CN105643604A - Four-freedom-degree micro motion soft system - Google Patents
Four-freedom-degree micro motion soft system Download PDFInfo
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- CN105643604A CN105643604A CN201610178495.6A CN201610178495A CN105643604A CN 105643604 A CN105643604 A CN 105643604A CN 201610178495 A CN201610178495 A CN 201610178495A CN 105643604 A CN105643604 A CN 105643604A
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- submissive
- platform
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- freedom
- awtar
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/003—Programme-controlled manipulators having parallel kinematics
- B25J9/0033—Programme-controlled manipulators having parallel kinematics with kinematics chains having a prismatic joint at the base
Abstract
The invention discloses a four-freedom-degree micro motion soft system. A movable platform of the system has four freedom degrees of Dx, Dy, Rx and Ry and can be applied to the specific fields of micro electro mechanical systems, ultra-precision machining and manufacturing, aerospace and the like. The system specifically and structurally comprises a soft module with two rotating freedom degrees of Rx and Ry, and an Awtar soft platform capable of achieving two horizontal movement freedom degrees of Dx and Dy. The soft module with two rotating freedom degrees is composed of soft slide hinges, a soft Hooke joint, a drive element and the like and is carried on a middle platform of an Awtar mechanism. The Awtar mechanism provides the horizontal movements of two freedom degrees of Dx and Dy through the soft slide hinges connected in parallel. The horizontal movements and the rotation are completely decoupled and can be independently driven; four supporting legs on the periphery of the soft module with two rotating freedom degrees use one type of soft slide hinges, large axial changes can be achieved; two adjacent supporting legs serve as driving supporting legs, and rotation is achieved through the drive element.
Description
Technical field
The invention belongs to MEMS (micro electro mechanical system), Ultra-precision Turning and the technical field such as manufacture, aerospace, particularly relate to a kind of submissive system of four-degree-of-freedom fine motion.
Background technology
Along with the development of science and technology, at numerous areas such as MEMS (micro electro mechanical system), Ultra-precision Turning and manufacture, medicine equipment, optical engineering, aerospace and biotechnology, micro-nano correlation technique has obtained application widely, and wherein the accurate microposition of lower-mobility and setting device are important research directions. Current researchist has developed the system with micro/nano level location and adjustment function of more and more satisfied different demands, and some has been applied in MEMS (micro electro mechanical system), large-scale integrated circuit and biology and micro-medical field also play the effect wanted emphatically. But also there is no two rotations, the ripe configuration of two translation four-degree-of-freedom precision positioning devices and design method. The friction existed in the kinematic pair of conventional rigid mechanism and gap factor, the operation of micro-nano order of magnitude precision cannot be realized effectively, and after the assembling of all multiple components, not only make mechanism's complexity be not easy to safeguard, make volume comparatively huge simultaneously and it is not easy to toward miniaturization development. Compliant mechanism is as a kind of structure utilizing material deformation to produce microbit shifting, have can one-body molded, exempt from assembling, hinge is without friction and wear, without shock and vibration and noise, the advantages such as few maintenance, high precision, these advantages can improve precision and working efficiency in practical engineering application, in conjunction with high precision actuation techniques and new diseases such as piezoelectric ceramics, the precision of four-degree-of-freedom precision positioning and setting device can be made to reach nanometer scale. At present, at home and abroad the form of disclosed 4DOF fine motion parallel institution mainly contains several as follows: Zhangjiang ripple, Zhu Tao, Wang Yuechao. the development of a kind of four-degree-of-freedom micromotion platform with nanometer positioning precision. robot, 2003,25 (3): 213��216. describe a kind of novel four-degree-of-freedom nanometer micromotion platform system, it adopts piezoelectric element to drive and achieves X, and Y, Z tri-translations and �� (around