CN107932522A - Five degree of freedom optical fabrication equipment and its method of work - Google Patents

Five degree of freedom optical fabrication equipment and its method of work Download PDF

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Publication number
CN107932522A
CN107932522A CN201711211205.4A CN201711211205A CN107932522A CN 107932522 A CN107932522 A CN 107932522A CN 201711211205 A CN201711211205 A CN 201711211205A CN 107932522 A CN107932522 A CN 107932522A
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China
Prior art keywords
side chain
platform
slide unit
synkinesia
main motion
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CN201711211205.4A
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Chinese (zh)
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CN107932522B (en
Inventor
程刚
王世林
丁海港
山显雷
郭锋
陈世彪
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China University of Mining and Technology CUMT
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China University of Mining and Technology CUMT
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Priority to CN201711211205.4A priority Critical patent/CN107932522B/en
Publication of CN107932522A publication Critical patent/CN107932522A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • B25J11/005Manipulators for mechanical processing tasks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/003Programme-controlled manipulators having parallel kinematics
    • B25J9/0063Programme-controlled manipulators having parallel kinematics with kinematics chains having an universal joint at the base

Abstract

The invention discloses a kind of five degree of freedom optical fabrication equipment and its method of work, it includes rack, assistance platform, moving platform, slide unit, the first kinematic chain being arranged between slide unit and assistance platform, the 3rd movement branched chain, the 5th movement branched chain, the second movement branched chain being arranged between rack and moving platform upper end and the 4th movement branched chain, cutter drive motor, cutter, minute surface is fixed and support device.Wherein moving platform upper end passes through assistance platform center, is connected by hook hinge with assistance platform.Assistance platform produces the one-movement-freedom-degree on three directions under the action of first and third, five movement branched chains, and moving platform realizes three-dimensional translating and two-dimensional rotary under the collective effect of assistance platform and second, four movement branched chains.The present invention applies to the characteristics of parallel institution rigidity is big, precision is high in optical manufacturing, lifts its machining accuracy.

Description

Five degree of freedom optical fabrication equipment and its method of work
Technical field
The invention belongs to be machined manufacturing technology field, and in particular to a kind of optical fabrication equipment, more particularly to A kind of five degree of freedom optical fabrication equipment and its method of work.
Background technology
With the development of telescope technology, the requirement to the optical property of telescope is higher and higher, and the design of minute surface is more next It is more accurate so that the requirement for mirror finish error and machining accuracy proposes new requirement.
Mainly carry out turning, grinding, the throwing of minute surface using traditional tandem type equipment in optical fabrication field at present The processes such as light.But due to tandem type equipment is there are cumulative errors superposition, in the timing of error one of each axis, equipment The number of axle is more, and cumulative errors also generally can be bigger so that series devices are increasingly difficult to meet that higher and higher minute surface adds at present The requirement of work precision.
The content of the invention
Goal of the invention:In order to overcome the deficiencies in the prior art:Existing for existing minute surface series connection type processing equipment Easily produce error accumulation so that it is more difficult meet optical mirror plane requirement on machining accuracy the problem of, the present invention provide one kind five from By degree optical fabrication equipment and its method of work, which has machining accuracy as configuration The characteristics of height, system stiffness is larger.
Technical solution:To achieve the above object, the technical solution adopted by the present invention is:
A kind of five degree of freedom optical fabrication equipment, including rack and from bottom to top set gradually minute surface inside it Support and fixing device, process tool, cutter drive motor, moving platform, assistance platform and five straight line slide units, wherein, minute surface Support is located at the interior bottom portion of the rack with fixing device, and five straight line slide units are located at frame top and parallel to machine frame inside Lower surface, is connected thereto between adjacent two straight lines slide unit, institute into 72 ° of angles, the center of upper end through the assistance platform of the moving platform The lower end for stating moving platform is fixedly connected sequentially cutter drive motor and process tool;
Five straight line slide units are:First side chain slide unit, the second side chain slide unit, the 3rd side chain slide unit, the 4th side chain are slided Platform, the 5th side chain slide unit, two of which straight line slide unit are connected by two main motion side chains with the moving platform, and the other three is straight Line slide unit is connected by three synkinesia side chains with the assistance platform.
