CN100999080A - Three-translation orthogonal decoupling parallel micromotion platform - Google Patents
Three-translation orthogonal decoupling parallel micromotion platform Download PDFInfo
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- CN100999080A CN100999080A CN 200610170999 CN200610170999A CN100999080A CN 100999080 A CN100999080 A CN 100999080A CN 200610170999 CN200610170999 CN 200610170999 CN 200610170999 A CN200610170999 A CN 200610170999A CN 100999080 A CN100999080 A CN 100999080A
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Abstract
The present invention provides a three-freedom normally-crossed uncoupling parallel micromotion platform. It includes a motion working table, a fixed platform and three branch chains connected between the motion working table and fixed platform, in which said motion working table and fixed platform respectively have three mutually normally-crossed planes. It is characterized by that every branch chain respectively includes a connecting bar and a subchain whose one end is fixedly-connected with said connecting bor. Besides, it also includes elastic rotating pairs, elastic moving pairs and microdisplacement drive device, etc. Said invention also provides the working principle of said micromotion platform and its concrete operation method.
Description
Affiliated technical field
The invention belongs to the manufacturing technology field, specifically relate to a kind of three-translation orthogonal decoupling parallel micromotion platform.
Background technology
Parallel micromotion platform has and does not have friction, no gap, response soon, characteristics such as compact conformation, so be widely used in the trickle field operation such as processing, assembling of chromosome cutting, chip manufacturing, micro electronmechanical product.
Early sixties abroad, Ellis proposes with parallel institution as the fine motion manipulator, and is applied to biotechnology and microsurgery; Magnani and Pernette have studied the flexible hinge form of revolute pair, moving sets, Hooke's hinge and ball pivot; Kallio has developed the three-freedom microoperation parallel robot; Hara and Henimi have studied planar three freedom and six-freedom micro displacement robot; Hudgens and Tesar have studied the six-freedom parallel micromanipulator, are used for the control of accurate error compensation and accurate power; Lee studies realizing a freedom degree parallel connection micromotion mechanism that moves two rotations.At present at home, BJ University of Aeronautics ﹠ Astronautics has developed the six degree of freedom connection in series-parallel micro-manipulating robot of two-stage decoupling zero and the micro-manipulating robot of freedom degree parallel connection Delta mechanism; Harbin Institute of Technology has successively developed 6-PSS and 6-SPS six-freedom parallel Stewart jiggle robot; Hebei University of Technology has developed the 6-PSS type microoperation platform of crossing decoupling structure." new type series-parallel connection jogging robot ", " six-freedom parallel decoupling-structure jogging robot ", " vernier robot with decoupled parallel five freedoms and five-axle structure ", " four-freedom four-shaft structure decoupling parallel jiggle robot ", " vernier robot with decoupled parallel three freedoms and three-axle structure " are disclosed in application number is 01128916.3,99121020.4,00100196.5,00100197.3,00100198.1 patent document.
Although many scholar's research parallel micromotions robot is arranged both at home and abroad, these achievements in research and patented technology satisfy certain kinematic accuracy requirement mostly, do not consider all how micromotion platform effectively improves the problem of its rigidity when large bearing capacity.At some ultraprecise manufacture fields,, need then to guarantee that micromotion platform has very high rigidity and bearing capacity as little processing of high hard material.Although prior art can obtain higher stiffness by the structural parameters that change micromotion platform, so often make platform by volume increase, when driving, expend unnecessary energy to produce the relative motion of flexible hinge.
Summary of the invention
The purpose of this invention is to provide a kind of three-translation orthogonal decoupling parallel micromotion platform that can overcome above-mentioned defective, have higher stiffness and bearing capacity.Its technical scheme is:
A kind of three-translation orthogonal decoupling parallel micromotion platform, comprise motion workbench, fixed platform and be connected in motion workbench and fixed platform between three side chains, wherein motion workbench and fixed platform all have three mutually orthogonal planes, it is characterized in that: every side chain includes the subchain of fixedlying connected with it in connecting rod and an end, wherein every subchain contains 3 elasticity revolute pairs that pivot center is parallel to each other, fixedly connected in one of three orthogonal planes of the subchain other end and motion workbench, the connecting rod other end is the resilient movement pair that is distributed on three orthogonal planes of fixed platform with being connected of fixed platform, and the secondary driving direction of resilient movement is parallel to the axis of 3 elasticity revolute pairs in the corresponding subchain, micro-displacement driving device one end is connected with resilient movement is secondary, and the other end and fixed platform are affixed.
