CN207643111U - Three freedom meek piezoelectricity micro clamping device - Google Patents
Three freedom meek piezoelectricity micro clamping device Download PDFInfo
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- CN207643111U CN207643111U CN201721035443.XU CN201721035443U CN207643111U CN 207643111 U CN207643111 U CN 207643111U CN 201721035443 U CN201721035443 U CN 201721035443U CN 207643111 U CN207643111 U CN 207643111U
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Abstract
Three freedom meek piezoelectricity micro clamping device has pedestal, has at least three single-degree-of-freedom clamping units, single-degree-of-freedom clamping unit to be angularly uniformly distributed on pedestal, each single-degree-of-freedom clamping unit is fixed on pedestal by respective connecting plate；Each single-degree-of-freedom clamping unit includes the three-level enlarger in rack and rack, and three-level enlarger is sequentially connected in series, first order enlarger connection piezoelectricity fold stack driver, fixed chuck on the output of third level enlarger.The power that piezoelectricity fold stack driver deformation generates passes through three-level enlarger successively, is finally output to collet, and three collet collective effects clamp part to be held.The advantages of the utility model has the big clamping range that can realize micro- binder and generates pure translational output and integrated chucking power and position detection.
Description
Technical field
The utility model is related to the submissive piezoelectricity micro clamping devices that a kind of Three Degree Of Freedom, pure translational export.
Technical background
As the critical component of connection macrosystem and microscopic system, micro clamping device is in microoperation and micro assemby technical field
In play a crucial role, micro clamping device is used to realize clamping, keeps and the microoperations tasks such as release, such as cell
Mobile and arrangement, micro parts assembling and fiber alignment etc..
Compared with marmem driving, vacuum driving, static broach driving, thermal drivers and electromagnetic drive etc., piezoelectricity
Driving is good because having many advantages, such as big high resolution, driving force, fast response time and dynamic characteristic, and is widely used in various high-precision
It spends in micro clamping device.On the other hand, for many microoperation tasks and micro assemby task, often in shape not by operation object
Rule, dimensionally across micron order to grade.Using micro clamping device to this kind of irregular, frangible and grasped across scale
When being operated as object, it is vulnerable to by operation object and collet and is generated opposite along the component of micro clamping device central axis direction is needed
Sliding, influences the precision and efficiency of microoperation process, is also easier to the damage object to be operated.Therefore, micro clamping device needs have
Pure translational output, high-resolution and big stroke.In addition, in order to preferably solve the problems, such as microoperation and micro assemby, it is also desirable to micro-
The chucking power of clamper and position are monitored on-line, and carry out feedback control.Existing piezoelectricity micro clamping device generally use list
Grade or two-stage displacement amplifying mechanism, micro clamping device clamping range are limited.Meanwhile micro clamping device end also tend to be rotation output or
Person carries out approximate translation output by unilateral parallelogram mechanism, and translation effect is also limited.And micro clamping device end is clamped
The detection of power is also using the single foil gauge of stickup by the way of the flexible clamping arm roots of end, and when detection can also be further exacerbated by
To by the deflection of operation object.
Utility model content
In order to overcome the disadvantages mentioned above of the prior art, the utility model, which provides, a kind of can realize the big of micro- binder
Clamping range, and the three freedom meek piezoelectricity micro clamping device of pure translational output and integrated chucking power and position detection can be generated.
Based on the piezoelectric microgripper of flexible hinge amplification, there is pedestal, have the clamping of at least three single-degree-of-freedoms single on pedestal
Member, single-degree-of-freedom clamping unit are angularly uniformly distributed, and each single-degree-of-freedom clamping unit is fixed on bottom by respective connecting plate
Seat；
Each single-degree-of-freedom clamping unit includes the three-level enlarger in rack and rack, and three-level enlarger is gone here and there successively
Join, first order enlarger connection piezoelectricity fold stack driver, fixed chuck on the output of third level enlarger.Piezo stack
The power that stack driver deformation generates passes through three-level enlarger successively, is finally output to collet, and three collet collective effects clamp
Part to be held.Pedestal is fixed on macro-moving stage, and macro-moving stage is moved with millimeter/Centimeter Level.
Further, first order enlarger is composite bridge mechanism, and composite bridge mechanism includes longitudinally disposed a pair of
Support arm and at least one set first being laterally arranged are oriented to amplification bar assembly and are oriented to amplification bar assembly at least one set second；Support
Piezoelectricity fold stack driver is set between arm, and piezoelectricity fold stack driver is in transversal stretching deformation；
First, which is oriented to amplification bar assembly and second, is oriented to amplification bar assembly respectively by respective left side bar, intermediate bar and right side
Bar forms；It is hinged with intermediate bar that left side bar and right-hand rod distinguish one end；The other end is hinged with support arm；Intermediate bar is far from piezo stack
Stack driver makes left side bar and right-hand rod tilt, and intermediate bar is parallel with piezoelectricity fold stack driver；First is oriented to amplification bar assembly
Intermediate bar is fixed with rack, and second is oriented to output of the intermediate bar of amplification bar assembly as first order enlarger.