transverse axis) rotate totally four degree of freedom.Duan Jianguo, Guo Zong and, Wang Kejie. novel four-freedom parallel mechanism structure and motion analysis. Shandong Technology Univ's journal (natural science edition), 2008,22 (1): 23��27. propose a kind of four-freedom parallel mechanism, the motion that totally four degree of freedom are rotated in X, Y, Z tri-direction translationals and �� (around transverse axis) direction can be realized. Zhao Ran. the design of four-degree-of-freedom 4-RRUR parallel micro-moving robot and basic property research. University On The Mountain Of Swallows's Master's thesis, 2010. propose the four-freedom parallel mechanism configuration that can realize X, Y, Z tri-direction translationals and rotate around Z axle. ZhenyuH, ZhixuZ, ZhihuaX.DimensionalSynthesisofa4-DOFHybridDrivingPlatfor m.AppliedMechanicsandMaterials, 2014, 441:543��547. have carried out the dimension synthesis of the four-freedom parallel mechanism that pneumatic unit drives, CaixiaF, HongzhaoL, GexiaY, etal.ANovel2T2R4-DOFParallelManipulator.2011FourthIntern ationalSymposiumonKnowledgeAcquisitionandModeling, 8-9Oct.2011 [C] .LosAlamitos, CA, USA:IEEEComputerSociety, 2011.5��8. propose a kind of parallel institution configuration that can realize two rotation two translations, but every bar drives the hinge of branch too much, precise jiggle operation can not be realized. QinchuanL, ZhenH.Typesynthesisof4-DOFparallelmanipulators [A] .IEEEInternationalConferenceonRoboticsandAutomation.IEEE ICRA2003ConferenceProceedings, 14-19Sept.2003 [C] .Piscataway, NJ, USA:IEEE, the configuration of four-freedom parallel mechanism has been carried out comprehensively by 2003.755��760., but does not comprise configuration proposed by the invention.
The 4DOF mechanism that document proposes above has the following disadvantages: 1) can not realize X, Y two translation and realize around X, Y two rotation simultaneously; 2) every bar drives the hinge of branch too much, it is difficult to realize the ultrahigh precision inching operation of mechanism.
Summary of the invention
It is an object of the invention to provide a kind of submissive system of four-degree-of-freedom fine motion, it is intended to solve the existence due to friction and gap in the kinematic pair of the conventional rigid mechanism equipment such as numerically-controlled machine, the operation of micro-nano order of magnitude precision cannot be realized effectively, and all multiple components assemble after not only make mechanism's complexity be not easy to safeguard, make volume comparatively huge simultaneously and be not easy to the problem of miniaturized application.
The present invention realizes like this, a kind of submissive system of four-degree-of-freedom fine motion, the described submissive system of four-degree-of-freedom fine motion comprises the submissive platform of Awtar and has the submissive module of Rx and Ry two-freedom, its mode of connection be the submissive platform of Awtar under, the submissive module of two turns of degree of freedom upper, for being connected in series;
Described two turns of submissive modules of degree of freedom are cut with scissors by submissive slippage, submissive Hooke's hinge and driving element form.
Further, described in there are two turns of degree of freedom submissive module be made up of five branches being connected mutually with pedestal and the rigid body moving platform supported, the upper end of each branch is connected mutually with rigid body moving platform; Pedestal is connected mutually with the submissive platform of Awtar, drives whole micro-rotatable platform to do translational movement at X and Y-direction by the submissive platform of Awtar; Each branch upper section be all submissive Hooke's hinge and the center of submissive Hooke's hinge is all in same level when starting position; Around four supporting leg hypomeres are submissive slippage hinges.
Further, the compliant mechanism of the micro-rotatably mounted degree of the described RxRy of having is mounted on the intermediate platform of the submissive platform of Awtar, the base of the compliant mechanism namely with micro-rotatably mounted degree is connected mutually with the moving platform in the middle of the submissive platform of Awtar, voice coil motor is loaded as driving mechanism in the pedestal space of the submissive platform of Awtar, the base rotating submissive module has groove, is the sensor device for detecting the middle actual translation displacements amount of moving platform installed on the submissive platform of Awtar.
Further, described driving element is piezoelectric ceramics or voice coil motor.
The submissive system of four-degree-of-freedom fine motion provided by the invention, is mounted on the intermediate platform of mechanism by the compliant mechanism with micro-rotatably mounted degree, it is possible to carry out independent driving respectively and realize four-degree-of-freedom fine motion, it is possible to realize the effect of micro-nano location and adjustment. The present invention utilizes submissive hook hinge and submissive slippage hinge to devise the compliant structure configuration of submissive rotating module as compliance unit, and obtains the submissive platform of whole four-degree-of-freedom with submissive platform combination; Practical engineering application can realize micro-nano location and the adjustment of 4 degree of freedom; This platform utilizing flexible unit to design avoids many Assembly of the parts complicacy of conventional rigid mechanism, is convenient to safeguard, volume is less and is convenient to miniaturized application.
Accompanying drawing explanation
Fig. 1 is the submissive system architecture schematic diagram of four-degree-of-freedom fine motion that the embodiment of the present invention provides;
In figure: 1, the submissive platform of Awtar; 2, submissive slippage hinge; 3, submissive Hooke's hinge.
Fig. 2 is the wiring layout of the flexible fine motion four-degree-of-freedom platform that the embodiment of the present invention provides.
Fig. 3 is the three-dimensional plot of the flexibility platform that the embodiment of the present invention provides.
Fig. 4 is the wiring layout with two turns of degree of freedom flexibility platforms that the embodiment of the present invention provides.
Fig. 5 is the flexible gliding hinge three-dimensional plot that the embodiment of the present invention provides.
Fig. 6 is the flexible Hooke's hinge three-dimensional plot that the embodiment of the present invention provides.
Embodiment
In order to make the object of the present invention, technical scheme and advantage clearly understand, below in conjunction with embodiment, the present invention is further elaborated. It is to be understood that specific embodiment described herein is only in order to explain the present invention, it is not intended to limit the present invention.
Below in conjunction with accompanying drawing, the application principle of the present invention is further described.
As shown in Figure 1, the submissive system of four-degree-of-freedom fine motion of the embodiment of the present invention comprises the submissive platform of Awtar 1 and has the submissive module of Rx and Ry two-freedom; Two turns of submissive modules of degree of freedom are made up of submissive slippage hinge 2, submissive Hooke's hinge 3 and driving element etc. Fig. 2 is the wiring layout of the flexible fine motion four-degree-of-freedom platform that the embodiment of the present invention provides; Fig. 3 is the three-dimensional plot of the flexibility platform that the embodiment of the present invention provides; Fig. 4 is the wiring layout with two turns of degree of freedom flexibility platforms that the embodiment of the present invention provides; Fig. 5 is the flexible gliding hinge three-dimensional plot that the embodiment of the present invention provides; Fig. 6 is the flexible Hooke's hinge three-dimensional plot that the embodiment of the present invention provides.
The described submissive module with two turns of degree of freedom is made up of five branches being connected mutually with pedestal and the rigid body moving platform supported thereof, and the upper end of each branch is connected mutually with rigid body moving platform; Pedestal is connected with Awtar submissive platform 1 phase, drives whole micro-rotatable platform to do translational movement at X and Y-direction by the submissive platform of Awtar 1. Each branch upper section be all submissive Hooke's hinge 3 and the center of submissive Hooke's hinge 3 is all in same level when starting position;Around four supporting leg hypomeres are submissive slippage hinges 2, it is possible to be perpendicular on the direction of pedestal to produce flexible motion, wherein X to an edge supporting leg and Y-direction on an edge supporting leg be master leg, and two other edge supporting leg is passive supporting leg.
The compliant mechanism with the micro-rotatably mounted degree of RxRy is mounted on the intermediate platform of the submissive platform 1 of Awtar, the base of the compliant mechanism namely with micro-rotatably mounted degree is connected mutually with the moving platform in the middle of the submissive platform 1 of Awtar, namely such DxDy translation freedoms and the micro-rotatably mounted degree of RxRy achieve full decoupled, it is possible to carry out independent driving respectively. Having used a kind of submissive slippage hinge in submissive module periphery four supporting legs of rotary freedom, it can provide the axial deformation of larger row journey. The central space of the submissive slippage hinge of master leg loads piezoelectric ceramics or voice coil motor as drive unit, voice coil motor is loaded as driving mechanism in the pedestal space of the submissive platform 1 of Awtar, and the base rotating submissive module has groove, it it is the sensor device slot milling for detecting the middle actual translation displacements amount of moving platform installed on the submissive platform of Awtar 1.
In accompanying drawing 1, the compliant mechanism with the micro-rotatably mounted degree of RxRy is mounted on the intermediate platform of Awtar mechanism. Awtar platform realizes the translation of DxDy two degree of freedom, and upper platform realizes the rotation of RxRy two degree of freedom, and this kind of layout can realize translation and rotate full decoupled, can drive separately respectively. Having used a kind of flexible gliding to cut with scissors in the periphery of upper platform four supporting legs, it can realize larger axis to change, and adjacent two, as master leg, are equipped with driving element and realize rotating.
For a person skilled in the art, it is possible to according to above technical scheme and design, make various corresponding change and distortion, and all these change and are out of shape within the protection domain that all should be included in the claims in the present invention.
Claims (4)
1. the submissive system of four-degree-of-freedom fine motion, it is characterised in that, the described submissive system of four-degree-of-freedom fine motion comprises the submissive platform of Awtar and has the submissive module of Rx and Ry degree of freedom;
The submissive platform of described Awtar, in the bottom of the submissive system of four-degree-of-freedom fine motion, has the submissive module of Rx and Ry two-freedom and is mounted on the intermediate platform of the submissive platform of Awtar, and the submissive module of Rx and Ry degree of freedom is for being connected in series;
The described submissive module of Rx and Ry degree of freedom is cut with scissors by submissive slippage, submissive Hooke's hinge and driving element form.
2. the submissive system of four-degree-of-freedom fine motion as claimed in claim 1, it is characterized in that, the described submissive module with two turns of degree of freedom is made up of five branches being connected mutually with pedestal and the rigid body moving platform supported, and the upper end of each branch is connected mutually with rigid body moving platform; Pedestal is connected mutually with the submissive platform of Awtar, drives whole micro-rotatable platform to do translational movement at X and Y-direction by the submissive platform of Awtar; Each branch upper section be all submissive Hooke's hinge and the center of submissive Hooke's hinge is all in same level when starting position; Around four supporting leg hypomeres are submissive slippage hinges.
3. the submissive system of four-degree-of-freedom fine motion as claimed in claim 1, it is characterized in that, the compliant mechanism of the micro-rotatably mounted degree of the described RxRy of having is mounted on the intermediate platform of the submissive platform of Awtar, the base of the compliant mechanism namely with micro-rotatably mounted degree is connected mutually with the moving platform in the middle of the submissive platform of Awtar, voice coil motor is loaded as driving mechanism in the pedestal space of the submissive platform of Awtar, the base rotating submissive module has groove, is the sensor device for detecting the middle actual translation displacements amount of moving platform installed on the submissive platform of Awtar.
4. the submissive system of four-degree-of-freedom fine motion as claimed in claim 1, it is characterised in that, described driving element is piezoelectric ceramics or voice coil motor.
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Cited By (12)
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| CN107052736A (en) * | 2016-12-31 | 2017-08-18 | 中国工程物理研究院激光聚变研究中心 | Self-adapting flexible dress calibration system based on mechanism |
| CN107378527A (en) * | 2017-08-18 | 2017-11-24 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN107481767A (en) * | 2017-09-11 | 2017-12-15 | 河南理工大学 | Drive component and flexible precision positioning platform |
| CN108000459A (en) * | 2018-01-15 | 2018-05-08 | 大连交通大学 | A kind of six degree of freedom series-parallel connection curved beam space compliant mechanism |
| CN109879243A (en) * | 2019-01-30 | 2019-06-14 | 宁波大学 | Two translations, the one big stroke of rotation is without the big hollow parallel piezoelectric micromotion platform of coupling |
| CN109968007A (en) * | 2019-04-07 | 2019-07-05 | 西安电子科技大学 | Submissive macro mechanical arm spiral type component is passively cooperateed with to assemble device based on main |
| CN110202507A (en) * | 2019-06-03 | 2019-09-06 | 西安飞机工业（集团）有限责任公司 | A kind of elastic ring flexible support adjustment structure and method of adjustment |
| CN112099173A (en) * | 2020-09-23 | 2020-12-18 | 湖北三江航天红阳机电有限公司 | Micro-motion optical platform |
| CN113464780A (en) * | 2021-05-25 | 2021-10-01 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
| CN114922904A (en) * | 2022-05-20 | 2022-08-19 | 哈尔滨工业大学 | Parallel decoupling xyz large-stroke positioning platform based on compliant hinge |
| WO2023201612A1 (en) * | 2022-04-18 | 2023-10-26 | 北京航空航天大学杭州创新研究院 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
| CN117260646A (en) * | 2023-11-20 | 2023-12-22 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107052736A (en) * | 2016-12-31 | 2017-08-18 | 中国工程物理研究院激光聚变研究中心 | Self-adapting flexible dress calibration system based on mechanism |
| CN107052736B (en) * | 2016-12-31 | 2019-10-11 | 中国工程物理研究院激光聚变研究中心 | Self-adapting flexible based on mechanism fills calibration system |
| CN107378527B (en) * | 2017-08-18 | 2019-06-11 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN107378527A (en) * | 2017-08-18 | 2017-11-24 | 天津大学 | A kind of micro- oscillating platform of driving type piezoelectric actuator two freedom decoupling |
| CN107481767A (en) * | 2017-09-11 | 2017-12-15 | 河南理工大学 | Drive component and flexible precision positioning platform |
| CN108000459B (en) * | 2018-01-15 | 2023-08-18 | 大连交通大学 | Six-degree-of-freedom hybrid curved beam space compliant mechanism |
| CN108000459A (en) * | 2018-01-15 | 2018-05-08 | 大连交通大学 | A kind of six degree of freedom series-parallel connection curved beam space compliant mechanism |
| CN109879243A (en) * | 2019-01-30 | 2019-06-14 | 宁波大学 | Two translations, the one big stroke of rotation is without the big hollow parallel piezoelectric micromotion platform of coupling |
| CN109879243B (en) * | 2019-01-30 | 2020-12-08 | 宁波大学 | Two-translation one-rotation large-stroke coupling-free large-hollow parallel piezoelectric micromotion platform |
| CN109968007A (en) * | 2019-04-07 | 2019-07-05 | 西安电子科技大学 | Submissive macro mechanical arm spiral type component is passively cooperateed with to assemble device based on main |
| CN110202507A (en) * | 2019-06-03 | 2019-09-06 | 西安飞机工业（集团）有限责任公司 | A kind of elastic ring flexible support adjustment structure and method of adjustment |
| CN112099173A (en) * | 2020-09-23 | 2020-12-18 | 湖北三江航天红阳机电有限公司 | Micro-motion optical platform |
| CN112099173B (en) * | 2020-09-23 | 2022-06-14 | 湖北三江航天红阳机电有限公司 | Micro-motion optical platform |
| CN113464780A (en) * | 2021-05-25 | 2021-10-01 | 哈尔滨工业大学（深圳） | Spatial three-translation-degree-of-freedom flexible positioning platform |
| WO2023201612A1 (en) * | 2022-04-18 | 2023-10-26 | 北京航空航天大学杭州创新研究院 | Six-degree-of-freedom precision motion platform based on flexible mechanism |
| CN114922904A (en) * | 2022-05-20 | 2022-08-19 | 哈尔滨工业大学 | Parallel decoupling xyz large-stroke positioning platform based on compliant hinge |
| CN114922904B (en) * | 2022-05-20 | 2024-03-19 | 哈尔滨工业大学 | Parallel decoupling xyz large-stroke positioning platform based on compliant hinge |
| CN117260646A (en) * | 2023-11-20 | 2023-12-22 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
| CN117260646B (en) * | 2023-11-20 | 2024-01-30 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
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