CN103573815A - Micropositioner and gas bearing - Google Patents

Micropositioner and gas bearing Download PDF

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Publication number
CN103573815A
CN103573815A CN201210270601.5A CN201210270601A CN103573815A CN 103573815 A CN103573815 A CN 103573815A CN 201210270601 A CN201210270601 A CN 201210270601A CN 103573815 A CN103573815 A CN 103573815A
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China
Prior art keywords
bearing
tile fragment
air
screw rod
fine motion
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CN201210270601.5A
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Chinese (zh)
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CN103573815B (en
Inventor
黄静莉
秦磊
朱岳彬
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Priority to CN201210270601.5A priority Critical patent/CN103573815B/en
Publication of CN103573815A publication Critical patent/CN103573815A/en
Application granted granted Critical
Publication of CN103573815B publication Critical patent/CN103573815B/en
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Abstract

The invention provides a micropositioner and a gas bearing. The micropositioner adopts a tile type static-pressure gas bearing to support and guide silicon slices or glass substrates on the micropositioner with high precision, a driving motor set is adopted to carry out micro stroke movement on a micromotion plate in Z, theta x, theta y and theta z directions. The tile type static-pressure gas bearing comprises a bearing fixed shaft and a plurality of tile block devices which are uniformly arranged around the fixed shaft. The tile block devices and the bearing fixed shaft ventilate to form a gas film, the tile block devices can move together with the micropositioner, and the manufactured gas film can also incline to play supporting and guiding roles.

Description

Micropositioner and air-bearing
Technical field
The present invention relates to photoetching process, relate in particular to a kind of micropositioner and air-bearing.
Background technique
Lithography machine micropositioner is mainly to carry silicon chip or glass substrate to carry out Z, θ x, θ y, the motion of θ z micro travel, and accurately locates, thereby realizes the Real-time Focusing of silicon chip or glass substrate, levelling function.In order to reach high position precision, micropositioner adopts air-bearing to carry out support, the guiding of silicon chip or glass substrate.
The air-bearing of micropositioner in prior art, what adopt is that one-dimensional rotation flexible member leads as air supporting, air-flow must enter the gap between flexible member and annulus stator through flexible member simultaneously, form air film, air-film thickness is unadjustable, cannot compensate manufacture, alignment error, and this air-bearing only radially has one-dimensional rotation flexibility, cannot meet the accurate location of four-degree-of-freedom, and because air-flow path is through different flexible members, therefore can cause the difference of each flexible member sensitivity.
Summary of the invention
The object of this invention is to provide a kind of micropositioner and air-bearing, with supporting silicon chip or glass substrate, and its motion is led.
For solving the problems of the technologies described above, the invention provides a kind of air-bearing, it is arranged between the base and fine motion plate of micropositioner, described fine motion plate can be Z, θ x, θ y, θ z moves to micro travel, described air-bearing comprises bearing dead axle and some tile fragment devices, described bearing dead axle is fixedly installed on described base, described fine motion plate is provided with an opening, described bearing dead axle passes described opening away from one end of described base, be located at the excircle outside of described bearing dead axle described some tile fragment device weeks, described some tile fragment devices are all connected with described fine motion plate, direction and the thickness of the air film that described air-bearing produces can change with the change of described fine motion Board position.
Optionally, described some tile fragment devices include tile fragment, the first joint, bearing, screw rod and fixed base, described tile fragment matches near the shape of the described bearing dead axle side and the shape of described bearing dead axle, described the first joint is arranged on described tile fragment, the side away from bearing dead axle of described tile fragment is connected with described bearing, described screw rod is arranged in described bearing and with described bearing and is threaded connection, described fixed base is fixed on described screw rod on described fine motion plate, described screw rod rotarily drives described tile fragment around himself central shaft and moves along described central axis direction on described fixed base, reach behind gap required between described tile fragment and bearing dead axle, described bearing is connected on described fine motion plate.
