CN107932522B - Five degree of freedom optical fabrication equipment and its working method - Google Patents

Five degree of freedom optical fabrication equipment and its working method Download PDF

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Publication number
CN107932522B
CN107932522B CN201711211205.4A CN201711211205A CN107932522B CN 107932522 B CN107932522 B CN 107932522B CN 201711211205 A CN201711211205 A CN 201711211205A CN 107932522 B CN107932522 B CN 107932522B
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branch
slide unit
platform
synkinesia
main motion
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CN107932522A (en
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程刚
王世林
丁海港
山显雷
郭锋
陈世彪
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China University of Mining and Technology CUMT
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China University of Mining and Technology CUMT
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • B25J11/005Manipulators for mechanical processing tasks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/003Programme-controlled manipulators having parallel kinematics
    • B25J9/0063Programme-controlled manipulators having parallel kinematics with kinematics chains having an universal joint at the base

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Machine Tool Units (AREA)

Abstract

The invention discloses a kind of five degree of freedom optical fabrication equipment and its working methods comprising rack, assistance platform, moving platform, slide unit, the first kinematic chain being arranged between slide unit and assistance platform, third movement branched chain, the 5th movement branched chain, the second movement branched chain being arranged between rack and moving platform upper end and the 4th movement branched chain, cutter drive motor, cutter, mirror surface fix and support device.Wherein moving platform upper end passes through assistance platform center, is connected by hook hinge with assistance platform.Assistance platform generates the one-movement-freedom-degree on three directions under the action of first and third, five movement branched chain, and moving platform realizes three-dimensional translating and two-dimensional rotary under the collective effect of assistance platform and second, four movement branched chains.By parallel institution rigidity, feature big, with high accuracy applies in optical manufacturing the present invention, promotes its machining accuracy.

Description

Five degree of freedom optical fabrication equipment and its working method
Technical field
The invention belongs to be machined manufacturing technology field, and in particular to a kind of optical fabrication equipment, more particularly to A kind of five degree of freedom optical fabrication equipment and its working method.
Background technique
With the development of telescope technology, the requirement to the optical property of telescope is higher and higher, and the design of mirror surface is more next It is more accurate, so that the requirement for mirror finish error and machining accuracy proposes new requirement.
Mainly carry out turning, grinding, the throwing of mirror surface using traditional tandem type equipment in optical fabrication field at present The processes such as light.But since tandem type equipment is there are due to cumulative errors superposition, in one timing of error of each axis, equipment The number of axle is more, and cumulative errors also generally can be bigger, so that series devices are increasingly difficult to meet mirror surface higher and higher at present and add The requirement of work precision.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art: existing for existing mirror surface series connection type processing equipment It is easy to produce error accumulation, so that the present invention provides one kind five certainly the problem of the more difficult requirement on machining accuracy for meeting optical mirror plane By degree optical fabrication equipment and its working method, which has machining accuracy as configuration Height, the larger feature of system stiffness.
Technical solution: to achieve the above object, the technical solution adopted by the present invention are as follows:
A kind of five degree of freedom optical fabrication equipment including rack and from bottom to top sets gradually mirror surface inside it Support and fixed device, process tool, cutter drive motor, moving platform, assistance platform and five straight line slide units, wherein mirror surface Support is located at the interior bottom portion of the rack with fixed device, and five straight line slide units are located at frame top and are parallel to machine frame inside Lower surface, at 72 ° of angles between adjacent two straight lines slide unit, the center that the upper end of the moving platform passes through assistance platform is connected thereto, institute The lower end for stating moving platform is fixedly connected sequentially cutter drive motor and process tool;
Five straight line slide units are as follows: the first branch slide unit, the second branch slide unit, third branch slide unit, the 4th branch are sliding Platform, the 5th branch slide unit, two of them straight line slide unit are connect by two main motion branches with the moving platform, and the other three is straight Line slide unit is connect by three synkinesia branches with the assistance platform.
