CN114473538A - Gantry double-drive device - Google Patents

Abstract

The invention relates to a gantry double-drive device in the technical field of mechanical manufacturing, which comprises a flexible hinge, a linear slide rail module, a linear motor module and a base, wherein the flexible hinge is arranged on the base; the two sides of the base are respectively provided with a group of linear slide rail modules and linear motor modules which are parallel to each other, the flexible hinges comprise transverse stopping plane flexible hinges and full-freedom-degree plane flexible hinges, the transverse stopping plane flexible hinges and the full-freedom-degree plane flexible hinges are respectively connected with the linear slide rail modules positioned on the two sides of the base, and two ends of a cross beam to be assembled are respectively connected with the transverse stopping plane flexible hinges and the full-freedom-degree plane flexible hinges; when the linear motor modules positioned on the two sides of the base drive the cross beam to linearly move, the deformation of the cross beam in the span direction is passively compensated through the transverse stopping plane flexible hinge and the full-freedom-degree plane flexibility, and the rotor of the linear motor module and the cross beam are kept relatively static. The invention can improve the dynamic performance of low speed and start-stop stages.

Description

Gantry double drive device

technical field

The invention relates to the technical fields of mechanical design, motion control, machine tool manufacturing and the like, in particular to a gantry sliding table floating support flexible hinge assembly and a gantry double drive device.

Background technique

The gantry dual-drive system is a general solution for large machine tools and measuring equipment. Its motion accuracy is affected by a series of factors such as the straightness, parallelism of the guide rails on both sides of the gantry slide, and the synchronization of the movements on both sides. The traditional rigid connection method of gantry beams has extremely high requirements on the installation accuracy of the system. The motion straightness and parallelism errors of the linear module or guide rail system directly reflect the positioning accuracy of the system, and even the left and right sides cannot reach the specified synchronization at the same time. situation of the location. At the same time, the asynchronous movement of the linear modules on both sides will cause the gantry beam and the guide rail system to be deformed by tension, compression, bending and torsion, and even damage the mechanical system, which will undoubtedly increase the difficulty of control and limit the high-speed operation safety of the system.

After searching, the Chinese utility model patent application number is CN 201921169045.6, which proposes a gantry double-drive deviation compensation technology, which uses piezoelectric ceramics and a flexible hinge system to compensate for the machine tool motion error. It should be pointed out that this device can only be used for Compensating the displacement deviation of the moving direction of the gantry system does not eliminate the problem of running jam caused by the direction of the gantry beam, the straightness and parallelism of the two-sided rails, and the accuracy and reliability of the machine tool motion error simply relying on the internal deformation of the flexible hinge to measure the problem. In addition, the Chinese invention patent application number is CN 201610144577.9, which proposes a method for eliminating the internal stress of the gantry system and the beam through the assembly and superposition of the rotating mechanism and the guide mechanism. The superposition of structural assembly will weaken the rigidity of the gantry system, and the movement gap of the mechanism will further weaken the gantry. The accuracy of the system is not conducive to the use of the gantry system in high-precision application scenarios. The Chinese invention patent application number is CN202110808005.7, which proposes a gantry sliding table flexible hinge support assembly, which realizes the elimination of the internal force of the gantry beam through the combined support of the rotary flexible hinge and the deflection flexible hinge. The disadvantage is that the gantry beam and the guide rail slide. The block remains relatively fixed in the longitudinal direction (sliding direction) of the gantry sliding table, which is not conducive to eliminating the influence of guide rail damping and crawling at low speed and start-stop stage.

SUMMARY OF THE INVENTION

In view of the defects in the prior art, the purpose of the present invention is to provide a gantry double-drive device.

A gantry double-drive device provided according to the present invention includes a flexible hinge, a linear slide rail module, a linear motor module and a base;

A set of parallel linear slide rail modules and linear motor modules are respectively installed on both sides of the base, and the flexible hinge includes a lateral stop plane flexible hinge and a full degree of freedom plane flexible hinge. The lateral stop plane flexible hinge and the full degree of freedom plane flexible hinge are respectively connected with the linear slide rail modules located on both sides of the base, and the two ends of the beam to be assembled are respectively connected to the lateral stop plane flexible hinge The hinge is connected with the full degree of freedom plane flexible hinge;

When the linear motor modules located on both sides of the base drive the beam to move linearly, the deformation in the span direction of the beam is passively compensated by the lateral stop plane flexible hinge and the full degree of freedom plane flexibility. The mover of the linear motor module and the beam remain relatively stationary.

