CN109256174B - High-precision space translation micro-positioning platform - Google Patents
High-precision space translation micro-positioning platform Download PDFInfo
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- CN109256174B CN109256174B CN201811323351.0A CN201811323351A CN109256174B CN 109256174 B CN109256174 B CN 109256174B CN 201811323351 A CN201811323351 A CN 201811323351A CN 109256174 B CN109256174 B CN 109256174B
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Abstract
The invention provides a high-precision space translation micro-positioning platform, which can solve the problems of small movement stroke, easy stress concentration and low positioning precision of the existing concentrated compliance type micro-positioning platform. The flexible movable pair of the flexible branched chain comprises two groups of flexible reeds which are symmetrically arranged, wherein the two flexible reeds in the same group are parallel to each other, the two flexible reeds in the same group in the driving pair are connected through a first rigid connecting piece, the first driven pair and the second driven pair have the same structure, one ends of the two groups of flexible reeds are commonly connected to a second rigid connecting piece, and the other ends of the two groups of flexible reeds are commonly connected to a third rigid connecting piece; the first rigid connecting piece of the driving pair is fixedly connected to the base, and the flexible reed and the piezoelectric ceramic driver are respectively connected with the second rigid connecting piece of the first driven pair; the third rigid connecting piece of the first passive pair is connected with the second rigid connecting piece of the second passive pair, and the third rigid connecting piece of the second passive pair is fixedly connected with the movable platform.
Description
Technical Field
The invention relates to the field of flexible mechanisms, in particular to a high-precision space translation micro-positioning platform.
Background
The flexible mechanism is a novel mechanism for transmitting motion by utilizing elastic deformation of materials, and the kinematic pair in the mechanism is of an integrated flexible structure, so that the defects of assembly errors, friction, abrasion, gaps and the like affecting the service life and the precision of the mechanism are avoided. Along with the further improvement of the requirements of the fields of micro-manufacture of microelectronic and optoelectronic components, micro-electromechanical systems, bioengineering and the like on the positioning precision, the flexible mechanism is widely applied in the micro-positioning field and has immeasurable prospect, wherein the space translation micro-positioning platform is widely applied to the three-dimensional scanning, micro-nano operation, advanced sensing and other systems of an atomic force microscope. At present, a new configuration design with large travel, high precision and motion decoupling is a research hotspot of a spatial translational micro-positioning platform.
The space translation micro-positioning platform can be divided into a centralized flexible micro-positioning platform and a distributed flexible micro-positioning platform, wherein the centralized flexible micro-positioning platform has more research and the distributed flexible micro-positioning platform has less research. The three-translation orthogonal decoupling parallel micro-motion platform disclosed in the invention patent with the patent number ZL200620162291.5 and the space three-dimensional moving full-flexible parallel micro-motion platform disclosed in the invention with the patent number ZL201510228721.2 belong to a concentrated flexible micro-positioning platform, and the branched chains used by the platform are of flexible hinge structures with notches, so that the main defects are small movement stroke, complex structure, easy stress concentration at the notches, and incapability of realizing complete decoupling among various movement degrees of freedom, so that the positioning precision of the platform is not high.
Disclosure of Invention
Aiming at the technical problems that the existing concentrated flexibility type micro-positioning platform is small in movement stroke, complex in structure, easy to cause stress concentration at the notch due to the fact that a branched chain is a flexible hinge structure with the notch, and low in positioning precision due to the fact that complete decoupling cannot be achieved among all movement degrees of freedom, the invention provides a high-precision space translation type micro-positioning platform, which belongs to a distributed flexibility type micro-positioning platform, is free from the problem of stress concentration, large in movement stroke, capable of achieving complete decoupling and high in positioning precision.
