CN100585743C - Hexahedron parallel-connection decoupling six-freedom micro displacement worktable - Google Patents

Abstract

The invention is a cubic parallel decoupling 6-DOF micro displacement worktable. The invention aims to solve the problems of coupling of the motions of the degrees of freedom outputted by a platform and large volume of the whole mechanism in current 6-DOF micro displacement mechanism. The motion platform and the base of the invention are respectively composed of three vertical planes, equivalent to a combination of three planes having public vertexes of the six planes of a cube. The platform and the base are half surfaces of a cube, and form a cube when combined together; six piezoelectric ceramic driving branch chains are parallel between the base and the motion platform, and output straight-line micrometric displacement motion. The invention has six degrees of freedom, is capable of realizing decoupling of degrees of freedom of motion platform by orthogonal arrangement, and the motion accuracy is high. Since the six piezoelectric ceramic driving branch chains are in a cube, the structure is compact and the occupying space is small, which is suitable for application situations needing strict micro displacement worktable accuracy and volume.

Description

A kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable

Technical field

The present invention relates to a kind of six-freedom micro displacement worktable.

Background technology

The fast development of micro-nano technology has caused new round technological revolution, and the micromotion platform of micro-nano level has obtained using widely in fields such as the making of nano-device and structure, semiconductor lithography, micromechanics, ultraprecise processing, biological cell manipulation, little assembling, fiber alignments.High-precision six-freedom micro displacement platform is because therefore ultraprecise location that can the implementation space six-freedom degree has a large amount of practical application.Though proposed some six-freedom micro displacement mechanisms at present, there are shortcomings such as motion coupling or entire mechanism volume are bigger each other in the degree of freedom that exists platform output.For example three branched chain type six-freedom micro displacement mechanisms (or robot), single layer structure eight bar micro displacement workbenchs etc. are because there is the shortcoming of motion coupling in the inherent characteristic of its mechanism.Though the six-freedom parallel decoupling jiggle robot can be realized mobile decoupling, but its volume is bigger, can not be applied to the little occasion of installing space.

Based on the above, publication number is that the application for a patent for invention of CN 1258589A has proposed a kind of six-freedom parallel decoupling-structure jogging robot, though the decoupling mechanism described in the literary composition has solved the motion coupled problem that the degree of freedom of platform output exists each other, but it still exists volume bigger, can not be applied to the little occasion of installing space.

