CN105291090A - Parallel type macro-micro high-precision movement platform - Google Patents
Parallel type macro-micro high-precision movement platform Download PDFInfo
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Abstract
The invention belongs to the technical field of machine designing and manufacturing and particularly relates to a parallel type macro-micro high-precision movement platform. The parallel type macro-micro high-precision movement platform is characterized in that a first linear driving system and a second linear driving system are parallel to each other and are symmetrically fixed to the front side and the rear side of the plane of a base (1) respectively; a terminal platform (2) is in a Y shape, and the three top ends of the terminal platform are connected with one ends of three identical branched chains respectively; the other end of the first branched chain and the other end of the second branched chain are hinged to a first linear feeding platform (17); the other end of the third branched chain is hinged to a second linear feeding platform (35); the two linear feeding platforms are connected with linear guide rails of the systems of the two linear feeding platforms respectively through guide rail sliding blocks; linear grating rulers are parallel to the linear guide rails; a plane grating (54) is fixedly installed on the base (1); flexible hinge units are embedded into the branches chains; a pressure sensor is fixedly installed at the tail end of a piezoelectric ceramic actuator. According to the parallel type macro-micro high-precision movement platform, a flexible unit design mode of input decoupling is adopted, and the parallel type macro-micro high-precision movement platform has the characteristics of being high in movement precision and high in resolution ratio.
Description
Technical field
The invention belongs to machine design and manufacture technical field, be specifically related to the micro-high-precision motion platform of a kind of parallel type macro.
Background technology
Along with the development of modern science and technology, more and more urgent to the demand of the Large Scale Motion platform with high accuracy and resolution ratio, this kind of platform all has a wide range of applications in fields such as such as IC manufacturing equipment, Ultra-precision Turning and measurement, biomedical engineering, space flight and aviation.
Tradition large scale precision movement platform generally adopts the mode of driven by servomotor and precision ball screw transmission, also has the mode adopting linear motor direct drive.Inevitably there are gap, non-linear friction, temperature rise, wearing and tearing etc. in the drive disk assembly of this kind of motion platform, be therefore difficult to obtain very high kinematic accuracy, be generally all limited in micron level in motion process.Although can eliminate gap by carrying out pretension to ball-screw, and adopt air supporting support to reduce friction, this can improve the kinematic accuracy of platform to a certain extent, is still difficult to meet application demand.In order to solve the adverse effect that regular motion platform drive disk assembly occurs in motion process, there is flexure hinge mechanism.This kind of mechanism is completely by the material deformation transmission campaign of flexible hinge, therefore there is motion gapless, fretting wear, non-lubricating advantage, utilize piezoelectric actuator to drive simultaneously, its kinematic accuracy can reach Nano grade, is therefore used widely in ultraprecise field.But receive the restriction of material deformation maximum stress, the stroke of this kind of mechanism is very little, generally only has tens microns, is difficult to meet Large Scale Motion demand.
In order to meet Long Distances and high-precision movement needs simultaneously, there is macro/micromotion platform, whole system is made up of with fine motion two parts grand moving, wherein grand motivation structure can realize thick motion on a large scale, the kinematic error of micromotion mechanism bucking-out system realizes high-precision motion, thus effectively improve the resolution ratio of system, positioning precision and tracking accuracy, macro-micro dual-drive technology for realizing Long Distances, high-precision motion provides means effectively.Current grand microfluidic platform is all that the overlapped in series fine motion on single shaft or XY motion platform adopted drives platform, as the flexure hinge mechanism of above-mentioned Piezoelectric Ceramic.The grand microfluidic platform of this form can realize very high kinematic accuracy and resolution ratio within the scope of large scale, but the shortcomings such as bearing capacity is weak, intrinsic frequency is low, kinematic error coupling that the grand microfluidic platform of overlapped in series form also exists, can only be applicable to underloading, dynamic characteristic requires lower occasion.
Therefore how to design and have high accuracy and resolution ratio, and have high bearing capacity, the Large Scale Motion platform of excellent dynamic performance is having challenge and being badly in need of solution of a task.
Summary of the invention
To achieve these goals, the technical scheme that the present invention takes is as follows.