Further, two articles of main motion branches are respectively the second movement branched chain, the 4th movement branched chain, the upper end difference Connect with the second branch slide unit, the 4th branch slide unit and along its rectilinear direction slide, lower end respectively with the moving platform Upper end connection.
Further, each main motion branch is from top to bottom connected by main motion branch sliding block, main motion branch connecting rod Composition, the main motion branch connecting rod are connect by main motion branch sliding block with the lead screw of the straight line slide unit, and lower end is put down with dynamic Platform connection;In every main motion branch, positioned at lower end connecting element center of rotation all without the axis of moving platform.
Further, three articles of synkinesia branches are respectively the first movement branched chain, third movement branched chain, the 5th movement Branch, the upper end are connect and with the first branch slide unit, third branch slide unit, the 5th branch slide unit along its rectilinear direction respectively Sliding, lower end is connect with the assistance platform respectively.
Further, each synkinesia branch from top to bottom by synkinesia branch sliding block simultaneously with synkinesia branch Chain connecting rod a, synkinesia branch connecting rod b two synkinesia branch connecting rods compose in parallel, the synkinesia branch connecting rod A, synkinesia branch connecting rod b passes through synkinesia branch sliding block and connect with the lead screw of the straight line slide unit, lower end with it is described Assistance platform connection;
In every synkinesia branch, the center of rotation of two hinges of synkinesia branch upper end and two hinges of lower end The center of rotation of chain constitutes four vertex of a parallelogram.
Further, the slide unit structure is all the same, is ballscrew type straight line slide unit, five straight line slide units are along sliding block Glide direction successively includes lead screw driving motor, shaft coupling and lead screw, and the lead screw is arranged in five straight line slide units, and silk Thick stick axis converges at a bit.
Further, the connection central point of three synkinesia branches and assistance platform on machine frame inside lower surface three Two subpoints of the connection central point of a subpoint, two main motion branches and moving platform on machine frame inside lower surface, with Line of the central point of assistance platform between the subpoint of machine frame inside lower surface be five straight lines to intersect at a point, adjacent two Angle is 72 ° between straight line.
Further, it is hinged between the moving platform and assistance platform by assistance platform Hooke;Five straight lines are sliding To be hinged between platform, moving platform, assistance platform and two main motion branches, three synkinesia branches, including Hooke's hinge and Spherical hinge.
Further, the mirror surface of the mirror support and fixed device is axially supported using the hydraulic of multi-hydraulic-cylinder Whiffletree support, radial support are supported using tangential bar Bipod.
A kind of working method of above-mentioned five degree of freedom optical fabrication equipment, the specific steps are as follows:
1) eyeglass is fixed and positions: mirror surface to be processed being connected on mirror support and fixed device, multi-hydraulic-cylinder is adjusted Hydraulic whiffletree in oil liquid pressure in three Communicating devices, complete axial support and positioning, use tangential bar Bipod Complete the radially fixed of mirror surface and positioning;
2) slide position adjusts: screw drive motor drives screw rod to make rotating motion by shaft coupling, synkinesia branch Sliding block is slided with the rotational angle of screw rod according to the straight line that the screw lead of corresponding specification is converted into along the first branch slide unit direction It is dynamic;The screw drive motor rear end of five lead screws is equipped with rotary encoder, and rotary encoder feeds back turning for screw drive motor Sub- angle position information forms the closed-loop control of motor output parameter;By the rotational angle and lead screw that calculate screw drive motor Lead acquire the position of five sliding blocks, and then obtain spatial position and the posture of moving platform;
3) tool position adjusts: by adjust respectively the movement of synkinesia branch sliding block on three synkinesia branches away from From with moving distance of the main motion branch sliding block on the second branch slide unit, three synkinesia branches on two main motion branches Assistance platform is pushed to generate the upper translation in three directions;, two main motion branches and assistance platform push moving platform to generate jointly Three direction translationals and both direction rotation, and then control process tool and realize object pose.
