CN114473538A

CN114473538A - Gantry double-drive device

Info

Publication number: CN114473538A
Application number: CN202210095694.6A
Authority: CN
Inventors: 谷朝臣; 刘庆鹏; 位广宇; 杨舒盛
Original assignee: Suzhou Hualu Industrial Control Technology Co ltd
Current assignee: Suzhou Hualu Industrial Control Technology Co ltd
Priority date: 2022-01-26
Filing date: 2022-01-26
Publication date: 2022-05-13

Abstract

The invention relates to a gantry double-drive device in the technical field of mechanical manufacturing, which comprises a flexible hinge, a linear slide rail module, a linear motor module and a base, wherein the flexible hinge is arranged on the base; the two sides of the base are respectively provided with a group of linear slide rail modules and linear motor modules which are parallel to each other, the flexible hinges comprise transverse stopping plane flexible hinges and full-freedom-degree plane flexible hinges, the transverse stopping plane flexible hinges and the full-freedom-degree plane flexible hinges are respectively connected with the linear slide rail modules positioned on the two sides of the base, and two ends of a cross beam to be assembled are respectively connected with the transverse stopping plane flexible hinges and the full-freedom-degree plane flexible hinges; when the linear motor modules positioned on the two sides of the base drive the cross beam to linearly move, the deformation of the cross beam in the span direction is passively compensated through the transverse stopping plane flexible hinge and the full-freedom-degree plane flexibility, and the rotor of the linear motor module and the cross beam are kept relatively static. The invention can improve the dynamic performance of low speed and start-stop stages.

Description

Gantry double-drive device

Technical Field

The invention relates to the technical fields of mechanical design, motion control, machine tool manufacturing and the like, in particular to a gantry sliding table floating support flexible hinge assembly and a gantry double-drive device thereof.

Background

The gantry double-drive system is a general solution for large-scale machine tools and measuring equipment, and the movement precision of the gantry double-drive system is influenced by a series of factors such as the straightness, the parallelism and the movement synchronism of two sides of a guide rail on two sides of a gantry sliding table. The traditional gantry beam rigid connection mode has extremely high requirement on the installation precision of a system, the motion straightness and parallelism errors of a linear module or a guide rail system directly reflect to the positioning precision of the system, and even the situation that the left side and the right side cannot reach designated synchronous positions simultaneously occurs. Meanwhile, the bilateral linear modules do not move synchronously, so that the gantry beam and the guide rail system are deformed by pulling, pressing, bending and twisting and the like, even a mechanical system is damaged, the control difficulty is increased undoubtedly, and the high-speed operation safety of the system is limited.

Through the retrieval, chinese utility model patent application number is CN 201921169045.6, has proposed a longmen two deviation compensation technique that drive, adopts piezoceramics, flexible hinge system to compensate the lathe motion error, it needs to point out that the device only can be used for compensating the displacement deviation of longmen system direction of motion, can not eliminate longmen crossbeam direction, the orbital straightness accuracy of two sides, the operation jam problem that the depth of parallelism leads to, the inside deformation that relies on flexible hinge alone measures lathe motion error and has precision and reliability problem. In addition, the chinese patent application No. CN 201610144577.9 proposes a method for eliminating internal stress of a gantry system and a beam by a rotating mechanism and a guiding mechanism, where structural assembly and superposition may weaken the rigidity of the gantry system, and a mechanism movement gap may further weaken the precision of the gantry system, which is not favorable for the use of the gantry system in a high-precision application scenario. The invention has the patent application number of CN202110808005.7, and provides a flexible hinge support assembly for a gantry sliding table, which realizes the elimination of the internal force of a gantry beam through a combined support mode of a rotary flexible hinge and a bias-torsion flexible hinge, and has the defect that the gantry beam and a guide rail slide block are still relatively fixed in the longitudinal direction (sliding direction) of the gantry sliding table, and the influence caused by guide rail damping, crawling and the like in low-speed and start-stop stages is not favorably eliminated.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide a gantry double-drive device.