The micro-high-precision motion platform of a kind of parallel type macro, it is characterized in that, first linear drive system, the second linear drive system are parallel to each other respectively and are symmetrically fixed on both sides before and after the plane of pedestal 1, and the first side chain, the second side chain and the 3rd side chain are identical; Terminal platform 2 is placed between the first linear drive system and the second linear drive system, terminal platform 2 is Y-shaped, three tops are connected with one end of three side chains each via a turning cylinder respectively, the other end of the first side chain, the second side chain is hinged on the first straight-line feed platform 17 respectively by fixing rotating shaft, and the other end of the 3rd side chain is hinged on the second straight-line feed platform 35 by fixing rotating shaft; First straight-line feed platform 17 is connected with the line slideway in the first linear drive system by guide rail slide block, and the second straight-line feed platform 35 is connected with the line slideway in the second linear drive system by guide rail slide block; Two linear grating chis are parallel to the line slideway of the first linear drive system and the second linear drive system respectively; Pedestal 1 is installed with plane grating 54;
The grand of linear drive system moves the position with 2 of the fine motion control terminal platform of each side chain, after the positional value reached needed for given terminal platform 2, by the position-based routing of mechanism, obtain the movement position amount of the first straight-line feed platform 17 and the second straight-line feed platform 35 respectively, the amount of exercise of the first straight-line feed platform 17 is accurately measured by the first linear grating chi 19, the the first servomotor 4 kinematic error amount of the first straight-line feed platform 17 fed back on the first straight-line feed platform 17 carries out closed-loop compensatory control to ensure the movement position of the first straight-line feed platform 17, the amount of exercise of the second straight-line feed platform 35 is accurately measured by the second linear grating chi 37, and the second servomotor 22 kinematic error amount of the second straight-line feed platform 35 fed back on the second straight-line feed platform 35 carries out closed-loop compensatory control to ensure the movement position of the second straight-line feed platform 35, the kinematic error of terminal platform 2 can be measured by plane grating 54, utilize the piezoelectric actuator in each side chain to compensate this margin of error.
The concrete structure of described first linear drive system comprises the first servomotor supporting seat 3 and is fixed on the upper of pedestal 1; First servomotor 4 is fixedly mounted on the first servomotor supporting seat 3; First ball-screw 5 is connected by the rotating shaft of the first shaft coupling 6 with the first servomotor 4; First ball-screw 5 carries out support rotating in the one end near the first shaft coupling 6 by the first ball-screw fixed supporting seat 7 be fixed on pedestal 1, and the other end of the first ball-screw 5 carries out support rotating by the first ball-screw float support seat 8 be fixed on pedestal 1; First ball-screw 5 is socketed with the first feed screw nut 9, first feed screw nut seat 10 be fixedly connected with the first feed screw nut 9; The first line slideway 11 and the second line slideway 12 is furnished with respectively in the both sides of the first ball-screw 5, first line slideway 11 and the second line slideway 12 parallel with the first straight-line ball leading screw 5 axis respectively, and the first guide rail 11 is equal with the distance of the first ball-screw 5 with Distance geometry second line slideway 12 of the first ball-screw 5, the first line slideway 11 and the second line slideway 12 are fixedly installed on pedestal 1; First line slideway 11 is mounted with the first guide rail slide block 13 and the second guide rail slide block 14, the second line slideway 12 is mounted with the 3rd guide rail slide block 15 and the 4th guide rail slide block 16; First straight-line feed platform 17 is fixedly installed on the first guide rail slide block 13, second guide rail slide block 14, the 3rd guide rail slide block 15, the 4th guide rail slide block 16 and the first feed screw nut seat 10, the rotation of the first ball-screw 5 is by the axially-movable of driving first feed screw nut 9 along the first ball-screw 5, thus drive the first straight-line feed platform 17 to move by the first feed screw nut seat 10, outside the first straight-line feed platform 17, be installed with the first grating connecting plate 18; First grating reading head 20 of the first linear grating chi 19 is fixedly connected with the first grating connecting plate 18, and the first linear grating chi 19 is fixedly installed on pedestal 1, and parallels with the first ball-screw 5 axis.
The concrete structure of described second linear drive system comprises the second servomotor supporting seat 21 and is fixed on pedestal 1; Second servomotor 22 is fixedly mounted on the second servomotor supporting seat 21; Second ball-screw 23 is connected by the rotating shaft of the second shaft coupling 24 with the second servomotor 22; Second ball-screw 23 carries out support rotating in the one end near the second shaft coupling 24 by the second ball-screw fixed supporting seat 25 be fixed on pedestal 1, and the other end of the second ball-screw 23 carries out support rotating by the second ball-screw float support seat 26 be fixed on pedestal 1; Second ball-screw leading screw 23 is socketed with the second feed screw nut 27, second feed screw nut seat 28 be fixedly connected with the second feed screw nut 27; The 3rd line slideway 29 and the 4th line slideway 30 is furnished with respectively in the both sides of the second ball-screw 23,3rd line slideway 29 and the 4th line slideway 30 parallel with the second ball-screw 23 axis respectively, and the 3rd line slideway 29 is equal with the distance of the second ball-screw 23 with Distance geometry the 4th line slideway 30 of the second ball-screw 23, the 3rd line slideway 29 and the 4th line slideway 30 are fixedly installed on pedestal 1; 3rd line slideway 29 is mounted with the 5th guide rail slide block 31 and the 6th guide rail slide block 32, the 4th line slideway 30 is mounted with the 7th guide rail slide block 33 and the 8th guide rail slide block 34; Second straight-line feed platform 35 is fixedly installed on the 5th guide rail slide block 31, the 6th guide rail slide block 32, the 7th guide rail slide block 33, the 8th guide rail slide block 34 and the second feed screw nut seat 28, the rotation of the second ball-screw 23 by the axially-movable of driving second feed screw nut 27 along the second ball-screw 23, thus drives the second straight-line feed platform 35 to move by the first feed screw nut seat 28; The second grating connecting plate 36 is installed with outside the second straight-line feed platform 35; Second grating reading head 38 of the second linear grating chi 37 is fixedly connected with the second grating connecting plate, and the second linear grating chi 37 is fixedly installed on pedestal 1, and parallels with the second ball-screw 23 axis.