Summary of the invention

The objective of the invention is for solving entire mechanism volume that existing six-freedom micro displacement mechanism exists greatly and can't be applied to the problem of the little occasion of installing space, a kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable is provided.The present invention is made up of base, motion platform and six Piezoelectric Ceramic side chains, base is made up of first flat board 1, second the dull and stereotyped the 8 and the 3rd dull and stereotyped 16, the Q end of first flat board 1 connects as one with the R end of second flat board 8, the P end of the 3rd flat board 16 connects as one with the N end of first flat board 1, the T end of the 3rd flat board 16 connects as one with the S end of second flat board 8, first dull and stereotyped 1 with the second dull and stereotyped 8 mutual vertical settings, the 3rd flat board 16 respectively with first flat board 1 and the 8 mutual vertical settings of second flat board; Motion platform is made up of Siping City's plate the 6, the 5th the dull and stereotyped the 13 and the 6th dull and stereotyped 20, the G end of Siping City's plate 6 connects as one with the H end of the 5th flat board 13, the L end of the 6th flat board 20 connects as one with the M end of Siping City's plate 6, the J end of the 6th flat board 20 connects as one with the K end of the 5th flat board 13, Siping City's plate 6 and the 5th dull and stereotyped 13 mutual vertical settings, the 6th flat board 20 respectively with Siping City's plate 6 and the 13 mutual vertical settings of the 5th flat board; First dull and stereotyped the 1 and the 5th flat board 13 is arranged in parallel, and second dull and stereotyped the 8 and the 6th flat board 20 is arranged in parallel, and the 3rd flat board 16 and Siping City's plate 6 are arranged in parallel; The first Piezoelectric Ceramic side chain 4 and the second Piezoelectric Ceramic side chain 15 are arranged in parallel, first end 5 of the first Piezoelectric Ceramic side chain 4 is connected with Siping City's plate 6 respectively with first end 7 of the second Piezoelectric Ceramic side chain 15, and second end 19 of the first Piezoelectric Ceramic side chain 4 is connected with the 3rd flat board 16 respectively with second end 17 of the second Piezoelectric Ceramic side chain 15; The 3rd Piezoelectric Ceramic side chain 3 and the 4th Piezoelectric Ceramic side chain 21 are arranged in parallel, first end 2 of the 3rd Piezoelectric Ceramic side chain 3 is connected with first flat board 1 respectively with first end 22 of the 4th Piezoelectric Ceramic side chain 21, and second end 9 of the 3rd Piezoelectric Ceramic side chain 3 is connected with the 5th flat board 13 respectively with second end 14 of the 4th Piezoelectric Ceramic side chain 21; The 5th Piezoelectric Ceramic side chain 24 and the 6th Piezoelectric Ceramic side chain 11 are arranged in parallel, first end 23 of the 5th Piezoelectric Ceramic side chain 24 is connected with the 6th flat board 20 respectively with first end 18 of the 6th Piezoelectric Ceramic side chain 11, and second end 12 of the 5th Piezoelectric Ceramic side chain 24 is connected with second flat board 8 respectively with second end 10 of the 6th Piezoelectric Ceramic side chain 11; Described each Piezoelectric Ceramic side chain is formed by first flexible hinge 41, straight line micrometric displacement kinematic pair 42, laminated piezoelectric actuator 44 and second flexible hinge 45, first flexible hinge 41 connects as one with an end of straight line micrometric displacement kinematic pair 42, second flexible hinge 45 connects as one with the other end of straight line micrometric displacement kinematic pair 42, the centre of straight line micrometric displacement kinematic pair 42 has penetrating space 43, and laminated piezoelectric actuator 44 is arranged in the described penetrating space 43 and with straight line micrometric displacement kinematic pair 42 fixedlys connected; Described motion platform and base are buckled together mutually and are the square shape, and six Piezoelectric Ceramic side chains are in the square.

Motion platform of the present invention and base are made up of three vertical planes respectively, promptly are equivalent in six planes of square three and have public vertex planar combination body.Six Piezoelectric Ceramic side chains are parallel between base and the motion platform, the motion of output straight line micrometric displacement, six Piezoelectric Ceramic side chains are divided into three groups, every group comprise two be parallel to each other, the Piezoelectric Ceramic side chain of symmetric arrangement, be arranged vertically mutually in twos between three groups.Motion platform of the present invention has six-freedom degree, owing to adopt quadrature arrangement, can realize the decoupling zero between the motion platform six-freedom degree, kinematic accuracy height.Platform and base all are cube half surface in addition, be buckled together mutually and make entire mechanism be the square shape, six Piezoelectric Ceramic side chains are among the square, so compact conformation, it is little to take up room, and is applicable to the application scenario that micropositioner precision, volume is had strict demand.

Description of drawings

Fig. 1 is an one-piece construction synoptic diagram of the present invention, Fig. 2 is the structural representation of motion platform, and Fig. 3 is the structural representation of base, and Fig. 4 is the structural representation of Piezoelectric Ceramic side chain, Fig. 5 is that the coordinate system of micro displacement workbench is provided with figure, and Fig. 6 is the structural scheme of mechanism of Piezoelectric Ceramic side chain correspondence.

