CN102962683A - Two-degree of freedom translational parallel high-bandwidth micro-motion platform - Google Patents
Two-degree of freedom translational parallel high-bandwidth micro-motion platform Download PDFInfo
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- 230000003071 parasitic effect Effects 0.000 abstract description 3
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Abstract
The invention relates to a two-degree of freedom translational parallel high-bandwidth micro-motion platform, which is a micro-motion platform based on piezoelectric ceramic drivers and flexible joints. The micro-motion platform comprises the piezoelectric ceramic drivers, a micro-motion platform body, a sensor fixture and non-contact capacitive sensors, the micro-motion platform body comprises driving support joints, auxiliary support joints corresponding to the driving support joints, an operating platform and a fixed bed, wherein the two driving support joints and the auxiliary support joints corresponding to the driving support joints are symmetrically distributed in pairs around the operating platform. Because the micro-motion platform adopts two parallel four-bar structures and symmetrical constraining structures, the parasitic displacement and accumulated errors of the micro-motion platform are reduced. Because the joint structure of the micro-motion platform is improved, i.e., a rectangular module is added at the middle of the primary driving support joint, the structural rigidity is greatly enhanced, so that the system has high inherent frequency, and thereby the micro-motion platform has the characteristic of two-dimensional high-bandwidth translation.
Description
Technical field
What the present invention relates to is the device of a kind of micro-nano measurement and processing technique field, specifically a kind of two-degree of freedom translation high bandwidth parallel micromotion platform based on piezoelectric ceramic actuator and flexible hinge.
Background technology
Adopt the two degrees of freedom micromotion platform of piezoelectric ceramic actuator and flexible hinge to have the advantages such as high accuracy, high-resolution, two dimensional motion, thereby use more and more extensive in micro-nano technical fields such as MEMS, ultra precise measurement, micro-nano processing, scanning probe microscopy, Optical element manufacturing and biomedical engineerings.And the processes such as the nano measurement of most, nanometer manufacturing are more and more higher for rate request, for example for the scan frequency of AFM, require to reach several kHz; For another example in large-scale nanometer manufacture process, improve constantly for the requirement of process velocity and efficient, the motion frequency of micropositioner requires to reach several kHz.Therefore, invention has high accuracy, high-resolution, and the two degrees of freedom micromotion platform that has again the high bandwidth characteristic simultaneously has great importance.
The low intrinsic frequency of micromotion platform frame for movement is the key factor of restriction closed-loop control bandwidth, therefore improves the intrinsic frequency of micromotion platform for realizing that the high bandwidth micromotion platform has larger meaning.At present at home, there is some scholars doing the research work of micromotion platform, but the micromotion platform that does not all have proposition to have the high bandwidth characteristic.Chinese application number 200510023219.4 for example, publication number CN1644329A, name is called the patent application of " small two-dimensional de-coupling platforms ", a kind of small two-dimensional de-coupling platforms is disclosed, but the intrinsic frequency of this micromotion platform is lower, and configuration is complicated, and processing cost is higher; For another example Chinese application number 200710114743.1, publication number CN101176995A, name is called the patent application of " a kind of two translationa movement and jogging platform with redundancy branched chain ", a kind of two translationa movement and jogging platform with redundancy branched chain is provided, but because the rigidity of flexible hinge is less, therefore also unavoidably produced the lower shortcoming of intrinsic frequency in this structure.
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Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of two-degree of freedom translation parallel high bandwidth micromotion platform is provided, based on piezoelectric ceramic actuator and flexible hinge micromotion platform, thereby the special adaptations that relies on the rectangular module that adds in the hinge reaches the characteristic that high rigidity characteristic has realized the high natural frequency of motion platform.Rely on simultaneously guide function and the integrally-built symmetry of two parallel hinges, reach the function of the coupling of elimination diaxon and parasitic displacement, realized the two-dimensional translation of motion platform.
The present invention is achieved by the following technical solutions, the present invention includes: piezoelectric ceramic actuator, micromotion platform main body, clamp of sensor, non-contact capacitance sensor, the micromotion platform main body comprises the driving side chain of both direction, auxiliary side chain, workbench and fixed frame, and wherein the driving side chain of both direction and auxiliary side chain are symmetrically distributed on the workbench directions X and Y-direction all around in twos.
Described driving side chain comprises: one-level drives side chain, secondary drive side chain, wherein: one-level drives the side chain two ends and fixed frame is connected, the secondary drive side chain comprises that two ends add the flexible hinge of chamfering, one end drives side chain with one-level and is connected by the rectangular module that one-level drives the side chain intermediate projections, and the other end and workbench are connected.
Described auxiliary side chain comprises: one-level is assisted side chain, the auxiliary side chain of secondary, wherein: the auxiliary side chain two ends of one-level and fixed frame are connected, the auxiliary side chain of secondary comprises that two ends add the flexible hinge of chamfering, one end is connected with the rectangular module of the auxiliary side chain of one-level by the auxiliary side chain intermediate projections of one-level, and the other end and workbench are connected.
