CN107356190B - A kind of two degrees of freedom micro-displacement - Google Patents
A kind of two degrees of freedom micro-displacement Download PDFInfo
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- CN107356190B CN107356190B CN201710594932.7A CN201710594932A CN107356190B CN 107356190 B CN107356190 B CN 107356190B CN 201710594932 A CN201710594932 A CN 201710594932A CN 107356190 B CN107356190 B CN 107356190B
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- displacement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The present invention provides a kind of two degrees of freedom micro-displacement, belongs to micromotion platform construction applications.Two degrees of freedom micro-displacement provided by the invention is by the way that the second part to be fixed on the base, first part is fixed on compliant mechanism, the relative displacement between the first part and the second part is adjusted by finely tuning the moving portion of compliant mechanism, compliant mechanism can be using integrated processing method, make that the fit-up gap in conventional rigid mechanism between kinematic pair is not present in compliant mechanism, entire mechanism is without friction and without lubrication, energy loss and mechanical hysteresis caused by friction and gap are avoided, the precision and service life of mechanism are greatly improved；Compliant mechanism assembly is simple, and can increase substantially guiding accuracy.
Description
Technical field
The present invention relates to micromotion platform technical field of structures, and it is flat to especially relate to a kind of self-centering micro-displacement of two degrees of freedom
Platform.
Background technique
With the gradually development of science and technology, the research field of the mankind has also carried out continuous expansion, since at first
Large-scale macrocosm gradually turns to the tiny micro-nano world, and achieves many great achievements.It is scientific and technical in recent years
Developing direction gradually is micromation and precise treatment, i.e., equipment is more small and operates more accurate, its corresponding test equipment
Measuring accuracy require it is also higher and higher.
Currently, two degrees of freedom micro-displacement is mostly made based on guide rail, guide rail is roughly divided into slide rail and rolling guide,
Wherein, slide rail frictional resistance is big, quick abrasion, and frictional coefficient is not larger, easily occurs creeping under low-speed situations existing
As, it is difficult to reach micron order and its more than precision, be not suitable for accurate guiding and positioning；Rolling guide shock resistance is poor, connects
Touching stress is big, and the dimension precision requirement of linearity and rolling element to guide rail is higher, and structure is complicated compared with slide rail, at high cost,
It is not avoided that the influence of coefficient of friction equally；No matter which kind of guide rail is all difficult to realize to automatically reply initial position and accurate above
Positioning.
Summary of the invention
The purpose of the present invention is to provide a kind of self-centering micro-displacement platform of the Novel two-freedom-degree based on compliant mechanism, with
Two degrees of freedom platform accuracy class is not high in the prior art for solution, and structure is complicated, at high cost, and is difficult to accurately reply initial position
The problem of.
The present invention is achieved by the following technical solutions:
A kind of two degrees of freedom micro-displacement, including bottom plate, compliant mechanism, the first part fixing seat, the second part are fixed
Seat, micrometer component and displacement regulating member, the compliant mechanism includes moving portion, elastic joint part and fixed part, the fixation
Portion is fixed with the bottom plate, and the moving portion is connect by the elastic joint part with the fixed part, and under external force
Relatively moved with the fixed part, the first part fixing seat fixes with the moving portion, the second part fixing seat and
The bottom plate is fixed, and the displacement regulating member is used to make the moving portion and the fixed part phase to the moving portion applied force
To movement, the micrometer component is used to measure the displacement of the moving portion.
In an alternative embodiment, the bottom plate is equipped with the first mounting hole, and the moving portion is equipped with the second mounting hole,
The first part fixing seat includes ontology and fixed the first fixed part on the body, and the ontology is mounted on described the
In one mounting hole, for first fixed part for fixing first part, the second part fixing seat is mounted on described the
In two mounting holes, the second part fixing seat is equipped with the second part mounting hole, when the moving portion is not by external force, institute
It states the first fixed part and the second part mounting hole is concentric.
In an alternative embodiment, first fixed part includes the multiple elastic card claws and fixing piece for surrounding setting, institute
Multiple claws are stated for being arranged the first part, the fixing piece is plugged between the multiple claw, so that the multiple claw
First part described in swelling.