Embodiment

Embodiment one: (referring to Fig. 1～Fig. 3) present embodiment is made up of base, motion platform and six Piezoelectric Ceramic side chains, base is made up of first flat board 1, second the dull and stereotyped the 8 and the 3rd dull and stereotyped 16, the Q end of first flat board 1 connects as one with the R end of second flat board 8, the P end of the 3rd flat board 16 connects as one with the N end of first flat board 1, the T end of the 3rd flat board 16 connects as one with the S end of second flat board 8, first dull and stereotyped 1 with the second dull and stereotyped 8 mutual vertical settings, the 3rd flat board 16 respectively with first flat board 1 and the 8 mutual vertical settings of second flat board; Motion platform is made up of Siping City's plate the 6, the 5th the dull and stereotyped the 13 and the 6th dull and stereotyped 20, the G end of Siping City's plate 6 connects as one with the H end of the 5th flat board 13, the L end of the 6th flat board 20 connects as one with the M end of Siping City's plate 6, the J end of the 6th flat board 20 connects as one with the K end of the 5th flat board 13, Siping City's plate 6 and the 5th dull and stereotyped 13 mutual vertical settings, the 6th flat board 20 respectively with Siping City's plate 6 and the 13 mutual vertical settings of the 5th flat board; First dull and stereotyped the 1 and the 5th flat board 13 is arranged in parallel, and second dull and stereotyped the 8 and the 6th flat board 20 is arranged in parallel, and the 3rd flat board 16 and Siping City's plate 6 are arranged in parallel; The first Piezoelectric Ceramic side chain 4 and the second Piezoelectric Ceramic side chain 15 are arranged in parallel, first end 5 of the first Piezoelectric Ceramic side chain 4 is connected with Siping City's plate 6 respectively with first end 7 of the second Piezoelectric Ceramic side chain 15, and second end 19 of the first Piezoelectric Ceramic side chain 4 is connected with the 3rd flat board 16 respectively with second end 17 of the second Piezoelectric Ceramic side chain 15; The 3rd Piezoelectric Ceramic side chain 3 and the 4th Piezoelectric Ceramic side chain 21 are arranged in parallel, first end 2 of the 3rd Piezoelectric Ceramic side chain 3 is connected with first flat board 1 respectively with first end 22 of the 4th Piezoelectric Ceramic side chain 21, and second end 9 of the 3rd Piezoelectric Ceramic side chain 3 is connected with the 5th flat board 13 respectively with second end 14 of the 4th Piezoelectric Ceramic side chain 21; The 5th Piezoelectric Ceramic side chain 24 and the 6th Piezoelectric Ceramic side chain 11 are arranged in parallel, first end 23 of the 5th Piezoelectric Ceramic side chain 24 is connected with the 6th flat board 20 respectively with first end 18 of the 6th Piezoelectric Ceramic side chain 11, and second end 12 of the 5th Piezoelectric Ceramic side chain 24 is connected with second flat board 8 respectively with second end 10 of the 6th Piezoelectric Ceramic side chain 11; Described each Piezoelectric Ceramic side chain is formed by first flexible hinge 41, straight line micrometric displacement kinematic pair 42, laminated piezoelectric actuator 44 and second flexible hinge 45, first flexible hinge 41 connects as one with an end of straight line micrometric displacement kinematic pair 42, second flexible hinge 45 connects as one with the other end of straight line micrometric displacement kinematic pair 42, the centre of straight line micrometric displacement kinematic pair 42 has penetrating space 43, and laminated piezoelectric actuator 44 is arranged in the described penetrating space 43 and with straight line micrometric displacement kinematic pair 42 fixedlys connected; Described motion platform and base are buckled together mutually and are the square shape, and six Piezoelectric Ceramic side chains are in the square.Described straight line micrometric displacement kinematic pair 42 is a flexible hinge eight-linkage mechanism formula moving sets.Described first flexible hinge 41 and second flexible hinge 45 are the spherical hinge type flexible hinge.The material of described motion platform and base is the 40Cr alloy steel, by the whole square stock of 40Cr alloy steel by rough mill, finish-milling machine-shaping.