Described workbench four direction is connected with secondary drive side chain and the auxiliary side chain of secondary of X, Y both direction respectively.
Described fixed frame assists side chain to be connected with one-level driving side chain and the one-level of X, Y both direction respectively.
Described driving side chain, auxiliary side chain, workbench and frame etc. all are to adopt integral structure, namely on a sheet of metallic material, adopt Advanced to process, need not assembling, compact conformation, volume is little, effectively avoid the generation of rigging error, satisfied high-precision requirement.
Described piezoelectric ceramic actuator is embedded in the mounting groove of micromotion platform main body, and the mid portion that head and one-level drive side chain contact, and the power of applying acts directly on and drives on the side chain, and its bottom and fixed frame are by the screw thread installation that is connected.
Described non-contact capacitance installation of sensors is in the installing hole of clamp of sensor, and it is fastening to pass through cone pin.
Described clamp of sensor is connected by screw thread and is installed on the fixed frame of micromotion platform, so that the displacement of non-contact displacement transducer testing platform.
The present invention carries out work in the following manner: take the directions X motion as example, piezoelectric ceramic actuator applies power and drives side chain in the directions X one-level, it is moved to directions X, because X-direction secondary drive side chain axial rigidity is larger, thereby drive workbench, Y-direction secondary drive side chain, the auxiliary side chain of Y-direction secondary and the auxiliary side chain of X-direction secondary together towards the directions X motion, wherein the auxiliary side chain of Y-direction secondary drive side chain and Y-direction secondary produces compatible deformation; Because the axial rigidity of the auxiliary side chain of X-direction secondary is larger, thereby drive the auxiliary side chain generation of X-direction one-level compatible deformation.Because it is larger with the auxiliary side chain axial rigidity of one-level that the X-direction one-level drives side chain, thereby the displacement of workbench is that the displacement of directions X one-level driving side chain intermediate rectangular module equates substantially with the output displacement of piezoelectric ceramic actuator substantially.
The present invention has following beneficial effect compared with prior art:
(1), the present invention makes special adaptations for hinge, one-level adds rectangular module in the middle of driving side chain and the auxiliary side chain of one-level, has increased substantially the rigidity of hinge; And by reducing the quality of workbench, so that the micromotion platform intrinsic frequency is greatly improved, front two rank intrinsic frequencies all reach 8.2KHz.With respect to the micromotion platform of prior art, this micromotion platform intrinsic frequency has improved several times.
(2), the present invention adopts two parallel hinges, and improved the rigidity of one-level hinge by the special adaptations of hinge, utilizes integrally-built symmetry, elimination diaxon coupling and parasitic displacement.
(3), the present invention has the advantages such as high rigidity,, compact conformation identical without accumulated error, two directional dynamics characteristics, volume is little with respect to serial mechanism.The present invention has the advantages such as control algolithm is simple, dynamic characteristic is good simultaneously.
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Description of drawings
Fig. 1 is the structural representation of two-degree of freedom translation parallel high bandwidth micromotion platform of the present invention;
Fig. 2 is micromotion platform directions X deformation principle schematic;
Fig. 3 is micromotion platform, piezoelectric ceramics, capacitance sensor and clamp of sensor assembling schematic diagram thereof;
Fig. 4 is the first six rank mode schematic diagram of micromotion platform.
The specific embodiment
The below elaborates to embodiments of the invention, and present embodiment is implemented under take technical solution of the present invention as prerequisite, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Such as Fig. 1,2, shown in 3, the embodiment of the invention comprises: piezoelectric ceramic actuator 24, micromotion platform main body 26, clamp of sensor 27, non-contact capacitance sensor 28, micromotion platform main body 26 comprises two identical driving side chains 1 and 3 and corresponding two identical auxiliary side chains 5 and 7, workbench 6 and fixed frame 9, wherein the auxiliary side chain 5 and 7 of the driving side chain 1 and 3 of both direction, both direction be symmetrically distributed in twos workbench around.
Described driving side chain 1 comprises: one-level drives side chain 11, secondary drive side chain 10, wherein: one-level drives side chain 11 two ends and fixed frame 9 is connected, secondary drive side chain 10 comprises that two ends add the flexible hinge 13 and 14 of chamfering, 13 with are connected an end and one-level and drive side chain 11 and be connected by the rectangular module 12 that one-level drives side chain 11 intermediate projections, the other end and workbench 6 are connected.