Further, described tile fragment device also comprises lock screw, and described lock screw is arranged in described bearing, for stoping described screw rod rotation.
Further, described tile fragment device also comprises hinge, and described tile fragment is connected with described bearing by described hinge.
Further, described hinge is flexible hinge.
Further described bearing is connected on described fine motion plate by screw, and described bearing is provided with waist-shaped hole, and described screw is placed in described waist-shaped hole, and described screw can move in described waist-shaped hole.
Optionally, described some tile fragment devices include tile fragment, the first joint, bearing, fixed block and screw rod, described tile fragment matches near the shape of the side of described bearing dead axle and the shape of described bearing dead axle, described the first joint is arranged on described tile fragment, being connected away from the side of bearing dead axle and one end of described screw rod of described tile fragment, described screw rod is arranged in described fixed block and with described fixed block and is threaded connection, described fixed block is arranged on described bearing, described screw rod rotarily drives described tile fragment around himself central shaft and moves along described central axis direction on described fixed base, reach behind gap required between described tile fragment and bearing dead axle, described bearing is connected on described fine motion plate.
Further, described tile fragment device also comprises nut, and described nut is used for locking described screw rod.
Further, the quantity of described nut is two, is separately positioned on the both sides of described fixed block, by screw rod described in two described nut checks.
Further, described screw rod is provided with bulb near one end of described tile fragment, described tile fragment is provided with near a side of described screw rod the inner ball surface matching with described bulb, and described bulb is placed in described inner ball surface, and described tile fragment can rotate freely around the center of circle of described bulb and not depart from described screw rod.
Further, described tile fragment device also comprises the second joint, and described the second joint is arranged on described tile fragment, and its one end contacting with described tile fragment communicates with described inner ball surface.
Further, described tile fragment device also comprises briquetting, and described briquetting is fixed on described tile fragment near on the position of bulb, and it prevents that for limiting the motion of described bulb described tile fragment from departing from described screw rod.
The present invention also provides a kind of micropositioner, described micropositioner comprises above-mentioned air-bearing, fine motion plate, base and drive motor group, described air-bearing is fixedly installed on described base, described fine motion plate is connected with described base by described drive motor group, and described drive motor group can drive described fine motion plate to be Z, θ x, θ y, θ z move to micro travel.
Further, described drive motor group comprises Z-direction motor and θ z motor, and described Z-direction motor and θ z motor are all arranged between described fine motion plate and described base.
Further, described drive motor group also comprises gravity compensator, and described gravity compensator is arranged between described fine motion plate and described base.
Further, the quantity of described Z-direction motor is three, the quantity of described θ z motor is two, the quantity of described gravity compensator is three, described θ z motor is symmetrically arranged in the both sides of described air-bearing, and described three Z-direction motors and three gravity compensators are all triangular shape and are symmetrically arranged on two angles and opposite side between described fine motion plate and described base.
Compared with prior art, the present invention has following beneficial effect:
The invention provides a kind of micropositioner and air-bearing, this micropositioner adopts a watt type static-pressure air bearing to carry out high-precision support and guiding work to the silicon chip on micropositioner or glass substrate, adopt drive motor group to carry out Z to fine motion plate, θ x, θ y, θ z moves to micro travel, this watt of type static-pressure air bearing comprises bearing dead axle and several tile fragment device being evenly arranged around dead axle, between described tile fragment device and described bearing dead axle, ventilation forms air film, described tile fragment device can move with described micropositioner, the air film of manufacturing also can tilt to play the effect of supporting and leading thereupon.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described:
The structural representation of the micropositioner that Fig. 1 provides for the embodiment of the present invention;
The structural representation of the air-bearing that Fig. 2 provides for the embodiment of the present invention;
The structural representation of tile fragment device in the air-bearing that Fig. 3 provides for the embodiment of the present invention one;
The sectional view of tile fragment device in the air-bearing that Fig. 4 provides for the embodiment of the present invention one;
The structural representation of tile fragment device in the air-bearing that Fig. 5 provides for the embodiment of the present invention two;
The sectional view of tile fragment device in the air-bearing that Fig. 6 provides for the embodiment of the present invention two.
