CN113192873B - Flexible connection mechanism, micro-motion stage mechanism and semiconductor device - Google Patents
Flexible connection mechanism, micro-motion stage mechanism and semiconductor device Download PDFInfo
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- CN113192873B CN113192873B CN202110434943.5A CN202110434943A CN113192873B CN 113192873 B CN113192873 B CN 113192873B CN 202110434943 A CN202110434943 A CN 202110434943A CN 113192873 B CN113192873 B CN 113192873B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
- H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Abstract
The utility model relates to the technical field of semiconductor equipment, and provides a flexible connection mechanism, a workbench driving system, semiconductor equipment and the flexible connection mechanism, wherein the flexible connection mechanism is used for performing Rz-direction decoupling on a workbench and is arranged between the end part of a cross beam for driving the workbench to move along the Y direction and an X guiding mechanism; the flexible connection mechanism includes: the decoupling mechanism is arranged at one end part of the cross beam, and the first bottom air floatation module is arranged at the other end part of the cross beam. According to the flexible connecting mechanism, the decoupling mechanism is arranged at one end part of the cross beam, and the two end parts of the cross beam are guided by the two groups of X-direction guiding mechanisms respectively, so that the Rz-direction decoupling is realized, and meanwhile, the rigidity of the workbench is improved; the micro-motion bench mechanism provided by the utility model comprises the flexible connecting mechanism, so that the volume of the whole workbench is saved, and the stability of the motion process of the workbench is obviously improved.
Description
Technical Field
The present utility model relates to the field of semiconductor devices, and in particular, to a flexible connection mechanism, a micro-motion stage mechanism, and a semiconductor device.
Background
In applications where positioning accuracy is extremely high, such as in semiconductor manufacturing and optical image alignment applications, it is often necessary to use a stage to carry the wafer. The accuracy, speed and stability of the motion of the stage determine the accuracy, yield and productivity of the semiconductor, particularly the lithographic apparatus. The workbench in the prior art comprises a coarse motion platform and a micro motion platform, wherein the coarse motion platform realizes high-speed and large-stroke motion along the XY direction, and the micro motion platform realizes nano-scale tracking and positioning. The rough moving platform is generally in an H-shaped structure, three degrees of freedom control is realized through three linear motors, the linear motors at two ends of the rough moving platform are independently driven to realize movement along the X direction, and the other linear motor is independently driven to realize movement along the Y direction.
The Chinese patent of application number 200720071434.6 discloses a flexible connection structure, wherein a flexible block is connected with a linear motor and a guide rail, and vibration reduction and Rz direction motion decoupling of a workbench are realized through a C-shaped flexible block and a thin spring plate structure, but the flexible structure cannot control the Rz direction rotation center; meanwhile, the thin spring plate and the C-shaped flexible block in the prior art are of a series structure, so that the rigidity of the movement direction is not improved, and the whole volume of the workbench is increased due to symmetrical arrangement of flexible pieces. In addition, the chinese patent application No. 200910044992.7 discloses a flexible connection structure, which has poor rigidity in XY directions although the decoupling of the table Rz direction is achieved.
In view of this, there is a need for improvements in the prior art work stations to address the above-described problems.
Disclosure of Invention
The utility model aims to disclose a flexible connection mechanism, a micro-motion stage mechanism and a semiconductor device, which are used for solving a plurality of defects of a workbench in the semiconductor device in the prior art, improving the rigidity of the workbench while realizing Rz-direction decoupling, reducing the volume of the workbench and ensuring the stability of the motion process of the workbench.
In order to achieve the first object, the present utility model provides a flexible connection mechanism for performing Rz-direction decoupling on a table, the flexible connection mechanism being disposed between an end of a beam for driving the table to move in the Y-direction and an X-direction guiding mechanism; the flexible connection mechanism includes: the decoupling mechanism is arranged at one end part of the cross beam, and the first bottom air floatation module is arranged at the other end part of the cross beam.
As a further improvement of the present utility model, the decoupling mechanism includes: the first lateral air floatation assembly is arranged outside the first connecting piece, and the elastic piece is arranged at the outer side of the first connecting piece;
the first lateral air floatation assembly is flexibly connected with the first connecting piece through an elastic piece.
As a further improvement of the utility model, the bottoms of the first connecting piece and the second connecting piece are respectively provided with a first bottom air floatation module; the elastic piece comprises an upper connecting piece, a lower connecting piece and an elastic telescopic component, wherein the upper connecting piece and the lower connecting piece are arranged up and down along Z, and the elastic telescopic component is arranged between the upper connecting piece and the lower connecting piece and rotates and/or stretches elastically along Z direction.
As a further improvement of the utility model, the elastic expansion component consists of more than two spiral bodies which are connected with the upper connecting sheet and the lower connecting sheet, and the spiral bodies are symmetrically distributed along the Z-direction axis.