Described three-translation orthogonal decoupling parallel micromotion platform, every side chain comprises one or more subchain.
Described three-translation orthogonal decoupling parallel micromotion platform, many subchains of every side chain are being that the plane of symmetry is symmetrical through connecting rod axle center in this side chain and the vertical face of motion workbench orthogonal plane that is connected with this side chain.
The present invention compared with prior art, its advantage is: (1) adopts flexible hinge as driving-chain, by the side chain quadrature arrangement, can realize full decoupled Three Degree Of Freedom translation, has advantages such as control algolithm is simple, dynamic characteristic is good; (2) three side chains that are arranged in orthogonal plane can contain many subchains, have strengthened the rigidity and the bearing capacity of micromotion platform greatly, satisfy the requirement of Precision Machining and location under the high-bearing capacity.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention.
The specific embodiment
1, micro-displacement driving device 2, resilient movement pair 3, connecting rod 4, elasticity revolute pair 5, motion workbench 6, fixed platform
In the embodiment shown in fig. 1: comprise motion workbench 5, fixed platform 6 and be connected in motion workbench 5 and fixed platform 6 between three side chains, wherein motion workbench 5 and fixed platform 6 all have three mutually orthogonal planes, it is characterized in that: every side chain comprises the subchain of fixedlying connected with it in connecting rod 3 and end, wherein every subchain contains 3 elasticity revolute pairs 4 that pivot center is parallel to each other, the subchain other end is fixedlyed connected with 5 three orthogonal planes of motion workbench respectively, connecting rod 3 other ends are the resilient movement pairs 2 that is distributed on 6 three orthogonal planes of fixed platform with being connected of fixed platform 6, and secondary 2 driving directions of resilient movement are parallel to the axis of 3 elasticity revolute pairs 4 in the corresponding subchain, micro-displacement driving device 1 one ends are connected with resilient movement secondary 2, and the other end and fixed platform 6 are affixed.
Claims (3)
1, a kind of three-translation orthogonal decoupling parallel micromotion platform, comprise motion workbench (5), fixed platform (6) and be connected in motion workbench (5) and fixed platform (6) between three side chains, wherein motion workbench (5) and fixed platform (6) all have three mutually orthogonal planes, it is characterized in that: every side chain includes the subchain of fixedlying connected with it in connecting rod (3) and an end, wherein every subchain contains 3 elasticity revolute pairs (4) that pivot center is parallel to each other, fixedly connected in one of (5) three orthogonal planes of the subchain other end and motion workbench, connecting rod (3) other end is the resilient movement pair (2) that is distributed on (6) three orthogonal planes of fixed platform with being connected of fixed platform (6), and resilient movement pair (2) driving direction is parallel to the axis of 3 the elasticity revolute pairs (4) in the corresponding subchain, micro-displacement driving device (1) one end is connected with resilient movement pair (2), and the other end and fixed platform (6) are affixed.
2, three-translation orthogonal decoupling parallel micromotion platform according to claim 1 is characterized in that: every side chain comprises one or more subchain.