In some embodiments, the lateral stop plane hinge includes a first base plate, a first micro-movement disc, and a first thin-walled beam, and the first base plate is flexibly connected to the first micro-movement disc through a plurality of the first thin-walled beams. connected, and the movement of the first substrate and the first micro-movement disk along the span direction is restricted.

In some embodiments, the plurality of first thin-walled beams include a pair of in-line structures and are symmetrically connected to both sides of the micro-movement disk, and the pair of in-line first thin-walled beams are used to constrain the first relative movement of the moving plate relative to the first substrate along the span direction;

The plurality of first thin-walled beams also include any one of a broken line, an arc, an S shape, an ellipse, or a wavy shape that is arranged in pairs and symmetrically arranged on both sides of the first micro-movement disk.

In some embodiments, the full-degree-of-freedom planar flexible hinge includes a second substrate, a second micro-movement disk, and a second thin-walled beam, and the second substrate is flexed with the second micro-movement disk through a plurality of the second thin-walled beams. The second micro-moving disk can move in any direction in the plane relative to the second substrate.

In some embodiments, the plurality of the second thin-walled arm beams are any one or a combination of a polyline shape, an arc shape, an S shape, an ellipse shape or a wave shape.

In some embodiments, the linear motor module includes a motor stator and a motor mover;

The two ends of the beam are respectively connected to the motor movers on both sides of the base, or the two ends of the beam are respectively connected to the lateral stop plane flexible hinge and the full degree of freedom plane flexible hinge. After being connected, the motor movers on both sides of the base are respectively connected with the lateral stop plane flexible hinge and the full degree of freedom plane flexible hinge.

In some embodiments, the linear slide rail module includes a linear slide rail and a slider, the slide block is slidably connected to the linear slide rail, and the linear slide rail is mounted on the base.

In some embodiments, when both ends of the beam are respectively connected to the motor movers located on both sides of the base, the first base plate and the second base plate are respectively connected to the slider, the The first micro-motion disk and the second micro-motion disk are respectively connected to the beam, or the first substrate and the second substrate are respectively connected to the beam, the first micro-motion disk and the first micro-motion disk are respectively connected to the beam. The two micro-moving discs are respectively connected with the sliding block.

In some embodiments, after the two ends of the beam are respectively connected with the lateral stop plane flexible hinge and the full degree of freedom plane flexible hinge, the motor movers on both sides of the base are respectively connected with the When the lateral stop plane flexible hinge and the full degree of freedom plane flexible hinge are connected,

The two sets of the sliders are respectively connected to the first base plate and the second base plate, and the two ends of the beam are respectively connected to the first micro-movement plate and the second micro-movement plate. The motor movers are respectively connected with the first micro-movement plate and the second micro-movement plate, or the two sets of the sliders are respectively connected with the first micro-movement plate and the second micro-movement plate, Both ends of the beam are respectively connected to the first base plate and the second base plate, and the two sets of linear motors are respectively connected to the first base plate and the second base plate.

In some embodiments, a position measurement assembly is further included, the position measurement assembly includes a position scale and a position measurement read head, the position scale is parallel to the linear slide rail module, and the position measurement read head is connected to the position measurement read head. The beam remains relatively stationary.

Compared with the prior art, the present invention has the following beneficial effects:

1. The gantry double-drive device of the present invention can enable the gantry beam and the guide rail slider to realize the free floating effect similar to the air-floating guide rail when the gantry sliding table slides, and eliminate the influence of the guide rail damping and crawling on the dynamic characteristics at low speed and start-stop stage. , to improve the dynamic performance at low speed and start-stop phase.

2. The present invention compensates and balances the gantry beam caused by the straightness and parallelism of the guide rails on both sides and the asynchronous movement of the two sides during the longitudinal movement of the horizontal stop plane flexible hinge and the flexible deformation of the full degree of freedom plane flexible hinge. The deformation of tension, compression, bending and torsion in the span direction solves the problems of extremely high installation accuracy of the gantry dual-drive system, difficult installation, adjustment and control, stuck operation, and poor repeated positioning accuracy.

3. In the present invention, by integrating the position measurement components, the linear motor mover, the beam and the position measurement reading head are relatively static, forming an integrated design, which further improves the movement accuracy and positioning accuracy of the gantry double-drive device

Description of drawings

Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings:

Fig. 1 is the exploded structure schematic diagram of the present invention;

2 is a schematic diagram of the design of the arc-shaped and in-line thin-walled beam structures in the lateral stop plane flexible hinge of the present invention;

3 is a schematic diagram of the design of the S-shaped and in-line thin-walled beam structures in the lateral stop plane flexible hinge of the present invention;

FIG. 4 is a schematic diagram of the design of the fold-line and in-line thin-walled beam structures in the lateral stop plane flexible hinge of the present invention;

5 is a schematic diagram of the structural design of the arc thin-wall beam of the full degree of freedom plane flexible hinge according to the present invention;

6 is a schematic diagram of the structural design of the S-shaped thin-walled beam of the full-degree-of-freedom plane flexible hinge according to the present invention;

FIG. 7 is a schematic diagram of the structural design of the fold-line thin-walled beam of the full-degree-of-freedom plane flexible hinge according to the present invention.

Detailed ways

The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that, for those skilled in the art, several changes and improvements can be made without departing from the inventive concept. These all belong to the protection scope of the present invention.

Example 1

The present invention provides a gantry double-drive device, as shown in FIGS. 1-7 , which mainly includes a flexible hinge 1 , a linear slide module 2 , a linear motor 3 and a base 4 . The flexible hinge 1 includes a lateral stop plane flexible hinge 11 and a full degree of freedom plane flexible hinge 12. The so-called lateral plane flexible hinge 11 and the full degree of freedom plane flexible hinge 11 The flexible deformation of the hinge 11 occurs in the plane, mainly including up and down, left and right, Flexural deformation in directions such as rotation. The lateral stop plane flexible hinge 11 includes a first base plate 111, a first micro-movement disc 112 and a first thin-walled beam 113. The first base plate 111 is provided with a through groove for accommodating the first micro-movement disc 112 and the first thin-walled beam 113, The so-called through groove refers to an empty groove penetrating the upper and lower surfaces of the first substrate 111 , and the first micro-moving disk 112 is flexibly connected to the first substrate 111 through a plurality of first thin-walled beams 113 and placed in the through groove. The plurality of first thin-walled beams 113 at least include a pair of first thin-walled beams 113 in in-line structure, and the first thin-walled beams 113 in one-to-one in-line structure are symmetrically arranged on both sides of the first micro-movement plate 112 for restricting the first micro-movement The disk 112 moves linearly relative to the first substrate 111 along the span direction of the beam 5 , the span direction refers to the axial direction of the beam 5 , that is, the transverse direction perpendicular to the longitudinal movement of the beam 5 . The plurality of first thin-walled beams 113 also include a plurality of pairs of non-linear first thin-walled beams 113, and the shape of the non-linear first thin-walled beams 113 can be broken line, S-shaped, arc-shaped, elliptical or wavy, etc., preferably Yes, a plurality of pairs of non-inline first thin-walled beams 113 are symmetrically arranged on both sides of the first micro-movement plate 112 , and the arrangement method can be referred to as shown in FIGS. 2-4 . The first micro-movement disk 112 is flexibly connected to the first substrate 111 by including at least a pair of first thin-walled beams 113 in an in-line structure, thereby enabling the first micro-motion disk 112 to perform lateral linear displacement relative to the first substrate 111 . A small amount of displacement in other directions can be used to perform up and down displacement and deflection displacement. The so-called deflection displacement refers to the displacement caused by rotational deformation and oblique deformation at an angle with the axis in the up and down or left and right directions. The full-degree-of-freedom planar flexible hinge 12 includes a second substrate 121 , a second micro-movement disk 122 and a second thin-walled beam 123 . The second substrate 121 is provided with a through groove for accommodating the second micro-moving disk 122 and the second thin-walled beam 123 . , the through grooves on the second substrate 121 are the same as the through grooves on the first substrate 111 , and are also hollow grooves penetrating the upper and lower surfaces of the second substrate 121 . The substrate 121 is flexibly connected and placed in its through groove. The shape of the second thin-walled beams 123 is a broken line, an S-shape, an arc shape, an ellipse or a wavy shape, etc. A plurality of the second thin-walled beams 123 exist in pairs and are symmetrically arranged on both sides of the second micro-moving disk 122 , please refer to FIG. 5 . -7 shown. Preferably, the structures of the lateral stop plane flexible hinge 11 and the full-degree-of-freedom plane flexible hinge 12 are basically the same, the only difference being that the lateral stop plane flexible hinge 11 is provided with a limiter relative to the first substrate. 111 A pair of first thin-walled beams 113 that move horizontally and linearly, and then realize the flexible deformation of the second micro-movement plate 122 and the second substrate 121 with full degrees of freedom through the plane flexible hinge 12 with full degrees of freedom. Flexural deformation refers to the flexible deformation in the plane, that is, the second micro-moving disk 122 can perform up and down, left and right and deflection displacements relative to the second substrate 121. The axis of the direction has the displacement caused by the oblique deformation of the included angle. In addition, the first substrate 111 and the second substrate 121 are provided with slider connection holes 6 , and the first micro-movement plate 112 and the second micro-movement plate 122 are provided with mover connection holes 7 and beam connection holes 8 . In the above, preferably, the lateral stop plane flexible hinge 11 and the full-degree-of-freedom plane flexible hinge 12 are processed by an integral molding process.