Further, speed reducer is added at screw drive motor, displacement sensor is installed on straight line slide unit, according to The slider displacement Signal Regulation parameter of electric machine of the feedback of displacement sensor forms the closed-loop control of slide position, and then accurately controls Brake the pose of platform.Screw drive motor herein is usually acceleration and deceleration device, but since retarder has error, causes to count The location parameter inaccuracy of the sliding block of calculation, so to install linear position sensors again on slide unit;But if power is smaller When, retarder can also be not added, be directly directly connected to screw rod by screw drive motor, according to the rotor of rotary encoder feedback The location parameter error for the sliding block that angle and the lead of screw rod calculate is relatively small, can need to choose whether to be in cunning according to precision Linear displacement transducer is installed on platform.
The utility model has the advantages that five degree of freedom optical fabrication equipment provided by the invention and its working method, with the prior art It compares, has the advantage that the present invention using parallel-connection structure form, rigidity is big, stable structure, and accumulated error is small.Driving method Ball-screw form is driven using servo motor, kinematic accuracy is high, is easy to promote machining accuracy.
Detailed description of the invention
Fig. 1 is the three-dimensional overall structure diagram of the optical fabrication equipment of offer of the invention;
Fig. 2 is the equipment main motion branch connection relationship diagram of offer of the invention;
Fig. 3 is the equipment synkinesia branch connection relationship diagram of offer of the invention;
Fig. 4 is the equipment assistance platform Hooke's hinge schematic diagram of offer of the invention.
In figure: 1- rack, 2- cutter drive motor, 3- moving platform, 4- assistance platform, 5- process tool, 6- mirror to be processed Face, 7- mirror surface fix and support device, 8- main motion branch lower end Hooke's hinge, 9- main motion branch connecting rod, 10- main motion branch Upper end Hooke's hinge, 11- main motion branch sliding block, 12- the second branch slide unit, 13- third branch slide unit, the 4th branch slide unit of 14-, The 5th branch slide unit of 15-, 16- the first branch slide unit, 17a- synkinesia branch lower end Hooke's hinge a, 17b- synkinesia branch Lower end Hooke's hinge b, 18a- synkinesia branch connecting rod a, 18b- synkinesia branch connecting rod b, 19a- synkinesia branch upper end Hooke's hinge a, 19b- synkinesia branch upper end Hooke's hinge b, 20- synkinesia branch sliding block, 21- lead screw driving motor, 22- connection Axis device, 23- lead screw, 24- assistance platform Hooke's hinge, 25- rotary encoder, 26- linear displacement transducer.
Specific embodiment
The present invention is a kind of five degree of freedom optical fabrication equipment and its working method comprising rack, five straight lines Slide unit, assistance platform, moving platform, the first kinematic chain being arranged between slide unit and assistance platform, third movement branched chain, the 5th fortune Dynamic branch and the second movement branched chain being arranged between rack and moving platform upper end and the 4th movement branched chain, cutter drives electricity Machine, cutter, mirror surface fix and support device.Wherein moving platform upper end passes through assistance platform center, passes through hook hinge and auxiliary Platform connection.Assistance platform generates the one-movement-freedom-degree on three directions under the action of first and third, five movement branched chain, moves flat Platform realizes three-dimensional translating and two-dimensional rotary under the collective effect of assistance platform and second, four movement branched chains.The present invention will simultaneously Online structure rigidity is big, feature with high accuracy applies in optical manufacturing, promotes its machining accuracy.
The tandem type equipment that the technical problem to be solved by the present invention is to now generally use in optical mirror plane, there is easy productions The problems such as raw accumulated error, overall stiffness is not high.With regard to above-mentioned technical problem, the invention proposes a kind of parallel connection type optical mirror planes to add Construction equipment.In order to make the apparent of technical purpose of the invention, technical meaning and technical solution expression, convenient for this field Technical staff understands, and is applied, and following further describes the present invention with reference to the drawings.
Fig. 1 is the three-dimensional overall structure diagram of optical fabrication equipment, is followed successively by rack 1, mirror surface branch from the bottom up Support and fixed device 7, mirror surface to be processed 6, process tool 5, cutter drive motor 2, moving platform 3, assistance platform 4, three auxiliary Movement branched chain, two main motion branches and five straight line slide units.