The first turning cylinder 40-1 on described first straight-line feed platform 17, first side chain, the second side chain, terminal platform 2 and the second turning cylinder 40-2 together constitutes parallel-crank mechanism, limit the rotational freedom of terminal platform 2, therefore terminal platform 2 only has the planar movement free degree.
The main part of described side chain is hinge base body 41-1; In hinge base body 41-1, include flexible unit, compensated by the fine motion of the control realization platform be out of shape it; Flexible unit drives platform 41-1-1, flexible unit terminal platform 41-1-2, rectangular flexible hinge first 41-1-3, rectangular flexible hinge second 41-1-4, rectangular flexible hinge third 41-1-5, rectangular flexible hinge fourth 41-1-6 with side chain matrix 41-1 axis perpendicular by flexible unit, and rectangular flexible hinge penta 41-1-7 paralleled with side chain matrix 41-1 axis forms jointly; Flexible unit drives platform 41-1-1 to be fixedly connected with hinge base body 41-1 by rectangular flexible hinge first 41-1-3, rectangular flexible hinge second 41-1-4; Flexible unit terminal platform 41-1-2 is fixedly connected with hinge base body 41-1 by rectangular flexible hinge third 41-1-5, rectangular flexible hinge fourth 41-1-6; Flexible unit drives platform 41-1-1 and flexible unit terminal platform 41-1-2 to be mutually permanently connected by rectangular flexible hinge penta 41-1-7; Piezoelectric actuator 42-1 drives platform 41-1-1 to be fixedly connected with by actuator connector 43-1 with flexible unit; Pressure sensor 44-1 is fixedly connected with the afterbody of piezoelectric actuator 42-1 by ring flange 45-1, and the axis of pressure sensor 44-1 and the axis of piezoelectric actuator 42-1 are consistent; The other end of pressure sensor 44-1 is fixedly connected with pretension seat 46-1; Pretension seat 46-1 is bolted to connection on side chain matrix 41-1, applies axial pretightening load by tools for bolts ' pretension to piezoelectric actuator 42-1; Gripper shoe 47-1 is covered in piezoelectric actuator 42-1, actuator connector 43-1, flexible unit drives directly over platform 41-1-1, rectangular flexible hinge first 41-1-3, rectangular flexible hinge second 41-1-4, rectangular flexible hinge penta 41-1-7 and be fixedly connected with hinge base body 41-1, and the matrix of high precision length meter 48-1 is fixed on gripper shoe 47-1 by friction top 49-1; The gauge head of length gauge 48-1 is fixed by sincere clamping unit 50-1 on gripper shoe 47-1, is parallel to each other with the axis of the gauge head axis and piezoelectric actuator 42-1 that ensure length gauge 48-1; Measuring pedestal 51-1 is fixedly installed on flexible unit terminal platform 41-1-2; The gauge head of length gauge 48-1 all the time with the mutual perpendicular contact of datum level measuring pedestal 51-1; The tail end of side chain matrix 41-1 is fixedly connected with balancing weight 52-1, to ensure side chain matrix 41-1 maintenance level and the coupling of movement inertia realized in motion process.
The lower end of described terminal platform 2 is fixedly connected with plane grating read head 53; Pedestal 1 is installed with plane grating 54; The spacing of 0.5mm is kept between plane grating read head 53 and plane grating 54; The light path of plane grating read head 53 must along the groove of plane grating 54, to ensure normal measurement and reading.
Beneficial effect:
1. the version of the parallel connection of macro/micromotion platform employing of the present invention, has the advantage that bearing capacity is large, dynamic characteristic is excellent, accumulate without kinematic error;
2. macro/micromotion platform of the present invention is directly transformed the side chain of conventional parallel institution, flexible hinge unit is embedded in original side chain, and the ACTIVE CONTROL of deflection is carried out by piezoelectric actuator, this controls the motion compensation that can realize terminal platform by the jogging motion of side chain on the one hand, the uncontrollable shortcoming of conventional parallel institution side chain deformation vibration can be solved again simultaneously, can realize high kinematic accuracy, and structure is also compacter than the grand microfluidic platform of cascade;
3. in the fine motion regulation and control side chain designed by the present invention, pressure sensor has been fixedly mounted at the tail end of piezoelectric actuator, this mounting means can be avoided increasing heavy moving parts because pressure sensor being fixedly installed in actuator front end, thus reduces the dynamic operation performance of platform; Pressure sensor can be used for the Real-Time Monitoring of side chain internal force simultaneously, and the dynamic operation accuracy compensation for implementing platform provides the information of more horn of plenty;
4. in the fine motion regulation and control side chain designed by the present invention, have employed the design of the flexible unit of input decoupling, ensure that piezoelectric actuator can not be subject to the impact of transverse load in motion process, thus the precision that improve motion control and the security guaranteeing in actuator running.