Further, two articles of main motion side chains are respectively the second movement branched chain, the 4th movement branched chain, and the upper end is distinguished Be connected with the second side chain slide unit, the 4th side chain slide unit and along its rectilinear direction slide, its lower end respectively with the moving platform Upper end connection.
Further, each main motion side chain is from top to bottom connected by main motion side chain sliding block, main motion side chain connecting rod Composition, the main motion side chain connecting rod are connected by main motion side chain sliding block with the leading screw of the straight line slide unit, and lower end is put down with dynamic Platform connects;In every main motion side chain, positioned at lower end connecting element center of rotation all without the axis of moving platform.
Further, three articles of synkinesia side chains are respectively the first movement branched chain, the 3rd movement branched chain, the 5th movement Side chain, the upper end are connected with the first side chain slide unit, the 3rd side chain slide unit, the 5th side chain slide unit and along its rectilinear directions respectively Slide, its lower end is connected with the assistance platform respectively.
Further, each synkinesia side chain from top to bottom by synkinesia side chain sliding block at the same time with synkinesia branch Chain connecting rod a, synkinesia side chain connecting rod b two synkinesia side chain connecting rods compose in parallel, the synkinesia side chain connecting rod A, synkinesia side chain connecting rod b is connected by synkinesia side chain sliding block with the leading screw of the straight line slide unit, lower end with it is described Assistance platform connects;
In every synkinesia side chain, the center of rotation of two hinges of synkinesia side chain upper end and two hinges of lower end The center of rotation of chain forms four vertex of a parallelogram.
Further, the slide unit structure all same, is ballscrew type straight line slide unit, and five straight line slide units are along sliding block Glide direction includes leading screw driving motor, shaft coupling and leading screw successively, and the leading screw is arranged in five straight line slide units, and silk Thick stick axis converges at a bit.
Further, the connection central point of three synkinesia side chains and assistance platform on machine frame inside lower surface three Two subpoints of the connection central point of a subpoint, two main motion side chains and moving platform on machine frame inside lower surface, with Line of the central point of assistance platform between the subpoint of machine frame inside lower surface is five straight lines to intersect at a point, adjacent two Angle is 72 ° between bar straight line.
Further, it is hinged between the moving platform and assistance platform by assistance platform Hooke;Five straight lines are slided To be hinged between platform, moving platform, assistance platform and two main motion side chains, three synkinesia side chains, including Hooke's hinge and Spherical hinge.
Further, the mirror support and the minute surface of fixing device axially support the hydraulic pressure using multi-hydraulic-cylinder Whiffletree is supported, and radial support is supported using tangential bar Bipod.
A kind of method of work of above-mentioned five degree of freedom optical fabrication equipment, comprises the following steps that:
1) eyeglass is fixed and positioned:Minute surface to be processed is connected to mirror support with fixing device, adjusting multi-hydraulic-cylinder Hydraulic pressure whiffletree in oil liquid pressure in three Communicating devices, complete axial support and positioning, use tangential bar Bipod Complete the radially fixed of minute surface and positioning;
2) slide position adjusts:Screw drive motor drives screw to rotate by shaft coupling, synkinesia side chain Sliding block is converted into the straight line cunning along the first side chain slide unit direction with the rotational angle of screw according to the screw lead of corresponding specification It is dynamic;The screw drive motor rear end of five leading screws is provided with rotary encoder, and rotary encoder feedback screw drive motor turns Sub- angle position information, forms the closed-loop control of motor output parameter;By the rotational angle and leading screw that calculate screw drive motor Helical pitch try to achieve the position of five sliding blocks, and then draw locus and the posture of moving platform;
3) tool position adjusts:By adjust respectively the movement of synkinesia side chain sliding block on three synkinesia side chains away from From with displacement distance of the main motion side chain sliding block on the second side chain slide unit, three synkinesia side chains on two main motion side chains Assistance platform is promoted to produce the upper translation in three directions;, two main motion side chains and assistance platform promote moving platform to produce jointly Three direction translationals and both direction rotate, and then control process tool to realize object pose.