The invention provides a gantry double-drive device which comprises a flexible hinge, a linear slide rail module, a linear motor module and a base, wherein the flexible hinge is arranged on the base;

the two sides of the base are respectively provided with a group of linear slide rail modules and a group of linear motor modules which are parallel to each other, the flexible hinges comprise transverse stopping plane flexible hinges and full-freedom degree plane flexible hinges, the transverse stopping plane flexible hinges and the full-freedom degree plane flexible hinges are respectively connected with the linear slide rail modules positioned on the two sides of the base, and two ends of a cross beam to be assembled are respectively connected with the transverse stopping plane flexible hinges and the full-freedom degree plane flexible hinges;

when the linear motor modules positioned on the two sides of the base drive the cross beam to linearly move, the deformation of the cross beam in the span direction is passively compensated through the transverse stopping plane flexible hinge and the full-freedom-degree plane flexibility, and a rotor of the linear motor module and the cross beam are kept relatively static.

In some embodiments, the lateral stop planar hinge comprises a first base plate, a first micro-motion disk, and a first thin-walled beam, the first base plate is flexibly connected to the first micro-motion disk through a plurality of the first thin-walled beams, and the first base plate and the first micro-motion disk are restricted from moving in a span-wise direction.

In some embodiments, a plurality of the first thin-walled beams comprise a pair of in-line structures and are symmetrically connected to two sides of the micro-motion disc, and the pair of in-line first thin-walled beams are used for limiting the relative movement of the first micro-motion disc relative to the first base plate along the span direction;

the first thin-wall beams further comprise any one of a broken line type, an arc type, an S shape, an oval shape or a wave shape which are arranged in pairs and symmetrically arranged on two sides of the first micro-motion disc.

In some embodiments, the full-degree-of-freedom planar flexible hinge includes a second substrate, a second micro-motion disk, and a second thin-wall beam, the second substrate is flexibly connected to the second micro-motion disk through a plurality of second thin-wall beams, and the second micro-motion disk can move in any direction in a plane relative to the second substrate.

In some embodiments, a plurality of the second thin-walled arm beams are any one or more of a dogleg shape, an arc shape, an S shape, an oval shape, or a wave shape.

In some embodiments, the linear motor module comprises a motor stator and a motor mover;

the two ends of the cross beam are respectively connected to the motor rotors located on the two sides of the base, or the two ends of the cross beam are respectively connected with the transverse stopping plane flexible hinge and the full-freedom-degree plane flexible hinge, and then the motor rotors located on the two sides of the base are respectively connected with the transverse stopping plane flexible hinge and the full-freedom-degree plane flexible hinge.

In some embodiments, the linear slide rail module includes a linear slide rail and a slider, the slider is slidably connected to the linear slide rail, and the linear slide rail is mounted on the base.

In some embodiments, when two ends of the cross beam are respectively connected to the motor rotors located on two sides of the base, the first substrate and the second substrate are respectively connected to the sliding block, the first micro-motion disk and the second micro-motion disk are respectively connected to the cross beam, or the first substrate and the second substrate are respectively connected to the cross beam, and the first micro-motion disk and the second micro-motion disk are respectively connected to the sliding block.

In some embodiments, after the two ends of the cross beam are respectively connected with the transverse stopping plane flexible hinge and the full-freedom-degree plane flexible hinge, when the motor rotors at the two sides of the base are respectively connected with the transverse stopping plane flexible hinge and the full-freedom-degree plane flexible hinge,

two sets of the slider respectively with first base plate with the second base plate is connected, the both ends of crossbeam connect respectively in first little driving disk with on the little driving disk of second, and two sets of motor active respectively with first little driving disk with the second is moved the dish and is connected, or, two sets of the slider respectively with first little driving disk with the second is moved the dish and is connected, the both ends of crossbeam connect respectively in first base plate with on the second base plate, two sets of linear electric motor respectively with first base plate with the second base plate is connected.

