CN109373878B - Three-dimensional decoupling type scanning gauge head - Google Patents
Three-dimensional decoupling type scanning gauge head Download PDFInfo
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- CN109373878B CN109373878B CN201811452722.5A CN201811452722A CN109373878B CN 109373878 B CN109373878 B CN 109373878B CN 201811452722 A CN201811452722 A CN 201811452722A CN 109373878 B CN109373878 B CN 109373878B
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- 230000007246 mechanism Effects 0.000 claims abstract description 59
- 230000001939 inductive effect Effects 0.000 claims description 24
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
- 239000000523 sample Substances 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 abstract description 19
- 238000006073 displacement reaction Methods 0.000 abstract description 8
- 239000012528 membrane Substances 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 230000007774 longterm Effects 0.000 abstract 1
- 238000009434 installation Methods 0.000 description 9
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The invention relates to the technical field of precision measuring instruments, in particular to a three-dimensional decoupling type scanning measuring head. The invention comprises an XY-direction measuring mechanism, a Z-direction measuring mechanism, a measuring head shell, a measuring rod and a spring balance mechanism, wherein the measuring head forms X-direction, Y-direction and Z-direction moving guide rails through three groups of membrane guide mechanisms which are vertically arranged, and an inductance sensor is respectively arranged in three directions and is used for measuring the micro displacement of a measuring needle in X, Y, Z directions. The measuring head is mutually decoupled in three directions, has compact structure, small volume, high measuring precision and sensitivity and good stability for long-term use, and can realize one-dimensional, two-dimensional and three-dimensional scanning measurement.
Description
Technical Field
The invention relates to the technical field of precision measuring instruments, in particular to a three-dimensional decoupling type scanning measuring head.
Background
Three-dimensional probes are important components in precision measurement instruments, especially in coordinate measuring machines. With the rapid development of the measurement technology, the precision requirement on the three-dimensional measuring head is higher and higher. Three-dimensional measuring heads used on current coordinate measuring machines at home and abroad mainly comprise three types, namely series connection type, parallel connection type and series-parallel connection type;
the tandem type measuring head (such as U.S. PatNo.4660296 applied by Mauser-Werke Oberndorf GmbH company in Germany and U.S. PatNo.5353510 applied by Ullbrich in Belgium) has a relatively simple structure, but coupling exists among all measuring directions, and mechanical coupling errors are inevitably brought during measurement;
the measurement directions of the parallel measuring head (such as the patent U.S. PatNo.5029398 applied by Fritz Ertl et al in Germany) are mutually decoupled, but the structure is complex and the processing and the assembly are difficult;
the series-parallel combined type measuring head (such as a patent U.S. PatNo.6131300 applied by Klingelnberg company in Germany) has a relatively simple structure, but belongs to an incomplete decoupling measuring head, and a coupling error still exists.
Disclosure of Invention
In view of this, the invention provides a three-dimensional decoupling type scanning probe, which has a simple structure, high precision and mechanical decoupling.
In order to solve the problems in the prior art, the technical scheme of the invention is as follows:
a three-dimensional decoupling type scanning gauge head which characterized in that: the measuring device comprises a measuring rod, an XY-direction measuring mechanism, a Z-direction measuring mechanism, a measuring head shell and a spring balancing mechanism; the XY-direction measuring mechanism is arranged in the Z-direction measuring mechanism, the Z-direction measuring mechanism is arranged in the measuring head shell, the spring balancing mechanism is arranged on the Z-direction measuring mechanism and the measuring head shell, and the measuring rod is connected with an X-direction diaphragm mounting shaft in the XY-direction measuring mechanism;
the XY-direction measuring mechanism comprises an inner layer frame, an X-direction diaphragm, a Y-direction diaphragm, X-direction diaphragm mounting shafts (2-4), two Y-direction diaphragm mounting shafts, an X-direction sensor, a Y-direction sensor, an X-direction sensor mounting frame, a Y-direction sensor mounting frame, an X-direction connecting rod and a Y-direction connecting rod;
x-direction diaphragms and Y-direction diaphragms are symmetrically arranged in two opposite frames of the inner layer frame respectively, the centers of the pair of X-direction diaphragms are connected through an X-direction diaphragm mounting shaft, and an X-direction inductance sensor is arranged on the X-direction diaphragm mounting shaft at one end outside the inner layer frame; a Y-direction diaphragm mounting shaft is arranged at the center of each Y-direction diaphragm, the axes of the two Y-direction diaphragm mounting shafts are on the same straight line, a Y-direction inductance sensor is arranged on the inner side of one Y-direction diaphragm mounting shaft, the inner layer frame is arranged on the outer layer frame through the Y-direction diaphragm mounting shaft, one end of the X-direction diaphragm mounting shaft is provided with a thread, the other end of the X-direction diaphragm mounting shaft is a light shaft end, one end of the X-direction connecting rod is connected in a screw hole at the light shaft end of the X-direction diaphragm mounting shaft, and the other end of the X; one end of the Y-direction connecting rod is connected into a screw hole at one end of the Y-direction diaphragm mounting shaft, and the other end of the Y-direction connecting rod is connected with an iron core on the Y-direction inductive sensor;
the Z-direction measuring mechanism comprises an outer layer frame, two Z-direction diaphragm mounting shafts, a Z-direction diaphragm, a Z-direction sensor mounting frame and a Z-direction connecting rod;
the outer frame sets up on the gauge head shell through Z to diaphragm installation axle, and a pair of Z is fixed in two Z respectively to the diaphragm and installs epaxially to the diaphragm, and two Z are on a straight line to the axis of diaphragm installation axle, and a pair of Z sets up on the Z of outer frame is to both ends face to the diaphragm, Z sets up on the gauge head shell to the sensor mounting bracket, Z is connected on the outer frame to connecting rod one end, and the other end is connected to the iron core on the inductance sensor with Z.
The spring balance mechanism comprises an extension spring and an adjusting screw, one end of the extension spring is connected to the adjusting screw, and the other end of the extension spring is connected to the Z-direction measuring mechanism; the adjusting screw is arranged in a screw hole at the top of the measuring head shell.
The coil of the X-direction inductive sensor is arranged on the X-direction inductive sensor mounting frame and locked through a bolt;
the coil of the Y-direction inductive sensor is arranged on the Y-direction inductive sensor mounting frame and locked through a bolt;
the X-direction sensor mounting frame is mounted outside the inner layer frame through screws; the Y-direction sensor mounting rack is mounted inside the inner layer frame through screws;
the thread of the X-direction diaphragm mounting shaft is connected with the measuring rod and clamps the X-direction diaphragm at the end, and the X-direction diaphragm at the end of the optical shaft is fixed through the elastic check ring.
And the coil of the Z-direction sensor is arranged on the Z-direction sensor mounting frame and locked through a bolt.
Compared with the prior art, the invention has the following advantages:
1. the invention adopts the double diaphragms with the arc-shaped grooves as the guide rails to replace the traditional parallel reed guide rails, eliminates the inherent cosine error of the parallel guide rails, decouples the guide mechanisms of the measuring head X, Y, Z in three measuring directions, has no coupling error and improves the mechanical precision of the system;
2. the measuring head has the advantages of simple mechanical structure, small volume, light weight and convenient manufacture, installation and maintenance;
3. the measuring head can perform one-dimensional, two-dimensional and three-dimensional scanning measurement, and does not need a locking mechanism during the one-dimensional and two-dimensional measurement;
4. the measuring head has the characteristics of high measuring precision, high measuring efficiency, high sensitivity, good stability and the like.
