CN113566746B

CN113566746B - Optical plane parallelism and micro-displacement measuring system

Info

Publication number: CN113566746B
Application number: CN202111130992.6A
Authority: CN
Inventors: 刘展花
Original assignee: Shenzhen Vincent Technology Co Ltd
Current assignee: Shenzhen Vincent Technology Co Ltd
Priority date: 2021-09-26
Filing date: 2021-09-26
Publication date: 2021-12-17
Anticipated expiration: 2041-09-26
Also published as: CN113566746A

Abstract

The invention provides an optical plane parallelism and micro displacement measuring system, which comprises a first shell, a light source component, a first reflecting component and a projection wall S1, wherein the first shell is provided with a first light source; the first reflecting component comprises an optical reflector, and the optical reflector comprises a reflecting surface; the optical reflector comprises a fixed end part and a free end part; when the position of the free end part of the optical reflector is changed relative to the fixed end part, the included angle of the intersection position of the linear light source incidence plane and the reflection plane is correspondingly changed; the first shell is provided with a projection wall S1, and the linear light source is reflected by the reflecting surface and then emitted to the projection wall S1 to intersect and form a visual intersection line. The optical plane detection system is based on the optical micro-displacement detection system, and the light source assembly is provided with two groups of linear light sources which are respectively close to two of the four side surfaces of the first shell; and, at least two sides of the first housing are provided with projection walls S1, and the projection wall S1 is used for displaying the intersection line of a line light source and the projection wall S1.

Description

Optical plane parallelism and micro-displacement measuring system

Technical Field

The invention belongs to the technical field of general displacement measurement, relates to a technology for measuring micro displacement and micro parallelism of a plane, and particularly relates to a system for measuring the plane parallelism and the micro displacement based on an influence optical path.

Background

The micro displacement measurement usually needs high-precision instruments and equipment. For example by means of a vernier caliper, a micrometer, or by means of computer image processing techniques.

However, the complicated instruments and equipment have certain operation thresholds, in the daily production work, the use mode, the zeroing adjustment, the use environment, the daily sample retention and even reading all need to be learned and memorized, and the memorized object is a multi-step process or multi-link combination and is difficult to be used in a general post in a comprehensive way.

The parallelism between planes is an important parameter for controlling the product quality and checking the product quality in the production link, but an accurate and easy-to-use parallelism between planes measuring tool is lacked at present.

Disclosure of Invention

In order to solve the problems, the invention adopts the technical scheme that:

the invention provides an optical micro-displacement measuring system, which comprises a first shell, a light source component, a first reflecting component and a projection wall S1, wherein the first shell is provided with a first light source;

the first reflective component comprises an optical reflector comprising a reflective surface;

the optical reflector is in a strip shape and comprises two end parts, one end part is connected with the first shell to form a fixed end part, and the other end part is a free end part;

the light source assembly comprises a laser light source and a narrow slit unit, and the laser light source emits to the narrow slit unit to form a line light source;

the linear light source can be shot to the reflecting surface of the optical reflector; the intersection line of the linear light source and the reflecting surface is vertical to the incident direction of the linear light source; and the number of the first and second electrodes,

when the position of the free end part of the optical reflector is changed relative to the fixed end part, the included angle of the intersection position of the linear light source incidence plane and the reflection plane is correspondingly changed;

the first shell is provided with a projection wall S1, and the linear light source is reflected by the reflecting surface and then is emitted to the projection wall S1 to intersect and form a visual intersection line.

Further, the micro displacement measurement system comprises a second shell, and the second shell is fixedly connected with the free end of the optical reflector.

Further, the first shell and the second shell are movably connected with only one degree of freedom of linear motion.

Further, the first housing is a straight cylinder, and an axis of the straight cylinder of the first housing is parallel to a straight line of the degree of freedom of the linear motion.

