through the negative stiffness compensation reed cushion blocks, the negative stiffness compensation reed fixing pieces are connected to the outer sides of the two ends of the negative stiffness compensation reeds respectively, the negative stiffness compensation reed fixing pieces are connected with the negative stiffness compensation reed connecting pieces, and the negative stiffness compensation reed connecting pieces are installed on the direct driving part and the negative stiffness reed fixing assembly respectively.
Further, in the initial state, the negative stiffness compensation reed is in a bending deformation state with a certain radian.
Furthermore, the linear grating ruler feedback module comprises a grating ruler reading head bottom fixing part, a grating ruler reading head fixing side plate, a grating ruler reading head and a grating ruler, wherein the grating ruler is fixed at the bottom of the direct driving part, the grating ruler reading head is opposite to the grating ruler in position and reads grating ruler scales, the grating ruler reading head is connected with the grating ruler reading head fixing side plate, and the grating ruler reading head fixing side plate is connected with the grating ruler reading head bottom fixing part.
Furthermore, the linear motor driving module comprises a motor fixing block, a motor stator, a motor rotor and a motor connecting block, wherein the motor stator is installed on the motor fixing block, the motor rotor is connected with the motor connecting block, and the motor connecting block is connected with the direct driving part.
Further, the fixed module comprises a mounting base, a mounting side plate and a side plate fixing piece, the mounting base is connected with the mounting side plate, the mounting side plate is connected with the side plate fixing piece, the second-order reed assembly is connected with the mounting base, the negative stiffness reed fixing assembly comprises a negative stiffness spring base and a negative stiffness spring bottom fixing piece, the negative stiffness spring base is connected with the negative stiffness spring bottom fixing piece, the negative stiffness compensation reed assembly is connected with the negative stiffness spring base, the folding reed fixing assembly comprises a folding spring base and a folding spring bottom fixing piece, the folding spring base is connected with the folding spring bottom fixing piece, and the passive folding reed assembly is connected with the folding spring base.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the quasi-zero stiffness flexible guide mechanism based on the passive compensation structure, the multi-pair spring assemblies and the linear motor are utilized to realize the linear guide function of high precision and quasi-zero stiffness.
2. The invention adopts the design of the passive compensation structure based on the negative stiffness compensation spring assembly, can rapidly provide compensation force, keeps the quasi-zero stiffness of the guide mechanism in the working process, and finally improves the working stability and the motion precision of the guide mechanism.
3. The invention is similar to a parallelogram, designs a plurality of groups of reeds which are symmetrically distributed on the connecting line of the geometric centers of the two fixed modules, can effectively improve the motion linearity of the guide mechanism, plays a role of replacing a guide rail, does not generate friction and has higher precision.
4. The direct drive part and the indirect drive part of the invention are both provided with lightening grooves, thus improving the strength.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of an upper three-dimensional structure of a quasi-zero stiffness flexible guide mechanism based on a passive compensation structure according to the present invention;
FIG. 2 is a schematic view of a lower three-dimensional structure of a quasi-zero stiffness flexible guide mechanism based on a passive compensation structure according to the present invention;
FIG. 3 is a schematic top view of a quasi-zero stiffness flexible guiding mechanism based on a passive compensation structure according to the present invention;
fig. 4 is a schematic view of a bottom view structure of a quasi-zero stiffness flexible guiding mechanism based on a passive compensation structure according to the present invention.
1-indirect drive part, 2-second order reed component, 3-fixed module, 4-first order reed component, 5-direct drive part, 6-negative stiffness reed fixed component, 7-gravity compensation module, 8-folding reed fixed component, 9-passive folding reed component, 10-negative stiffness compensation reed component, 11-linear grating ruler feedback module, 12-linear motor drive module, 201-second order reed connector, 202-second order reed connector, 203-second order reed pad, 204-second order reed, 301-installation base, 302-installation side plate, 303-side plate connector, 401-first order reed connector, 402-first order reed connector, 403-first order reed pad, 404-first order reed, 601-negative stiffness spring base, 602-negative stiffness spring bottom mount, 701-magnet a connection, 702-magnet a, 703-magnet B, 704-magnet B mount, 801-folding spring base, 802-folding spring bottom mount, 901-bent reed, 902-reed connection block, 903-reed, 1001-negative stiffness compensation reed connection, 1002-negative stiffness compensation reed mount, 1003-negative stiffness compensation reed spacer, 1004-negative stiffness compensation reed, 1101-grating ruler reading head bottom mount, 1102-grating ruler reading head fixed side plate, 1103-grating ruler reading head, 1104-grating ruler, 1201-motor fixed block, 1202-motor stator, 1203-motor mover, 1204-motor connection block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely explained below with reference to the drawings in the embodiments of the present invention. It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict, and the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments.