As a further improvement of the utility model, the elastic telescopic component consists of a hollow flexible column connected with the upper connecting sheet and the lower connecting sheet, and the side part of the hollow flexible column is provided with more than two spiral hollowed-out parts which are axially symmetrically distributed along the Z direction.
As a further improvement of the present utility model, the X-direction guiding mechanism includes: the X-direction linear motor comprises X-direction guide rails which are horizontally and parallelly arranged, an X-direction linear motor stator which is arranged above the X-direction guide rails, and an X-direction linear motor rotor which is horizontally embedded into the X-direction linear motor stator;
the X-direction linear motor rotor is arranged above the first connecting piece and the second connecting piece;
the X-direction guide rail transversely separates the centre gripping and guides the crossbeam whole to make reciprocating motion along X direction, and first side air supporting subassembly includes side direction air supporting body and side direction air supporting module.
As a further improvement of the utility model, the lateral air-float body is concavely provided with a containing groove which is arranged along the Z direction and is used for partially containing the elastic piece, the lower connecting piece part is horizontally and transversely arranged in the containing groove and is transversely and fixedly connected with the lateral air-float body, the transverse outward extension of the first connecting piece is provided with an upper limiting piece connected with the upper connecting piece, the bottom of the containing groove is transversely and inwards extended with a lower limiting piece connected with the lower connecting piece, and an elastic piece which is coaxially arranged along the Z direction is arranged between the upper limiting piece and the lower limiting piece.
As a further improvement of the utility model, the first lateral air floatation assembly is provided with a bracket close to the inner side of the first connecting piece, an upper limit piece and a lower limit piece which are arranged up and down are arranged in a transversely outward protruding mode of the first connecting piece, and an elastic piece which is coaxially arranged along the Z direction is arranged between the bracket and the upper limit piece and between the bracket and the lower limit piece.
Based on the same inventive concept, the utility model also discloses a micro-motion stage mechanism, comprising:
a supporting base, a supporting base and a supporting base,
two groups of X-direction guiding mechanisms arranged on the supporting base,
the Y-direction guiding mechanism is connected by two groups of X-direction guiding mechanisms in a sliding way and is suspended above the supporting base, and a workbench;
the Y-direction movement mechanism comprises a cross beam for driving the workbench to reciprocate along the Y direction, and the end part of the cross beam is provided with the flexible connection mechanism disclosed in any utility model.
Finally, the utility model also discloses a semiconductor device comprising:
at least one of the micro-stage mechanisms disclosed in any of the foregoing utility models.
Compared with the prior art, the utility model has the beneficial effects that:
according to the flexible connecting mechanism, the decoupling mechanism is arranged at one end part of the cross beam, and the two end parts of the cross beam are guided by the two groups of X-direction guiding mechanisms respectively, so that the Rz-direction decoupling is realized, and meanwhile, the rigidity of the workbench is improved;
the micro-motion stage mechanism provided by the utility model comprises the flexible connecting mechanism, and the decoupling mechanism is arranged at one end part of the cross beam, and the two end parts of the cross beam are respectively guided by the two groups of X-direction guiding mechanisms, so that the volume of the whole workbench is saved, and the stability of the motion process of the workbench is obviously improved.
Drawings
FIG. 1 is a perspective view of a micro-motion stage mechanism incorporating a flexible connection mechanism of the present utility model;
FIG. 2 is an enlarged partial schematic view of circle B of FIG. 1;
FIG. 3 is a perspective view of the flexible connection mechanism of the present utility model;
FIG. 4 is a top view of the flexible connection unit shown in FIG. 3;
FIG. 5 is a cross-sectional view taken along the direction A-A in FIG. 4;
FIG. 6 is a front view of a micro-stage mechanism incorporating a flexible connection mechanism of the present utility model;
FIG. 7 is a perspective view of a first lateral air bearing assembly including an elastic member;
FIG. 8 is a perspective view of the first connector transversely assembled with the first lateral air bearing assembly;
FIG. 9 is a perspective view of the first lateral air bearing assembly assembled with the first connector;
FIG. 10 is a perspective view of the spring shown in FIG. 7 in one embodiment;
fig. 11 is a perspective view of the spring shown in fig. 7 in another embodiment.
Detailed Description
The present utility model will be described in detail below with reference to the embodiments shown in the drawings, but it should be understood that the embodiments are not limited to the present utility model, and functional, method, or structural equivalents and alternatives according to the embodiments are within the scope of protection of the present utility model by those skilled in the art.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "positive direction", "negative direction", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and should not be construed as limiting the present utility model. The term "above" includes this number.
Embodiment one:
referring to fig. 1 to 5 and 7 to 10, the present embodiment shows a specific embodiment of a flexible connection mechanism of the present utility model.