Accompanying drawing explanation
Fig. 1 is parallel type macro micro-high-precision movement platform and integrally structural representation in the specific embodiment of the invention;
Fig. 2 is linear drive system structural representation of the present invention;
Fig. 3 is branched fraction structural representation of the present invention;
Fig. 4 is the structural representation in side chain of the present invention in gripper shoe.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described in detail.
Fig. 1 is the grand micro-high-precision movement platform of parallel formula of the present invention, and Fig. 2 is linear drive system structural representation of the present invention, and as illustrated in fig. 1 and 2, the first linear feeding system is arranged in the left side of pedestal 1; The first servomotor supporting seat 3 is fixed with in one end, left side of pedestal 1; First servomotor 4 is fixedly mounted on the first servomotor supporting seat 3; First ball-screw 5 is connected by the rotating shaft of the first shaft coupling 6 with the first servomotor 4; First ball-screw 5 carries out support rotating in the one end near the first shaft coupling 6 by the first ball-screw fixed supporting seat 7 be fixed on pedestal 1, and the other end of the first ball-screw 5 carries out support rotating by the first ball-screw float support seat 8 be fixed on pedestal 1; First ball-screw 5 is socketed with the first feed screw nut 9, first feed screw nut seat 10 be fixedly connected with the first feed screw nut 9; The first line slideway 11 and the second line slideway 12 is furnished with respectively in the both sides of the first ball-screw 5, first line slideway 11 and the second line slideway 12 parallel with the first straight-line ball leading screw 5 axis respectively, and the first guide rail 11 is equal with the distance of the first ball-screw 5 with Distance geometry second line slideway 12 of the first ball-screw 5, the first line slideway 11 and the second line slideway 12 are fixedly installed on pedestal 1; First line slideway 11 is mounted with the first guide rail slide block 13 and the second guide rail slide block 14, the second line slideway 12 is mounted with the 3rd guide rail slide block 15 and the 4th guide rail slide block 16; First straight-line feed platform 17 is fixedly installed on the first guide rail slide block 13, second guide rail slide block 14, the 3rd guide rail slide block 15, the 4th guide rail slide block 16 and the first feed screw nut seat 10; The first grating connecting plate 18 is installed with outside the first straight-line feed platform 17; First grating reading head 20 of the first linear grating chi 19 is fixedly connected with the first grating connecting plate 18, and the first linear grating chi 19 is fixedly installed on pedestal 1, and parallels with the first ball-screw 5 axis.
Second linear feeding system is arranged symmetrically in the right side of pedestal 1, and is parallel to each other with described first linear feeding system; The second servomotor supporting seat 21 is fixed with in one end, right side of pedestal 1; Second servomotor 22 is fixedly mounted on the second servomotor supporting seat 21; Second ball-screw 23 is connected by the rotating shaft of the second shaft coupling 24 with the second servomotor 22; Second ball-screw 23 carries out support rotating in the one end near the second shaft coupling 24 by the second ball-screw fixed supporting seat 25 be fixed on pedestal 1, and the other end of the second ball-screw 23 carries out support rotating by the second ball-screw float support seat 26 be fixed on pedestal 1; Second ball-screw leading screw 23 is socketed with the second feed screw nut 27, second feed screw nut seat 28 be fixedly connected with the second feed screw nut 27; The 3rd line slideway 29 and the 4th line slideway 30 is furnished with respectively in the both sides of the second ball-screw 23,3rd line slideway 29 and the 4th line slideway 30 parallel with the second ball-screw 23 axis respectively, and the 3rd line slideway 29 is equal with the distance of the second ball-screw 23 with Distance geometry the 4th line slideway 30 of the second ball-screw 23, the 3rd line slideway 29 and the 4th line slideway 30 are fixedly installed on pedestal 1; 3rd line slideway 29 is mounted with the 5th guide rail slide block 31 and the 6th guide rail slide block 32, the 4th line slideway 30 is mounted with the 7th guide rail slide block 33 and the 8th guide rail slide block 34; Second straight-line feed platform 35 is fixedly installed on the 5th guide rail slide block 31, the 6th guide rail slide block 32, the 7th guide rail slide block 33, the 8th guide rail slide block 34 and the second feed screw nut seat 28; The second grating connecting plate 36 is installed with outside the second straight-line feed platform 35; Second grating reading head 38 of the second linear grating chi 37 is fixedly connected with the second grating connecting plate, and the second linear grating chi 37 is fixedly installed on pedestal 1, and parallels with the second ball-screw 23 axis.
