CN106113022B - A kind of single-freedom and flexible mini positioning platform - Google Patents

A kind of single-freedom and flexible mini positioning platform Download PDF

Info

Publication number
CN106113022B
CN106113022B CN201610715174.5A CN201610715174A CN106113022B CN 106113022 B CN106113022 B CN 106113022B CN 201610715174 A CN201610715174 A CN 201610715174A CN 106113022 B CN106113022 B CN 106113022B
Authority
CN
China
Prior art keywords
platform
flexible
flexible hinge
freedom
lever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610715174.5A
Other languages
Chinese (zh)
Other versions
CN106113022A (en
Inventor
汤晖
高健
曾昭和
邱迁
李宏城
陈新
王晗
王素娟
贺云波
杨杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong University of Technology
Original Assignee
Guangdong University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong University of Technology filed Critical Guangdong University of Technology
Priority to CN201610715174.5A priority Critical patent/CN106113022B/en
Publication of CN106113022A publication Critical patent/CN106113022A/en
Application granted granted Critical
Publication of CN106113022B publication Critical patent/CN106113022B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/08Programme-controlled manipulators characterised by modular constructions

Abstract

The invention discloses a kind of single-freedom and flexible mini positioning platforms, including motion input device, flexible motion platform and platform base for fixing flexible motion platform, flexible motion platform includes being symmetrical arranged two half-unit movement mechanism, each half portion includes this design of motion platform and multipole differential lever by flexible hinge connection by displacement equations, in the case that flexible hinge and lever itself position and size accurately, the more accurate amplification of displacement may be implemented;Design structure is concise, the space occupied is relatively small, using symmetrical structure, output displacement that can be relatively stable, lateral additional displacement is effectively eliminated, the Longitudinal data displacement error of reducing mechanism itself improves the precision of displacement equations, the design of flexible hinge is easy to be integrally machined, can be to avoid rigging error.Displacement equations are accurately realized in relatively small space, with lower cost, solve the problems, such as that the big stroke of flexible micro-positioning platform is difficult to take into account with high-precision.

