CN110253340B - Three-dimensional force detection system based on three-axis quick cutter servo mechanism - Google Patents
Three-dimensional force detection system based on three-axis quick cutter servo mechanism Download PDFInfo
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- CN110253340B CN110253340B CN201910564254.9A CN201910564254A CN110253340B CN 110253340 B CN110253340 B CN 110253340B CN 201910564254 A CN201910564254 A CN 201910564254A CN 110253340 B CN110253340 B CN 110253340B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
- B23Q17/0952—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
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Abstract
The invention provides a three-dimensional force detection system based on a three-axis quick cutter servo mechanism, which comprises: the X/Y/Z axis driving unit of the three-axis quick cutter servo mechanism is respectively integrated with an X/Y/Z axis piezoelectric ceramic force sensor; the input end of the three-channel charge amplifier module is respectively coupled with the X/Y/Z-axis piezoelectric ceramic force sensor and is used for amplifying polarization charges generated by the piezoelectric ceramic force sensor; the input end of the AD/DA acquisition card is connected with the output end of the three-channel charge amplifier module and is used for acquiring the amplified polarization charge signals output by the three output channels; and the upper computer is connected with the output end of the AD/DA acquisition card and used for receiving the amplified polarization charge signal acquired by the AD/DA acquisition card and calculating the dynamic force applied to the X/Y/Z-axis piezoelectric ceramic force sensor based on the signal. The system provided by the invention is based on the positive piezoelectric effect of the piezoelectric ceramic piece, and the piezoelectric ceramic piece is used as a force sensor, so that the on-line detection of the three-dimensional force in the cutting process is realized.
Description
Technical Field
The invention relates to the technical field of ultra-precision machining, in particular to a three-dimensional force detection system based on a three-axis quick cutter servo mechanism.
Background
A quick cutter servo system is a mechanical cutting method based on a single-point diamond cutter, and is an effective means for processing a microstructure array which is a main component of an ultra-precise device. With the development of ultra-precision technology, the requirements of special fields on the complexity of optical three-dimensional free surfaces are higher and higher, and the requirements on high-performance manufacturing of microstructures are increasing day by day. Based on the limitation of servo freedom, the traditional single-shaft quick cutter servo system is difficult to meet the manufacturing requirements of complex three-dimensional free surfaces and complex microstructures, so that a two-shaft and three-shaft quick cutter servo mechanism comes up at the right moment.
Compared with the cutting process of a single-shaft quick cutter servo mechanism, the cutting process of the three-shaft quick cutter servo mechanism is more complex, the problems that coupling between shafts is serious, the cutting state of a cutting edge of a diamond cutter and the surface of a microstructure is not clear and the like are mainly reflected, cutting force is an important index for reflecting the cutting state, the position of the cutting force is abnormal, and the micro defect on the surface of the microstructure is always generated. In order to grasp the cutting state of the three-axis fast tool servo mechanism for cutting the complex surface microstructure so as to ensure the integrity of the processed surface microstructure, the cutting forces in three directions generated in the cutting process need to be detected in real time.
The existing three-dimensional force detection method comprises a three-dimensional force detection method based on a flexible touch sensor array, a three-dimensional force detection method based on electromagnetic induction, a capacitance type three-dimensional force detection method and the like, and devices related to the methods have the defects of large volume, inflexible structure and the like and are difficult to integrate with a quick cutter servo mechanism for use; meanwhile, the three-dimensional force detection precision of the method is generally low, and the three-axis quick cutter has the characteristic of ultra-low cutting force and also has the irreconcilable contradiction. For the reasons, the traditional dynamic meter and the force sensor are difficult to be integrated into a three-axis quick tool servo mechanism to detect the three-dimensional force on line.
On the other hand, a single-shaft fast tool servo system integrated with a piezoelectric force sensor is available at present and is used for detecting the axial cutting force in the process of servo cutting of the surface microstructure by the single-shaft fast tool. The method uses the piezoelectric ceramic piece as a force sensor, and utilizes the positive piezoelectric effect of the piezoelectric ceramic piece, namely when dynamic force acts on the surface of the piezoelectric ceramic piece, the piezoelectric ceramic piece can generate polarized charges, the positive polarized charges and the negative polarized charges are respectively distributed at two ends of the piezoelectric ceramic piece along the axial direction, and the magnitude of the dynamic force can be reflected by detecting the magnitude of the polarized charges, so that the effect of the force sensor is realized. This quick cutter servo system of unipolar of integrated force transducer has realized the measuring to axial cutting force in the middle of the cutting process to guarantee the on-line monitoring to the surperficial microdefect in the middle of the cutting process. In addition, a force sensor is integrated on a single-shaft quick cutter servo mechanism, a scanning function of using a cutter as a probe is derived through contact force and cutting force closed-loop feedback control, a measuring function is integrated on the basis of a machining function, and a plurality of applications such as cutter cutting edge contour in-situ measurement, relay machining self-positioning and the like are expanded. However, since the single-axis fast tool servo mechanism has only one degree of servo freedom, it is difficult to machine a complicated free optical curved surface and a complicated surface microstructure.