Drawings
FIG. 1 is a perspective view of a three-dimensional decoupling probe according to the present invention;
FIG. 2 is a three-dimensional isometric view of a one-dimensional (X-direction) measurement mechanism of the present invention;
FIG. 3 is a top view of a one-dimensional (X-direction) measurement mechanism of the present invention;
FIG. 4 is a three-dimensional isometric view of a two-dimensional (XY) measurement mechanism of the present invention;
FIG. 5 is a top view of a two-dimensional (XY direction) measurement mechanism according to the present invention;
FIG. 6 is a three-dimensional isometric view of the Z-direction measurement mechanism of the present invention;
FIG. 7 is a front view of the Z-direction measuring mechanism of the present invention;
FIG. 8 is a three-dimensional (XYZ-direction) isometric view of a three-dimensional (XYZ-direction) measurement mechanism of the present invention;
FIG. 9 is a front view of a three-dimensional (XYZ-direction) measuring mechanism according to the present invention;
FIG. 10 is a top view of a three-dimensional (XYZ-direction) measuring mechanism according to the present invention;
FIG. 11 is a schematic view of a diaphragm according to the present invention;
FIG. 12 is a schematic view of another embodiment of the diaphragm of the present invention;
in the figure: 1. the measuring rod, 2, XY measuring mechanism, 3, Z measuring mechanism, 4, measuring head shell, 5 and spring balancing mechanism;
2-1, an inner layer frame, 2-2, an X-direction diaphragm, 2-3, a Y-direction diaphragm, 2-4, an X-direction diaphragm mounting shaft, 2-5, a Y-direction diaphragm mounting shaft, 2-6, an X-direction inductive sensor, 2-7, a Y-direction inductive sensor, 2-8, an X-direction sensor mounting frame, 2-9, a Y-direction sensor mounting frame, 2-10, an X-direction connecting rod, 2-11 and a Y-direction connecting rod;
3-1, an outer layer frame, 3-2, a Z-direction diaphragm mounting shaft, 3-3, a Z-direction diaphragm, 3-4, a Z-direction inductive sensor, 3-5, a Z-direction sensor mounting frame and 3-6, Z-direction connecting rods;
5-1, an adjusting screw, 5-2 and an extension spring.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The working principle of the invention is as follows: when the measuring head actually works, the measured object is fixed on the workbench, the measuring head is moved, and when a measuring ball of the measuring rod at the front end of the measuring needle is in contact with the surface of the measured object, the measuring ball can be acted by measuring force, and the measuring force can be decomposed into component forces along the X direction, the Y direction and the Z direction respectively.
The embodiment provides a three-dimensional decoupling type scanning probe (see fig. 1 and 8-10), which comprises an XY-direction measuring mechanism 2, a Z-direction measuring mechanism 3, a probe shell 4, a measuring rod 1 and a spring balance mechanism 5;
the XY-direction measuring mechanism 2 is arranged in the Z-direction measuring mechanism 3, the Z-direction measuring mechanism 3 is arranged in the measuring head shell 4, the spring balance mechanism 5 is arranged on the Z-direction measuring mechanism 3 and the measuring head shell 4, and the measuring rod 1 is connected with an X-direction diaphragm mounting shaft 2-3 in the XY-direction measuring mechanism 2 through threads.
The XY-direction measuring mechanism 2 can realize two-dimensional measurement and can also realize one-dimensional measurement through partial parts;
when one-dimensional measurement is realized (see fig. 2 and 3), the device comprises an inner layer frame 2-1, an X-direction diaphragm 2-2, an X-direction diaphragm mounting shaft 2-4, an X-direction sensor 2-6, an X-direction sensor mounting frame 2-8 and an X-direction connecting rod 2-10. A pair of X-direction diaphragms 2-2 are arranged at two ends of an X-direction diaphragm installation shaft 2-4 and then are arranged on two end faces of an inner layer frame 2-1 in the X direction through screws; the coil of the X-direction sensor 2-6 is arranged on the X-direction sensor mounting frame 2-8 and locked through a bolt; the X-direction sensor mounting rack 2-8 is mounted on the outer surface of the inner layer frame 2-1 through screws; one end of the X-direction diaphragm mounting shaft 2-4 is provided with a thread, the other end is an optical axis end, the end provided with the thread is connected with the measuring rod 1 through the thread and clamps the diaphragm at the end, and the diaphragm at the optical axis end is fixed through an elastic check ring; one end of the X-direction connecting rod 2-10 is connected in a screw hole at the end of the optical shaft of the X-direction diaphragm mounting shaft 2-4 through threads, and the other end of the X-direction connecting rod is connected with an iron core on the X-direction inductive sensor 2-6 through threads.
