CN110253340A - A kind of three-dimensional force detection system based on three axis fast tool servos - Google Patents

A kind of three-dimensional force detection system based on three axis fast tool servos Download PDF

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CN110253340A
CN110253340A CN201910564254.9A CN201910564254A CN110253340A CN 110253340 A CN110253340 A CN 110253340A CN 201910564254 A CN201910564254 A CN 201910564254A CN 110253340 A CN110253340 A CN 110253340A
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axis
amplifier
piezoelectric ceramics
fast tool
triple channel
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CN110253340B (en
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陈远流
陈甫文
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Zhejiang University ZJU
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B23Q17/0952—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The present invention provides a kind of three-dimensional force detection systems based on three axis fast tool servos, comprising: three axis fast tool servos are integrated with X/Y/Z axis piezoelectric ceramics sensor on X/Y/Z axis driving unit respectively；Triple channel charge amplifier module, input terminal are respectively coupled to the X/Y/Z axis piezoelectric ceramics sensor, for amplifying to the polarization charge that piezoelectric ceramics sensor generates；AD/DA capture card, input terminal connect the output end of triple channel charge amplifier module, for acquiring the amplified polarization charge signal of three output channels output；And host computer, the output end of AD/DA capture card is connected, for receiving the amplified polarization charge signal of AD/DA capture card acquisition, and the dynamic force size that the X/Y/Z axis piezoelectric ceramics sensor is subject to is calculated based on the signal.The direct piezoelectric effect of system of the invention based on piezoelectric ceramic piece realizes the on-line checking of three-dimensional force in cutting process using piezoelectric ceramic piece as force snesor.

