CN105236349A - Piezoelectric-driven high-precision lead clamp - Google Patents
Piezoelectric-driven high-precision lead clamp Download PDFInfo
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- CN105236349A CN105236349A CN201510683859.1A CN201510683859A CN105236349A CN 105236349 A CN105236349 A CN 105236349A CN 201510683859 A CN201510683859 A CN 201510683859A CN 105236349 A CN105236349 A CN 105236349A
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Abstract
The invention discloses a piezoelectric-driven high-precision lead clamp. The lead clamp is integrally molded by wire cutting of a plate. The lead clamp comprises a bridge type displacement amplification mechanism and a substrate, wherein the substrate is formed on both sides of a movable end of the bridge type displacement amplification mechanism; the bridge type displacement amplification mechanism is provided with a fixed cross beam and a movable cross beam being parallel to the substrate, and two four-bar mechanisms for connecting the fixed cross beam and the movable cross beam; a flexible parallel double-plate mechanism which is connected with the substrate is formed at each of the two ends of the movable cross beam; a piezoelectric ceramic driver is arranged between the fixed cross beam and the movable cross beam; two parallelogram mechanisms are formed on one side of the substrate; connection beams which are vertical to the parallelogram mechanisms are formed at output ends of the parallelogram mechanisms; a jaw is formed on the connection beams; and an output end of the bridge type displacement amplification mechanism is connected with input ends of the parallelogram mechanisms through flexible hinges III. The piezoelectric-driven high-precision lead clamp has the advantages of small size, compact structure, stable and reliable clamping force, low manufacturing cost, and large displacement amplification factor.
Description
Technical field
The invention belongs to micro-device packaging field, particularly relate to a kind of driving type piezoelectric actuator high accuracy lead-in wire wire clamp.
Background technology
In recent years, flourish along with microelectronic industry, the development of microelectronic industry has become the important symbol of a measurement national comprehensive strength, becomes the important leverage promoting national sustained economic development and national strategy basic industry safety.Along with the sustainable development of microelectronic industry, its relevant industries device is constantly towards microminiaturized, high-performance and high integration future development, and the quality requirement for encapsulating products is more and more stricter, therefore has higher requirement to the quality of micro-device packaging and efficiency.
So-called micro-device packaging is the micro element one with certain function, is placed in a device adapted with it, to ensure that micro element can steady operation by series of process.As the key components of micro-device packaging equipment, lead-in wire wire clamp completes controlled fast opening and closed action in encapsulation process, control lead-in wire and complete high-speed, high precision motion, realize the conveying of lead-in wire and block, its performance quality directly affects package quality, and then affects the performance and used life of micro element.
Traditional lead-in wire wire clamp mainly adopts the type of drive such as magnetic valve, voice coil motor, linear electric motors, these type of drive choose the compactedness affecting wire clamp frame for movement, wire clamp folding instability, clamping force may be caused non-constant, limit the raising of wire clamp kinematic accuracy and package quality.In addition, magnetostrictor is also used as the driver of wire clamp, but such wire clamp drives and control system is more complicated.Existing lead-in wire wire clamp adopts pivotally connected two clamping limbs mostly, is realized the open and close movement of wire clamp by the rotary motion of clamping limb, thus jaw can be caused to realize parallel motion, easily causes lead-in wire to loosen, cannot realize stable holding.Because wire clamp folding is frequent, therefore require that the connection pivot between clamping limb has very high-wearing feature.In order to realize the folding of wire clamp high-speed, high precision, pivot size and wire clamp total quality must be reduced as much as possible.The connection pivot of current great majority lead-in wire wire clamp adopts ruby material, thus causes the manufacturing cost of wire clamp too high.Existing lead-in wire wire clamp can realize accurate position control mostly, but mainly adopts indirectly mode for the control of clamping force, namely adopts the mode such as preloading spring or power demarcation to realize.These modes can, by the impact of inertia force, be difficult to accurately ensure that stablizing of clamping force is controlled in motion process, and power calibration process more complicated.
Summary of the invention
The present invention provides a kind of driving type piezoelectric actuator high accuracy to go between wire clamp for solving in known technology the technical problem that exists, and this wire clamp volume is little, compact conformation, clamping force are reliable and stable, low cost of manufacture, and kinematic accuracy is high.
The technical scheme that the present invention takes for the technical problem existed in solution known technology is: a kind of driving type piezoelectric actuator high accuracy lead-in wire wire clamp, this wire clamp adopts sheet material Linear cut integrated, comprise bridge type displacement amplifying mechanism and matrix, described bridge type displacement amplifying mechanism and described matrix are all arranged symmetrically with about wire clamp center line, and described matrix is formed at the movable end both sides of described bridge type displacement amplifying mechanism; Described bridge type displacement amplifying mechanism is provided with two quadric chains of the described fixed cross beam of the fixed cross beam parallel with described matrix, movable beam and connection and described movable beam, described quadric chain adopts flexible hinge I to be connected to form, and is respectively provided with the output of a described bridge type displacement amplifying mechanism in the outside of two described quadric chains; The two ends of described movable beam are respectively formed with a flexible parallel double trigger structure be connected with described matrix; Piezoelectric ceramic actuator is provided with between described fixed cross beam and described movable beam, the longitudinal centre line of described piezoelectric ceramic actuator overlaps with the center line of this wire clamp, described piezoelectric ceramic actuator is provided with pretension bolt, and described pretension bolt is connected in described movable beam; Be formed with two parallel-crank mechanisms be arranged symmetrically with about wire clamp center line in the side of described matrix, two described parallel-crank mechanisms lay respectively at the both sides of described bridge type displacement amplifying mechanism; Described parallel-crank mechanism is provided with output and input, the output of described parallel-crank mechanism is arranged on its end away from described matrix, the input of described parallel-crank mechanism sets within it the position of side near described matrix, described parallel-crank mechanism adopts flexible hinge II to be connected to form, the output of described parallel-crank mechanism is formed with perpendicular tie-beam, the end of described tie-beam away from described matrix is formed with jaw; The output of described bridge type displacement amplifying mechanism is connected by flexible hinge III with the input of the described parallel-crank mechanism be positioned at outside it.
Described tie-beam is flexible beam, and described flexible beam is pasted with metal strain plate.
Transition arc structure is all formed inside the two ends of described flexible beam.
The advantage that the present invention has and good effect are: adopt piezoelectric ceramic actuator as the drive source of lead-in wire wire clamp, can obviously reduce wire clamp total quality and movement inertia.Piezoelectric ceramic actuator has that volume is little, rigidity is high, fast response time, displacement resolution high in addition, utilizes piezoelectric ceramic actuator to drive the quadric chain folding being positioned at its both sides, effectively can improve the Static and dynamic performance of wire clamp.Piezoelectric ceramic actuator is arranged on wire clamp inside, cable clamp structure is compact.Adopt parallel-crank mechanism to achieve the parallel motion of jaw, can avoid, because clamping component causes lead-in wire to loosen, effectively can improving clamping stability and the precision of wire clamp.By being arranged symmetrically with two flexible parallel double trigger structures at movable beam two ends, ensure that bridge type amplifier movable beam is along wire clamp center line movement, thus ensure that wire clamp is in the anxious kinematic accuracy opening emergency stop lower jaw.In addition adopt bridge type displacement amplifying mechanism and parallel-crank mechanism two-stage enlarger, make wire clamp have larger opening and closing amount, the stable holding to different-diameter lead-in wire can be realized.Adopt metal strain plate as the feedback element of wire clamp chucking power, measurement and the Real-time Feedback of chucking power can be realized, thus improve in encapsulation process the stability of the wire clamp work that goes between.Adopt integrated formed structure, do not need precious materials, cost of manufacture is low.In sum, volume of the present invention is little, compact conformation, clamping force are reliable and stable, low cost of manufacture, has larger displacement equations multiple, can realize chucking power and measure and feedback, can be applicable to wire bond package equipment.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is partial schematic diagram of the present invention, comprises matrix and bridge type displacement amplifying mechanism;
Fig. 3 is partial schematic diagram of the present invention, comprises matrix, parallel-crank mechanism, tie-beam and jaw;
Fig. 4 is the fundamental diagram of parallel-crank mechanism of the present invention;
Fig. 5 is the fundamental diagram of bridge type displacement amplifying mechanism of the present invention.
In figure: 1, matrix, 2, parallel-crank mechanism, the input of 2-1, flexible hinge II, 2-2, parallel-crank mechanism, the output of 2-3, parallel-crank mechanism, 3, flexible hinge III, 4, bridge type displacement amplifying mechanism, 4-1, quadric chain; The output of 4-2, flexible hinge I, 4-3, bridge type displacement amplifying mechanism, 4-4, fixed cross beam, 4-5, movable beam; 5, piezoelectric ceramic actuator, 6, tie-beam, 7, jaw, 8, metal strain plate, 9, pretension bolt, 10, flexible parallel double trigger structure.
Detailed description of the invention
For summary of the invention of the present invention, Characteristic can be understood further, hereby exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
Refer to Fig. 1 ~ Fig. 5, a kind of driving type piezoelectric actuator high accuracy lead-in wire wire clamp, this wire clamp adopts sheet material Linear cut integrated, comprise bridge type displacement amplifying mechanism 4 and matrix 1, described bridge type displacement amplifying mechanism 4 and described matrix 1 are all arranged symmetrically with about wire clamp center line, and described matrix 1 is formed at the movable end both sides of described bridge type displacement amplifying mechanism 4.
Described bridge type displacement amplifying mechanism 4 is provided with fixed cross beam 4-4, the movable beam 4-5 parallel with described matrix 1 and connects two quadric chain 4-1 of described fixed cross beam 4-4 and described movable beam 4-5, described quadric chain 4-1 adopts flexible hinge I 4-2 to be connected to form, and is respectively provided with the output 4-3 of a described bridge type displacement amplifying mechanism in the outside of two described quadric chain 4-1; The two ends of described movable beam 4-5 are respectively formed with a flexible parallel double trigger structure 10 be connected with described matrix 1; Piezoelectric ceramic actuator 5 is provided with between described fixed cross beam 4-4 and described movable beam 4-5, the described longitudinal centre line of piezoelectric ceramic actuator 5 overlaps with the center line of this wire clamp, described piezoelectric ceramic actuator 5 is provided with pretension bolt 9, and described pretension bolt 9 is connected on described movable beam 4-5.
The both sides that two parallel-crank mechanisms, 2, two the described parallel-crank mechanisms 2 be arranged symmetrically with about wire clamp center line lay respectively at described bridge type displacement amplifying mechanism 4 are formed in the side of described matrix 1.
Described parallel-crank mechanism 2 is provided with output and input, the output 2-3 of described parallel-crank mechanism is arranged on its end away from described matrix 1, the input 2-2 of described parallel-crank mechanism sets within it the position of side near described matrix 1, described parallel-crank mechanism 2 adopts flexible hinge II 2-1 to be connected to form, the output 2-3 of described parallel-crank mechanism is formed with perpendicular tie-beam 6, the end of described tie-beam 6 away from described matrix 1 is formed with jaw 7.
The output 4-3 of described bridge type displacement amplifying mechanism is connected by flexible hinge III 3 with the input 2-2 of the described parallel-crank mechanism be positioned at outside it.
The present invention adopts symmetrical structure, can realize heat error compensation, reduces to be heated the error that inequality causes due to lead-in wire wire clamp.In order to ensure the machining accuracy of lead-in wire wire clamp, described matrix 1, bridge type displacement amplifying mechanism 4, parallel-crank mechanism 2, flexible hinge III 3, tie-beam 6, flexible parallel double trigger structure 10 and jaw 7 adopt integrated formed structure.Described parallel-crank mechanism 2 is connected to form by four flexible hinge II 2-1 being rectangle arrangement.
The present invention, by forming the flexible parallel double trigger structure 10 be connected with matrix 1 at the two ends of movable beam 4-5, ensures that movable beam 4-5 is along the translation of wire clamp center line, thus ensures that wire clamp is in the anxious kinematic accuracy opening emergency stop lower jaw.
In the present embodiment, described tie-beam 6 is flexible beam, and described flexible beam is pasted with metal strain plate 8.When jaw 7 clamps lead-in wire, flexible beam can produce plastic deformation, can be realized measurement and the feedback of chucking power by the output quantity measuring metal strain plate 8, and then by controlling the input signal of piezoelectric ceramic actuator 5, can realize the control to chucking power.All transition arc structure is formed with, in order to eliminate the stress concentration phenomenon that flexible beam produces in distortion inside the two ends of described flexible beam.
Operation principle of the present invention:
Refer to Fig. 1 ~ Fig. 5, matrix 1 and fixed cross beam 4-4 in use, are fixed on body by the present invention.When applying driving voltage at the two ends of piezoelectric ceramic actuator 5, piezoelectric ceramic actuator 5 will extend, drive the movable beam 4-5 in bridge type displacement amplifying mechanism 4, movable beam 4-5 under the constraint of flexible parallel double trigger structure 10 along the downward translation of wire clamp center line, the output 4-3 translation to the inside of quadric chain, the output displacement of piezoelectric ceramic actuator 5 amplifies by bridge type displacement amplifying mechanism 4, pull flexible hinge III 3, parallel-crank mechanism 2 is driven to move, parallel-crank mechanism 2 is moved by flexible beam band movable clamp port 7, realize jaw 7 closed to clamp lead-in wire.When after the driving voltage removing piezoelectric ceramic actuator 5 two ends, piezoelectric ceramic actuator 5 will return to former length, and lead-in wire wire clamp gets back to original position under the effect of flexible hinge elastic force, and jaw 7 opens thus discharges lead-in wire.By the pretightning force regulating pretension bolt 9 can change piezoelectric ceramic actuator 5, the spacing of two jaws 7 can be regulated, with the needs of satisfied clamping different size lead-in wire.Jaw 7 is connected with parallel-crank mechanism 2 by flexible beam, and when jaw 7 clamps lead-in wire, flexible beam can produce plastic deformation, can realize chucking power measure and feedback by the output quantity measuring metal strain plate 8.Described parallel-crank mechanism 2 also plays the effect of leverage in wire clamp, has displacement equations function.
Although be described the preferred embodiments of the present invention by reference to the accompanying drawings above; but the present invention is not limited to above-mentioned detailed description of the invention; above-mentioned detailed description of the invention is only schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present invention; do not departing under the ambit that present inventive concept and claim protect, can also make a lot of form, these all belong within protection scope of the present invention.
Claims (3)
1. a driving type piezoelectric actuator high accuracy lead-in wire wire clamp, it is characterized in that, this wire clamp adopts sheet material Linear cut integrated, comprise bridge type displacement amplifying mechanism and matrix, described bridge type displacement amplifying mechanism and described matrix are all arranged symmetrically with about wire clamp center line, and described matrix is formed at the movable end both sides of described bridge type displacement amplifying mechanism;
Described bridge type displacement amplifying mechanism is provided with two quadric chains of the described fixed cross beam of the fixed cross beam parallel with described matrix, movable beam and connection and described movable beam, described quadric chain adopts flexible hinge I to be connected to form, and is respectively provided with the output of a described bridge type displacement amplifying mechanism in the outside of two described quadric chains; The two ends of described movable beam are respectively formed with a flexible parallel double trigger structure be connected with described matrix; Piezoelectric ceramic actuator is provided with between described fixed cross beam and described movable beam, the longitudinal centre line of described piezoelectric ceramic actuator overlaps with the center line of this wire clamp, described piezoelectric ceramic actuator is provided with pretension bolt, and described pretension bolt is connected in described movable beam;
Be formed with two parallel-crank mechanisms be arranged symmetrically with about wire clamp center line in the side of described matrix, two described parallel-crank mechanisms lay respectively at the both sides of described bridge type displacement amplifying mechanism;
Described parallel-crank mechanism is provided with output and input, the output of described parallel-crank mechanism is arranged on its end away from described matrix, the input of described parallel-crank mechanism sets within it the position of side near described matrix, described parallel-crank mechanism adopts flexible hinge II to be connected to form, the output of described parallel-crank mechanism is formed with perpendicular tie-beam, the end of described tie-beam away from described matrix is formed with jaw;
The output of described bridge type displacement amplifying mechanism is connected by flexible hinge III with the input of the described parallel-crank mechanism be positioned at outside it.
2. driving type piezoelectric actuator high accuracy lead-in wire wire clamp according to claim 1, it is characterized in that, described tie-beam is flexible beam, and described flexible beam is pasted with metal strain plate.
3. driving type piezoelectric actuator high accuracy lead-in wire wire clamp according to claim 2, is characterized in that, be all formed with transition arc structure inside the two ends of described flexible beam.
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| CN201510683859.1A CN105236349B (en) | 2015-10-20 | 2015-10-20 | Driving type piezoelectric actuator high accuracy lead wire clamp |
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| CN201510683859.1A CN105236349B (en) | 2015-10-20 | 2015-10-20 | Driving type piezoelectric actuator high accuracy lead wire clamp |
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| CN105236349B CN105236349B (en) | 2017-10-17 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107154747A (en) * | 2017-06-05 | 2017-09-12 | 西安交通大学 | A kind of radial direction piezoelectric actuator based on flexible structure for amplifying |
| CN107457765A (en) * | 2017-08-18 | 2017-12-12 | 天津大学 | A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device |
| CN108068099A (en) * | 2017-12-22 | 2018-05-25 | 上海工程技术大学 | A kind of micro-clamp with two-stage enlarger |
| CN108173453A (en) * | 2018-01-29 | 2018-06-15 | 长春工业大学 | Parallel-connection driving type piezoelectricity stick-slip line motor and its driving method |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN109231152A (en) * | 2018-09-30 | 2019-01-18 | 重庆大学 | The micro-clamp of chucking power and clamping jaw displacement is measured using Fiber-optical Fabry-Perot Interferometric Cavity |
| CN109317778A (en) * | 2018-11-01 | 2019-02-12 | 深圳市德沃先进自动化有限公司 | A kind of high speed wire-clamping device based on bonding equipment |
| CN112659096A (en) * | 2020-12-15 | 2021-04-16 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Dual-drive micro-nano operation device and method with clamping and drawing functions |
| FR3102946A1 (en) * | 2019-11-13 | 2021-05-14 | Percipio Robotics | Device for microactuator and microactuator equipped with such a device |
| CN112953295A (en) * | 2021-02-07 | 2021-06-11 | 天津大学 | Piezoelectric driving type rotary micro-positioning system |
| CN117612982A (en) * | 2024-01-24 | 2024-02-27 | 宁波尚进自动化科技有限公司 | Displacement amplification mechanism and bonding equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107154747A (en) * | 2017-06-05 | 2017-09-12 | 西安交通大学 | A kind of radial direction piezoelectric actuator based on flexible structure for amplifying |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN107457765A (en) * | 2017-08-18 | 2017-12-12 | 天津大学 | A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device |
| CN108068099A (en) * | 2017-12-22 | 2018-05-25 | 上海工程技术大学 | A kind of micro-clamp with two-stage enlarger |
| CN108173453A (en) * | 2018-01-29 | 2018-06-15 | 长春工业大学 | Parallel-connection driving type piezoelectricity stick-slip line motor and its driving method |
| CN109231152A (en) * | 2018-09-30 | 2019-01-18 | 重庆大学 | The micro-clamp of chucking power and clamping jaw displacement is measured using Fiber-optical Fabry-Perot Interferometric Cavity |
| CN109231152B (en) * | 2018-09-30 | 2020-06-16 | 重庆大学 | Micro-clamp for measuring clamping force and clamping jaw displacement by using fiber Fabry-Perot interferometer |
| CN109317778A (en) * | 2018-11-01 | 2019-02-12 | 深圳市德沃先进自动化有限公司 | A kind of high speed wire-clamping device based on bonding equipment |
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| US11878413B2 (en) | 2019-11-13 | 2024-01-23 | Percipio Robotics | Device for a microactuator, and microactuator equipped with such a device |
| CN112659096A (en) * | 2020-12-15 | 2021-04-16 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Dual-drive micro-nano operation device and method with clamping and drawing functions |
| CN112659096B (en) * | 2020-12-15 | 2024-05-07 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Double-drive micro-nano operating device and method with clamping and drawing functions |
| CN112953295A (en) * | 2021-02-07 | 2021-06-11 | 天津大学 | Piezoelectric driving type rotary micro-positioning system |
| CN117612982A (en) * | 2024-01-24 | 2024-02-27 | 宁波尚进自动化科技有限公司 | Displacement amplification mechanism and bonding equipment |
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