The embodiment is described with reference to fig. 1-4, a quasi-zero stiffness flexible guide mechanism based on a passive compensation structure, which includes an indirect drive component 1, a direct drive component 5, a second-order spring component 2, a first-order spring component 4, a passive folding spring component 9, a negative stiffness compensation spring component 10 and a linear motor drive module 12, the left and right ends of the direct drive component 5 are respectively connected with the two indirect drive components 1 through the two first-order spring components 4, the inner sides of the two ends of the two indirect drive components 1 are respectively connected with the two fixing modules 3 through the two second-order spring components 2, the first-order spring component 4 includes a first-order spring 404, the second-order spring component 2 includes a second-order spring 204, the outer sides of the two ends of the two indirect drive components 1 are respectively provided with the passive folding spring components 9, the passive folding spring components 9 are fixed through the folding spring fixing components 8, the middle parts of the left and right sides of the direct drive component 5 are respectively connected with a negative stiffness compensation spring component 10, the negative stiffness compensation spring component 10 is fixed through the negative stiffness spring fixing components 6, the linear motor drive module 12 is connected with the direct drive component 5, the bottom of the direct drive component 5 is provided with a linear ruler feedback module 11, and the indirect drive module 1 is provided with a gravity compensation module 7.
The quantity of the indirect drive parts 1 is two, the quantity of the second-order reed assemblies 2 is four, the quantity of the fixing modules 3 is two, the quantity of the first-order reed assemblies 4 is four, the quantity of the negative-stiffness reed fixing assemblies 6 is two, the quantity of the gravity compensation modules 7 is two, the quantity of the folding reed fixing assemblies 8 is four, the quantity of the passive folding reed assemblies 9 is four, and the quantity of other parts is one. The quantity relation of all the reeds is determined by the degree of the negative rigidity of the system, namely the sum of the positive rigidity and the negative rigidity of the system is ensured to be less than or equal to 0.
When the linear motor driving module 12 drives the direct driving part 5 to move, the reeds in the first-order reed assembly 4, the second-order reed assembly 2 and the passive folding reed assembly 9 deform at the same time, and the linear guiding function is achieved. The negative stiffness compensation spring assembly 10 provides a compensation force in the opposite direction to the reed return force in the first order spring assembly 4, the second order spring assembly 2 and the passive folding spring assembly 9 when the direct drive part 5 is in motion. And the direct driving part 5 feeds back motion measurement through the linear grating ruler feedback module 11 in the motion process, so that precise measurement and control are realized.
The inner sides of two indirect drive parts 1 which are opposite are symmetrically processed with weight reduction grooves, a first-order reed assembly 4 and mounting grooves of a second-order reed assembly 2, the second-order reed assembly 2 comprises a pair of second-order reed connectors 201, four second-order reed fixing pieces 202, two second-order reed cushion blocks 203 and a second-order reed 204, two ends of the second-order reed 204 are connected with the second-order reed fixing pieces 202 through the second-order reed cushion blocks 203 respectively, the second-order reed fixing pieces 202 are connected with the second-order reed connectors 201, two ends of the second-order reed fixing pieces 202, two ends of the second-order reed cushion blocks 203 and two ends of the second-order reed 204 are connected and pressed through screws and the like, and the second-order reed connectors 201 are mounted on the opposite sides of the indirect drive parts 1 and the fixing modules 3 respectively.
Weight reduction grooves, a first-order spring assembly 4 and a negative stiffness compensation spring assembly 10 are symmetrically machined on two sides of the direct drive component 5. Two sides of the direct drive part 5 are respectively connected with the indirect drive part 1 through two groups of first-order spring assemblies 4. The first-order reed assembly 4 comprises a pair of first-order reed connectors 401, four first-order reed fixing pieces 402, four first-order reed cushion blocks 403 and three first-order reeds 404, the number of the first-order reeds 404 is multiple, two ends of the first-order reeds 404 are connected through the first-order reed cushion blocks 403 respectively, the outer sides of two ends of each first-order reed 404 are connected with the first-order reed fixing pieces 402 respectively, the first-order reed fixing pieces 402 are connected with the first-order reed connectors 401, two ends of each first-order reed fixing piece 402, two ends of each first-order reed cushion block 403 and two ends of each first-order reed 404 are connected and pressed through screws and the like, and the first-order reed connectors 401 are installed on the direct driving part 5 and the indirect driving part 1 respectively.