Disclosure of Invention
Based on the background, the invention provides a system for integrating three piezoelectric ceramic pieces on a three-axis quick cutter servo mechanism, wherein the piezoelectric ceramic pieces are used as force sensors based on the positive piezoelectric effect of the piezoelectric ceramic pieces, so that the three-dimensional force online detection in the cutting process is realized.
In order to achieve the purpose, the invention adopts the following technical scheme:
a three-dimensional force detection system based on a three-axis fast tool servo mechanism comprises:
the X/Y/Z axis driving unit of the three-axis quick cutter servo mechanism is respectively integrated with an X/Y/Z axis piezoelectric ceramic force sensor;
the input end of the three-channel charge amplifier module is respectively coupled with the X/Y/Z-axis piezoelectric ceramic force sensor and is used for amplifying polarization charges generated by the piezoelectric ceramic force sensor;
the input end of the AD/DA acquisition card is connected with the output end of the three-channel charge amplifier module and is used for acquiring the amplified polarization charge signals output by the three output channels;
and the upper computer is connected with the output end of the AD/DA acquisition card and used for receiving the amplified polarization charge signal acquired by the AD/DA acquisition card and calculating the dynamic force applied to the X/Y/Z-axis piezoelectric ceramic force sensor based on the signal.
Further, the X/Y/Z axis driving units respectively include:
the device comprises an X-axis piezoelectric ceramic driver, an X-axis guiding flexible hinge, an X-axis lateral buffering Hooke hinge and an X-axis piezoelectric ceramic force sensor;
the system comprises a Y-axis piezoelectric ceramic driver, a Y-axis guiding flexible hinge, a Y-axis lateral buffering Hooke hinge and a Y-axis piezoelectric ceramic force sensor;
the device comprises a Z-axis piezoelectric ceramic driver, a Z-axis guiding flexible hinge, a Z-axis lateral buffering Hooke hinge and a Z-axis piezoelectric ceramic force sensor.
Optionally, the three-channel charge amplifier module is an integrated three-channel charge amplifier, or includes three single-channel charge amplifiers, or includes a single-channel and a dual-channel charge amplifier.
Further, the three-channel charge amplifier module is an integrated three-channel charge amplifier, which is integrated with three independent amplification channels, wherein each amplification channel comprises:
a first amplifier and a second amplifier; the non-inverting terminal of the first amplifier is connected via a resistor RTCoupled to the non-inverting terminal of the second amplifier Q2, the inverting terminal is connected via a resistor RGAnd a capacitor CGThe filter unit formed by parallel connection is grounded, and the output end of the filter unit is coupled with a signal input port of the three-channel charge amplifier; the inverting terminal of the second amplifier is connected via a resistor RSCoupled to the signal input port of the three-channel charge amplifier, and having its output terminal coupled to the signal output port of the three-channel charge amplifier via a resistor RFAnd a capacitor CFThe negative feedback unit formed by parallel connection is coupled with the self inverting terminal.
Preferably, the model of the first amplifier is LMP7715, and the model of the second amplifier is LMP 7721.
The invention has the following beneficial effects:
(1) compared with the existing three-dimensional force detection means, the system can be integrated on a three-axis quick cutter servo mechanism, so that the cutting force is detected on line in the cutting process of the three-axis quick cutter servo mechanism.
(2) Compared with the existing triaxial force detection means, the system has high sensitivity, and can identify 10mN cutting force at minimum.
(3) Compared with a single-shaft quick cutter servo mechanism integrated with a force sensor, the three-shaft quick cutter servo mechanism integrated with the force sensor in the system has higher degree of freedom, and can realize the processing of a complex surface microstructure.
Drawings
FIG. 1 is a schematic diagram of a three-axis fast tool servo structure integrated with a piezoelectric force sensor according to the present invention.
Fig. 2 is a schematic diagram of a three-channel charge amplifier in an embodiment of the invention.
Fig. 3 is a schematic diagram of three-dimensional force sensing measurement according to an embodiment of the present invention.
FIG. 4 is a diagram illustrating calibration results of a three-axis force sensor according to an embodiment of the present invention, wherein (a) is output voltage variation of the X-axis under different dynamic forces; (b is) a line graph of the change in voltage on the X axis; (c) the output voltage changes under different dynamic forces of the Y axis; (d) a Y-axis voltage change line graph is formed; (e) the output voltage changes under different dynamic forces of the Z axis; (f) the voltage change line graph of the Z axis is shown.