In Fig. 1 to Fig. 6,
1: air-bearing; 11: bearing dead axle; 12: tile fragment device; 121: tile fragment; 122: the first joints; 123: bearing; 124: screw rod; 125: fixed base; 126: screw; 127: lock screw; 128: hinge; 129: waist-shaped hole; 121 ': tile fragment; 122 ': the first joint; 123 ': bearing; 124 ': screw rod; 125 ': fixed block; 126 ': screw; 127 ': nut; 128 ': bulb; 129 ': briquetting; 2: fine motion plate; 21: opening; 3: base; 4: drive motor group; 41:Z is to motor; 42: θ z motor; 43: gravity compensator.
Embodiment
The micropositioner and the air-bearing that the present invention are proposed below in conjunction with the drawings and specific embodiments are described in further detail.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of the aid illustration embodiment of the present invention lucidly.
Core concept of the present invention is, a kind of micropositioner and air-bearing are provided, this micropositioner adopts a watt type static-pressure air bearing to carry out high-precision support and guiding work to the silicon chip on micropositioner or glass substrate, adopt drive motor group to carry out Z to fine motion plate, θ x, θ y, θ z moves to micro travel, this watt of type static-pressure air bearing comprises bearing dead axle and several tile fragment device being evenly arranged around dead axle, between described tile fragment device and described bearing dead axle, ventilation forms air film, described tile fragment device can move with described micropositioner, the air film of manufacturing also can tilt to play the effect of supporting and leading thereupon.
Please refer to Fig. 1 to Fig. 6, the structural representation of the micropositioner that Fig. 1 provides for the embodiment of the present invention; The structural representation of the air-bearing that Fig. 2 provides for the embodiment of the present invention; The structural representation of tile fragment device in the air-bearing that Fig. 3 provides for the embodiment of the present invention one; The sectional view of tile fragment device in the air-bearing that Fig. 4 provides for the embodiment of the present invention one; The structural representation of tile fragment device in the air-bearing that Fig. 5 provides for the embodiment of the present invention two; The sectional view of tile fragment device in the air-bearing that Fig. 6 provides for the embodiment of the present invention two.
Embodiment one
Please emphasis with reference to figure 1, as shown in Figure 1, the embodiment of the present invention provides a kind of micropositioner, described micropositioner comprises air-bearing 1, fine motion plate 2, base 3 and drive motor group 4, described air-bearing 1 is fixedly installed on described base 3, described fine motion plate 2 is connected with described base 3 by described drive motor group 4, described drive motor group 4 can drive described fine motion plate 2 to be Z, θ x, θ y, θ z move to micro travel, and direction and the thickness of the air film that described air-bearing 1 produces can change with the change of described fine motion plate 2 positions.
Further, described drive motor group 4 comprises three Z-direction motors 41, three gravity compensators 43 and two θ z motors 42, described Z-direction motor 41, gravity compensator 43 and θ z motor 42 are all arranged between described fine motion plate 2 and described base 3, and be rigidly connected with described base 3 with described fine motion plate 2, for driving fine motion plate 2 and object above thereof to be Z, θ x, θ y, θ z moves to micro travel, described θ z motor 42 is symmetrically arranged in the both sides of described air-bearing 1, described three Z-direction motors 41 and three gravity compensators 43 are all triangular shape and are symmetrically arranged on two angles and opposite side between described fine motion plate 2 and described base 3, described three Z-direction motors 41 and three gravity compensators 43 are for driving a side or the integral body of fine motion plate 2 to move along Z-direction, make described fine motion plate 2 can be Z, θ x, θ y to motion, described gravity compensator 43 can also play the effect of damping and buffering, extend the working life of this micropositioner, described two θ z motors 42 apply power along two of Y-axis contrary directions to fine motion plate 2 respectively when driving, it is moved along θ z direction.
Please emphasis with reference to figure 2, as shown in Figure 2, the embodiment of the present invention also provides a kind of air-bearing 1, described air-bearing 1 comprises bearing dead axle 11 and some tile fragment devices 12, described bearing dead axle 11 is fixedly installed on described base 3, described fine motion plate 2 is provided with an opening 21, described bearing dead axle 11 passes described opening 21 away from one end of described base 3, described some tile fragment devices are located at the excircle outside of described bearing dead axle 11 for 12 weeks, described some tile fragment devices 12 are all connected with described fine motion plate 2, between described tile fragment device 12 and described bearing dead axle 11, ventilation is to form air film, this air film can support and the object leading on micropositioner 2.
Please emphasis with reference to figure 3 and Fig. 4, as shown in Figure 3 and Figure 4, described some tile fragment devices 12 include tile fragment 121, the first joint 122, bearing 123, screw rod 124, fixed base 125 and screw 126, described tile fragment 121 matches near the shape of the shape of the side of described bearing dead axle 11 and the bearing dead axle 11 of described corresponding position, described the first joint 122 is arranged on described tile fragment 121, the side away from bearing dead axle 11 of described tile fragment 121 is connected with described bearing 123, described screw rod 124 is arranged in described bearing 123 and with described bearing 123 and is threaded connection, described fixed base 125 is fixed on described screw rod 124 on described fine motion plate 2, described screw rod 124 can be on described fixed base 125 rotarily drives described tile fragment 12 around himself central shaft and moves along described central axis direction, reach behind gap required between described tile fragment 12 and bearing dead axle 11, described bearing 123 is connected on described fine motion plate 2 by screw 126, described screw 126 is arranged on described bearing 123, the corresponding position of described fine motion plate 2 is provided with the tapped hole corresponding with described screw 126.
Further, described tile fragment device 12 also comprises lock screw 127, and described lock screw 127 is arranged in described bearing 123, and it is for stoping described screw rod 124 rotations.
Further, described tile fragment device 12 also comprises hinge 128, and described tile fragment 121 is connected with described bearing 123 by described hinge 128.
Further, described hinge 128 is flexible hinge.
Further, described bearing 123 is provided with waist-shaped hole 129, and described screw 126 is placed in described waist-shaped hole 129, and described screw 126 can be in the interior movement of described waist-shaped hole 129.
By turn adjusting screw rod 124, bearing 123 is radially moved, thereby make tile fragment 121 near producing gap to required separation distance between the side of bearing dead axle 11 and bearing dead axle 11, with lock screw 127 locking adjusting screw rods, the waist-shaped hole 129 being arranged on bearing 123 can make screw 126 move therein, and move it corresponding tapped hole place, and then use screw 126 is screwed on fine motion plate 2 to fixed bearing 123 in corresponding tapped hole.During micropositioner work, start each Z-direction motor 41 and θ z motor 42, simultaneously opening gas circuit, pressurized air is by the first joint 122 of each tile fragment device 12, enter in tile fragment 121, and form certain thickness air film between dead axle 11 and tile fragment 121, thus bearing load.Now under the driving of each motor, take a watt type static-pressure air bearing 1 as guiding, fine motion plate 2 is made Z, θ x, θ y, θ z move to micro travel, because tile fragment 121 and flexible hinge 128 flexibly connect, in movement process, tile fragment 121 tilts freely along with the variation of load, thereby realizes high-precision guide-localization.When meeting burst while dying situation, unclamp screw 126, shed fixed base 125, rotation adjusting screw rod 126, shifts out tile fragment 121, to avoid damaging the supporting plane of tile fragment 121.