In some embodiments, the position measurement assembly further comprises a position grating ruler and a position measurement reading head, the position grating ruler is parallel to the linear slide rail module, and the position measurement reading head and the cross beam are kept relatively static.

Compared with the prior art, the invention has the following beneficial effects:

1. the gantry double-drive device can enable the gantry beam and the guide rail slide block to realize the effect similar to free floating of an air-floating guide rail when the gantry slide table slides, eliminate the influence of guide rail damping, crawling and the like on dynamic characteristics in low-speed and start-stop stages, and improve the dynamic performance in the low-speed and start-stop stages.

2. The invention compensates the flexible deformation of the horizontal stop plane flexible hinge and the full-freedom degree plane flexible hinge and balances the deformation of the gantry beam in the span direction, such as tension, compression, bending and torsion, caused by the non-synchronization of the straightness and the parallelism of the guide rails on the two sides and the movement of the two sides in the longitudinal moving process of the beam, and solves the problems of extremely high requirement on the installation precision of a gantry double-drive device system, difficult installation, adjustment and control, unsmooth operation, poor repeated positioning precision and the like.

3. According to the invention, the linear motor rotor, the cross beam and the position measuring reading head are in a relatively static state through the integrated position measuring assembly to form an integrated design, so that the motion precision and the positioning precision of the gantry double-drive device are further improved

Drawings

Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:

FIG. 1 is a schematic diagram of an explosive structure according to the present invention;

FIG. 2 is a schematic view of the design of the horizontal stop plane flexible hinge of the present invention with respect to the arc and linear thin-walled beam structure;

FIG. 3 is a schematic view of the design of the S-shaped and in-line thin-walled beam structures in the transverse stopping plane flexible hinge of the present invention;

FIG. 4 is a schematic view of the design of the zigzag shape of the transverse stop plane flexible hinge according to the present invention in relation to the linear thin-walled beam structure;

FIG. 5 is a schematic structural design view of a full-freedom planar flexible hinge arc thin-walled beam according to the present invention;

FIG. 6 is a schematic structural design view of an S-shaped thin-walled beam with a full-degree-of-freedom planar flexible hinge according to the present invention;

FIG. 7 is a schematic view of the design of a fold line-shaped thin-walled beam structure of the full-freedom-degree planar flexible hinge of the present invention.

Detailed Description

The present invention will be described in detail with reference to specific examples. The following examples will aid those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any manner. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.

