CN207732608U - A kind of Three Degree Of Freedom locating platform - Google Patents
A kind of Three Degree Of Freedom locating platform Download PDFInfo
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- CN207732608U CN207732608U CN201820086859.2U CN201820086859U CN207732608U CN 207732608 U CN207732608 U CN 207732608U CN 201820086859 U CN201820086859 U CN 201820086859U CN 207732608 U CN207732608 U CN 207732608U
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- linear guide
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Abstract
The utility model discloses a kind of Three Degree Of Freedom locating platform, including moving platform and silent flatform.Moving platform includes mounting base, subpart and rotary shaft.Silent flatform includes platform base, the stationary part being arranged on platform base, the X-direction the linear guide being arranged in parallel on platform base, the X-direction guide rail slide block, the X-direction pinboard that are arranged in X-direction the linear guide, and it is arranged in parallel in the Y-direction the linear guide on X-direction pinboard, the Y-direction guide rail slide block being arranged in the linear guide in the Y direction, rotation pinboard, and the support of bearing being arranged on rotation pinboard, the bearing being arranged on the support of bearing.Bearing is set in rotary shaft, and subpart is correspondingly arranged with stationary part and constitutes electromagnetic drive module.The utility model use rectangular-ambulatory-plane structure positioning platform, stator coil use concentratred winding, simplify the structure of locating platform, improve power density, it can be achieved that long stroke precision positioning, can be used for the manufacturing precision positionings of IC.
Description
Technical field
The utility model belongs to precision actuation technical field, and in particular to a kind of Three Degree Of Freedom locating platform.
Background technology
The fields development such as current IC manufactures become increasingly prosperous, and accelerate need of the modern industry to high speed, high-accuracy locating platform
It asks.
Three Degree Of Freedom locating platform is widely used in manufacture and testing field at present.The fortune of the three degree of freedom of locating platform
It is dynamic mainly by " electric rotating machine+lead screw " structure drive superposition heap come the mechanical structure of three degree of freedom realize.
But the limitation of the type of drive due to creep and the rotation of lead screw so that existing Three-degree-of-freedom motion platform
Low-response, low precision, payload is small, and volume is big, greatly constrains the development of manufacturing industry and other industry.
Utility model content
Technical problem to be solved by the utility model is to provide a kind of Three Degree Of Freedom positioning of electromagnet driving is flat
Platform may be implemented to move along the displacement of X-axis, the displacement of Y-axis and plane internal rotation in X/Y plane, positioning accuracy height, volume
It is small, mechanism is simple, stability is high.
In order to solve the above technical problems, the technical solution adopted in the utility model is, and a kind of Three Degree Of Freedom locating platform, packet
Include moving platform and silent flatform, the moving platform includes mounting base, the subpart that is arranged in the mounting base and rotary shaft；
The silent flatform includes：
Platform base；
Stationary part on the platform base is set；
The X-direction in the X-direction the linear guide is arranged in the X-direction the linear guide being arranged in parallel on platform base
Guide rail slide block, X-direction pinboard；
And it is arranged in parallel in the Y-direction the linear guide on the X-direction pinboard, setting is led in the Y-direction straight line
Y-direction guide rail slide block, rotation pinboard on rail；
And the support of bearing being arranged on the rotation pinboard, the bearing being arranged on the support of bearing；
Wherein, the bearing is set in the rotary shaft, and the subpart is correspondingly arranged simultaneously with the stationary part
Constitute electromagnetic drive module.
In addition, the utility model also proposes following attached technical scheme.
Preferably, the X-direction the linear guide includes at least two, and two pieces of X-direction guide rail slide blocks are slidably connected at respectively
In two X-direction the linear guides, two pieces of X-direction pinboards are separately positioned on two pieces of X-direction guide rail slide blocks, are reinforced
Item is bolted on two pieces of X-direction pinboards disposed in parallel.
Preferably, the Y-direction the linear guide includes at least two, the Y-direction the linear guide and the X-direction straight line
Guide rail is vertically arranged, and two pieces of Y-direction guide rail slide blocks are slidably connected at respectively in two Y-direction the linear guides, rotation switching
The both ends of plate are separately positioned on two pieces of Y-direction guide rail slide blocks.
Preferably, the stationary part include four groups in rectangular-ambulatory-plane setting stator cores, the subpart include with
The S grade magnet steel and N grades of magnet steel that the stator is correspondingly arranged.
Preferably, coil windings are embedded on the stator core, and are all made of concentratred winding structure.