Detailed Description
For a further understanding of the invention, reference will now be made to the preferred embodiments of the invention by way of example, and it is to be understood that the description is intended to further illustrate features and advantages of the invention, and not to limit the scope of the claims.
The embodiment of the invention provides a three-dimensional force detection system based on a three-axis quick cutter servo mechanism. The structural schematic diagram of the three-axis fast tool servo mechanism integrated with the force sensor is shown in fig. 1. The structure mainly comprises an X-axis driving unit (comprising an X-axis piezoelectric ceramic driver 13, an X-axis guiding flexible hinge 12, an X-axis lateral buffering hooke hinge 11 and an X-axis piezoelectric ceramic force sensor 10), a Y-axis driving unit (comprising a Y-axis piezoelectric ceramic driver 4, a Y-axis guiding flexible hinge 5, a Y-axis lateral buffering hooke hinge 6 and a Y-axis piezoelectric ceramic force sensor 7), a Z-axis driving unit (comprising a Z-axis piezoelectric ceramic driver 2, a Z-axis guiding flexible hinge 1, a Z-axis lateral buffering hooke hinge 3, a Z-axis piezoelectric ceramic force sensor 8) and a cutter 9.
Under the action of dynamic force, the piezoelectric ceramic force sensor can generate corresponding polarized charges to be distributed at two ends. According to the piezoelectric effect of the piezoelectric ceramic, the polarization charges generated at two ends of the piezoelectric ceramic are in a proportional relation with the dynamic force borne by the piezoelectric ceramic piece. Because the cutting force is very weak in the process of machining the surface microstructure by the triaxial quick cutter servo mechanism, the polarization charges generated at two ends of the piezoelectric ceramic force sensor are also very weak, and the direct measurement is difficult. Therefore, the polarization charge generated by the piezoelectric ceramic force sensor can be amplified by the charge amplifier and detected.
In this embodiment, in order to detect the cutting force in three directions, the three-axis fast tool servo mechanism integrates three piezoelectric ceramic force sensors in three directions, and therefore three channel charge amplifiers are required to amplify polarization charges of the piezoelectric ceramic force sensors.
A schematic diagram of the three-channel charge amplifier in this embodiment is shown in fig. 2 as a preferred embodiment. The chips used for each channel are LMP7721(3 μ a input bias current) and LMP 7715. Wherein, the input bias current of LMP7721 is 3 μ A, which is much smaller than the instantaneous current generated by the polarized charge of the piezoceramic force sensor, so the capacitance CFThe stored charge can be considered to be entirely derived from the polarization charge generated by the piezoceramic force sensor. By sensing the charge amplifier output, i.e. the capacitance C, based on the fact that the charge stored in the capacitance is the product of the voltage across the capacitance and the capacitance value of the capacitanceFThe voltage at the two ends can detect the magnitude of the polarization charge.
In this embodiment, a schematic diagram of three-dimensional force sensing measurement based on a three-axis fast tool servo mechanism is shown in fig. 3. IN the process of servo cutting machining of the three-axis quick cutter, the outputs of the force sensors IN three directions are respectively connected with an input channel IN1, an input channel IN2 and an input channel IN3 of a three-channel charge amplifier, output signals corresponding to the three output channels are collected by a 16-bit AD/DA collection card, and the collected results are transmitted to an upper computer for processing.
In order to verify that the output result of the three-channel charge amplifier is in proportional relation with the dynamic force borne by the three-direction force sensors, namely the dynamic force can be deduced from the output result of the three-channel charge amplifier, the force sensors are calibrated on three axes respectively. The calibration mode is to input different dynamic forces to each shaft and respectively detect the output results of the corresponding charge amplifiers.
Dynamic forces of different magnitudes act on the X-axis force sensor, and the corresponding charge amplifier outputs 10mN of cutting force, which can be recognized by the X-axis force sensor at minimum, as shown in fig. 4 (a). The result shown in the figure 4(a) is drawn into a linear graph, linear fitting is carried out through least square, the curve obtained by the experiment and the fitting curve are shown in the figure 4(b), the fitting curve is basically consistent with the experiment curve, the maximum error is not more than 0.02mV, and the result of the X-axis charge amplifier is proved to be in linear proportion to the dynamic force born by the X-axis piezoelectric ceramic force sensor.
Dynamic forces of different magnitudes act on the Y-axis force sensor, and the corresponding charge amplifier outputs 10mN of cutting force, which can be recognized by the Y-axis force sensor at minimum, as shown in fig. 4 (c). The result shown in the figure 4(c) is drawn into a linear graph, linear fitting is carried out through least square, the curve obtained by the experiment and the fitting curve are shown in the figure 4(d), the fitting curve is basically consistent with the experiment curve, the maximum error is not more than 0.02mV, and the fact that the output result of the Y-axis charge amplifier is in linear proportion to the dynamic force borne by the Y-axis piezoelectric ceramic force sensor is proved.
