CN115224975A - Orthogonal decoupling three-axis nano micro-motion platform applied to inverted load - Google Patents
Orthogonal decoupling three-axis nano micro-motion platform applied to inverted load Download PDFInfo
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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Abstract
The invention discloses an orthogonal decoupling three-axis nano micro-motion platform applied to inverted loads, which belongs to the technical field of nano micro-motion platforms and comprises a rotor platform, wherein the rotor platform is connected with a plurality of single-axis driving units, and the plurality of single-axis driving units are orthogonally arranged; the single-shaft driving unit comprises a flexible guide beam connected with the rotor platform, and the flexible guide beam is connected with the piezoelectric ceramic actuator; the piezoelectric ceramic actuator comprises an asymmetric rigidity flexible structure, and the asymmetric rigidity flexible structure is fixedly connected with piezoelectric ceramic. The device can realize high-consistency ultrahigh-precision micro-motion under an inverted load of three orthogonal degrees of freedom (XY Z) in space, and is a three-dimensional nano micro-motion mechanism for ultra-precision positioning and space scanning applied to load inversion.
Description
Technical Field
The invention belongs to the technical field of nano micro motion platforms, and particularly relates to an orthogonal decoupling three-axis nano micro motion platform applied to inverted loads.
Background
The statements herein merely provide background information related to the present disclosure and may not necessarily constitute prior art.
With the rapid development in the fields of biomedicine, semiconductor equipment, micromanipulation and the like, higher requirements and challenges are provided for ultra-high precision micro-motion platforms. In the fields of semiconductor equipment, micro-scanning imaging and the like, the conventional micro-motion platform is difficult to meet the requirements of multi-motion freedom degree dynamic consistency and special inverted load, the integration level of a motion system is low, and the light weight and the miniaturization of the structure cannot be realized. The design of the triaxial parallel orthogonal decoupling nano micromotion platform oriented to different application requirements has important theoretical and engineering practical significance.
A three-axis parallel orthogonal decoupling nano micromotion platform is a micromotion system which realizes multiple motion directions by adopting the cooperation of a flexible guide mechanism and a flexible amplification mechanism. The flexible mechanism is designed in a certain shape, and the elastic deformation of the material is utilized to realize the motion characteristics of no friction and high rigidity. Compared with a series multi-axis motion platform, the parallel multi-axis micro motion platform is more compact in structure, and the symmetrical structural design can keep the motion performance in different motion directions consistent. However, the existing spatial decoupling nano micromotion platform is complex in structural design, poor in decoupling performance, high in load requirement and incapable of bearing inverted loads.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an orthogonal decoupling three-axis nano micromotion platform applied to an inverted load, the device can realize high-consistency ultrahigh-precision micromotion under the inverted load of three-degree-of-freedom (X Y Z) of space orthogonal, and the device is a three-dimensional nano micromotion mechanism for ultra-precision positioning and space scanning applied to load inversion.
In order to achieve the purpose, the invention is realized by the following technical scheme:
in a first aspect, the invention provides an orthogonal decoupling three-axis nano micro-motion platform applied to inverted loads, which comprises a rotor platform, wherein the rotor platform is connected with a plurality of single-axis driving units, and the plurality of single-axis driving units are orthogonally arranged; the single-shaft driving unit comprises a flexible guide beam connected with the rotor platform, and the flexible guide beam is connected with the piezoelectric ceramic actuator; the piezoelectric ceramic actuator comprises an asymmetric rigidity flexible structure, and the asymmetric rigidity flexible structure is fixedly connected with the piezoelectric ceramic.
As a further technical scheme, one side of the asymmetric rigidity flexible structure is a strong rigidity structure, and the other side of the asymmetric rigidity flexible structure is a weak rigidity structure.
As a further technical scheme, the piezoelectric ceramic is arranged between a strong rigidity structure and a weak rigidity structure.
As a further technical scheme, the strong rigidity structure is a straight beam type hinge, and the straight beam type hinge forms a rotary kinematic pair; the weak stiffness structure is a bent spring hinge.
As a further technical scheme, an accommodating space is formed in the middle of the asymmetric rigidity flexible structure, and the piezoelectric ceramic is installed in the accommodating space.
As a further technical scheme, one end of the piezoelectric ceramic is bonded with a flexible adapter.