Further, it second is oriented on the left side bar of amplifier module and the hinge of intermediate bar, the hinge of right-hand rod and intermediate bar
It is upper to set position detection foil gauge respectively.The output voltage of position detection foil gauge is denoted as U1, U1=ky, y are the displacement of collet, and k is
Proportionality coefficient.It needs first to calibrate before the utility model is used and obtains proportionality coefficient k.Specific practice is：First electricity consumption is held or is swashed
Optical displacement sensor detects the displacement y of current collet0, the output voltage U of position detection foil gauge1, you can it obtains
Further, left side bar, intermediate bar and right-hand rod three's equidimension, left side bar and right-hand rod are symmetrical, left side bar, intermediate
The total length of bar and right-hand rod is more than the distance between two support arms.Therefore left side bar, intermediate bar and right-hand rod are arranged two
In the arch bridge shape that intermediate high both sides are low when between a support arm.
When piezoelectricity fold stack driver is laterally elongated, the outer end of left side bar and right-hand rod follows the support arm respectively connected
Outward, the inner end of left side bar and right-hand rod is moved with intermediate bar to the direction close to piezoelectricity fold stack driver.Left side bar and the right side
Side lever is equivalent to lever, amplification bar is oriented to when the projection size of horizontal direction is more than the projection size in longitudinal direction, to pressure
The deformation quantity of electric fold stack driver carries out first time amplification.
Further, the first guiding amplification bar assembly has two groups, and two group of first guiding amplification bar assembly is parallel；Second is oriented to
Amplification bar assembly has two groups, and two group of second guiding amplification bar assembly is parallel；Two group of first intermediate bar for being oriented to amplification bar assembly
It is connected and is fixed with rack, the output after two group of second intermediate bar for being oriented to amplification bar assembly is connected as first order enlarger
Part.
Further, second level enlarger is lever mechanism, and lever mechanism is made of active bar portion and driven bar portion, actively
Fulcrum is arranged in bar and follower lever intersection, and fulcrum is fixed with rack；The length of driving lever is less than the length of follower lever, and follower lever is made
For the output of second level enlarger；Driving lever is connect by connecting rod with the output of first order enlarger, connecting rod
One end is hinged with driving lever, and the output of the other end and first order enlarger is hinged.The length of follower lever is more than driving lever
Length realizes second of amplification to driving force.
Further, driving lever and follower lever are linked to be broken line.I.e. lever is L-shaped or √ shapes.Lever mechanism such setting both may be used
To reduce the length of single-degree-of-freedom clamping unit, and convenient for being connect with third level enlarger.
Further, third level enlarger is double rocker mechanism, the master of the follower lever of lever mechanism as double rocker mechanism
Shake bar, the output rod of the side link of double rocker mechanism as third level enlarger, collet is set to the free end of side link.
The distance between drive crank hinge joint and driven rocking bar hinge joint arrive free end less than driven rocking bar hinge joint on side link
Distance, side link form lever, realize and amplify to the third time of driving force.
Further, the free end of side link is equipped with a tooth-arranging strip；Rack is equipped with flexible armed lever and thrust pawl, flexible armed lever
One end is fixed on the rack, and the other end is free end, and thrust pawl is fixed on free end, there is flexural piezoelectric actuating on flexible armed lever
Device, when flexural piezoelectric actuator makes thrust pawl be in first position, thrust pawl is far from rack；Flexural piezoelectric actuator makes thrust pawl
When in the second position, thrust pawl is inserted into rack；Rack, flexible armed lever, thrust pawl and flexural piezoelectric actuator form clamper
Mechanism.
When flexural piezoelectric brake obtains electric, flexible armed lever is made to be swung to the direction far from rack, thrust pawl reaches first
It sets, thrust pawl is far from rack.When the complete brake dead electricity of piezoelectricity, flexible armed lever restores deformation, and thrust pawl is inserted into rack, will be even
The position of hack lever locks, then the position of collet is locked.
Further, it is equipped with chucking power between side link and collet and detects foil gauge, chucking power detects foil gauge one end and folder
Head is fixed, and the other end is hinged with side link.The output voltage of chucking power detection foil gauge is denoted as U2, U2=KF, F indicate collet
Chucking power, K indicate proportionality constant.Obtain Proportional coefficient K method be：The chucking power of current collet is first detected with force snesor
F0, obtain the output voltage U of the foil gauge of chucking power detection at this time2, you can it obtains
Further, rack, composite bridge mechanism, lever mechanism, translation link mechanism, clamping mechanism and tension detection mechanism warp
Wire cutting obtains；Rack, first are oriented to amplification bar assembly, vertical supporting rod, the second guiding amplification bar assembly, connecting rod and and lever
It is the first cutting gap between the driving lever of mechanism, rack, first are oriented to amplification bar assembly and the second cutting gap, and second cuts
Slot gap is not closed, and first is oriented between left side bar, right-hand rod, intermediate bar and the support arm of amplification bar assembly as third cutting seam
Gap, third cutting gap have a pair；First is oriented to amplification bar assembly, support arm, output rod, the second guiding amplification bar assembly and machine
It is the 4th cutting gap between erection column, the 4th cutting region and piezoelectricity fold stack driver clearance fit, two second guiding are put
It is the 5th cutting gap between bar assembly, output rod and support arm greatly, the output rod of composite bridge mechanism, second are oriented to amplification bar
It is the 6th cutting gap between component, connecting rod and the follower lever of lever mechanism, rack, lever mechanism follower lever and translation connecting rod
It is the 7th cutting gap between the rocking bar of mechanism, is between rack, the rocking bar of translation link mechanism, side link and clamping mechanism
8th cutting gap, tension detection mechanism centre are the 9th cutting gap；First be oriented to amplification bar assembly and rack between hinge,
First hinge, the output rod being oriented between amplification bar assembly and support arm is oriented to the hinge, defeated for amplifying bar assembly inner end with second
The hinge of the driving lever of the hinge of rod and connecting rod, connecting rod and lever mechanism, the hinge of driving lever and rack, translation enlarger
The middle rocking bar and hinge of rack, the hinge of rocking bar and side link, the hinge of side link and follower lever, side link and tension detection mechanism
Hinge be two incision directly round flexible hinge, the first of composite bridge mechanism is oriented to the outer end of amplification bar assembly and support arm
Hinge be blade profile flexible hinge.
Further, Z-shape after lever mechanism cutting.
Further, side link is L-shaped.
Further, the hinge of lever mechanism follower lever and side link, the hinge of rocking bar and side link and side link and power are examined
Survey the hinge of mechanism point-blank.
Further, tension detection mechanism is in rectangular-ambulatory-plane, and chucking power detection foil gauge is bonded and fixed to the 9th in tension detection mechanism
In cutting gap.
Further, position detection foil gauge and chucking power detection foil gauge separately constitute bridgt circuit, and are put by strain
After big device amplification, it is transferred on industrial personal computer by PCI board card by A/D mouthfuls, industrial personal computer calculates the displacement for obtaining collet and chucking power.
Further, collet is connected firmly on the outside of tension detection mechanism by gluing or welding, and collet has and tension detection mechanism
The clamping face of the mounting portion and clamping microoperation object of contact.
When the utility model is used, macro-moving stage is first made to be moved to the initial position of microoperation object, then it is curved to piezoelectricity
Bent actuator drives the flexible armed lever of clamping mechanism inverse by the amplified voltage of power amplifier, the elongation of flexural piezoelectric actuator
Clockwise is bent, to drive thrust pawl to deflect；The amplified electricity of power amplifier is applied through to piezoelectricity fold stack driver
Pressure, piezoelectricity fold stack driver elongation, piezoelectricity fold stack driver push out the support arm of composite bridge mechanism, and the first guiding is put
Big bar and the second guiding amplification bar drive output rod to move vertically down, to drive lever mechanism master by connecting rod
Lever counterclockwise movement, and then lever mechanism follower lever counterclockwise movement is driven, it is final to drive side link outside in the horizontal direction
Movement drives collet " clamping " object to be operated；Meanwhile flexural piezoelectric actuator is powered off, clamping mechanism power-off and
Thrust pawl and rack CONTACT WITH FRICTION, then power off piezoelectric stack actuator, are realized by position-limit mechanism current to the object to be operated
" holding " of pose；Macro-moving stage moves again, drives micro clamping device to move to target location, again to flexural piezoelectric actuator
By the amplified voltage of power amplifier, the elongation of flexural piezoelectric actuator drives the flexible armed lever of clamping mechanism counterclockwise
Bending, to drive thrust pawl to deflect, composite bridge enlarger, lever mechanism and double rocker mechanism reset, and band carry-over bar returns
To initial position, realize that " release " to the object to be operated operates.Double rocker mechanism using side link as output, ensure that
The pure translational of micro clamping device exports.
The utility model has the advantage of：1. by composite bridge mechanism, lever mechanism and double rocker mechanism to piezo stack
The output displacement of stack driver carries out three-level amplification and is oriented to, and ensure that the pure translational input and output of micro clamping device, and makes
Micro clamping device has big clamping range.
2. enlarger uses flexible hinge, and formed by linear cutter, have it is small, without mechanical friction, lead
The advantages of high, machining accuracy is easy to ensure to precision.
3. position and chucking power detection are integrated with, convenient for carrying out microoperation to small fragile part or cell etc..
4. three clamping limbs respectively drive, micro clamping device has more degree of freedom, is more easy to carry out Complex Assembly task
Operation.Micro clamping device output end has clamping mechanism so that micro clamping device is not required to apply voltage to piezoelectric stack actuator
Realize that " holding " to the object to be operated operates, micro clamping device control is more convenient, and avoids control voltage fluctuation and cause
The object to be operated damage.
5. it is light-weight, easy to operate, it is suitable for micro-manipulating robot system and MEMS.
Description of the drawings
Fig. 1 is the utility model structure diagram.
Fig. 2 is flexure hinge mechanism structural schematic diagram.
Fig. 3 is clamping mechanism and tension detection mechanism schematic diagram.
Fig. 4 is flexure hinge mechanism movement schematic diagram.
Fig. 5 is clamper process schematic.
Fig. 6 is the utility model control structure schematic diagram.
Fig. 7 is chuck structure schematic diagram.
Specific implementation mode
With reference to attached drawing, the utility model is further illustrated：
As shown in Figure 1, the piezoelectric microgripper based on flexible hinge amplification, including pedestal 1, it is uniformly distributed and is fixed on pedestal
Three connecting plates 2 on 1, the single-degree-of-freedom micro-grabbe 3 being fixed on each connecting plate 2, piezoelectricity fold stack driver 9, pressure
The pre-loading screw of electric fold stack driver, flexural piezoelectric actuator 5, tension detection mechanism and the collet for being installed on tension detection mechanism end
8；The deformation of piezoelectricity fold stack driver 9 is converted to the displacement of collet 8 and to the defeated of micro clamping device by single-degree-of-freedom micro-grabbe
Go out and carry out clamper holding, single-degree-of-freedom micro-grabbe 3 includes rack 31, composite bridge mechanism, lever mechanism 36, double rocking lever machine
Structure and clamping mechanism；There are three columns, composite bridge mechanism to be fixed on middle standing pillar for setting in rack 31, piezoelectric stack driving
Between device 9 is located at, the driving force of the deformation of piezoelectricity fold stack driver as composite bridge mechanism；Composite bridge mechanism is included in piezoelectricity
The symmetrically arranged a pair of support arms 33 in 9 both sides of fold stack driver, two pair first is oriented to amplification bar 321 and 322, two pair of second guiding
Amplify bar 341 and 342 and output rod 351；Support arm 33 and first is oriented to amplification bar 321 and 322, second and is oriented to amplification bar 341
With 342 between it is hinged, first is oriented to the fixing end on amplification bar 321 and the middle standing pillar in rack 31 is hinged, output rod 351 1
End is oriented to amplification bar 341 and 342 with second and is hinged, and the other end is hinged with connecting rod 352；Lever mechanism 36 includes driving lever, branch
Support hinge E and follower lever, driving lever one end are hinged with 31 extended segment of rack, and the other end is hinged with connecting rod 352, follower lever one
End is hinged with rack 31, and the other end is hinged with double rocker mechanism；Double rocker mechanism includes rocking bar 37 and side link 39, rocking bar 37 1
End is hinged with rack 31, and the other end is hinged with side link 39, the follower lever of side link 39 and lever mechanism 36, rocking bar 37 and power inspection
It is hinged to survey mechanism；Clamping mechanism includes rack 391 and thrust pawl 382, and thrust pawl 382 is connected by flexible armed lever 381 and rack 31
It connects, rack 391 is in the output end of the side link 39 of double rocker mechanism；Tension detection mechanism is hinged with side link 39.Second is oriented to
Position detection foil gauge 4, position detection foil gauge 4 are posted on hinge B3 and B4 between amplification bar 341 and 342 and support arm 33
Output voltage U1=ky, y are the displacement of collet 8, and k is proportionality coefficient；Tension detection mechanism is equipped with chucking power and detects foil gauge
6, chucking power detects the output voltage U of foil gauge 62=KF, F are the chucking power on collet 8, and K is proportionality coefficient.
The utility model is obtaining proportionality coefficient k before use, needing first to calibrate.Specific practice is：First electricity consumption is held or is swashed
Optical displacement sensor detects the displacement y of current collet 80, obtain the output voltage U of position detection foil gauge 4 at this time1, you can
It obtainsObtaining the way of Proportional coefficient K is：The chucking power F of current collet 8 is first detected with force snesor0, obtain this
When chucking power detection foil gauge 6 output voltage U2, you can it obtains
As shown in Fig. 2, rack 31, composite bridge mechanism, lever mechanism 36, double rocker mechanism, clamping mechanism and power detection
Mechanism is obtained through wire cutting, and rack 31, first is oriented to amplification bar 321, support arm 33, second is oriented to amplification bar 342, connecting rod
352 and between the driving lever of lever mechanism 36 be the first cutting gap 301, rack 31, first be oriented to amplification bar 321 and support
It is the second cutting gap between arm 33, the second cutting gap is not closed, vertical among the first guiding amplification bar 321 and 322, rack 31
It is third cutting gap 303 between column and support arm 33, the first guiding amplification bar 322, support arm 33, output rod 351, second are led
It is the 4th cutting gap 304, the 4th cutting gap 304 and piezoelectricity fold stack driver 9 to amplifying between bar 341 and 31 column of rack
Clearance fit, it is the 5th cutting gap 305 that two second, which are oriented between amplification bar 341 and 342, output rod 351 and support arm 33,
The output rod 351, second of composite bridge mechanism is oriented between amplification bar 342, connecting rod 352 and the follower lever of lever mechanism 36
6th cutting gap 306, the 6th cutting gap 306 are not closed, and rack 31,36 follower lever of lever mechanism and double rocker mechanism shake
It is the 7th cutting gap 307 between bar 37, is between rack 31, the rocking bar 37 of double rocker mechanism, side link 39 and clamping mechanism
8th cutting gap 308, tension detection mechanism centre are the 9th cutting gap 309；First is oriented to amplification bar 321,322 and rack 31
Between hinge A1 and A2, first be oriented to amplification bar 321,322 and support arm 33 between hinge B1 and B2, output rod 351 and
Second is oriented to the hinge A3 and A4 of amplification bar 341 and 342 inner ends, the hinge C of output rod 351 and connecting rod 352, connecting rod 352
With rocking bar 37 and rack in the hinge D of the driving lever of lever mechanism 36, the hinge E of driving lever and rack 31, translation enlarger
31 hinge F, the rocking bar 37 and hinge G of side link 39, the hinge 39 of side link 39 and follower lever, side link 39 and power detection machine
The hinge I of structure is two incision directly round flexible hinge, and the first of composite bridge mechanism is oriented to the outer end of amplification bar 341 and 342
Hinge B3 and B4 with support arm 33 are blade profile flexible hinge.
First, which is oriented to amplification bar 321, is more than with the 322, second guiding amplification bar 341 with 342 projection sizes in the horizontal direction
In the projection size of vertical direction.
Position detection foil gauge 4 is bonded and fixed between the first guiding amplification bar 341 and 342 inner ends and output rod 351
On blade profile flexible hinge B3 and B4.
Rack 31 is in the degree of lip-rounding of unilateral incision.
As shown in Fig. 2, lever mechanism 36 is Z-shape, from lever mechanism 36 and the hinge D of connecting rod 352 to lever mechanism 36
Straight line with the supporting hinges E of rack 31 is as driving lever, with the hinge G's of supporting hinges E to lever mechanism and side link 39
Straight line is more than active pole length as follower lever, the length of follower lever.
Side link 39 is L-shaped, the lever mechanism 36 and hinge G of side link 39, the hinge H of rocking bar 37 and side link 39 and company
Point-blank, the air line distance of hinge G to hinge H is less than hinge H to hinge I to the hinge I of hack lever 39 and tension detection mechanism
Air line distance.Tension detection mechanism is in rectangular-ambulatory-plane, and chucking power detection foil gauge 6 is bonded and fixed to the 9th cutting in tension detection mechanism
On gap 309.
Position detection foil gauge 4 and chucking power detection foil gauge 6 separately constitute bridgt circuit, and are put by strain amplifier
It after big, is transferred on industrial personal computer by multi-channel data card by A/D mouthfuls, industrial personal computer calculates the displacement for obtaining collet 8 and chucking power.
Rack 31 is connected by connecting plate 2 with pedestal 1, and connecting plate is L-shaped, and pedestal is fixed on macro-moving stage, macro dynamic flat
Platform is moved with millimeter/Centimeter Level.
It is connected firmly by gluing or welding on the outside of collet 8 and tension detection mechanism, collet 8 has to be contacted with tension detection mechanism
The clamping face 82 of mounting portion 81 and clamping microoperation object 7, as shown in Figure 7.
When the utility model is used, macro-moving stage is first made to be moved to the initial position of microoperation object 7, then it is curved to piezoelectricity
Bent actuator 5 drives the flexible armed lever of clamping mechanism by the amplified voltage of power amplifier, the elongation of flexural piezoelectric actuator 5
381 are counterclockwise bent, to drive thrust pawl 382 to deflect；Power amplifier is applied through to piezoelectricity fold stack driver 9 to put
Voltage after big, piezoelectricity fold stack driver 9 extend, and piezoelectricity fold stack driver 9 pushes out the support arm 33 of composite bridge mechanism,
First guiding amplification bar 321 is oriented to amplification bar 341 with 322 and second and is transported vertically down with 342 drive output rods 351
It is dynamic, to drive 36 driving lever counterclockwise movement of lever mechanism by connecting rod 352, and then drive 36 follower lever of lever mechanism inverse
When needle movement, it is final that side link 39 is driven to move out in the horizontal direction, drive collet 8 " clamping " object to be operated 7；Meanwhile
Flexural piezoelectric actuator 6 is powered off, clamping mechanism power-off and thrust pawl and 391 CONTACT WITH FRICTION of rack, then to piezoelectricity
The power-off of actuator 9 is stacked, " holding " to 7 current pose of the object to be operated is realized by position-limit mechanism；Macro-moving stage moves again,
It drives micro clamping device to move to target location, the amplified voltage of power amplifier, pressure is passed through to flexural piezoelectric actuator 5 again
The elongation of electric bend actuator 5 drives the flexible armed lever 381 of clamping mechanism to be counterclockwise bent, to drive thrust pawl 382 inclined
Turn, composite bridge enlarger, lever mechanism 36 and double rocker mechanism reset, and band carry-over bar 391 returns to initial position, realizes
" release " operation to the object to be operated 7.
It follows that composite bridge enlarger inputs guiding mechanism as first order enlarger and translation, when first
The left side bar 342 for doing side lever 322 and the guiding amplification bar of right-hand rod 321, second for amplifying bar and right-hand rod 341 are oriented in transverse direction
Projection size is more than in longitudinal projection size, the deformation quantity progress first time amplification to piezoelectricity fold stack driver 9, and two layers
The compound of bridge type mechanism ensure that the translation of input displacement；Lever mechanism 36 is used as second level enlarger, works as lever mechanism
When 36 follower lever size is more than the size of driving lever, second level amplification is carried out to the deformation quantity of piezoelectricity fold stack driver 9；It is double to shake
Linkage amplifies as the third level and guiding mechanism, when the size of 39 extended segment of side link is more than the ruler that side link is free of extended segment
When very little, third time amplification, the hinge of lever mechanism 36 follower lever and side link 39 are carried out to the deformation quantity of piezoelectricity fold stack driver 9
G, the hinge I of the hinge H and side link 39 of rocking bar 37 and side link 39 and tension detection mechanism point-blank, then ensure that micro-
The pure translational of clamper exports.
Position detection foil gauge 6 and chucking power detection foil gauge 5 separately constitute bridgt circuit, and are put by strain amplifier
After big, it is transferred on industrial personal computer by PCI board card by A/D mouthfuls, industrial personal computer calculates the displacement for obtaining collet 4 and chucking power, to
Realize the detection to micro-clamp position and chucking power, as shown in Figure 6.
The utility model has the advantage of：
1. carrying out three to the output displacement of piezoelectricity fold stack driver by composite bridge mechanism, lever mechanism and four-bar mechanism
Grade amplification and guiding, ensure that the pure translational input and output of micro clamping device, and make micro clamping device with big clamping range.
2. enlarger uses flexible hinge, and formed by linear cutter, have it is small, without mechanical friction, lead
The advantages of high, machining accuracy is easy to ensure to precision.
3. position and chucking power detection are integrated with, convenient for carrying out microoperation to small fragile part or cell etc..
4. three clamping limbs respectively drive, micro clamping device has more degree of freedom, is more easy to carry out Complex Assembly task
Operation.Micro clamping device output end has clamping mechanism so that micro clamping device is not required to apply voltage to piezoelectric stack actuator
Realize that " holding " to the object to be operated operates, micro clamping device control is more convenient, and avoids control voltage fluctuation and cause
The object to be operated damage.
5. it is light-weight, easy to operate, it is suitable for micro-manipulating robot system and MEMS.
Content described in this specification embodiment is only enumerating for the way of realization conceived to utility model, this practicality
Novel protection domain is not construed as being only limitted to the concrete form that embodiment is stated, the scope of protection of the utility model
And in those skilled in the art according to the utility model design it is conceivable that equivalent technologies mean.
Claims (10)
1. three freedom meek piezoelectricity micro clamping device has pedestal, it is characterised in that：There is at least three single-degree-of-freedoms folder on pedestal
Unit is held, single-degree-of-freedom clamping unit is angularly uniformly distributed, and each single-degree-of-freedom clamping unit is fixed by respective connecting plate
In pedestal；
Each single-degree-of-freedom clamping unit includes the three-level enlarger in rack and rack, and three-level enlarger is sequentially connected in series,
First order enlarger connects piezoelectricity fold stack driver, fixed chuck on the output of third level enlarger.
2. three freedom meek piezoelectricity micro clamping device as described in claim 1, it is characterised in that：First order enlarger is multiple
Bridge type mechanism is closed, composite bridge mechanism includes that longitudinally disposed a pair of support arm and at least one set first being laterally arranged are oriented to
Amplify bar assembly and is oriented to amplification bar assembly at least one set second；Piezoelectricity fold stack driver, piezoelectric stack are set between support arm
Driver is in transversal stretching deformation；
First, which is oriented to amplification bar assembly and second, is oriented to amplification bar assembly respectively by respective left side bar, intermediate bar and right-hand rod group
At；It is hinged with intermediate bar that left side bar and right-hand rod distinguish one end；The other end is hinged with support arm；Intermediate bar drives far from piezoelectric stack
Dynamic device makes left side bar and right-hand rod tilt, and intermediate bar is parallel with piezoelectricity fold stack driver；First is oriented to the centre of amplification bar assembly
Bar is fixed with rack, and second is oriented to output of the intermediate bar of amplification bar assembly as first order enlarger.
3. three freedom meek piezoelectricity micro clamping device as claimed in claim 2, it is characterised in that：Second is oriented to amplifier module
Position detection foil gauge is set respectively on the hinge of left side bar and intermediate bar, on the hinge of right-hand rod and intermediate bar.
4. three freedom meek piezoelectricity micro clamping device as claimed in claim 3, it is characterised in that：Left side bar, intermediate bar and the right side
Side lever three's equidimension, left side bar and right-hand rod are symmetrical, left side bar, and the total length of intermediate bar and right-hand rod is more than two support arms
The distance between.
5. three freedom meek piezoelectricity micro clamping device as claimed in claim 4, it is characterised in that：First is oriented to amplification bar assembly
There are two groups, and two group of first guiding amplification bar assembly is parallel；Second, which is oriented to amplification bar assembly, two groups, and two group of second guiding is put
Big bar assembly is parallel；Two group of first intermediate bar for being oriented to amplification bar assembly is connected and is fixed with rack, and two group second is oriented to amplification
Output after the intermediate bar of bar assembly is connected as first order enlarger.
6. three freedom meek piezoelectricity micro clamping device as claimed in claim 5, it is characterised in that：Second level enlarger is thick stick
Linkage, lever mechanism are made of active bar portion and driven bar portion, and fulcrum, fulcrum and machine is arranged in driving lever and follower lever intersection
Frame is fixed；The length of driving lever is less than the length of follower lever, output of the follower lever as second level enlarger；Driving lever is logical
It crosses connecting rod to connect with the output of first order enlarger, connecting rod one end is hinged with driving lever, and the other end is put with the first order
The output of great institutions is hinged.
7. three freedom meek piezoelectricity micro clamping device as claimed in claim 6, it is characterised in that：Third level enlarger is double
Rocker device, the drive crank of the follower lever of lever mechanism as double rocker mechanism, the side link of double rocker mechanism is as third
The output rod of grade enlarger, collet are set to the free end of side link.
8. the three freedom meek piezoelectricity micro clamping device as described in one of claim 1-7, it is characterised in that：The freedom of side link
End is equipped with a tooth-arranging strip；Rack is equipped with flexible armed lever and thrust pawl, flexible armed lever one end are fixed on the rack, and the other end is certainly
By holding, thrust pawl is fixed on free end, has flexural piezoelectric actuator, flexural piezoelectric actuator that thrust pawl is made to be on flexible armed lever
When first position, thrust pawl is far from rack；When flexural piezoelectric actuator makes thrust pawl be in the second position, thrust pawl is inserted into rack
It is interior；Rack, flexible armed lever, thrust pawl and flexural piezoelectric actuator form clamping mechanism.
9. three freedom meek piezoelectricity micro clamping device as claimed in claim 8, it is characterised in that：It is set between side link and collet
There is chucking power to detect foil gauge, chucking power detection foil gauge one end is fixed with collet, and the other end is hinged with side link.
10. three freedom meek piezoelectricity micro clamping device as claimed in claim 9, it is characterised in that：Rack, composite bridge machine
Structure, lever mechanism, translation link mechanism, clamping mechanism and tension detection mechanism are obtained through wire cutting；Rack, first are oriented to amplification bar
It is the first cutting gap between component, vertical supporting rod, the second guiding amplification bar assembly, connecting rod and the driving lever of lever mechanism,
Rack, the first guiding amplification bar assembly and the second cutting gap, the second cutting gap are not closed, and first is oriented to amplification bar assembly
It is third cutting gap between left side bar, right-hand rod, intermediate bar and support arm, third cutting gap has a pair；First guiding is put
Big bar assembly, support arm, output rod, second are oriented to for the 4th cutting gap between amplification bar assembly and framework pillar, and the 4th cuts
Cut region and piezoelectricity fold stack driver clearance fit, it is that two second, which are oriented between amplification bar assembly, output rod and support arms,
Five cutting gaps, the output rod of composite bridge mechanism, second are oriented between amplification bar assembly, connecting rod and the follower lever of lever mechanism
It is the 7th cutting gap, machine between rack, lever mechanism follower lever and the rocking bar of link mechanism that is translatable for the 6th cutting gap
Frame, to be translatable between the rocking bar of link mechanism, side link and clamping mechanism be the 8th cutting gap, is the among tension detection mechanism
Nine cutting gaps；First is oriented between the hinge between amplification bar assembly and rack, the first guiding amplification bar assembly and support arm
Hinge, output rod and second be oriented to the hinge of amplification bar assembly inner end, output rod and connecting rod hinge, connecting rod and lever mechanism
The hinge of driving lever, the hinge of driving lever and rack, the rocking bar and hinge of rack, rocking bar and side link in translation enlarger
Hinge, the hinge of side link and follower lever, side link and tension detection mechanism hinge be two incision directly round flexible hinge,
It is blade profile flexible hinge that the first of composite bridge mechanism, which is oriented to the outer end of amplification bar assembly and the hinge of support arm,.
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| CN108000486A (en) * | 2017-08-03 | 2018-05-08 | 宁波大学 | Three freedom meek piezoelectricity micro clamping device |
| CN109834694A (en) * | 2019-04-01 | 2019-06-04 | 江南大学 | Space micro clamping device with multistage amplification and guiding mechanism |
| CN110977821A (en) * | 2019-12-13 | 2020-04-10 | 宁波大学 | Multi-degree-of-freedom compliant micro gripper integrating multi-variable detection |
| CN113188701A (en) * | 2021-06-30 | 2021-07-30 | 江西农业大学 | Clamping force detection mechanism based on space micro-gripper and use method thereof |
| CN114986213A (en) * | 2022-06-20 | 2022-09-02 | 南京航空航天大学 | Flexible supporting device for thin-walled workpiece machining and self-adaptive supporting method |
| CN117944086A (en) * | 2024-03-26 | 2024-04-30 | 华东交通大学 | Piezoelectric driving flexible clamping mechanism with adjustable maximum jaw |
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| CN108000486A (en) * | 2017-08-03 | 2018-05-08 | 宁波大学 | Three freedom meek piezoelectricity micro clamping device |
| CN108000486B (en) * | 2017-08-03 | 2024-03-08 | 宁波大学 | Three-degree-of-freedom compliant piezoelectric micro gripper |
| CN109834694A (en) * | 2019-04-01 | 2019-06-04 | 江南大学 | Space micro clamping device with multistage amplification and guiding mechanism |
| CN110977821A (en) * | 2019-12-13 | 2020-04-10 | 宁波大学 | Multi-degree-of-freedom compliant micro gripper integrating multi-variable detection |
| CN110977821B (en) * | 2019-12-13 | 2021-07-06 | 宁波大学 | Multi-degree-of-freedom compliant micro gripper integrating multi-variable detection |
| CN113188701A (en) * | 2021-06-30 | 2021-07-30 | 江西农业大学 | Clamping force detection mechanism based on space micro-gripper and use method thereof |
| CN113188701B (en) * | 2021-06-30 | 2021-09-21 | 江西农业大学 | Clamping force detection mechanism based on space micro-gripper and use method thereof |
| CN114986213A (en) * | 2022-06-20 | 2022-09-02 | 南京航空航天大学 | Flexible supporting device for thin-walled workpiece machining and self-adaptive supporting method |
| CN114986213B (en) * | 2022-06-20 | 2023-03-24 | 南京航空航天大学 | Flexible supporting device for thin-walled workpiece machining and self-adaptive supporting method |
| CN117944086A (en) * | 2024-03-26 | 2024-04-30 | 华东交通大学 | Piezoelectric driving flexible clamping mechanism with adjustable maximum jaw |
| CN117944086B (en) * | 2024-03-26 | 2024-05-28 | 华东交通大学 | Piezoelectric driving flexible clamping mechanism with adjustable maximum jaw |
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