One end of first side chain and the second side chain is hinged on the first straight-line feed platform 17 respectively by the fixing rotating shaft 39-2 of the first fixing rotating shaft 39-1 and second; The other end of the first side chain and the second side chain is hinged respectively by the side of the first turning cylinder 40-1 and the second turning cylinder 40-2 and terminal platform 2.One end of 3rd side chain is hinged on the second straight-line feed platform 35 by the 3rd fixing rotating shaft 39-3; The other end of the 3rd side chain is hinged by the opposite side of the 3rd turning cylinder 40-3 and terminal platform 2.The structure of these three side chains is identical, therefore the first straight-line feed platform 17, first side chain, the second side chain and terminal platform 2 together constitute parallel-crank mechanism, thus limit the rotational freedom of terminal platform 2, therefore terminal platform 2 only has the planar movement free degree.
As shown in Figure 3, for Article 1 side chain, described structure side chain composition is described below:
The main part of the first side chain is hinge base body 41-1; In hinge base body 41-1, include flexible unit, compensated by the fine motion of the control realization platform be out of shape it; This flexible unit drives platform 41-1-1, flexible unit terminal platform 41-1-2, rectangular flexible hinge first 41-1-3, rectangular flexible hinge second 41-1-4, rectangular flexible hinge third 41-1-5, rectangular flexible hinge fourth 41-1-6 with side chain matrix 41-1 axis perpendicular by flexible unit, and rectangular flexible hinge penta 41-1-7 paralleled with side chain matrix 41-1 axis forms jointly; Flexible unit drives platform 41-1-1 to be fixedly connected with hinge base body 41-1 by rectangular flexible hinge first 41-1-3, rectangular flexible hinge second 41-1-4; Flexible unit terminal platform 41-1-2 is fixedly connected with hinge base body 41-1 by rectangular flexible hinge third 41-1-5, rectangular flexible hinge fourth 41-1-6; Flexible unit drives platform 41-1-1 and flexible unit terminal platform 41-1-2 to be mutually permanently connected by rectangular flexible hinge penta 41-1-7; Piezoelectric actuator 42-1 drives platform 41-1-1 to be fixedly connected with by actuator connector 43-1 with flexible unit; Pressure sensor 44-1 is fixedly connected with the afterbody of piezoelectric actuator 42-1 by ring flange 45-1, and the axis of pressure sensor 44-1 and the axis of piezoelectric actuator 42-1 keep conllinear; The other end of pressure sensor 44-1 is fixedly connected with pretension seat 46-1; Pretension seat 46-1 is bolted to connection on side chain matrix 41-1, applies axial pretightening load by tools for bolts ' pretension to piezoelectric actuator 42-1; Gripper shoe 47-1 to be fixedly installed on hinge base body 41-1 and cover piezoelectric actuator 42-1, actuator connector 43-1, flexible unit drives directly over platform 41-1-1, rectangular flexible hinge first 41-1-3, rectangular flexible hinge second 41-1-4, rectangular flexible hinge penta 41-1-7; As shown in Figure 4, the matrix of high precision length meter 48-1 is fixed on gripper shoe 47-1 by friction top 49-1; The gauge head of length gauge 48-1 is fixed by sincere clamping unit 50-1 on gripper shoe 47-1, is parallel to each other with the axis of the gauge head axis and piezoelectric actuator 42-1 that ensure length gauge 48-1; Measuring pedestal 51-1 is fixedly installed on flexible unit terminal platform 41-1-2; The gauge head of length gauge 48-1 all the time with the mutual perpendicular contact of datum level measuring pedestal 51-1; The tail end of side chain matrix 41-1 is fixedly connected with balancing weight 52-1, to ensure side chain matrix 41-1 maintenance level and the coupling of movement inertia realized in motion process.
As shown in Figure 1, plane grating read head 53 is fixedly connected with in the lower end of terminal platform 2; Pedestal 1 is installed with plane grating 54; Keep the spacing of 0.5mm between plane grating read head 53 and plane grating 54, this spacing size ensure that plane grating 54 can normally work; Meanwhile, the light path of plane grating read head 53 must along the groove of plane grating 54, to ensure normal measurement and reading.
Details are as follows for the course of work of the micro-high-precision movement platform of parallel type macro of the present invention:
First in order to ensure that piezoelectric actuator in each side chain can not the effect of under tension in motion process, in order to avoid affect the precision of motion control and destroy actuator, need to apply axial pretightening load to each piezoelectric actuator.Be described in the axial pretightening load applying mode of piezoelectric actuator 42-1: the fastening bolt first unclamping pretension seat 46-1 two ends, and apply axial thrust at the afterbody of pretension seat 46-1, pressure size measured by observed pressure sensor 44-1, whether reach the size of the required axial pretightening load applied, by regulating the size of thrust until reach required prefastening load value, now tighten the fastening bolt on pretension seat 46-1.When after the axial pretightening completing piezoelectric actuator 42-1, by the axial deformation value zero setting of the side chain flexible unit measured by length gauge 48-1.
When completing the axial pretightening of piezoelectric actuator of all side chains, and after the Initialize installation of side chain deflection, just can carry out the motion control of platform.This parallel type macro micromotion platform is required, and what control is the position of 2 of terminal platform, and this position is jointly realized by the fine motion that is grand dynamic and each side chain of linear drive system.After the positional value reached needed for given terminal platform 2, by the position-based routing of mechanism, the movement position amount of the first straight-line feed platform 17 and the second straight-line feed platform 35 can be obtained respectively.Here for the first linear feeding system, the motion control process after the position quantity of acquisition first straight-line feed platform 17 is described: when after the position quantity by mechanism's inverse solution acquisition first linear feeding system platform 17, because the first straight-line feed platform 17 is fixedly connected with by the first feed screw nut seat 10 with the first feed screw nut 9, therefore the first straight-line feed platform 17 is identical with the position quantity of the first feed screw nut 9, and the axial location amount of the first feed screw nut 9 on the first ball-screw 5 requires the position control instruction that can be converted to the first servomotor 4, first servomotor 4 will rotate according to position control order-driven motor shaft, and drive the first ball-screw 5 to rotate by the first shaft coupling 6, the rotation of the first ball-screw 5 is by the axially-movable of driving first feed screw nut 9 along the first ball-screw 5, thus drive the first straight-line feed platform 17 to move by the first feed screw nut seat 10.Because the first grating reading head 20 of the first linear grating chi 19 is fixedly connected with on the first straight-line feed platform 17 by the first grating connecting plate 18, therefore the amount of exercise of the first straight-line feed platform 17 is accurately measured by the first linear grating chi 19, the kinematic error amount of the first straight-line feed platform 17 is fed back to the first servomotor 4 and carries out closed-loop compensatory control to ensure the movement position of the first straight-line feed platform 17.
The kinematic error of terminal platform 2 can be measured by plane grating 54, the piezoelectric actuator in each side chain is utilized to compensate this margin of error, the kinematic error fine motion compensation process of terminal platform 2 is described: the kinematic error amount of the terminal platform 2 first recorded by plane grating 54 carries out Inverse Kinematics Solution here for the first side chain, obtain the required amount of axial movement compensated of the first side chain, the output amount of exercise of this amount of axial movement just needed for the first side chain.According to required amount of exercise output valve, piezoelectric actuator 42-1 is utilized to drive the flexible unit in side chain matrix 41 to deform, and the deflection of the flexible unit in side chain matrix 41-1 is measured in real time by length gauge 48-1, the movement output margin of error is fed back to piezoelectric actuator 42-1 and carry out closed-loop compensatory control to ensure the axially-movable output quantity of the first side chain.Because the deformation energy of flexible unit realizes very high-precision control, and selected length gauge can realize Nano grade certainty of measurement, therefore on the grand dynamic basis of linear feeding system, utilizes the fine motion in side chain to compensate the high-precision movement that can realize terminal platform 2.In addition, in high dynamic running process, dynamics Controlling can be carried out in conjunction with the pressure sensor in each side chain, to ensure the dynamic property that platform is more excellent and higher dynamic trajectory tracking accuracy.
It should be noted that for where, motion process only considers the axial deflection of flexible unit in each side chain, and why not consider bending deformation quantity, here to be equally described for the first side chain: the rigidity first due to rectangular flexible hinge is very little compared to remainder, therefore in motion process, to neglect compared to rectangular flexible hinge the deflection that remainder occurs; In the first side chain motion process, because the first side chain two ends are carried out hinged respectively by the first fixing rotating shaft 39-1 and the first turning cylinder 40-1, its rotation friction is less, therefore the first side chain thinks one or two power bars, the effect of axial force is mainly subject in motion process, cross force and moment of flexure are very little, therefore ignore cross force and moment of flexure, and the flexible unit therefore in side chain matrix 41-1 mainly axial deformation occurs; In addition, the transversal arrangement of rectangular hinge first 41-1-3, rectangular hinge second 41-1-4, rectangular hinge third 41-1-5, rectangular hinge fourth 41-1-6, make the axial rigidity of the flexible unit in hinge base body 41-1 less, and lateral stiffness is comparatively large, therefore more easily there is axial deformation in motion process.Comprehensive above-mentioned reason, in fine motion compensates, only needs the axial deflection controlling flexible unit in each side chain.
In addition; drive between platform 41-1-1 and flexible unit terminal platform 41-1-2 in flexible unit and connected by rectangular flexible hinge penta 41-1-7; its main cause is to ensure when transverse direction or torsional deflection occur flexible unit terminal platform 41-1-2; rectangular flexible hinge penta 41-1-7 can absorb these displacements; and reduce the transverse load and the torque that drive platform 41-1-1 and piezoelectric actuator 42-1 connection in flexible unit, thus the security in the control accuracy of general protection piezoelectric ceramics 42-1 and the course of work.