As a further technical scheme, one end of each flexible guide beam is symmetrically arranged on two sides of the rotor platform, and the other end of each flexible guide beam is connected with the asymmetric rigidity flexible structure.
As a further technical scheme, flexible guide beams of a plurality of single-shaft driving units are orthogonally arranged in space; the flexible guide beams are arranged in parallel in pairs at two sides of the asymmetric rigid flexible structure.
As a further technical scheme, guide grooves are formed in pairwise symmetric surfaces of the rotor platform in the space orthogonal direction so that the flexible guide beams can move along the guide grooves.
As a further technical scheme, the single-shaft driving unit is fixed on a fixed shell, a positioning surface is arranged at the bottom of the fixed shell corresponding to the single-shaft driving unit, and the fixed shell is fixedly connected with the asymmetric rigid flexible structure.
The beneficial effects of the invention are as follows:
according to the three-axis nanometer micro-motion platform, the asymmetric rigidity flexible structure connected with the piezoelectric ceramics adopts an asymmetric rigidity deformation lever amplification mechanism, and the influence of a load force on a tensile force generated by the piezoelectric ceramics under the condition that the platform is inversely loaded is effectively responded. When the platform is used in an inverted mode, the load force borne by the platform is downward tensile force, the force is perpendicular to the load force sensitive directions of the XY two shafts and directly acts on the load force sensitive direction of the Z shaft, the sensitive load tensile force is converted into insensitive load pressure through the design of the single-shaft driving unit, and the application of inverted load is achieved.
According to the triaxial nano micro-motion platform, the flexible guide beams are arranged in a spatial orthogonal manner, voltage is input to the piezoelectric ceramic of one uniaxial driving unit, so that displacement output in the direction of the axis can be obtained, and the other two coupling axes realize mechanical decoupling through the flexible guide beams arranged in the orthogonal manner, so that three-degree-of-freedom spatial mechanical decoupling is effectively realized.
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The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
FIG. 1 is a schematic diagram of the internal structure of the nano-micro platform according to the present invention;
FIG. 2 is a schematic diagram of the overall structure of the nano-micro platform of the present invention;
FIG. 3 is a schematic view of a single axis drive unit of the present invention;
FIG. 4 is a schematic view of the single shaft drive principle of the present invention;
in the figure: the space or size between each other is exaggerated to show the position of each part, and the schematic diagram is only used for illustration;
the piezoelectric actuator comprises a fixed shell 1, piezoelectric ceramics 2, an asymmetric rigidity flexible structure 3, a flexible guide beam 4, a rotor platform 5, a flexible adapter 6, a bent spring hinge 3-1 and a rotary motion pair 3-2.
Detailed Description
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
In a typical embodiment of the present invention, as shown in fig. 1, an orthogonal decoupling three-axis nano micro-motion platform for inverted load application is provided, where fig. 1 is a schematic diagram of an internal structure, and fig. 2 is an overall structure; the piezoelectric actuator mainly comprises a fixed shell 1, three pairs of flexible guide beams 4, a rotor platform 5 and three piezoelectric ceramic actuators.
The piezoelectric ceramic actuators comprise piezoelectric ceramics 2, an asymmetric rigidity flexible structure 3 and a flexible connecting piece 6, and the three piezoelectric ceramic actuators are respectively arranged at corresponding positions of the fixed shell 1. A unipolar drive unit is constituteed to piezoceramics 2, asymmetric rigidity flexible construction 3, flexible guide beam 4, flexible adaptor 6, in this scheme, forms three unipolar drive unit, and three unipolar drive unit is the quadrature and arranges.
Each single-shaft driving unit is provided with a pair of flexible guide beams 4, one ends of the flexible guide beams 4 are symmetrically arranged on two sides of a rotor platform 5, and the other ends of the flexible guide beams are connected with the asymmetric rigidity flexible structure 3 of the piezoelectric ceramic actuator.
In the specific setting, the flexible guide beams 4 are arranged at two sides of the upper end of the asymmetric rigid flexible structure 3.
The flexible guide beams of the three single-shaft driving units are arranged orthogonally in space.
The rotor platform 5 is of a cubic structure, and guide grooves and fixing threaded holes are formed in pairwise symmetrical surfaces in the space orthogonal direction and used for moving and positioning the flexible guide beams.