Description

A kind of single-freedom and flexible mini positioning platform
Technical field
It is micro- more specifically to a kind of single-freedom and flexible the present invention relates to mechanical displacement multiplying arrangement technical field Locating platform.
Background technique
Currently, there are two types of the main stream approach of the realization big stroke high position precision of motion platform: one is use macro micro- two-stage Workbench, macro dynamic platform realize that big stroke, micropositioner realize final positioning accuracy.The main thought of this kind of locating platform design is Two kinds of motor is combined, DC motor control mechanism grand movement, Piezoelectric Ceramics Excitation device guarantees eventually Hold the high-precision of actuator.This mode overcomes the small drawback of traditional micro-manipulating robot working space, but whole driving System structure is complicated, volume is big, cost is high, can not minimize.
Another kind is the single layer work being combined into accurate displacement inputting apparatus such as piezoelectric ceramic actuator and linkage Make platform and realize large-stroke nanometer positioning, although structure is simple, the rigidity in the elastic hinge direction of motion makes displacement input dress The practical elongation inputted is set to need less than nominal elongation if the impulse stroke of mini positioning platform is made to reach requirement Increase the length of displacement inputting apparatus, however the length of the displacement inputting apparatus of piezoelectric ceramic actuator class is again flat by micro- positioning The limitation of platform structural compactness.If lever principle is used in the design of mini positioning platform to increase the work of mini positioning platform Make stroke, the movement rigidity of elastic hinge will affect the output displacement of displacement inputting apparatus, while common lever in lever mechanism Mechanism also will lead to mini positioning platform and generate offset error during the motion.
In conclusion how to efficiently solve big stroke present in existing flexible micro-positioning platform and high-precision it is conflicting Deng technical problem, be current those skilled in the art's urgent problem.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of single-freedom and flexible mini positioning platform, the single-degree-of-freedom is soft Property mini positioning platform structure design can efficiently solve big stroke and high-precision phase present in existing flexible micro-positioning platform The technical problem of mutual contradiction etc..
In order to achieve the above object, the invention provides the following technical scheme:
A kind of single-freedom and flexible mini positioning platform, including motion input device, flexible motion platform and soft for fixing Property motion platform platform base, the flexible motion platform include be set to conplane first half portion and the second half portion, Translational motion is input to the first half portion and the second half portion by the first platform by the motion input device, first half portion with Axis axial symmetry of the structure of second half portion about first platform;
First half portion includes the second platform, and the head end of second platform passes through the first flexible hinge and the first lever Tail end connection, tail end connect by the second flexible hinge with the middle section of the second lever;
The head end of first lever and first platform away from side passes through third flexible hinge and third lever Head end connection, middle section of first lever towards first platform side and the platform base pass through the 4th flexible hinge Connection;
The head end of second lever is connect by the 5th flexible hinge with the middle section of the third lever, second thick stick Pole face is connected between the tail end and the platform base of first platform side by the 6th flexible hinge;
Tail end of the third lever away from second lever side is connect by the 7th flexible hinge with output stage, The output stage connects the position limiting structure that the direction of its restricted movement inputted along the motion input device moves.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the side of first platform and the movement are inputted The output end of device connects, and one end of the other side is connect by the 8th flexible hinge with the middle section of second platform, and described the The other end of one platform is provided with the 9th flexible hinge for connecting with the second half portion.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the head end of the output stage and end pass through soft Property hinge is connect with first half portion and the second half portion, the company with the tie point of first half portion and with second half portion Formed symmetrical of the contact about output stage.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the flexible motion platform is additionally provided with ontology and institute State the fixed fixed part of platform base installation, one end of the 4th flexible hinge and the 6th flexible hinge passes through the fixation Portion is connect with the platform base.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, first flexible hinge, the second flexible hinge, Four flexible hinges, the 6th flexible hinge, the 8th flexible hinge are arc-shaped flexible hinge.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the third flexible hinge is straight beam type flexible hinge.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the 5th flexible hinge and the 7th flexible hinge are equal For chamfering circle straight beam flexible hinge.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the flexible motion platform and the platform base it Between by fastening bolt face paste close installation fix.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the flexible motion platform and the platform base it Between be additionally provided with platform gasket.
Preferably, in above-mentioned single-freedom and flexible mini positioning platform, the motion input device is specially that piezoelectric ceramics drives Dynamic device.
Single-freedom and flexible mini positioning platform provided by the invention, including motion input device, flexible motion platform and use In the platform base of fixed flexible motion platform, flexible motion platform includes being set to conplane first half portion and the second half Translational motion is input to the first half portion and the second half portion, the first half portion and second by the first platform by portion, motion input device Axis axial symmetry of the structure of half portion about the first platform;First half portion includes the second platform, and the head end of the second platform passes through the One flexible hinge is connect with the tail end of the first lever, and tail end is connect by the second flexible hinge with the middle section of the second lever;First The head end of lever and the first platform away from side is connect by third flexible hinge with the head end of third lever, the first lever towards The middle section of first platform side is connect with platform base by the 4th flexible hinge;The head end of second lever passes through the 5th flexible hinge Chain is connect with the middle section of third lever, between