Further, gear reducer is added at screw drive motor, displacement sensor is installed on straight line slide unit, according to The slider displacement Signal Regulation parameter of electric machine of the feedback of displacement sensor, forms the closed-loop control of slide position, and then accurate control Brake the pose of platform.Screw drive motor herein is usually acceleration and deceleration device, but since retarder has error, causes to count The location parameter of the sliding block of calculation is inaccurate, so to install linear position sensors again on slide unit;But if power is smaller When, retarder can be also not added with, is directly directly connected to by screw drive motor with screw, the rotor fed back according to rotary encoder The location parameter error for the sliding block that angle and the helical pitch of screw calculate is relatively small, can need choose whether it is in cunning according to precision Linear displacement transducer is installed on platform.
Beneficial effect:Five degree of freedom optical fabrication equipment and its method of work provided by the invention, with the prior art Compare, have the advantage that:The present invention uses parallel-connection structure form, and rigidity is big, stable structure, and accumulated error is small.Type of drive Ball-screw form is driven using servomotor, kinematic accuracy is high, is easy to lift machining accuracy.
Brief description of the drawings
Fig. 1 is the three-dimensional overall structure diagram of the optical fabrication equipment of the offer of the present invention;
Fig. 2 is the equipment main motion side chain connection relationship diagram of the offer of the present invention;
Fig. 3 is the equipment synkinesia side chain connection relationship diagram of the offer of the present invention;
Fig. 4 is the equipment assistance platform Hooke's hinge schematic diagram of the offer of the present invention.
In figure:1- racks, 2- cutter drive motors, 3- moving platforms, 4- assistance platforms, 5- process tools, 6- mirrors to be processed Face, 7- minute surfaces are fixed and support device, 8- main motion side chains lower end Hooke's hinge, 9- main motion side chain connecting rods, 10- main motion side chains Upper end Hooke's hinge, 11- main motion side chain sliding blocks, 12- the second side chain slide units, the 3rd side chain slide units of 13-, the 4th side chain slide units of 14-, The 5th side chain slide units of 15-, 16- the first side chain slide units, 17a- synkinesia side chains lower end Hooke's hinge a, 17b- synkinesia side chains Lower end Hooke's hinge b, 18a- synkinesia side chain connecting rod a, 18b- synkinesia side chain connecting rod b, 19a- synkinesia side chain upper end Hooke's hinge a, 19b- synkinesia side chain upper end Hooke's hinge b, 20- synkinesia side chain sliding block, 21- leading screws driving motor, 22- connection Axis device, 23- leading screws, 24- assistance platform Hooke's hinges, 25- rotary encoders, 26- linear displacement transducers.
Embodiment
The present invention is a kind of five degree of freedom optical fabrication equipment and its method of work, it includes rack, five straight lines Slide unit, assistance platform, moving platform, the first kinematic chain being arranged between slide unit and assistance platform, the 3rd movement branched chain, the 5th fortune Dynamic side chain and the second movement branched chain being arranged between rack and moving platform upper end and the 4th movement branched chain, cutter drives electricity Machine, cutter, minute surface are fixed and support device.Wherein moving platform upper end passes through assistance platform center, passes through hook hinge and auxiliary Platform connects.Assistance platform produces the one-movement-freedom-degree on three directions under the action of first and third, five movement branched chains, moves flat Platform realizes three-dimensional translating and two-dimensional rotary under the collective effect of assistance platform and second, four movement branched chains.The present invention will simultaneously The characteristics of online structure rigidity is big, precision is high applies in optical manufacturing, lifts its machining accuracy.