Description

A kind of three-dimensional force detection system based on three axis fast tool servos
Technical field
The present invention relates to Ultraprecision Machining fields, and in particular to a kind of three based on three axis fast tool servos Tie up force detection system.
Background technique
Fast tool servo is a kind of machine cut method based on single-point diamond cutter, is processing ultraprecise device The main building block of part --- the effective means of micro structure array.With the development of nanotechnolgy, special dimension is to optics three The complexity requirement for tieing up Free Surface is higher and higher, growing day by day to the high-performance manufacture demand of micro-structure.Certainly based on servo By the limitation spent, traditional uniaxial fast tool servo is difficult to meet the system of complex three-dimensional Free Surface, complex micro structure Demand is made, therefore two axis, three axis fast tool servos are come into being.
Compared to uniaxial fast tool servo cutting process, the cutting process of three axis fast tool servos is more Complexity is mainly reflected in inter-axis coupling is serious, diamond cutter cutting edge and micro-structure surface cutting state be not apparent etc., and cuts Cutting power is to reflect the important indicator of cutting state, and cutting force generates abnormal position, often there is the generation of micro-structure surface microdefect. In order to which the cutting state to three axis fast tool servos cutting complex surface micro-structure is held, processed with guarantee The integrality of surface micro-structure needs the cutting force to three directions generated in cutting process to be measured in real time.
Current three-dimensional force detection method has three-dimensional force detection method based on flexible touch sensation sensor array, based on electromagnetism The three-dimensional force detection method of induction, condenser type three-dimensional force detection method etc., device involved by the above method have that volume is big, structure The disadvantages of un-skill, it is difficult to the integrated use of fast tool servo；Meanwhile above method three-dimensional force detection accuracy is generally not Height, and three axis fast tools have the characteristics of ultralow cutting force, equally exist implacable contradiction.For the above reason, pass Dynamometer, the force snesor of system are difficult to integrate into three axis fast tool servos and carry out on-line checking to three-dimensional force.
On the other hand, has the uniaxial fast tool servo of integrated piezoelectric formula force snesor at present, for detecting list Axial cutting force in axis fast tool servo cutting surface micro-structure process.This method uses piezoelectric ceramic piece as power Sensor, using the direct piezoelectric effect of piezoelectric ceramic piece, i.e., when there is dynamic force to act on piezoelectric ceramic piece surface, piezoelectric ceramics Sector-meeting generates polarization charge, and positive and negative polarization charge is respectively distributed to piezoelectric ceramic piece along axial both ends, passes through detection polarization electricity The size of lotus can reflect the size of dynamic force, thus the effect of force sensor.The single shaft of the integrated force snesor is quickly Tool Servo system realizes the detection in cutting process to axial cutting force, to guarantee in cutting process to table The on-line monitoring of face microdefect.In addition, integrating force snesor in uniaxial fast tool servo, pass through contact force, cutting Power closed loop feedback control has derived the scanning function for using cutter as probe, and measurement is integrated on the basis of machining function Function has expanded such as in situ measurement of tool in cutting sword profile, relay and has processed self-positioning many applications.But due to uniaxial fast Only one servo freedom degree of fast tool servo mechanism, it is difficult to process complicated free optical surface, complex surface micro-structure.
Summary of the invention
Based on the above background, the present invention provides one kind integrates three piezoelectric ceramics in three axis fast tool servos Piece, the direct piezoelectric effect based on piezoelectric ceramic piece realize three-dimensional force in cutting process using piezoelectric ceramic piece as force snesor The system of on-line checking.
To achieve the above object, present invention employs following technical solutions:
A kind of three-dimensional force detection system based on three axis fast tool servos, comprising:
Three axis fast tool servos are integrated with X/Y/Z axis piezoelectric ceramics biography on X/Y/Z axis driving unit respectively Sensor；
Triple channel charge amplifier module, input terminal are respectively coupled to the X/Y/Z axis piezoelectric ceramics sensor, are used for The polarization charge generated to piezoelectric ceramics sensor amplifies；
AD/DA capture card, input terminal connect the output end of triple channel charge amplifier module, for acquiring three outputs The amplified polarization charge signal of channel output；
And host computer, the output end of AD/DA capture card is connected, after the amplification for receiving the acquisition of AD/DA capture card Polarization charge signal, and the dynamic force size that the X/Y/Z axis piezoelectric ceramics sensor is subject to is calculated based on the signal.
Further, the X/Y/Z axis driving unit respectively includes sequentially connected:
X-axis piezoelectric ceramic actuator, X-axis guiding flexible hinge, X-axis lateral cushioning hook hinge and X-axis piezoelectric ceramics Sensor；
Y-axis piezoelectric ceramic actuator, Y-axis guiding flexible hinge, Y-axis lateral cushioning hook hinge and Y-axis piezoelectric ceramics Sensor；
Z axis piezoelectric ceramic actuator, Z axis guiding flexible hinge, Z axis lateral cushioning hook hinge and Z axis piezoelectric ceramics Sensor.
Optionally, the triple channel charge amplifier module is integrated-type triple channel charge amplifier, or including three Single channel charge amplifier, or including a single channel, a binary channels charge amplifier.
Further, the triple channel charge amplifier module is integrated-type triple channel charge amplifier, is integrated with solely Tri- road amplification channel of Li, wherein every road amplification channel includes:
First amplifier and the second amplifier；The in-phase end of first amplifier is through resistance RTCouple the second amplifier Q2's In-phase end, reverse side is via resistance RGWith capacitor CGThe filter unit ground connection composed in parallel, output end couple the amplification of triple channel charge The signal input port of device；The reverse side of second amplifier is through resistance RSCouple the signal input part of triple channel charge amplifier Mouthful, output end couples the signal output port of triple channel charge amplifier, and via resistance RFWith capacitor CFWhat is composed in parallel is negative anti- Feedback unit couples itself reverse side.
Preferably, the model LMP7715 of first amplifier, the model LMP7721 of the second amplifier.
Beneficial effects of the present invention are as follows:
(1) compared with existing three-dimensional force detection means, system of the present invention be can integrate in three axis fast tool servos In mechanism, thus the on-line checking cutting force size during cutting process of three axis fast tool servos.
(2) compared with existing three-axis force detection means, system of the present invention has high sensitivity, the recognizable 10mN of minimum Cutting force.