3 lower end is fixed with cutter drive motor 2 on moving platform.Mirror finish is fixedly arranged at the front end in cutter drive motor Cutter 5.Process tool 5 guarantees processing under the action of three one-movement-freedom-degrees and two rotational freedoms that moving platform generates Suitable machining angle is formed between cutter 5 and mirror surface to be processed 6, to cause the device to the processing request for meeting mirror surface.Due to Larger-size mirror surface cannot regard as rigid body, so the supporting way for conventional mechanical manufacture field is not suitable for mirror surface and adds Work.So the fixture of the not common field of machining of fixture used in the present invention, optical fabrication is using dedicated Mirror surface fix and support device 7, the device be fixed on equipment bottom inner surface of the present invention as the fixation of equipment with Support device.Mirror surface fixes and supports device 7 when implementing, and axially support can according to need the liquid using multi-hydraulic-cylinder to mirror surface Whiffletree support is pressed, respectively constitutes three linkers by three groups of hydraulic cylinders, along with pressure generation and holding meanss, shape At three virtual hard spots, optical mirror plane is supported, the power on original three hard spots is dispersed on three groups of hydraulic cylinders, reduces single branch Power at support point guarantees that mirror surface is able to maintain axially in target position, and does not occur biggish deformation.In view of temperature is for mirror The influence in face, support construction will have certain temperature compensation capability, and radial support is supported using tangential bar Bipod, tangential bar Bipod can convert the surface deformation generated by expanding with heat and contract with cold for primary mirror to the rotation of primary mirror, and reduction is produced because expanding with heat and contract with cold Raw stress.Hydraulic Whiffletree system and tangential bar Bipod system realize six point locations jointly, constraint mirror surface space Six-freedom degree, along with corresponding fixed device, guarantee mirror surface there is a situation where moderate finite deformation, do not complete mirror surface plus Work promotes the face type machining accuracy of mirror surface.
As shown in Fig. 2, 1 inner upper of rack is slide unit fixed pan, lower surface is that mirror surface fixes and supports device 7 Fixation surface.Five straight line slide units include: the first branch slide unit 16, the second branch slide unit 12, third branch slide unit 13, and the 4th Branch slide unit 14, the 5th branch slide unit 15.The slide unit is ballscrew type straight line slide unit, and is parallel under machine frame inside Surface is evenly arranged on rack top surface.
As shown in figure 3, five straight line slide unit structures are all the same, the slide unit is specifically included: lead screw driving motor 21, connection Axis device 22, lead screw 23.23 plane of arrangement of lead screw is parallel to 1 bottom inner surface of rack.
Three synkinesia branches are connected between slide unit and assistance platform 4, comprising: the connection of the first branch slide unit 16 First movement branched chain, the third movement branched chain that third branch slide unit 13 connects, the 5th movement branch of the 5th branch slide unit 15 connection Chain.Three synkinesia branched structures are identical, and each synkinesia branch specifically includes: synkinesia branch sliding block 20, auxiliary Movement branched chain upper end Hooke's hinge a19a, synkinesia branch upper end Hooke's hinge b19b, synkinesia branch connecting rod a18a are helped, is assisted Movement branched chain connecting rod b18b, synkinesia branch lower end Hooke's hinge a17a, synkinesia branch lower end Hooke's hinge b17b.It is described auxiliary Movement branched chain sliding block 20 is helped to be connected on the lead screw of slide unit, synkinesia branch sliding block 20 moves on slide unit.Synkinesia branch Chain connecting rod a18a, synkinesia branch connecting rod b18b are by synkinesia branch upper end Hooke's hinge a19a, on synkinesia branch End Hooke's hinge b19b is connected on synkinesia branch sliding block 20, while by synkinesia branch lower end Hooke's hinge a17a, auxiliary Movement branched chain lower end Hooke's hinge b17b is helped to be connected on assistance platform 4.In every synkinesia branch, synkinesia branch upper end Hooke's hinge a19a center of rotation and synkinesia branch upper end Hooke's hinge b19b center of rotation, synkinesia branch lower end Hooke's hinge A17a center of rotation and synkinesia branch lower end Hooke's hinge b17b center of rotation constitute four vertex of a parallelogram. Three synkinesia branches are parallelogram, so that assistance platform is parallel with slide unit always, are only generated on three directions Translation.Three synkinesia branches make assistance platform 4 generate the one-movement-freedom-degree on three directions.Three synkinesias Branch makes assistance platform 4 parallel with the plane that five slide units are constituted always.