tail end and platform base of second lever towards the first platform side, passes through the 6th Flexible hinge connection;Tail end of the third lever away from the second lever side is connect by the 7th flexible hinge with output stage, defeated Platform connects the restricted position limiting structure that it is moved along the direction of the movement of motion input device input out.This single-degree-of-freedom is soft Property mini positioning platform includes multipole differential formula lever by displacement equations, improves the stroke of amplification, between lever and lever and bottom Flexible hinge connection conduction displacement is all made of between seat, in the case that flexible hinge and lever itself position and size accurately, The more accurate amplification of displacement may be implemented;And this design structure is concise, the space occupied compared with the prior art in Design it is smaller, design use symmetrical structure, integral rigidity is higher, can relatively stable and accurate output displacement, in mechanism Size itself accurately under the premise of, can effectively eliminate lateral additional displacement, the Longitudinal data displacement error of reducing mechanism itself, The precision of displacement equations is improved, the design of flexible hinge is easy to be integrally machined, can be to avoid rigging error.In conclusion this Invent provide this single-freedom and flexible mini positioning platform in relatively small space, with relatively small equipment cost compared with Accurately to realize displacement equations, big stroke present in existing flexible micro-positioning platform and high-precision are efficiently solved mutually The technical problem of contradiction etc..
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with It obtains other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of single-freedom and flexible mini positioning platform provided in an embodiment of the present invention;
Fig. 2 is the overlooking structure diagram of single-freedom and flexible mini positioning platform provided in an embodiment of the present invention.
It is marked in attached drawing as follows:
Flexible motion platform 1, fastening bolt 2, platform gasket 3, platform base 4, piezoelectric ceramic actuator 6, the first platform 7, the 8th flexible hinge 8, the second platform 9, the first flexible hinge 10, the 4th flexible hinge 11, the first lever 12, third flexible hinge Chain 13, the 5th flexible hinge 15, the second lever 16, the second flexible hinge 17, the 6th flexible hinge 18, is fixed third lever 14 Portion 19, the 7th flexible hinge 20, output stage 21.
Specific embodiment
The embodiment of the invention discloses a kind of single-freedom and flexible mini positioning platforms, and it is flat to solve the micro- positioning of existing flexibility with ground Big stroke present in platform and the conflicting technical problem waited of high-precision.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Fig. 1, Fig. 2 are please referred to, Fig. 1 is the structural representation of single-freedom and flexible mini positioning platform provided in an embodiment of the present invention Figure;Fig. 2 is the overlooking structure diagram of single-freedom and flexible mini positioning platform provided in an embodiment of the present invention.
A kind of single-freedom and flexible mini positioning platform, including motion input device, flexible motion platform 1 and soft for fixing Property motion platform 1 platform base 4, flexible motion platform 1 include be set to conplane first half portion and the second half portion, transport Translational motion is input to the first half portion and the second half portion, the first half portion and the second half portion by the first platform 7 by dynamic input unit Axis axial symmetry of the structure about the first platform 7;
First half portion includes the second platform 9, and the head end of the second platform 9 passes through the first flexible hinge 10 and the first lever 12 Tail end connection, tail end are connect by the second flexible hinge 17 with the middle section of the second lever 16;
First lever 12 and the first platform 7 pass through the head of third flexible hinge 13 and third lever 14 away from the head end of side End connection, middle section of first lever 12 towards 7 side of the first platform are connect with platform base 4 by the 4th flexible hinge 11;
The head end of second lever 16 is connect by the 5th flexible hinge 15 with the middle section of third lever 14,16 face of the second lever To between the tail end and platform base 4 of 7 side of the first platform, connected by the 6th flexible hinge 18;
Tail end of the third lever 14 away from 16 side of the second lever is connect by the 7th flexible hinge 20 with output stage 21, Output stage 21 connects the restricted position limiting structure that it is moved along the direction of the movement of motion input device input.
Wherein it should be noted that flexible hinge is the elastic bearing that a kind of structure is simple, shape is more regular, have and The centre of gyration of geometric center overlapping of axles, the finite deformation for relying on the elastic sheet of circumference radial equipartition work.It is turning round It reprints under lotus, generates rotary motion in limited angular range around its centre of gyration.Flexible hinge used in the present invention itself It can be integrally formed and process with other fixation members in lever or platform, can effectively avoid rigging error.
Wherein, the complete axial symmetry of axis of the first half portion and the second half portion in structure relative to output movement, by complete The design of holosymmetric mechanism, which is realized, increases system stiffness, stable motion output, the purpose for the design that simplifies the internal structure of an organization, the first half portion and the The bottom of two half portions is connect with the first platform jointly, exports identical displacement movement to the two by the first platform.
In addition, head end, end and middle section are opposite concepts, for illustrating the opposite position of tie point on lever or platform It sets, has no specific size and position limitation, the size of the displacement for needing to export and flexible hinge can be passed through in concrete application The position of the specific adjustment hinge joint of design is to adapt to specific application environment.
This single-freedom and flexible mini positioning platform substantially working principle provided in this embodiment is as follows: motion input device It inputs initial motion and squeezes the first platform, top of first platform into Fig. 2 is subjected to displacement, and the second platform is squeezed, in flexible hinge Under the conduction of chain, the first lever rotates counterclockwise certain angle by axis of the 4th flexible hinge, and similarly the second lever is second Under the action of flexible hinge, certain angle is rotated clockwise using the 6th flexible hinge as axis, in the first lever and the second lever Rotation push under, translation upwards occurs simultaneously under the action of the 5th flexible hinge and third flexible hinge for third lever The displacement after sending out big is conducted to output stage, output stage by the 7th flexible hinge of its tail end with rotation counterclockwise Under the restriction of position limiting structure, export the translation upwards of default magnification ratio, the ratio of translation amplification by each lever, The specific design of the size of platform and the thereon position of each flexible hinge tie point and flexible hinge determines.