Dynamic forces of different magnitudes act on the Z-axis force sensor, and the corresponding charge amplifier outputs 10mN of cutting force, which can be recognized by the Z-axis force sensor at minimum, as shown in fig. 4 (e). The result shown in the figure 4(e) is drawn into a linear graph, linear fitting is carried out through least square, the curve obtained by the experiment and the fitting curve are shown in the figure 4(f), the fitting curve is basically consistent with the experiment curve, the maximum error is not more than 0.02mV, and the fact that the output result of the Z-axis charge amplifier is in linear proportion to the dynamic force borne by the Z-axis piezoelectric ceramic force sensor is proved.
Based on this, the three-dimensional force perception measurement system based on the three-axis quick tool servo mechanism in the embodiment can respectively reach the force detection accuracy of 10mN in three directions.
The above description of the embodiments is only intended to facilitate the understanding of the method of the invention and its core idea. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (3)
1. The utility model provides a three-dimensional power detecting system based on quick cutter servo of triaxial which characterized in that includes:
the X/Y/Z axis driving unit of the three-axis quick cutter servo mechanism is respectively integrated with an X/Y/Z axis piezoelectric ceramic force sensor;
the input end of the three-channel charge amplifier module is respectively coupled with the X/Y/Z-axis piezoelectric ceramic force sensor and is used for amplifying polarization charges generated by the piezoelectric ceramic force sensor; the three-channel charge amplifier module is an integrated three-channel charge amplifier which is integrated with three independent amplifying channels, wherein each amplifying channel comprises:
a first amplifier and a second amplifier; the non-inverting terminal of the first amplifier is connected via a resistor RTCoupled to the non-inverting terminal of the second amplifier Q2, the inverting terminal is connected via a resistor RGAnd a capacitor CGThe filter unit formed by parallel connection is grounded, and the output end of the filter unit is coupled with a signal input port of the three-channel charge amplifier; the inverting terminal of the second amplifier is connected via a resistor RSCoupled to the signal input port of the three-channel charge amplifier, and having its output terminal coupled to the signal output port of the three-channel charge amplifier via a resistor RFAnd a capacitor CFThe negative feedback unit formed by parallel connection is coupled with the self inverting terminal;
the input end of the AD/DA acquisition card is connected with the output end of the three-channel charge amplifier module and is used for acquiring the amplified polarization charge signals output by the three output channels;
and the upper computer is connected with the output end of the AD/DA acquisition card and used for receiving the amplified polarization charge signal acquired by the AD/DA acquisition card and calculating the dynamic force applied to the X/Y/Z-axis piezoelectric ceramic force sensor based on the signal.
2. The three-dimensional force sensing system based on three-axis fast tool servo of claim 1, wherein the X/Y/Z axis driving units respectively comprise sequentially connected:
the device comprises an X-axis piezoelectric ceramic driver, an X-axis guiding flexible hinge, an X-axis lateral buffering Hooke hinge and an X-axis piezoelectric ceramic force sensor;
the system comprises a Y-axis piezoelectric ceramic driver, a Y-axis guiding flexible hinge, a Y-axis lateral buffering Hooke hinge and a Y-axis piezoelectric ceramic force sensor;
the device comprises a Z-axis piezoelectric ceramic driver, a Z-axis guiding flexible hinge, a Z-axis lateral buffering Hooke hinge and a Z-axis piezoelectric ceramic force sensor.
3. The three-axis fast tool servo-based three-dimensional force sensing system of claim 1, wherein the first amplifier is model number LMP7715 and the second amplifier is model number LMP 7721.
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| CN111633451B (en) * | 2020-04-14 | 2021-08-31 | 浙江大学 | Three-dimensional force detection system of three-axis quick cutter servo mechanism |
| CN111872746B (en) * | 2020-08-01 | 2022-02-08 | 浙江大学 | Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions |
| CN111975412B (en) * | 2020-08-26 | 2022-03-11 | 山东理工大学 | Measuring and compensating device for one-way machining force of cutting machining |
| WO2023108663A1 (en) * | 2021-12-18 | 2023-06-22 | 浙江大学 | Ultra-precision cutting quasi-static force measurement system based on piezoelectric ceramic sensor |
| CN114235229B (en) * | 2021-12-18 | 2022-11-08 | 浙江大学 | Ultra-precise cutting quasi-static force detection method based on piezoelectric ceramic sensor |
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Inventor after: Chen Yuanliu Inventor after: Chen Fuwen Inventor after: Li Zhongwei Inventor before: Chen Yuanliu Inventor before: Chen Fuwen |