Example 1

The invention provides a gantry double-drive device which mainly comprises a flexible hinge 1, a linear slide rail module 2, a linear motor 3 and a base 4 as shown in figures 1-7. The flexible hinge 1 comprises a transverse stopping plane flexible hinge 11 and a full-freedom degree plane flexible hinge 12, wherein the flexible deformation of the transverse plane flexible hinge 11 and the full-freedom degree plane flexible hinge 11 occur in a plane and mainly comprises flexible deformation in the directions of up-down, left-right, rotation and the like. The transverse locking plane flexible hinge 11 comprises a first substrate 111, a first micro-motion disk 112 and a first thin-wall beam 113, wherein the first substrate 111 is provided with a through groove for accommodating the first micro-motion disk 112 and the first thin-wall beam 113, the through groove is a hollow groove penetrating through the upper surface and the lower surface of the first substrate 111, and the first micro-motion disk 112 is flexibly connected with the first substrate 111 through a plurality of first thin-wall beams 113 and is arranged in the through groove. The plurality of first thin-walled beams 113 at least include a pair of first thin-walled beams 113 with a straight-line structure, and the first thin-walled beams 113 with a straight-line structure are symmetrically arranged on two sides of the first cam 112 for limiting the linear movement of the first cam 112 relative to the first base plate 111 along the span direction of the cross beam 5, where the span direction is the axial direction of the cross beam 5, that is, the transverse direction perpendicular to the longitudinal movement of the cross beam 5. The plurality of first thin-wall beams 113 further include a plurality of pairs of non-linear first thin-wall beams 113, the shape of the non-linear first thin-wall beams 113 may be a polygonal line shape, an S shape, an arc shape, an oval shape, or a wave shape, and preferably, the plurality of pairs of non-linear first thin-wall beams 113 are symmetrically arranged on two sides of the first inching disk 112, and the arrangement mode thereof can be shown in fig. 2 to 4. The first cam 112 is flexibly connected to the first base plate 111 through a first thin-walled beam 113 having at least one pair of linear structures, so that the first cam 112 can perform micro displacement in other directions, i.e., up-and-down displacement and deflection displacement, with respect to the first base plate 111, in addition to lateral linear displacement, the deflection displacement is generated by rotational deformation and oblique deformation having an angle with an axis in the up-and-down direction or the left-and-right direction. The full-freedom-degree planar flexible hinge 12 comprises a second substrate 121, a second micro-motion disk 122 and a second thin-wall beam 123, wherein a through groove for accommodating the second micro-motion disk 122 and the second thin-wall beam 123 is formed in the second substrate 121, the through groove in the second substrate 121 is the same as the through groove in the first substrate 111 and is also a hollow groove penetrating through the upper surface and the lower surface of the second substrate 121, and the second micro-motion disk 122 is flexibly connected with the second substrate 121 through the second thin-wall beams 123 and is arranged in the through groove. The second thin-wall beams 123 are in a zigzag shape, an S shape, an arc shape, an oval shape, a wave shape, or the like, and a plurality of the second thin-wall beams 123 are arranged in pairs and symmetrically arranged on both sides of the second jog disk 122, as shown in fig. 5 to 7. Preferably, the structure of the transverse locking plane flexible hinge 11 is substantially the same as that of the full-freedom plane flexible hinge 12, except that the transverse locking plane flexible hinge 11 is provided with a pair of first thin-walled beams 113 for limiting the transverse linear movement of the first micro-motion disk 112 relative to the first base plate 111, and further, the full-freedom plane flexible hinge 12 is used for realizing the full-freedom flexible deformation of the second micro-motion disk 122 and the second base plate 121, wherein the full-freedom flexible deformation refers to the flexible deformation in a plane, that is, the second micro-motion disk 122 can perform vertical, horizontal and deflection displacement relative to the second base plate 121, and the deflection displacement refers to the displacement generated by the rotation deformation and the oblique deformation having an angle with the axis in the vertical direction or the horizontal direction. Further, the first substrate 111 and the second substrate 121 are provided with slider connection holes 6, and the first micro-actuator disk 112 and the second micro-actuator disk 122 are provided with mover connection holes 7 and beam connection holes 8. In the above, preferably, the transverse stopping plane flexible hinge 11 and the full-freedom plane flexible hinge 12 are both formed by an integral forming process.

The linear slide rail modules 2 and the linear motors 3 are parallel to each other to form two sets and are respectively installed on two sides of the base 4, namely, each side of the base 4 is provided with one set of linear slide rail module 2 and one set of linear motor 3 which are parallel to each other. Preferably, two sets of linear slide rail modules 2 and linear motor 3 that are located base 4 both sides are arranged with the axisymmetric mode for crossbeam 5 atress on connecting it is balanced, for example, two sets of linear slide rail modules 2 are located between two sets of linear motor 3, or two sets of linear motor 3 are located between two sets of linear slide rail modules 2. The linear slide rail module 2 includes a slide rail 21 and two slide blocks 22, and the slide blocks 22 are slidably connected to the slide rail 21, preferably, the number of the slide blocks 22 slidably connected to the slide rail 21 is two. The linear motor 3 comprises a linear motor stator 31 and a linear motor rotor 32, wherein the linear motor stator 31 is a U-shaped magnetic slot, and the linear motor rotor 32 is an i-shaped slider. After the linear motor 3 is powered on, the linear motor mover 32 moves linearly along the inside of the sliding slot of the linear motor stator 31 and does not contact with the linear motor stator 31.

