CN109765842A - A kind of micro-positioning table - Google Patents
A kind of micro-positioning table Download PDFInfo
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- CN109765842A CN109765842A CN201910044139.9A CN201910044139A CN109765842A CN 109765842 A CN109765842 A CN 109765842A CN 201910044139 A CN201910044139 A CN 201910044139A CN 109765842 A CN109765842 A CN 109765842A
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Abstract
The invention discloses a kind of micro-positioning tables.Moving platform of the invention is set to the top of pedestal, and it is connect respectively with X to nano-positioning stage, Y-direction nano-positioning stage and Z-direction nano-positioning stage, X is respectively used to adjust moving platform along the displacement of X-axis, Y-axis and Z axis to nano-positioning stage, Y-direction nano-positioning stage and Z-direction nano-positioning stage, for detecting change in displacement information of the moving platform along X-axis, Y-axis and Z axis, control system is electrically connected with X to nano-positioning stage, Y-direction nano-positioning stage, Z-direction nano-positioning stage and position sensing device position sensing device respectively.Workbench of the invention realizes that the micro-shifting of spatially six-freedom degree is dynamic to nano-positioning stage, Y-direction nano-positioning stage, the specific structure of Z-direction nano-positioning stage and setting by X, driving, which is done, with piezoelectric ceramics realizes micro- positioning, end exports the high-precision that can achieve micron order or more, therefore allows to be widely used in subtle operation field.
Description
Technical field
The present invention relates to locating apparatus technical field more particularly to a kind of micro-positioning tables.
Background technique
With the development of science and technology, have the micromotion working platform of high-precision and high stability has in Modern Manufacturing Technology
Extremely important status, and it is considered as the important symbol of a national high technology development level.Such as precision machinery process,
Bioengineering, photoelectric monitor instrument and medical science etc. require the precision and stability of positioning very high.Current micro- positioning
The disadvantages of mechanism driving link is more, structure is complicated, accumulated error is big directly affect the precision of platform.
Summary of the invention
It is an object of the present invention to be directed to the above-mentioned deficiency of the prior art, propose that a kind of structure is simple, accumulated error is small,
Micro-positioning table with high accuracy.
A kind of micro-positioning table of the invention, including pedestal, moving platform, X to nano-positioning stage, Y-direction nano-positioning stage,
Z-direction nano-positioning stage, position sensing device and control system；The moving platform is set to the top of the pedestal, and respectively with
The X is connected to nano-positioning stage, Y-direction nano-positioning stage with Z-direction nano-positioning stage, and the X is micro- fixed to nano-positioning stage, Y-direction
Position mechanism and Z-direction nano-positioning stage are respectively used to adjust the moving platform along the displacement of X-axis, Y-axis and Z axis, and the position passes
Induction device for detecting change in displacement information of the moving platform along X-axis, Y-axis and Z axis, the control system respectively with it is described
X is electrically connected to nano-positioning stage, Y-direction nano-positioning stage, Z-direction nano-positioning stage and position sensing device.
Preferably, the X includes at least a pair of of driver and at least a pair of flexible branch to nano-positioning stage, each pair of described
Driver is separately mounted to the two sides of the moving platform X-direction, and corresponding with the moving platform by the flexible branch respectively
Two sides transmission connection.
Preferably, the X includes two pairs of drivers and two pairs of flexible branches to nano-positioning stage, and each pair of driver divides
It is not mounted on the two sides of the moving platform X-direction, and is located on same level straight line, and passes through the flexible branch and institute respectively
State the corresponding two sides transmission connection of moving platform.
Preferably, the Y-direction nano-positioning stage includes at least a pair of of driver and at least a pair of flexible branch, each pair of described
Driver is separately mounted to the two sides of the moving platform Y-direction, and is located on same level straight line, and pass through the flexibility respectively
Branch two sides transmission connection corresponding with the moving platform.
Preferably, the Z-direction nano-positioning stage includes at least three drivers and at least three flexible branches, the driving
Device is separately mounted to the side of the moving platform Z-direction, and passes through the flexible branch corresponding with the moving platform one respectively
Side transmission connection, the flexibility branch are distributed in the surrounding at the moving platform center.
