CN110554662A - Large-stroke high-precision micro-control servo feeding system and control method - Google Patents

Large-stroke high-precision micro-control servo feeding system and control method Download PDF

Info

Publication number
CN110554662A
CN110554662A CN201910726999.0A CN201910726999A CN110554662A CN 110554662 A CN110554662 A CN 110554662A CN 201910726999 A CN201910726999 A CN 201910726999A CN 110554662 A CN110554662 A CN 110554662A
Authority
CN
China
Prior art keywords
comparator
servo
nut
loop controller
servo motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910726999.0A
Other languages
Chinese (zh)
Inventor
冯显英
孙德鹏
杜付鑫
李沛刚
李慧
王兆国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong University
Original Assignee
Shandong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong University filed Critical Shandong University
Priority to CN201910726999.0A priority Critical patent/CN110554662A/en
Publication of CN110554662A publication Critical patent/CN110554662A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/414Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller
    • G05B19/4141Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller characterised by a controller or microprocessor per axis
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/36Nc in input of data, input key till input tape
    • G05B2219/36346Display feed quantity and cutting speed as function of material to help user

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Transmission Devices (AREA)

Abstract

the invention discloses a large-stroke high-precision micro-control servo feeding system and a control method, comprising two servo motors, a sliding lead screw pair, a displacement detection device, a position feedback module, a CNC motion controller and a PC (personal computer); the first servo motor drives the screw rod to do rotary motion, the second servo motor drives the nut to do rotary motion, and the first servo motor and the second servo motor are respectively driven by a set of servo driving system; the workbench is fixedly arranged on a nut bearing of the sliding lead screw pair, and the displacement detection device detects the displacement of the workbench and sends a detected displacement signal to the position feedback module; the position feedback module feeds back the signal to the CNC motion controller; the motion controller enables the motion commands of the first servo motor and the second servo motor to be sent to the servo driving systems of the two servo motors according to the motion requirement given by the PC; and the micro-feeding control of the workbench is realized by the synthesis of the two rotary motions of the sliding lead screw and the nut.