Further, the side wall of the first shell comprises a second reflecting component, and the second reflecting component comprises a reflecting surface; the linear light source is reflected by the first reflecting assembly, directed to the reflecting surface of the second reflecting assembly, and directed to and displayed on the projecting wall S1 on the side opposite to the side of the first housing where the second reflecting assembly is disposed.

Further, the optical reflector of the first reflective component is sheet-shaped; the material is elastic; and, the movable range of the free end portion has a full elastic deformation performance.

The device comprises a first shell, a second shell, a first guide rail, a second guide rail, a first guide rail and a second guide rail, wherein the first shell is arranged on the first shell; and the linear track is used for realizing the movement of the only linear motion freedom degree of the first shell connected with the second shell.

Further, the system includes a third reflective element, the third reflective element including a reflective surface;

the third reflection assembly is arranged at one end part of the first shell, and the end part is opposite to the end part provided with the first reflection assembly; and the number of the first and second electrodes,

and is fixedly connected with the first shell.

Furthermore, the linear light source emitted by the light source component is reflected by the first reflecting component and then emitted to the third reflecting component.

Further, the side wall of the first housing comprises a fourth reflective component, and the fourth reflective component comprises a reflective surface; the linear light source is reflected by the third reflecting assembly, directed to the reflecting surface of the fourth reflecting assembly, and directed to and displayed on the projecting wall S1 on the side opposite to the side of the first housing where the fourth reflecting assembly is disposed.

Further, the outer surface of the end portion A of the first shell comprises a measuring plane A; the end part A is an end part provided with the third reflection assembly; the measurement plane a is perpendicular to the axis of the first housing.

Further, the second housing exterior includes a measurement plane B, and the measurement plane a and the measurement plane B are in a parallel state in a free state.

The application also provides an optical plane parallelism measuring system which comprises the optical micro-displacement measuring system, wherein the first shell is cuboid; the light source assembly comprises two groups of linear light sources which are respectively arranged close to two of the four side surfaces of the first shell; and, at least two sides of the first housing are provided with projection walls S1, and the projection wall S1 is used for displaying the intersection line of a line light source and the projection wall S1.

Further, the first reflection assembly comprises two or four optical reflectors, and the optical reflectors are arranged in an axisymmetric manner with respect to the axis of the first shell.

The invention has the beneficial effects that the invention provides an optical micro-displacement measuring system which is used for measuring the micro-displacement of an object, and realizes the high-precision measurement of the displacement by refracting a line light source and amplifying the micro-displacement amplitude.

The invention also provides an optical plane parallelism measuring system which is used for measuring the parallelism between two planes, the operation process also only needs to place the optical plane parallelism measuring system between the planes to be measured, complex operation is not needed, and the obtained data has high precision.

Drawings

FIG. 1 is a schematic structural diagram of an optical plane parallelism and micro-displacement measurement system according to the present invention;

FIG. 2 is a schematic view of FIG. 1 from another perspective;

FIG. 3 is a front view of FIG. 2;

FIG. 4 is a cutaway schematic view of the first housing;

FIG. 5 is a schematic view of a slicing structure of a light source module;

FIG. 6 is a schematic structural diagram of a first reflective assembly;

FIG. 7 is a schematic view of the inner structure of the slicing of the first housing;

FIG. 8 is a schematic reflection diagram of a linear light source;

FIG. 9 is a schematic reflection diagram of a line light source in example 1;

FIG. 10 is a schematic view showing a state change in the displacement measurement process in example 1;

FIG. 11 is a schematic reflection diagram of a linear light source in example 2;

FIG. 12 is a schematic reflection diagram of a line light source according to example 3;

FIG. 13 is a schematic reflection diagram of a linear light source in example 4;

reference numerals:

a first shell 10, a static rail 11 and a measuring plane A;

a light source assembly 20, a laser light source 21, a narrow slit unit 22, a linear light source 23, a connecting arm 24;

a first reflective component 30, an optical reflector 31, a fixed end 311, a free end 312, a reflective surface 32;

projected wall S1, visual intersecting line 41, scale 42;

the second shell 50, the slide rail 51, the spring 52, the baffle 53 and the measuring plane B;

a second reflection assembly 60, a third reflection assembly 70, and a fourth reflection assembly 80.