(3) power is integrated compared with the uniaxial fast tool servo of integrated force snesor, in system of the present invention to pass Three axis fast tool servos of sensor have more high-freedom degree, and processing complex surface micro-structure may be implemented.
Detailed description of the invention
Fig. 1 is three axis fast tool servo structural schematic diagrams of integrated piezoelectric formula force snesor in the present invention.
Fig. 2 is triple channel charge amplifier schematic diagram in the embodiment of the present invention.
Fig. 3 is that three-dimensional force perceives instrumentation plan in the embodiment of the present invention.
Fig. 4 is triaxial force sensor calibration result figure in the embodiment of the present invention, wherein (a) is the effect of X-axis Different Dynamic power Lower output voltage variation；(b is) X-axis voltage change Line Chart；(c) lower output voltage variation is acted on for Y-axis Different Dynamic power； It (d) is Y-axis voltage change Line Chart；(e) lower output voltage variation is acted on for Z axis Different Dynamic power；It (f) is Z axis voltage change Line Chart.
Specific embodiment
For a further understanding of the present invention, the preferred embodiment of the invention is described below with reference to embodiment, still It should be appreciated that these descriptions are only further explanation the features and advantages of the present invention, rather than to the claims in the present invention Limitation.
The embodiment of the invention provides a kind of three-dimensional force detection systems based on three axis fast tool servos.Wherein, The structural schematic diagram of three axis fast tool servos of integrated force snesor is as shown in Figure 1.The structure mainly includes X-axis driving Unit (including X-axis piezoelectric ceramic actuator 13, X-axis are oriented to flexible hinge 12, X-axis lateral cushioning hook hinge 11, X-axis piezoelectricity Ceramic force snesor 10), Y-axis driving unit (including Y axis piezoelectric ceramic actuator 4, Y-axis guiding flexible hinge 5, Y-axis are lateral Buffer hook hinge 6, Y-axis piezoelectric ceramics sensor 7), Z axis driving unit (including Z axis piezoelectric ceramic actuator 2, Z axis are led To flexible hinge 1, Z axis lateral cushioning hook hinge 3, Z axis piezoelectric ceramics sensor 8) and cutter 9.
Piezoelectric ceramics sensor can generate corresponding polarization charge and be distributed in both ends under the action of by dynamic force. The dynamic force size that the polarization charge and piezoelectric ceramic piece generated according to piezoelectric ceramics direct piezoelectric effect, piezoelectric ceramics both ends is born Proportional relationship.Since cutting force is very faint during three axis fast tool servo finished surface micro-structures, so pressure It is also very faint that electroceramics power senses the polarization charge that both ends generate, it is difficult to directly measure.Therefore, can be amplified by charge Device, the polarization charge that piezoelectric ceramics sensor is generated amplifies, and then is detected.
In the present embodiment, in order to detect the cutting force size in three directions, three axis fast tool servos are three sides It is integrated with three piezoelectric ceramics sensors upwards, it is therefore desirable to which three channel charge amplifiers are to piezoelectric ceramics sensor pole Change charge to amplify.
Preferably, the triple channel charge amplifier schematic diagram in the present embodiment is as shown in Figure 2.Each channel Using to chip be LMP7721 (3m μ μ A input bias current) and LMP7715.Wherein, the input bias current of LMP7721 For 3m μ μ A, much smaller than the transient current that piezoelectric ceramics sensor polarization charge generates, therefore capacitor CFStored charge can It is considered as the polarization charge all generated from piezoelectric ceramics sensor.According to capacitive charge storage be capacitor both end voltage and The product of capacitor's capacity, by detecting charge amplifier output, i.e. capacitor CFThe voltage at both ends, can be detected out polarization charge Size.
In the present embodiment, the three-dimensional force perception instrumentation plan based on three axis fast tool servos is as shown in Fig. 3. In three axis fast tool servo cutting processes, the force snesor output in three directions connects triple channel charge amplifier respectively Input channel 1, input channel 2, input channel 3, corresponding three output channel output signals are adopted by 16 AD/DA capture cards Collection, collection result are transferred in host computer and are handled.
In order to verify the dynamic force size that triple channel charge amplifier output result is born with three direction force snesors Proportional relationship can be inferred that dynamic force size by triple channel charge amplifier output result, carry out respectively to three axis Force sensor caliberating.Calibration mode is that different dynamic forces is inputted in each axis, detects corresponding charge amplifier output respectively As a result.
Different size dynamic force is acted on X-axis force snesor, corresponding charge amplifier output is as shown in Fig. 4 (a), X The cutting force size that axial force sensor minimum can identify is 10mN.Such as the result of Fig. 4 (a) is depicted as Line Chart, and by most Small two multiply carry out linear fit, test shown in curve obtained and matched curve such as Fig. 4 (b), matched curve is basic with empirical curve It coincide, worst error is no more than 0.02mV, it was demonstrated that X-axis charge amplifier output result and X-axis piezoelectric ceramics sensor institute The dynamic force size of receiving is linearly proportional.
Different size dynamic force is acted on Y-axis force snesor, corresponding charge amplifier output is as shown in Fig. 4 (c), Y The cutting force size that axial force sensor minimum can identify is 10mN.Such as the result of Fig. 4 (c) is depicted as Line Chart, and by most Small two multiply carry out linear fit, test shown in curve obtained and matched curve such as Fig. 4 (d), matched curve is basic with empirical curve It coincide, worst error is no more than 0.02mV, it was demonstrated that Y-axis charge amplifier output result and Y-axis piezoelectric ceramics sensor institute The dynamic force size of receiving is linearly proportional.
Different size dynamic force is acted on Z axis force snesor, corresponding charge amplifier output is as shown in Fig. 4 (e), Z The cutting force size that axial force sensor minimum can identify is 10mN.Such as the result of Fig. 4 (e) is depicted as Line Chart, and by most Small two multiply carry out linear fit, test shown in curve obtained and matched curve such as Fig. 4 (f), matched curve is basic with empirical curve It coincide, worst error is no more than 0.02mV, it was demonstrated that Z axis charge amplifier output result and Z axis piezoelectric ceramics sensor institute The dynamic force size of receiving is linearly proportional.
Based on this, the three-dimensional force based on three axis fast tool servos in the present embodiment perceives measuring system, three The power detection accuracy of 10mN can be reached on a direction respectively.
The above description of the embodiment is only used to help understand the method for the present invention and its core ideas.It should be pointed out that pair For those skilled in the art, without departing from the principle of the present invention, the present invention can also be carried out Some improvements and modifications, these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims (5)