And the flexible connecting mechanism is used for performing Rz-direction decoupling on the workbench 6 and is arranged between the end part of the cross beam 8 which drives the workbench 6 to move along the Y direction and the X-direction guiding mechanism. The flexible connection mechanism includes: a decoupling mechanism disposed at one end of the cross beam 8, and a first bottom air bearing module 501 disposed at the other end of the cross beam 8. The decoupling mechanism includes: the first connecting piece 51 and the second connecting piece 52 disposed at the end of the cross beam 8, the first lateral air floating assembly 11 disposed outside the first connecting piece 51, and the elastic piece 25a (or the elastic piece 25 b), and the number of the elastic pieces 25a (or the elastic piece 25 b) is not limited specifically. The first lateral air floatation assembly 11 is flexibly connected with the first connecting piece 51 through the elastic piece 25a.
The elastic member 25a is vertically arranged along the Z direction, and one end of the elastic member 25a along the Z direction is connected to the first lateral air floatation assembly 11, and the other end is connected to the first connecting member 51. The bottoms of the first connecting piece 51 and the second connecting piece 52 are respectively provided with a first bottom air floatation module 501. The elastic member 25a includes an upper connection piece 251 and a lower connection piece 252 arranged up and down along Z, and an elastic expansion and contraction assembly disposed between the upper connection piece 251 and the lower connection piece 252.
The elastic member 25a forms a deformation amount in the Z direction based on the expansion and contraction movement of the upper connecting piece 251 and the lower connecting piece 252 in the Z direction, and the elastic member 25a forms a torsion amount in the XY direction on a plane based on the rotation of the upper connecting piece 251 and the lower connecting piece 252 in the C axis. The elastic telescopic component rotates and/or elastically stretches along the Z direction. The elastic telescopic assembly always surrounds the C axis in fig. 7 and rotates anticlockwise along the direction C1 (or rotates clockwise opposite to the direction C1), and the rotation direction of the elastic telescopic assembly is XY direction defined by the space plane. The expansion and contraction direction of the elastic expansion and contraction component is along the direction of the C axis, wherein the C axis is parallel to the Z direction.
Therefore, the pair of elastic members 25a is independent of the movement of the movable base 9 including the cross member 8 in the X direction and also independent of the movement of the table 6 above the movable base 9 in the Y direction. For example, when the stage 6 is considered as an exposure stage of a lithographic apparatus, the stage 6 carries a wafer. In the exposure process, the two X-direction linear motor stators 3 are fixed on the two parallel X-direction guide rails 2 and do not move, and when the two X-direction linear motor movers 4 perform dislocation motion (namely, the two X-direction linear motor movers 4 do not synchronously move), the cross beam 8 can rotate in the Rz direction. The dislocation motion phenomenon can be corrected by controlling the two X-direction linear motors (prior art) at this time, and the wafer carried by the workbench 6 is ensured to be kept at the position in the Rz direction.
The extending direction of the first connecting piece 51 and the second connecting piece 52 in the overlook angle is the same as the X direction, and the first bottom air floatation modules 501 are arranged at the bottoms of the first connecting piece 51 and the second connecting piece 52. The ends of the first and second connection members 51 and 52 are provided with an input hole (not shown) for compressed air to be input with about 0.1Mpa and finally the compressed air is downwardly sprayed by the first bottom air-floating module 501 to form a downward air flow. The first bottom air-float module 501 forms an air flow downward to integrally cross the first connection member 51, the second connection member 52, the cross beam 8 and the table 6 in a suspended manner above the upper surface 101 of the support base 1 to form the gap 110.
As shown in connection with fig. 1 to 3, the X-direction guiding mechanism includes: the X-direction guide rail 2 is horizontally and parallelly arranged, the X-direction linear motor stator 3 is arranged above the X-direction guide rail 2, the X-direction linear motor rotor 4 is horizontally embedded into the X-direction linear motor stator, and the X-direction linear motor rotor 4 is arranged above the first connecting piece 51 and the second connecting piece 52. The X-direction linear motor stator 3 forms X-direction stator housings 31,32 disposed inward, and forms an X-direction mover body 41 for the X-direction linear motor mover 4 disposed horizontally outward and extending horizontally into the housing rail 301 formed by the X-direction stator housings 31, 32. The side of the X-direction linear motor rotor 4 is provided with power interfaces 43,44 and a control signal interface 42. The second connection member 52 is laterally spaced from the X-direction rail 2 disposed on the same side in the Y-direction, and forms a second lateral gap 201. The first lateral air bearing assembly 11 is not arranged outside the second connecting piece 52 so as to reduce the Y-direction length and the Y-direction volume.
The X-direction linear motor stator 3 accommodates and supports the X-direction mover body 41, so that the first link 51 and the second link 52 located below the X-direction linear motor mover 4 are driven in the longitudinal extending direction of the X-direction linear motor stator 3 by driving the X-direction mover body 41. The X-direction guide rail 2 transversely and separately clamps and guides the cross beam 8 to reciprocate along the X direction as a whole. The table 6 is independently driven by a Y-direction guide mechanism provided inside the cross member 8, and finally the table 6 is driven to perform independent horizontal reciprocating motion in the Y direction.