Detailed Description

The following examples are presented in accordance with the inventive concepts of the present invention and are not to be construed as limiting the scope of the invention in any way in view of a particular problem scenario.

Example 1

Referring to fig. 1, 3-5, the present embodiment provides an optical micro-displacement measuring system, including a first housing 10, a light source assembly 20, a first reflection assembly 30, and a projection wall S1;

the first reflective element 30 comprises an optical reflector 31, the optical reflector 31 comprising a reflective surface 32;

the optical reflector 31 is in a strip shape and includes two end portions, one end portion is connected to the first housing 10 to form a fixed end portion 311, and the other end portion is a free end portion 312;

the light source assembly 20 comprises a laser light source 21 and a narrow slit unit 22, and the laser light source 21 emits to the narrow slit unit 22 to form a line light source 23;

the linear light source 23 may be directed to the reflective surface 32 of the optical reflector 31; the intersection line of the linear light source 23 and the reflecting surface 32 is perpendicular to the incident direction of the linear light source 23; and the number of the first and second electrodes,

when the position of the free end part 312 of the optical reflector 31 is changed relative to the fixed end part 311, the included angle of the intersection position of the incident plane and the reflecting plane of the linear light source 23 is correspondingly changed;

the first housing 10 is provided with a projection wall S1, and the linear light source 23 is reflected by the reflection surface 32 and then intersects with the projection wall S1 to form a visible intersection line 41.

The operation threshold of the existing micro-displacement measuring instrument and equipment has certain complexity for a general post worker in an operation process, a plurality of steps of operation are needed in the measurement operation process to obtain a required measurement result, and certain requirements are also provided for the force to be applied to a measuring object by the measuring instrument in the operation process, for example, when the length of an object using a micrometer is measured, the rotating part cannot be screwed to be over-tightened, the fuzzy concept of over-tightening is different for different operators, so that the folding degree of the micrometer is controlled differently by different operators, the measurement result is different, and the rest folding type measurement modes also have the phenomenon. In addition, the existing measurement mode needs to perform two times of artificial active following adjustment for measuring the distance of 'displacement' to calculate the result, and the collision between the measuring apparatus and the measured object is easily caused in the middle following adjustment process, so that the authenticity of the measurement result is questioned.

In the measurement instrument and apparatus for measuring a small displacement in the prior art, which have the problem that the operation threshold is provided for the general staff and the authenticity of the measurement result is questionable when measuring a small displacement, the present embodiment provides an optical small displacement measurement system, as shown in fig. 9, a linear light source 23 emitted from a light source assembly 20 is incident on a reflection surface 32 of a first reflection assembly 30, light is reflected on the reflection surface 32 and reflected to a projection wall S1, since the light received by the reflection wall S1 is reflected by an optical reflector 31, when the angle of the reflection surface 32 of the optical reflector 31 is changed, the incident angle and the reflection angle of the linear light source 23 are changed correspondingly, and the position between the linear light source 23 reflected to the projection wall S1 and the projection wall is changed correspondingly, as shown in fig. 10, a certain distance is provided between the projection wall S1 and the reflection surface 32 of the optical reflector 31, at this time, the small distance change of the reflection surface 32 can cause the projection position of the linear light source 23 on the projection wall to be greatly changed, and in this way, the position change suffered by the first reflection assembly 30 can be amplified, so that a worker can read the amplification degree.

When the strip-shaped optical reflector 31 is used for measuring the small displacement, the measuring object pushes the free end 312 of the optical reflector 31, so that the free end 312 of the optical reflector 31 can move relative to the fixed end 311, the angle of the reflecting surface 32 is changed, and the reflecting angle of the linear light source 23 is further changed.

