CN104925738B - Piezoelectric micro-platform capable of amplifying based on flexible hinge - Google Patents
Piezoelectric micro-platform capable of amplifying based on flexible hinge Download PDFInfo
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- CN104925738B CN104925738B CN201510385240.2A CN201510385240A CN104925738B CN 104925738 B CN104925738 B CN 104925738B CN 201510385240 A CN201510385240 A CN 201510385240A CN 104925738 B CN104925738 B CN 104925738B
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Abstract
The invention discloses a piezoelectric micro-platform capable of amplifying based on a flexible hinge. The piezoelectric micro-platform comprises a frame and a carrier platform, wherein a micro-driver and an amplifying mechanism are arranged on the frame; the amplifying mechanism is a double-rocker mechanism; an extension section is arranged on one end, which is far away from a connecting rod, of a driving rocker of the double-rocker mechanism, and a free end of the extension section of the driving rocker supports the micro-driver; the driving rocker and the extension section thereof form an amplifying lever with a hinge point of the driving rocker and the frame as a pivot; an extension section is arranged on one end of the connecting rod, which is far away from the driving rocker; the carrier platform is connected to a decoupling mechanism, the decoupling mechanism is formed by at least one pair of decoupling units, and the two decoupling units are symmetrical around the center of the carrier platform; each decoupling unit is formed by a connecting arm and a pair of flexible arms, one end of each flexible arm is hinged to the frame, the other end of each flexible arm is hinged to the connecting arm, and the other end of the connecting arm is hinged to the carrier platform; the extension section of the connecting rod is hinged to any one decoupling unit. The piezoelectric micro-platform has the advantage that the driving displacement of the micro-driver can be amplified.
Description
Technical field
The present invention relates to the micromotion platform that a kind of piezoelectric stack drives.
Technical background
Used as the key components of MEMS, micromotion platform is widely used in loading precision instrument or its crucial portion
The for example common optical lens of part, accurate micro- behaviour's end bar and micro clamping device.Therefore, micromotion platform is needed with multi-dimensional movement and high
Resolution.
Compare with static broach driving, electrothermal drive and marmem driving etc., piezoelectric stack drives to have and differentiates
Rate is high, driving force is big, Hz-KHz width, fast response time and the advantages of good dynamic characteristic, thus is particularly suitable for driving micro-
Moving platform.In micro assemby technical field, it is often necessary to drive micro clamping device to carry out micron level to grade using micromotion platform
Other motion, therefore, micromotion platform should have big stroke, additionally, in order to preferably carry out high-precision assembling, needing to micro-
The position of moving platform is monitored on-line, and carries out feedback control.
The existing detection with regard to micromotion platform, more using vision-based detection, laser sensor detection or capacitance detecting etc.
Method comes the position of detection platform, and testing cost is higher, it is also difficult in being integrated into micro OS.
The content of the invention
For not big enough the shortcoming of the micromotion platform stroke for overcoming prior art to exist, the invention provides one kind can put
The piezoelectric micromotion platform amplified based on flexible hinge of the drive displacement of big microdrive.
Based on the piezoelectric micromotion platform that flexible hinge amplifies, including frame and article carrying platform；
Microdrive is installed in frame and amplifies the enlarger of the drive displacement of microdrive；
Enlarger is the double rocker mechanism being installed in frame；The one end of the drive crank of double rocker mechanism away from connecting rod
If extension, the free end of drive crank extension props up microdrive；Drive crank and its extension are with drive crank and machine
The pin joint of frame is that fulcrum forms amplification lever；Connecting rod sets extension away from one end of drive crank；
Article carrying platform is connected with its decoupling mechanism along assigned direction translation is made, and decoupling mechanism is by least one pair of decoupling unit
Composition, two decoupling units are with regard to article carrying platform centrosymmetry；Each decoupling unit is made up of linking arm and a pair of flexible arms, often
Individual flexible arm one end is hinged with frame, and the other end is hinged with linking arm, and the other end and the article carrying platform of linking arm are hinged；
Connecting rod extension is hinged with arbitrary decoupling unit.
Further, microdrive is piezoelectricity fold stack driver, each flexible arm correspondence displacement transducer.
Further, displacement transducer is that foil gauge is detected in a pair of positions, and a pair of displacement detecting foil gauges are adhesively fixed respectively
On the two sides of flexible arm, the position detection foil gauge composition bridgt circuit of each pair decoupling unit, bridgt circuit is by strain
It is transferred on industrial computer by PCI board card after amplifier amplifies, by A/D mouths, industrial computer calculates the displacement for obtaining platform,
,For the displacement of platform,For bridgt circuit Jing strain amplifier amplification after output voltage,For proportionality coefficient.
Bridgt circuit is to detect foil gauge, 4 positions on four flexible arms by one position of selection on each flexible arm
Detection foil gauge constitutes the bridgt circuit of a full-bridge mode, and a pair of decoupling units constitute the bridgt circuit of 2 full-bridge modes.Or
Person, bridgt circuit selects 1 position detection foil gauge to answer with 1 position detection of another decoupling unit by each decoupling unit
Become the bridgt circuit that piece constitutes half-bridge mode, a pair of decoupling units constitute the bridgt circuit of 4 half-bridge modes.
The present invention needs first to calibrate acquisition proportionality coefficient using frontk.Specific practice is：First detected with laser sensor
Go out the displacement of current platform, the output voltage of foil gauge is detected in position, you can obtain。
Further, connecting rod extension size is more than size of the connecting rod without extension part.Connecting rod is L-shaped.
Further, a pair of decoupling lists that decoupling mechanism is arranged comprising a pair of the decoupling units arranged along X axis and along Y-axis
Unit；Each pair decoupling unit connects respectively an enlarger, and each enlarger corresponds to respectively a microdrive.
Further, in each decoupling unit, linking arm is made up of a pair of parallel support arms；Linking arm, flexible arm and put
The connecting rod extension of great institutions is articulated with a connection piece.
Further, with the center of article carrying platform as center of circle array distribution, adjacent flexible arm is articulated with machine to four decoupling units
Same hinge on frame, all flexible arms surround a parallelogram.
Further, article carrying platform is square, and decoupling unit is respectively positioned at the midpoint on each side of article carrying platform, all flexible arms
Isometric, flexible arm surrounds a square.
Further, frame, double rocker mechanism and parallel-crank mechanism warp cutting is obtained, between frame and drive crank
For the first cutting gap, the first cutting zone coordinates with piezoelectricity fold stack driver gap, between drive crank extension and frame
There is gap, piezoelectricity fold stack driver is contacted by pre-loading screw with drive crank extension；Frame, drive crank, passive rocking bar
The region for surrounding is the second cutting gap；The region that frame, passive rocking bar, connecting rod and flexible arm are surrounded is the 3rd cutting gap；
Region between flexible arm and hinge support arm is the 4th cutting gap；Hinge support arm, the region between article carrying platform and connector
For the 5th cutting gap；The hinge of the hinge of passive rocking bar and frame, the hinge of passive rocking bar and connecting rod, drive crank and connecting rod
The hinge of the hinge, connecting rod extension and connector of chain, drive crank and frame is two incision flexible hinge, hinge support arm
With being hinged as single otch flexible hinge for article carrying platform and connector.
The present invention when in use, the voltage after power amplifier amplifies, piezo stack is applied through to piezoelectricity fold stack driver
Stack driver extends, and piezoelectricity fold stack driver pushes out drive crank extension, and drive crank is with the hinge of frame with it
Fulcrum, swing out the other end of drive crank；In the presence of the hinge of connecting rod and drive crank, one end of connecting rod also to
Outer motion, hinge of the connecting rod with it with passive rocking bar as fulcrum, connecting rod extension is inwardly swung；In connecting rod and the hinge of connector
In the presence of chain, decoupling mechanism with the hinge of flexible arm and frame as fulcrum, toxDirection translational, so as to drive article carrying platform edgex
Direction translational.
It follows that drive crank is not contained as first lever when drive crank extension is smaller in size than drive crank
During the size of extension part, first time amplification is carried out to the deformation quantity of piezoelectricity fold stack driver；Connecting rod as second lever,
When connecting rod extension size is more than size of the connecting rod without extension part, the is carried out to the deformation quantity of piezoelectricity fold stack driver
Secondary amplification；Decoupling mechanism is then decoupled to the deformation quantity that displacement amplifying mechanism is passed over so as to only put down in one direction
It is dynamic.Drive crank and connecting rod are rigid member, therefore their deformation quantities to piezoelectricity fold stack driver are proportional amplifications, lead to
The ratio between the deformation quantity of piezoelectricity fold stack driver output and the actual displacement of article carrying platform is obtained by crossing initialization of calibration
Coefficient.Proportionality coefficient is pre-stored in industrial computer, you can realize examinations platformxThe purpose of the displacement in direction.ForySide
To displacement, also can obtain in the same manner.
When piezoelectricity fold stack driver loses voltage, drive crank, connecting rod and parallel-crank mechanism reset, article carrying platform
Return to initial position.
It is an advantage of the current invention that：
1. the amplification of the output displacement to piezoelectricity fold stack driver is realized by double rocker mechanism and parallel-crank mechanism
And decoupling so that micromotion platform has the big stroke on two dimension directions.
2. enlarger adopts flexible hinge, and is formed by linear cutter, and whole flexible hinge enlarger is one
Individual entirety, has the advantages that small volume, mechanical friction, guiding accuracy height, machining accuracy are easy to ensure and need not assemble.
3. position detection is integrated with, high-precision operation and control is convenient for.
4. it is lightweight, easy to operate, it is adaptable to micro-manipulating robot system and MEMS.
Description of the drawings
Fig. 1 is schematic structural view of the invention.
Fig. 2 is flexible hinge enlarger motion schematic diagram.
Fig. 3 is control structure schematic diagram of the present invention.
Fig. 4 is flexible hinge enlarger structural representation.
Specific embodiment
As shown in figure 1, the piezoelectric micromotion platform amplified based on flexible hinge, including frame 1 and article carrying platform 16；Frame 1
The upper enlarger installed microdrive 5 and amplify the drive displacement of microdrive 5.
As shown in Fig. 2 enlarger is the double rocker mechanism being installed in frame 1；The drive crank 12 of double rocker mechanism
Extension is set away from one end of connecting rod 17, the free end of drive crank extension 11 props up microdrive 5；Drive crank 12 and its
Extension 11 is formed as fulcrum with the pin joint of drive crank 12 and frame 1 and amplifies lever；The length of the extension of drive crank 12
Less than length of the drive crank 12 without extension, therefore, drive crank 12 amplifies micro- drive for the first time using lever amplification effect
The displacement of dynamic device 5.Connecting rod 17 sets extension away from one end of drive crank 12.Article carrying platform 16 with make it along assigned direction translation
Decoupling mechanism connection, decoupling mechanism is made up of at least one pair of decoupling unit, and two decoupling units are with regard to the center of article carrying platform 16
Symmetrically；Each decoupling unit is made up of linking arm 13 and a pair of flexible arms 14, and each one end of flexible arm 14 is hinged with frame 1, separately
One end is hinged with linking arm 13, and the other end and the article carrying platform 16 of linking arm 13 are hinged；The extension of connecting rod 17 is single with arbitrary decoupling
Unit is hinged.
Drive the deformation of microdrive 5, so that microdrive 5 pushes out the extension of drive crank 12 as an example, drive crank 12
Hinge with it with frame 1 as fulcrum, swing out the other end of drive crank 12；Drive crank 12 is used as first lever
First time amplification is carried out to the deformation quantity of microdrive 5；In the presence of the hinge of connecting rod 17 and drive crank 12, connecting rod 17
One end also moves out, hinge of the connecting rod 17 with it with passive rocking bar 18 as fulcrum, the extension of connecting rod 17 is inwardly swung；Even
In the presence of the hinge of bar 17 and connector 15, hinge of the parallel-crank mechanism with it with frame 1 as fulcrum, toxPut down in direction
It is dynamic, so as to drive the edge of article carrying platform 16xDirection translational.When microdrive 5 recovers deformation, drive crank 12, connecting rod 17 are conciliate
Coupling reset, article carrying platform 16 returns to initial position.
Microdrive 5 is piezoelectricity fold stack driver, each one displacement transducer of correspondence of flexible arm 14.Piezoelectric stack drives
Deform upon when device obtains electric, during piezoelectricity fold stack driver dead electricity deformation is recovered.
As shown in figure 3, displacement transducer is a pair of positions detects foil gauge 2, a pair of displacement detecting foil gauges are adhesively fixed
On the two sides of flexible arm 14, the position detection foil gauge 2 of each pair decoupling unit separately constitutes bridgt circuit, and bridgt circuit leads to
It is transferred on industrial computer by PCI board card after overstrain amplifier amplifies, by A/D mouths, industrial computer calculates the displacement for obtaining platform,,For the displacement of platform,For bridgt circuit Jing strain amplifier amplification after output voltage,For proportionality coefficient.
Bridgt circuit is to detect foil gauge 2,4 positions on four flexible arms 14 by one position of selection on each flexible arm
The bridgt circuit that detection foil gauge 2 constitutes a full-bridge mode is put, a pair of decoupling units constitute the bridge joint electricity of 2 full-bridge modes
Road.Or, bridgt circuit is selected 1 position of 1 position detection foil gauge 2 and another decoupling unit by each decoupling unit
Detection foil gauge 2 constitutes the bridgt circuit of half-bridge mode, and a pair of decoupling units constitute the bridgt circuit of 4 half-bridge modes.
The present invention needs first to calibrate acquisition proportionality coefficient using frontk.Specific practice is：First detected with laser sensor
Go out the displacement of current platform, the output voltage of foil gauge 2 is detected in position, you can obtain.Drive crank 12 and company
Bar 17 is rigid member, therefore their deformation quantities to microdrive 5 are proportional amplifications, can be obtained by initialization of calibration
Obtain the proportionality coefficient between the deformation quantity of the output of microdrive 5 and the actual displacement of article carrying platform 16.Proportionality coefficient is pre-stored in
In industrial computer, you can realize examinations platformxThe purpose of the displacement in direction.For the displacement in y directions, also can obtain in the same manner.
The extension size of connecting rod 17 is more than size of the connecting rod 17 without extension part.Now, connecting rod 17 is used as second
Lever, when the extension size of connecting rod 17 is more than size of the connecting rod 17 without extension part, enters to the deformation quantity of microdrive 5
Row amplifies for second.Connecting rod 17 is L-shaped.
As shown in figure 1, a pair of solutions that decoupling mechanism is arranged comprising a pair of the decoupling units arranged along X axis and along Y-axis
Coupling unit；Each pair decoupling unit connects respectively an enlarger, and each enlarger corresponds to respectively a microdrive 5.X-axis
To 5 deformation of microdrive when, the enlarger of X axis pulls decoupling mechanism towards X axis translation.The shape of microdrive 5 of Y-axis
During change, the enlarger of Y-axis pulls decoupling mechanism towards Y-axis translation.
In each decoupling unit, linking arm 13 is made up of a pair of parallel support arms；Linking arm 13, flexible arm 14 and amplification
The extension of connecting rod 17 of mechanism is articulated with a connection piece 15.
With the center of article carrying platform 16 as center of circle array distribution, adjacent flexible arm 14 is articulated with frame 1 to four decoupling units
On same hinge, all flexible arms 14 surround a parallelogram.Parallel-crank mechanism is then passed to displacement amplifying mechanism
The deformation quantity passed is decoupled so as to only translation in one direction.
Article carrying platform 16 is square, and decoupling unit is respectively positioned at the midpoint on each side of article carrying platform 16, all flexible arms 14
Isometric, flexible arm 14 surrounds a square.
As shown in figure 4, frame 1, double rocker mechanism and the cutting of parallel-crank mechanism warp are obtained, frame 1 and active are shaken
It is the first cutting gap 101 between bar 12, the first cutting zone coordinates with piezoelectricity fold stack driver gap, and drive crank 12 extends
There is gap between section and frame 1, piezoelectricity fold stack driver is contacted by pre-loading screw with the extension of drive crank 12；Frame 1, master
Shake bar 12, the region that passive rocking bar 18 is surrounded is the second cutting gap 102；Frame 1, passive rocking bar 18, connecting rod 17 and flexibility
The region that arm 14 is surrounded is the 3rd cutting gap 103；Region between flexible arm 14 and hinge support arm is the 4th cutting gap
104；Two support arms of linking arm 13, the region between article carrying platform 16 and connector 15 are the 5th cutting gap 105；Shaken
Hinge, the drive crank of the hinge of the hinge of bar 18 and frame 1, passive rocking bar 18 and connecting rod 17, drive crank 12 and connecting rod 17
12 are two incision flexible hinge, hinge support arm and load with the hinge of the hinge, connecting rod extension 17A and connector 15 of frame 1
Thing platform 16 and connector 15 are hinged as single otch flexible hinge.
It is an advantage of the current invention that：1. realize driving piezoelectric stack by double rocker mechanism and parallel-crank mechanism
The amplification and decoupling of the output displacement of device 5 so that micromotion platform has the big stroke on two dimension directions.
2. enlarger adopts flexible hinge, and is formed by linear cutter, and whole flexible hinge enlarger is one
Individual entirety, has the advantages that small volume, mechanical friction, guiding accuracy height, machining accuracy are easy to ensure and need not assemble.
3. position detection is integrated with, high-precision operation and control is convenient for.
4. it is lightweight, easy to operate, it is adaptable to micro-manipulating robot system and MEMS.
Content described in this specification embodiment is only enumerating to the way of realization of inventive concept, the protection of the present invention
Scope is not construed as being only limitted to the concrete form that embodiment is stated, protection scope of the present invention is also and in art technology
Personnel according to present inventive concept it is conceivable that equivalent technologies mean.
Claims (9)
1. the piezoelectric micromotion platform for being amplified based on flexible hinge, including frame and article carrying platform；It is characterized in that：Install in frame
The enlarger of the drive displacement of microdrive and amplification microdrive；Enlarger is the double rocking lever machine being installed in frame
Structure；The drive crank of double rocker mechanism sets extension away from one end of connecting rod, and the free end of drive crank extension props up micro- drive
Dynamic device；Drive crank and its extension are formed with the pin joint of drive crank and frame as fulcrum amplifies lever；Connecting rod is away from master
The one end for shaking bar sets extension；Article carrying platform is connected with its decoupling mechanism along assigned direction translation is made, and decoupling mechanism is by extremely
Few a pair of decoupling units composition, two decoupling units are with regard to article carrying platform centrosymmetry；Each decoupling unit is by linking arm and one
Flexible arm is constituted, each flexible arm one end is hinged with frame, the other end is hinged with linking arm, the other end of linking arm and loading
Platform is hinged；Connecting rod extension is hinged with arbitrary decoupling unit.
It is 2. as claimed in claim 1 to be based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterised in that：Microdrive is pressure
Electric fold stack driver, each flexible arm correspondence displacement transducer.
It is 3. as claimed in claim 2 to be based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterised in that：Displacement transducer is
Foil gauge is detected in a pair of positions, and a pair of displacement detecting foil gauges are bonded and fixed to respectively on the two sides of flexible arm, each pair decoupling
The position detection foil gauge composition bridgt circuit of unit, bridgt circuit passes through PCI after strain amplifier amplification, by A/D mouths
Board is transferred on industrial computer, and industrial computer calculates the displacement for obtaining platform,,For the displacement of platform,For bridge joint electricity
Output voltage of the road Jing after strain amplifier amplification,For proportionality coefficient.
It is 4. as claimed in claim 3 to be based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterised in that：Connecting rod extension chi
The very little size that extension part is not contained more than connecting rod.
5. as described in one of claim 1-4 based on flexible hinge amplify piezoelectric micromotion platform, it is characterised in that：Decoupling machine
A pair of decoupling units that structure is arranged comprising a pair of the decoupling units arranged along X axis and along Y-axis；Each pair decoupling unit connects respectively
An enlarger is connect, each enlarger corresponds to respectively a microdrive.
It is 6. as claimed in claim 5 to be based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterised in that：Each decoupling unit
In, linking arm is made up of a pair of parallel support arms；The connecting rod extension of linking arm, flexible arm and enlarger is articulated with one
Connector.
It is 7. as claimed in claim 6 to be based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterised in that：Four decoupling units
With the center of article carrying platform as center of circle array distribution, adjacent flexible arm is articulated with the same hinge in frame, all flexible upper-arm circumferences
Into a parallelogram.
It is 8. as claimed in claim 7 to be based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterised in that：Article carrying platform is in just
Square, respectively positioned at the midpoint on each side of article carrying platform, all flexible arms are isometric, and flexible arm surrounds a square for decoupling unit.
It is 9. as claimed in claim 2 to be based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterised in that：Frame, double rocking lever
Mechanism and the cutting of parallel-crank mechanism warp are obtained, and are the first cutting gap between frame and drive crank, and the first cutting is stitched
Gap coordinates with piezoelectricity fold stack driver gap, there is gap between drive crank extension and frame, and piezoelectricity fold stack driver passes through
Pre-loading screw is contacted with drive crank extension；The region that frame, drive crank, passive rocking bar are surrounded is the second cutting gap；
The region that frame, passive rocking bar, connecting rod and flexible arm are surrounded is the 3rd cutting gap；Region between flexible arm and hinge support arm
For the 4th cutting gap；Hinge support arm, the region between article carrying platform and connector are the 5th cutting gap；Passive rocking bar and machine
The hinge of the hinge of frame, the hinge of passive rocking bar and connecting rod, drive crank and connecting rod, the hinge of drive crank and frame, connecting rod
The hinge of extension and connector is two incision flexible hinge, and hinge support arm and article carrying platform and connector are hinged as list
Otch flexible hinge.
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| CN201510385240.2A CN104925738B (en) | 2015-06-30 | 2015-06-30 | Piezoelectric micro-platform capable of amplifying based on flexible hinge |
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| CN201510385240.2A CN104925738B (en) | 2015-06-30 | 2015-06-30 | Piezoelectric micro-platform capable of amplifying based on flexible hinge |
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| CN104925738B true CN104925738B (en) | 2017-04-12 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108000486B (en) * | 2017-08-03 | 2024-03-08 | 宁波大学 | Three-degree-of-freedom compliant piezoelectric micro gripper |
| CN107673305B (en) * | 2017-09-20 | 2019-12-13 | 宁波大学 | Two-translation one-rotation three-freedom-degree parallel flexible structure piezoelectric micromotion platform |
| CN110143278B (en) * | 2018-10-09 | 2022-03-15 | 宁波大学 | Bionic flapping wing robot driven by flexible piezoelectric fibers |
| CN109795981B (en) * | 2019-01-18 | 2020-12-25 | 宁波大学 | Multi-stage linkage output parallel micro-motion platform |
| CN116155136B (en) * | 2022-12-06 | 2024-03-19 | 东北林业大学 | Two-degree-of-freedom decoupling large-stroke flexible structure micro-motion platform |
| CN117260646B (en) * | 2023-11-20 | 2024-01-30 | 上海隐冠半导体技术有限公司 | Leveling and positioning device |
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| KR100642263B1 (en) * | 2004-08-11 | 2006-11-03 | 황달연 | Hinge module for micro nano motion |
| CN100376361C (en) * | 2005-01-11 | 2008-03-26 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN101837586B (en) * | 2010-05-10 | 2012-01-11 | 武汉大学 | Two-dimensional micromotion stage |
| CN102054933B (en) * | 2010-10-22 | 2013-06-19 | 宁波大学 | Parallel piezoelectric micromotion platform |
| CN103395059B (en) * | 2013-07-05 | 2016-04-06 | 上海工程技术大学 | Three-degree of freedom flexible topological decouplity parallel micromotion platform |
| CN204897391U (en) * | 2015-06-30 | 2015-12-23 | 宁波大学 | Piezoelectricity micro -displacement based on flexible hinge enlargies |
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