The components in the dashed three-dimensional area 100 and the dashed three-dimensional area 200 in fig. 3 are respectively clamped by the two groups of the X-direction linear motor stator 3 and the X-direction guide rail 2 in the Y direction in fig. 1, and the workbench 6 is integrally driven to linearly move in the XY direction by two X-direction linear motors consisting of the X-direction linear motor stator 3 and the X-direction linear motor mover 4 and one Y-direction linear motor 7 consisting of the Y-direction linear motor stator 71 and the Y-direction linear motor mover 72, so that the parallel movement in the XY direction of the workbench 6 is realized by the two X-direction linear motors and the one Y-direction linear motor (i.e., three linear motors).
As shown in fig. 1, 4, and 7 to 9, the first lateral air-floating assembly 11 includes a lateral air-floating body 111 and a lateral air-floating module 112. The lateral air bearing module 112 is suspended laterally and moves against the inner side 222 of the X-direction rail 2. The lateral air bearing modules 112 form densely arranged micropores facing the outer side 1121 of the X-direction guide rail 2 to form a laterally outward air flow, and isolate the lateral air bearing modules 112 laterally from the X-direction guide rail 2. The micropores are not shown in view of their smaller size. The lateral air-floating body 111 is provided with a concave receiving groove 113 arranged along the Z direction for partially receiving the elastic member 25a. The receiving groove 113 has a semicircular or approximately semicircular cross section in the horizontal direction. The lower connecting piece 252 is partially horizontally and transversely arranged in the accommodating groove 113 and is fixedly connected with the lateral air floatation body 111, and an upper limit piece 502 connected with the upper connecting piece 251 is arranged in a transversely outward protruding mode of the first connecting piece 51. The bottom of the accommodating groove 113 is provided with a lower limit plate 503 which is connected with the lower connecting plate 252 in a protruding manner transversely inwards, and an elastic piece 25a (or an elastic piece 25 b) which is coaxially arranged along the Z direction is arranged between the upper limit plate 502 and the lower limit plate 503.
Referring to fig. 7, 8 and 10, in the present embodiment, the upper surface of the upper connection piece 251 of the elastic member 25a is provided with a connection hole 2511 vertically penetrating or partially penetrating the upper connection piece 251, and the lower surface of the lower connection piece 252 is provided with a connection hole 2521 vertically penetrating or partially penetrating the lower connection piece 252. The upper limit plate 502 is horizontally protruded outwards, and the upper limit plate 502 is annularly provided with a mounting hole 5021 vertically penetrating through the upper limit plate 502 so as to connect the upper limit plate 502 with the upper connecting plate 251 through bolts. The lower limit plate 503 is provided with a connection hole (not shown) matched with the connection hole 2521, and the connection hole of the lower limit plate 503 and the connection hole 2521 of the lower connection piece 252 are vertically penetrated by bolts or screws to reliably connect the lower limit plate 503 with the lower connection piece 252. The bolts or screws vertically penetrate through the mounting holes 5021 of the upper limit plate 502 and the connecting holes 2521 of the upper connecting plate 251 to reliably connect the upper connecting plate 251 with the upper limit plate 502, so that the first lateral air floatation assembly 11 and the first connecting piece 51 are flexibly connected through the elastic pieces 25a arranged along the Z direction. The upper limit piece 502 and the lower limit piece 503 clamp and connect the elastic piece 25a along the Z direction.
In this embodiment, a boss 506 is provided on the top of the first connecting member 51, and the x-direction linear motor mover 4 abuts against the outer side of the boss 506 and is attached to the top surface 505 of the first connecting member 51. A similar boss (not shown) may also be provided on top of the second connector 52. The inner side 504 of the first connecting piece 51, which is close to the cross beam 8, is provided with a plurality of through holes 507 penetrating the first connecting piece 51 integrally along the Y direction, and the tail end of the cross beam 8 along the Y direction extending direction is provided with blind holes (not shown) matched with the through holes 507, so that the through holes 507 penetrating the first connecting piece 51 through bolts or screws are in threaded connection with the blind holes at the end part of the cross beam 8. The connection and fixing of the second connecting piece 52 to the transverse beam 8 are achieved in the same manner as described above.