The laser light source 21 is emitted to the reflecting surface 32 of the optical reflector 31 through the narrow slit unit 22, the cross section of the laser light source 21 passing through the narrow slit is linear and is the linear light source 23, and the linear light source 23 finally projected on the projection wall S1 is linear, so that the linear light source 23 is more intuitive to be expressed on the projection wall S1.

The intersection line of the linear light source 23 and the reflecting surface 32 is perpendicular to the incident direction of the linear light source 23, so that the intersection line of the linear light source 23 projected on the projecting wall S1 and the projecting wall S1 is perpendicular to two opposite sides of the rectangular projecting wall S1, and the reading uniqueness of the visible intersection line 41 on the projecting wall is ensured.

Preferably, the projection wall S1 is made of a translucent material, such as ground glass, and the intersection line projected on one side of the projection wall S1 can be displayed on the other side through the translucent material, and is displayed as a visible intersection line 41 on the projection wall S1 on the outer surface of the first housing 10 during measurement, so that the worker can read the minute displacement of the measurement object according to the visible intersection line 41.

Preferably, the outer surface of the first housing is provided with graduations 42 in the moving direction of the visible intersecting line 41 on the side of the projection wall when measuring, and the distance setting between the graduations 42 can be set according to actual needs.

Through the technical scheme, the optical micro-displacement measuring system provided by the application does not need complex operation steps, and only needs to be placed between displacement objects to be measured, so that the free ends of the first shell 10 and the optical reflector 31 are directly or indirectly abutted by the displacement objects to be measured and the standard position, and the micro-displacement can be measured through the position change of the visual intersection line 41 on the projection wall S1.

In addition, in the technical solution provided in this embodiment, the position change of the free end 312 of the optical reflector 31 is performed passively, and there is no human error in the displacement measurement caused by collision between the measuring device and the measured object due to the fact that the position change of the measuring device is performed actively to approach the measured object in the prior art.

Referring to fig. 1 and 9, further, the micro displacement measurement system further includes a second housing 50, and the second housing 50 is fixedly connected to the free end 312 of the optical reflector 31.

The distance between the optical reflector 31 and the displacement object to be measured is increased through the second shell 50, when the displacement of the object is measured, only the displacement object and the standard position are respectively contacted with the first shell 10 and the second shell 50, and by pushing the second shell 50 to move, the free end 312 of the optical reflector 31 fixedly connected with the second shell 50 changes the position of the reflecting surface 32 on the optical reflector 31 along with the movement of the second shell 50.

Further, the first housing 10 is movably connected with the second housing 50 with only one degree of freedom of linear motion.

The first housing 10 and the second housing 50 are movably connected with each other in only one degree of freedom, that is, the second housing 50 moves relative to the first housing 10 in only one direction when the displacement of the object is measured, so as to prevent the movement of the second housing 50 in the other directions from causing the moving direction of the optical reflector 31 to be not the actual position to be measured, and further causing the deviation of the obtained displacement data.

It should be noted that the only one-degree-of-freedom articulation between the first housing 10 and the second housing 50 is made with the measurement of displacement in a single direction, and for the detection of displacement in multiple directions, only one degree-of-freedom in multiple directions may be provided, with the intention of limiting the movement of the second housing 50 for displacement directions that do not require measurement, to obtain the desired displacement measurement result with higher accuracy.

Referring to fig. 4 and 7, the first casing 10 is further formed in a straight tubular shape, and an axis of the straight tubular shape of the first casing 10 is parallel to the straight line of the degree of freedom of the linear motion.

The first housing 10 has a straight cylindrical shape, and the light source assembly 20, the first reflecting assembly 30 and the passage for providing the linear light source 23 are accommodated in the straight cylindrical inner space, and the projection wall S1 can be installed in the through hole opened on the side wall of the straight cylindrical shape.