Preferably, the pedestal includes horizonal base plate and vertical plate, and the horizonal base plate is parallelogram, described vertical
The both sides of the edge of the horizonal base plate Y-direction and X-direction are arranged in plate along Z-direction respectively；Driving of the X to nano-positioning stage
Device is mounted on the vertical plate of the two sides of the X-direction of the horizonal base plate, and the driver of the Y-direction nano-positioning stage is mounted on
On the vertical plate of the two sides of the Y-direction of the horizonal base plate, the driver of the Y-direction nano-positioning stage is mounted on the horizontal base
On plate.
Preferably, the moving platform is parallelogram, and the position sensing device includes being separately positioned on described move to put down
Position sensor of the two sides of the quadrangle of platform with above or below.
It preferably, further include four pillars, four pillars are vertically set on the horizonal base plate, and symmetrical
By four angles of the moving platform, the position sensor is separately positioned on the corresponding pillar.
Preferably, the flexible branch is cut with scissors by drive block, Universal flexible hinge set in parallel, rigid movable block and Universal flexible
Chain is connected together in series, and the drive block and the driver are sequentially connected, and the Universal flexible hinge and described move are put down
Platform is fixedly connected.
Preferably, the driver is piezoelectric ceramic actuator.
Micro-positioning table of the present invention has multiple freedom degrees, and can deform in a plurality of directions can be to avoid moving platform
Each freedom degree direction movement between interference, optimization can operational readiness, improve comprehensive kinematic and dynamic modeling, effectively improve micro- positioning
The positioning accuracy of platform；
The present invention designs the flexible branch of micro-positioning table use mainly by Universal flexible hinge and Universal flexible hinge
Group form, give full play to flexible motion it is secondary it is easy to process, from assembly, gapless, without fretting wear the advantages that, by itself
Flexible deformation and piezoelectric ceramics do driving and realize high-precision output displacement, and can be not mutual when each side moves upwards
Interference, by the deformation of itself, can achieve high-precision output displacement, while can effectively avoid the coupling between output displacement
It closes, and is realized spatially by X to nano-positioning stage, Y-direction nano-positioning stage, the specific structure of Z-direction nano-positioning stage and setting
The micro-shifting of six-freedom degree is dynamic, does driving with piezoelectric ceramics and realizes micro- positioning, end exports the height that can achieve micron order or more
Precision, therefore allow to be widely used in subtle operation field.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of micro-positioning table of the invention；
Fig. 2 is the structural schematic diagram of branch of the invention；
Fig. 3 is the Universal flexible hinge schematic diagram in the present invention；
Fig. 4 is the schematic diagram that micro-positioning table realizes X-direction movement；
Fig. 5 is the schematic diagram that micro-positioning table realizes Y direction movement；
Fig. 6 is the schematic diagram that micro-positioning table realizes Z-direction movement；
Fig. 7 is that micro-positioning table realization turns about the X axis schematic diagram；
Fig. 8 is that micro-positioning table realizes the schematic diagram rotated around Y-axis；
Fig. 9 is that micro-positioning table realizes the schematic diagram turned about the Z axis.
1- pedestal；11- horizonal base plate；12- vertical plate；2- moving platform；3-X is to nano-positioning stage；4-Y is to micro- localization machine
Structure；5-Z is to nano-positioning stage；6- position sensing device；61- position sensor；62- pillar；7- control system；8- driver；
9- flexibility branch；91- drive block；92- parallel connection Universal flexible hinge set；93- rigidity movable block；94- Universal flexible hinge.
Specific embodiment
Following is a specific embodiment of the present invention in conjunction with the accompanying drawings, technical scheme of the present invention will be further described,
However, the present invention is not limited to these examples.