Referring to fig. 10, the elastic expansion assembly is composed of more than two spirals (i.e., spirals 253 and 254) connecting the upper connection piece 251 and the lower connection piece 252, and the spirals 253,254 are symmetrically distributed along the Z-axis. A spiral gap 250 is formed between spiral 253 and spiral 254. The elastic member 25a is arranged in a vertical posture along the Z direction, and has a top portion connected to the first connecting member 51 and a bottom portion connected to the first lateral air floating assembly 11. The upper and lower connection plates 251 and 252 are directly caused to rotate along the C-axis during rotation of the elastic expansion assembly, and the elastic expansion assembly is forced to extend or contract during rotation. In this embodiment, the elastic member 25a with the double-screw structure is beneficial to keeping the elastic telescopic assembly moving around the C-axis in fig. 7 all the time (i.e. ensuring that the rotation center axis of the elastic telescopic assembly always keeps a strict vertical posture) during rotation and elastic telescopic, so as to improve the rigidity of the elastic telescopic assembly along the horizontal plane defined by XY during the process of performing XY-direction high-speed translational movement of the workbench 6.
In this embodiment, since one end of the elastic expansion and contraction assembly is connected to the first lateral air-floating assembly 11 through the lower connecting piece 252 and the other end is connected to the first connecting piece 51 through the upper connecting piece 251, the kinematic pair formed by the rotation and elastic expansion and contraction performed by the elastic expansion and contraction assembly is not interfered by the movement of the workbench 6 along the X direction and/or the Y direction, and is independently operated. In the process of integrally driving the cross beam 8 and the workbench 6 to do linear motion along the X direction by the X-direction linear motor mover 4 arranged above the first connecting piece 51 and the X-direction linear motor mover 4 arranged above the second connecting piece 52, even if misplacement motion (namely, unsynchronized motion of the two X-direction linear motor movers 4) occurs, the cross beam 8 can rotate along the Rz direction and simultaneously drive the Y-direction motion base 9 to twist along a plane defined by the XY direction.
The rotation of the cross beam 8 in the Rz direction can not directly lead the workbench 6 to rotate in the Rz direction, and as the first lateral air floatation assembly is flexibly connected with the first connecting piece 51 arranged at one end part of the cross beam 8 through the elastic piece 25a, the rotation center of the cross beam 8 in the rotation process is not changed along the Z direction through the elastic piece 25a, and the longitudinal deformation caused by the fact that more than two spiral bodies of the elastic piece 25a stretch or shorten along the Z direction after receiving the pressure on two sides along the Z direction is independent of the X-direction guiding mechanism and the Y-direction guiding mechanism, the rotary coupling between the workbench 6 and the cross beam 8 is relieved, the Rz direction decoupling is realized on the cross beam 8 through the decoupling mechanism arranged at one end part of the cross beam 8, and the fact that the workbench 6 has a fixed rotation center along the Rz direction is ensured. When the two X-direction linear motor movers 4 synchronously move, the whole cross beam 8 and the workbench 6 which linearly moves along the Y direction of the cross beam 8 are driven to integrally perform high-speed and stable translational movement along the X direction.
Embodiment two:
referring to fig. 6 and 11, a modified embodiment of a flexible connection unit according to the present utility model is shown.
As shown in fig. 11, the main difference between the present embodiment and the flexible connection mechanism disclosed in the first embodiment is that, in the present embodiment, the first lateral air floating assembly 11 and the first connection member 51 are flexibly connected by the elastic member 25b. The elastic member 25b includes an upper connection piece 251 and a lower connection piece 252 arranged up and down along Z, and an elastic expansion and contraction assembly disposed between the upper connection piece 251 and the lower connection piece 252. Specifically, the elastic telescopic component is composed of a hollow flexible column 255 connecting the upper connecting sheet 251 and the lower connecting sheet 252, and the side part of the hollow flexible column 255 is provided with more than two spiral hollowed-out parts 256 which are axially symmetrically distributed along the Z direction. Compared to the elastic member 25a of the first embodiment, the elastic member 25b of the present embodiment formed by the hollow flexible column 255 with the spiral hollow portion 256 can provide smaller adjustment of the deformation amount along the C-axis direction, so that the elastic telescopic assembly has greater rigidity.
The first lateral air-floating assembly 11 is close to the inner side of the first connecting piece 51 and is provided with a bracket 114, an upper limit piece 502 and a lower limit piece 503 which are arranged up and down are arranged in a transversely outward protruding mode of the first connecting piece 51, and an elastic piece 25a and/or an elastic piece 25b which are coaxially arranged along the Z direction are arranged between the bracket 114 and the upper limit piece 502 and between the bracket 114 and the lower limit piece 503. The same elastic member 25a or elastic member 25b may be disposed between the bracket 114 and the upper limiting piece 502, and the same elastic member 25a and elastic member 25b may be disposed between the bracket 114 and the lower limiting piece 503.
As a reasonable modification, as shown in fig. 6 and 7, the lower limiting piece 503 may be disposed to extend laterally outward from the first connecting piece 51 and be connected to the first connecting piece 51, or the lower limiting piece 503 may be a part of the lateral air-floating body 111 and extend laterally inward. Further, the bracket 114 may be regarded as a part of the first connecting piece 51 and disposed laterally outward, and the upper limiting piece 502 and the lower limiting piece 503 are regarded as a part of the lateral air-floating body 111 and disposed at the upper end and the lower end of the accommodating groove 113 in a protruding manner.