The technical problem to be solved in the present invention is the tandem type equipment now generally used in optical mirror plane, and there is easy production The problems such as raw accumulated error, overall stiffness is not high.A kind of parallel connection type optical mirror plane is proposed with regard to the above-mentioned technical problem present invention to add Construction equipment.In order to make the apparent of the technical purpose of the present invention, technical meaning and technical solution expression, easy to this area Technical staff understands, and is applied, and the present invention is described further below in conjunction with the accompanying drawings.
Fig. 1 is the three-dimensional overall structure diagram of optical fabrication equipment, is followed successively by rack 1, minute surface branch from the bottom up Support and 4, three fixing device 7, minute surface to be processed 6, process tool 5, cutter drive motor 2, moving platform 3, assistance platform auxiliary Movement branched chain, two main motion side chains and five straight line slide units.
3 lower end is fixed with cutter drive motor 2 on moving platform.Mirror finish is fixedly arranged at the front end with cutter drive motor Cutter 5.Process tool 5 ensures processing under the action of three one-movement-freedom-degrees and two rotational freedoms that moving platform produces Suitable machining angle is formed between cutter 5 and minute surface to be processed 6, so as to cause the device to the processing request for meeting minute surface.Due to Larger-size minute surface cannot regard as rigid body, be not suitable for minute surface for the supporting way of conventional mechanical manufacture field and add Work.So the fixture used in the present invention is not the fixture of common field of machining, but optical fabrication is using special Minute surface fix with support device 7, the device be fixed on equipment bottom inner surface of the present invention as equipment fixation and Support device.Minute surface is fixed with support device 7 when implementing, and axially support can use the liquid of multi-hydraulic-cylinder as needed to minute surface Whiffletree supports are pressed, three linkers are respectively constituted by three groups of hydraulic cylinders, along with pressure generation and holding meanss, shape Into three virtual hard spots, optical mirror plane is supported, by the power on original three hard spots, disperses on three groups of hydraulic cylinders, reduces single branch Power at support point, ensures that minute surface axially can be maintained at target location, and occurs without larger deformation.In view of temperature for mirror The influence in face, supporting structure will have certain temperature compensation capability, and radial support is supported using tangential bar Bipod, tangential bar The surface deformation produced by expanding with heat and contract with cold for primary mirror can be converted into the rotation of primary mirror by Bipod, reduced and produced because expanding with heat and contract with cold Raw stress.Hydraulic pressure Whiffletree systems and tangential bar Bipod systems realize six point locations jointly, constraint minute surface space Six-freedom degree, along with corresponding fixing device, ensures that minute surface there is a situation where moderate finite deformation, does not complete adding for minute surface Work, lifts the face type machining accuracy of minute surface.
As shown in Fig. 2, 1 inner upper of rack is slide unit fixed pan, lower surface is fixed and support device 7 for minute surface Fixation surface.Five straight line slide units include:First side chain slide unit 16, the second side chain slide unit 12, the 3rd side chain slide unit 13, the 4th Side chain slide unit 14, the 5th side chain slide unit 15.The slide unit is ballscrew type straight line slide unit, and parallel under machine frame inside Surface, is distributed on rack top surface.
As shown in figure 3, five straight line slide unit structure all sames, the slide unit specifically include:Leading screw drives motor 21, connection Axis device 22, leading screw 23.23 plane of arrangement of leading screw is parallel to 1 bottom inner surface of rack.