In an alternative embodiment, the second part fixing seat is equipped with the limit concentric with the second part mounting hole
Through-hole, first fixed position keep the first part opposite with the second part in the limiting through hole.
In an alternative embodiment, the micrometer component includes inductance amesdial, the test pencil of the inductance amesdial and institute
State moving portion contact.
In an alternative embodiment, the displacement regulating member includes four, and four displacements regulating member is used respectively
In relatively moving the moving portion in different directions with the fixed part to the moving portion applied force from different directions.
In an alternative embodiment, the degree of regulation of the displacement adjustment portion is not less than submicron order.
In an alternative embodiment, the micrometer component further includes micrometer component fixing seat, the micrometer component fixing seat
It is equipped with Elastic buckle, for fixing the test pencil of the inductance amesdial.
In an alternative embodiment, the two degrees of freedom micro-displacement includes two micrometer components, two institutes
Stating the angle between the test pencil of inductance amesdial is 90 °.
In an alternative embodiment, the two degrees of freedom micro-displacement further includes warning piece and/or limited block, institute
Warning piece is stated for sounding an alarm when first part and second feature contacts, the limited block is located at the shifting
Between dynamic portion and the fixed part, for limiting the relative displacement of the moving portion Yu the fixed part.
The invention has the following beneficial effects:
Two degrees of freedom micro-displacement provided in an embodiment of the present invention is by the way that the second part to be fixed on the base, by first
Part is fixed on compliant mechanism, adjusts the phase between the first part and the second part by finely tuning the moving portion of compliant mechanism
To displacement, compliant mechanism using integrated processing method can make that kinematic pair in conventional rigid mechanism is not present in compliant mechanism
Between fit-up gap, entire mechanism without friction and without lubrication, avoid friction and gap caused by energy loss
And mechanical hysteresis, greatly improve the precision and service life of mechanism；
Compliant mechanism assembly provided in an embodiment of the present invention is simple, and can increase substantially guiding accuracy；
The measurement accuracy of inductance spotter can realize the position of submicron order by using inductance amesdial up to submicron order
Traverse measurement is set, measurement accuracy can be increased substantially, avoids the influence that dead zone generates in the measurement of differential head；
By setting warning piece and/or limited block avoid it is excessive mobile caused by the first part and the second part because by
Power damages.
Detailed description of the invention
Fig. 1 is that the embodiment of the invention provides a kind of two degrees of freedom micro-displacement and the first part and the second component assemblies
Structural schematic diagram；
Fig. 2 is compliant mechanism structural schematic diagram provided in an embodiment of the present invention；
Fig. 3 is the first part provided in an embodiment of the present invention and the first part fixed seat structure schematic diagram；
Fig. 4 is the second part fixed seat structure schematic diagram provided in an embodiment of the present invention；
Fig. 5 is micrometer component fixed seat structure schematic diagram provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings:
Referring to Fig. 1, the embodiment of the invention provides a kind of two degrees of freedom micro-displacements, including bottom plate 10, compliant mechanism
20, the first part fixing seat 30, the second part fixing seat 40, micrometer component 50 and displacement regulating member 60, it is referring to fig. 2, flexible
Mechanism 20 includes moving portion 21, elastic joint part 22 and fixed part 23, and fixed part 23 and bottom plate 10 are fixed, and moving portion 21 passes through bullet
Property interconnecting piece 22 connect with fixed part 23, and relatively moved under external force with fixed part 23, the first part fixing seat 30 with
Moving portion 21 is fixed, and for fixing the first part a, the second part fixing seat 40 and bottom plate 10 are fixed, for fixing the second part
B, displacement regulating member 60 are used to that moving portion 21 and fixed part 23 to be made to relatively move to 21 applied force of moving portion, and micrometer component is used for
Measure the displacement of the moving portion.
Specifically, in the embodiment of the present invention, the first part a can be to add table sensor stator, gyrosensor stator etc.,
Correspondingly, the second part b can be to add table sensor rotor, gyrosensor rotor etc., and the present invention is without limitation；
Two degrees of freedom micro-displacement provided in an embodiment of the present invention is by the way that the second part to be fixed on the base, by first
Part is fixed on compliant mechanism, adjusts the phase between the first part and the second part by finely tuning the moving portion of compliant mechanism
To displacement, compliant mechanism can using integrated processing method, in compliant mechanism there is no kinematic pair in conventional rigid mechanism it
Between fit-up gap, entire mechanism without friction and without lubrication, avoid friction and gap caused by energy loss and
Mechanical hysteresis greatly improves the precision and service life of mechanism.