For the sake of clarity of the working principle of the present invention, the sides of the base 4 where the lateral stop plane flexible hinge 11 and the full-degree-of-freedom plane flexible hinge 12 are located are respectively called left and right sides, specifically: the transverse stopping plane flexible hinge 11 is fixedly connected with two sliding blocks 22 on a sliding rail 21 of the linear sliding rail module 2 on the left side of the base 4 through a sliding block connecting hole 6 on the first base plate 111, meanwhile, the first micro-motion disk 112 is fixedly connected with the linear motor rotor 32 in the linear motor 3 on the left side of the base 4 through the rotor connecting hole 7, correspondingly, the full-freedom-degree planar flexible hinge 12 is fixedly connected with the two sliding blocks 22 on the sliding rail 21 of the linear sliding rail module 2 on the right side of the base 4 through the sliding block connecting hole 6 on the second base plate 12, while the second micro disc 122 is fixedly coupled with the linear motor mover 32 of the linear motor 3 also positioned at the right side of the base 4 through the mover coupling hole 7, and, finally, the two ends of the cross beam 5 to be installed are respectively arranged on the first micro-moving disk 112 and the second micro-moving disk 122, and the first micro-moving disk 112 and the cross beam 5 and the second micro-moving disk 122 and the cross beam 5 are fixedly connected through the cross beam connecting hole 8. After the two ends of the cross beam 5 are tightly connected with the first micro-motion disk 112 and the second micro-motion disk 122, preferably, a gap is provided between the surface of the cross beam 5 opposite to the first base plate 111 and the surface of the cross beam 5 opposite to the second base plate 121, and the gap can ensure that the cross beam 5 does not contact with the first base plate 111 and the second base plate 121 during the longitudinal movement. Further, for improving assembly efficiency, all be provided with locating pin hole 9 on first little driving disk 112 and the little driving disk 122 of second, locating pin hole 9 is used for crossbeam 5 to insert the locating pin in order to reach the technological effect of quick location equipment when being fixed in on first little driving disk 112 and the little driving disk 122 of second.

When the gantry double-drive device works, the motor rotor 32 of the linear motor module 3 drives the cross beam 5 to move longitudinally, the cross beam 5 is connected with a bearing linear slide rail through the transverse stopping plane flexible hinge 11 and the full-freedom-degree plane flexible hinge 12, the cross beam 5 is enabled to present a moving mode similar to an air floatation guide rail in the longitudinal moving process through the motor rotor 32, and the motor rotor 32 and the cross beam 5 can keep relative rest through the flexible deformation compensation of the transverse stopping plane flexible hinge 11 and the full-freedom-degree plane flexible hinge 12 in the plane and the deformation of the gantry cross beam in the span direction, such as pulling pressure, bending torsion and the like caused by the asynchronization of the straightness, parallelism and movement of two sides of the guide rails in the longitudinal moving process of the transverse stopping plane flexible hinge 11 and the full-freedom-degree plane flexible hinge 12. The flexible deformation of the transverse locking plane flexible hinge 11 and the full-freedom degree plane flexible hinge 12 is the deformation in the plane, the deformation in the vertical direction is limited due to the rigidity of the thin-wall beam, so that the transverse locking plane flexible hinge 11 and the full-freedom degree plane flexible hinge 12 have strong vertical supporting rigidity, the vertical lifting of the gantry beam caused by load change can be reduced, the basic free floating of the beam and the slide block is realized when the gantry sliding table slides, the effect similar to an air-float guide rail is achieved, the influence of the damping and crawling of the guide rail in the low-speed and start-stop stages is greatly reduced or even eliminated, the dynamic performance in the low-speed and start-stop stages is improved, and meanwhile, the flexible deformation compensation of the transverse locking plane flexible hinge 11 and the full-freedom degree plane flexible hinge 12 in the plane and the linearity of the guide rails at two sides of the balance beam 5 in the longitudinal movement process are realized through the transverse locking plane flexible hinge 11 and the full-freedom degree plane flexible hinge 12, The deformation of the gantry beam in the span direction, such as pulling, pressing, bending and twisting, caused by the asynchronism of parallelism and movement of two sides, solves the problems of extremely high requirement on the installation precision of a gantry double-drive device system, difficulty in installation, adjustment and control, jam in operation, poor repeated positioning precision and the like.