Three synkinesia side chains are connected between slide unit and assistance platform 4, including:The connection of first side chain slide unit 16 First movement branched chain, the 3rd movement branched chain of the 3rd side chain slide unit 13 connection, the 5th movement branch of the 5th side chain slide unit 15 connection Chain.Three synkinesia branched structure is identical, and each synkinesia side chain specifically includes:Synkinesia side chain sliding block 20, it is auxiliary Movement branched chain upper end Hooke's hinge a19a, synkinesia side chain upper end Hooke's hinge b19b, synkinesia side chain connecting rod a18a are helped, is aided in Movement branched chain connecting rod b18b, synkinesia side chain lower end Hooke's hinge a17a, synkinesia side chain lower end Hooke's hinge b17b.It is described auxiliary Movement branched chain sliding block 20 is helped to be connected on the leading screw of slide unit, synkinesia side chain sliding block 20 moves on slide unit.Synkinesia branch Chain connecting rod a18a, synkinesia side chain connecting rod b18b are by synkinesia side chain upper end Hooke's hinge a19a, on synkinesia side chain End Hooke's hinge b19b is connected on synkinesia side chain sliding block 20, while by synkinesia side chain lower end Hooke's hinge a17a, it is auxiliary Movement branched chain lower end Hooke's hinge b17b is helped to be connected on assistance platform 4.In every synkinesia side chain, synkinesia side chain upper end Hooke's hinge a19a centers of rotation and synkinesia side chain upper end Hooke's hinge b19b centers of rotation, synkinesia side chain lower end Hooke's hinge A17a centers of rotation and synkinesia side chain lower end Hooke's hinge b17b centers of rotation form four vertex of a parallelogram. Three synkinesia side chains are parallelogram so that assistance platform is parallel with slide unit all the time, only produces on three directions Translation.Three synkinesia side chains cause assistance platform 4 to produce the one-movement-freedom-degree on three directions.Three synkinesias Side chain make it that assistance platform 4 is parallel with the plane that five slide units are formed all the time.
As shown in Fig. 2, two main motion side chains are connected between slide unit and moving platform 3.Two main motion side chain includes: Second movement branched chain of the second side chain slide unit 12 connection, the 4th movement branched chain of the 4th side chain slide unit 14 connection.The main fortune of each It is dynamic to include:Main motion side chain sliding block 11, main motion side chain upper end Hooke's hinge 10, main motion side chain connecting rod 9, main motion side chain lower end Hooke's hinge 8.In every main motion side chain, main motion side chain sliding block 11 is connected with leading screw, and main motion side chain sliding block 11 is on slide unit It is mobile.9 upper end of main motion side chain connecting rod is connected by main motion side chain upper end Hooke's hinge 10 and main motion side chain sliding block 11, and logical Cross main motion side chain lower end Hooke's hinge 8 and platform 3 connects.In every main motion side chain, main motion side chain lower end Hooke's hinge 8 turns Dynamic center is all without the axis of moving platform 3.Assistance platform 4 is common by assistance platform Hooke's hinge 24 and two main motion side chains Act on moving platform 3 so that moving platform produces the rotational freedom on one-movement-freedom-degree and both direction on three directions.
As shown in figure 4, it is directly connected between 3 assistance platform 4 of moving platform by assistance platform Hooke's hinge 24.Three synkinesias Three subpoints of the connection central point of side chain and assistance platform 4 on machine frame inside lower surface, two main motion side chains are with moving Two subpoints of the connection central point of platform 4 on machine frame inside lower surface, the axis with assistance platform 4 is under machine frame inside Line between the subpoint on surface is five straight lines for converging at a bit, and the angle between any two adjacent straight lines is 72 °;
Any Hooke's hinge in the present invention in three main motion side chains and two synkinesia side chains, is all changed to flexural pivot Chain, equipment of the present invention can work normally.
The method of work of present device is:Can be in the hope of by the helical pitch of the rotational angle and leading screw that calculate the motor The position of five sliding blocks, and then draw locus and the posture of moving platform 3.The driving motor rear end installation of five leading screws There is rotary encoder, rotary encoder is used for the rotor angle location information for feeding back five leading screw driving motors, forms motor output The closed-loop control of amount;Due in order to increase power output, adding gear reducer at motor, and gear reducer is there are idle running is poor, for essence True control slide block position, displacement sensor is provided with straight line slide unit, is joined according to the Signal Regulation motor of displacement sensor Number, forms the closed-loop control of slide position, and then the accurate pose for controlling moving platform.