Preferably, the light source assembly 20 is connected to the first housing 10 by a connecting arm 24, and the light source assembly 20 is disposed inside the first housing 10 by the connecting arm 24, and the connecting arm 24 is disposed at a position not interfering with the path of the linear light source 23.

The second housing 50 can extend into the straight cylindrical cavity of the first housing 10, and the second housing 50 is pushed in the process of displacement measurement and then moves along the axis direction of the straight cylindrical cavity, so that an accurate measurement result can be obtained during displacement measurement.

Example 2

This embodiment is realized on the basis of embodiment 1, and referring to fig. 10, a sidewall of the first housing 10 includes a second reflective component 60, and the second reflective component 60 includes a reflective surface 32; the linear light source 23 is reflected by the first reflecting member 30, directed to the reflecting surface 32 of the second reflecting member 60, and directed to the projecting wall S1 on the side opposite to the side of the first housing 10 where the second reflecting member 60 is disposed, and displayed.

The displacement measurement can be performed by amplifying the tiny displacement of the measured object by reflecting the linear light source 23 once and then projecting the visible intersection line 41 on the wall S1, but for the displacement with smaller displacement degree, the displacement accuracy observed by the visible intersection line is limited, and the method is not suitable for the scene with higher displacement accuracy measurement requirement.

In this embodiment, the second reflection assembly 60 is disposed on the side wall of the first housing 10 opposite to the first reflection assembly 30, the linear light source 23 reflected by the first reflection assembly 30 is emitted to the reflection surface 32 of the second reflection assembly 60, the linear light source 23 is reflected again by the second reflection assembly 60, and finally the linear light source 23 is projected onto the projection wall, and the linear light source 23 reflected by the second reflection assembly 60 further amplifies the moving range of the visible intersection line 41 on the projection wall S1 on the basis of the first reflection, so that the position of the same optical reflector 31 is changed, and after the second reflection assembly 60 is added, the moving range of the visible intersection line on the projection wall S is increased, and the displacement accuracy of the object can be improved by at least one digit.

The second reflective element 60 can be a mirror plate, the reflective surface 32 of which is a mirror surface of the mirror plate.

Referring to fig. 6, further, the optical reflector 31 of the first reflective component 30 is a sheet shape; the material is elastic; and has a full elastic deformation performance in a movable range of the free end portion 312.

As shown in fig. 6, the fixing end 311 of the sheet-shaped optical reflector 31 is fixedly connected to the side wall of the first housing 10, and after the optical reflector 31 is elastically inverted once, one surface of the fixing end 311 faces the incident direction of the linear light source 23, which is the reflecting surface 32, and the free end 312 of the optical reflector 31 is fixedly connected to the second housing 50, when the second housing 50 moves, the turning curve of the optical reflector 31 is deformed to adapt to the movement of the second housing 50, and the reflecting angle of the reflecting surface 32 to the linear light source 23 is changed during the deformation process, so that the visual intersecting line 41 moves on the projection wall S1.

Preferably, the optical reflector 31 is made of thin elastic steel plate, and the reflecting surface 32 is coated with a light reflecting material.

Referring to fig. 4, 7 and 8, further, the device further includes a linear rail, where the linear rail includes a stationary rail 11 and a slide rail 51, and the stationary rail 11 and the slide rail 51 are respectively disposed on the first housing 10 and the second housing 50; and, the linear track is used for realizing the only linear motion freedom degree movement of the connection of the first casing 10 and the second casing 50.

The two fixed rails 11 are disposed on the side wall of the first housing 10, the one sliding rail 51 is disposed between the two fixed rails 11 and connected to the second housing 50, the contact surfaces of the two fixed rails 11 and the sliding rail 51 limit the sliding rail 51 to move toward the fixed rails 11, and the contact surface of the fixed rails 11 and the second housing 50 or the contact surface of the sliding rail 51 and the first housing 10 can limit the second housing 50 to move toward the side wall of the first housing 10. A plurality of linear rails may be provided between the second housing 50 and the first housing 10.