Preferably, the centre setting of the mounting base is fluted, and magnet steel locating piece is fixedly mounted in the groove.
Preferably, the S grades of magnet steel, N grades of magnet steel are fixed on the groove of the mounting base, the S grades of magnet steel and N grades of magnetic
Steel is staggered.
Preferably, the electromagnetic drive module includes X-direction electromagnetic drive module and Y-direction electromagnetic drive module.
Preferably, the Three Degree Of Freedom locating platform further includes locating platform control system.
Preferably, the locating platform control system includes PC machine, CAN bus communication module, X-direction dsp controller, Y
Direction dsp controller, X-direction laser displacement sensor, Y-direction laser displacement sensor.
Preferably, the PC machine provides control instruction, by CAN bus communication module, is sent to X-direction dsp controller,
Realize that X-direction electromagnetic drive module moves in X direction；It is sent to Y-direction dsp controller, is realized to Y-direction electromagnetic drive module
It is moved along Y-direction；When control instruction issues X-direction dsp controller and Y-direction dsp controller simultaneously by rule, four are driven
It is moved in Back Word type electromagnetic drive module cooperative, to realize the rotary motion of locating platform.
Compared with the prior art, the utility model has the advantage of：The Three Degree Of Freedom locating platform of the utility model relies on
Linear electromagnetic driving principle and sliding block, sliding rail, the electromagnetic field that the coil windings energization of the silent flatform of locating platform generates are put down with dynamic
The permanent magnet magnetic field interactions of S grades magnet steel, N grades of magnet steel on platform generates driving force, to drive moving platform in X/Y plane
The movement for carrying out three degree of freedom, is a kind of new mobile decoupling device, it is simple to breach existing Three Degree Of Freedom locating platform
Line of motion movement module and electric rotating machine accumulation limitation.
The utility model uses rectangular-ambulatory-plane structure positioning platform, stator coil to use concentratred winding, enormously simplify positioning
The structure of platform, improve power density, it can be achieved that long stroke precision positioning.
The utility model Three Degree Of Freedom locating platform, flexible, making simply, can be used for the manufacturing precision positionings of IC.
The application of linear electromagnetic driving principle and line slide rail sliding block greatly simplifies the utility model Three Degree Of Freedom locating platform
Mechanical structure.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of the utility model Three Degree Of Freedom locating platform.
Fig. 2 is the silent flatform structural schematic diagram of the utility model Three Degree Of Freedom locating platform.
Fig. 3 is the moving platform structural schematic diagram of the utility model Three Degree Of Freedom locating platform.
Fig. 4 is the control system schematic diagram of the utility model Three Degree Of Freedom locating platform.
Wherein,
100. 200. silent flatform of moving platform
1. 2. stator core of platform base
3. 4. stator core of coil windings
5. 6. bearing of the support of bearing
The directions 7.X the linear guide 8.X traversing guide sliding blocks
10. stator core of the directions 9.X pinboard
11. the directions stator core 12.Y the linear guide
13. rotating pinboard 14.Y traversing guide sliding blocks
15. 16. mounting base of stiffener
18.N grades of magnet steel of 17.S grades of magnet steel
19. 20. rotary shaft of magnet steel locating piece
21. bolt 22.PC machines
The directions 23.CAN bus communication module 24.X dsp controller
The directions the 25.Y directions dsp controller 26.X electromagnetic drive module
The directions the 27.X directions electromagnetic drive module 28.Y electromagnetic drive module
The directions the 29.Y directions electromagnetic drive module 30.X laser displacement sensor
The directions the 31.Y directions laser displacement sensor 32.Y laser displacement sensor
Specific implementation mode
Technical solutions of the utility model are made below in conjunction with preferred embodiment and its attached drawing further unrestricted detailed
Explanation.
Shown in Fig. 1 to Fig. 4, the utility model Three Degree Of Freedom locating platform include moving platform 100, silent flatform 200 with
And locating platform control system.
Shown in Fig. 1, Fig. 2, silent flatform 200 is including being generally rectangular, the platform that lead angle is handled is done in quadrangle
Pedestal 1.Certainly, platform base 1 or other shapes, as long as can realize that the shape of its function in the present invention is equal
It is within the protection scope of the utility model.
Silent flatform 200 further includes the stationary part being arranged on the platform base 1.Stationary part includes four groups of stator iron
Core 2,4,10,11.Four groups of stator cores 2,4,10,11 are fixed to each by bolt on platform base 1.When installation, need really
Four groups of iron cores are protected in rectangular-ambulatory-plane arrangement installation.Coil windings 3 are respectively embedded on four groups of stator cores 2,4,10,11, and are adopted
With concentratred winding form, the power density of electromagnetic drive module can be increased.