Example 2

Embodiment 2 is a variation of embodiment 1, and compared to embodiment 1, the variation of embodiment 2 is that the connection position relationship between the substrate and the micro-motion disk, the linear motor, and the linear slide rail module in the flexible hinge, and some matching connection hole structures are changed, specifically:

in embodiment 1, two sets of linear motor movers 32 are respectively connected with the first micro-moving disk 112 and the second micro-moving disk 122, while two ends of the cross beam 5 are respectively connected with the first micro-moving disk 112 and the second micro-moving disk 122, the first base plate 111 and the second base plate 121 are respectively fastened and connected with two sets of sliders 22, and the main parts of the variation of embodiment 2 relative to embodiment 1 are: two groups of linear motor rotors 32 are respectively fastened and connected with the first base plate 111 and the second base plate 121, two ends of the cross beam 5 are respectively connected onto the first base plate 111 and the second base plate 121, the first micro-moving disk 112 and the second micro-moving disk 122 are respectively fastened and connected with the two groups of sliding blocks 22, correspondingly, the sliding block connecting hole 6 is formed in the first micro-moving disk 112 and the second micro-moving disk 122, the first base plate 111 and the second base plate 112 are respectively provided with a rotor connecting hole 7 and a cross beam connecting hole 8, and in addition, the positioning pin hole 9 is also formed in the first base plate 111 and the second clamping plate 121. Because the motion of the micro-motion disc in the flexible hinge 1 is opposite to that of the substrate, the change of the connection relation does not influence the corresponding technical effect of the gantry double-drive device, and the application scene of the gantry double-drive device is expanded.

Example 3

Embodiment 3 is based on a variation of embodiment 1 or embodiment 2, and compared with the implementation of embodiment 1 or embodiment 2, embodiment 3 mainly achieves the effect of floating support through direct connection between the linear motor module and the beam, specifically:

the sides of the base 4 where the lateral stop plane flexible hinges 11 and the full degree of freedom plane flexible hinges 12 are located are called left and right sides, respectively, and in particular: the transverse stopping plane flexible hinge 11 is fixedly connected with a sliding block 22 on a sliding rail 21 of a linear sliding rail module 2 on the left side of the base 4 through a sliding block connecting hole 6 on a first base plate 111, the first micro-motion disk 112 is connected with the left end of the cross beam 5 through a cross beam connecting hole 8, meanwhile, the motor rotor 32 is fixedly connected with the left end of the cross beam 5 through screws and the like, correspondingly, the full-freedom plane flexible hinge 12 is fixedly connected with a sliding rail 22 on a sliding rail 21 of a linear sliding rail module 2 on the right side of the base 4 through a sliding block connecting hole 6 on a second base plate 121, the second micro-motion disk 122 is connected with the right end of the cross beam 5 through a cross beam connecting hole 8, and meanwhile, the motor rotor 32 is fixedly connected with the right end of the cross beam 5 through screws and the like. Preferably, a gap is provided between the surface of the beam 5 opposite to the first substrate 111 and the surface of the beam 5 opposite to the second substrate 121, and the gap can ensure that the beam 5 does not contact with the first substrate 111 and the second substrate 121 during the longitudinal movement. Further, for improving assembly efficiency, all be provided with locating pin hole 9 on first little driving disk 112 and the little driving disk 122 of second, locating pin hole 9 is used for crossbeam 5 to insert the locating pin in order to reach the technological effect of quick location equipment when being fixed in on first little driving disk 112 and the little driving disk 122 of second.