Claims (6)
1. the micro-high-precision motion platform of parallel type macro, it is characterized in that, first linear drive system, the second linear drive system are parallel to each other respectively and are symmetrically fixed on both sides before and after the plane of pedestal (1), and the first side chain, the second side chain and the 3rd side chain are identical; Terminal platform (2) is placed between the first linear drive system and the second linear drive system, terminal platform (2) is Y-shaped, three tops are connected with one end of three side chains each via a turning cylinder respectively, the other end of the first side chain, the second side chain is hinged on the first straight-line feed platform (17) respectively by fixing rotating shaft, and the other end of the 3rd side chain is hinged on the second straight-line feed platform (35) by fixing rotating shaft; First straight-line feed platform (17) is connected with the line slideway in the first linear drive system by guide rail slide block, and the second straight-line feed platform (35) is connected with the line slideway in the second linear drive system by guide rail slide block; Two linear grating chis are parallel to the line slideway of the first linear drive system and the second linear drive system respectively; Pedestal (1) is installed with plane grating (54);
The position of (2) of the fine motion control terminal platform of grand dynamic and each side chain of linear drive system, after the positional value reached needed for given terminal platform (2), by the position-based routing of mechanism, obtain the movement position amount of the first straight-line feed platform (17) and the second straight-line feed platform (35) respectively, the amount of exercise of the first straight-line feed platform (17) is accurately measured by the first linear grating chi (19), the kinematic error amount of the first straight-line feed platform (17) the first servomotor (4) fed back on the first straight-line feed platform (17) is carried out closed-loop compensatory control to ensure the movement position of the first straight-line feed platform (17), the amount of exercise of the second straight-line feed platform (35) is accurately measured by the second linear grating chi (37), the kinematic error amount of the second straight-line feed platform (35) the second servomotor (22) fed back on the second straight-line feed platform (35) is carried out closed-loop compensatory control to ensure the movement position of the second straight-line feed platform (35), the kinematic error of terminal platform (2) can be measured by plane grating (54), utilize the piezoelectric actuator in each side chain to compensate this margin of error.
2. the micro-high-precision motion platform of a kind of parallel type macro according to claim 1, it is characterized in that, the concrete structure of described first linear drive system comprises the first servomotor supporting seat (3) and is fixed on the upper of pedestal (1), first servomotor (4) is fixedly mounted on the first servomotor supporting seat (3), first ball-screw (5) is connected by the rotating shaft of the first shaft coupling (6) with the first servomotor (4), first ball-screw (5) carries out support rotating in the one end near the first shaft coupling (6) by the first ball-screw fixed supporting seat (7) be fixed on pedestal (1), and the other end of the first ball-screw (5) carries out support rotating by the first ball-screw float support seat (8) be fixed on pedestal (1), first ball-screw (5) is socketed with the first feed screw nut (9), and the first feed screw nut seat (10) is fixedly connected with the first feed screw nut (9), the first line slideway (11) and the second line slideway (12) is furnished with respectively in the both sides of the first ball-screw (5), first line slideway (11) and the second line slideway (12) parallel with the first straight-line ball leading screw (5) axis respectively, and the first guide rail (11) is equal with the distance of the first ball-screw (5) with Distance geometry second line slideway (12) of the first ball-screw (5), the first line slideway (11) and the second line slideway (12) are fixedly installed on pedestal (1), first line slideway (11) is mounted with the first guide rail slide block (13) and the second guide rail slide block (14), the second line slideway (12) is mounted with the 3rd guide rail slide block (15) and the 4th guide rail slide block (16), first straight-line feed platform (17) is fixedly installed in the first guide rail slide block (13), second guide rail slide block (14), 3rd guide rail slide block (15), on 4th guide rail slide block (16) and the first feed screw nut seat (10), the rotation of the first ball-screw (5) is by the axially-movable of driving first feed screw nut (9) along the first ball-screw (5), thus drive the first straight-line feed platform (17) mobile by the first feed screw nut seat (10), the first grating connecting plate (18) is installed with in the first straight-line feed platform (17) outside, first grating reading head (20) of the first linear grating chi (19) is fixedly connected with the first grating connecting plate (18), first linear grating chi (19) is fixedly installed on pedestal (1), and parallels with the first ball-screw (5) axis.