When the two-dimensional measurement is realized (see fig. 4 and 5), the two-dimensional measurement device comprises an inner layer frame 2-1, an X-direction diaphragm 2-2, a Y-direction diaphragm 2-3, an X-direction diaphragm installation shaft 2-4, two Y-direction diaphragm installation shafts 2-5, an X-direction sensor 2-6, a Y-direction sensor 2-7, an X-direction sensor installation frame 2-8, a Y-direction sensor installation frame 2-9, an X-direction connecting rod 2-10 and a Y-direction connecting rod 2-11; the inner layer frame 2-1 is arranged on the outer layer frame 3-1 through a Y-direction membrane mounting shaft 2-5; a Y-direction diaphragm mounting shaft 2-5 is arranged in the center of each Y-direction diaphragm 2-3, the axes of the two Y-direction diaphragm mounting shafts 2-5 are on the same straight line, and one end of the Y-direction diaphragm mounting shaft 2-5 is mounted on two Y-direction end faces of the inner layer frame 2-1 through screws; the two X-direction diaphragms 2-2 are arranged at two ends of an X-direction diaphragm installation shaft 2-4 and then are arranged on two end faces of the inner layer frame 2-1 in the X direction through screws; the coil of the X-direction sensor 2-6 is arranged on the X-direction sensor mounting frame 2-8 and locked through a bolt; the X-direction sensor mounting rack 2-8 is mounted outside the inner layer frame 2-1 through a screw, and a coil of the Y-direction sensor 2-7 is mounted on the Y-direction sensor mounting rack 2-9 and locked through a bolt; the Y-direction sensor mounting rack 2-9 is mounted inside the inner layer frame 2-1 through screws; one end of the X-direction diaphragm mounting shaft 2-4 is provided with a thread, the other end is an optical axis end, the end provided with the thread is connected with the measuring rod 1 through the thread and clamps the diaphragm at the end, and the diaphragm at the optical axis end is fixed through an elastic check ring; one end of the X-direction connecting rod 2-10 is connected in a screw hole at the end of the optical shaft of the X-direction diaphragm mounting shaft 2-4 through threads, and the other end of the X-direction connecting rod is connected with an iron core on the X-direction inductive sensor 2-6 through threads; one end of the Y-direction connecting rod 2-11 is connected in a screw hole at one end of the Y-direction diaphragm mounting shaft 2-5 through threads, and the other end of the Y-direction connecting rod is connected with an iron core on the Y-direction inductive sensor 2-7 through threads.
The present invention can realize three-dimensional measurement by the XY-direction measuring mechanism 2 and the Z-direction measuring mechanism 3 (see fig. 8, 9, and 10) together.
The Z-direction measuring mechanism (see the figures 6 and 7) consists of an outer layer frame 3-1, two Z-direction diaphragm mounting shafts 3-2, a Z-direction diaphragm group 3-3, a Z-direction sensor 3-4, a Z-direction sensor mounting frame 3-5 and a Z-direction connecting rod 3-6; the outer layer frame 3-1 is arranged on the measuring head shell 4 through a Z-direction diaphragm mounting shaft 3-2; the pair of Z-direction diaphragms 3-3 are fixed on the pair of Z-direction diaphragm mounting shafts 3-2 through elastic check rings and are mounted on two Z-direction end faces of the outer layer frame 3-1 through screws; the axes of a pair of Z-direction diaphragm mounting shafts 3-2 are on the same straight line, and the coil of the Z-direction sensor 3-4 is mounted on a Z-direction sensor mounting frame and locked through a bolt; the Z-direction sensor mounting rack 3-5 is mounted on the measuring head shell 4 through a screw, one end of the Z-direction connecting rod 3-6 is connected to the outer layer frame 3-1 through a thread, and the other end of the Z-direction connecting rod is connected with an iron core on the Z-direction inductive sensor 3-4 through a thread.
The spring balance mechanism 5 comprises an extension spring 5-1 and an adjusting screw 5-2, wherein one end of the extension spring 5-1 is connected to the adjusting screw 5-2, and the other end of the extension spring is connected to the Z-direction measuring mechanism 3; the adjusting screw 5-2 is arranged in a screw hole at the top of the measuring head shell 4.
A plurality of through grooves can be carved on the X-direction diaphragm 2-2, the Y-direction diaphragm 2-3 and the Z-direction diaphragm 3-3 to form different patterns, for example: referring to fig. 11, the diaphragm may be manufactured by cutting arc-shaped through grooves into the diaphragm, wherein the arc-shaped through grooves form a plurality of concentric circles, and the geometric parameters of the arc-shaped through grooves may include: the width s of the arc-shaped groove, the span angle theta of the arc-shaped groove, the number n pairs of the arc-shaped grooves, the aperture d of two ends of the arc-shaped groove and the thickness t of the diaphragm guide rail; it is also possible to inscribe the pattern, see fig. 12. The geometrical parameters are as follows: slot length h, slot width b1, number of chains n, intermediate link width b2, and film guide thickness t.
The working process of the invention is as follows:
under the action of X-direction measuring force, the two X-direction diaphragms 2-2 are elastically deformed to cause the X-direction diaphragm mounting shafts 2-4 to move in the X direction, so that iron cores of the X-direction inductive sensors 2-6 at one ends of the X-direction diaphragms are enabled to generate displacement in the X direction, the inner-layer frame 2-1 is fixed to cause coils of the X-direction inductive sensors 2-6 mounted on the inner-layer frame to be fixed, and the displacement of the iron cores relative to the coils is micro displacement of the measuring needle in the X direction.
Under the action of Y-direction measuring force, the two Y-direction diaphragms 2-3 elastically deform, the inner layer frame 2-1 moves in the Y direction so that coils of the Y-direction inductive sensors 2-7 mounted on the inner layer frame displace in the Y direction, the Y-direction diaphragm mounting shafts 2-5 are fixed, so that iron cores of the X-direction inductive sensors 2-6 mounted on the inner layer frame are fixed, and the displacement of the coils relative to the iron cores is micro displacement of the measuring needle in the Y direction.
Under the action of Z-direction measuring force, the two Z-direction diaphragms 3-2 elastically deform, the inner-layer frame 2-1 drives the outer-layer frame 3-1 to move in the Z direction, so that an iron core of the Z-direction inductive sensor 3-4 mounted on the outer-layer frame 3-1 displaces in the Z direction, the coil of the Z-direction inductive sensor 3-4 mounted on the outer-layer frame 3-2 is fixed due to the fact that the Z-direction diaphragm mounting shaft 3-2 is fixed, and the displacement of the iron core relative to the coil is micro displacement of the measuring needle in the Z direction.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention.
Claims (7)
1. A three-dimensional decoupling type scanning gauge head which characterized in that: comprises a measuring rod (1), an XY-direction measuring mechanism (2), a Z-direction measuring mechanism (3), a measuring head shell (4) and a spring balancing mechanism (5); the XY-direction measuring mechanism (2) is arranged in the Z-direction measuring mechanism (3), the Z-direction measuring mechanism (3) is arranged in the measuring head shell (4), the spring balance mechanism (5) is arranged on the Z-direction measuring mechanism (3) and the measuring head shell (4), and the measuring rod (1) is connected with an X-direction diaphragm mounting shaft (2-3) in the XY-direction measuring mechanism (2);
the XY-direction measuring mechanism (2) comprises an inner layer frame (2-1), an X-direction diaphragm (2-2), a Y-direction diaphragm (2-3), an X-direction diaphragm mounting shaft (2-4), two Y-direction diaphragm mounting shafts (2-5), an X-direction sensor (2-6), a Y-direction sensor (2-7), an X-direction sensor mounting frame (2-8), a Y-direction sensor mounting frame (2-9), an X-direction connecting rod (2-10) and a Y-direction connecting rod (2-11);
x-direction diaphragms (2-2) are symmetrically arranged in one frame opposite to the inner layer frame (2-1), Y-direction diaphragms (2-3) are symmetrically arranged in the other frame opposite to the inner layer frame, the centers of the pair of X-direction diaphragms are connected through an X-direction diaphragm mounting shaft (2-4), and an X-direction inductive sensor (2-6) is arranged on the X-direction diaphragm mounting shaft (2-4) at one end outside the inner layer frame (2-1); a Y-direction diaphragm mounting shaft (2-5) is arranged at the center of each Y-direction diaphragm, the axes of the two Y-direction diaphragm mounting shafts (2-5) are on the same straight line, a Y-direction inductance sensor (2-7) is arranged on the inner side of one Y-direction diaphragm mounting shaft (2-5), the inner layer frame (2-1) is arranged on the outer layer frame (3-1) through the Y-direction diaphragm mounting shaft (2-5), one end of the X-direction diaphragm mounting shaft (2-4) is provided with a thread, the other end of the X-direction diaphragm mounting shaft is a light shaft end, one end of the X-direction connecting rod (2-10) is connected into a thread hole at the light shaft end of the X-direction diaphragm mounting shaft (2-4), and the other end of the X-direction connecting rod is; one end of the Y-direction connecting rod (2-11) is connected into a screw hole at one end of the Y-direction diaphragm mounting shaft (2-5), and the other end of the Y-direction connecting rod is connected with an iron core on the Y-direction inductive sensor (2-7);
the Z-direction measuring mechanism comprises an outer layer frame (3-1), two Z-direction diaphragm mounting shafts (3-2), a Z-direction diaphragm (3-3), a Z-direction sensor (3-4), a Z-direction sensor mounting frame (3-5) and a Z-direction connecting rod (3-6);
the outer frame (3-1) is arranged on the measuring head shell (4) through a Z-direction diaphragm mounting shaft (3-2), a pair of Z-direction diaphragms (3-3) are respectively fixed on the two Z-direction diaphragm mounting shafts (3-2), the axes of the two Z-direction diaphragm mounting shafts (3-2) are on the same straight line, a pair of Z-direction diaphragms (3-3) are arranged on the Z-direction two end faces of the outer frame (3-1), the Z-direction sensor mounting frame (3-5) is arranged on the measuring head shell (4), one end of the Z-direction connecting rod (3-6) is connected onto the outer frame (3-1), and the other end of the Z-direction connecting rod is connected with an iron core on the Z-direction inductance sensor (3-4).
2. The three-dimensional decoupling scanning probe of claim 1, wherein: the spring balance mechanism (5) comprises an extension spring (5-1) and an adjusting screw (5-2), one end of the extension spring (5-1) is connected to the adjusting screw (5-2), and the other end of the extension spring is connected to the Z-direction measuring mechanism (3); the adjusting screw (5-2) is arranged in a screw hole at the top of the measuring head shell (4).
3. A three-dimensional decoupled scanning probe according to claim 1 or 2, wherein: and the coil of the X-direction inductive sensor (2-6) is arranged on the X-direction inductive sensor mounting frame (2-8) and is locked through a bolt.
4. A three-dimensional decoupled scanning probe according to claim 3, wherein: and the coils of the Y-direction inductive sensors (2-7) are arranged on the Y-direction inductive sensor mounting frames (2-9) and are locked through bolts.
5. The three-dimensional decoupling scanning probe of claim 4, wherein: the X-direction sensor mounting rack (2-8) is mounted outside the inner layer frame (2-1) through screws; the Y-direction sensor mounting rack (2-9) is mounted inside the inner layer frame (2-1) through screws.
6. The three-dimensional decoupling scanning probe of claim 5, wherein: the thread of the X-direction diaphragm mounting shaft (2-4) is connected with the measuring rod (1) and clamps the X-direction diaphragm at the end, and the X-direction diaphragm at the end of the optical shaft is fixed through an elastic check ring.
7. The three-dimensional decoupling scanning probe of claim 6, wherein: and the coil of the Z-direction sensor (3-4) is arranged on the Z-direction sensor mounting frame (3-5) and is locked through a bolt.
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| CN110595416B (en) * | 2019-09-02 | 2020-08-28 | 西安交通大学 | Three-dimensional decoupling calibration method and calibration device for scanning measuring head |
| CN113074677B (en) * | 2021-03-18 | 2023-03-17 | 西安工业大学 | Measuring head device and measuring method for comprehensive measurement of crankshaft |
| CN113515087A (en) * | 2021-04-22 | 2021-10-19 | 中国计量大学 | Contact type measuring head coupling error modeling method for three-dimensional thread comprehensive measuring machine |
| CN115655083B (en) * | 2022-11-02 | 2024-03-08 | 北京工业大学 | Horizontal micro-displacement differential measurement device with unequal-size 8-reed orthogonal arrangement |
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