Preferred design is to pass through the first half portion of design of symmetrical structure and the second half portion while the displacement of output upwards, And offset by symmetrically design and caused horizontal translation is reversed by lever, achieve the purpose that horizontal direction limits.
This single-freedom and flexible mini positioning platform includes multipole differential formula lever by displacement equations, improves the row of amplification Journey is all made of flexible hinge connection conduction displacement between lever, in flexible hinge and lever itself position between lever and pedestal Set and size accurately in the case of, the more accurate amplification of displacement may be implemented;And this design structure is concise, occupies Space compared with the prior art in design it is smaller, design use symmetrical structure, integral rigidity is higher, can be relatively stable and quasi- True output displacement, mechanism size itself accurately under the premise of, lateral additional displacement, reducing mechanism itself can be effectively eliminated Longitudinal data displacement error, improve the precision of displacement equations, the design of flexible hinge is easy to be integrally machined, can be to avoid dress With error.In conclusion this single-freedom and flexible mini positioning platform provided by the invention in relatively small space, with phase Displacement equations are more accurately realized to lesser equipment cost, are efficiently solved present in existing flexible micro-positioning platform Big stroke and the conflicting technical problem waited of high-precision.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, the side of first platform 7 is connect with the output end of the motion input device, and one end of the other side is logical It crosses the 8th flexible hinge 8 to connect with the middle section of second platform 9, the other end of first platform 7 is provided with for 9th flexible hinge of two half portions connection.
The displacement of first platform is passed to the first half by the design of flexible hinge by technical solution provided in this embodiment Portion and the second half portion pass through flexible hinge wherein the second half portion is provided with symmetrically arranged platform identical as the first half portion structure Passing movement may be implemented accurately to be displaced transmitting.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, the head end of the output stage 21 and end pass through flexible hinge and first half portion and the second half portion Connection, the formed symmetrical with the tie point of first half portion and with the tie point of second half portion about output stage 21.
First half portion and the second half portion are realized by the connection structure of the first platform in technical solution provided in this embodiment Complete lattice symmetrically designs, and guarantees that output displacement is consistent, effectively ensures the symmetry of system in movement input terminal.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, the flexible motion platform 1 is additionally provided with ontology and the platform base 4 installs fixed fixed part 19, One end of 4th flexible hinge 11 and the 6th flexible hinge 18 passes through the fixed part 19 and connects with the platform base 4 It connects.
Fixed part is the extension of flexible motion platform in technical solution provided in this embodiment, and flexible motion platform is logical It crosses fixed part and platform base realizes that installation is fixed, fixed part not merely refers to some specific structure but flexible motion platform With the fixed part of platform base, pass through the 4th flexible hinge and the 6th one end of flexible hinge and being connected with for fixed part Effect ensures that the fixed pivot of lever motion is stablized.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, first flexible hinge 10, the second flexible hinge 17, the 4th flexible hinge 11, the 6th flexible hinge 18, 8th flexible hinge 8 is arc-shaped flexible hinge.
Wherein, arc-shaped hinge is that hinged both ends are all made of arc-shaped design, hinge itself in excessive position The structure that two opposing arcs are presented has movement transmitting accuracy high in flexible hinge, and the lesser feature of slewing area is suitable Close the application site of first, second, the four, the six, the 8th flexible hinges in the technical program.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, the third flexible hinge 13 is straight beam type flexible hinge.
Straight beam type hinge is that hinged both ends in excessive position are all made of the design of square, since design needs, Third flexible hinge is required to realize biggish displacement transmitting, since the position-limiting action of other flexible hinges is not exigent Kinematic accuracy, so using straight beam type flexible hinge.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, the 5th flexible hinge 15 and the 7th flexible hinge 20 are chamfering circle straight beam flexible hinge.This implementation The 5th flexible hinge and the 7th flexible hinge are chamfering circle straight beam flexible hinge, this flexible hinge in the technical solution that example provides Chain tool can take into account the precision of movement transmitting and the transmitting range of movement, be suitble to the application of the technical program.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, installation is closed by 2 face paste of fastening bolt between the flexible motion platform 1 and the platform base 4 and is fixed. Position such as fixed part is needed in flexible motion platform using fastening bolt, platform and platform base installation are fixed, it is ensured that fortune The fixation of moving platform position prevents the effect position of platform due to input motion from deviating.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, platform gasket 3 is additionally provided between the flexible motion platform 1 and the platform base 4.Pass through gasket Flexible motion platform is slightly lifted away from platform base by design, prevents the position for needing to move on platform and platform base from occurring Friction, causes resistance to the movement of wherein component, and the precision of displacement transmitting amplification is caused to reduce.
To advanced optimize above-mentioned technical proposal, on the basis of the above embodiments preferably, above-mentioned single-freedom and flexible In mini positioning platform, the motion input device is specially piezoelectric ceramic actuator 6.Piezoelectric ceramic actuator is that a kind of utilize is pressed The inverse piezoelectric principle of electroceramics realizes the device of precise displacement output by control electric current input, using piezoelectric ceramic actuator It is capable of providing accurately movement input, it can be more accurate controllable by the displacement that flexible motion platform hair exports greatly to enable.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one The widest scope of cause.