In the embodiments of the present utility model, the direction from the both ends of the cross beam 8 toward the table 6 in the Y direction is regarded as "laterally inward", and the direction from the table 6 toward the both ends of the cross beam 8 in the Y direction is regarded as "laterally outward".
As shown in fig. 6, only one end of the beam 8 is provided with one or two or more elastic members 25a (or elastic members 25 b) including elastic expansion components, while the second connecting member 52 at the end of the beam 8 remote from the other end provided with the elastic members 25a (or elastic members 25 b) is connected with the Y-direction linear motor stator 3 only through the Y-direction linear motor mover 4, and one or more first bottom air floating modules 501 provided at the bottom of the second connecting member 52 are suspended on the upper surface 101 of the support base 1 to form a gap 110. Such as the first lateral air bearing assembly 11, has greater requirements for Y-directional installation space. Therefore, the flexible connection mechanism disclosed in this embodiment not only simplifies the manufacturing cost of the micro-stage mechanism including the flexible connection mechanism, but also can significantly reduce the size of the Y-direction guiding mechanism in the Y-direction, thereby reducing the size of the micro-stage mechanism as shown in the third embodiment described below as a whole.
The technical scheme of the flexible connection mechanism disclosed in this embodiment and the embodiment one having the same parts is described in the embodiment one, and is not repeated here.
Embodiment III:
based on the technical scheme of the flexible connection mechanism disclosed in the first embodiment and/or the second embodiment, the embodiment shows a micro-bench mechanism.
As shown in fig. 1 to 6, in the present embodiment, a micro-stage mechanism includes:
the support base 1, two sets of X guiding mechanisms arranged on the support base 1, a Y guiding mechanism which is connected by the two sets of X guiding mechanisms in a sliding way and is suspended above the support base 1, and a workbench 6. The Y-direction movement mechanism comprises a cross beam 8 for driving the workbench 6 to reciprocate along the Y direction, and the end part of the cross beam 8 is provided with a flexible connection mechanism as disclosed in the first embodiment and/or the second embodiment.
As shown in fig. 4 and 5, the Y-direction guiding mechanism includes: a Y-direction motion base 9 connected with the workbench 6, a cross beam 8 penetrating the Y-direction motion base 9 transversely along the Y direction, and a Y-direction driving mechanism 7 arranged between the workbench 6 and the cross beam 8. The Y-direction driving mechanism 7 includes a Y-direction linear motor stator 71 connected to the cross beam 8 and a Y-direction linear motor mover 72 provided below the table 6. The Y-direction linear motor mover 72 is fixedly connected below the worktable 6, and drives the worktable 6 to horizontally reciprocate along the Y direction along with the linear relative movement of the Y-direction linear motor stator 71 and the Y-direction linear motor mover 72.
Referring to fig. 5 and 6, the Y-direction moving base 9 and the table 6 enclose the cross beam 8, the Y-direction moving base 9 includes a base 92 suspended above the support base 1 and two side walls 91 integrally connected to the base 92, and the cross beam 8 includes a cross beam base 81 and a bending portion 82 upwardly disposed from the cross beam base 81. The support base 1 may be a marble Dan Zujian. The bottom of the base 92 is provided with a second bottom air bearing module 921 to form a first longitudinal gap 910 between the base 92 and the support base 1. The second lateral air bearing assembly 821 is provided on the side of the bent portion 82 to form a first lateral gap 822 at least between the bent portion 82 and the side wall 91.
Preferably, in the present embodiment, a third bottom air-float module 811 may be disposed at the bottom of the beam base 81 to form a first lateral gap 822 and a second longitudinal gap 842 between the folded portion 82 and the side wall 91 and between the beam base 81 and the base 92, respectively. The second bottom air floating modules 921 and the third bottom air floating modules 811 are symmetrically distributed with respect to the table 6 in the Y direction. The beam 8 is suspended from the upper surface 912 of the base 92 to form a second longitudinal gap 842 between the beam base 81 and the base 92.
As shown in connection with fig. 1, an input hole 911 of compressed air is provided at an end of the sidewall 91 to input compressed air of about 0.1Mpa to the input hole 911 and finally the compressed air is downwardly sprayed by the second bottom air floating module 921 to form a downward air flow to form the first longitudinal gap 910. It should be noted that, the second bottom air-floating module 921 may be omitted, so that the Y guiding mechanism is integrally supported and ensured to be suspended above the supporting base 1 only through the gap 110 formed by the first connecting piece 51 disposed at two ends of the beam 8 and the first bottom air-floating module 501 disposed at the bottom of the second connecting piece 52, and the Y guiding mechanism is driven to perform an integral translational motion along the X direction by the two X guiding mechanisms at two sides of the beam 8. The cross beam 8 isolates the Y-direction moving base 9 through three-side air floatation, so that the workbench 6 is carried by the Y-direction moving base 9 to reciprocate along the Y direction under the restraint and the guidance of the cross beam 8.