3. the micro-high-precision motion platform of a kind of parallel type macro according to claim 1, it is characterized in that, the concrete structure of described second linear drive system comprises the second servomotor supporting seat (21) and is fixed on pedestal (1); Second servomotor (22) is fixedly mounted on the second servomotor supporting seat (21); Second ball-screw (23) is connected by the rotating shaft of the second shaft coupling (24) with the second servomotor (22); Second ball-screw (23) carries out support rotating in the one end near the second shaft coupling (24) by the second ball-screw fixed supporting seat (25) be fixed on pedestal (1), and the other end of the second ball-screw (23) carries out support rotating by the second ball-screw float support seat (26) be fixed on pedestal (1); Second ball-screw leading screw (23) is socketed with the second feed screw nut (27), and the second feed screw nut seat (28) is fixedly connected with the second feed screw nut (27); The 3rd line slideway (29) and the 4th line slideway (30) is furnished with respectively in the both sides of the second ball-screw (23), 3rd line slideway (29) and the 4th line slideway (30) parallel with the second ball-screw (23) axis respectively, and the 3rd line slideway (29) is equal with the distance of the second ball-screw (23) with the Distance geometry the 4th line slideway (30) of the second ball-screw (23), the 3rd line slideway (29) and the 4th line slideway (30) are fixedly installed on pedestal (1); 3rd line slideway (29) is mounted with the 5th guide rail slide block (31) and the 6th guide rail slide block (32), the 4th line slideway (30) is mounted with the 7th guide rail slide block (33) and the 8th guide rail slide block (34); Second straight-line feed platform (35) is fixedly installed on the 5th guide rail slide block (31), the 6th guide rail slide block (32), the 7th guide rail slide block (33), the 8th guide rail slide block (34) and the second feed screw nut seat (28), the rotation of the second ball-screw (23) by the axially-movable of driving second feed screw nut (27) along the second ball-screw (23), thus drives the second straight-line feed platform (35) mobile by the first feed screw nut seat (28); The second grating connecting plate (36) is installed with in the second straight-line feed platform (35) outside; Second grating reading head (38) of the second linear grating chi (37) is fixedly connected with the second grating connecting plate, second linear grating chi (37) is fixedly installed on pedestal (1), and parallels with the second ball-screw (23) axis.
4. the micro-high-precision motion platform of a kind of parallel type macro according to claim 1, it is characterized in that, the first turning cylinder (40-1) on described first straight-line feed platform (17), the first side chain, the second side chain, terminal platform (2) and the second turning cylinder (40-2) together constitute parallel-crank mechanism, limit the rotational freedom of terminal platform (2), therefore terminal platform (2) only has the planar movement free degree.
5. the micro-high-precision motion platform of a kind of parallel type macro according to claim 1, it is characterized in that, the main part of described side chain is hinge base body (41-1); In hinge base body (41-1), include flexible unit, compensated by the fine motion of the control realization platform be out of shape it; Flexible unit by flexible unit drive platform (41-1-1), flexible unit terminal platform (41-1-2), with rectangular flexible hinge first (41-1-3), rectangular flexible hinge second (41-1-4), rectangular flexible hinge third (41-1-5), the rectangular flexible hinge fourth (41-1-6) of side chain matrix (41-1) axis perpendicular, and the rectangular flexible hinge penta (41-1-7) paralleled with side chain matrix (41-1) axis forms jointly; Flexible unit drives platform (41-1-1) to be fixedly connected with hinge base body (41-1) by rectangular flexible hinge first (41-1-3), rectangular flexible hinge second (41-1-4); Flexible unit terminal platform (41-1-2) is fixedly connected with hinge base body (41-1) by rectangular flexible hinge third (41-1-5), rectangular flexible hinge fourth (41-1-6); Flexible unit drives platform (41-1-1) and flexible unit terminal platform (41-1-2) to be mutually permanently connected by rectangular flexible hinge penta (41-1-7); Piezoelectric actuator (42-1) drives platform (41-1-1) to be fixedly connected with by actuator connector (43-1) and flexible unit; Pressure sensor (44-1) is fixedly connected with by the afterbody of ring flange (45-1) with piezoelectric actuator (42-1), and the axis of pressure sensor (44-1) and the axis of piezoelectric actuator (42-1) are consistent; The other end of pressure sensor (44-1) is fixedly connected with pretension seat (46-1); Pretension seat (46-1) is bolted to connection on side chain matrix (41-1), applies axial pretightening load by tools for bolts ' pretension to piezoelectric actuator (42-1); Gripper shoe (47-1) is covered in piezoelectric actuator (42-1), actuator connector (43-1), flexible unit drive platform (41-1-1), rectangular flexible hinge first (41-1-3), rectangular flexible hinge second (41-1-4), be fixedly connected with hinge base body (41-1) directly over rectangular flexible hinge penta (41-1-7), and the matrix of high precision length meter (48-1) is fixed in gripper shoe (47-1) by friction top (49-1); The gauge head of length gauge (48-1) is fixed by sincere clamping unit (50-1) in gripper shoe (47-1), is parallel to each other with the axis of the gauge head axis and piezoelectric actuator (42-1) that ensure length gauge (48-1); Measuring pedestal (51-1) is fixedly installed on flexible unit terminal platform (41-1-2); The gauge head of length gauge (48-1) all the time with the mutual perpendicular contact of datum level measuring pedestal (51-1); The tail end of side chain matrix (41-1) is fixedly connected with balancing weight (52-1), to ensure that side chain matrix (41-1) keeps level and the coupling of the movement inertia realized in motion process.
6. the micro-high-precision motion platform of a kind of parallel type macro according to claim 1, it is characterized in that, the lower end of described terminal platform (2) is fixedly connected with plane grating read head (53); Pedestal (1) is installed with plane grating (54); The spacing of 0.5mm is kept between plane grating read head (53) and plane grating (54); The light path of plane grating read head (53) must along the groove of plane grating (54), to ensure normal measurement and reading.
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