Claims (10)

1. a kind of single-freedom and flexible mini positioning platform, including motion input device, flexible motion platform and for fixed flexible The platform base of motion platform, which is characterized in that the flexible motion platform include be set to conplane first half portion and Second half portion, translational motion is input to the first half portion and the second half portion by the first platform by the motion input device, described Axis axial symmetry of the structure of first half portion and second half portion about first platform;
First half portion includes the second platform, and the head end of second platform passes through the tail of the first flexible hinge and the first lever End connection, tail end are connect by the second flexible hinge with the middle section of the second lever;
First lever and first platform pass through the head end of third flexible hinge and third lever away from the head end of side Connection, middle section of first lever towards first platform side and the platform base are connected by the 4th flexible hinge It connects;
The head end of second lever is connect by the 5th flexible hinge with the middle section of the third lever, second leverage surface To between the tail end and the platform base of first platform side, connected by the 6th flexible hinge;
Tail end of the third lever away from second lever side is connect by the 7th flexible hinge with output stage, described Output stage connects the position limiting structure that the direction of its restricted movement inputted along the motion input device moves.
2. single-freedom and flexible mini positioning platform according to claim 1, which is characterized in that the side of first platform It is connect with the output end of the motion input device, one end of the other side passes through in the 8th flexible hinge and second platform Section connection, the other end of first platform are provided with the 9th flexible hinge for connecting with the second half portion.
3. single-freedom and flexible mini positioning platform according to claim 2, which is characterized in that the head end of the output stage Pass through flexible hinge with end to connect with first half portion and the second half portion, with the tie point of first half portion and with institute State formed symmetrical of the tie point about output stage of the second half portion.
4. single-freedom and flexible mini positioning platform according to claim 2, which is characterized in that the flexible motion platform is also It is provided with the fixed part of ontology and platform base installation fixation, one end of the 4th flexible hinge and the 6th flexible hinge It is connect by the fixed part with the platform base.
5. according to the described in any item single-freedom and flexible mini positioning platforms of claim 2 to 4, which is characterized in that described first Flexible hinge, the second flexible hinge, the 4th flexible hinge, the 6th flexible hinge, the 8th flexible hinge are arc-shaped flexible hinge Chain.
6. single-freedom and flexible mini positioning platform according to claim 5, which is characterized in that the third flexible hinge is Straight beam type flexible hinge.
7. single-freedom and flexible mini positioning platform according to claim 6, which is characterized in that the 5th flexible hinge and 7th flexible hinge is chamfering circle straight beam flexible hinge.
8. single-freedom and flexible mini positioning platform according to claim 5, which is characterized in that the flexible motion platform with Installation is closed by fastening bolt face paste between the platform base to fix.
9. single-freedom and flexible mini positioning platform according to claim 5, which is characterized in that the flexible motion platform with Platform gasket is additionally provided between the platform base.
10. single-freedom and flexible mini positioning platform according to claim 7, which is characterized in that the motion input device Specially piezoelectric ceramic actuator.
CN201610715174.5A 2016-08-24 2016-08-24 A kind of single-freedom and flexible mini positioning platform Active CN106113022B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610715174.5A CN106113022B (en) 2016-08-24 2016-08-24 A kind of single-freedom and flexible mini positioning platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610715174.5A CN106113022B (en) 2016-08-24 2016-08-24 A kind of single-freedom and flexible mini positioning platform