In the initial state, both the first order spring plate 404 and the second order spring plate 204 are not deformed, and the geometric midperpendicular of the direct drive unit 5 and the indirect drive unit 1 is coincident.
The passive folding reed assembly 9 comprises a pair of bending reeds 901, nine reed connecting blocks 902 and eight reeds 903, the reed connecting blocks 902 and the reeds 903 are arranged in a staggered mode, two ends of each reed 903 are connected with the reed connecting blocks 902 through screws and the like, and the two reed connecting blocks 902 at the outermost ends are connected with the indirect driving part 1 and the folding reed fixing assembly 8 through the bending reeds 901 respectively. A certain gravity compensation of the indirect drive means 1 is provided by the passive folding spring assembly 9. When the number of the reed connecting blocks 902 is K, the number of the reeds 903 is K-1.
The negative stiffness compensation reed assembly 10 comprises a pair of negative stiffness compensation reed connectors 1001, four negative stiffness compensation reed fixing parts 1002, eight negative stiffness compensation reed cushion blocks 1003 and five negative stiffness compensation reeds 1004, the number of the negative stiffness compensation reeds 1004 is multiple, two ends of each negative stiffness compensation reed 1004 are respectively connected through the negative stiffness compensation reed cushion block 1003, the outer sides of two ends of each negative stiffness compensation reed 1004 are respectively connected with the negative stiffness compensation reed fixing parts 1002, the negative stiffness compensation reed fixing parts 1002 are connected with the negative stiffness compensation reed connectors 1001, and the negative stiffness compensation reed connectors 1001 are respectively installed on the direct drive part 5 and the negative stiffness reed fixing assembly 6. And when the number of the negative stiffness compensation reed cushion blocks 1003 is N pairs, the number of the negative stiffness compensation reeds 1004 is N + 1.
In the initial state, the negative stiffness compensating spring 1004 is in a state of bending deformation with a certain arc. All the reeds described above, except for the negative stiffness compensating reed 1004, are parallel to each other in the initial state and perpendicular to the geometric centre line of the two fixed modules 3.
The gravity compensation module 7 compensates the gravity of the two indirect driving parts 1, the gravity compensation module 7 comprises a magnet A connecting piece 701, a magnet A702, a magnet B703 and a magnet B fixing piece 704, the magnet A connecting piece 701 is connected with the bottom of the indirect driving part 1, the magnet A702 is connected with the magnet A connecting piece 701, the magnet B703 is connected with the magnet B fixing piece 704, the magnet A702 and the magnet B703 are opposite in homopolar, and repulsion force is generated to compensate the gravity.
The linear motor driving module 12 includes a motor fixing block 1201, a motor stator 1202, a motor mover 1203, and a motor connecting block 1204, the motor stator 1202 is mounted on the motor fixing block 1201, the motor mover 1203 is connected to the motor connecting block 1204, and the motor connecting block 1204 is connected to the direct driving part 5.
The linear grating scale feedback module 11 includes a grating scale reading head bottom fixing part 1101, a grating scale reading head fixing side plate 1102, a grating scale reading head 1103 and a grating scale 1104, the grating scale 1104 is fixed at the bottom of the direct drive component 5, the grating scale reading head 1103 is opposite to the grating scale 1104 and reads the scale of the grating scale 1104, the grating scale reading head 1103 is connected with the grating scale reading head fixing side plate 1102, and the grating scale reading head fixing side plate 1102 is connected with the grating scale reading head bottom fixing part 1101. The linear motor driving module 12 drives the direct driving part 5 to do linear motion, and the linear grating ruler feedback module 11 is used as a motion measurement feedback link.