As shown in Figure 5, set up the disjunctor coordinate system O-XYZ of platform at the square center, establish reference frame O '-X ' Y ' Z ' and be connected on the base, and the disjunctor coordinate system O-XYZ during with initial position overlaps.The micrometric displacement vector of six Piezoelectric Ceramic side chains is Δ l=[Δ l ₁, Δ l ₂, Δ l ₃, Δ l ₄, Δ l ₅, Δ l ₆] ^T, i.e. Δ l ₁=| Aa|-|Aa| ₀, Δ l ₂=| Bb|-|Bb| ₀, Δ l ₃=| Cc|-|Cc| ₀, Δ l ₄=| Dd|-|Dd| ₀, Δ l ₅=| Ee|-|Ee| ₀, Δ l ₆=| Ff|-|Ff| ₀, wherein subscript 0 expression drives the initial length of side chain.If the broad sense micrometric displacement of micropositioner correspondence is output as Δ q=[Δ x, Δ y, Δ z, Δ α, Δ β, Δ γ] ^T, the homogeneous coordinate transformation matrix T of platform can be represented with the component of Δ q:

$T=\left[\begin{array}{cccc}1& -\mathrm{\Δ\γ}& \mathrm{\Δ\β}& \mathrm{\Δx}\\ \mathrm{\Δ\γ}& 1& -\mathrm{\Δ\α}& \mathrm{\Δy}\\ -\mathrm{\Δ\β}& \mathrm{\Δ\α}& 1& \mathrm{\Δz}\\ 0& 0& 0& 1\end{array}\right]$

Since the symmetry that six movement branched chain of platform are arranged, last hinge spacing: | ab|=|cd|=|ef| also equals hinge spacing down simultaneously | and AB|=|CD|=|EF|, therefore establish | ab|=|cd|=|ef|=|AB|=|CD|=|EF|=2r.And when establishing initial position, the initial length of each side chain is l.The homogeneous coordinates that then go up hinge in the disjunctor system are:

$\left[\begin{array}{c}{x}_a\\ y_a\\ z_a\\ 1\end{array}\right]=\left[\begin{array}{c}r\\ 0\\ 1/2\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_b\\ y_b\\ z_b\\ 1\end{array}\right]=\left[\begin{array}{c}-r\\ 0\\ 1/2\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_c\\ y_c\\ z_c\\ 1\end{array}\right]=\left[\begin{array}{c}0\\ 1/2\\ r\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_d\\ y_d\\ z_d\\ 1\end{array}\right]=\left[\begin{array}{c}0\\ 1/2\\ -r\\ 1\end{array}\right],$

$\left[\begin{array}{c}{x}_e\\ y_e\\ z_e\\ 1\end{array}\right]=\left[\begin{array}{c}1/2\\ r\\ 0\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_f\\ y_f\\ z_f\\ 1\end{array}\right]=\left[\begin{array}{c}1/2\\ -r\\ 0\\ 1\end{array}\right].$

The homogeneous coordinates of hinge are under in the fixed reference system:

$\left[\begin{array}{c}{x}_A\\ y_A\\ z_A\\ 1\end{array}\right]=\left[\begin{array}{c}r\\ 0\\ -1/2\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_B\\ y_B\\ z_B\\ 1\end{array}\right]=\left[\begin{array}{c}-r\\ 0\\ -1/2\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_C\\ y_C\\ z_C\\ 1\end{array}\right]=\left[\begin{array}{c}0\\ -1/2\\ r\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_D\\ y_D\\ z_D\\ 1\end{array}\right]=\left[\begin{array}{c}0\\ -1/2\\ -r\\ 1\end{array}\right],$

$\left[\begin{array}{c}{x}_E\\ y_E\\ z_E\\ 1\end{array}\right]=\left[\begin{array}{c}-1/2\\ r\\ 0\\ 1\end{array}\right],$ $\left[\begin{array}{c}{x}_F\\ y_F\\ z_F\\ 1\end{array}\right]=\left[\begin{array}{c}-1/2\\ -r\\ 0\\ 1\end{array}\right].$