Referring to fig. 2, bottom plate 10 is equipped with the first mounting hole 11, and moving portion 21 is equipped with and the first mounting hole 11 matched the
Two mounting holes 211, referring to Fig. 3, the first part fixing seat 30 includes ontology 31 and first fixed part 31 fixed with ontology 32, this
Body 32 is mounted in the first mounting hole 11, and for fixing the first part a, the second part fixing seat 40 is mounted on the first fixed part 31
In second mounting hole 211, referring to fig. 4, the second part fixing seat 40 is equipped with the second part mounting hole 41, when moving portion 21 is not by outer
Masterpiece used time, the first fixed part 31 and the second part mounting hole 41 are concentric.
In the case where moving portion is not by external force by keeping the first fixed part and the second part mounting hole concentric, guarantee the 1st
The self-centering in initial position of part and the second part, and when moving portion is by external force, the first part is different from the second part
When the heart, after the external force suffered by the moving portion disappears, the first part and the second part be again under the rebound effect of elastic joint part
Initial position is returned to, is kept with one heart, the repetitive positioning accuracy of micro-displacement is up to submicron order.
In the embodiment of the present invention, to ensure displacement accuracy, the degree of regulation of displacement adjustment portion 60 be not less than submicron order,
In the embodiment of the present invention, displacement regulating member 60 is microdrum.
Specifically, referring to Fig. 3, in an alternative embodiment of the invention, the first part a is hollow revolving body structure, the
One fixed part 31 includes the multiple elastic card claws 311 and a fixing piece 312 for surrounding setting, and multiple claws 311 are for being arranged first
Part a, fixing piece 312 are plugged between multiple claws 311, so that 311 the first part of swelling a of multiple claws.By the way that bullet is arranged
Fixed form of the property claw in conjunction with fixing piece improves operating efficiency convenient for the dismounting of the first part a.
Referring to fig. 4, the second part fixing seat 40 is equipped with the limiting through hole 42 concentric with the second part mounting hole 41, and first is solid
Determine portion 31 to be located in limiting through hole 42, and keeps the first part a opposite with the second part b.By the way that limit hole is arranged, first can be limited
The maximum displacement of part and the second part, while being easy to implement being oppositely arranged for the first part and the second part.
Referring to Fig. 1, micrometer component 50 includes inductance amesdial, and test pencil 51 and the moving portion 21 of the inductance amesdial connect
Touching.The measurement accuracy of inductance spotter can realize that the position of submicron order is moved up to submicron order, by using inductance amesdial
Dynamic measurement, can increase substantially measurement accuracy, avoid the influence that dead zone generates in the measurement of differential head.Referring to Fig. 5, micrometer portion
Part 50 can further include micrometer component fixing seat 52, and micrometer component fixing seat 52 is equipped with Elastic buckle 511 and fixes
Screw 512, for fixing the test pencil of the inductance amesdial.
By the way that test pencil to be fixed in Elastic buckle, Elastic buckle is locked by fixing screws, makes 51 uniform force of test pencil,
Improve the service life of test pencil.
Referring to Fig. 1, two degrees of freedom micro-displacement provided in an embodiment of the present invention includes two micrometer components 50, two electricity
The angle felt between the test pencil 51 of micrometer is 90 °.It may be implemented to moving portion by the way that two micrometer components are arranged in the direction xy
The precise measurement of displacement.In other embodiments, a micrometer component or more than two surveys can be set according to the needs of use
Microcomponent, the present invention is without limitation.
Referring to Fig. 1, in an alternative embodiment of the invention, fixed part 23 is frame-shaped construction, and elastic joint part 22 includes
Four, moving portion 21 is square structure, and four angles of moving portion 21 are connected to fixed part 23 respectively by four elastic joint parts 22
Framework in, the preferred L-type structure of elastic joint part 22, displacement regulating member 60 include four, four displacement regulating members 60 divide
Moving portion 31 and fixed part 23 Yong Yu not be made in not Tongfang from+X ,-X ,+Y, the four different directions-Y to 31 applied force of moving portion
Relative movement upwards.In other embodiments, displacement regulating member can also be set as according to the needs of use two or two with
On, the present invention is without limitation.
Further, the two degrees of freedom micro-displacement described in alternative embodiment of the invention further includes warning piece
(not shown) or limited block (showing in figure), are either provided with warning piece or limited block, the alarm department simultaneously
Part is used to sound an alarm when the first part a and the second part b are contacted, the limited block be located at moving portion 21 and fixed part 23 it
Between, for limiting the relative displacement of moving portion 21 Yu fixed part 23.The warning piece may include the sounding such as buzzer, alarm bell
Warning device, can also including warning light etc. visual alarm devices, the present invention is without limitation.
Specifically, it in the embodiment of the present invention, is avoided caused by excessive movement by setting warning piece and/or limited block
First part and the second part are damaged because of stress.
The following are a specific embodiments of the invention:
As shown in Figure 1, including compliant mechanism the embodiment of the invention provides a kind of self-centering micro-displacement platform of two degrees of freedom
20, bottom plate 10, displacement regulating member 60, micrometer component 50 and buzzer (not shown) etc., in the embodiment of the present invention, first
Part is gyrosensor stator, and the second two pieces is gyrosensor rotor.
As shown in Fig. 2, compliant mechanism 20 using integrated processing method, makes in compliant mechanism 20, there is no conventional rigid machines
Fit-up gap in structure between kinematic pair, entire mechanism are avoided caused by friction and gap without friction and without lubrication
Energy loss and mechanical hysteresis, greatly improve the precision and service life of mechanism.
As shown in Figure 1, connection type is to use spiral shell by four microdrums in the differential head mounting hole of compliant mechanism 20
Mother is by microdrum back extremely on compliant mechanism 20.
As shown in figure 3, mini-inductance measurement instrument pen 51 is inserted on the Elastic buckle 511 of micrometer component fixing seat 51, elasticity
Buckle 511 is notch borehole structure, and fixing screws 512 are screwed in screw hole, keeps the locking of notch circular hole electric clearance opening pressing
The micro- instrument pen 50 in side is felt, so that mini-inductance measurement instrument pen 51 be made to be fixed in micrometer component fixing seat 51.Then electricity will be fixed
The micrometer component fixing seat 51 for sensing micro- instrument pen 51 is screwed on compliant mechanism 20.
Compliant mechanism 20 is connected by screw to and is fixed on bottom plate 10, realizes the dress of the self-centering platform of a whole set of two degrees of freedom
Match.It drives the moving portion 21 of compliant mechanism to move by rotation microdrum, can measure compliant mechanism movement portion with inductance amesdial
The displacement variable divided.
Test gyrosensor rotor and stator are when generating relative displacement, the variable quantity of inductance value, rotor and stator
It is 65um in the unilateral gap of initial position.Rotor is sticked in the second part fixing seat 40 with AB glue, and the second part is consolidated
Reservation 40 is mounted in the moving portion 21 of compliant mechanism 20 with screw；Stator in the first part fixing seat 30, the one zero
First fixed part 31 of part fixing seat 30 be it is petal, petal cylindrical surface distending can be reached solid by M2 slotted countersunk flat head screw
The purpose of rotor, as shown in Figure 3.
Since the unilateral gap between stator and rotor is relatively small, when firmly squeezing, workpiece easily occurs expendable
It deforms and defective work piece, buzzer is installed to warn whether stator and rotor contact.Its principle is that buzzer conducting wire one end is connected electricity
Source anode, other end are connected in the first part fixing seat 30, and power cathode is connected in the second part fixing seat 40, when
When stator and rotor contact, circuit conducting where buzzer, buzzer generates buzzer warning sound.
Unspecified part of the present invention belongs to common sense well known to those skilled in the art.The specific embodiment is only pair
Spirit of that invention gives an example.The personnel of the technical field of the invention can do different repair to the specific embodiment
Change or supplement or replace by a similar method, but without departing from spirit of the invention or surmounts the appended claims and defined
Range.
Unspecified part of the present invention belongs to common sense well known to those skilled in the art.
Claims (9)
1. a kind of two degrees of freedom micro-displacement, which is characterized in that including bottom plate, compliant mechanism, the first part fixing seat, second
Part fixing seat, micrometer component and displacement regulating member, the compliant mechanism includes moving portion, elastic joint part and fixed part,
The fixed part is fixed with the bottom plate, and the moving portion is connect by the elastic joint part with the fixed part, and outside
Power effect is lower to be relatively moved with the fixed part, and the bottom plate is equipped with the first mounting hole, and the moving portion is equipped with the second peace
Hole is filled, the first part fixing seat includes ontology and fixed the first fixed part on the body, and the ontology is mounted on
In first mounting hole, for fixing first part, the second part fixing seat is mounted on first fixed part
In second mounting hole, the second part fixing seat is equipped with the second part mounting hole, when the moving portion is not by outer masterpiece
Used time, first fixed part and the second part mounting hole are concentric, and the displacement regulating member is used for the moving portion
Applied force relatively moves the moving portion and the fixed part, and the micrometer component is used to measure the displacement of the moving portion.
2. two degrees of freedom micro-displacement according to claim 1, which is characterized in that first fixed part includes surrounding
The multiple elastic card claws and fixing piece being arranged, the multiple claw are plugged in described for being arranged the first part, the fixing piece
Between multiple claws, so that the first part described in the multiple claw swelling.
3. two degrees of freedom micro-displacement according to claim 1, which is characterized in that the second part fixing seat is equipped with
The concentric limiting through hole with the second part mounting hole, first fixed position make first in the limiting through hole
Part is opposite with the second part.
4. two degrees of freedom micro-displacement according to claim 1, which is characterized in that the micrometer component includes electrical sensing
Micro- instrument, the test pencil of the inductance amesdial are contacted with the moving portion.
5. two degrees of freedom micro-displacement according to claim 1, which is characterized in that the displacement regulating member includes four
A, four displacements regulating member is respectively used to make the moving portion and institute to the moving portion applied force from different directions
Fixed part is stated to relatively move in different directions.
6. two degrees of freedom micro-displacement according to claim 1 or 5, which is characterized in that the tune of the displacement adjustment portion
Saving precision is not less than submicron order.
7. two degrees of freedom micro-displacement according to claim 4, which is characterized in that the micrometer component further includes micrometer
Component fixing seat, the micrometer component fixing seat is equipped with Elastic buckle, for fixing the test pencil of the inductance amesdial.
8. the two degrees of freedom micro-displacement according to claim 4 or 7, which is characterized in that including two micrometer portions
Part, the angle between the test pencil of two inductance amesdials is 90 °.
9. two degrees of freedom micro-displacement according to claim 1, which is characterized in that further include warning piece and/or limit
Position block, the warning piece when first part and second feature contacts for sounding an alarm, the limited block position
Between the moving portion and the fixed part, for limiting the relative displacement of the moving portion and the fixed part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710594932.7A CN107356190B (en) | 2017-07-20 | 2017-07-20 | A kind of two degrees of freedom micro-displacement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710594932.7A CN107356190B (en) | 2017-07-20 | 2017-07-20 | A kind of two degrees of freedom micro-displacement |
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| CN107356190A CN107356190A (en) | 2017-11-17 |
| CN107356190B true CN107356190B (en) | 2019-06-18 |
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| CN203798330U (en) * | 2014-02-26 | 2014-08-27 | 江门市力泰科技有限公司 | Elastic body precise micro-motion unit |
| CN104440817A (en) * | 2014-12-04 | 2015-03-25 | 山东大学 | Spatial three-dimensional micro-displacement precise positioning device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5776899B2 (en) * | 2011-04-19 | 2015-09-09 | ティアック株式会社 | Load cell unit |
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|---|---|---|---|---|
| CN101764470A (en) * | 2008-12-24 | 2010-06-30 | 鸿富锦精密工业（深圳）有限公司 | Motor stator combining device and method thereof |
| CN101947757A (en) * | 2010-09-19 | 2011-01-19 | 大连理工大学 | Flexible clamping mechanism |
| CN102962683A (en) * | 2012-11-22 | 2013-03-13 | 上海交通大学 | Two-degree of freedom translational parallel high-bandwidth micro-motion platform |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
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| CN107356190A (en) | 2017-11-17 |
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