Publications (2)

Publication Number Publication Date
CN106113022A CN106113022A (en) 2016-11-16
CN106113022B true CN106113022B (en) 2019-02-22

Family

ID=57275586

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610715174.5A Active CN106113022B (en) 2016-08-24 2016-08-24 A kind of single-freedom and flexible mini positioning platform

Country Status (1)

Country Link
CN (1) CN106113022B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106737597B (en) * 2017-01-12 2018-01-16 广东工业大学 A kind of XYZ three-freedom degree precisions positioner
CN106782674B (en) * 2017-02-07 2022-10-25 广东工业大学 Micro-displacement amplifier and nano positioning device
CN106763142B (en) * 2017-03-01 2023-06-20 华侨大学 Single-degree-of-freedom flexible hinge with self-locking function
CN106812786B (en) * 2017-03-01 2023-08-29 华侨大学 single degree of freedom flexible hinge
CN107131404B (en) * 2017-04-24 2019-03-19 天津大学 It is single to drive the pure rotation mini positioning platform of double pendulum type
CN106975961A (en) * 2017-05-19 2017-07-25 广东工业大学 A kind of long stroke fast tool servo
CN109079766B (en) * 2018-11-12 2023-08-22 广东工业大学 Three-degree-of-freedom motion platform based on flexible amplifying mechanism
CN109489582B (en) * 2018-12-29 2024-03-26 广东工业大学 Three-degree-of-freedom precision motion platform
CN110415760A (en) * 2019-07-25 2019-11-05 天津大学 High-precision Z based on triangle gridding hinge is to single-degree-of-freedom mini positioning platform
CN113258825B (en) * 2021-05-31 2022-05-27 吉林大学 Piezoelectric driver control method based on stick-slip and impact principle coupling
CN113459053B (en) * 2021-06-25 2022-08-09 西安交通大学 Motion platform device based on piezoelectric drive
CN114198481B (en) * 2021-12-16 2023-11-10 北京航空航天大学 Parallel two-degree-of-freedom precise motion executing mechanism based on flexible hinge