As shown in Fig. 2, being connected with two main motion branches between slide unit and moving platform 3.Two main motion branches include: Second movement branched chain of the second branch slide unit 12 connection, the 4th movement branched chain of the 4th branch slide unit 14 connection.The main fortune of each Dynamic includes: main motion branch sliding block 11, main motion branch upper end Hooke's hinge 10, main motion branch connecting rod 9, main motion branch lower end Hooke's hinge 8.In every main motion branch, main motion branch sliding block 11 is connected with lead screw, and main motion branch sliding block 11 is on slide unit It is mobile.9 upper end of main motion branch connecting rod is connected by main motion branch upper end Hooke's hinge 10 and main motion branch sliding block 11, and logical It crosses main motion branch lower end Hooke's hinge 8 and platform 3 connects.In every main motion branch, main motion branch lower end Hooke's hinge 8 turns Dynamic center is all without the axis of moving platform 3.Assistance platform 4 is common by assistance platform Hooke's hinge 24 and two main motion branches Moving platform 3 is acted on, so that moving platform generates the rotational freedom on one-movement-freedom-degree and both direction on three directions.
As shown in figure 4, being directly connected between 3 assistance platform 4 of moving platform by assistance platform Hooke's hinge 24.Three synkinesias Three subpoints of the connection central point of branch and assistance platform 4 on machine frame inside lower surface, two main motion branches with move Two subpoints of the connection central point of platform 4 on machine frame inside lower surface, the axis with assistance platform 4 is under machine frame inside Line between the subpoint on surface is five straight lines for converging at a bit, and the angle between any two adjacent straight lines is 72 °;
Any Hooke's hinge in the present invention in three main motion branches and two synkinesia branches, is all changed to flexural pivot Chain, equipment of the present invention can work normally.
The working method of present device are as follows: can be in the hope of by the lead of the rotational angle and lead screw that calculate the motor The position of five sliding blocks, and then obtain spatial position and the posture of moving platform 3.The driving motor rear end installation of five lead screws There is rotary encoder, rotary encoder is used to feed back the rotor angle location information of five lead screw driving motors, forms motor output The closed-loop control of amount;Due in order to increase power output, adding speed reducer at motor, and speed reducer is there are idle running is poor, for essence True control slide position, is equipped with displacement sensor on straight line slide unit, is joined according to the Signal Regulation motor of displacement sensor Number forms the closed-loop control of slide position, and then accurately controls the pose of moving platform.
Specific step is as follows:
1) eyeglass is fixed and positions: mirror surface 6 to be processed being connected on mirror support and fixed device 7, how hydraulic is adjusted Oil liquid pressure in the hydraulic whiffletree of cylinder in three Communicating devices makes it reach suitable rigidity to the support of mirror surface, complete At axially support and positioning, the radially fixed of mirror surface and positioning are completed using tangential bar Bipod, tangential bar Bipod energy will be because of master Expanding with heat and contract with cold for mirror and the surface deformation generated are converted into the rotation of primary mirror, reduce the stress generated because expanding with heat and contract with cold.
2) slide position adjusts: screw drive motor 21 drives screw rod 23 to make rotating motion by shaft coupling 22, auxiliary fortune Dynamic branch sliding block 20 is converted into according to the screw lead of corresponding specification along the first branch slide unit 16 with the rotational angle of screw rod 23 The linear slide in direction;21 rear end of screw drive motor of five lead screws 23 is equipped with rotary encoder 25, rotary encoder 25 For feeding back the rotor angle location information of screw drive motor, the closed-loop control of motor output parameter is formed;It is sliding in five straight lines Linear displacement transducer 26 is installed, controller is according to the displacement signal and target of the sliding block of the feedback of displacement sensor 26 on platform The difference of location parameter adjusts motor output parameter, forms the closed-loop control of slide position.
3) tool position adjusts: the movement by adjusting synkinesia branch sliding block 16 on three synkinesia branches respectively The moving distance on the second branch slide unit 12 of main motion branch sliding block 11, three synkinesias in distance and two main motion branches Branch pushes the upper translation in three directions of the generation of assistance platform 4;Two main motion branches and assistance platform 4 push platform 3 jointly Three direction translationals and both direction rotation are generated, and then controls process tool 5 and realizes object pose.
Compared with prior art, the present invention its difference is:
1. the problem of conventional serial mechanism each component elasticity superposition, rod piece is vulnerable to moment of flexure, ball-screw is used in the present invention Three synkinesia branches and main motion branch are driven, and then drives assistance platform and main motion platform, each component is rigidly superimposed, Rod piece is only by pulling force and pressure, so that equipment of the present invention has biggish rigidity.
2. conventional serial type component error is overlapped mutually, heretofore described parallel connection type photo process equipment is compared to biography The tandem type equipment error of system is the average value of each component error, has the characteristics that accumulated error is small.Optical frames of the present invention Face processing equipment can satisfy the processing request higher and higher in optical mirror plane.
3. three translations and two rotational freedoms may be implemented in photo process equipment of the present invention, so that processing Cutter can keep ideal machining angle with processing mirror surface always, can be with the more complicated optical mirror plane of machining shape.
4. each rod piece cooperates, so that equipment has good dynamic property.
The above is only a preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered It is considered as protection scope of the present invention.

Claims (10)

1. a kind of five degree of freedom optical fabrication equipment, it is characterised in that: including rack (1) and be from bottom to top successively set on Its internal mirror support and fixed device (7), process tool (5), cutter drive motor (2), moving platform (3), assistance platform (4) and five straight line slide units, wherein mirror support and fixed device (7) are located at the interior bottom portion of the rack (1), and five directly Line slide unit is located at rack (1) top and is parallel to rack (1) bottom inner surface, described dynamic at 72 ° of angles between adjacent two straight lines slide unit The center that the upper end of platform (3) passes through assistance platform (4) is connected thereto, and the lower end of the moving platform (3) is fixedly connected sequentially knife Have driving motor (2) and process tool (5);
Five straight line slide units are as follows: the first branch slide unit (16), the second branch slide unit (12), third branch slide unit (13), Four branch slide units (14), the 5th branch slide unit (15), two of them straight line slide unit are put down by two main motion branches and described move Platform (3) connection, the other three straight line slide unit are connect by three synkinesia branches with the assistance platform (4).
2. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that: two main motion branch Chain is respectively the second movement branched chain, the 4th movement branched chain, and the upper end is sliding with the second branch slide unit (12), the 4th branch respectively Platform (14) connection is simultaneously slided along its rectilinear direction, and lower end is connect with the upper end of the moving platform (3) respectively.
3. five degree of freedom optical fabrication equipment according to claim 2, it is characterised in that: each main motion branch It is from top to bottom made of main motion branch sliding block (11), main motion branch connecting rod (9) connection, the main motion branch connecting rod (9) It is connect by main motion branch sliding block (11) with the lead screw (23) of the straight line slide unit, lower end is connect with moving platform (3);Every master In movement branched chain, positioned at lower end connecting element center of rotation all without the axis of moving platform (3).
4. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that: three synkinesias Branch is respectively the first movement branched chain, third movement branched chain, the 5th movement branched chain, the upper end respectively with the first branch slide unit (16), third branch slide unit (13), the 5th branch slide unit (15) connection and along its rectilinear direction slide, lower end respectively with it is described Assistance platform (4) connection.