As shown in Figure 1, a kind of micro-positioning table of the invention, including pedestal 1, moving platform 2, X are to nano-positioning stage 3, Y
To nano-positioning stage 4, Z-direction nano-positioning stage 5, position sensing device 6 and control system 7；Moving platform 2 is set to the upper of pedestal 1
Side, and connect with X to nano-positioning stage 3, Y-direction nano-positioning stage 4 and Z-direction nano-positioning stage 5 respectively, and X is to nano-positioning stage 3, Y
It is respectively used to adjust moving platform 2 along the displacement of X-axis, Y-axis and Z axis to nano-positioning stage 4 and Z-direction nano-positioning stage 5, position passes
Induction device 6 is for detecting change in displacement information of the moving platform 2 along X-axis, Y-axis and Z axis, and control system is respectively with X to micro- positioning
Mechanism 3, Y-direction nano-positioning stage 4, Z-direction nano-positioning stage 5 and position sensing device 6 are electrically connected.
Micro-positioning table of the present invention has multiple freedom degrees, and can deform in a plurality of directions can be to avoid moving platform
2 each freedom degree direction movement between interference, optimization can operational readiness, improve comprehensive kinematic and dynamic modeling, it is micro- fixed to effectively improve
The positioning accuracy of position platform；
The control voltage signal exported by computer, control X are micro- fixed to nano-positioning stage 3, Y-direction nano-positioning stage 4, Z-direction
Position mechanism 5 generates stretching motion according to specified motion profile, sends displacement to moving platform 2, realizes moving platform 2 each
The displacement in direction, the result that the displacement sensor 10 in all directions will test feed back to control system 7, control system 7
Output input signal is compared and compensates, and forms feedback system.
X to nano-positioning stage 3 may include at least a pair of of driver 8 and at least a pair of of flexibility branch 9, each pair of driver 8
The two sides in the direction moving platform 2X are separately mounted to, and pass through the two sides transmission connection corresponding with moving platform 2 of flexible branch 9 respectively.
As shown in figure 4, moving platform 2 will be moved along X-axis level when driver 8 along the x axis generates identical displacement
Dynamic, the result that the displacement sensor in X-direction will test feeds back to control system 7.
X may include two pairs of drivers 8 and two pairs of flexible branches 9 to nano-positioning stage 3, and each pair of driver 8 is installed respectively
In the two sides in the direction moving platform 2X, and it is located on same level straight line, and corresponding with moving platform 2 by flexible branch 9 respectively
Two sides transmission connection.2 pairs of flexible branches 9 can with moving platform 2 along X to center symmetric setting.
As shown in figure 9, when the driver 8 of symmetrically arranged a pair generates the identical displacement in a direction, moving platform 2
By the power in a direction, when the driver 8 of symmetrically arranged another pair generates the identical displacement in another direction, move flat
Power of the platform 2 by another direction, so that the realization of moving platform 2 turns about the Z axis.
Y-direction nano-positioning stage 4 may include at least a pair of of driver 8 and at least a pair of flexible branch 9, each pair of driver 8
The two sides in the direction moving platform 2Y are separately mounted to, and are located on same level straight line, and pass through flexible branch 9 and moving platform respectively
2 corresponding two sides transmission connections.
Y-direction nano-positioning stage 4 may include a pair of of driver 8 and a pair of flexible branch 9.
As shown in figure 5, moving platform 2 will be moved along Y-axis level when driver 8 along the y axis generates identical displacement
Dynamic, the result that the displacement sensor in Y direction will test feeds back to computer.
Z-direction nano-positioning stage 5 may include that at least three drivers 8 and at least three flexible branches 9, driver 8 are distinguished
It is mounted on the side in the direction moving platform 2Z, and respectively by the side transmission connection corresponding with moving platform 2 of flexible branch 9, it is flexible
Branch 9 is distributed in the surrounding at 2 center of moving platform.
As shown in fig. 6, moving platform 2 will be moved along Z axis level when the driver 8 along Z-direction generates identical displacement
Dynamic, the result that the displacement sensor in Z-direction will test feeds back to computer.
As shown in fig. 7, when the driver 8 along Z-direction generates different displacements, such as: positioned at two of the same end
Driver 8 generates upward displacement, so that moving platform 2, by upward power, the driver 8 positioned at the other end generates downward position
It moves, so that moving platform 2 is subject to downward force, so that the realization of moving platform 2 turns about the X axis.