When the linear motor driving module 12 drives the direct driving component 5 to do linear motion, the passive folding spring assemblies 9 generate deformation with the same size at the same time, and meanwhile, the deformation directions of the second-order reeds 204 and the first-order reeds 404 in the second-order reed assembly 2 and the first-order reed assembly 4 are opposite, so that the second-order reed assembly 2 can compensate the motion deviation of the first-order reed assembly 4 in the non-working direction, the geometric axis of the direct driving component 5 is ensured to be always coincident with the geometric center connecting line of the two fixing modules 3, and the linear guiding function is realized.
When the direct driving part 5 makes linear motion, the negative stiffness compensation spring assembly 10 can provide compensation force opposite to the spring resilience direction of the second-order spring assembly 2, the first-order spring assembly 4 and the passive folding spring assembly 9 due to the bending deformation existing in the initial state, so that the passive compensation effect is achieved, and the quasi-zero stiffness characteristic of the flexible linear guide mechanism is realized.
Except for the linear motor driving module 12 and the linear grating ruler feedback module 11, all the components are symmetrically arranged on a connecting line of the geometric centers of the two fixed modules 3, so that the displacement path of the direct driving component 5 cannot deviate.
The embodiments of the invention disclosed above are intended merely to aid in the explanation of the invention. The examples are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand the invention for and utilize the invention.
Claims (10)
1. The utility model provides a quasi-zero rigidity flexible guiding mechanism based on passive compensation structure which characterized in that: the linear motor driving device comprises an indirect driving part (1), a direct driving part (5), a second-order reed assembly (2), a first-order reed assembly (4), a passive folding reed assembly (9), a negative stiffness compensation reed assembly (10) and a linear motor driving module (12), the left and right side end parts of the direct driving part (5) are respectively connected with the two indirect driving parts (1) through the two first-order reed assemblies (4), the inner sides of the two ends of the two indirect driving parts (1) are respectively connected with the two fixing modules (3) through the two second-order reed assemblies (2), a first-order reed (404) is arranged in the first-order reed assembly (4), a second-order reed (204) is arranged in the second-order reed assembly (2), the outer sides of the two ends of the two indirect driving parts (1) are respectively provided with the passive folding reed assembly (9), the passive folding reed assembly (9) is fixed through the folding reed fixing assembly (8), the middle parts of the left and right sides of the direct driving part (5) are respectively connected with the negative stiffness compensation reed assembly (10), the negative stiffness compensation reed assembly (10) is fixed through the negative stiffness fixing assembly (6), the linear motor driving module (12) is connected with the linear motor driving module (5), and the linear motor driving module (11) is provided with the linear motor driving module (11), and a gravity compensation module (7) is arranged at the bottom of the indirect driving part (1).
2. The flexible guide mechanism with quasi-zero stiffness based on the passive compensation structure as claimed in claim 1, wherein: the second-order reed component (2) further comprises a second-order reed connecting piece (201), a second-order reed fixing piece (202) and a second-order reed cushion block (203), two ends of a second-order reed (204) are connected with the second-order reed fixing piece (202) through the second-order reed cushion block (203), the second-order reed fixing piece (202) is connected with the second-order reed connecting piece (201), and the second-order reed connecting piece (201) is installed on the indirect driving part (1) and the fixing module (3) respectively.
3. The quasi-zero stiffness flexible guide mechanism based on the passive compensation structure as claimed in claim 1, wherein: first order reed subassembly (4) still includes first order reed connecting piece (401), first order reed mounting (402) and first order reed cushion (403), first order reed (404) quantity is a plurality of, equally divide between the both ends of a plurality of first order reeds (404) and do not link to each other through first order reed cushion (403), first order reed (404) both ends outside is connected with first order reed mounting (402) respectively, first order reed mounting (402) link to each other with first order reed connecting piece (401), first order reed connecting piece (401) are installed respectively on direct drive part (5) and indirect drive part (1).
4. The flexible guide mechanism with quasi-zero stiffness based on the passive compensation structure as claimed in claim 1, wherein: the gravity compensation module (7) comprises a magnet A connecting piece (701), a magnet A (702), a magnet B (703) and a magnet B fixing piece (704), the magnet A connecting piece (701) is connected with the bottom of the indirect driving part (1), the magnet A (702) is connected with the magnet A connecting piece (701), the magnet B (703) is connected with the magnet B fixing piece (704), and the magnet A (702) and the magnet B (703) are opposite in homopolar.