Description

Large-stroke high-precision micro-control servo feeding system and control method
Technical Field
The invention relates to the technical field of precision machining, belongs to the technical field of ultraprecise motion control of ultraprecise numerical control machines and high-end electromechanical equipment, and particularly relates to a large-stroke high-precision micro-control servo feeding system.
Background
The precision and ultra-precision machining technology becomes a technical support for national defense and high and new technology development, and along with the update of products, the requirement of many high-tech products on the machining precision of parts is higher and higher, so the requirement on the performance index of precision and ultra-precision machine tools is also gradually improved. However, one of the key technical bottlenecks of such high-precision motion control is how to accurately, stably and reliably realize the micro-feeding control of the tool or the workpiece during the machining process.
Due to the influence of the low-speed crawling phenomenon, a conventional electromechanical transmission system is not suitable any more, and the current strategy for realizing micro-displacement control mainly obtains micro-displacement according to the physical properties of intelligent materials, such as magnetostriction, electrostriction, thermotropic expansion, mechanical force micro-deformation and the like. Compared with a ball screw pair, the sliding screw pair is simple to process and low in manufacturing cost, but because no ball exists between the screw and the nut, the contact between the screw and the nut is surface contact, the friction force is large, the sliding screw pair is generally used in low-speed occasions, when the speed is too low, the low-speed crawling phenomenon of the sliding screw pair caused by the large friction force is more obvious, and the application of the sliding screw pair in high-precision processing is severely limited.
Disclosure of Invention
The invention provides a large-stroke micro-motion control servo feeding system applied to a sliding lead screw and an implementation method thereof, provides a differential dual-drive sliding lead screw high-precision micro-feeding servo system, and realizes precise micro-displacement control in ultra-precision and high-precision machining. The method can be widely used in fields of accurate positioning, tracking, detection and the like under various high-end accurate numerical control equipment and high-accuracy motion control.
the technical scheme adopted by the invention is as follows:
A large-stroke high-precision micro-control servo feeding system comprises a first servo motor, a second servo motor, a sliding lead screw pair, a displacement detection device, a position feedback module, a CNC motion controller, a displacement sensor and a PC (personal computer);
the first servo motor is arranged at one end of a screw rod of the sliding screw rod pair and drives the screw rod to rotate, the second servo motor adopts a hollow shaft direct drive motor, the hollow shaft direct drive motor is sleeved on the screw rod and connected with a nut of the sliding screw rod pair to drive the nut to rotate, and the first servo motor and the second servo motor are respectively driven by a set of servo drive system;
The worktable is fixedly arranged on a nut bearing of the sliding lead screw pair through a nut bearing seat, the displacement detection device detects the displacement of the worktable and sends a detected displacement signal to the position feedback module; the position feedback module feeds back signals to the CNC motion controller; the CNC motion controller distributes commands for enabling the first servo motor and the second servo motor to the servo driving systems of the two motors according to a set algorithm and a given motion requirement of the PC; and the micro-feeding control of the workbench is realized by the synthesis of the two rotary motions of the sliding lead screw and the nut.
as a further technical proposal, the sliding screw pair is a nut driving type structure and comprises a screw, a nut and a nut bearing component; the nut is matched with the lead screw, the inner ring of the nut bearing component is the lead screw nut, the outer ring of the nut bearing component is the connecting flange, the end face of the connecting flange is provided with a mounting threaded hole, and the connecting flange is fixedly mounted with the nut bearing seat.
As a further technical scheme, two rows of balls in the nut bearing part are arranged back to back, so that the nut bearing can bear axial force and radial force; the end face of the sliding lead screw nut is provided with uniformly distributed screw holes and is connected with an output shaft of the hollow shaft direct drive motor through a bolt.
As a further technical scheme, the second servo motor is fixedly connected to the workbench supporting seat, and linear movement of the workbench is achieved through transmission of the second servo motor and screw transmission of the screw nut pair.
As a further technical scheme, the lead screw adopts a mounting mode of fixing a support, one end close to the first servo motor is restrained and positioned by a lead screw fixing seat, and a pair of angular contact ball bearings are arranged in the lead screw fixing seat; a deep groove ball bearing which is used for radial positioning and is free in the axial direction is arranged in the supporting seat at one end far away from the first servo motor.
As a further technical scheme, the ultra-precise micro-feeding servo driving system structure can construct a single-shaft micro-motion ultra-precise servo workbench, a double-shaft linkage ultra-precise servo workbench and a multi-shaft linkage ultra-precise servo workbench.
as a further technical solution, the servo driving system of the first servo motor includes a first position loop controller, a first speed loop controller, a first current loop controller, a first comparator, a second comparator and a third comparator;
The positive phase input end of the first comparator is connected with the CNC controller, the negative phase input end of the first comparator is connected with the displacement sensor, and the output end of the first comparator is connected with the first position loop controller;
The output end of the first position loop controller is connected with the positive phase input end of a second comparator, the negative phase input end of the first position loop controller is connected with the speed sensor, and the output end of the second comparator is connected with the speed loop controller;
