WO2022012103A1

WO2022012103A1 - Micro-force measuring type three-dimensional comprehensive thread measuring machine measuring head and measuring method therefor

Info

Publication number: WO2022012103A1
Application number: PCT/CN2021/088145
Authority: WO
Inventors: 肖田; 张鹏; 邹功文; 禹静; 蔡晋辉
Original assignee: 深圳市中图仪器股份有限公司
Priority date: 2020-07-16
Filing date: 2021-04-19
Publication date: 2022-01-20
Also published as: CN111947571A; CN111947571B

Abstract

A micro-force measuring type three-dimensional comprehensive thread measuring machine measuring head and a measuring method therefor, capable of simply and accurately measure the displacements of a probe so as to measure a spatial position of a measured thread. The micro displacements of the probe in a horizontal direction and a vertical direction are respectively measured by means of a transverse micro displacement measuring system and a longitudinal micro displacement measuring system. After the probe is in pre-contact with the measured thread and is driven by a three-dimensional comprehensive thread measuring machine, the probe respectively displaces in the horizontal direction and the vertical direction, two groups of parallel reeds serve as guide mechanisms and are respectively stretched, reading heads and grating scales of linear grating systems relatively displace, and the displacements are measured.

Description

A micro-force measuring type three-dimensional comprehensive thread measuring machine probe and its measuring method

technical field

The invention relates to the technical field of measurement, in particular to a probe used for measurement.

Background technique

Thread is an important basic part in the field of industrial manufacturing, which is used for fastening connection or transmission. Because the thread has complex helical grooves with different angular shapes, it is difficult to accurately measure its geometry and parameter information, resulting in many details in the process of thread processing and manufacturing. It cannot be controlled, which seriously affects the thread quality level. In order to detect the true and comprehensive 3D topography and thread parameters of threads, the development of 3D thread measurement equipment will have a significant role in promoting thread manufacturing.

The three-dimensional comprehensive thread measuring machine can realize the three-dimensional measurement of the thread by using a cylindrical coordinate system and a two-dimensional probe. The probe is one of the keys for the measuring machine to achieve high-precision measurement, and it is also one of the core components of the coordinate measuring machine. Commonly used probes can be divided into mechanical, optical and electrical types according to the structural principle; and can be divided into contact type and non-contact type according to the measurement method. Compared with non-contact measurement, contact measurement has the characteristics of intuitive and reliable, simple operation, large measurement range, stable and reliable measurement results, good repeatability, low requirements for measurement environment, and strong versatility. Contact probes include fiber-optic, grating, capacitive, piezoresistive, etc. Among them, grating displacement sensors are widely used because of their high measurement accuracy, high resolution, easy installation, and strong anti-interference performance.

The purpose of the present invention is to provide a micro-force measuring type three-dimensional comprehensive thread measuring machine probe, which can simply and accurately measure the micro-displacement of the probe.

technical problem

In order to solve the problems in the prior art, the present invention provides a micro-force measuring type three-dimensional comprehensive thread measuring machine probe, which includes a lateral micro-displacement measuring system, a longitudinal micro-displacement measuring system and a casing.

The lateral micrometer displacement system includes a lateral mechanical system and a lateral linear grating measurement system, and the lateral mechanical system includes a lateral first parallel reed group, a lateral second parallel reed group, a translation plate, and an intermediate body. The translation plate is connected to the measuring rod, the lateral linear grating measurement system includes a lateral reading head, a lateral grating ruler, a lateral circuit module, and a lateral connecting body, the lateral reading head is installed on the lateral circuit module, and the lateral The circuit module is connected to the transverse connection body, the other end of the transverse connection body is connected to the intermediate body, and the transverse grating ruler is installed on the translation plate.

The longitudinal micrometer displacement system includes a longitudinal mechanical system and a longitudinal linear grating measurement system, and the longitudinal mechanical system includes a longitudinal first parallel reed group, a longitudinal second parallel reed group, the above-mentioned intermediate body and a fixed plate. , the fixing plate is connected with the housing, the longitudinal linear grating measurement system includes a longitudinal reading head, a longitudinal grating ruler, a longitudinal circuit module, and a longitudinal connecting body, and the longitudinal reading head is installed on the longitudinal circuit module, so The longitudinal circuit module is connected to the longitudinal connection body, the other end of the longitudinal connection body is fixedly connected to the fixing plate, and the longitudinal grating ruler is fixedly installed on the intermediate body.

The horizontal first parallel reed group, the horizontal second parallel reed group, the longitudinal first parallel reed group and the longitudinal second parallel reed group all include reeds, a first clamp plate and a second clamp plate, each of which is parallel. The first clamp plate and the second clamp plate of the reed group are connected by screws, the reed is located between the first clamp plate and the second clamp plate, and a hole is opened at each of the four corners of the reed plate. The horizontal first parallel reed group and the horizontal second parallel The reed groups are respectively connected to the intermediate body and the moving plate on both sides of the intermediate body, and the longitudinal first parallel reed group and the longitudinal second parallel reed group are respectively connected to the fixed plate and the intermediate body on the upper and lower sides of the fixed plate.

technical solutions

As a further improvement of the present invention, the bottom of the measuring rod is provided with a stylus, the tip of the stylus comprises a conical shape, and the top of the conical shape is provided with a stylus, and the radius of the stylus is between 10 and 100 μm.

As a further improvement of the present invention, the reed includes four strips, which are a first strip, a third strip, a second strip, and a fourth strip that are connected end to end to form a rectangle-like shape. In the shape of a bar, the two opposite top corners of the rectangle-like shape are connected by a long bar shape, so that four hollow-like triangles are formed in the middle of the reed, the first long bar shape, the third long bar shape, and the second long bar shape. , There is an arc gap at the intersection of the fourth strip, two holes for passing through the thread are respectively provided on both sides of the third strip and the fourth strip, the first strip, the third strip The two sides of the shape are respectively provided with a hole for passing through the thread, and the shapes of the first clamping plate and the second clamping plate are matched with the shape of the middle of the reed.

As a further improvement of the present invention, the first clamping plate and the second clamping plate of each parallel reed group are connected by eight threads, and the lateral first parallel reed group and the transverse second parallel reed group are respectively cushioned on both sides of the intermediate body The plates and threads are connected to the intermediate body and the moving plate, and the longitudinal first parallel spring plate group and the longitudinal second parallel spring plate group are respectively connected to the fixed plate and the intermediate body by gaskets and threads on the upper and lower sides of the fixed plate.

As a further improvement of the present invention, the front part of the intermediate body is provided with three holes, one on the top and two on the bottom, and there are two mounting holes on the top and bottom of the front part of the intermediate body. The two sides of the upper part are respectively provided with eight holes, the eight holes on both sides are symmetrically arranged, the two sides of the lower part are respectively provided with five holes, and the rear part of the intermediate body is provided with a groove.

As a further improvement of the present invention, the fixing plate is generally in the shape of an "I" and has a hollow center.

As a further improvement of the present invention, the translation plate is provided with four trapezoidal holes, a mounting hole is provided in the middle, and two mounting holes are provided on both sides of the translation plate.

According to the above-mentioned method for measuring threads with the probe of a micro-force measuring type three-dimensional comprehensive thread measuring machine, the method includes the following steps: Step 1: Install the probe on the three-dimensional thread coordinate measuring machine, so that the probe of the probe is connected to the The measuring piece is pre-contacted, and the measuring machine is driven to make the coordinate measuring machine move laterally along the x-axis, so that the measuring head and the measuring rod are displaced in this direction.

Step 2: The lateral displacement detection is performed by the lateral micrometer displacement system, and the measuring rod drives the lateral translation plate to perform lateral translational displacement, causing the lateral first parallel reed group and the lateral second parallel reed group in the lateral mechanical system of the measuring rod. At this time, the horizontal linear grating measuring system detects the displacement, the horizontal reading head is used as a fixed ruler, and the grating ruler installed on the translation plate is used as a moving ruler, and the relative motion of the two produces displacement, thereby detecting the lateral displacement.

Step 3: Pre-contact the probe of the probe of the micro-force measuring type three-dimensional comprehensive thread measuring machine with the measured piece, and drive the measuring machine to make the coordinate measuring machine move laterally along the z-axis, so as to make the probe and the measuring rod. Displacement occurs in this direction.

Step 4: The longitudinal displacement is detected by the longitudinal micrometer displacement system. The measuring rod drives the translation plate and the intermediate body to perform longitudinal translational displacement, causing the longitudinal first parallel spring group and the longitudinal second parallel spring in the longitudinal mechanical system of the measuring rod. When the film group is stretched, the longitudinal linear grating measuring system detects the displacement, the longitudinal reading head is used as the fixed ruler, and the grating ruler installed on the fixed plate is used as the moving ruler.

The beneficial effect of the invention is that the parallel spring leaf mechanism is an elastic micro-movement guide rail composed of parallel translation leaf springs. This mechanism has many advantages, such as simple structure, no wear, no guiding gap, high guiding precision, sensitive response, no crawling phenomenon, compact structure, small volume, light weight and easy processing and assembly. In the ideal state, the elastic deformation of the left and right reeds of the parallel reed mechanism is exactly the same, and the translation plate only translates and does not rotate.

Two sets of parallel reed mechanisms are used as guide rails to make the probe move laterally and longitudinally, respectively, and the grating device is used to detect the displacements in the horizontal and vertical directions. , The material is easy to obtain, which increases the innovative design of the probe industry.

The invention selects the parallel spring with simple structure and sensitive response as the guiding mechanism, which not only has small volume and convenient assembly, but also is easy to obtain in the market and has low cost.

The invention designs a two-dimensional displacement structure by using parallel reeds, which not only has a small volume, but also improves the accuracy, and can obtain accurate thread size when used in conjunction with a three-dimensional comprehensive thread measuring machine.

The invention adopts two sets of high-precision gratings to detect the micro-displacement of the probe in the lateral and longitudinal directions, has high resolution, and is convenient for installation and debugging.

"Micro force measuring force" refers to the 7gf-10gf measuring thread; the common three-coordinate probe measuring force is 30gf-100gf. The common three-coordinate probe usually uses a ruby ball, and the radius of the ball is usually 1-3mm; this example uses a stylus, the tip of the stylus includes a cone, and the top of the cone is provided with a needle tip 401, and the radius of the needle tip 401 is 10 to 10 mm. Between 100μm, smaller thread profiles can be scanned.

Description of drawings

Figure 1: A perspective view of the probe of a micro-force measuring three-dimensional comprehensive thread measuring machine.

Figure 2: The first three-dimensional exploded view of the probe of a micro-force-measuring three-dimensional comprehensive thread measuring machine.

Figure 3: A second perspective exploded view of the probe of a micro-force measuring three-dimensional comprehensive thread measuring machine.

Figure 4: The third three-dimensional exploded view of the probe of a micro-force-measuring three-dimensional comprehensive thread measuring machine.

Fig. 5A: A perspective view of a probe head of a micro-force measuring type three-dimensional comprehensive thread measuring machine with the outer casing removed.

Figure 5B: Enlarged view of part A in Figure 5A.

Figure 6: Overall assembly diagram of the lateral micrometer displacement system.

Figure 7: Overall assembly diagram of the longitudinal micrometer displacement system.

Figure 8: Assembly drawing of the parallel reed group unit.

Figure 9: Assembly drawing of the linear grating measurement system of the lateral micrometer displacement system.

Figure 10: Assembly drawing of the linear grating measurement system of the longitudinal micrometer displacement system.

Figure 11: Assembly drawing of the reading head and circuit module unit of the linear grating measurement system.

Figure 12: Housing of the probe.

Figure 13: Translating plate.

Figure 14: Fixing plate.

Figure 15: Intermediates.

Figure 16: Transverse connectors.

Figure 17: Longitudinal connectors.

Figure 18: Diagram of the reed structure.

The names of the components in the figure are as follows: parallel reed set 1-1-1, parallel reed set 1-1-2, parallel reed set 2-1-1, parallel reed set 2-1-2, reed 100 , splint 200, splint 300, translation plate 1-1-3, intermediate 3, measuring rod 4, fixed plate 5, shell 6, reading head 1-2-1, grating ruler 1-2-2, circuit module 1 -2-3, connector 1-2-4, reading head 2-2-1, grating ruler 2-2-2, circuit module 2-2-3, connector 2-2-4, first strip 101 , the third elongated shape 103 , the second elongated shape 102 , the fourth elongated shape 104 , and the needle tip 401 .

Embodiments of the present invention

The present invention will be further described below with reference to the accompanying drawings.

Explanation: "Micrometer displacement" refers to several micrometers to tens of micrometers.

As shown in FIG. 1 to FIG. 5A , a micro-force measuring type three-dimensional comprehensive thread measuring machine probe includes a lateral micro-displacement system, a longitudinal micro-displacement system and a casing 6 .

As shown in FIG. 6 , the lateral micrometer displacement system includes a lateral mechanical system and a lateral linear grating measurement system, and the lateral mechanical system includes a lateral first parallel spring plate group 1-1-1, a lateral second parallel spring The film group 1-1-2, the translation plate 1-1-3, the intermediate body 3, the translation plate 1-1-3 is connected to the measuring rod 4, and the transverse linear grating measurement system includes the transverse reading head 1 -2-1, transverse grating ruler 1-2-2, transverse circuit module 1-2-3, transverse connecting body 1-2-4, the transverse reading head 1-2-1 is installed on transverse circuit module 1- 2-3, the horizontal circuit module 1-2-3 is connected to the horizontal connecting body 1-2-4, the other end of the horizontal connecting body 1-2-4 is connected to the intermediate body 3, the The horizontal grating ruler 1-2-2 is installed on the translation plate 1-1-3.

As shown in FIG. 7 , the longitudinal micrometer displacement system includes a longitudinal mechanical system and a longitudinal linear grating measurement system, and the longitudinal mechanical system includes a longitudinal first parallel spring plate group 2-1-1, a longitudinal second parallel spring The film set 2-1-2, the above-mentioned intermediate body 3 and the fixing plate 5, the fixing plate 5 is connected with the casing 6, and the longitudinal linear grating measurement system includes the longitudinal reading head 2-2-1, The longitudinal grating ruler 2-2-2, the longitudinal circuit module 2-2-3, the longitudinal connector 2-2-4, the longitudinal reading head 2-2-1 is installed on the longitudinal circuit module 2-2-3, so the The longitudinal circuit module 2-2-3 is connected to the longitudinal connecting body 2-2-4, the other end of the longitudinal connecting body 2-2-4 is fixedly connected to the fixing plate 5, and the longitudinal grating ruler 2 -2-2 is fixedly mounted on the intermediate body 3.

As shown in FIG. 8 , the horizontal first parallel reed group 1-1-1, the horizontal second parallel reed group 1-1-2, the longitudinal first parallel reed group 2-1-1 and the vertical The two parallel reed sets 2-1-2 each include a reed 100, a first clamp plate 200 and a second clamp plate 300. The first clamp plate 200 and the second clamp plate 300 of each parallel leaf group are screwed together, and the reed 100 is located at the Between the first clamp plate 200 and the second clamp plate 300, a hole is opened at each of the four corners of the reed, and the horizontal first parallel reed group 1-1-1 and the horizontal second parallel reed group 1-1-2 are in the middle. 3. Both sides are respectively connected to the intermediate body 3 and the moving plate 1-1-3. The longitudinal first parallel reed group 2-1-1 and the longitudinal second parallel reed group 2-1-2 are on the upper and lower sides of the fixed plate 5. The two sides are respectively connected to the fixed plate 5 and the intermediate body 3 .

As shown in FIG. 18 , the reed 100 includes four strips, which are a first strip 101, a third strip 103, a second strip 102, In the fourth strip shape 104 , two opposite vertices of a rectangle-like shape are respectively connected by a long strip shape, so that the middle of the reed 100 forms four hollow-shaped triangle-like shapes. A circular arc gap is provided at the intersection of the first elongated shape 101, the third elongated shape 103, the second elongated shape 102, and the fourth elongated shape 104. The two sides of the third elongated shape 103 and the fourth elongated shape 104 Two holes for passing through the thread are respectively provided, and one hole for passing the thread is respectively provided on both sides of the first elongated shape 101 and the third elongated shape 103 .

The design of the scanning probe guide mechanism of the present invention integrates the planar flexible hinge guide mechanism and the parallel reed guide mechanism with a reinforced plate, and has a scanning service life of more than 15,000 times, good structural stability, high guidance accuracy, and long hinge fatigue life.

The shapes of the first clamping plate 200 and the second clamping plate 300 match the shape of the middle portion of the reed 100 . The first clamp plate 200 and the second clamp plate 300 of each parallel reed set are connected by eight threads, and the horizontal first parallel reed set 1-1-1 and the lateral second parallel reed set 1-1-2 are in the middle. 3. Both sides are respectively connected to the intermediate body 3 and the moving plate 1-1-3 with gaskets and threads. The longitudinal first parallel reed group 2-1-1 and the longitudinal second parallel reed group 2-1-2 are The upper and lower sides of the fixing plate 5 are respectively connected to the fixing plate 5 and the intermediate body 3 by gaskets and threads.

As shown in FIG. 13 , the translation plate 1-1-3 is provided with four trapezoidal holes, a mounting hole is provided in the middle, and two mounting holes are provided on both sides of the translation plate 1-1-3.

As shown in FIG. 14 , the fixing plate 5 is generally in the shape of an “I” with a hollow in the middle. There are three mounting holes on both sides of the hollowed-out part, and two mounting holes on the upper, lower, left, and right sides of the fixing plate 5 .

As shown in FIG. 15 , the front part of the intermediate body 3 is provided with three holes, one on the top and two on the bottom. The front part of the intermediate body 3 has two mounting holes on the top and bottom respectively. The two sides of the upper part of the body 3 are respectively provided with eight holes, the eight holes on both sides are symmetrically arranged, the two sides of the lower part are respectively provided with five holes, and the rear part of the intermediate body 3 is provided with a groove.

Step 2: The lateral displacement detection is carried out by the lateral micro-displacement system, and the measuring rod 4 drives the lateral translation plate 1-1-3 to perform lateral translational displacement, causing the lateral first parallel reed group 1-1 in the lateral mechanical system of the measuring rod 1-1. The stretching of the second horizontal parallel reed group 1-1-2. At this time, the horizontal linear grating measuring system detects the displacement, and the horizontal reading head 1-2-1 is used as a fixed length, which is installed on the translation plate 1- The grating scales 1-3 are used as moving scales, and the relative movement of the two produces displacement, thereby detecting the lateral displacement.

Step 4: The longitudinal displacement is detected by the longitudinal micrometer displacement system. The measuring rod 4 drives the translation plate 1-1-3 and the intermediate body 3 to perform longitudinal translational displacement, causing the longitudinal first parallel reed in the longitudinal mechanical system of the measuring rod. The stretching of group 2-1-1 and the longitudinal second parallel reed group 2-1-2, at this time, the longitudinal linear grating measuring system detects the displacement, and the longitudinal reading head 2-2-1 is used as the fixed length, which is installed on the fixed plate The grating ruler of 5 is used as a moving ruler, and the two produce relative movement and displacement, thereby detecting the longitudinal displacement.

The above content is a further detailed description of the present invention in combination with specific preferred embodiments, and it cannot be considered that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, some simple deductions or substitutions can be made, which should be regarded as belonging to the protection scope of the present invention.

Claims

A micro-force-measuring type three-dimensional comprehensive thread measuring machine probe is characterized by comprising a lateral micro-displacement measurement system, a longitudinal micro-displacement system and a casing (6);

The lateral micrometer displacement system includes a lateral mechanical system and a lateral linear grating measurement system, and the lateral mechanical system includes a lateral first parallel reed set (1-1-1), a lateral second parallel reed set (1-1) -1-2), translation plate (1-1-3), intermediate body (3), the translation plate (1-1-3) is connected to the measuring rod (4), the transverse linear grating measures The system includes a transverse reading head (1-2-1), a transverse grating ruler (1-2-2), a transverse circuit module (1-2-3), and a transverse connecting body (1-2-4). The reading head (1-2-1) is installed on the horizontal circuit module (1-2-3), the horizontal circuit module (1-2-3) is connected to the horizontal connecting body (1-2-4), the The other end of the transverse connecting body (1-2-4) is connected to the intermediate body (3), and the transverse grating ruler (1-2-2) is installed on the translation plate (1-1-3);

The longitudinal micrometer displacement system includes a longitudinal mechanical system and a longitudinal linear grating measurement system, and the longitudinal mechanical system includes a longitudinal first parallel reed group (2-1-1), a longitudinal second parallel reed group (2-1) -1-2), the above-mentioned intermediate body (3) and the fixing plate (5), the fixing plate (5) is connected with the casing (6), and the longitudinal linear grating measurement system includes a longitudinal reading head (2-2-1), longitudinal grating ruler (2-2-2), longitudinal circuit module (2-2-3), longitudinal connector (2-2-4), the longitudinal reading head (2- 2-1) Installed on the vertical circuit module (2-2-3), the vertical circuit module (2-2-3) is connected to the vertical connecting body (2-2-4), and the vertical connecting body ( The other end of 2-2-4) is fixedly connected to the fixing plate (5), and the longitudinal grating ruler (2-2-2) is fixedly installed on the intermediate body (3);

The horizontal first parallel reed group (1-1-1), the horizontal second parallel reed group (1-1-2), the longitudinal first parallel reed group (2-1-1) and the longitudinal The two parallel reed sets (2-1-2) each include a reed (100), a first clamp plate (200) and a second clamp plate (300). The clamp plates (300) are connected by screws, the reed plate (100) is located between the first clamp plate (200) and the second clamp plate (300), a hole is opened at each of the four corners of the spring plate, and the horizontal first parallel spring plate group (1- 1-1) and the transverse second parallel reed group (1-1-2) are respectively connected to the intermediate body (3) and the translation plate (1-1-3) on both sides of the intermediate body (3), and the longitudinal first The parallel reed group (2-1-1) and the longitudinal second parallel reed group (2-1-2) are respectively connected to the fixed plate (5) and the intermediate body (3) on the upper and lower sides of the fixed plate (5). superior.
A micro-force measuring type three-dimensional comprehensive thread measuring machine probe according to claim 1, characterized in that: the bottom of the measuring rod (4) is provided with a stylus, the tip of the stylus comprises a cone, and the top of the cone is in the shape of a cone. A needle tip (401) is provided, and the radius of the needle tip (401) is between 10 and 100 μm.
A micro-force measuring type three-dimensional comprehensive thread measuring machine probe according to claim 1, characterized in that: the reed (100) comprises four elongated strips, which are respectively connected end to end to form a rectangular-like shape. The first elongated shape (101), the third elongated shape (103), the second elongated shape (102), and the fourth elongated shape (104), the two opposite top corners of the rectangle-like shape are respectively connected by the elongated shape , so that four hollow-like triangles are formed in the middle of the reed (100), the first elongated shape (101), the third elongated shape (103), the second elongated shape (102), the fourth elongated shape A circular arc gap is provided at the intersection of the shapes (104), two holes for passing through the thread are respectively provided on both sides of the third strip (103) and the fourth strip (104), and the first strip (103) and the fourth strip (104) are respectively provided with two holes for passing through the thread. 101), the two sides of the third elongated strip (103) are respectively provided with a hole for passing through the thread, and the shapes of the first clamping plate (200) and the second clamping plate (300) match the shape of the middle of the spring plate (100) .
A micro-force measuring type three-dimensional comprehensive thread measuring machine probe according to claim 3, characterized in that: the first clamping plate (200) and the second clamping plate (300) of each parallel reed group are connected by eight threads , the horizontal first parallel reed group (1-1-1) and the horizontal second parallel reed group (1-1-2) are respectively connected to the intermediate body (3) with gaskets and threads on both sides of the intermediate body (3). ) and the translation plate (1-1-3), the longitudinal first parallel spring group (2-1-1) and the longitudinal second parallel spring group (2-1-2) are on the upper and lower sides of the fixed plate (5). The two sides are respectively connected to the fixing plate (5) and the intermediate body (3) by gaskets and threads.
A micro-force measuring type three-dimensional comprehensive thread measuring machine probe according to claim 1, characterized in that: the front part of the intermediate body (3) is provided with three holes, one on the top and two on the bottom. The upper and lower sides of the front part of the intermediate body (3) are respectively provided with two mounting holes, the two sides of the upper part of the intermediate body (3) are respectively provided with eight holes, the eight holes on both sides are symmetrically arranged, and the two lower holes are arranged symmetrically. The sides are respectively provided with five holes, and the rear part of the intermediate body (3) is provided with a groove.
A micro-force-measuring three-dimensional comprehensive thread measuring machine probe according to claim 1, characterized in that: the fixed plate (5) is generally in the shape of an "I" and is hollowed out in the middle, and two sides of the hollowed-out part are respectively provided with There are three installation holes, and the upper, lower, left, and right sides of the fixing plate (5) have two installation holes respectively.
A micro-force measuring type three-dimensional comprehensive thread measuring machine probe according to claim 1, characterized in that: the translation plate (1-1-3) is provided with four trapezoidal holes, and a mounting hole is provided in the middle There are two mounting holes on both sides of the translation plate (1-1-3).
A method for measuring threads by a micro-force measuring type three-dimensional comprehensive thread measuring machine probe according to any one of claims 1 to 7, characterized in that: comprising the following steps:

Step 1: Install the probe on the 3D thread coordinate measuring machine, make the probe of the probe pre-contact with the measured part, and drive the measuring machine to make the coordinate measuring machine move laterally along the x-axis, so that the probe and the measuring rod are in contact with each other. displacement in that direction;

Step 2: The lateral displacement detection is carried out by the lateral micro-displacement system, and the measuring rod (4) drives the lateral translation plate (1-1-3) to perform lateral translational displacement, causing the lateral first parallel spring in the lateral mechanical system of the measuring rod The tension of the plate group (1-1-1) and the horizontal second parallel reed group (1-1-2), at this time, the horizontal linear grating measuring system detects the displacement, and the horizontal reading head (1-2-1) is used as the Fixed-length, the grating ruler installed on the translation plate (1-1-3) is used as a moving ruler, and the relative movement of the two produces displacement, thereby detecting the lateral displacement;

Step 3: Pre-contact the probe of the probe of the micro-force measuring type three-dimensional comprehensive thread measuring machine with the measured piece, and drive the measuring machine to make the coordinate measuring machine move laterally along the z-axis, so as to make the probe and the measuring rod. displacement in that direction;

Step 4: The longitudinal displacement is detected by the longitudinal micro-displacement system, and the measuring rod (4) drives the translation plate (1-1-3) and the intermediate body (3) to perform longitudinal translational displacement, causing the longitudinal displacement of the measuring rod in the longitudinal mechanical system. The longitudinal first parallel reed group (2-1-1) and the longitudinal second parallel reed group (2-1-2) are stretched. At this time, the longitudinal linear grating measuring system detects the displacement, and the longitudinal reading head (2- 2-1) As a fixed ruler, the grating ruler installed on the fixed plate (5) is used as a moving ruler, and the relative movement of the two produces displacement, thereby detecting the longitudinal displacement.