The flexible guide beam is of a long rod type structure, fixing through holes are formed in two ends of the flexible guide beam, one end of the flexible guide beam is fastened on the asymmetric rigidity flexible structure through screws, the other end of the flexible guide beam is fixed on the rotor platform through screws, and two sides of the asymmetric rigidity flexible structure are arranged in parallel in pairs.
In this embodiment, the flexible guide beam is made of a flexible structure.
In order to avoid that inverted load force can be converted into tensile force applied to piezoelectric ceramics in the design of a conventional piezoelectric actuator to cause damage and positioning failure of the piezoelectric ceramics, each piezoelectric ceramic actuator is provided with the piezoelectric ceramics 2, an asymmetric rigidity flexible structure 3 and a flexible adapter 6, the asymmetric rigidity flexible structure adopts a deformation lever displacement amplification mechanism with asymmetric rigidity, a straight beam type hinge is adopted as a rotary motion pair, a bent type spring hinge is adopted as a piezoelectric ceramic pre-tightening spring, according to a driving principle diagram of figure 4, inverted load force is transmitted to the asymmetric rigidity flexible structure through a flexible guide beam in the z direction, the asymmetric rigidity flexible structure generates micro rotation under the action of the straight beam type hinge, the inverted load force is converted into pressure applied to the piezoelectric ceramics, and meanwhile, the flexible adapter is adopted to prevent the piezoelectric ceramics from bearing tangential force.
The asymmetric rigidity flexible structure 3 intermediate position has the accommodation space, and piezoceramics 2 installs in its accommodation space, and in this embodiment, the accommodation space can set up to the rectangle deep trouth.
One side of the asymmetric rigidity flexible structure 3 is a strong rigidity structure, the other side of the asymmetric rigidity flexible structure is a weak rigidity structure, and the piezoelectric ceramic is arranged between the strong rigidity structure and the weak rigidity structure; when the asymmetric rigidity flexible structure is specifically arranged, the asymmetric rigidity flexible structure 3 comprises supports which are opposite up and down, piezoelectric ceramics are arranged in the middle between the upper support and the lower support, one sides of the two supports are connected through straight beam type hinges with high strength, the straight beam type hinges form a rotary kinematic pair 3-2, a bending type spring hinge 3-1 is arranged between the other sides of the two supports, and the bending type spring hinge is used as a piezoelectric ceramic pre-tightening spring and converts inverted load force into pressure applied to the piezoelectric ceramics. Through the design of asymmetric rigidity, the straight beam type hinge can form rotary motion under the drive of piezoelectric ceramics, and the hinge is a rotary motion pair.
One end of the piezoelectric ceramic 2 is bonded with a flexible adapter 6 to avoid the generation of tangential force, and the flexible adapter is of an I-shaped structure. When the piezoelectric ceramic 2 is installed in the middle of the asymmetric rigidity flexible structure 3, a certain pretightening force can be kept, and the piezoelectric ceramic is ensured to be installed correctly.
In this embodiment, the piezoelectric ceramic is a stacked piezoelectric ceramic. The stacked piezoelectric ceramics cannot bear tensile force, and the motion range of the micro-motion platform is expanded due to the adoption of the amplifying mechanism.
The fixed casing 1 is used for fixing the single-shaft driving unit arranged in three orthogonal directions, a positioning surface is arranged at the bottom of the corresponding single-shaft driving unit, and the fixed casing can be fastened through screw connection and can also be fixed through adhesive glue.
The fixed shell 1 is of an integral structure, a typical implementation mode can be processed through a milling machine, three positioning surfaces are arranged, and the positioning surfaces are provided with screw through holes and are respectively connected and fixed with the bottom fixing positions of the three asymmetric rigidity flexible structures 3.
In this scheme, unipolar drive unit designs for the lever amplification mechanism that warp, by straight beam type hinge as the fulcrum rotation hinge, and spring type hinge accomplishes the preparation as pretension mechanism through the cooperation of traditional machining slow walking wire cutting, and the accessible changes the mounted position of flexible guide beam, piezoceramics strong point position and adjusts optimization amplification ratio, realizes compactification and miniaturized design in engineering application.