Silent flatform 200 further includes X-direction the linear guide 7, X-direction guide rail slide block 8, X-direction pinboard 9.X-direction straight line is led
Rail 7 includes at least two, is bolted on respectively on platform base 1.To ensure that it is suitable that locating platform is moved in X-direction
Freely, it is necessary to ensure that between two X-direction the linear guides 7 and is arranged in parallel when assembly.Two pieces of X-direction guide rail slide blocks 8 company of sliding respectively
It is connected in above-mentioned two X-direction the linear guides 7.
Two pieces of X-direction pinboards 9 are bolted respectively on above-mentioned two pieces of X-direction guide rail slide blocks 8.Stiffener 15 is logical
It crosses and is bolted on above-mentioned two pieces of X-direction pinboards 9.When assembly, it need to ensure to be arranged in parallel between two pieces of X-direction pinboards 9,
Thereby further ensure that the X directions of motion and Y motion direction are vertically arranged.
Silent flatform 200 further includes Y-direction the linear guide 12, Y-direction guide rail slide block 14.Two Y-direction the linear guides 12 are divided
It is not bolted on two X-direction pinboards 9 and stiffener 15, in order to realize the smooth motion of Y-direction, when assembly,
It need to ensure that two groups of Y-direction the linear guides 12 are arranged in parallel, and Y-direction the linear guide 12 is vertically arranged with X-direction the linear guide 7.
Silent flatform 200 further includes rotating pinboard 13, the support of bearing 5 being arranged on rotation pinboard 13, being arranged in institute
State the bearing 6 on the support of bearing 5.When assembly, bearing 6 is installed on the support of bearing 5, and using the installation side excessively coordinated
Formula.Later, the support of bearing 5 is connect by bolt with rotation pinboard 13.After the completion of above-mentioned assembly, pinboard 13 will be rotated
Both ends are bolted respectively on Y-direction guide rail slide block 14, and are necessary to ensure that two pieces of Y-direction guide rail slide blocks 14 are parallel and are set
It sets.
Shown in Figure 3, moving platform 100 includes mounting base 16, the subpart being arranged in mounting base 16 and rotation
Axis 20.
The subpart of moving platform 100 is correspondingly arranged with the stationary part of silent flatform 200 and constitutes four groups of electromagnetic drive moulds
Block.Shown in Figure 4, above-mentioned four groups of electromagnetic drive modules are respectively X-direction electromagnetic drive module 26,27 and Y-direction electromagnetism
Drive module 28,29.
The subpart of moving platform 100 includes the S grades being correspondingly arranged with stator core 2,4,10,11 and winding coil 3
Magnet steel 17 and N grades of magnet steel 18.
Mounting base 16 it is centrally disposed fluted.When assembly, magnet steel locating piece 19 is adhesively fixed by structure glue and is being pacified
In the groove for filling 16 center of seat, and ensure that structure glue bond is secured.Certainly, magnet steel locating piece 19 can also pass through other fixation sides
Formula is mounted in the groove at 16 center of mounting base.
Later, S grades of magnet steel 17, N grades of magnet steel 18 are adhesively fixed in the groove of mounting base 16 by structure glue, and ensured
S grades of magnet steel 17 and N grades of magnet steel 18 ensure the normal work of electromagnetic drive module with this in being staggeredly arranged.Certainly, S grades
Magnet steel 17, N grade magnet steel 18 can also be fixedly mounted at the groove of mounting base 16 by other.
After the completion of above-mentioned assembly, rotary shaft 20 is fixed on to the centre of magnet steel locating piece 19 by bolt 21.It is above-mentioned
After the completion of assembly, the moving platform 100 of locating platform shown in Fig. 3 is inserted in silent flatform 200 shown in Fig. 2 by rotary shaft 20
Bearing 6 in, locked by bolt in bottom, ensure that connection is reliable, and ensure that moving platform 100 rotates smoothly.
Shown in Figure 4, the utility model Three Degree Of Freedom locating platform further includes locating platform control system.Locating platform
Control system includes PC machine 22, CAN bus communication module 23, X-direction dsp controller 24, X-direction electromagnetic drive module 26,27,
Y-direction dsp controller 25, Y-direction electromagnetic drive module 28,29, X-direction laser displacement sensor 30 and Y-direction laser position
Displacement sensor 31,32.PC machine 22 is the host computer of the utility model.
The operation principle of the utility model Three Degree Of Freedom locating platform is as follows.
PC machine 22 provides control instruction, by CAN bus communication module 23, is sent to X-direction dsp controller 24, quiet flat
Coil windings on the stator core 2,10 of platform 200, the electromagnetic field generated after energization and the S grades coordinated by certain slot grade and N grades
The sine alternating magnetic field interaction that magnet steel generates, generates driving force, realizes that X-direction electromagnetic drive module 26,27 is transported in X direction
It is dynamic, at this point, moving platform 100 in X direction in X-direction do exercises by the linear guide 7.
PC machine 22 provides control instruction, by CAN bus communication module 23, is sent to Y-direction dsp controller 25, quiet flat
Coil windings on the stator core 4,11 of platform 200, the electromagnetic field generated after energization and the S grades coordinated by certain slot grade and N grades
The sine alternating magnetic field interaction that magnet steel generates, generates driving force, realizes to Y-direction electromagnetic drive module 28,29 along Y-direction
Movement, at this point, moving platform 100 moves in the Y direction along Y-direction the linear guide 12.
When PC machine 22 provides control instruction, by CAN bus communication module 23, X-direction DSP controls are issued simultaneously by rule
When device 24 and Y-direction dsp controller 25, driving is electric in the X-direction electromagnetic drive module 26,27 and Y-direction of rectangular-ambulatory-plane setting
Magnetic driving module 28,29, this four electromagnetic drive module cooperative movements, so that the rotation of the moving platform 100 of locating platform can be realized
Transhipment is dynamic.
Y-direction dsp controller 25 acquires Y-direction laser displacement sensor 31 and Y-direction laser displacement sensor 32 exports
Position signal, X-direction dsp controller 24 acquires the position signal of 30 output of X-direction laser displacement sensor, total by CAN
Line communication module 23 feeds back to PC machine 22, realizes the closed-loop control to locating platform.
The Three Degree Of Freedom locating platform of the utility model relies on linear electromagnetic driving principle and sliding block sliding rail, locating platform
The coil windings of silent flatform 200 are powered the magnetic field of permanent magnet of the electromagnetic field that generates and S grades magnet steel, N grades of magnet steel on moving platform 100
Interaction generates driving force, to drive the moving platform 100 of locating platform to carry out the movement of three degree of freedom in X/Y plane,
It is a kind of new mobile decoupling device, breaches the simple line of motion movement module of existing Three Degree Of Freedom locating platform and rotation
The limitation of rotating motor accumulation.
The utility model uses rectangular-ambulatory-plane structure positioning platform, stator coil to use concentratred winding, enormously simplify positioning
The structure of platform, improve power density, it can be achieved that long stroke precision positioning.
The utility model Three Degree Of Freedom locating platform, flexible, making simply, can be used for the manufacturing precision positionings of IC.
The application of linear electromagnetic driving principle and line slide rail sliding block greatly simplifies the utility model Three Degree Of Freedom locating platform
Mechanical structure.
It should be pointed out that above-mentioned preferred embodiment is only to illustrate the technical concepts and features of the utility model, purpose
It is the content for allowing person skilled in the art that can understand the utility model and implements according to this, this reality can not be limited with this
With novel protection domain.It is all according to equivalent change or modification made by the spirit of the present invention essence, should all cover in this reality
Within novel protection domain.
Claims (10)
1. a kind of Three Degree Of Freedom locating platform, including moving platform (100) and silent flatform (200), it is characterised in that：
The moving platform (100) includes the subpart and rotary shaft of mounting base (16), setting in the mounting base (16)
(20)；
The silent flatform (200) includes：
Platform base (1)；
Stationary part on the platform base (1) is set；
The X-direction the linear guide (7) being arranged in parallel on the platform base (1) is arranged in the X-direction the linear guide (7)
On X-direction guide rail slide block (8), X-direction pinboard (9)；And
The Y-direction the linear guide (12) being arranged in parallel on the X-direction pinboard (9) is arranged in the Y-direction the linear guide
(12) Y-direction guide rail slide block (14), rotation pinboard (13) on；
And bearing of the support of bearing (5), setting of the setting on the rotation pinboard (13) on the support of bearing (5)
(6)；
Wherein, the bearing (6) is set in the rotary shaft (20), and the subpart is correspondingly arranged with the stationary part
And constitute electromagnetic drive module.
2. Three Degree Of Freedom locating platform according to claim 1, it is characterised in that：The X-direction the linear guide (7) is at least
Including two, two pieces of X-direction guide rail slide blocks (8) are slidably connected at respectively on two X-direction the linear guides (7), two pieces of sides X
It is separately positioned on two pieces of X-direction guide rail slide blocks (8) to pinboard (9), stiffener (15) is bolted parallel
On two pieces of X-direction pinboards (9) being arranged.
3. Three Degree Of Freedom locating platform according to claim 1, it is characterised in that：The Y-direction the linear guide (12) is extremely
It include less two, the Y-direction the linear guide (12) is vertically arranged with the X-direction the linear guide (7), two pieces of Y-direction guide rails
Sliding block (14) is slidably connected at respectively on two Y-direction the linear guides (12), the both ends point of the rotation pinboard (13)
It is not arranged on two pieces of Y-direction guide rail slide blocks (14).
4. Three Degree Of Freedom locating platform according to claim 1, it is characterised in that：The stationary part is in back including four groups
The stator core (2 of font setting；4；10；11), the subpart includes and the stator core (2；4；10；11) correspondence is set
The S grade magnet steel and N grades of magnet steel set.
5. Three Degree Of Freedom locating platform according to claim 4, it is characterised in that：The stator core (2；4；10；11)
On be embedded with coil windings (3), and be all made of concentratred winding structure.
6. Three Degree Of Freedom locating platform according to claim 4, it is characterised in that：The central part of the mounting base (16)
Position setting is fluted, and magnet steel locating piece (19) is fixedly mounted in the groove；The S grades of magnet steel, N grades of magnet steel are fixed on described
The groove of mounting base (16), the S grades of magnet steel and N grades of magnet steel are staggered.
7. Three Degree Of Freedom locating platform according to claim 1, it is characterised in that：The electromagnetic drive module includes the side X
To electromagnetic drive module (26；And Y-direction electromagnetic drive module (28 27)；29).
8. Three Degree Of Freedom locating platform according to claim 7, it is characterised in that：The Three Degree Of Freedom locating platform also wraps
Include locating platform control system.
9. Three Degree Of Freedom locating platform according to claim 8, it is characterised in that：The locating platform control system includes
PC machine (22), CAN bus communication module (23), X-direction dsp controller (24), Y-direction dsp controller (25), X-direction laser
Displacement sensor (30), Y-direction laser displacement sensor (31；32).
10. Three Degree Of Freedom locating platform according to claim 9, it is characterised in that：The PC machine (22) provides control and refers to
It enables, by CAN bus communication module (23), is sent to X-direction dsp controller (24), realizes X-direction electromagnetic drive module (26；
27) it moves in X direction；It is sent to Y-direction dsp controller (25), is realized to Y-direction electromagnetic drive module (28；29) along Y-direction
Movement；When control instruction issues X-direction dsp controller (24) and Y-direction dsp controller (25) simultaneously by rule, driving four
It is a to be moved in Back Word type electromagnetic drive module cooperative, to realize the rotary motion of locating platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820086859.2U CN207732608U (en) | 2018-01-18 | 2018-01-18 | A kind of Three Degree Of Freedom locating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820086859.2U CN207732608U (en) | 2018-01-18 | 2018-01-18 | A kind of Three Degree Of Freedom locating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207732608U true CN207732608U (en) | 2018-08-14 |
Family
ID=63083121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820086859.2U Active CN207732608U (en) | 2018-01-18 | 2018-01-18 | A kind of Three Degree Of Freedom locating platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207732608U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108173408A (en) * | 2018-01-18 | 2018-06-15 | 苏州大学 | A kind of Three Degree Of Freedom locating platform |
-
2018
- 2018-01-18 CN CN201820086859.2U patent/CN207732608U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108173408A (en) * | 2018-01-18 | 2018-06-15 | 苏州大学 | A kind of Three Degree Of Freedom locating platform |
| CN108173408B (en) * | 2018-01-18 | 2023-10-24 | 苏州大学 | Three-degree-of-freedom positioning platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210603 Address after: 215000 Room 305, building 2, Yangchenghu international science and Technology Pioneer Park, 116 Chengyang Road, Xiangcheng economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee after: SUZHOU LINEAR PRECISION DRIVE CONTROL TECHNOLOGY Co.,Ltd. Address before: 215104 No. 1188 Wuzhong Road, Wuzhong District, Suzhou, Jiangsu Patentee before: Suzhou University |
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| TR01 | Transfer of patent right |