Comprise the following steps that:
1) eyeglass is fixed and positioned:Minute surface 6 to be processed is connected to mirror support with fixing device 7, adjusting more hydraulic pressure Oil liquid pressure in the hydraulic pressure whiffletree of cylinder in three Communicating devices, makes its supporting to up to suitable rigidity to minute surface, complete Into axially support and positioning, the radially fixed of minute surface and positioning are completed using tangential bar Bipod, tangential bar Bipod energy will be because of master Expanding with heat and contract with cold for mirror and the surface deformation that produces are converted into the rotation of primary mirror, reduce the stress produced because expanding with heat and contract with cold.
2) slide position adjusts:Screw drive motor 21 drives screw 23 to rotate by shaft coupling 22, auxiliary fortune Dynamic side chain sliding block 20 is converted into along the first side chain slide unit 16 with the rotational angle of screw 23 according to the screw lead of corresponding specification The linear slide in direction;21 rear end of screw drive motor of five leading screws 23 is provided with rotary encoder 25, rotary encoder 25 For feeding back the rotor angle location information of screw drive motor, the closed-loop control of motor output parameter is formed;Slided in five straight lines Linear displacement transducer 26 is installed, controller is according to the displacement signal and target of the sliding block of the feedback of displacement sensor 26 on platform The difference regulation motor output parameter of location parameter, forms the closed-loop control of slide position.
3) tool position adjusts:By the movement for adjusting synkinesia side chain sliding block 16 on three synkinesia side chains respectively The displacement distance on the second side chain slide unit 12 of main motion side chain sliding block 11, three synkinesias in distance and two main motion side chains Side chain promotes the upper translation in three directions of the generation of assistance platform 4;Two main motion side chains and assistance platform 4 promote platform 3 jointly Produce three direction translationals and both direction rotates, and then control process tool 5 to realize object pose.
Compared with prior art, the present invention its difference is:
1. each component elasticity superposition of conventional serial mechanism, the problem of rod piece easy bending moment, ball-screw is used in the present invention Three synkinesia side chains and main motion side chain are driven, and then drives assistance platform and main motion platform, each component is rigidly superimposed, Rod piece is only by pulling force and pressure so that equipment of the present invention has larger rigidity.
2. conventional serial type component error is overlapped mutually, heretofore described parallel connection type photo process equipment is compared to biography The tandem type equipment error of system is the average value of each component error, has the characteristics that accumulated error is small.Optical frames of the present invention Face processing equipment can be satisfied with the higher and higher processing request of optical mirror plane.
3. photo process equipment of the present invention can realize three translations and two rotational freedoms, so that processing Cutter can keep preferable machining angle with processing minute surface always, can be with the complex optical mirror plane of machining shape.
4. each rod piece cooperates so that equipment possesses good dynamic property.
The above is only the preferred embodiment of the present invention, it should be pointed out that:For the ordinary skill people of the art For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should It is considered as protection scope of the present invention.

Claims (10)

  1. A kind of 1. five degree of freedom optical fabrication equipment, it is characterised in that:It is successively set on including rack (1) and from bottom to top Its internal mirror support and fixing device (7), process tool (5), cutter drive motor (2), moving platform (3), assistance platform (4) and five straight line slide units, wherein, mirror support be located at the interior bottom portion of the rack (1) with fixing device (7), and five directly Line slide unit is located at the top of rack (1) and parallel to rack (1) bottom inner surface, described dynamic into 72 ° of angles between adjacent two straight lines slide unit The upper end of platform (3) is connected thereto through the center of assistance platform (4), and the lower end of the moving platform (3) is fixedly connected sequentially knife Tool driving motor (2) and process tool (5);
    Five straight line slide units are:First side chain slide unit (16), the second side chain slide unit (12), the 3rd side chain slide unit (13), Four side chain slide units (14), the 5th side chain slide unit (15), two of which straight line slide unit are put down by two main motion side chains and described move Platform (3) connects, and the other three straight line slide unit is connected by three synkinesia side chains with the assistance platform (4).