As shown in figure 8, for example: two drivers 8 positioned at the same end, one generates upward displacement, so that moving platform 2
By upward power, another driver 8 generates downward displacement, so that moving platform 2 is subject to downward force, so that moving platform 2
It realizes and is rotated around Y-axis.
Pedestal 1 may include horizonal base plate 11 and vertical plate 12, and horizonal base plate is parallelogram, and vertical plate is respectively along Z
The both sides of the edge of horizonal base plate Y-direction and X-direction are arranged in direction；X is mounted on horizontal base to the driver 8 of nano-positioning stage 3
On the vertical plate of the two sides of the X-direction of plate, the driver 8 of Y-direction nano-positioning stage 3 is mounted on the two of the Y-direction of horizonal base plate
On the vertical plate of side, the driver 8 of Y-direction nano-positioning stage 3 is mounted on horizonal base plate.
Moving platform 2 can be parallelogram, position sensing device 6 include be separately positioned on moving platform 2 quadrangle two
Position sensor 61 of the side with above or below.
It can also include four pillars 62, four pillars 62 are vertically set on horizonal base plate 11, and are symmetrically distributed in dynamic
By four angles of platform 2, position sensor 61 is separately positioned on corresponding pillar 62.
Both 12 displacement sensors can be fixed on pillar 62 by rigid disk, be evenly distributed in the four of moving platform 2
The upper bottom surface at a angle and two sides.The displacement of real-time detection moving platform 2 in all directions.
As shown in Fig. 2, flexible branch 9 can be by drive block 91, Universal flexible hinge set 92 in parallel, 93 and of rigid movable block
Universal flexible hinge 94 is connected together in series, and drive block 91 and driver 8 are sequentially connected, and Universal flexible hinge 94 is put down with dynamic
Platform 2 is fixedly connected.
It is the concrete structure diagram of Universal flexible hinge 94 in the present invention as shown in Figure 3, section is prototype, and both ends are circle
Column, centre are saddle type.When Universal flexible 94 stress of hinge, in-between weak link can become first since rigidity is small
Shape generates the rotation of the similar conventional rotary pair around its structure centroid or along the flexible of its axis.
Driver 8 can be piezoelectric ceramic actuator 8.
It is not directed to place above, is suitable for the prior art.
Although some specific embodiments of the invention are described in detail by example, the skill of this field
Art personnel it should be understood that above example merely to be illustrated, the range being not intended to be limiting of the invention, belonging to the present invention
Those skilled in the art can make various modifications or additions to described specific embodiment or using class
As mode substitute, but without departing from direction of the invention or beyond the scope of the appended claims.Ability
Domain it is to be understood by the skilled artisans that according to the technical essence of the invention to made by embodiment of above it is any modification, etc.
With replacement, improvement etc., protection scope of the present invention should be included in.
Claims (10)
1. a kind of micro-positioning table, it is characterised in that: including pedestal (1), moving platform (2), X to nano-positioning stage (3), Y-direction
Nano-positioning stage (4), Z-direction nano-positioning stage (5), position sensing device (6) and control system (7)；Moving platform (2) setting
In the top of the pedestal (1), and respectively with the X to nano-positioning stage (3), Y-direction nano-positioning stage (4) and the micro- positioning of Z-direction
Mechanism (5) connection, the X are respectively used to adjust to nano-positioning stage (3), Y-direction nano-positioning stage (4) and Z-direction nano-positioning stage (5)
The moving platform (2) is saved along the displacement of X-axis, Y-axis and Z axis, the position sensing device (6) is for detecting the moving platform
(2) along the change in displacement information of X-axis, Y-axis and Z axis, the control system is respectively with the X to nano-positioning stage (3), Y-direction
Nano-positioning stage (4), Z-direction nano-positioning stage (5) and position sensing device (6) electrical connection.
2. a kind of micro-positioning table as described in claim 1, it is characterised in that: the X includes extremely to nano-positioning stage (3)
Few a pair of driver (8) and at least a pair of flexible branch (9), each pair of driver (8) are separately mounted to the moving platform (2)
The two sides of X-direction, and pass through the flexibility branch (9) two sides transmission connection corresponding with the moving platform (2) respectively.