Embodiment two
In the micropositioner providing in the embodiment of the present invention and air-bearing and embodiment one, the distinctive points of micropositioner and air-bearing is: ask emphasis with reference to figure 5 and Fig. 6, as shown in Figure 5 and Figure 6, described some tile fragment devices include tile fragment 121 ', the first joint 122 ', bearing 123 ', fixed block 125 ', screw rod 124 ' and screw 126 ', described tile fragment 121 ' match near the shape of the side of described bearing dead axle 11 and the shape of the bearing dead axle 11 of described corresponding position, the described tile fragment 121 of described the first joint 122 ' be arranged at ' on, described tile fragment 121 ' the side away from bearing dead axle 11 and described screw rod 124 ' one end be connected, the described fixed block 125 of described screw rod 124 ' be arranged in ' in and with described fixed block 125 ' be threaded connection, the described bearing 123 of described fixed block 125 ' be arranged at ' on, described screw rod 124 ' can described fixed base 125 ' on around himself central shaft, rotarily drive described tile fragment 12 and move along described central axis direction, reach behind gap required between described tile fragment 12 and bearing dead axle 11, by described bearing 123 ' by screw 126 ' be connected on described fine motion plate 2, the described bearing 123 of described screw 126 ' be arranged at ' on, the corresponding position of described fine motion plate 2 is provided with the tapped hole with described screw 126 ' corresponding.
Further, described tile fragment device 12 also comprise two nuts 127 ', described fixed block 125 ' both sides respectively by the described screw rod 124 of described two nuts 127 ' lock '.
Further, described screw rod 124 ' near described tile fragment 121 ' one end be provided with bulb 128 ', described tile fragment 121 ' near described screw rod 124 ' a side be provided with the inner ball surface with described bulb 128 ' match, described bulb 128 ' be placed in described inner ball surface, described tile fragment 121 ' can around described bulb 128 ' the center of circle rotate freely and do not depart from described screw rod 124 '.
Further, described tile fragment device 12 also comprises the second joint (not shown), and described the second joint is arranged at described tile fragment 121 ' upper, and its one end contacting with described tile fragment 121 communicates with described inner ball surface.
Further, described tile fragment device 12 also comprise briquetting 129 ', the described tile fragment 121 of described briquetting 129 ' be fixed on ' upper near bulb 128 ' position on, its for limit described bulb 128 ' motion, prevent the described screw rod 124 of described tile fragment 121 ' depart from '.
According to magnitude of load, rotating screw bolt 124 ', utilize screw rod 124 ' move radially, drive tile fragment 121 ' radially move together, thereby realize the object that regulates air-film thickness, after adjusting completes, with nut 127 ' from fixed block 125 ' two ends locking screw 124 ', by in tapped hole corresponding on screw 126 ' screw-in fine motion plate 2, simultaneously by tile fragment 121 ' on the second joint (not shown) pressurized air enter into tile fragment 121 ' and screw rod 124 ' bulb 128 ' and inner ball surface between, form air film, be tile fragment 121 ' can with bulb 128 ' the center of circle freely rotate, to adapt to distortion or the coaxial error of bearing dead axle 11, realize hi-Fix, and make tile fragment 121 ' be not the subject to impact of frictional force when rotating, reduce its frictionally damage.During work, start each Z-direction driving 41 and θ z motor 42, while opening gas circuit, pressurized air by each tile fragment 121 ' on the first joint 122 ', enter the tile fragment 121 of tile fragment device 12 ' in, bearing dead axle 11 and tile fragment 121 ' between form certain thickness air film, thereby bear the load on fine motion plate 2.Fine motion plate 2, under the driving of each drive motor, is Z, θ x, θ y, θ z to motion, and support and guiding that the silicon chip on fine motion plate 2 or glass substrate just can hard to bear this air-bearings 1 make silicon chip or the glass substrate can be with 2 motions of fine motion plate.When meeting burst while dying situation, can screw out outer nut 127 ', and rotary screw 124 ', by screw rod 124 ' with tile fragment 121 ' together with shift out bearing 123 ' with the fixed joint of fixed block 125 ' composition, with avoid damaging tile fragment 121 ' supporting plane.