In this embodiment 3, since both the motor mover and the micro-motion disk are fastened and connected to the end of the beam, the technical effect of the present invention can basically achieve the technical effect of embodiment 1.

Example 4

The embodiment 4 is a modified example based on the embodiment 3, and compared with the embodiment of the embodiment 3, the embodiment of the embodiment 4 adopts the same structure as the embodiment 3, wherein the slide 22 is connected with the first micro-motion disk 112 and the second micro-motion disk 122 respectively, and both ends of the cross beam 5 are connected with the first base plate 111 and the second base plate 112 respectively.

Since the micro-motion disk and the base plate are opposite to each other, embodiment 4 can achieve the technical effect of embodiment 3.

Example 5

The embodiment 5 is formed on the basis of any one of the embodiments 1 to 4, and the linear motor mover, the beam and the position measuring reading head are relatively static through integrating the position measuring assembly to form an integrated design, so that the motion precision and the positioning precision of the gantry double-drive device are further improved. Specifically, the method comprises the following steps:

the position measuring assembly 10 includes a position grating 101 and a position measuring reading head 102, the position grating 101 is mounted on the side of the slide rail 22, and the position grating 101 is parallel to the slide rail 21 and the linear motor stator 31. The position measuring head 102 is slidably attached to the position grid 101, and the position measuring head 102 is kept in a relatively stationary state with respect to the beam 5. Preferably, the position measuring assemblies 10 are two sets, the two sets of position scales 101 are respectively connected and mounted on the side surfaces of the two slide rails 22, and the position measuring reading head 102 is slidably connected to the position scales 101.

Under the condition that the transverse stopping plane flexible hinge 11 and the full-freedom degree plane flexible hinge 12 are respectively connected with the motor rotor 32, when two ends of the cross beam 5 are respectively connected to the first micro-moving disk 112 and the second micro-moving disk 122, at this time, the position measuring reading head 102 and the cross beam 5 can be kept relatively static through the connection of the position measuring reading head 102 and the cross beam 5, as shown in fig. 1, the upper end plate of the position measuring reading head 102 and the cross beam 5 can be firmly connected through screws and the like, and then the relative static of the two can be ensured. When the two ends of the beam 5 are respectively connected to the first substrate 111 and the second substrate 121, the two sets of position-measuring heads 102 are respectively fastened to the first substrate 111 and the second substrate 121, so that the two substrates can be stationary relative to each other.

When the cross beam 5 is directly connected to the motor mover 32, the position measuring head 102 and the cross beam 5 can be held stationary relative to each other by connecting the position measuring head 102 to the cross beam 5.

In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.

The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.

Claims

1. A gantry double-drive device is characterized by comprising a flexible hinge (1), a linear slide rail module (2), a linear motor module (3) and a base (4);

the two sides of the base (4) are respectively provided with a group of linear slide rail modules (2) and a group of linear motor modules (3) which are parallel to each other, the flexible hinge (1) comprises a transverse stopping plane flexible hinge (11) and a full-freedom-degree plane flexible hinge (12), the transverse stopping plane flexible hinge (11) and the full-freedom-degree plane flexible hinge (12) are respectively connected with the linear slide rail modules (2) positioned on the two sides of the base (4), and two ends of a cross beam (5) to be assembled are respectively connected with the transverse stopping plane flexible hinge (11) and the full-freedom-degree plane flexible hinge (12);

the linear motor module (3) located on two sides of the base (4) drives the cross beam (5) to linearly move, deformation of the cross beam (5) in the span direction is passively compensated through the transverse stopping plane flexible hinge (11) and the full-freedom-degree plane flexible hinge (2), and a rotor of the linear motor module (3) and the cross beam (5) keep relatively static.

2. A gantry double drive apparatus according to claim 1, wherein the lateral stop plane hinge (11) comprises a first base plate (111), a first micro-moving plate (112) and a first thin-walled beam (113), the first base plate (111) is flexibly connected with the first micro-moving plate (112) through a plurality of the first thin-walled beams (113), and the first base plate (111) and the first micro-moving plate (112) are limited in movement in a span direction.

3. A gantry double-drive device according to claim 2, wherein a plurality of first thin-wall beams (113) comprise a one-to-one structure and are symmetrically connected to two sides of the micro-moving disk (112), and the one-to-one first thin-wall beams (113) are used for limiting the relative movement of the first micro-moving disk (112) relative to the first base plate (111) along the span direction;

the first thin-wall beams (113) are arranged in pairs and symmetrically arranged on two sides of the first micro-moving disk (112), and the first thin-wall beams are in any shape of a broken line shape, an arc shape, an S shape, an oval shape or a wave shape.

4. A gantry double-drive device according to claim 1, wherein the full-freedom plane flexible hinge (12) comprises a second base plate (121), a second micro-movable plate (122) and a second thin-wall beam (123), the second base plate (121) is flexibly connected with the second micro-movable plate (122) through a plurality of second thin-wall beams (123), and the second micro-movable plate (122) can move in any direction in a plane relative to the second base plate (121).

5. A gantry double drive device according to claim 4, wherein a plurality of the second thin-walled arm beams (123) are in any one or more combination of a zigzag shape, an arc shape, an S shape, an oval shape or a wave shape.

6. A gantry double drive according to any one of claims 1-5, wherein said linear motor module (3) comprises a motor stator (31) and a motor mover (32); the two ends of the cross beam (5) are connected to the two sides of the base (4) respectively on the motor rotor (32), or the two ends of the cross beam (5) are connected to the two sides of the base (4) respectively with the transverse stopping plane flexible hinge (11) and the full-freedom-degree plane flexible hinge (12) respectively, and then the motor rotor (32) is connected to the two sides of the base (4) respectively with the transverse stopping plane flexible hinge (11) and the full-freedom-degree plane flexible hinge (12).

7. A gantry double drive apparatus according to claim 6, wherein the linear slide rail module (2) comprises a linear slide rail (21) and a slide block (22), the slide block (22) is slidably connected to the linear slide rail (21), and the linear slide rail (21) is mounted on the base (4).

8. A gantry double-drive device as claimed in claim 7, wherein when two ends of the beam (5) are respectively connected to the motor rotors (32) on two sides of the base (4), the first base plate (111) and the second base plate (121) are respectively connected to the sliding blocks (22), the first micro-moving disk (112) and the second micro-moving disk (122) are respectively connected to the beam (5), or the first base plate (111) and the second base plate (121) are respectively connected to the beam (5), and the first micro-moving disk (112) and the second micro-moving disk (122) are respectively connected to the sliding blocks (22).

9. A gantry double-drive device according to claim 7, characterized in that after the two ends of the beam (5) are respectively connected with the transverse stopping plane flexible hinge (11) and the full-freedom degree plane flexible hinge (12), when the motor rotors (32) at the two sides of the base (4) are respectively connected with the transverse stopping plane flexible hinge (11) and the full-freedom degree plane flexible hinge (12),

two sets of slider (22) respectively with first base plate (111) with second base plate (121) are connected, the both ends of crossbeam (5) connect respectively in first little driving disk (112) with on little driving disk (122) of second, two sets of motor active cell (32) respectively with first little driving disk (112) with little driving disk (122) of second is connected, or, two sets of slider (22) respectively with first little driving disk (112) with little driving disk (122) of second is connected, the both ends of crossbeam (5) connect respectively in first base plate (111) with on second base plate (121), two sets of linear electric motor (3) respectively with first base plate (111) with second base plate (121) are connected.

10. A gantry double drive apparatus according to any one of claims 1-5 or 7-9, further comprising a position measurement assembly (10), wherein the position measurement assembly (10) comprises a position grid ruler (101) and a position measurement read head (102), the position grid ruler (101) is parallel to the linear slide rail module (2), and the position measurement read head (102) is kept relatively static with respect to the beam (5).