The technical scheme is as follows: the utility model provides a high accuracy space translation micro-positioning platform, its includes base, moves platform and three flexible branched chain, three flexible branched chain is the quadrature and arranges, flexible branched chain's both ends rigid coupling respectively the base with move on the platform, still install on the base respectively be used for driving flexible branched chain's piezoceramics driver, its characterized in that: the flexible branched chain comprises three flexible movable pairs, namely a driving pair, a first driven pair and a second driven pair, wherein the flexible movable pairs comprise two groups of flexible reeds which are symmetrically arranged, two flexible reeds in the same group are parallel to each other, and one ends of the two flexible reeds in the same group in the driving pair are connected through a first rigid connecting piece; the first passive pair and the second passive pair have the same structure, one ends of the two groups of flexible reeds are connected to the second rigid connecting piece together, and the other ends of the two groups of flexible reeds are connected to the third rigid connecting piece together; the driving pair is fixedly connected to the base through the first rigid connecting piece, the other ends of the two groups of flexible reeds and the piezoelectric ceramic driver are respectively connected with the second rigid connecting piece of the first driven pair, the third rigid connecting piece of the first driven pair is connected with the second rigid connecting piece of the second driven pair, and the third rigid connecting piece of the second driven pair is fixedly connected with the movable platform; and the deformation directions of the flexible reeds in the driving pair, the first driven pair and the second driven pair are orthogonal.
It is further characterized by:
the driving pair, the first passive pair and the second passive pair are integrally formed.
The first rigid connecting piece is of a flat plate structure.
The rigid connecting piece II is a U-shaped connecting piece, the rigid connecting piece III is a T-shaped connecting piece, flanges extending inwards are respectively arranged at two ends of the U-shaped connecting piece, one group of flexible reeds in the first passive pair is respectively connected with the inner bottom surface of the U-shaped connecting piece, the other group of flexible reeds is respectively connected with two flanges, the other ends of the two groups of flexible reeds are respectively connected with a horizontal plate of the T-shaped connecting piece, and a vertical plate of the T-shaped connecting piece extends out of the U-shaped connecting piece.
The other ends of the two groups of flexible reeds of the driving pair are respectively connected to two side walls of the U-shaped connecting piece of the first driven pair, the piezoelectric ceramic driver is connected to the outer bottom surface of the U-shaped connecting piece of the first driven pair, the vertical plate of the T-shaped connecting piece of the first driven pair is connected with the outer bottom surface of the U-shaped connecting piece of the second driven pair, the second driven pair horizontally rotates by 90 degrees relative to the first driven pair, and the vertical plate of the T-shaped connecting piece of the second driven pair is fixedly connected with the movable platform.
The piezoelectric ceramic driver is installed on the base through a mounting bracket, the mounting bracket and the piezoelectric ceramic driver are both positioned on the outer side of the base, the mounting bracket is fixedly connected on the base, the fixed end of the piezoelectric ceramic driver is fixedly connected on the mounting bracket, and the driving end of the piezoelectric ceramic driver penetrates through the base and then is connected with the first passive pair.
Three of the flexible branches are spatially rotated 90 ° relative to each other.
The beneficial effects of the invention are as follows:
the flexible branched chain of the space translation micro-positioning platform is composed of the active pair, the first passive pair and the second passive pair, each flexible moving pair comprises two groups of flexible reeds which are symmetrically arranged, the two flexible reeds in each group are parallel to each other, the deformation directions of the flexible reeds in the active pair, the first passive pair and the second passive pair are orthogonal, so that the distributed flexibility type space translation micro-positioning platform is formed, the deformation of materials can be uniformly distributed on the whole reeds, the stress concentration phenomenon is avoided, the movement stroke is larger, the structure is simple, and due to the symmetrical arrangement of the flexible reeds and the orthogonal deformation directions of the flexible reeds in the active pair, the first passive pair and the second passive pair, parasitic errors of the moving pair are eliminated, the complete decoupling of the platform movement can be realized, and the positioning precision of the platform can be remarkably improved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the overall structure of the present invention (base not shown);
FIG. 3 is a schematic structural view of a flexible branch;
fig. 4 is a front view of the connection relationship between the active pair and the first passive pair.
Reference numerals: 1-a base; 2-a movable platform; 3-flexible branches; 4-a piezoelectric ceramic driver; 5-mounting a bracket; 6-a screw; 7-a flexible reed; 8-first rigid connection; 9-a second rigid connection; 10-a third rigid connection; 31-active pair; 32-a first passive pair; 33-a second passive pair; 91-flange.
Detailed Description
Referring to fig. 1 to 4, the high-precision space translation micro-positioning platform comprises a base 1, a movable platform 2, three flexible branched chains 3, three piezoelectric ceramic drivers 4 and three mounting brackets 5, wherein as shown in fig. 1, the base 1 and the movable platform 2 are composed of three orthogonal planes, the three flexible branched chains 3 are orthogonally arranged and positioned on the inner side of the base 1, the three mounting brackets 5 are respectively positioned on the outer sides of the three orthogonal planes of the base 1, and the mounting brackets 5 are fixedly connected on the base 1 through screws 6; two ends of the flexible branched chain 3 are fixedly connected to the base 1 and the movable platform 2 respectively, the fixed end of the piezoelectric ceramic driver 4 is fixedly connected to the mounting bracket 5, and the driving end vertically penetrates through the base 1 and then is connected with the flexible branched chain 3; the flexible branched chain 3 comprises three flexible mobile pairs, wherein the three flexible mobile pairs comprise a driving pair 31, a first passive pair 32 and a second passive pair 33 respectively, the flexible mobile pairs comprise two groups of flexible reeds 7 which are symmetrically arranged, the two flexible reeds 7 in the same group are parallel to each other, one ends of the two flexible reeds 7 in the same group in the driving pair 31 are connected through a first rigid connecting piece 8, the first passive pair 32 and the second passive pair 33 have the same structure, one ends of the two groups of flexible reeds 7 are commonly connected to a second rigid connecting piece 9, and the other ends of the two groups of flexible reeds 7 are commonly connected to a third rigid connecting piece 10; the driving pair 31 is fixedly connected to the base 1 through a first rigid connecting piece 8, the other ends of the two groups of flexible reeds 7 and the piezoelectric ceramic driver 4 are respectively connected with a second rigid connecting piece 9 of the first driven pair 32, a third rigid connecting piece 10 of the first driven pair 32 is connected with a second rigid connecting piece 9 of the second driven pair 33, and a third rigid connecting piece 10 of the second driven pair 33 is fixedly connected with the movable platform 2; the deformation directions of the flexible reed 7 in the driving pair 31, the first driven pair 32, and the second driven pair 33 are orthogonal. The platform disclosed by the invention has the advantages that the driving pair 31, the first driven pair 32 and the second driven pair 33 are integrally formed, the structure is compact, and the assembly error is reduced.
Referring to fig. 2 to 4, the first rigid connecting piece 8 is in a flat plate structure, the second rigid connecting piece 9 is a U-shaped connecting piece, the third rigid connecting piece 10 is a T-shaped connecting piece, flanges 91 extending inwards are respectively arranged at two ends of the U-shaped connecting piece, one end of one group of flexible reeds 7 in the first passive pair 32 is respectively connected with the inner bottom surface of the U-shaped connecting piece, one end of the other group of flexible reeds 7 is respectively connected with two flanges 91, the other ends of the two groups of flexible reeds 7 are respectively connected with a horizontal plate of the T-shaped connecting piece, and a vertical plate of the T-shaped connecting piece extends out of the U-shaped connecting piece; the other ends of the two groups of flexible reeds 7 of the driving pair 31 are respectively connected to two side walls of the U-shaped connecting piece of the first driven pair 32, the piezoelectric ceramic driver 4 is connected to the outer bottom surface of the U-shaped connecting piece of the first driven pair 32, the vertical plate of the T-shaped connecting piece of the first driven pair 32 is connected with the outer bottom surface of the U-shaped connecting piece of the second driven pair 33, the second driven pair 33 horizontally rotates by 90 degrees relative to the first driven pair 32, and the vertical plate of the T-shaped connecting piece of the second driven pair 33 is fixedly connected with the movable platform 2 through the screw 6. So design, simple structure is convenient for integration processing, simple to operate.
See fig. 1, three flexible branches 3 are rotated 90 ° in space, so designed that the platform is completely isotropic, and the same motion capability of the movable platform in three translation directions can be ensured no matter how the base is placed.
When the piezoelectric ceramic actuator works, the piezoelectric ceramic actuator 4 drives the corresponding flexible branched chains 3, so that the movable platform 2 connected with the flexible branched chains 3 moves horizontally along the axial direction of the piezoelectric ceramic actuator 4, and the three flexible branched chains 3 are completely decoupled and are not mutually influenced.
Claims (4)
1. The utility model provides a high accuracy space translation micro-positioning platform, its includes base, moves platform and three flexible branched chain, three flexible branched chain is the quadrature and arranges, flexible branched chain's both ends rigid coupling respectively the base with move on the platform, still install on the base respectively be used for driving flexible branched chain's piezoceramics driver, its characterized in that: the flexible branched chain comprises three flexible movable pairs, namely a driving pair, a first driven pair and a second driven pair, wherein the flexible movable pairs comprise two groups of flexible reeds which are symmetrically arranged, two flexible reeds in the same group are parallel to each other, and one ends of the two flexible reeds in the same group in the driving pair are connected through a first rigid connecting piece; the first passive pair and the second passive pair have the same structure, one ends of the two groups of flexible reeds are connected to the second rigid connecting piece together, and the other ends of the two groups of flexible reeds are connected to the third rigid connecting piece together; the driving pair is fixedly connected to the base through the first rigid connecting piece, the other ends of the two groups of flexible reeds and the piezoelectric ceramic driver are respectively connected with the second rigid connecting piece of the first driven pair, the third rigid connecting piece of the first driven pair is connected with the second rigid connecting piece of the second driven pair, and the third rigid connecting piece of the second driven pair is fixedly connected with the movable platform; the deformation directions of the flexible reeds in the driving pair, the first driven pair and the second driven pair are orthogonal;
the rigid connecting piece II is a U-shaped connecting piece, the rigid connecting piece III is a T-shaped connecting piece, flanges extending inwards are respectively arranged at two ends of the U-shaped connecting piece, one end of one group of flexible reeds in the first passive pair is respectively connected with the inner bottom surface of the U-shaped connecting piece, one end of the other group of flexible reeds is respectively connected with two flanges, the other ends of the two groups of flexible reeds are respectively connected with a horizontal plate of the T-shaped connecting piece, and a vertical plate of the T-shaped connecting piece extends out of the U-shaped connecting piece;
the other ends of the two groups of flexible reeds in the driving pair are respectively connected to two side walls of the U-shaped connecting piece in the first driven pair, the piezoceramic driver is connected to the outer bottom surface of the U-shaped connecting piece in the first driven pair, the vertical plate of the T-shaped connecting piece in the first driven pair is connected with the outer bottom surface of the U-shaped connecting piece in the second driven pair, the second driven pair horizontally rotates by 90 degrees relative to the first driven pair, and the vertical plate of the T-shaped connecting piece in the second driven pair is fixedly connected with the movable platform;
three of the flexible branches are spatially rotated 90 ° relative to each other.
2. The high-precision spatial translational micro positioning platform of claim 1, wherein: the driving pair, the first passive pair and the second passive pair are integrally formed.
3. A high precision spatially translational micropositioning stage according to claim 1 or 2, wherein: the first rigid connecting piece is of a flat plate structure.
4. The high-precision spatial translational micro positioning platform of claim 1, wherein: the piezoelectric ceramic driver is installed on the base through a mounting bracket, the mounting bracket and the piezoelectric ceramic driver are both positioned on the outer side of the base, the mounting bracket is fixedly connected on the base, the fixed end of the piezoelectric ceramic driver is fixedly connected on the mounting bracket, and the driving end of the piezoelectric ceramic driver penetrates through the base and then is connected with the first passive pair.
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| CN110010190B (en) * | 2019-04-30 | 2021-11-16 | 珠海澳大科技研究院 | Three-dimensional constant force parallel flexible micro-positioning platform |
| CN110883761B (en) * | 2019-11-18 | 2022-11-25 | 东北大学 | Six-degree-of-freedom motion decoupling compliant mechanism |
| CN113246102A (en) * | 2021-05-27 | 2021-08-13 | 华南理工大学 | Rigid-flexible coupling device with variable flexibility direction and mechanical arm |
| CN115148637B (en) * | 2022-07-05 | 2023-03-21 | 北京派和科技股份有限公司 | Orthogonal driving rigid-flexible coupling high-speed crystal-pricking mechanism |
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