Preferably, the length of the slide rail 51 is about 1/2 of the length of the stationary rail 11, a spring 52 is connected to an end face of the slide rail 51, the spring 52 pushes the slide rail 51 and the second housing 50 away from the optical reflector 31 to provide an initial pre-contact position for the measuring system, and the spring 52 always pushes the second housing 50 away from the first housing 10 during displacement measurement to maintain contact with the moving object. A stop 53 is further disposed at one end of the second housing 50 close to the optical reflector 31 for limiting the position, so as to prevent the spring 52 from pushing the second housing 50 completely out.

Example 3

This embodiment is proposed on the basis of embodiment 1, and referring to fig. 12, the system includes a third reflective member 70, where the third reflective member 70 includes a reflective surface 32; the third reflection assembly 70 is disposed at an end of the first casing 10, and the end is opposite to the end where the first reflection assembly 30 is disposed; and is fixedly connected with the first housing 10.

In this embodiment, the third reflecting member 70 is disposed at one end of the first casing 10, and the linear light source 23 is reflected by the third reflecting member 70 and then directed to the projection wall S1, for the same purpose as that of embodiment 2, in order to improve the accuracy of measuring the displacement. A certain included angle is formed between the third reflection assembly 70 and the end portion of the first casing 10 close to the third reflection assembly, and the specific included angle can be modulated according to the size of the first casing 10, so that the linear light source 23 reflected by the third reflection assembly 70 can be incident on the projection wall S1 to generate the visible intersection line 41.

Further, the linear light source 23 emitted from the light source assembly 20 is reflected by the first reflecting assembly 30 and then directed to the third reflecting assembly 70.

Compared with embodiment 2, the incident angles of the line light source 23 on the first reflection assembly 30 and the third reflection assembly 70 are different in this embodiment, so that the displacement measurement accuracy is also different in this embodiment from that in embodiment 2.

Referring to fig. 2, further, the outer surface of the end a of the first housing 10 includes a measuring plane a; the end A is the end where the third reflection assembly 70 is arranged; the measurement plane a is perpendicular to the axis of the first housing 10.

The test plane a is disposed at an end a of one end of the third reflection assembly 70, that is, an end far away from the second housing, and serves as a reference plane for measurement, and the fact that the test plane a is perpendicular to the axis of the first housing 10 is a key for ensuring measurement accuracy and eliminating measurement errors.

Referring to fig. 1, further, the second housing 50 includes a measuring plane B outside, and the measuring plane a and the measuring plane B are parallel in a free state.

The measuring plane B and the measuring plane A are arranged oppositely, the measuring plane A and the measuring plane B are respectively contacted and attached with two planes to be measured when measurement is carried out, the measuring plane A and the measuring plane B are in a parallel state in a free state, the consistency of a measuring initial value is kept, and the error of a measuring system is eliminated. In this embodiment, the measuring plane a and the measuring plane B are ensured to be parallel in the free state by the springs 52 abutted by the slide rails 51 on the second housing 50, the plurality of springs 52 are disposed on the side of the second housing 50 and push the second housing 50 towards the end far away from the first housing 10, at this time, the baffle 53 on the second housing 50 is in plane contact with the end of the stationary rail 11 on the first housing 10, the end plane of the stationary rail 11 is perpendicular to the axis of the first housing 10, and thus the parallel in the free state is ensured.

Example 4

The present embodiment is provided on the basis of embodiment 3, referring to fig. 13, further, a sidewall of the first housing 10 includes a fourth reflective component 80, and the fourth reflective component 80 includes a reflective surface 32; the linear light source 23 is reflected by the third reflecting member 70, directed to the reflecting surface 32 of the fourth reflecting member 80, and directed to the projecting wall S1 on the side opposite to the side of the first housing 10 where the fourth reflecting member 80 is disposed, and displayed.