1. a kind of three-dimensional force detection system based on three axis fast tool servos characterized by comprising
Three axis fast tool servos are integrated with X/Y/Z axis piezoelectric ceramics sensing on X/Y/Z axis driving unit respectively Device；
Triple channel charge amplifier module, input terminal are respectively coupled to the X/Y/Z axis piezoelectric ceramics sensor, for pressure The polarization charge that electroceramics force snesor generates amplifies；
AD/DA capture card, input terminal connect the output end of triple channel charge amplifier module, for acquiring three output channels The amplified polarization charge signal of output；
And host computer, the output end of AD/DA capture card is connected, for receiving the amplified pole of AD/DA capture card acquisition Change charge signal, and the dynamic force size that the X/Y/Z axis piezoelectric ceramics sensor is subject to is calculated based on the signal.
2. the three-dimensional force detection system as described in claim 1 based on three axis fast tool servos, which is characterized in that institute State X/Y/Z axis driving unit respectively include it is sequentially connected:
X-axis piezoelectric ceramic actuator, X-axis guiding flexible hinge, X-axis lateral cushioning hook hinge and X-axis piezoelectric ceramics sense Device；
Y-axis piezoelectric ceramic actuator, Y-axis guiding flexible hinge, Y-axis lateral cushioning hook hinge and Y-axis piezoelectric ceramics sense Device；
Z axis piezoelectric ceramic actuator, Z axis guiding flexible hinge, Z axis lateral cushioning hook hinge and Z axis piezoelectric ceramics sense Device.
3. the three-dimensional force detection system as described in claim 1 based on three axis fast tool servos, which is characterized in that institute Stating triple channel charge amplifier module is integrated-type triple channel charge amplifier, or including three single channel charge amplifiers, Or including a single channel, a binary channels charge amplifier.
4. the three-dimensional force detection system as claimed in claim 3 based on three axis fast tool servos, which is characterized in that institute Stating triple channel charge amplifier module is integrated-type triple channel charge amplifier, is integrated with independent three road amplification channel, The road Zhong Mei amplification channel includes:
First amplifier and the second amplifier；The in-phase end of first amplifier is through resistance RTThe in-phase end of the second amplifier Q2 is coupled, Reverse side is via resistance RGWith capacitor CGThe filter unit ground connection composed in parallel, output end couple the letter of triple channel charge amplifier Number input port；The reverse side of second amplifier is through resistance RSCouple the signal input port of triple channel charge amplifier, output The signal output port of end coupling triple channel charge amplifier, and via resistance RFWith capacitor CFThe negative-feedback unit composed in parallel Couple itself reverse side.
5. the three-dimensional force detection system as claimed in claim 4 based on three axis fast tool servos, which is characterized in that institute State the model LMP7715 of the first amplifier, the model LMP7721 of the second amplifier.
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CN111872746A (en) * 2020-08-01 2020-11-03 浙江大学 Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions
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CN114235229A (en) * 2021-12-18 2022-03-25 浙江大学 Ultra-precision cutting quasi-static force detection system based on piezoelectric ceramic sensor
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CN111633451A (en) * 2020-04-14 2020-09-08 浙江大学 Three-axis quick cutter servo mechanism and three-dimensional force online detection system thereof
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CN114235229A (en) * 2021-12-18 2022-03-25 浙江大学 Ultra-precision cutting quasi-static force detection system based on piezoelectric ceramic sensor
WO2023108663A1 (en) * 2021-12-18 2023-06-22 浙江大学 Ultra-precision cutting quasi-static force measurement system based on piezoelectric ceramic sensor

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Inventor after: Chen Yuanliu

Inventor after: Chen Fuwen

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