The triaxial nano micro-motion platform greatly reduces the mass and the volume of the platform through simple structural design and compact spatial layout.
The working principle of the invention is as follows:
when the rotor platform works, the rotor platform is a moving unit, the lower surface of the rotor unit is used as a reference surface, the normal direction is used as a z axis to establish a Cartesian coordinate system, voltage is input to piezoelectric ceramics of one single-axis driving unit of three axes of XYZ, and then displacement output in the direction of the axis can be obtained, and the other two coupling axes realize mechanical decoupling through the flexible beam units which are orthogonally arranged;
when the piezoelectric ceramic inverted load mechanism is used in an inverted mode, the borne load force is downward tensile force, the force is perpendicular to the load force sensitive directions of the XY two axes and directly acts on the load force sensitive direction of the Z axis, as shown in figure 4, the inverted load force directly acts on the asymmetric rigidity mechanism through the flexible beam, and the inverted load force is converted into load pressure insensitive to piezoelectric ceramic under the action of the straight beam type hinge, so that the application of the inverted load is realized.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An orthogonal decoupling triaxial nano micromotion platform applied to inverted loads is characterized by comprising a rotor platform, wherein the rotor platform is connected with a plurality of single-axis driving units which are orthogonally arranged; the single-shaft driving unit comprises a flexible guide beam connected with the rotor platform, and the flexible guide beam is connected with the piezoelectric ceramic actuator; the piezoelectric ceramic actuator comprises an asymmetric rigidity flexible structure, and the asymmetric rigidity flexible structure is fixedly connected with piezoelectric ceramic.
2. The orthogonal decoupling three-axis nano micro platform for inverted load applications as claimed in claim 1, wherein the asymmetric stiffness compliant structure has a strong stiffness structure on one side and a weak stiffness structure on the other side.
3. The orthogonally decoupled three-axis nano micro platform for inverted load applications as claimed in claim 2, wherein said piezoelectric ceramic is interposed between a strong stiffness structure and a weak stiffness structure.
4. The orthogonal decoupling tri-axial nano micro motion platform for inverted load application as claimed in claim 2 or 3, wherein the strong stiffness structure is a straight beam type hinge forming a rotational kinematic pair; the weak stiffness structure is a bent spring hinge.
5. The orthogonal decoupling tri-axial nano micro-motion platform for inverted load application as claimed in claim 1, wherein the asymmetric stiffness flexible structure has a receiving space at a middle position, and the piezoelectric ceramic is installed in the receiving space.
6. The orthogonal decoupled tri-axial nano micro motion platform for inverted load applications as claimed in claim 1, wherein one end of said piezoelectric ceramic is bonded with a flexible adapter.
7. The orthogonal decoupling tri-axial nano micro motion platform for inverted load applications as claimed in claim 1, wherein one end of the flexible guiding beam is symmetrically installed on both sides of the mover platform, and the other end is connected with the asymmetric rigid flexible structure.
8. The orthogonal decoupling tri-axial nano micro-motion platform for inverted load applications as recited in claim 7 wherein the flexible guide beams of the plurality of uni-axial drive units are arranged in a spatially orthogonal arrangement; the flexible guide beams are arranged in parallel in pairs on two sides of the asymmetric rigidity flexible structure.
9. The orthogonal decoupled tri-axial nano micro motion platform for inverted load applications as claimed in claim 1, wherein the rotor platform has guide slots on two symmetric planes in the orthogonal spatial direction for the flexible guide beams to move along.
10. The orthogonal decoupling tri-axial nano micro motion platform for inverted load applications as claimed in claim 1, wherein the single-axis drive unit is fixed to a fixed housing, the fixed housing is provided with a positioning surface at the bottom corresponding to the single-axis drive unit, and the fixed housing is fixedly connected to the asymmetric rigid flexible structure.
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| CN202210870553.7A CN115224975A (en) | 2022-07-22 | 2022-07-22 | Orthogonal decoupling three-axis nano micro-motion platform applied to inverted load |
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2022
- 2022-07-22 CN CN202210870553.7A patent/CN115224975A/en active Pending
Patent Citations (10)
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| CN1377757A (en) * | 2002-05-23 | 2002-11-06 | 河北工业大学 | Recombineable modular 3-6 freedom structure decoupling parallel micro moving robot |
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