After the linear light source 23 is reflected three times by the first reflecting assembly 30, the third reflecting assembly 70 and the fourth reflecting assembly 80, the linear light source 23 finally irradiates on the projection wall S1, and the linear light source 23 is reflected once again on the basis of the embodiment 3, so that the precision of displacement measurement is improved.

Example 5

The present embodiment provides an optical plane parallelism measuring system, including the optical micro-displacement measuring system of embodiments 1 to 4, referring to fig. 1 to 8, wherein the first housing 10 is a rectangular parallelepiped; the light source assembly 20 includes two groups of linear light sources 23 respectively disposed near two of the four side surfaces of the first housing 10; and, a projection wall S1 is provided at least on both side surfaces of the first housing 10, and the projection wall S1 is used for displaying an intersection line of the line light source 23 and the projection wall S1.

In the prior art, a high-precision electronic instrument is required to be used for measuring the parallelism of the plane piece of the product, the operation threshold of the high-precision electronic instrument is higher than that of an instrument for measuring the displacement, the operation steps are more and more complicated, and the measurement on the parallelism between planes is difficult to be conveniently carried out for the large number of products and the use environment of a general working post.

In the optical plane parallelism measuring system provided in this embodiment, the first housing 10 is rectangular, and has four side light sources 20 parallel to the axis and perpendicular to or parallel to each other in pairs, and two sets of linear light sources 23 are disposed, each set of linear light sources 23 is finally reflected to the projection wall S1 on one side, and the two sets of linear light sources 23 may be disposed adjacent to or opposite to each other on four sides of the first housing 10.

In the present embodiment, the parallelism between the planes is measured by comparing the displacements of different positions between the planes, that is, the parallelism between the planes is measured based on the displacement measurement, and it should be noted that, in the present embodiment, the degree of freedom between the second housing 50 and the first housing 10 is not limited to the degree of freedom of the linear motion in the axial direction of the first housing 10, and there is a gap on the sliding contact surface between the first housing 10 and the second housing 50, and the gap is set so that the first housing 10 and the second housing 50 can perform a small range of movement and rotation in addition to the axial direction of the first housing 10. The two groups of linear light sources 23 respectively correspond to the two groups of first reflection assemblies 30 for reflecting the linear light sources 23, the free end parts 312 of the optical reflection bodies 31 of the two groups of first reflection assemblies 30 are respectively connected to different directions of the second shell 50, when the flatness measurement between the planes is performed, the end parts of the first shell 10 and the second shell 50 are respectively attached to two planes to be measured, at this time, because a certain degree of freedom is provided between the first shell 10 and the second shell 50 except the axial direction of the first shell 10, the axial directions of the first shell 10 and the second shell 50 can be changed along with the normal direction of the planes, so that the axial directions of the first shell 10 and the second shell 50 are not in a perpendicular state, the free ends of the two groups of optical reflection bodies 31 are connected to the second shell 50 in different directions, and can be pushed by different degrees, so that the visible intersection lines 41 on the projection walls S1 in two different directions are not in the same length in the first axial direction, from the difference in length of the two sets of visual intersection lines 41 in the direction of the axis of the first housing 10, the flatness between the two planes can be measured.

Compared with the existing device for measuring the parallelism between two planes, the optical plane freedom measuring system provided by the embodiment does not need complex operation, only needs to be placed between the two planes of the parallelism to be measured, does not need complex operation, and has high precision of the measured parallelism between the two planes by a mode of refracting the line light source 23 to amplify the micro displacement.

Referring to fig. 7 and 8, further, the first reflecting assembly 30 includes two or four optical reflectors 31, and the optical reflectors 31 are disposed axially symmetrically with respect to the axis of the first casing 10.

The two optical reflectors 31 of the first reflection assembly 30 are oppositely arranged along the axis of the first housing 10, and correspond to the two sets of linear light sources 23, so that the parallelism of the plane to be measured in one direction can be measured.

The four optical reflectors 31 on the first reflecting assembly 30 are arranged two by two symmetrically along the axis of the first housing 10, and four sets of linear light sources 23 corresponding to the four optical reflectors can be arranged, so that the parallelism of two intersecting directions of two planes can be measured respectively. Meanwhile, the visual intersection lines 41 on two adjacent projection walls S1 can be compared to obtain more azimuth parallelism data.

In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "center", "top", "bottom", "inner", "outer", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for the purpose of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present invention. Where "inside" refers to an interior or enclosed area or space. "periphery" refers to an area around a particular component or a particular area.

In the description of the embodiments of the present invention, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", "third", "fourth" may explicitly or implicitly include one or more of the features. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "assembled" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description of the embodiments of the invention, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An optical micro-displacement measuring system is characterized by comprising a first shell, a light source component, a first reflecting component and a projection wall S1;

2. An optical micro-displacement measurement system according to claim 1, further comprising a second housing fixedly attached to the free end of the optical reflector.

3. An optical micro-displacement measurement system according to claim 2, wherein the first housing is movably connected to the second housing with a single degree of linear motion.

4. An optical micro-displacement measuring system according to claim 3, wherein the first housing is a straight cylinder, and the axis of the straight cylinder of the first housing is parallel to the straight line of the degree of freedom of the linear motion.

5. An optical micro-displacement measurement system according to any of claims 1-4, wherein the side wall of the first housing comprises a second reflective element, the second reflective element comprising a reflective surface; the linear light source is reflected by the first reflecting assembly, directed to the reflecting surface of the second reflecting assembly, and directed to and displayed on the projecting wall S1 on the side opposite to the side of the first housing where the second reflecting assembly is disposed.

6. The optical micro-displacement measuring system of claim 5, wherein the optical reflector of the first reflective member is thin-sheet shaped; the material is elastic; and, the movable range of the free end portion has a full elastic deformation performance.

7. The optical micro-displacement measuring system of claim 3, comprising a linear rail, wherein the linear rail comprises a stationary rail and a sliding rail, and the stationary rail and the sliding rail are respectively disposed on the first housing and the second housing; and the linear track is used for realizing the movement of the only linear motion freedom degree of the first shell connected with the second shell.

8. An optical micro-displacement measurement system according to claim 7, comprising a third reflective element, said third reflective element comprising a reflective surface;

and is fixedly connected with the first shell.

9. The system as claimed in claim 8, wherein the light source module emits a linear light source which is reflected by the first reflecting module and directed to the third reflecting module.

10. An optical micro-displacement measurement system according to claim 9, wherein the side wall of the first housing includes a fourth reflective element, the fourth reflective element including a reflective surface; the linear light source is reflected by the third reflecting assembly, directed to the reflecting surface of the fourth reflecting assembly, and directed to and displayed on the projecting wall S1 on the side opposite to the side of the first housing where the fourth reflecting assembly is disposed.

11. An optical micro-displacement measuring system according to claim 8, wherein the outer surface of the end portion a of the first housing includes a measuring plane a; the end part A is an end part provided with the third reflection assembly; the measurement plane a is perpendicular to the axis of the first housing.

12. An optical micro-displacement measuring system according to claim 11, wherein the second housing exterior includes a measuring plane B, and the measuring plane a and the measuring plane B are parallel in a free state.

13. An optical plane parallelism measuring system comprising an optical micro-displacement measuring system according to any one of claims 1 to 12, wherein said first housing is rectangular parallelepiped; the light source assembly comprises two groups of linear light sources which are respectively arranged close to two of the four side surfaces of the first shell; and, at least two sides of the first housing are provided with projection walls S1, and the projection wall S1 is used for displaying the intersection line of a line light source and the projection wall S1.

14. An optical plane parallelism measuring system according to claim 13, wherein the first reflecting assembly comprises two or four optical reflectors, the plurality of optical reflectors being arranged axisymmetrically about the axis of the first housing.