Described auxiliary side chain 5 comprises: one-level is assisted side chain 18, the auxiliary side chain 17 of secondary, wherein: auxiliary side chain 18 two ends of one-level and fixed frame 9 are connected, the auxiliary side chain 17 of secondary comprises that two ends add the flexible hinge 20 and 21 of chamfering, auxiliary side chain 17 1 ends of secondary are connected with the rectangular module 19 of the auxiliary side chain 18 of one-level by auxiliary side chain 18 intermediate projections of one-level, and the other end and workbench 6 are connected.
Described workbench 6 four directions respectively with the secondary drive side chain 10 of X, Y both direction with are connected, and the auxiliary side chain 17 of secondary be connected with being connected.
Described fixed frame 9 respectively with the one-level of X, Y both direction drive side chain 11 and 16, and the auxiliary side chain 18 and 23 of one-level be connected.
Described driving side chain 1 and 3, auxiliary side chain 5 and 7, workbench 6 and fixed frame 9 etc. all are to adopt integral structure, namely on a sheet of metallic material, the employing Advanced processes, need not assembling, compact conformation, volume is little, has effectively avoided the generation of rigging error, has satisfied high-precision requirement.
Described piezoelectric ceramic actuator 24 is embedded in the mounting groove of micromotion platform main body 26, and the mid portion that head and one-level drive side chain 11 contact, and the power of applying acts directly on and drives on the side chain, and its bottom and fixed frame 9 are by the screw thread installation that is connected.
Described non-contact capacitance sensor 28 is installed in the installing hole of clamp of sensor 27, and fastening by cone pin 25.
Described clamp of sensor 27 is connected by screw thread 2,4,8 on the fixed frame 9 that is installed in micromotion platform, so that the displacement of non-contact displacement transducer 28 testing platforms 6.
Such as Fig. 1, shown in 2, this example carries out work in the following manner: take directions X as example, piezoelectric ceramic actuator 24 applies power and drives side chain 11 in the directions X one-level, because the axial rigidity of directions X secondary drive side chain 10 is larger, thereby drive workbench 6, Y-direction secondary drive side chain 15, the auxiliary side chain 22 of Y-direction secondary and the auxiliary side chain 17 of X-direction secondary together towards the directions X motion, wherein Y-direction secondary drive side chain 15 produces compatible deformation with the auxiliary side chain 22 of Y-direction secondary; Because the axial rigidity of the auxiliary side chain 17 of X-direction secondary is larger, thereby drive the auxiliary side chain 18 generation compatible deformations of X-direction one-level.Because X-direction secondary drive side chain 10 is larger with auxiliary side chain 17 axial rigidities of secondary, thereby the displacement of workbench 6 basic be that the displacement of directions X one-level driving side chain intermediate rectangular module 12 equates substantially with the output displacement of piezoelectric ceramic actuator 24, in such cases, workbench 6 produces the directions X displacement.
Such as Fig. 1, shown in 2, when the piezoelectric ceramic actuator 24 that only has directions X produces displacement, because system adopts the linkage 11 and 18 of two parallelogram lindages 15 and 22, special adaptations, and integrally-built symmetry, so workbench is in Y-direction no-output coupling displacement.Add rectangular module owing to drive side chain 16 in the Y-direction one-level with auxiliary side chain 23 mid portions of one-level again, therefore so that driving side chain 16, one-level assist the rigidity of side chain 23 greatly to increase with one-level, and much larger than the rigidity of Y-direction secondary drive side chain 15 with the auxiliary side chain 22 of secondary, thereby when the auxiliary side chain 22 of secondary drive side chain in the directions X Piezoelectric Ceramic situation 15 and secondary produces compatible deformation, one-level drives side chain 16 and assists side chain 23 substantially without distortion with one-level, therefore greatly reduce the piezoelectric ceramics that acts on one-level driving side chain 16 mid portions and born moment of flexure or side force, avoided the damage of piezoelectric ceramic actuator.Simultaneously one-level drive side chain 16 and the auxiliary side chain 23 of one-level substantially without being out of shape also so that the coupling of directions X and Y-direction reduces greatly.
Such as Fig. 1, shown in 4, micromotion platform adopt one-level drive side chain 11,16 and the auxiliary side chain 18 of one-level, 23 mid portions add rectangular module, and widen one-level and drive side chain 11,16 and the auxiliary side chain 18,23 of one-level, its rigidity is increased greatly, be higher than secondary drive side chain 10,15 and the auxiliary side chain 17,22 of secondary far away, and by controlling the quality of workbench 6, so that the intrinsic frequency of micromotion platform is in high value: shown in (a), (b) among Fig. 4, front two rank intrinsic frequency reflection planes internal characteristics are respectively 8269Hz and 8281Hz; The characteristic that rear several rank intrinsic frequency reflection planes is outer, wherein the 3rd rank are reflected in the vibration characteristics of Z axis, among Fig. 4 shown in (c), be 10551Hz, quadravalence, the 5th rank and the 6th rank intrinsic frequency shown in (d), (e), (f) reflect that respectively micromotion platform is around X among Fig. 4, Y, the Z axis revolving property is respectively 20558Hz, 20571Hz, 21031Hz.Out-of-plane high natural frequency so that micromotion platform in when work, workbench 6 keeps good translation characteristic, can not have rotational angle.Thereby micromotion platform has higher dynamic characteristic, is convenient to control.