3, three-translation orthogonal decoupling parallel micromotion platform according to claim 1 and 2 is characterized in that: many subchains of every side chain are being that the plane of symmetry is symmetrical through connecting rod (3) axle center in this side chain and the vertical face of motion workbench (5) orthogonal plane that is connected with this side chain.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB200610170999XA CN100484728C (en) | 2006-12-28 | 2006-12-28 | Three-translation orthogonal decoupling parallel micromotion platform |
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| CNB200610170999XA CN100484728C (en) | 2006-12-28 | 2006-12-28 | Three-translation orthogonal decoupling parallel micromotion platform |
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| CN100999080A true CN100999080A (en) | 2007-07-18 |
| CN100484728C CN100484728C (en) | 2009-05-06 |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101531002B (en) * | 2009-04-16 | 2010-11-03 | 上海交通大学 | Micro-nano working platform of four-dimensional mobile orthogonal structure |
| CN101733754B (en) * | 2009-12-04 | 2011-05-04 | 山东理工大学 | Three-dimensionally moved decoupling micro-manipulating robot |
| CN104234731A (en) * | 2014-09-10 | 2014-12-24 | 山东科技大学 | Novel parallel connection type hydraulic support frame and application of novel parallel connection type hydraulic support frame |
| CN105196279A (en) * | 2015-11-11 | 2015-12-30 | 山东理工大学 | Three-translational-motion decoupling parallel robot with ultra-short branched chain |
| CN105643604A (en) * | 2016-03-25 | 2016-06-08 | 西安电子科技大学 | Four-freedom-degree micro motion soft system |
| CN106313003A (en) * | 2016-09-13 | 2017-01-11 | 浙江理工大学 | Large-stroke and high-precision three-moving-freedom-degree flexible parallel mechanism |
| CN108858154A (en) * | 2018-08-24 | 2018-11-23 | 西安工程大学 | A kind of angle platform parallel institution with Three Degree Of Freedom |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| CN109986542A (en) * | 2019-05-09 | 2019-07-09 | 中国科学院宁波材料技术与工程研究所 | A kind of hard and soft mixed type power control end effector of pneumoelectric combination drive |
| CN110883761A (en) * | 2019-11-18 | 2020-03-17 | 东北大学 | Six-degree-of-freedom motion decoupling compliant mechanism |
| CN112405108A (en) * | 2020-09-17 | 2021-02-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN113183137A (en) * | 2020-06-28 | 2021-07-30 | 中国科学院长春光学精密机械与物理研究所 | Parameter calibration device and method for six-degree-of-freedom parallel mechanism |
| CN114147690A (en) * | 2021-12-07 | 2022-03-08 | 长春工业大学 | Two-degree-of-freedom parallel adjustment platform mechanism based on four-rod tensioning overall structure |
-
2006
- 2006-12-28 CN CNB200610170999XA patent/CN100484728C/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101531002B (en) * | 2009-04-16 | 2010-11-03 | 上海交通大学 | Micro-nano working platform of four-dimensional mobile orthogonal structure |
| CN101733754B (en) * | 2009-12-04 | 2011-05-04 | 山东理工大学 | Three-dimensionally moved decoupling micro-manipulating robot |
| CN104234731A (en) * | 2014-09-10 | 2014-12-24 | 山东科技大学 | Novel parallel connection type hydraulic support frame and application of novel parallel connection type hydraulic support frame |
| CN105196279A (en) * | 2015-11-11 | 2015-12-30 | 山东理工大学 | Three-translational-motion decoupling parallel robot with ultra-short branched chain |
| CN105196279B (en) * | 2015-11-11 | 2020-07-03 | 山东理工大学 | Three-translation decoupling parallel robot with ultra-short branched chain |
| CN105643604A (en) * | 2016-03-25 | 2016-06-08 | 西安电子科技大学 | Four-freedom-degree micro motion soft system |
| CN106313003A (en) * | 2016-09-13 | 2017-01-11 | 浙江理工大学 | Large-stroke and high-precision three-moving-freedom-degree flexible parallel mechanism |
| CN108858154A (en) * | 2018-08-24 | 2018-11-23 | 西安工程大学 | A kind of angle platform parallel institution with Three Degree Of Freedom |
| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109256175B (en) * | 2018-11-08 | 2023-04-28 | 江南大学 | High-precision large-stroke space translation micro-positioning platform |
| CN109986542A (en) * | 2019-05-09 | 2019-07-09 | 中国科学院宁波材料技术与工程研究所 | A kind of hard and soft mixed type power control end effector of pneumoelectric combination drive |
| CN110883761A (en) * | 2019-11-18 | 2020-03-17 | 东北大学 | Six-degree-of-freedom motion decoupling compliant mechanism |
| CN110883761B (en) * | 2019-11-18 | 2022-11-25 | 东北大学 | Six-degree-of-freedom motion decoupling compliant mechanism |
| CN113183137A (en) * | 2020-06-28 | 2021-07-30 | 中国科学院长春光学精密机械与物理研究所 | Parameter calibration device and method for six-degree-of-freedom parallel mechanism |
| CN112405108A (en) * | 2020-09-17 | 2021-02-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN114147690A (en) * | 2021-12-07 | 2022-03-08 | 长春工业大学 | Two-degree-of-freedom parallel adjustment platform mechanism based on four-rod tensioning overall structure |
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| CN100484728C (en) | 2009-05-06 |
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