The linear slide module 2 and the linear motor 3 form two groups in parallel with each other and are respectively installed on both sides of the base 4, that is, each side of the base 4 is installed with a set of linear slide modules 2 and a set of linear Motor 3 and both are parallel to each other. Preferably, the two sets of linear slide modules 2 and the linear motors 3 located on both sides of the base 4 are arranged in an axisymmetric manner, so that the beams 5 connected to them are balanced in force. For example, the two sets of linear slide modules 2 are located at Between the two sets of linear motors 3 , or between the two sets of linear motors 3 are located between the two sets of linear slide rail modules 2 . The linear slide rail module 2 includes a slide rail 21 and a slide block 22 , and the slide block 22 is slidably connected to the slide rail 21 . Preferably, two slide blocks 22 are slidably connected to the slide rail 21 . The linear motor 3 includes a linear motor stator 31 and a linear motor mover 32, the linear motor stator 31 is a U-shaped magnetic slot, and the linear motor mover 32 is an I-shaped slider. After the linear motor 3 is powered on, the linear motor mover 32 moves linearly along the chute of the linear motor stator 31 and does not come into contact with the linear motor stator 31 .

In order to clearly illustrate the working principle of the present invention, the sides of the base 4 where the lateral stop plane flexible hinge 11 and the full-degree-of-freedom plane flexible hinge 12 are located are referred to as the left side and the right side respectively, specifically: the lateral stop plane flexible hinge 11 is firmly connected with the two sliders 22 on the slide rail 21 of the linear slide rail module 2 on the left side of the base 4 through the slider connecting hole 6 on the first base plate 111, and at the same time, the first micro-moving plate 112 passes through The mover connection hole 7 is tightly connected with the linear motor mover 32 in the linear motor 3 also located on the left side of the base 4 . Correspondingly, the full degree of freedom plane flexible hinge 12 passes through the slider connection hole 6 on the second base plate 12 It is tightly connected with the two sliders 22 on the slide rail 21 of the linear slide rail module 2 on the right side of the base 4, and the second micro-moving plate 122 is also connected to the slide rail 21 on the right side of the base 4 through the mover connecting hole 7. The linear motor mover 32 in the linear motor 3 is tightly connected, and finally, the two ends of the beam 5 to be installed are placed on the first micro-movement plate 112 and the second micro-movement plate 122 respectively, and the first micro-movement plate 122 is realized through the beam connecting hole 8. A jog plate 112 is fastened to the beam 5 and the second jog plate 122 is fastened to the beam 5 . After the two ends of the beam 5 are firmly connected to the first micro-movement plate 112 and the second micro-movement plate 122, preferably, between the surface of the beam 5 opposite to the first substrate 111 and the surface of the beam 5 opposite to the second substrate 121 Both are provided with a gap, and the gap can ensure that the cross beam 5 does not contact the first substrate 111 and the second substrate 121 during the longitudinal movement. Further, in order to improve the assembly efficiency, both the first micro-movement plate 112 and the second micro-movement plate 122 are provided with positioning pin holes 9, and the positioning pin holes 9 are used for the beam 5 to be fixed on the first micro-movement plate 112 and the second micro-movement plate 112. The positioning pins are inserted into the micro-movement disk 122 to achieve the technical effect of rapid positioning and assembling.

When the gantry double-drive device is working, the motor mover 32 of the linear motor module 3 drives the beam 5 to move longitudinally, and the beam 5 is connected to the bearing linear slide rail through the horizontal stop plane flexible hinge 11 and the full degree of freedom plane flexible hinge 12. The motor mover 32 makes the beam 5 move in a manner similar to the air-bearing guide rail during the longitudinal movement, and the flexible deformation of the plane flexible hinge 11 and the full degree of freedom plane flexible hinge 12 is compensated and balanced in the plane by the lateral stop. During the longitudinal movement of the beam 5, due to the straightness and parallelism of the guide rails on both sides and the asynchronous movement of the two sides, the tension, compression, bending and torsion in the span direction of the gantry beam are deformed, so that the motor mover 32 and the beam 5 can remain relatively stationary. The flexural deformations achieved by the lateral stop plane flex hinge 11 and the full degree of freedom plane flex hinge 12 are all in-plane deformations, and their vertical deformations are limited by the stiffness of the thin-walled beam, which makes the lateral stop plane flex hinge 11 . And the full degree of freedom plane flexible hinge 12 has strong vertical support rigidity, which can reduce the vertical lifting of the gantry beam caused by the load change, and at the same time make the beam and the slider realize the basic free floating when the gantry sliding table slides. To the effect similar to the air-floating guide rail, the influence of guide rail damping and crawling at low speed and start-stop stage on dynamic characteristics is greatly reduced or even eliminated, and the dynamic performance at low speed and start-stop stage is improved. The flexible deformation compensation of the plane flexible hinge 12 in the plane and the balance beam 5 are caused by the straightness and parallelism of the guide rails on both sides and the unsynchronized movement of the two sides during the longitudinal movement of the gantry beam. It can solve the problems of extremely high installation accuracy of the gantry double-drive system, difficult installation, adjustment and control, stuck operation, and poor repeated positioning accuracy.

Example 2

Embodiment 2 is a modification of Embodiment 1. Compared with Embodiment 1, the modification of Embodiment 2 is to change the connection position relationship between the base plate and the micro-movement plate, the linear motor, and the linear slide module in the flexible hinge and the phase relationship. Some matching connection hole structures, specific:

In Embodiment 1, the two sets of linear motor movers 32 are respectively connected to the first micro-movement plate 112 and the second micro-movement plate 122, and both ends of the beam 5 are respectively connected to the first micro-movement plate 112 and the second micro-movement plate 122. On the plate 122, the first base plate 111 and the second base plate 121 are respectively fastened to the two sets of sliders 22, and the main part of the second embodiment that is changed from the first embodiment is that the two sets of linear motor movers 32 are respectively connected with The first base plate 111 and the second base plate 121 are tightly connected, and the two ends of the beam 5 are connected to the first base plate 111 and the second base plate 121 respectively. The sliders 22 are tightly connected. Correspondingly, the slider connection holes 6 are opened on the first micro-movement plate 112 and the second micro-movement plate 122, and the first substrate 111 and the second substrate 112 are both provided with movers. The connecting hole 7 and the beam connecting hole 8 and the positioning pin hole 9 are also opened on the first base plate 111 and the second clamping plate 121 . Since the movements of the micro-movement plate in the flexible hinge 1 and the base plate are relative, the change of the connection relationship does not affect the corresponding technical effect of the gantry double-drive device of the present invention, and expands the applicable scene of the gantry double-drive device of the present invention .

Example 3

The third embodiment is based on the modification of the first embodiment or the second embodiment. Compared with the embodiment of the first embodiment or the second embodiment, the third embodiment mainly realizes the floating support through the direct connection between the linear motor module and the beam. The effect, specifically:

The sides of the base 4 where the laterally stop plane flexible hinge 11 and the full degree of freedom plane flexible hinge 12 are located are called the left side and the right side, respectively. The block connection hole 6 is tightly connected with the slider 22 on the slide rail 21 of the linear slide rail module 2 on the left side of the base 4, and the first micro-movement plate 112 is connected with the left end of the beam 5 through the beam connection hole 8, and at the same time The motor mover 32 and the left end of the beam 5 are also tightly connected by means of screws, etc. Correspondingly, the full-degree-of-freedom planar flexible hinge 12 is connected to the linear slide rail on the right side of the base 4 through the slider connecting hole 6 on the second base plate 121 The slide rail 22 on the slide rail 21 of the module 2 is tightly connected, and the second micro-moving plate 122 is connected to the right end of the beam 5 through the beam connecting hole 8, and the motor mover 32 and the right end of the beam 5 are also connected by means of screws, etc. Tighten the connection. Preferably, a gap is provided between the surface of the beam 5 opposite to the first base plate 111 and the surface of the beam 5 opposite to the second base plate 121 , and the gap can ensure that the beam 5 does not contact the first base plate 111 and the first base plate 111 during the longitudinal movement. The second substrates 121 are in contact. Further, in order to improve the assembly efficiency, both the first micro-movement plate 112 and the second micro-movement plate 122 are provided with positioning pin holes 9, and the positioning pin holes 9 are used for the beam 5 to be fixed on the first micro-movement plate 112 and the second micro-movement plate 112. The positioning pins are inserted into the micro-movement disk 122 to achieve the technical effect of rapid positioning and assembling.