The micropositioner providing in the embodiment of the present invention and air-bearing are all unchanged in other structures with respect to the micropositioner in embodiment one and air-bearing, therefore just repeat no more at this.
Obviously, those skilled in the art can carry out various changes and distortion and not depart from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.

Claims (16)

1. an air-bearing, it is arranged between the base and fine motion plate of micropositioner, described fine motion plate can be Z, θ x, θ y, θ z moves to micro travel, it is characterized in that, comprise bearing dead axle and some tile fragment devices, described bearing dead axle is fixedly installed on described base, described fine motion plate is provided with an opening, described bearing dead axle passes described opening away from one end of described base, be located at the excircle outside of described bearing dead axle described some tile fragment device weeks, described some tile fragment devices are all connected with described fine motion plate, the direction of the air film that described air-bearing produces and thickness change with the change of described fine motion Board position.
2. air-bearing according to claim 1, it is characterized in that, described some tile fragment devices include tile fragment, the first joint, bearing, screw rod and fixed base, described tile fragment matches near the shape of the described bearing dead axle side and the shape of described bearing dead axle, described the first joint is arranged on described tile fragment, the side away from bearing dead axle of described tile fragment is connected with described bearing, described screw rod is arranged in described bearing and with described bearing and is threaded connection, described fixed base is fixed on described screw rod on described fine motion plate, described screw rod rotarily drives described tile fragment around himself central shaft and moves along described central axis direction on described fixed base, reach behind gap required between described tile fragment and bearing dead axle, described bearing is connected on described fine motion plate.
3. air-bearing according to claim 2, is characterized in that, described tile fragment device also comprises lock screw, and described lock screw is arranged in described bearing, for stoping described screw rod rotation.
4. air-bearing according to claim 2, is characterized in that, described tile fragment device also comprises hinge, and described tile fragment is connected with described bearing by described hinge.
5. air-bearing according to claim 4, is characterized in that, described hinge is flexible hinge.
6. air-bearing according to claim 2, is characterized in that, described bearing is connected on described fine motion plate by screw, and described bearing is provided with waist-shaped hole, and described screw is placed in described waist-shaped hole, and described screw can move in described waist-shaped hole.
7. air-bearing according to claim 1, it is characterized in that, described some tile fragment devices include tile fragment, the first joint, bearing, fixed block and screw rod, described tile fragment matches near the shape of the side of described bearing dead axle and the shape of described bearing dead axle, described the first joint is arranged on described tile fragment, being connected away from the side of bearing dead axle and one end of described screw rod of described tile fragment, described screw rod is arranged in described fixed block and with described fixed block and is threaded connection, described fixed block is arranged on described bearing, described screw rod rotarily drives described tile fragment around himself central shaft and moves along described central axis direction on described fixed base, reach behind gap required between described tile fragment and bearing dead axle, described bearing is connected on described fine motion plate.
8. air-bearing according to claim 7, is characterized in that, described tile fragment device also comprises nut, and described nut is used for locking described screw rod.
9. air-bearing according to claim 8, is characterized in that, the quantity of described nut is two, is separately positioned on the both sides of described fixed block, by screw rod described in two described nut checks.
10. air-bearing according to claim 7, it is characterized in that, described screw rod is provided with bulb near one end of described tile fragment, described tile fragment is provided with near a side of described screw rod the inner ball surface matching with described bulb, described bulb is placed in described inner ball surface, and described tile fragment can rotate freely around the center of circle of described bulb and not depart from described screw rod.
11. air-bearings according to claim 10, is characterized in that, described tile fragment device also comprises the second joint, and described the second joint is arranged on described tile fragment, and its one end contacting with described tile fragment communicates with described inner ball surface.
12. air-bearings according to claim 10, is characterized in that, described tile fragment device also comprises briquetting, and described briquetting is fixed on described tile fragment near on the position of bulb, and it prevents that for limiting the motion of described bulb described tile fragment from departing from described screw rod.