In the present embodiment, since the Y-direction motion base 9 has three degrees of freedom in the X-direction, the Y-direction, and the Rz-direction, the moment compensating device 400 is provided at the bottom of the support base 1. The moment compensation device 400 is used for performing moment compensation on the Y-direction motion base 9 suspended above the support base 1. The cross beam 8 moves integrally in the X direction under the drive of the X-direction guide mechanism. The additional Rz-directional torque generated by the acceleration or deceleration of the Y-directional motion base 9 in the XY direction based on the X-directional linear motor and the Y-directional linear motor is transmitted to the support base 1 through the X-directional guide mechanisms and the X-directional guide rails 2 positioned at two sides, and the moment compensation device 400 is used for compensating the moment of the Y-directional motion base 9 so as to offset the inertia of the Y-directional motion base 9.
The bottoms of two ends of the Y-direction guiding mechanism are suspended above the supporting base 1, a first lateral air floatation assembly 11 arranged at the end part of one end of the cross beam 8 and positioned outside the first connecting piece 51 is transversely isolated from the X-direction guiding mechanism 2 to form a transverse gap (not marked), a second connecting piece 52 positioned at the end part of the other end of the cross beam 8 is only provided with a plurality of first bottom air floatation modules 501, and the top of the second connecting piece 52 limits the Y-direction guiding mechanism and the cross beam 8 contained in the Y-direction guiding mechanism to move along the Y direction through another X-direction linear motor, and vibration isolation and shock absorption effects are achieved on the workbench 6, and the integral rigidity of the Y-direction guiding mechanism along the Y direction is ensured. In the process that the workbench 6 is driven by two X-direction linear motors and one Y-direction linear motor at high speed, the final motion precision error of the workbench 6 along the X-direction, the Y-direction and the Rz-direction can be controlled to be about 1-2 nanometers, so that the motion reliability and the motion precision of the workbench 6 are ensured, the requirement that a wafer rapidly moves to a desired position on the workbench 6 in a photoetching process (Photo) is met, and the actual position of the workbench 6 is ensured to be consistent with the desired position.
Meanwhile, since the first lateral air-floating assembly 11 is flexibly connected with the first connecting piece 51 through the elastic piece 25a (or the elastic piece 25 b), decoupling of the workbench 6 in the X-direction and the Y-direction can be finally achieved by means of the deformation amount of the elastic piece 25a (or the elastic piece 25 b) in the longitudinal direction along the Z-direction (i.e. compression and extension occurring along the Z-direction) and the torsion amount in the transverse direction (i.e. clockwise or anticlockwise rotation occurring along the horizontal plane where the XY-direction is located). When the cross beam 8 and the Y-direction moving base 9 drive the workbench 6 to move along the X direction and the Y-direction moving base 9 is driven by the Y-direction driving mechanism to drive the workbench 6 to move along the Y direction, the coarse movement process is formed. Because the strokes of the X-direction linear motor (composed of the X-direction linear motor stator 3 and the X-direction linear motor rotor 4) and the Y-direction linear motor (composed of the Y-direction linear motor stator 71 and the Y-direction linear motor rotor 72) are long, the magnets and the rotors have the Rz-direction deviation tolerance range. The rotation of the cross beam 8 in the Rz direction by means of the elastic member 25a (or the elastic member 25 b) arranged at only one end of the cross beam 9 does not cause the rotation of the workbench 6 in the Rz direction and the runout in the Z direction, so that the rotary coupling between the workbench 6 and the cross beam 8 is released, and the complete decoupling of the workbench 6 in the Rz direction degree of freedom is finally realized.
The workbench 6 in this embodiment can be understood as a mask sample wafer relative motion stage, a mask sample wafer integral motion stage or a wafer carrying stage in the lithography apparatus, so as to improve the alignment accuracy and the yield of the wafer; meanwhile, the stage 6 may also be understood as a stage for carrying a wafer that realizes XY-direction movement included in a defect detecting apparatus or measuring apparatus required in the manufacturing process of semiconductor devices such as wafers.
The technical solution of the micro-motion stage mechanism disclosed in this embodiment, which has the same parts as those in the first and/or second embodiments, is shown in the first and/or second embodiments, and will not be described herein again.
Embodiment four:
the present embodiment discloses a specific implementation of a semiconductor device.
In this embodiment, a semiconductor device includes: at least one micro-stage mechanism as disclosed in example three. The semiconductor device can be used for photoetching equipment or detecting equipment in the manufacturing process of semiconductor devices such as wafers and the like.