The output end of the first speed loop controller is connected with the positive phase input end of a third comparator, the negative phase input end of the third comparator is connected with the current sensor, and the output end of the third comparator is connected with the first current loop controller; and the output end of the first current loop controller controls the first servo motor to be connected.
as a further technical solution, the servo driving system of the second servo motor includes a second position loop controller, a second speed loop controller, a second current loop controller, a fourth comparator, a fifth comparator, a sixth comparator, a seventh comparator and an eighth comparator;
two input ends of the seventh comparator are connected with the output end of the CNC controller, the output end of the seventh comparator is connected with the positive phase input end of the eighth comparator, the other positive phase input end of the eighth comparator is connected with a displacement detection device for detecting the displacement of the workbench, and the output end of the eighth comparator is connected with the positive phase input end of the fourth comparator; the inverting input end of the fourth comparator is connected with the CNC controller; the output end of the fourth comparator is connected with the second position loop controller;
the output end of the second position loop controller is connected with the positive phase input end of a fifth comparator, the negative phase input end of the fifth comparator is connected with the speed sensor, and the output end of the fifth comparator is connected with the second speed loop controller;
the output end of the second speed loop controller is connected with the positive phase input end of a sixth comparator, the negative phase input end of the sixth comparator is connected with the current sensor, and the output end of the sixth comparator is connected with the second current loop controller; and the output end of the second current loop controller controls the second servo motor to be connected.
Two first comparators (position comparators) of the drive nut and the screw rod are connected with a differential comparator (a seventh comparator); the position signal of the screw rod is different from the position signal detected by the workbench position detector, and the position error is compensated by changing the movement of the nut, so that the ideal position is obtained.
as a further technical scheme, the invention also provides a control method of the large-stroke high-precision micro-nano motion control servo feeding system, which comprises the following steps:
step 1, constructing a mathematical model of full closed-loop control of a screw rod driving system and a nut driving system according to the specific structure and inherent properties of the dual-drive servo system;
Step 2, performing servo drive simulation according to the constructed mathematical model, and adjusting and setting PID parameters of each link of the obtained position, speed and current;
and 3, interpolating and distributing respective control instructions of the screw motor and the nut motor by the motion controller, respectively sending interpolation and distribution instructions to a servo system of the servo motor through setting of parameters of the PC, and adjusting the parameters on line in real time by the motion controller to ensure that the speed and acceleration and deceleration change curves of the whole control system are continuously and accurately synthesized through the motion of the screw transmission pair machine, so that the workbench can obtain high-resolution micro-feeding.
As a further technical scheme, the control method of the large-stroke high-precision micro-nano motion control servo feeding system is characterized in that under the control of a CNC motion controller by a PC (personal computer), the control method has multiple working modes, namely single-screw driving, single-nut driving and double-screw and nut driving; different working performances are provided under different driving modes, and the working requirements of different occasions are met.
the invention has the following beneficial effects:
Compared with a rolling screw pair, the sliding screw pair has a simple structure and low manufacturing cost, but the screw is in surface contact with the nut, so that the friction force is large, the sliding screw pair is generally used in occasions with low-speed motion, and when the sliding screw is operated in extremely low-speed occasions, the low-speed crawling phenomenon is easily generated in low-speed motion due to the large friction force between the screw and the nut, so that the application of the sliding screw pair in high-precision machining is severely limited; the invention provides a differential dual-drive large-stroke high-precision micro-feeding servo system based on a self-designed nut-driven sliding screw pair, and the servo system further improves the feeding precision during low-speed operation on the basis of the original single-motor-driven sliding screw pair, and meets the motion requirements of large-stroke and ultra-precision micro-feeding.
The invention ensures that the two motors of the driving screw rod and the driving nut avoid a low-speed working area which is easy to generate creeping crawling and is determined by the inherent property of materials, and work in two higher rotating speed areas with almost equal rotating speed and same steering. Compared with the conventional single-motor-driven sliding lead screw pair, the invention has the advantages that the crawling speed of the feeding system is lower, so that the system can achieve higher precision. Meanwhile, the invention can form a single-shaft and double-shaft high-precision motion control platform and can be widely applied to high-end numerical control electromechanical equipment in various industries and various high-precision machining, positioning, tracking and detecting occasions.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application.
FIG. 1 is a schematic diagram of a high-precision micro-feeding servo system and a control method thereof according to the present invention;
FIG. 2 is a structural diagram of a sliding lead screw dual-drive workbench provided by the invention;
FIG. 3 is a structural view of an integrated nut-driven sliding lead screw assembly according to the present invention;
FIG. 4 is a cross-sectional view of the sliding lead screw dual drive workbench according to the present invention;