  2. 2. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that:Two main motion branch Chain is respectively the second movement branched chain, the 4th movement branched chain, and the upper end is slided with the second side chain slide unit (12), the 4th side chain respectively Platform (14) is connected and slided along its rectilinear direction, and upper end of its lower end respectively with the moving platform (3) is connected.
  3. 3. five degree of freedom optical fabrication equipment according to claim 2, it is characterised in that:Each main motion side chain From top to bottom it is made of main motion side chain sliding block (11), main motion side chain connecting rod (9) connection, the main motion side chain connecting rod (9) It is connected by main motion side chain sliding block (11) with the leading screw (23) of the straight line slide unit, lower end is connected with moving platform (3);Every master In movement branched chain, positioned at lower end connecting element center of rotation all without the axis of moving platform (3).
  4. 4. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that:Three synkinesias Side chain is respectively the first movement branched chain, the 3rd movement branched chain, the 5th movement branched chain, the upper end respectively with the first side chain slide unit (16), the 3rd side chain slide unit (13), the 5th side chain slide unit (15) connection and along its rectilinear direction slide, its lower end respectively with it is described Assistance platform (4) connects.
  5. 5. five degree of freedom optical fabrication equipment according to claim 4, it is characterised in that:Each synkinesia branch Chain from top to bottom by synkinesia side chain sliding block (20) and meanwhile with synkinesia side chain connecting rod a (18a), synkinesia side chain connecting rod B (18b) two synkinesia side chain connecting rods compose in parallel, the synkinesia side chain connecting rod a (18a), synkinesia side chain Connecting rod b (18b) is connected by synkinesia side chain sliding block (20) with the leading screw (23) of the straight line slide unit, lower end with it is described auxiliary Platform (4) is helped to connect;
    In every synkinesia side chain, the center of rotation of two hinges of synkinesia side chain upper end and two hinges of lower end Center of rotation forms four vertex of a parallelogram.
  6. 6. the five degree of freedom optical fabrication equipment of partly decoupled according to claim 1, it is characterised in that:The cunning Platform structure all same, is ballscrew type straight line slide unit, and five straight line slide units include leading screw along sliding block glide direction and drive successively Dynamic motor (21), shaft coupling (22) and leading screw (23), the leading screw (23) is arranged in five straight line slide units, and leading screw (23) Axis converges at a bit.
  7. 7. the five degree of freedom optical fabrication equipment of partly decoupled according to claim 1, it is characterised in that:Three auxiliary Help three subpoints of the connection central point of movement branched chain and assistance platform (4) on machine frame inside lower surface, two main motions Two subpoints of the connection central point of side chain and moving platform (3) on rack (1) bottom inner surface, with assistance platform (4) Line of the central point between the subpoint of rack (1) bottom inner surface is five straight lines to intersect at a point, adjacent two straight lines Between angle be 72 °.
  8. 8. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that:The moving platform (3) and Connected between assistance platform (4) by assistance platform Hooke's hinge (24);Five straight line slide units, moving platform (3), assistance platform (4) it is to be hinged between two main motion side chains, three synkinesia side chains, including Hooke's hinge and spherical hinge;The minute surface In support and fixing device (7), axially support is supported minute surface using the hydraulic pressure Whiffletree of multi-hydraulic-cylinder, and radial support is adopted Supported with tangential bar Bipod.