In the third embodiment, since both the motor mover and the micro-moving plate are fastened to the end of the beam, the technical effect can basically reach the technical effect of the first embodiment.

Example 4

The fourth embodiment is a modified example formed on the basis of the third embodiment. Compared with the embodiment of the third embodiment, the embodiment of the fourth embodiment adopts the slider 22 and the first fine movement plate 112 and the second fine movement respectively. The disk 122 is connected, and the two ends of the beam 5 are respectively connected with the first substrate 111 and the second substrate 112 , and the others are the same as those in the third embodiment.

Because the movement of the micro-movement disk and the substrate is relative, for this reason, the fourth embodiment can achieve the technical effect of the third embodiment.

Example 5

This embodiment 5 is formed on the basis of any of the embodiments 1-4. By integrating the position measurement components, the linear motor mover, the beam and the position measurement read head are relatively static, forming an integrated design, which further improves the gantry double The movement accuracy and positioning accuracy of the drive device. specifically:

The position measurement assembly 10 includes a position scale 101 and a position measurement read head 102 . The position scale 101 is installed on the side of the slide rail 22 , and the position scale 101 is arranged in parallel with the slide rail 21 and the linear motor stator 31 . The position measurement read head 102 is slidably connected to the position scale 101 , and the position measurement read head 102 is kept in a relatively stationary state with the beam 5 . Preferably, there are two sets of position measurement assemblies 10 , the two sets of position scales 101 are respectively connected and installed on the sides of the two slide rails 22 , and the position measurement read heads 102 are slidably connected to the position scales 101 .

Under the condition that the lateral stop plane flexible hinge 11 and the full degree of freedom plane flexible hinge 12 are respectively connected to the motor mover 32, the two ends of the beam 5 are respectively connected to the first micro-movement plate 112 and the second micro-movement plate 122. , at this time, the position measurement reading head 102 and the beam 5 remain relatively static, which can be achieved by the connection between the position measurement reading head 102 and the beam 5. As shown in FIG. 1, the upper end plate of the position measurement reading head 102 and the beam 5 are connected by screws etc To achieve a tight connection can ensure the relative stillness of the two. When both ends of the beam 5 are respectively connected to the first substrate 111 and the second substrate 121 , the two sets of position measurement read heads 102 are respectively fastened to the first substrate 111 and the second substrate 121 to achieve relative stillness. .

When the beam 5 is directly connected with the motor mover 32 , the position measurement read head 102 and the beam 5 remain relatively stationary at this time, which can be achieved by connecting the position measurement read head 102 and the beam 5 .

In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying the indicated device. Or elements must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as a limitation of the present application.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the above-mentioned specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essential content of the present invention. The embodiments of the present application and features in the embodiments may be combined with each other arbitrarily, provided that there is no conflict.

Claims (10)