In the figure: 1-CNC motion controller; 2-a screw motor servo drive system; 21 — a position loop controller; 22-speed loop controller; 23-a current loop controller; 24-position comparator, 25-speed comparator, 26-current comparator;
3, a nut motor servo driving system; 31 — position loop controller; 32-speed loop controller; 33-current loop controller; 34-position comparator, 35-speed comparator, 36-current comparator; 37-differential comparator; 38-differential position comparator;
4-sliding lead screw double-drive workbench; 401-screw servo motor; 402-a coupling; 403-front end support bearing of screw rod; 404-integrated nut-driven sliding lead screw pair; 4041-nut bearing outer ring; 4042-nut bearing ball; 4043-sliding lead screw nut; 405-a connecting flange; 406-nut servo motor; 407-sliding screw rod; 408-a base; 409-supporting a bearing at the rear end of the screw rod; 410 — position detection means; 411-rail slide; 412-motor connection seat; 413 — a workbench; 414-nut bearing seat.
Detailed Description
it should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
it is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an", and/or "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof;
for convenience of description, the words "up", "down", "left" and "right" in the present invention, if any, merely indicate correspondence with up, down, left and right directions of the drawings themselves, and do not limit the structure, but merely facilitate the description of the invention and simplify the description, rather than indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
The term explains that the 'large stroke' in the invention means that the whole stroke of the ball screw is more than 100mm and can be expanded to about 1.5-2 m. "high precision" means a displacement resolution of about 0.01 μm to 1 nm.
As introduced in the background art, compared with a ball screw pair, a sliding screw pair in the prior art has simple processing and low manufacturing cost, but because no ball exists between a screw and a nut, the contact between the screw and the nut is surface contact, the friction force is large, generally, the sliding screw pair is mostly used in low-speed occasions, when the speed is too low, the low-speed crawling phenomenon of the sliding screw pair caused by the large friction force is more obvious, and the application of the sliding screw pair in high-precision processing is severely limited. In order to solve the technical problem, the application provides a large-stroke and high-precision micro-control servo feeding system.
in order to make the present invention more clear, the present invention is further explained and explained in detail with reference to the attached drawings as shown in fig. 1 and 2, but the present invention is not limited thereto.
As shown in fig. 1, the schematic diagram of a large-stroke high-precision micro-motion control servo feeding system comprises a servo control system 1, a screw motor servo driving system 2, a nut motor servo driving system 3 and a differential dual-drive worktable 4; the system can form a single-shaft and double-shaft ultra-precise motion control platform and is suitable for high-end numerical control electromechanical equipment in various industries and high-precision machining, positioning, tracking and detecting occasions.
the differential dual-drive workbench 4 comprises a mechanical transmission system, and the mechanical transmission system comprises a nut-driven sliding screw pair and a hollow shaft direct-drive motor for transmission;
the nut-driven sliding screw pair is composed of a sliding screw 407, a sliding screw nut 4043 (which is used as a nut bearing inner ring), a nut bearing ball 4042 and a nut bearing outer ring 4041, and the sliding screw nut 4043 inner surface and the sliding screw 407 form a sliding screw transmission pair; the outer surface of the sliding lead screw nut 4043, the nut bearing ball 4042 and the nut bearing outer ring 4041 form a bearing revolute pair,
The end surface of the sliding lead screw nut 4043 is provided with a screw hole; which is connected to the motor rotor via a connection flange 405.
two rows of balls in the nut bearing are arranged back to back, so that the nut bearing can bear axial force and radial force.
the nut bearing outer ring 4041 is of a flange structure, and the end face of the nut bearing outer ring 4041 is provided with a screw hole which is connected with the nut bearing block 414 through a bolt; the nut bearing block 414 is fixedly connected with the worktable.
Wherein the lead screw motor 401 is connected with a sliding lead screw 407 through a coupler 402; the other nut motor is a hollow shaft motor, the screw rod passes through the hollow shaft of the hollow shaft motor, the motor rotor of the screw rod is connected with the end surface of the nut through a connecting flange 405 so as to drive the nut to rotate, and the front end and the rear end of the nut motor are fixedly arranged below the workbench 413 through a motor base 412. The screw and the nut rotate simultaneously to drive the worktable 413 to move linearly.
one end of the displacement detection sensor 410 is connected to the table 413; the other end is connected to a differential position comparator 36.
The servo driving system comprises a screw motor servo driving system and a nut motor servo driving system and is used for generating signals by adopting a PID algorithm according to the received control signals and the feedback signals and respectively driving the servo motors. The movement generated by the rotation of the screw rod and the nut is superposed and synthesized to drive the worktable to move;
as shown, the screw motor servo drive system includes a position loop controller 21, a speed loop controller 22, a current loop controller 23, a position comparator 24, a speed comparator 25, and a current comparator 26;
the positive phase input end of the position comparator 24 is connected with the CNC motion controller, the negative phase input end of the position comparator 24 is connected with the displacement sensor on the screw rod servo motor 401, and the output end of the position comparator 24 is connected with the position loop controller 21;
The output end of the position loop controller 21 is connected with the positive phase input end of a speed comparator 25, the negative phase input end of the position loop controller is connected with a speed sensor, and the output end of the speed comparator 25 is connected with a speed loop controller 22;
the output end of the speed loop controller 22 is connected with the positive phase input end of the current comparator 26, the negative phase input end is connected with the current sensor, and the output end of the current comparator 26 is connected with the current loop controller 23; the output end of the current loop controller 23 controls the connection of the screw rod servo motor 401.