  9. A kind of 9. method of work of five degree of freedom optical fabrication equipment, it is characterised in that:Comprise the following steps that:
    1) eyeglass is fixed and positioned:Minute surface to be processed (6) is connected to mirror support with fixing device (7), adjusting more hydraulic pressure Oil liquid pressure in the hydraulic pressure whiffletree of cylinder in three Communicating devices, completes axial support and positioning, uses tangential bar Bipod completes the radially fixed of minute surface and positioning;
    2) slide position adjusts:Screw drive motor (21) drives screw (23) to rotate by shaft coupling (22), aids in Movement branched chain sliding block (20) is converted into along the first side chain with the rotational angle of screw (23) according to the screw lead of corresponding specification The linear slide in slide unit (16) direction;Screw drive motor (21) rear end of five leading screws (23) is provided with rotary encoder (25), the rotor angle location information of rotary encoder (25) feedback screw drive motor (21), forms closing for motor output parameter Ring controls;The institute that five sliding blocks are tried to achieve by the helical pitch of the rotational angle and leading screw (23) that calculate screw drive motor (21) is in place Put, and then draw locus and the posture of moving platform (3);
    3) tool position adjusts:By adjust respectively the movement of synkinesia side chain sliding block (16) on three synkinesia side chains away from From the displacement distance with main motion side chain sliding block (11) on two main motion side chains on the second side chain slide unit (12), three auxiliary Movement branched chain promotes the upper translation in three directions of assistance platform (4) generation;, two main motion side chains and assistance platform (4) are common Promote moving platform (3) to produce three direction translationals and both direction rotation, and then control process tool (5) to realize object pose.
  10. 10. the method for work of five degree of freedom optical fabrication equipment according to claim 9, it is characterised in that:Screw Driving motor (21) place adds gear reducer, displacement sensor (26) is provided with five straight line slide units, controller is according to position The displacement signal of the sliding block of the feedback of displacement sensor (26) and the difference regulation motor output parameter of ideal position parameter, form and slide The closed-loop control of block position.
CN201711211205.4A 2017-11-28 2017-11-28 Five degree of freedom optical fabrication equipment and its working method Active CN107932522B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711211205.4A CN107932522B (en) 2017-11-28 2017-11-28 Five degree of freedom optical fabrication equipment and its working method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711211205.4A CN107932522B (en) 2017-11-28 2017-11-28 Five degree of freedom optical fabrication equipment and its working method

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Publication Number Publication Date
CN107932522A true CN107932522A (en) 2018-04-20
CN107932522B CN107932522B (en) 2019-09-03

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CN110421567A (en) * 2019-08-09 2019-11-08 中国矿业大学 A kind of multirobot process unit of complexity surface parts
CN111300251A (en) * 2020-04-07 2020-06-19 山东科技大学 Free-form surface grinding and polishing device for micro-miniature special-shaped precision parts
CN113997142A (en) * 2021-10-25 2022-02-01 北京理工大学 Robot system for nuclear reactor core end face grinding
CN115351768A (en) * 2022-07-20 2022-11-18 福州大学 Branched chain assembly, six-degree-of-freedom parallel mechanism and industrial robot

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Publication number Priority date Publication date Assignee Title
CN108555615A (en) * 2018-07-10 2018-09-21 广东工业大学 A kind of macro micro- composite motion platform of big stroke five degree of freedom
CN109623573A (en) * 2018-11-09 2019-04-16 江苏大学 It is a kind of for processing the lathe of propeller
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CN110421567A (en) * 2019-08-09 2019-11-08 中国矿业大学 A kind of multirobot process unit of complexity surface parts
CN111300251A (en) * 2020-04-07 2020-06-19 山东科技大学 Free-form surface grinding and polishing device for micro-miniature special-shaped precision parts
CN113997142A (en) * 2021-10-25 2022-02-01 北京理工大学 Robot system for nuclear reactor core end face grinding
CN115351768A (en) * 2022-07-20 2022-11-18 福州大学 Branched chain assembly, six-degree-of-freedom parallel mechanism and industrial robot

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