1. A gantry double-drive device, characterized in that it comprises a flexible hinge (1), a linear slide module (2), a linear motor module (3) and a base (4); A set of mutually parallel linear slide rail modules (2) and linear motor modules (3) are respectively installed on both sides of the base (4), and the flexible hinge (1) includes a lateral stop plane The flexible hinge (11) and the full degree of freedom plane flexible hinge (12), the lateral stop plane flexible hinge (11) and the full degree of freedom plane flexible hinge (12) are respectively located at two sides of the base (4). The linear slide rail module (2) on the side is connected, and the two ends of the beam (5) to be assembled are respectively connected with the lateral stop plane flexible hinge (11) and the full degree of freedom plane flexible hinge (12) ; When the linear motor modules (3) located on both sides of the base (4) drive the beam (5) to move linearly, the horizontal stop plane flexible hinge (11) and the full degree of freedom The plane flexibility (2) passively compensates the deformation in the span direction of the beam (5), and the mover of the linear motor module (3) and the beam (5) remain relatively stationary. 2. The gantry double-drive device according to claim 1, wherein the lateral stop plane hinge (11) comprises a first base plate (111), a first micro-movement disk (112) and a first thin-walled beam (113) ), the first substrate (111) is flexibly connected to the first micro-movement disk (112) through a plurality of the first thin-walled beams (113), and the first substrate (111) is connected to the first The movement of the jog disc (112) in the span direction is restricted. 3. The gantry dual-drive device according to claim 2, wherein the plurality of first thin-walled beams (113) comprise a pair of in-line structures and are symmetrically connected to both sides of the micro-movement disk (112). , a pair of in-line first thin-walled beams (113) are used to limit the relative movement of the first micro-movement disk (112) relative to the first substrate (111) along the span direction; The plurality of first thin-walled beams (113) also include folded-line, arc-shaped, S-shaped, elliptical, or wavy ones that are arranged in pairs and symmetrically arranged on both sides of the first micro-movement disk (112). any shape. 4. The gantry double-drive device according to claim 1, characterized in that, the full-degree-of-freedom plane flexible hinge (12) comprises a second base plate (121), a second micro-movement disk (122), and a second thin-walled beam ( 123), the second substrate (121) is flexibly connected to the second micro-movement disk (122) through a plurality of the second thin-walled beams (123), and the second micro-motion disk (122) is relatively The second substrate (121) can move in any direction in the plane. 5. The gantry double-drive device according to claim 4, characterized in that, a plurality of the second thin-walled arm beams (123) are any one of a broken line shape, an arc shape, an S shape, an ellipse shape or a wave shape. one or more combinations. 6. The gantry dual-drive device according to any one of claims 1-5, wherein the linear motor module (3) comprises a motor stator (31) and a motor mover (32); the beam (5) ) are respectively connected to the motor movers (32) on both sides of the base (4), or the two ends of the beam (5) are respectively connected to the lateral stop plane flexible hinge (11). ) and the full degree of freedom plane flexible hinge (12), the motor movers (32) located on both sides of the base (4) are respectively connected with the lateral stop plane flexible hinge (11) and the The full degree of freedom plane flexible hinge (12) is connected. 7. The gantry double-drive device according to claim 6, wherein the linear slide rail module (2) comprises a linear slide rail (21) and a slider (22), and the slider (22) slides is connected to the linear slide rail (21), and the linear slide rail (21) is mounted on the base (4). 8. The gantry double-drive device according to claim 7, wherein both ends of the beam (5) are respectively connected to the motor movers (32) located on both sides of the base (4) , the first substrate (111) and the second substrate (121) are respectively connected with the slider (22), the first micro-motion disk (112) and the second micro-motion disk (122) are respectively connected to the beam (5), or the first base plate (111) and the second base plate (121) are respectively connected to the beam (5), and the first micro-motion plate (112) and the The second micro-moving discs (122) are respectively connected with the sliding blocks (22). 9 . The gantry double-drive device according to claim 7 , wherein the two ends of the beam ( 5 ) are respectively connected with the lateral stop plane flexible hinge ( 11 ) and the full degree of freedom plane flexible hinge ( 9 . 12) After connection, the motor movers (32) located on both sides of the base (4) are respectively connected with the lateral stop plane flexible hinge (11) and the full degree of freedom plane flexible hinge (12) hour, The two sets of the sliders (22) are respectively connected to the first base plate (111) and the second base plate (121), and the two ends of the beam (5) are respectively connected to the first micro-movement disc (111). 112) and the second micro-movement plate (122), the two groups of the motor movers (32) are respectively connected with the first micro-movement plate (112) and the second micro-movement plate (122), Or, two sets of the sliders (22) are respectively connected with the first micro-movement disk (112) and the second micro-motion disk (122), and the two ends of the beam (5) are respectively connected with the On the first substrate (111) and the second substrate (121), two sets of the linear motors (3) are respectively connected with the first substrate (111) and the second substrate (121). 10. The gantry double-drive device according to any one of claims 1-5 or 7-9, characterized in that it further comprises a position measurement assembly (10), the position measurement assembly (10) comprising a position scale (101) and a position measurement read head (102), the position scale (101) is parallel to the linear slide rail module (2), and the position measurement read head (102) and the beam (5) remain relatively stationary.

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