13. 1 kinds of micropositioners, it is characterized in that, comprise air-bearing, fine motion plate, base and drive motor group as described in claim 1 to 12 any one, described air-bearing is fixedly installed on described base, described fine motion plate is connected with described base by described drive motor group, and described drive motor group can drive described fine motion plate to be Z, θ x, θ y, θ z move to micro travel.
14. according to micropositioner described in claim 13, it is characterized in that, described drive motor group comprises Z-direction motor and θ z motor, and described Z-direction motor and θ z motor are all arranged between described fine motion plate and described base.
15. according to micropositioner described in claim 14, it is characterized in that, described drive motor group also comprises gravity compensator, and described gravity compensator is arranged between described fine motion plate and described base.
16. according to micropositioner described in claim 15, it is characterized in that, the quantity of described Z-direction motor is three, the quantity of described θ z motor is two, the quantity of described gravity compensator is three, described θ z motor is symmetrically arranged in the both sides of described air-bearing, and described three Z-direction motors and three gravity compensators are all triangular shape and are symmetrically arranged on two angles and opposite side between described fine motion plate and described base.
CN201210270601.5A 2012-07-31 2012-07-31 Micropositioner and gas bearing Active CN103573815B (en)

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Application Number Priority Date Filing Date Title
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CN103573815A true CN103573815A (en) 2014-02-12
CN103573815B CN103573815B (en) 2017-02-22

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105651163A (en) * 2015-12-28 2016-06-08 威申精密仪器(上海)有限公司 Image measuring instrument with high measurement precision
CN111025855A (en) * 2019-12-23 2020-04-17 中国科学院光电技术研究所 Non-contact automatic center alignment overlay projection photoetching machine
CN112096739A (en) * 2020-08-05 2020-12-18 佛山市华道超精科技有限公司 Air-floatation guide rail type switchable rigid-flexible coupling motion platform

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Publication number Priority date Publication date Assignee Title
EP0729073A1 (en) * 1995-02-24 1996-08-28 Canon Kabushiki Kaisha Positioning system and method and apparatus for device manufacture
US20050036126A1 (en) * 2001-11-29 2005-02-17 Canon Kabushiki Kaisha Positioning apparatus and method for manufacturing same
CN102043351A (en) * 2009-10-12 2011-05-04 上海微电子装备有限公司 Leveling and focusing mechanism and mask platform with same
CN102537049A (en) * 2010-12-30 2012-07-04 上海微电子装备有限公司 Radial air floatation guide module and photoetching machine motion platform applying same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0729073A1 (en) * 1995-02-24 1996-08-28 Canon Kabushiki Kaisha Positioning system and method and apparatus for device manufacture
US20050036126A1 (en) * 2001-11-29 2005-02-17 Canon Kabushiki Kaisha Positioning apparatus and method for manufacturing same
CN102043351A (en) * 2009-10-12 2011-05-04 上海微电子装备有限公司 Leveling and focusing mechanism and mask platform with same
CN102537049A (en) * 2010-12-30 2012-07-04 上海微电子装备有限公司 Radial air floatation guide module and photoetching machine motion platform applying same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105651163A (en) * 2015-12-28 2016-06-08 威申精密仪器(上海)有限公司 Image measuring instrument with high measurement precision
CN111025855A (en) * 2019-12-23 2020-04-17 中国科学院光电技术研究所 Non-contact automatic center alignment overlay projection photoetching machine
CN112096739A (en) * 2020-08-05 2020-12-18 佛山市华道超精科技有限公司 Air-floatation guide rail type switchable rigid-flexible coupling motion platform
CN112096739B (en) * 2020-08-05 2021-12-21 佛山市华道超精科技有限公司 Air-floatation guide rail type switchable rigid-flexible coupling motion platform
WO2022028260A1 (en) * 2020-08-05 2022-02-10 佛山市华道超精科技有限公司 Air-floating guide rail type switchable rigid-flexible coupling motion platform

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