JPH0359494A - Fine adjustment z-stage device - Google Patents

Abstract

PURPOSE:To easily adjust the swing and tilt angle and straightness of an elevation stage surface by driving two elastic hinges, which support a fine moving stage part where respective tapered blocks are mounted in a vertically displaceable state, upward and downward with two eccentric pins. CONSTITUTION:A fine moving mechanism 6 formed on a horizontal moving plate 2 that a tapered block 7 has restrains the fine moving stage part 10 where the block 7 is mounted horizontally with two elastic hinges 11 to support it in the vertically displaceable state. Those hinges 11 are driven upward and downward with the two eccentric pins 12. Here, the two elastic hinges 11 are driven in the same direction by the same quantity with the two eccentric pins 12 to move the stage part 10 upward and downward finely and the height of the engagement point between the block 7 and a cam follower 8 is varied finely to adjust the swing and tilt angle of the surface of the elevation stage 3. Further, when the two elastic hinges 11 are moved by different quantities with the two eccentric pins 12, the stage part 10 is rotated finely to match the taper angle of the block 7, thereby adjusting the straightness of the stage 3.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine movement Z stage device, and more particularly to a fine movement Z stage device on which a wafer and a mask are placed in J3 in a semiconductor process.

[Conventional technology]

A conventional fine movement Z stage device will be explained with reference to the drawings. FIG. 3 is a sectional view showing an example of a conventional fine movement Z stage device.

The fine movement Z stage device shown in FIG. 3 includes a horizontal movement plate 2 that is movable in the horizontal direction with respect to the base part 1, an elevating stage 3 that is movable in the vertical direction with respect to the base part 1,
A motor 4 and a ball screw 5 that drive the horizontally moving plate 2, a tapered block 14 formed on the horizontally moving plate 2, a cam follower 8 that engages with the tapered surface of the tapered block 14 formed on the elevating stage 3, It is configured to include a leaf spring 9 that guides the stage 3 in the vertical direction.

Then, when the horizontal movement plate 2 is moved horizontally by the motor 4 and the ball screw 5, each taper block 1
4 simultaneously move in the same direction, the height of the engagement point with each cam follower 8 rises and falls at the same time, and the elevating stage 3 moves in the vertical direction accordingly. At this time, the lift stage 3 is guided in the vertical direction by the leaf spring 9 without rotating or moving in the horizontal direction.

“Problems to be Solved by the Invention” The conventional fine movement Z stage device described above lacks a mechanism for adjusting the Taber angle of the Taber block, and the shape error of the Taber impedes the flatness and straightness of the lifting stage. Therefore, it has the disadvantage that high shape accuracy with respect to the taber is required.

[Means to solve the problem]

The fine movement Z stage device of the present invention is a fine movement Z stage device that moves up and down by a plurality of Taber blocks that move horizontally at the same time, and includes a fine movement stage section on which each of the Taber blocks is mounted, and a fine movement stage section that moves the fine movement stage section in the horizontal direction. It is configured to include two elastic hinges that are restrained and supported so as to be freely displaceable in the vertical direction, and two eccentric pins that respectively drive the elastic hinges in the vertical direction.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a sectional view showing an embodiment of the fine movement Z stage device of the present invention.

The fine movement Z stage device shown in FIG. 1 includes a horizontally moving plate 2 that is movable horizontally with respect to a base portion 1, an elevating stage 3 that is movable vertically with respect to the base portion 1,
A motor 4 and a ball screw 5 that drive the horizontally moving plate 2 in the horizontal direction, a Taber block 7 having a minute movement mechanism 6 formed on the horizontally moving plate 2, and a Taber block 7 shaped and controlled by the lifting stage 3. It is configured to include a cam follower 8 that engages with the tapered surface and a leaf spring 9 that guides the elevating stage 3 in the vertical direction.

FIG. 2 is a front view showing an example of the minute movement mechanism 6 shown in FIG. 1.

Each of the fine movement mechanisms 6 shown in FIG. 2 can independently slightly move each Taber block 7 in the vertical direction, and can independently slightly increase or decrease each Taber angle.

The micro-movement mechanism 6 includes a micro-movement stage section 10 on which the Taber block 7 is mounted, two elastic hinges 11 that restrain the micro-movement stage section 10 in the horizontal direction and support the micro-movement stage section 10 so as to be freely displaceable in the vertical direction, and the elastic hinges 11. It is configured to include two eccentric pins 12 that are driven in the vertical direction, and screws 13 that fix the Taber block 7 to the horizontally moving plate 2 after fine adjustment.

By driving the two elastic hinges 11 in the same direction and by the same amount using the two eccentric pins 12 of the micro-movement mechanism 6, the micro-movement stage section 10 is slightly moved in the vertical direction, and the movement between the Taper block 7 and the cam follower 8 is By minutely changing the height of the engagement point, it is possible to finely adjust the tilt angle of the elevation stage surface.

In addition, by driving the two elastic hinges 11 by different amounts with the two eccentric pins 12 of the minute movement mechanism 6,
By slightly rotating the micro-movement stage section 10, it is possible to match the Taber angles of all the Taber blocks 7.

Thereby, the straightness of the elevating stage 3 can be achieved with high precision.

〔Effect of the invention〕

The fine movement Z stage device of the present invention includes a fine movement stage section on which each Taber block is mounted, two elastic hinges that restrain the fine movement stage section in the horizontal direction and support the fine movement stage section so as to be freely displaceable in the vertical direction, and an elastic hinge, respectively. Since it is equipped with two eccentric pins that drive in the vertical direction, it is possible to easily adjust the tilt angle and straightness of the elevation stage surface, and it also has the effect of eliminating the need for high-precision machining of the Taber block. are doing.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing an embodiment of the fine movement Z stage device of the present invention, FIG. 2 is a front view showing an example of the fine movement mechanism of FIG. 1, and FIG. 3 is an example of a conventional fine movement Z stage device. FIG. l...base part, 2...horizontal movement plate, 3...
・Elevating stage, 4... Motor, 5... Ball screw, 6... Minute movement mechanism, 7... Taber block, 8
... Cam follower, 9 ... Leaf spring, 10 ... Micro-movement stage section, 1 1 ... Elastic hinge, 2 ... Eccentric pin, 3 ... Screw, 4 ... Taper block.

Claims (1)

[Claims] In a fine movement Z stage device that moves up and down by a plurality of taper blocks that move horizontally at the same time, a fine movement stage section on which each of the taper blocks is mounted, and the fine movement stage section are restrained in the horizontal direction and can be freely displaced in the vertical direction. A fine movement Z stage device comprising: two elastic hinges that support the elastic hinges; and two eccentric pins that drive the elastic hinges in the vertical direction.