The technical solutions of the semiconductor device disclosed in this embodiment and the embodiments one to three have the same parts, and are described in reference to the embodiments one to three, and are not repeated here.
The above list of detailed descriptions is only specific to practical embodiments of the present utility model, and they are not intended to limit the scope of the present utility model, and all equivalent embodiments or modifications that do not depart from the spirit of the present utility model should be included in the scope of the present utility model.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (8)
1. A flexible connection mechanism for performing Rz-direction decoupling on the workbench, wherein the flexible connection mechanism is arranged between the end part of a cross beam for driving the workbench to move along the Y direction and the X-direction guiding mechanism; the flexible connection mechanism is characterized by comprising: the decoupling mechanism is arranged at one end part of the cross beam, and the first bottom air floatation module is arranged at the other end part of the cross beam;
the decoupling mechanism includes: the first lateral air floatation assembly is arranged outside the first connecting piece, and the elastic piece is arranged at the outer side of the first connecting piece;
the first lateral air floatation assembly is flexibly connected with the first connecting piece through the elastic piece;
the bottoms of the first connecting piece and the second connecting piece are respectively provided with the first bottom air floatation module; the elastic piece comprises an upper connecting piece, a lower connecting piece and an elastic telescopic component, wherein the upper connecting piece and the lower connecting piece are arranged up and down along Z direction, the elastic telescopic component is arranged between the upper connecting piece and the lower connecting piece, and the elastic telescopic component rotates and/or elastically stretches along Z direction.
2. The flexible connection unit of claim 1, wherein the elastic expansion assembly is composed of two or more spirals connecting the upper and lower connection pieces, the spirals being symmetrically distributed along the Z-axis.
3. The flexible connection mechanism of claim 1, wherein the elastic expansion assembly is composed of a hollow flexible column connecting the upper connection sheet and the lower connection sheet, and the side part of the hollow flexible column is provided with more than two spiral hollowed-out parts symmetrically distributed along the Z-direction axis.
4. A flexible connection unit as claimed in claim 2 or claim 3 wherein the X-direction guide comprises: the X-direction linear motor comprises X-direction guide rails which are horizontally and parallelly arranged, an X-direction linear motor stator which is arranged above the X-direction guide rails, and an X-direction linear motor rotor which is horizontally embedded into the X-direction linear motor stator;
the X-direction linear motor rotor is arranged above the first connecting piece and the second connecting piece;
the X-direction guide rail transversely separates the centre gripping and guides the whole reciprocating motion of crossbeam along X-direction, first side direction air supporting subassembly includes side direction air supporting body and side direction air supporting module.
5. The flexible connection unit of claim 4, wherein the lateral air-floating body is concavely provided with a receiving groove arranged along the Z-direction and used for partially receiving the elastic member, the lower connecting piece is horizontally and transversely arranged in the receiving groove and is fixedly connected with the lateral air-floating body, an upper limit piece connected with the upper connecting piece is arranged in a transversely outward protruding manner of the first connecting piece, a lower limit piece connected with the lower connecting piece is arranged in a transversely inward protruding manner of the bottom of the receiving groove, and the elastic member coaxially arranged along the Z-direction is arranged between the upper limit piece and the lower limit piece.
6. The flexible connection unit of claim 4, wherein the first lateral air-floating assembly is provided with a bracket near the inner side of the first connecting piece, an upper limit piece and a lower limit piece which are arranged up and down are arranged in a manner of protruding outwards in the transverse direction of the first connecting piece, and an elastic piece which is arranged coaxially along the Z direction is arranged between the bracket and the upper limit piece and between the bracket and the lower limit piece.
7. A micro-motion stage mechanism, comprising:
a supporting base, a supporting base and a supporting base,
two groups of X-direction guiding mechanisms arranged on the supporting base,
the Y-direction guiding mechanisms are connected by the two groups of X-direction guiding mechanisms in a sliding way and are suspended above the supporting base, and a workbench;
the Y-direction movement mechanism comprises a cross beam for driving the workbench to reciprocate along the Y direction, and the end part of the cross beam is provided with the flexible connection mechanism as claimed in any one of claims 1 to 6.
8. A semiconductor device, characterized by comprising:
at least one micro-bench mechanism according to claim 7.
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| CN114309925A (en) * | 2021-12-31 | 2022-04-12 | 河南通用智能装备有限公司 | Wafer recessive cutting device |
| CN114619411A (en) * | 2022-03-29 | 2022-06-14 | 苏州矽行半导体技术有限公司 | Flexible motion platform and carrying platform system |
| CN114724618B (en) * | 2022-06-09 | 2022-09-16 | 上海隐冠半导体技术有限公司 | Three-axis motion table |
| CN115001235B (en) * | 2022-08-02 | 2022-10-14 | 上海隐冠半导体技术有限公司 | Two-dimensional movement device |
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