The length expression formula of listing first side chain is ${\left(\right|T\stackrel{\mathrm{\ρ}}{\mathrm{\α}}-\stackrel{\mathrm{\ρ}}{A}\left|\right)}^2={(l+\mathrm{\Δ}{l}_1)}^2,$ Wherein

With

Represent the homogeneous coordinates vector that a and A are ordered respectively.Following formula specifically expands into:

${|\left[\begin{array}{cccc}1& -\mathrm{\Δ\γ}& \mathrm{\Δ\β}& \mathrm{\Δx}\\ \mathrm{\Δ\γ}& 1& -\mathrm{\Δ\α}& \mathrm{\Δy}\\ -\mathrm{\Δ\β}& \mathrm{\Δ\α}& 1& \mathrm{\Δz}\\ 0& 0& 0& 1\end{array}\right]\left[\begin{array}{c}r\\ 0\\ 1/2\\ 1\end{array}\right]-\left[\begin{array}{c}r\\ 0\\ -1/2\\ 1\end{array}\right]|}^2={(l+\mathrm{\Δ}{l}_1)}^2$

Following formula is further write as:

${(\frac{1}{2}\mathrm{\Δ\β}+\mathrm{\Δx})}^2+{(\mathrm{r\Δ\γ}-\frac{1}{2}\mathrm{\Δ\α}+\mathrm{\Δy})}^2+{(-\mathrm{r\Δ\β}+l+\mathrm{\Δz})}^2={(l+{\mathrm{\Δl}}_1)}^2$

With following formula expansion, abbreviation and ignore and contain Δ β Δ x, (Δ β) ², (Δ x) ², (Δ γ) ²Get Deng the infinite event of second order:

-2rlΔβ+2lΔz+l ²＝l ²+2lΔl ₁

The following formula both sides deduct l simultaneously ², again with getting divided by l:

Δl ₁＝-rΔβ+Δz

In like manner can be in the hope of the micrometric displacement of other little driving side chain:

Δl ₂＝rΔβ+Δz；

Δl ₃＝-rΔα+Δy；

Δl ₄＝rΔα+Δy；

Δl ₅＝-rΔγ+Δx

Δl ₆＝rΔγ+Δx

By the above various broad sense micrometric displacement that can obtain platform output:

$\mathrm{\&Delta;x}=\frac{1}{2}({\mathrm{\&Delta;<figure-callout\; id="5"\; label="l"\; filenames="C2008100641550011H1.png"\; state="\{\{state\}\}">l</figure-callout>}}_5+{\mathrm{\&Delta;l}}_6)$

$\mathrm{\&Delta;y}=\frac{1}{2}({\mathrm{\&Delta;<figure-callout\; id="3"\; label="l"\; filenames="C2008100641550011H1.png"\; state="\{\{state\}\}">l</figure-callout>}}_3+{\mathrm{\&Delta;l}}_4)$

$\mathrm{\&Delta;z}=\frac{1}{2}({\mathrm{\&Delta;l}}_1+{\mathrm{\&Delta;l}}_2)$

$\mathrm{\&Delta;\&alpha;}=\frac{1}{2r}({\mathrm{\&Delta;l}}_4-{\mathrm{\&Delta;l}}_3)$

$\mathrm{\&Delta;\&beta;}=\frac{1}{2r}({\mathrm{\&Delta;l}}_2-{\mathrm{\&Delta;l}}_1)$

$\mathrm{\&Delta;\&gamma;}=\frac{1}{2r}({\mathrm{\&Delta;l}}_6-{\mathrm{\&Delta;l}}_5)$

Comprehensive above formula can get:

$\left[\begin{array}{c}\mathrm{\&Delta;x}\\ \mathrm{\&Delta;y}\\ \mathrm{\&Delta;z}\\ \mathrm{\&Delta;\&alpha;}\\ \mathrm{\&Delta;\&beta;}\\ \mathrm{\&Delta;\&gamma;}\end{array}\right]=\frac{1}{2}\left[\begin{array}{cccccc}0& 0& 0& 0& 1& 1\\ 0& 0& 1& 1& 0& 0\\ 1& 1& 0& 0& 0& 0\\ 0& 0& -\frac{1}{r}& \frac{1}{r}& 0& 0\\ -\frac{1}{r}& \frac{1}{r}& 0& 0& 0& 0\\ 0& 0& 0& 0& -\frac{1}{r}& \frac{1}{r}\end{array}\right]\left[\begin{array}{c}{\mathrm{\&Delta;l}}_1\\ \mathrm{\&Delta;}{\mathrm{<figure-callout\; id="2"\; label="l"\; filenames="C2008100641550011H1.png"\; state="\{\{state\}\}">l</figure-callout>}}_2\\ \mathrm{\&Delta;}{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="C2008100641550011H1.png"\; state="\{\{state\}\}">l</figure-callout>}}_3\\ \mathrm{\&Delta;}{\mathrm{<figure-callout\; id="4"\; label="l"\; filenames="C2008100641550011H1.png,C2008100641550013H1.png"\; state="\{\{state\}\}">l</figure-callout>}}_4\\ \mathrm{\&Delta;}{\mathrm{<figure-callout\; id="5"\; label="l"\; filenames="C2008100641550011H1.png"\; state="\{\{state\}\}">l</figure-callout>}}_5\\ \mathrm{\&Delta;}{\mathrm{<figure-callout\; id="6"\; label="l"\; filenames="C2008100641550011H1.png,C2008100641550011H2.png"\; state="\{\{state\}\}">l</figure-callout>}}_6\end{array}\right]$

Following formula can be write a Chinese character in simplified form into Δ q=J Δ l, and wherein J is mechanism's Jacobi matrix.Micromotion platform is only relevant to the micrometric displacement of the little driving side chain E-e, the F-f that arrange with X to micrometric displacement Δ x at X as can be known by J.Same Y is only relevant to the micrometric displacement of the little driving side chain C-c, the D-d that arrange with Y to micrometric displacement Δ y, and Z is only relevant to the micrometric displacement of the little driving side chain A-a, the B-b that arrange with Z to micrometric displacement Δ z, drives the decoupling zero that just can realize X, Y, Z motion in the manner described above.

The material of described Piezoelectric Ceramic side chain is the 65Mn spring steel.Adopt monolithic construction, adopt finish turning processing both sides flexible hinge earlier, adopt line cutting technology to process flexible hinge eight-linkage mechanism formula moving sets then, laminated piezoelectric actuator 44 is bonded in the penetrating space 43 of flexible hinge eight-linkage mechanism formula moving sets with glue (Ja-103 tackifier) behind measurement and positioning.

Embodiment two: described second flexible hinge 45 of (referring to Fig. 1, Fig. 4) present embodiment is Hooke's hinge type flexible hinge.Other is identical with embodiment one.

Embodiment three: base adopts assembling mode, promptly constitutes the independent separately processing of first flat board, 1, second dull and stereotyped the 8 and the 3rd flat board 16 of base, adopts screw to assemble together then, and other is identical with embodiment one.

Embodiment four: motion platform adopts assembling mode, promptly constitutes Siping City's plate the 6, the 5th the dull and stereotyped the 13 and the 6th dull and stereotyped 20 independent respectively processing of motion platform, adopts screw to assemble together then, and other is identical with embodiment one.

Embodiment five: the Piezoelectric Ceramic side chain adopts split-type structural, the independent separately processing of first flexible hinge 41, straight line micrometric displacement kinematic pair 42, second flexible hinge 45, fit together by gluing modes such as (Ja-103 tackifier) then, other is identical with embodiment one.