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359494A (en) * 1989-07-28 1991-03-14 Nec Corp Fine adjustment z-stage device
CN102323720A (en) * 2011-08-03 2012-01-18 河北工业大学 Flexible micro-positioning platform based on driving of piezoelectric ceramics
CN202212949U (en) * 2011-08-29 2012-05-09 华南理工大学 Micrometric displacement amplifying mechanism based on compliant mechanism
CN205177409U (en) * 2015-10-24 2016-04-20 江西理工大学 Little operation platform of one -dimensional translation based on gentle and agreeable mechanism
CN105643592A (en) * 2016-03-15 2016-06-08 河北工业大学 Symmetrical decoupling and single degree of freedom flexible operation mechanism
CN206048189U (en) * 2016-08-24 2017-03-29 广东工业大学 A kind of single-freedom and flexible mini positioning platform

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359494A (en) * 1989-07-28 1991-03-14 Nec Corp Fine adjustment z-stage device
CN102323720A (en) * 2011-08-03 2012-01-18 河北工业大学 Flexible micro-positioning platform based on driving of piezoelectric ceramics
CN202212949U (en) * 2011-08-29 2012-05-09 华南理工大学 Micrometric displacement amplifying mechanism based on compliant mechanism
CN205177409U (en) * 2015-10-24 2016-04-20 江西理工大学 Little operation platform of one -dimensional translation based on gentle and agreeable mechanism
CN105643592A (en) * 2016-03-15 2016-06-08 河北工业大学 Symmetrical decoupling and single degree of freedom flexible operation mechanism
CN206048189U (en) * 2016-08-24 2017-03-29 广东工业大学 A kind of single-freedom and flexible mini positioning platform

Also Published As

Publication number Publication date
CN106113022A (en) 2016-11-16

Similar Documents

Publication Publication Date Title
CN106113022B (en) A kind of single-freedom and flexible mini positioning platform
Yao et al. Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage
EP1084802A3 (en) Four-degree-of-freedom parallel robot
CN108621130A (en) Parallel institution with two kinds of motor patterns of 2R1T and 2T1R
CN103302660B (en) Two-degree-of-freedom metamorphic mechanism
JP6040057B2 (en) Two-dimensional moving closed link structure
CN101259617A (en) Fork four-freedom parallel connection robot mechanism
CN101259618A (en) Three-freedom mobile parallel connection mechanism without redundant bondage
KR20100104125A (en) Manipulators with distributed actuation mechanism
WO2018233469A1 (en) Spherical parallel mechanism
CN206048189U (en) A kind of single-freedom and flexible mini positioning platform
CN109723945A (en) A kind of accurate direction platform based on flexible parallelogram mechanism
CN208788580U (en) A kind of parallel accurate operation mechanism
CN206241884U (en) A kind of constant force clamp
CN102969031A (en) Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable
CN103904937A (en) Rotation type driving device and method based on three piezoelectric stacks
CN106082114B (en) A kind of flexible big stroke micro-nano technology equipment
CN106251910B (en) One kind receives mini positioning platform
CN106782674B (en) Micro-displacement amplifier and nano positioning device
CN105174210B (en) Three Degree Of Freedom mini positioning platform based on the double submissive hinges of symmetric form
CN105196280A (en) Redundant drive type three-horizontal-movement micro-operation robot
CN106224480A (en) A kind of big stroke flexible rotating based on four-bar mechanism cuts with scissors
CN102751899B (en) Micro nano bionic multi-degree of freedom driving device
Chung et al. Design of a new 2 DOF parallel mechanism
Wang et al. Design of a flexure-based XY precision positioning stage with constant force output

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant