CN108555615A - A kind of macro micro- composite motion platform of big stroke five degree of freedom - Google Patents
A kind of macro micro- composite motion platform of big stroke five degree of freedom Download PDFInfo
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- CN108555615A CN108555615A CN201810750900.6A CN201810750900A CN108555615A CN 108555615 A CN108555615 A CN 108555615A CN 201810750900 A CN201810750900 A CN 201810750900A CN 108555615 A CN108555615 A CN 108555615A
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- moving parts
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- moving
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- 239000002131 composite material Substances 0.000 title claims abstract description 23
- 239000000919 ceramic Substances 0.000 claims abstract description 49
- 238000006073 displacement reaction Methods 0.000 claims abstract description 44
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 8
- 230000000694 effects Effects 0.000 abstract description 13
- 238000013461 design Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
- B23Q1/015—Frames, beds, pillars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The application provides a kind of big macro micro- composite motion platform of stroke five degree of freedom, and the moving parts include the first moving parts and the second moving parts for having macro micro- compound motion；The platform bearer part can drive the moving platform to be lifted in Z-direction；Ball connects between the moving platform and the platform bearer part；The both ends of the moving platform and first guide rod, the second guide rod are hinged；First guide rod, the second guide rod and the wedge block displacement platform are hinged；Entire macro/micromotion only needs the driving source coordinated movement of various economic factors of two motors in left and right, four piezoelectric ceramics, it can be achieved that the arbitrary of five degree of freedom combines and its macro micro- switching；Drive component is symmetrically installed with Platform center, and entire platform has good locating effect using Platform center as the symmetrical centre of movement；Using piezoelectric ceramics and high just spring as the kinematic system of micro-move device, there is preferable pretensioning effect, inhibit vibration, make up error.
Description
Technical field
The present invention relates to motion platform technical fields, and in particular to a kind of big macro micro- compound motion of stroke five degree of freedom is flat
Platform.
Background technology
Now, with the development of economic technology, the development in the fields such as accurate digital control processing, IC manufacturing is also increasingly
Soon, technology requires also higher and higher, and the product in people's daily life and the product concerning national economy are functionally increasingly
It is powerful, and then smaller and smaller in volume, for example, in order to meet the diversification of micro-electronic manufacturing industry product, the development of exquisitenessization becomes
Gesture and demand, for developing one kind, multiple degrees of freedom, big stroke, high-precision motion platform just becoming the hot spot of research and development, this
Outside, also there is urgent demand to multivariant precision movement platform in fields such as digital control processing field, bioengineering.
In existing study of platform, design is mostly multiple motor superpositions, and such design often causes serious
The accumulation of error generally requires multiple motor drivings in addition, in existing multivariant Platform Structure Design, complicated,
It takes up a large area；Movement relation, motion control are complicated.
Therefore, how a kind of macro micro- composite motion platform of big stroke five degree of freedom is provided, matter is processed to improve workpiece surface
Amount and processing efficiency are the technical issues of those skilled in the art are badly in need of solving.
Invention content
The present invention provides a kind of big macro micro- composite motion platform of stroke five degree of freedom, can improve workpiece surface processing quality
And processing efficiency.
A kind of macro micro- composite motion platform of big stroke five degree of freedom, which includes pedestal, and the first guide rail, centre is led
Rail, the second guide rail, moving parts, moving platform, platform bearer part, the first guide rod, the second guide rod；
The first guide rail, intermediate rail, the second guide rail are disposed on the pedestal；
The moving parts include the first moving parts and the second moving parts for having macro micro- compound motion；
The first moving parts are set on first guide rail；
The second moving parts are set on second guide rail；
The moving platform is arranged by platform bearer part in the intermediate rail；The platform bearer part can drive described
Moving platform is lifted in Z-direction；Ball connects between the moving platform and the platform bearer part；
It is both provided with wedge block on first moving parts and the second moving parts；
Wedge block displacement platform is provided on the wedge block；
The both ends of the moving platform and first guide rod, the second guide rod are hinged；
First guide rod, the second guide rod and the wedge block displacement platform are hinged.
Preferably, first moving parts include moving parts after moving parts and first before first, before described first
Moving parts are arranged on first guide rail after moving parts and first；Second moving parts include exercise group before second
Moving parts after part and second, moving parts are arranged on second guide rail after moving parts and second before described second；Institute
Before stating first first is correspondingly arranged on moving parts before moving parts, second after moving parts, first after moving parts, second
Wedge block after wedge block, second before wedge block, second after preceding wedge block, first；It is wedge-shaped after wedge block and first before described first
Block is arranged in " V " type, and wedge block is arranged in " V " type after wedge block and second before described second；Wedge after wedge block, first before first
Wedge block position after wedge block displacement platform, first before being correspondingly arranged on first on wedge block after wedge block, second before shape block, second
Wedge block displacement platform after wedge block displacement platform, second before shifting platform, second；The both ends of first guide rod are respectively at first
Wedge block displacement platform is hinged after preceding wedge block displacement platform, first；The both ends of second guide rod are wedge-shaped before second
Wedge block displacement platform is hinged after block displacement platform, second.
Preferably, wedge block displacement is flat before wedge block displacement platform, second after wedge block displacement platform, first before first
The structure of wedge block displacement platform is identical after platform, second；Wedge-shaped platform includes wedge block guide rail, first before first before described first
Front rod cunning group, the first front rail sliding block；Wedge block guide rail is that wedge block is arranged before described first in double guide rails before described first
Inclined-plane on, the first front rod cunning group wedge block guide rail before described first moves on inclined-plane, first front rail
Sliding block is slidably matched with the first front rod cunning group, is cut with scissors between one end of first guide rod and the first front rail sliding block
It connects；Hinged between one end of the moving platform and first guide rod, the hinged form is unlimited, for realizing platform stance
Change.
Preferably, it is connected in a manner of Hooke's hinge between one end of first guide rod and the first front rail sliding block；
It is connected in a manner of Hooke's hinge between one end of the moving platform and first guide rod.
Preferably, moving parts after moving parts and second before moving parts, second after moving parts, first before first
Structure is identical；Movement parts include micromotion part before macro movement parts and first before first before described first.
Preferably, moving parts after moving parts and second before moving parts, second after moving parts, first before first
Structure is identical；Macro movement parts are arranged on first guide rail before described first；One end setting of macro movement parts before described first
Extension before first, cavity before being provided with first on extension before described first, before being provided with first in cavity before described first
High rigid spring before piezoelectric ceramics and first；Micromotion part is arranged on first guide rail before described first；It is micro- before described first
One end of movement parts is provided with the first forward recess, and the first front protrusion is provided in first forward recess, is extended before described first
Part is arranged in first forward recess；High just spring is arranged in institute before piezoelectric ceramics, first before first front protrusion, first
Before stating first in cavity, high just spring is arranged at the both ends of first front protrusion before piezoelectric ceramics, first before described first；By
The high rigid spring before piezoelectric ceramics, first before the first front protrusion both sides place first respectively, when piezoelectric ceramics does not power on before first,
The high just elastic force of spring at this time carries out squeezing action (before holding out against first by piezoelectric ceramics before the first front protrusion pair first before first
Piezoelectric ceramics), piezoelectric ceramics deforms upon before preventing first.Before first piezoelectric ceramics after the power is turned on, piezoelectric ceramics itself before first
It deforms upon and a pressure is applied to the first front protrusion, the rigid elastic force of spring at this time of height before which is more than first, therefore in power
Under the action of, macro/micromotion part is subjected to displacement i.e. micromotion.
Preferably, setting drives the elongation bar group of moving platform lifting on the platform bearer part, under the moving platform
End is equipped with an interface, connects mode by ball between the interface and the elongation bar group and connects.
Preferably, first guide rail, intermediate rail, the structure of the second guide rail are identical；First guide rail includes first
Left rail, the first right guide rail, second guide rail include the second left rail, the second right guide rail.
Preferably, including first straight line motor, second straight line motor, the first straight line motor drive along first guide rail
The dynamic first moving parts movement；The second straight line motor drives second moving parts to move along second guide rail
It is dynamic.
Preferably, the intermediate rail is symmetricly set between first guide rail, the second guide rail.
Preferably, a kind of lathe, the lathe have used any macro micro- compound fortune of big stroke five degree of freedom as above
Moving platform.
It is using the advantageous effect of above-mentioned technical proposal：
The macro micro- composite motion platform of big stroke five degree of freedom of the application belongs to a kind of macro micro- two-stage five degree of freedom of parallel connection
Motion platform, entire macro/micromotion only need two motors in left and right, four piezoelectric ceramics the driving source coordinated movement of various economic factors, it can be achieved that five from
By the arbitrary combination spent and its macro micro- switching；Drive component is symmetrically installed with Platform center, entire platform using Platform center as
The symmetrical centre of movement has good locating effect；Each moving parts are all made of the form of macro micro- common rail, such as before first
Micromotion part moves on the first guide rail before macro movement parts, first, and unilateral driving structure is the design of single motor, total stator
Big stroke motion may be implemented in structure, while having both high speed, high acceleration；Using piezoelectric ceramics and high just spring as micro- drive
Dynamic kinematic system has preferable pretensioning effect, inhibits vibration, makes up error.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of structural schematic diagram of the big macro micro- composite motion platform of stroke five degree of freedom；
Fig. 2 is a kind of structural schematic diagram of the moving parts of the big macro micro- composite motion platform of stroke five degree of freedom；
Fig. 3 removes the structural schematic diagram after pedestal motor for a kind of big macro micro- composite motion platform of stroke five degree of freedom.
Pedestal 1, first straight line motor A, second straight line motor B, moving parts A1 before first, moving parts A2 after first,
Moving parts B1 before second, moving parts B2 after second, moving platform 2, platform bearer part 3, the first left rail Y11, first right side is led
Rail Y12, the second left rail Z11, the second right guide rail Z12, intermediate left rail G11, intermediate right guide rail G12, macro movement parts before first
A11, macro movement parts A21 after first, macro movement parts B11 before second, macro movement parts B21 after second, micromotion part A12 before first,
Micromotion part A22 after first, micromotion part B12 before second, micromotion part B22 after second, wedge block A13 before first, after first
Wedge block A23, wedge block B13 before second, wedge block B23 after second, wedge block guide rail A131 before first, wedge block is led after first
Rail A231, wedge block guide rail B131 before second, wedge block guide rail B231 after second, the first front rod cunning group A132 connect after first
Bar cunning group A232, the second front rod cunning group B132, the second back link cunning group B232, the first forward recess A121, the first rearward recess
A221, the second forward recess B121, the second rearward recess B221, the first front protrusion A122, the first rearward projection A222, the second front protrusion
B122, the second rearward projection B222, extension A111 before first, extension A211 after first, extension B111 before second, after second
Extension B211, cavity A112 before first, cavity B212 after first, cavity B112 before second, cavity B212 after second, before first
Piezoelectric ceramics A113, piezoelectric ceramics A213 after first, piezoelectric ceramics B113 before second, piezoelectric ceramics B213 after second, before first
High just spring A114, high just spring A214 after first, high just spring B 114 before second, high just spring B 214 after second, elongation bar
Group 31, the first guide rod 211, the second guide rod 212, the first front rail sliding block 221, the first rear transverse rod sliding block 222, the second front rail are slided
Block 223, the second rear transverse rod sliding block 224, the first front rod cunning group A132, the first back link cunning group A232, the second front rod cunning group
B132, the second back link cunning group B232, interface 22, elongation bar group 31.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It should be noted that having used "front", "rear", "left", "right" in being defined to the term of structure in the application, it is
It indicates a relative position relation between structure, restriction is not constituted to structure itself.
As shown in Figs. 1-3, it is macro micro- compound to provide a kind of big stroke five degree of freedom to a kind of specific implementation mode of the invention
Motion platform 22, the motion platform 22 include pedestal 11, the first guide rail, intermediate rail, the second guide rail, moving parts, moving platform
222, platform bearer part 333, the first guide rod 211, the second guide rod 212；
The first guide rail, intermediate rail, the second guide rail are disposed on the pedestal 1；
The moving parts include the first moving parts and the second moving parts for having macro micro- compound motion；
The first moving parts are set on first guide rail；
The second moving parts are set on second guide rail；
The moving platform 22 is arranged by platform bearer part 33 in the intermediate rail；The platform bearer part 33 can drive
The dynamic moving platform 22 is lifted in Z-direction；Ball connects between the moving platform 22 and the platform bearer part 33；
It is both provided with wedge block on first moving parts and the second moving parts；
Wedge block displacement platform is provided on the wedge block；
The both ends of the moving platform 22 and first guide rod 211, the second guide rod 212 are hinged；
First guide rod 211, the second guide rod 212 and the wedge block displacement platform are hinged.
First moving parts include moving parts A2 after moving parts A1 and first before first, are moved before described first
Moving parts A2 is arranged on first guide rail after component A1 and first；Second moving parts include exercise group before second
Moving parts B2 after part B1 and second, moving parts B2 settings are led described second after moving parts B1 and second before described second
On rail；Exercise group after moving parts B1, second before moving parts A2A2, second after moving parts A1A1, first before described first
Wedge block after wedge block B13, second before wedge block A23, second after wedge block A13, first before being correspondingly arranged on first on part B2
B23；Wedge block A23 is arranged in " V " type after wedge block A13 and first before described first, i.e., wedge block A13 and the before described first
The inclined-plane of wedge block A23 is inwardly after one；Wedge block B23 is arranged in " V " type after wedge block B13 and second before described second, i.e. institute
State the inclined-plane of wedge block B23 after wedge block B13 and second before second inwardly；Wedge block A23 after wedge block A13, first before first,
Wedge block after wedge block displacement platform, first before being correspondingly arranged on first on wedge block B23 after wedge block B13, second before second
Wedge block displacement platform after wedge block displacement platform, second before displacement platform, second；Distinguish at the both ends of first guide rod 211
Wedge block displacement platform is hinged after wedge block displacement platform, first before first；The both ends of second guide rod 212 are respectively at
Wedge block displacement platform is hinged after wedge block displacement platform, second before two.
Before first after wedge block displacement platform, first before wedge block displacement platform, second after wedge block displacement platform, second
The structure of wedge block displacement platform is identical；
Wedge-shaped platform includes before first before wedge block guide rail A131, the first front rod cunning group A132, first before described first
Cross bar sliding block 221；Wedge block guide rail A131 is the inclined-plane that the wedge block A13 before described first is arranged in double guide rails before described first
On, the first front rod cunning group A132 wedge block guide rail A131 before described first are moved on inclined-plane, horizontal before described first
Bar sliding block 221 and the first front rod cunning group A132 be slidably matched realize X to movement, one end of first guide rod 211
It is hinged between the first front rail sliding block 221；It is hinged between one end of the moving platform 22 and first guide rod 211,
Or it is connected in a manner of Hooke's hinge between one end and the first front rail sliding block 221 of first guide rod 211；Institute
It states and is connected in a manner of Hooke's hinge between one end of moving platform 22 and first guide rod 211, the hinged form is unlimited, uses
In the change for realizing platform stance.Since ball connects between the moving platform 22 and the platform bearer part 33, you can realize around X, Z
The rotary motion of axis.
Similarly, wedge-shaped platform includes wedge block guide rail A231 after first, the first back link cunning group A232, the after described first
One rear transverse rod sliding block 222；Wedge block guide rail A231 is that the oblique of wedge block A23 is arranged after described first in double guide rails after described first
On face, the first back link cunning group A232 wedge block guide rail A231 after described first are moved on inclined-plane, after described first
Cross bar sliding block 222 and the first back link cunning group A232 be slidably matched realize X to movement, first guide rod 211 it is another
Hinged between one end and the first rear transverse rod sliding block 222, the other end of first guide rod 211 is slided with first rear transverse rod
It can also be connected in a manner of Hooke's hinge between block 222.
Wedge-shaped platform includes before second before wedge block guide rail B131, the second front rod cunning group B132, second before described second
Cross bar sliding block 223；Wedge block guide rail B131 is the inclined-plane that the wedge block B13 before described second is arranged in double guide rails before described second
On, the second front rod cunning group B132 wedge block guide rail B131 before described second are moved on inclined-plane, horizontal before described second
Bar sliding block 223 and the second front rod cunning group B132 be slidably matched realize X to movement, one end of second guide rod 212
It is hinged between the second front rail sliding block 223；It is cut with scissors between the other end of the moving platform 22 and second guide rod 212
Connect, can also other on-link mode (OLM)s, for example, between one end of second guide rod 212 and the second front rail sliding block 223 with
The mode of Hooke's hinge connects；It is connected in a manner of Hooke's hinge between the other end of the moving platform 22 and second guide rod 212.
Wedge-shaped platform includes after second after wedge block guide rail B231, the second back link cunning group B232, second after described second
Cross bar sliding block 224；Wedge block guide rail B231 is the inclined-plane that the wedge block B23 after described second is arranged in double guide rails after described second
On, the second back link cunning group B232 wedge block guide rail B231 after described second are moved on inclined-plane, horizontal after described second
Bar sliding block 224 and the second back link cunning group B232 be slidably matched realize X to movement, second guide rod 212 it is another
It is hinged between end and the second rear transverse rod sliding block 224, the other end of second guide rod 212 and the second rear transverse rod sliding block
Between 224 can also the mode of Hooke's hinge connect.
Moving parts B2 after moving parts B1 and second before moving parts A2, second after moving parts A1, first before first
Structure it is identical；Moving parts A1 includes micromotion part A12 before macro movement parts A11 and first before first before described first；It is described
Moving parts A2 includes micromotion part A22 after macro movement parts A21 and first after first after first；Moving parts B1 before described second
Including micromotion part B12 before macro movement parts B11 and second before second；Moving parts B2 includes macro movement after second after described second
Micromotion part B22 after part B21 and second.Each moving parts are all made of the form of macro micro- common rail, macro movement parts A11 before first,
Micromotion part A12 is moved on the first guide rail before first, before second before macro movement parts B11, second micromotion part B12
It is single motor, the design structure of total stator that unilateral driving structure is moved on two guide rails, big stroke motion may be implemented, while simultaneous
Standby high speed, high acceleration.
Moving parts B2 after moving parts B1 and second before moving parts A2, second after moving parts A1, first before first
Structure it is identical；
Macro movement parts A11 is arranged on first guide rail before described first；One end of macro movement parts A11 before described first
Extension A111 before setting first, cavity A112 before being provided with first on extension A111 before described first, it is empty before described first
High just spring A114 before piezoelectric ceramics A113 and first before being provided with first in chamber A112；Micromotion part A12 is set before described first
It sets on first guide rail；One end of micromotion part A12 is provided with the first forward recess A121 before described first, before described first
The first front protrusion A122 is provided in groove A121, extension A111 is arranged in the first forward recess A121 before described first
It is interior；Sky is arranged before described first in high just spring A114 before piezoelectric ceramics A113, first before the first front protrusion A122, first
In chamber A112, high just spring A114 is arranged the first front protrusion A122's before piezoelectric ceramics A113, first before described first
Both ends；High just spring A114 before piezoelectric ceramics A113, first before placing first respectively due to the first both sides front protrusion A122, first
When preceding piezoelectric ceramics A113 is not powered on, before the high elastic force of just spring A114 at this time is by A122 pairs first of the first front protrusion before first
Piezoelectric ceramics A113 carries out squeezing action (piezoelectric ceramics A113 before holding out against first), and shape occurs for piezoelectric ceramics A113 before preventing first
Become.Piezoelectric ceramics A113 itself is deformed upon piezoelectric ceramics A113 after the power is turned on, before first is applied to the first front protrusion A122 before first
A pressure, the pressure is added to be more than the high just elastic force of spring A114 at this time before first, therefore under force, macro/micromotion part
It is subjected to displacement i.e. micromotion.Using high just spring A114 before piezoelectric ceramics A113 and first before first as micromotion part before first
The drive system of A12 has preferable pretensioning effect, inhibits vibration, makes up error.
Similarly, macro movement parts A21 is arranged on first guide rail after described first；Macro movement parts A21 after described first
One end setting first after extension A211, cavity B212 after being provided with first on extension A211 after described first, described the
High just spring A214 after piezoelectric ceramics A213 and first after being provided with first in cavity B212 after one；Micromotion part after described first
A22 is arranged on first guide rail；One end of micromotion part A22 is provided with the first rearward recess A221 after described first, described
It is provided with the first rearward projection A222 in first rearward recess A221, utilizes high rigid spring after piezoelectric ceramics A213 and first after first
Micro actuators of the A214 as micromotion part A22 after first, has preferable pretensioning effect, inhibits vibration, makes up error.
Macro movement parts B11 is arranged on second guide rail before described second；One end of macro movement parts B11 before described second
Extension B111 before setting second, cavity B112 before being provided with second on extension B111 before described second, it is empty before described second
High just spring B 114 before piezoelectric ceramics B113 and second before being provided with second in chamber B112；Micromotion part B12 is set before described second
It sets on second guide rail；One end of micromotion part B12 is provided with the second forward recess B121 before described second, before described second
The second front protrusion B122 is provided in groove B121, using high just spring B 114 before piezoelectric ceramics B113 and second before second as
The micro actuator of micromotion part B12 before second has preferable pretensioning effect, inhibits vibration, makes up error.
Macro movement parts B21 is arranged on second guide rail after described second；One end of macro movement parts B21 after described second
Extension B211 after setting second, cavity B212 after being provided with second on extension B211 after described second, it is empty after described second
High just spring B 214 after piezoelectric ceramics B213 and second after being provided with second in chamber B212；Micromotion part B22 is set after described second
It sets on second guide rail；One end of micromotion part B22 is provided with the second rearward recess B221 after described second, after described second
The second rearward projection B222 is provided in groove B221, using high just spring B 214 after piezoelectric ceramics B213 and second after second as
The micro actuator of micromotion part B22 after second has preferable pretensioning effect, inhibits vibration, makes up error.
Above-mentioned composite motion platform 2 includes first straight line motor A, second straight line motor B, the edges first straight line motor A
First guide rail drives the first moving parts movement, macro movement parts before specially first straight line motor A drivings first
Micromotion part A22 is moved along the first guide rail after macro movement parts A21, first after micromotion part A12 and first before A11, first, is realized
Y-direction moves；The second straight line motor B drives second moving parts to move along second guide rail, i.e. second straight line electricity
Micromotion part after macro movement parts B21, second after micromotion part B12 and second before macro movement parts B11, second before machine B driving second
B22 is moved along two guide rails, realizes Y-direction movement；Entire macro/micromotion only needs the two first straight line motor AA in left and right and second straight line
Motor B, four piezoelectric ceramics (piezoelectric ceramics B113 before piezoelectric ceramics A213, second after piezoelectric ceramics A113, first before first,
Piezoelectric ceramics B213 after second) the driving source coordinated movement of various economic factors (X, Y, Z-direction movement, rotation of X, Z axis, it can be achieved that five degree of freedom
Movement) it is arbitrary combine and its macro micro- switching；Piezoelectricity before drive component first straight line motor AA and second straight line motor B, first
After ceramic A113, first before piezoelectric ceramics A213, second after piezoelectric ceramics B113, second in piezoelectric ceramics B213 and moving platform 22
The heart is symmetrically installed, and entire moving platform 22 has good locating effect using Platform center as the symmetrical centre of movement.
Above-mentioned composite motion platform 2 belongs to a kind of macro micro- two-stage five degree of freedom motion platform 2 of parallel connection, entire macro/micromotion
Only need the driving source coordinated movement of various economic factors of two motors in left and right, four piezoelectric ceramics, it can be achieved that the arbitrary of five degree of freedom combines and its macro
Micro- switching；Drive component is symmetrically installed with Platform center, and entire platform has good using Platform center as the symmetrical centre of movement
Good locating effect.
Setting drives the elongation bar group 31 that the moving platform 22 lifts on the platform bearer part 33, under the moving platform 22
End is equipped with an interface 22, connects mode by ball between the interface 22 and the elongation bar group 31 and connects.
First guide rail, intermediate rail, the structure of the second guide rail are identical；First guide rail includes the first left rail
Y11, the first right guide rail Y12, second guide rail include the second left rail Z11, the second right guide rail Z12, the intermediate rail packet
Include intermediate left rail G11, intermediate right guide rail G12.
The intermediate rail is symmetricly set between first guide rail, the second guide rail.
A kind of lathe, the lathe have used any macro micro- composite motion platform of big stroke five degree of freedom as above
22。
The macro micro- composite motion platform of the big stroke five degree of freedom of the application 22 belongs to a kind of macro micro- two-stage five of parallel connection freely
Spend motion platform 22, entire macro/micromotion only need two motors in left and right, four piezoelectric ceramics the driving source coordinated movement of various economic factors, it can be achieved that
The arbitrary combination of five degree of freedom and its macro micro- switching；Drive component is symmetrically installed with Platform center, and entire platform is with Platform center
As the symmetrical centre of movement, there is good locating effect；Each moving parts are all made of the form of macro micro- common rail, such as the
Micromotion part A12 is moved on the first guide rail before macro movement parts A11, first before one, and unilateral driving structure is single motor, is total to
Big stroke motion may be implemented in the design structure of stator, while having both high speed, high acceleration；Utilize piezoelectric ceramics and high rigid bullet
Kinematic system of the spring as micro-move device has preferable pretensioning effect, inhibits vibration, makes up error.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, it will be understood by those of ordinary skill in the art that：It still can be to aforementioned each implementation
Technical solution recorded in example is modified or equivalent replacement of some of the technical features；And these modification or
It replaces, the spirit and scope for various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of macro micro- composite motion platform of big stroke five degree of freedom, which is characterized in that the motion platform includes pedestal, and first leads
Rail, intermediate rail, the second guide rail, moving parts, moving platform, platform bearer part, the first guide rod, the second guide rod；
The first guide rail, intermediate rail, the second guide rail are disposed on the pedestal；
The moving parts include the first moving parts and the second moving parts for having macro micro- compound motion；
The first moving parts are set on first guide rail；
The second moving parts are set on second guide rail；
The moving platform is arranged by platform bearer part in the intermediate rail；The platform bearer part can drive described dynamic flat
Platform is lifted in Z-direction；Ball connects between the moving platform and the platform bearer part；
It is both provided with wedge block on first moving parts and the second moving parts；
Wedge block displacement platform is provided on the wedge block；
The both ends of the moving platform and first guide rod, the second guide rod are hinged；
First guide rod, the second guide rod and the wedge block displacement platform are hinged.
2. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 1, it is characterised in that：First fortune
Dynamic component includes moving parts after moving parts and first before first, and moving parts are set after moving parts and first before described first
It sets on first guide rail；Second moving parts include moving parts after moving parts and second before second, and described the
Moving parts are arranged on second guide rail after moving parts and second before two；It is transported after moving parts, first before described first
Wedge block after wedge block, first before being correspondingly arranged on first on moving parts after moving parts, second before dynamic component, second, the
Wedge block after wedge block, second before two；Wedge block is arranged in " V " type after wedge block and first before described first, before described second
Wedge block is arranged in " V " type after wedge block and second；Before first after wedge block, first before wedge block, second after wedge block, second
Wedge block displacement before wedge block displacement platform, second after wedge block displacement platform, first before being correspondingly arranged on first on wedge block
Wedge block displacement platform after platform, second；The both ends of first guide rod are before first after wedge block displacement platform, first
Wedge block displacement platform is hinged；The both ends of second guide rod wedge block after wedge block displacement platform, second before second
Displacement platform is hinged.
3. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 2, which is characterized in that wedge-shaped before first
After block displacement platform, first before wedge block displacement platform, second after wedge block displacement platform, second wedge block displacement platform knot
Structure is identical；Wedge-shaped platform includes wedge block guide rail, the first front rod cunning group, the first front rail sliding block before first before described first；
Wedge block guide rail is that double guide rails are arranged before described first on the inclined-plane of wedge block before described first, the first front rod cunning group
Wedge block guide rail moves on inclined-plane before described first, and the first front rail sliding block is slided with the first front rod cunning group
Cooperation, it is hinged between one end of first guide rod and the first front rail sliding block；One end of the moving platform and described the
It is hinged between one guide rod.
4. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 3, which is characterized in that moved before first
The structure of moving parts is identical after moving parts and second before moving parts, second after component, first；Movement parts before described first
Including micromotion part before macro movement parts and first before first.
5. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 4, which is characterized in that moved before first
The structure of moving parts is identical after moving parts and second before moving parts, second after component, first；Macro movement before described first
Part is arranged on first guide rail；Extension before one end setting first of macro movement parts, prolongs before described first before described first
Stretch cavity before being provided with first on part, high rigid spring before piezoelectric ceramics and first before being provided with first in cavity before described first；
Micromotion part is arranged on first guide rail before described first；One end of micromotion part is recessed before being provided with first before described first
Slot is provided with the first front protrusion in first forward recess, and extension is arranged in first forward recess before described first；Institute
It states before the first front protrusion, first before piezoelectric ceramics, first high just spring setting and in cavity, is pressed before described first before described first
High just spring is arranged at the both ends of first front protrusion before electroceramics, first.
6. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 5, which is characterized in that the platform is held
Setting drives the elongation bar group of the moving platform lifting in holder, and the moving platform lower end is equipped with an interface, the interface and institute
It states and mode is connect by ball between elongation bar group connects.
7. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 6, which is characterized in that described first leads
Rail, intermediate rail, the structure of the second guide rail are identical；First guide rail include the first left rail, the first right guide rail, described second
Guide rail includes the second left rail, the second right guide rail.
8. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 7, which is characterized in that straight including first
Line motor, second straight line motor, the first straight line motor drive first moving parts to move along first guide rail；Institute
State second straight line motor drives second moving parts to move along second guide rail.
9. the macro micro- composite motion platform of big stroke five degree of freedom according to claim 8, which is characterized in that lead the centre
Rail is symmetricly set between first guide rail, the second guide rail.
10. a kind of lathe, the lathe has used the macro micro- compound fortune of the big stroke five degree of freedom as described in claim 1-9 is any
Moving platform.
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| CN201810750900.6A CN108555615A (en) | 2018-07-10 | 2018-07-10 | A kind of macro micro- composite motion platform of big stroke five degree of freedom |
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| CN109471233A (en) * | 2018-12-26 | 2019-03-15 | 广东工业大学 | A kind of single shaft macro/micromotion device |
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Application publication date: 20180921 |