5. five degree of freedom optical fabrication equipment according to claim 4, it is characterised in that: each synkinesia branch Chain from top to bottom by synkinesia branch sliding block (20) simultaneously with synkinesia branch connecting rod a(18a), synkinesia branch connecting rod B(18b) two synkinesia branch connecting rods compose in parallel, the synkinesia branch connecting rod a(18a), synkinesia branch Connecting rod b(18b) connect with the lead screw (23) of the straight line slide unit by synkinesia branch sliding block (20), lower end with it is described auxiliary Platform (4) are helped to connect;
In every synkinesia branch, two hinges of the center of rotation and lower end of two hinges of synkinesia branch upper end Center of rotation constitutes four vertex of a parallelogram.
6. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that: the slide unit structure is homogeneous Together, be ballscrew type straight line slide unit, five straight line slide units along sliding block glide direction successively include lead screw driving motor (21), Shaft coupling (22) and lead screw (23), the lead screw (23) are arranged in five straight line slide units, and lead screw (23) axis converges at A bit.
7. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that: three synkinesia branches With three subpoints on machine frame inside lower surface of the connection central point of assistance platform (4), two main motion branches and dynamic flat Two subpoints of the connection central point of platform (3) on rack (1) bottom inner surface, the central point with assistance platform (4) is in machine Line between the subpoint of frame (1) bottom inner surface is five straight lines to intersect at a point, and angle is between adjacent two straight lines 72°。
8. five degree of freedom optical fabrication equipment according to claim 1, it is characterised in that: the moving platform (3) and It is connected between assistance platform (4) by assistance platform Hooke's hinge (24);Five straight line slide units, moving platform (3), assistance platform (4) between two main motion branches, three synkinesia branches to be hinged, including Hooke's hinge and spherical hinge;The mirror surface Support is with fixed device (7), and axially support is supported mirror surface using the hydraulic Whiffletree of multi-hydraulic-cylinder, and radial support is adopted It is supported with tangential bar Bipod.
9. the working method of five degree of freedom optical fabrication equipment according to any one of claims 1 to 8, feature exist In: specific step is as follows:
1) eyeglass is fixed and positions: mirror surface to be processed (6) being connected on mirror support and fixed device (7), how hydraulic is adjusted Oil liquid pressure in the hydraulic whiffletree of cylinder in three Communicating devices completes axial support and positioning, uses tangential bar Bipod completes the radially fixed of mirror surface and positioning;
2) slide position adjusts: screw drive motor (21) drives screw rod (23) to make rotating motion by shaft coupling (22), assists Movement branched chain sliding block (20) is converted into according to the screw lead of corresponding specification along the first branch with the rotational angle of screw rod (23) The linear slide in slide unit (16) direction;Screw drive motor (21) rear end of five lead screws (23) is equipped with rotary encoder (25), the rotor angle location information of rotary encoder (25) feedback screw drive motor (21) forms closing for motor output parameter Ring control;The institute for acquiring five sliding blocks by the lead of the rotational angle and lead screw (23) that calculate screw drive motor (21) is in place It sets, and then obtains spatial position and the posture of moving platform (3);
3) tool position adjusts: by adjust respectively the movement of synkinesia branch sliding block (16) on three synkinesia branches away from From the moving distance with main motion branch sliding block (11) on two main motion branches on the second branch slide unit (12), three auxiliary Movement branched chain pushes the upper translation in three directions of assistance platform (4) generation;Two main motion branches and assistance platform (4) push away jointly Dynamic moving platform (3) generate three direction translationals and both direction rotation, and then control process tool (5) and realize object pose.
10. the working method of five degree of freedom optical fabrication equipment according to claim 9, it is characterised in that: screw rod Driving motor adds speed reducer at (21), displacement sensor (26) is equipped on five straight line slide units, controller is according to position The displacement signal of the sliding block of the feedback of displacement sensor (26) and the difference of ideal position parameter adjust motor output parameter, are formed and are slided The closed-loop control of block position.
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