As shown, the nut motor servo drive system includes a position loop controller 31; a speed loop controller 32; a current loop controller 33; a position comparator 34, a speed comparator 35, a current comparator 36; a differential comparator 37; a differential position comparator 38;
two input ends of the differential comparator 37 are connected with the output end of the CNC motion controller, the output end of the differential comparator 37 is connected with the positive phase input end of the differential position comparator 38, the positive phase input end of the differential position comparator 38 is connected with the displacement detecting device for detecting the displacement of the workbench, and the output end of the differential position comparator 38 is connected with the positive phase input end of the position comparator 34; the inverting input end of the position comparator 34 is connected with the CNC motion controller; the output end of the position comparator 34 is connected with the position ring controller 31;
the output end of the position loop controller 31 is connected with the positive phase input end of a speed comparator 35, the negative phase input end of the position loop controller is connected with a speed sensor, and the output end of the speed comparator 35 is connected with a speed loop controller 32;
The output end of the speed loop controller 32 is connected with the positive phase input end of a current comparator 36, the negative phase input end of the speed loop controller is connected with a current sensor, and the output end of the current comparator 36 is connected with a current loop controller 33; the output end of the current loop controller 33 controls the connection of the nut servo motor.
One end of the two position comparators is connected with the CNC motion controller 1; the position comparator compares the position information with the position of the screw motor and outputs the information to the position control loop circuit.
The position comparator of the drive nut 4043 and the sliding lead screw 407 is connected to a differential comparator. The position signal of the screw rod is different from the position signal detected by the workbench position detector, and the position error is compensated by changing the motion of a screw rod motor or a nut motor, so that the ideal position is obtained.
The motion controller of the invention is provided with two output ends which are respectively connected with the non-inverting input ends of the position comparators of the two servo systems, and the two output ends are connected with the non-inverting input end and the inverting input end of the differential comparator.
The speed detector is connected with the inverting input end of the speed comparator, the output end of the position loop controller is connected with the speed comparator, the output end of the speed comparator is connected with the speed loop controller, and the speed comparator compares the input speed information with the fed back speed information and feeds the compared speed information back to the speed loop controller.
The current detector is connected with the current comparator, the output end of the position loop controller is connected with the speed comparator, the output end of the current comparator is connected with the speed loop controller, and the current comparator compares the input current information with the feedback current information and then feeds the current information back to the current loop controller.
The PC is connected with the CNC motion controller 1. The PC sends commands to the motion controller 1 according to the actual work requirements. The CNC motion controller 1 distributes motion commands to the screw servo motor 401 and the nut servo motor 406 according to a certain algorithm according to actual working requirements.
the two servo motor driving systems respectively comprise a position control circuit, a speed control circuit, a current control circuit and corresponding comparators.
Two output ends of the CNC motion controller 1 are respectively connected with position comparators of two servo motors, and the two output ends are connected with the differential comparator.
In combination with the above embodiments, the lead screw 407 is mounted in a "fixed-support" manner, one end of the lead screw 407 close to the servo motor 401 is constrained and positioned by a lead screw fixing seat, and a pair of angular contact ball bearings are mounted in the lead screw 407 fixing seat, and a deep groove ball bearing for radial positioning and axial freedom is mounted in a supporting seat at one end of the lead screw 407 far from the servo motor.
In combination with the above embodiments, the ultra-precise micro-feeding servo driving system structure can construct a single-axis micro-nano resolution ultra-precise servo workbench, a double-axis linkage ultra-precise servo workbench, and a multi-axis linkage ultra-precise servo workbench.
In combination with the above embodiments, the control method for controlling the servo feeding system by the large-stroke high-precision micro-nano motion is characterized by comprising the following steps:
step 1, constructing a mathematical model of full closed-loop control of a screw rod 2 driving system and a nut 3 driving system according to the specific structure and inherent properties of the dual-drive servo system;
step 2, performing servo drive simulation according to the constructed mathematical model, and adjusting and setting PID parameters of each link of the obtained position, speed and current;
and 3, interpolating and distributing respective control instructions of the screw motor 2 and the nut motor 3 according to the motion controller 1, respectively sending interpolation and distribution instructions to a servo system of the servo motor through setting of parameters of the PC, and adjusting the parameters on line in real time by the motion controller to enable the workbench to obtain high-resolution micro-feeding.
the control method of the large-stroke high-precision micro-nano motion control servo feeding system is characterized in that under the control of the CNC motion controller 1 by the PC, the control method has multiple working modes, namely single screw rod driving, single nut driving and double screw rod and nut driving. Different working performances are provided under different driving modes, and the working requirements of different occasions are met.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (9)

1. a large-stroke high-precision micro-control servo feeding system is characterized by comprising a first servo motor, a second servo motor, a sliding lead screw pair, a displacement detection device, a position feedback module, a CNC motion controller and a PC (personal computer);
The first servo motor is arranged at one end of a screw rod of the sliding screw rod pair and drives the screw rod to rotate, the second servo motor adopts a hollow shaft direct drive motor, the hollow shaft direct drive motor is sleeved on the screw rod and connected with a nut of the sliding screw rod pair to drive the nut to rotate, and the first servo motor and the second servo motor are respectively driven by a set of servo drive system;
the worktable is fixedly arranged on a nut bearing of the sliding lead screw pair through a nut bearing seat, the displacement detection device detects the displacement of the worktable and sends a detected displacement signal to the position feedback module; the position feedback module feeds back signals to the CNC motion controller; the CNC motion controller distributes commands for enabling the first servo motor and the second servo motor to the servo driving systems of the two servo motors according to a set algorithm and a given motion requirement of the PC; and the micro-feeding control of the workbench is realized by the synthesis of the two rotary motions of the sliding lead screw and the nut.
2. The large-stroke high-precision micro-control servo feeding system as claimed in claim 1, wherein the sliding screw pair is a nut-driven type structure comprising a screw, a nut, and a nut bearing member; the nut is matched with the lead screw, the inner ring of the nut bearing component is the lead screw nut, the outer ring of the nut bearing component is of a flange structure, the end face of the connecting flange is provided with a mounting threaded hole, and the connecting flange is fixedly mounted with the nut bearing seat.
3. The large-stroke high-precision micro-control servo feeding system as claimed in claim 2, wherein two rows of balls in the nut bearing part are arranged back to back, so that the nut bearing can bear both axial force and radial force; the end face of the sliding lead screw nut is provided with uniformly distributed screw holes and is connected with an output shaft of the hollow shaft direct drive motor through a bolt.
4. The large-stroke high-precision micro-control servo feeding system as claimed in claim 2, wherein the lead screw is mounted in a manner of fixing a support, one end close to the first servo motor is restrained and positioned by a lead screw fixing seat, and a pair of angular contact ball bearings are arranged in the lead screw fixing seat; a deep groove ball bearing which is used for radial positioning and is free in the axial direction is arranged in the supporting seat at one end far away from the first servo motor.
5. the large-stroke high-precision micro-control servo feed system as claimed in claim 1, wherein the large-stroke high-precision micro-control servo feed system is capable of constructing a single-shaft micro-motion ultra-precise servo table, a double-shaft linkage ultra-precise servo table and a multi-shaft linkage ultra-precise servo table.
6. The large-stroke high-precision micro-control servo feeding system as claimed in claim 1, wherein the servo driving system of the first servo motor comprises a first position loop controller, a first speed loop controller, a first current loop controller, a first comparator, a second comparator and a third comparator;
The positive phase input end of the first comparator is connected with the CNC motion controller, the negative phase input end of the first comparator is connected with the displacement sensor, and the output end of the first comparator is connected with the first position loop controller;
The output end of the first position loop controller is connected with the positive phase input end of a second comparator, the negative phase input end of the first position loop controller is connected with the speed sensor, and the output end of the second comparator is connected with the speed loop controller;
the output end of the first speed loop controller is connected with the positive phase input end of a third comparator, the negative phase input end of the third comparator is connected with the current sensor, and the output end of the third comparator is connected with the first current loop controller; and the output end of the first current loop controller controls the first servo motor to be connected.
7. the large-stroke high-precision micro-control servo feeding system as claimed in claim 1, wherein the servo driving system of the second servo motor comprises a second position loop controller, a second speed loop controller, a second current loop controller, a fourth comparator, a fifth comparator, a sixth comparator, a seventh comparator and an eighth comparator;
two input ends of the seventh comparator are connected with the output end of the CNC motion controller, the output end of the seventh comparator is connected with the positive phase input end of the eighth comparator, the other positive phase input end of the eighth comparator is connected with a displacement detection device for detecting the displacement of the workbench, and the output end of the eighth comparator is connected with the positive phase input end of the fourth comparator; the inverting input end of the fourth comparator is connected with the CNC motion controller; the output end of the fourth comparator is connected with the second position loop controller;
The output end of the second position loop controller is connected with the positive phase input end of a fifth comparator, the negative phase input end of the fifth comparator is connected with the speed sensor, and the output end of the fifth comparator is connected with the second speed loop controller;
The output end of the second speed loop controller is connected with the positive phase input end of a sixth comparator, the negative phase input end of the sixth comparator is connected with the current sensor, and the output end of the sixth comparator is connected with the second current loop controller; and the output end of the second current loop controller controls the second servo motor to be connected.
8. The control method of the large-stroke high-precision micro-nano motion control servo feeding system according to any one of claims 1 to 7, characterized by comprising the following steps:
Step 1, constructing a mathematical model of full closed-loop control of a screw rod driving system and a nut driving system according to the specific structure and inherent properties of a dual-drive servo system;
Step 2, performing servo drive simulation according to the constructed mathematical model, and adjusting and setting PID parameters of each link of the obtained position, speed and current;
And 3, interpolating and distributing respective control instructions of the screw motor and the nut motor according to the CNC motion controller, respectively sending interpolation distribution instructions to servo systems of the two servo motors through setting of parameters of the PC, and adjusting the parameters on line in real time by the CNC motion controller to enable the speed and acceleration and deceleration change curves of the whole control system to be continuously and accurately synthesized through the motion of the screw spiral transmission pair machine, so that the workbench can obtain high-resolution micro-feeding.
9. The control method of the large-stroke high-precision micro-nano motion control servo feeding system according to claim 8, characterized by comprising the following steps:
Under the control of a CNC motion controller by a PC (personal computer), the device has multiple working modes, namely single-screw-rod drive, single-nut drive and double-screw-rod and nut drive.
CN201910726999.0A 2019-08-07 2019-08-07 Large-stroke high-precision micro-control servo feeding system and control method Pending CN110554662A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910726999.0A CN110554662A (en) 2019-08-07 2019-08-07 Large-stroke high-precision micro-control servo feeding system and control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910726999.0A CN110554662A (en) 2019-08-07 2019-08-07 Large-stroke high-precision micro-control servo feeding system and control method

Publications (1)

Publication Number Publication Date
CN110554662A true CN110554662A (en) 2019-12-10

Family

ID=68737104

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910726999.0A Pending CN110554662A (en) 2019-08-07 2019-08-07 Large-stroke high-precision micro-control servo feeding system and control method

Country Status (1)

Country Link
CN (1) CN110554662A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113464618A (en) * 2021-07-01 2021-10-01 扬州市职业大学(扬州市广播电视大学) High-precision lead screw adjusting structure
CN113670563A (en) * 2021-10-21 2021-11-19 中国空气动力研究与发展中心低速空气动力研究所 Four-degree-of-freedom movement measurement device, control system and method for PIV system
CN114082460A (en) * 2021-11-26 2022-02-25 山东大学 Frame type sawing processing experiment table and control method thereof
CN114408150A (en) * 2022-01-26 2022-04-29 重庆大学 Electric steering engine based on dual-motor drive and control system and control method thereof
CN115276497A (en) * 2022-08-03 2022-11-01 魅杰光电科技(上海)有限公司 Motion system for wafer detection and control method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202491128U (en) * 2011-12-16 2012-10-17 纽威数控装备(苏州)有限公司 Lead screw extension device for numerically controlled machine tool
CN103128587A (en) * 2013-03-27 2013-06-05 哈尔滨工业大学 Ultra-precision large-stroke cutter micro-motion feeding device based on ultrasonic motor
CN104493617A (en) * 2014-12-19 2015-04-08 无锡大龙马数控机床制造有限责任公司 Z-axis feed system
CN104714485A (en) * 2015-02-12 2015-06-17 山东大学 Novel high-precision micro-feeding servo system and control method thereof
CN105729141A (en) * 2016-04-08 2016-07-06 武汉理工大学 Precise linear two-dimensional double-drive workbench based on control of open numerical-control system
CN206180761U (en) * 2016-10-19 2017-05-17 帝悦精密科技(苏州)有限公司 Orthoscopic electric servo cylinder
CN207930370U (en) * 2017-11-30 2018-10-02 辽沈工业集团有限公司 A kind of feed arrangement