3. a kind of micro-positioning table as claimed in claim 2, it is characterised in that: the X includes two to nano-positioning stage (3)
To driver (8) and two pairs of flexible branches (9), each pair of driver (8) is separately mounted to the moving platform (2) X-direction
Two sides, and be located on same level straight line, and pass through the flexibility branch (9) two sides corresponding with the moving platform (2) respectively
Transmission connection.
4. a kind of micro-positioning table as claimed in claim 3, it is characterised in that: the Y-direction nano-positioning stage (4) includes extremely
Few a pair of driver (8) and at least a pair of flexible branch (9), each pair of driver (8) are separately mounted to the moving platform (2)
The two sides of Y-direction, and be located on same level straight line, and corresponding with the moving platform (2) by the flexible branch (9) respectively
Two sides transmission connection.
5. a kind of micro-positioning table as claimed in claim 4, it is characterised in that: the Z-direction nano-positioning stage (5) includes extremely
Few three drivers (8) and at least three flexible branches (9), the driver (8) are separately mounted to the moving platform (2) side Z
To side, and be sequentially connected respectively by the flexible branch (9) side corresponding with the moving platform (2), the flexibility
Branch (9) is distributed in the surrounding at the moving platform (2) center.
6. a kind of micro-positioning table as claimed in claim 5, it is characterised in that: the pedestal (1) includes horizonal base plate
(11) and vertical plate (12), the horizonal base plate are parallelogram, and the vertical plate is arranged along Z-direction in the level respectively
The both sides of the edge of bottom plate Y-direction and X-direction；The X is mounted on the horizonal base plate to the driver (8) of nano-positioning stage (3)
X-direction two sides vertical plate on, the driver (8) of the Y-direction nano-positioning stage (3) is mounted on the horizonal base plate
On the vertical plate of the two sides of Y-direction, the driver (8) of the Y-direction nano-positioning stage (3) is mounted on the horizonal base plate.
7. a kind of micro-positioning table as claimed in claim 6, it is characterised in that: the moving platform (2) is parallelogram,
Position of the two sides of quadrangle of the position sensing device (6) including being separately positioned on the moving platform (2) with above or below
Sensor (61).
8. a kind of micro-positioning table as claimed in claim 7, it is characterised in that: further include four pillars (62), four institutes
It states pillar (62) to be vertically set on the horizonal base plate (11), and is symmetrically distributed in by four angles of the moving platform (2), institute
Position sensor (61) is stated to be separately positioned on the corresponding pillar (62).
9. such as a kind of described in any item micro-positioning tables of claim 2-8, it is characterised in that: the flexibility branch (9) by
Drive block (91), Universal flexible hinge set (92) in parallel, rigid movable block (93) and Universal flexible hinge (94) company of being sequentially connected in series
It connects, the drive block (91) and the driver (8) are sequentially connected, the Universal flexible hinge (94) and the moving platform
(2) it is fixedly connected.
10. such as a kind of described in any item micro-positioning tables of claim 2-8, it is characterised in that: the driver (8) is pressure
Electroceramics driver.
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| CN201910044139.9A CN109765842A (en) | 2019-01-17 | 2019-01-17 | A kind of micro-positioning table |
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| CN201910044139.9A CN109765842A (en) | 2019-01-17 | 2019-01-17 | A kind of micro-positioning table |
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Cited By (3)
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| CN111273418A (en) * | 2020-03-12 | 2020-06-12 | 中国科学院长春光学精密机械与物理研究所 | Optical element multi-degree-of-freedom precision positioning device under vacuum condition |
| CN111645049A (en) * | 2020-05-22 | 2020-09-11 | 湖北工程学院 | Mechanical claw, mechanical hand, transfer robot and transfer system |
| WO2022104906A1 (en) * | 2020-11-17 | 2022-05-27 | 中国科学院上海微系统与信息技术研究所 | Micro-displacement mechanism with non-hermitian coupling angle detection and correction device |
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Application publication date: 20190517 |