5. The quasi-zero stiffness flexible guide mechanism based on the passive compensation structure as claimed in claim 1, wherein: the passive folding reed component (9) comprises a bending reed (901), a reed connecting block (902) and reeds (903), the reed connecting block (902) and the reeds (903) are arranged in a staggered mode, two ends of each reed (903) are connected with the reed connecting block (902), and two reed connecting blocks (902) at the outermost ends are connected with the indirect driving component (1) and the folding reed fixing component (8) through the bending reed (901).
6. The flexible guide mechanism with quasi-zero stiffness based on the passive compensation structure as claimed in claim 1, wherein: negative stiffness compensation reed assembly (10) includes negative stiffness compensation reed connecting piece (1001), negative stiffness compensation reed fixing piece (1002), negative stiffness compensation reed cushion block (1003) and negative stiffness compensation reed (1004), negative stiffness compensation reed (1004) quantity is a plurality of, equally divides between the both ends of a plurality of negative stiffness compensation reeds (1004) and does not link to each other through negative stiffness compensation reed cushion block (1003), negative stiffness compensation reed (1004) both ends outside is connected with negative stiffness compensation reed fixing piece (1002) respectively, negative stiffness compensation reed fixing piece (1002) link to each other with negative stiffness compensation reed connecting piece (1001), negative stiffness compensation reed connecting piece (1001) is installed respectively on direct drive part (5) and negative stiffness reed fixing assembly (6).
7. The quasi-zero stiffness flexible guide mechanism based on the passive compensation structure as claimed in claim 6, wherein: in the initial state, the negative stiffness compensation reed (1004) is in a bending deformation state with a certain radian.
8. The flexible guide mechanism with quasi-zero stiffness based on the passive compensation structure as claimed in claim 1, wherein: linear grating chi feedback module (11) includes grating chi reading head bottom mounting (1101), grating chi reading head fixed side plate (1102), grating chi reading head (1103) and grating chi (1104), grating chi (1104) are fixed in direct drive part (5) bottom, grating chi reading head (1103) is relative with grating chi (1104) position and reads grating chi (1104) scale, grating chi reading head (1103) links to each other with grating chi reading head fixed side plate (1102), grating chi reading head fixed side plate (1102) links to each other with grating chi reading head bottom mounting (1101).
9. The flexible guide mechanism with quasi-zero stiffness based on the passive compensation structure as claimed in claim 1, wherein: the linear motor driving module (12) comprises a motor fixing block (1201), a motor stator (1202), a motor rotor (1203) and a motor connecting block (1204), wherein the motor stator (1202) is installed on the motor fixing block (1201), the motor rotor (1203) is connected with the motor connecting block (1204), and the motor connecting block (1204) is connected with the direct driving component (5).
10. The flexible guide mechanism with quasi-zero stiffness based on the passive compensation structure as claimed in claim 1, wherein: fixed module (3) are including mounting base (301), installation curb plate (302) and curb plate mounting (303), mounting base (301) link to each other with installation curb plate (302), installation curb plate (302) link to each other with curb plate mounting (303), second order reed subassembly (2) link to each other with mounting base (301), negative stiffness reed fixed subassembly (6) are including negative stiffness spring base (601) and negative stiffness spring bottom mounting (602), negative stiffness spring base (601) link to each other with negative stiffness spring bottom mounting (602), negative stiffness compensation reed subassembly (10) link to each other with negative stiffness spring base (601), folding reed fixed subassembly (8) are including folding spring base (801) and folding spring bottom mounting (802), folding spring base (801) link to each other with folding spring bottom mounting (802), passive folding reed subassembly (9) link to each other with folding spring base (801).
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| JP2000077503A (en) * | 1998-08-28 | 2000-03-14 | Nikon Corp | Stage device and aligner |
| CN102393611B (en) * | 2011-11-12 | 2013-10-16 | 哈尔滨工业大学 | Magnetic preloading balance positioning system for photoetching machine workpiece stage |
| CN103116249A (en) * | 2012-12-12 | 2013-05-22 | 清华大学 | Negative stiffness system for gravity compensation of micropositioner |
| CN108015561B (en) * | 2017-12-19 | 2023-10-03 | 广东工业大学 | Motion platform capable of enlarging single-drive rigid-flexible coupling working area |
| CN109676403B (en) * | 2019-02-01 | 2023-11-07 | 广东工业大学 | Large-stroke high-speed high-precision macro-micro composite motion platform |
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