Claims (9)
1. two-degree of freedom translation parallel high bandwidth micromotion platform, comprise the micromotion platform main body, be installed in piezoelectric ceramic actuator and clamp of sensor on the micromotion platform main body, be installed in the non-contact capacitance sensor on the clamp of sensor, it is characterized in that, described micromotion platform main body comprises workbench, fixed frame and is symmetrically distributed in around the workbench two-stage drive side chain on two orthogonal X, the Y-direction and the corresponding auxiliary side chain of two-stage that described driving side chain and corresponding auxiliary side chain thereof distribute in opposite directions.
2. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1, it is characterized in that, described two-stage drive side chain is that one-level drives side chain and secondary drive side chain, wherein: one-level drives the side chain two ends and fixed frame is connected, the secondary drive side chain comprises that two ends add the flexible hinge of chamfering, described flexible hinge one end drives side chain with one-level and is connected by the rectangular module that one-level drives the side chain intermediate projections, and the other end and workbench are connected.
3. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1, it is characterized in that, the auxiliary side chain of described two-stage is the auxiliary side chain of one-level and the auxiliary side chain of secondary, wherein: the auxiliary side chain two ends of one-level and fixed frame are connected, the auxiliary side chain of secondary comprises that two ends add the flexible hinge of chamfering, described flexible hinge one end is connected with the rectangular module of the auxiliary side chain of one-level by the auxiliary side chain intermediate projections of one-level, and the other end and workbench are connected.
4. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1 is characterized in that, described workbench X, Y both direction are connected with secondary drive side chain and the auxiliary side chain of secondary of correspondence direction respectively.
5. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1 is characterized in that, described fixed frame assists side chain to be connected with one-level driving side chain and the one-level of X, Y both direction respectively.
6. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1, it is characterized in that, described piezoelectric ceramic actuator is embedded in the mounting groove of micromotion platform main body, head contacts with the mid portion that one-level drives side chain, the power of applying acts directly on and drives on the side chain, and its bottom and fixed frame are by the screw thread installation that is connected.
7. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1 is characterized in that, described non-contact capacitance installation of sensors is in the installing hole of clamp of sensor, and it is fastening to pass through cone pin.
8. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1 is characterized in that, described clamp of sensor is connected by screw thread and is installed on the fixed frame of micromotion platform.
9. two-degree of freedom translation parallel high bandwidth micromotion platform according to claim 1 is characterized in that, described driving side chain, auxiliary side chain, workbench and fixed frame adopt integral structure.
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| CN103331588A (en) * | 2013-06-18 | 2013-10-02 | 北京航空航天大学 | Micro clamp device with clamping and twisting functions |
| CN103568005A (en) * | 2013-11-18 | 2014-02-12 | 山东理工大学 | Dual-translation orthogonal decoupling parallel micro-positioning platform |
| CN104766634A (en) * | 2015-03-18 | 2015-07-08 | 苏州大学 | Piezoelectric-type two-dimension series small-volume workbench |
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| CN103568005B (en) * | 2013-11-18 | 2015-07-15 | 山东理工大学 | Dual-translation orthogonal decoupling parallel micro-positioning platform |
| CN105006254B (en) * | 2014-04-23 | 2017-05-03 | 东北大学 | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification |
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| CN104766634A (en) * | 2015-03-18 | 2015-07-08 | 苏州大学 | Piezoelectric-type two-dimension series small-volume workbench |
| CN105244061A (en) * | 2015-10-13 | 2016-01-13 | 天津大学 | Pressure-controllable large-stroke micro-locating platform based on stick-slip drive |
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| CN108400722B (en) * | 2018-04-18 | 2019-11-08 | 哈尔滨工业大学 | A kind of two-freedom Piexoelectric actuator and its motivational techniques |
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| CN109493913B (en) * | 2018-12-26 | 2021-05-11 | 杭州电子科技大学 | Two-degree-of-freedom micro-nano positioning platform |
| CN110082904A (en) * | 2019-05-31 | 2019-08-02 | 中国科学院国家天文台南京天文光学技术研究所 | High-precision and stability suitable for space environment put lens device and its working method |
| CN111377397A (en) * | 2020-03-23 | 2020-07-07 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-nano machining system and control method |
| CN114526419A (en) * | 2022-01-12 | 2022-05-24 | 山东大学 | Single-degree-of-freedom deflection platform |
| CN114526419B (en) * | 2022-01-12 | 2022-11-25 | 山东大学 | Single-degree-of-freedom deflection platform |
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