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202491128U (en) * 2011-12-16 2012-10-17 纽威数控装备(苏州)有限公司 Lead screw extension device for numerically controlled machine tool
CN103128587A (en) * 2013-03-27 2013-06-05 哈尔滨工业大学 Ultra-precision large-stroke cutter micro-motion feeding device based on ultrasonic motor
CN104493617A (en) * 2014-12-19 2015-04-08 无锡大龙马数控机床制造有限责任公司 Z-axis feed system
CN104714485A (en) * 2015-02-12 2015-06-17 山东大学 Novel high-precision micro-feeding servo system and control method thereof
CN105729141A (en) * 2016-04-08 2016-07-06 武汉理工大学 Precise linear two-dimensional double-drive workbench based on control of open numerical-control system
CN206180761U (en) * 2016-10-19 2017-05-17 帝悦精密科技(苏州)有限公司 Orthoscopic electric servo cylinder
CN207930370U (en) * 2017-11-30 2018-10-02 辽沈工业集团有限公司 A kind of feed arrangement

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113464618A (en) * 2021-07-01 2021-10-01 扬州市职业大学(扬州市广播电视大学) High-precision lead screw adjusting structure
CN113670563A (en) * 2021-10-21 2021-11-19 中国空气动力研究与发展中心低速空气动力研究所 Four-degree-of-freedom movement measurement device, control system and method for PIV system
CN113670563B (en) * 2021-10-21 2022-02-22 中国空气动力研究与发展中心低速空气动力研究所 Four-degree-of-freedom movement measurement device, control system and method for PIV system
CN114082460A (en) * 2021-11-26 2022-02-25 山东大学 Frame type sawing processing experiment table and control method thereof
CN114408150A (en) * 2022-01-26 2022-04-29 重庆大学 Electric steering engine based on dual-motor drive and control system and control method thereof
CN114408150B (en) * 2022-01-26 2024-04-26 重庆大学 Electric steering engine based on double-motor driving and control system and control method thereof
CN115276497A (en) * 2022-08-03 2022-11-01 魅杰光电科技(上海)有限公司 Motion system for wafer detection and control method thereof
CN115276497B (en) * 2022-08-03 2024-03-01 魅杰光电科技(上海)有限公司 Motion system for wafer detection and control method thereof

Similar Documents

Publication Publication Date Title
CN110554659B (en) Large-stroke high-precision micro-nano motion servo feeding system
CN110554662A (en) Large-stroke high-precision micro-control servo feeding system and control method
Zhu et al. Design and adaptive terminal sliding mode control of a fast tool servo system for diamond machining of freeform surfaces
Huo et al. Design of a five-axis ultra-precision micro-milling machine—UltraMill. Part 1: holistic design approach, design considerations and specifications
US20230250501A1 (en) Robot machining system and control method for ultrasonic surface rolling process of aircraft engine blade
Weck et al. Parallel kinematic machine tools–current state and future potentials
CN104714485B (en) A kind of novel high-precision trace feed servo-system and control method
CN2900074Y (en) Processing cutter mechanism capable of telescopically feeding
CN107932522B (en) Five degree of freedom optical fabrication equipment and its working method
JPH1110575A (en) Parallel link mechanism
JP2023504706A (en) multi-axis turntable
CN101157183B (en) Accurate servo drive device of turning cutting tool with two freedoms
CN110549151B (en) Track guide rail driving micro-feeding servo system and synchronous control method
Imai et al. Local actuator module for highly accurate micro-EDM
CN115194737A (en) Differential type six-freedom-degree parallel micro-motion platform
CN104269191A (en) Parallel mechanism driven by hydraulic servo system and piezoelectric ceramic actuators
CN106346461B (en) A kind of SERVO CONTROL 3D drawing robot
Fujita et al. Dynamic characteristics and dual control of a ball screw drive with integrated piezoelectric actuator
Dong et al. Development of a high-speed 3-axis machine tool using a novel parallel-kinematics XY table
CN103008694B (en) High-precision air floatation electric main shaft
CN109940566B (en) Planar linear displacement driving device and control method thereof
CN113386015B (en) Multi-axis motion and series manipulator compound drive four-mirror polishing machine tool
CN109108671A (en) One kind is for processing five axis series-parallel machine tool of tubular components
Ito et al. Micro turning system: a super small cnc precision lathe for microfactories
AbdelHamid et al. Low cost xy core positioning system using stepper motor

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20191210

RJ01 Rejection of invention patent application after publication