Claims (6)

1, a kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable, it is by base, motion platform and six Piezoelectric Ceramic side chains are formed, base is by first flat board (1), second flat board (8) and the 3rd flat board (16) are formed, the Q end of first flat board (1) connects as one with the R end of second flat board (8), the P end of the 3rd flat board (16) connects as one with the N end of first flat board (1), the T end of the 3rd flat board (16) connects as one with the S end of second flat board (8), the vertical setting mutually of first flat board (1) and second flat board (8), the 3rd flat board (16) respectively with first flat board (1) and the mutual vertical setting of second flat board (8); Motion platform is made up of Siping City's plate (6), the 5th flat board (13) and the 6th flat board (20), the G end of Siping City's plate (6) connects as one with the H end of the 5th flat board (13), the L end of the 6th flat board (20) connects as one with the M end of Siping City's plate (6), the J end of the 6th flat board (20) connects as one with the K end of the 5th flat board (13), the vertical setting mutually of Siping City's plate (6) and the 5th flat board (13), the 6th flat board (20) respectively with Siping City's plate (6) and the mutual vertical setting of the 5th flat board (13); First flat board (1) and the 5th flat board (13) are arranged in parallel, and second flat board (8) and the 6th flat board (20) are arranged in parallel, and the 3rd flat board (16) and Siping City's plate (6) are arranged in parallel; The first Piezoelectric Ceramic side chain (4) and the second Piezoelectric Ceramic side chain (15) are arranged in parallel, first end (5) of the first Piezoelectric Ceramic side chain (4) is connected with Siping City's plate (6) respectively with first end (7) of the second Piezoelectric Ceramic side chain (15), and second end (17) of second end (19) of the first Piezoelectric Ceramic side chain (4) and the second Piezoelectric Ceramic side chain (15) is connected with the 3rd flat board (16) respectively; The 3rd Piezoelectric Ceramic side chain (3) and the 4th Piezoelectric Ceramic side chain (21) are arranged in parallel, first end (22) of first end (2) of the 3rd Piezoelectric Ceramic side chain (3) and the 4th Piezoelectric Ceramic side chain (21) is connected with first flat board (1) respectively, and second end (14) of second end (9) of the 3rd Piezoelectric Ceramic side chain (3) and the 4th Piezoelectric Ceramic side chain (21) is connected with the 5th flat board (13) respectively; The 5th Piezoelectric Ceramic side chain (24) and the 6th Piezoelectric Ceramic side chain (11) are arranged in parallel, first end (18) of first end (23) of the 5th Piezoelectric Ceramic side chain (24) and the 6th Piezoelectric Ceramic side chain (11) is connected with the 6th flat board (20) respectively, and second end (10) of second end (12) of the 5th Piezoelectric Ceramic side chain (24) and the 6th Piezoelectric Ceramic side chain (11) is connected with second flat board (8) respectively; Described each Piezoelectric Ceramic side chain is by first flexible hinge (41), straight line micrometric displacement kinematic pair (42), laminated piezoelectric actuator (44) and second flexible hinge (45) are formed, first flexible hinge (41) connects as one with an end of straight line micrometric displacement kinematic pair (42), second flexible hinge (45) connects as one with the other end of straight line micrometric displacement kinematic pair (42), the centre of straight line micrometric displacement kinematic pair (42) has penetrating space (43), and laminated piezoelectric actuator (44) is arranged in the described penetrating space (43) and with straight line micrometric displacement kinematic pair (42) fixedlys connected; It is characterized in that: described motion platform and base are buckled together mutually and are the square shape, and six Piezoelectric Ceramic side chains are in the square.

2, a kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable according to claim 1 is characterized in that: described straight line micrometric displacement kinematic pair (42) is a flexible hinge eight-linkage mechanism formula moving sets.

3, a kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable according to claim 1 is characterized in that: described first flexible hinge (41) and second flexible hinge (45) are the spherical hinge type flexible hinge.

4, a kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable according to claim 1 is characterized in that: the material of described motion platform and base is the 40Cr alloy steel.

5, a kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable according to claim 1 is characterized in that: the material of described Piezoelectric Ceramic side chain is the 65Mn spring steel.

6, a kind of hexahedron parallel-connection decoupling six-freedom micro displacement worktable according to claim 1 is characterized in that: described second flexible hinge (45) is a Hooke's hinge type flexible hinge.

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