CN102189413A - Ultra-precise workbench - Google Patents
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Abstract
The invention discloses an ultra-precise workbench which comprises a macro motion platform and a micro displacement workbench, wherein the macro motion platform adopts an air flotation guide rail; and the micro displacement workbench is connected with the macro motion platform and moves along the X direction and Y direction with the macro motion platform. The micro displacement workbench comprises a piezoelectric intelligent structure, wherein the piezoelectric intelligent structure can sense the signals of force, displacement and the like externally applied thereto, and can actively apply force, displacement and the like to the outside. Moreover, the piezoelectric intelligent structure not only can be applied to the micro displacement workbench of the ultra-precise workbench, but also can be manufactured into an energy capturing mechanism similar to a spring-damping system and used in the ultra-precise workbench. The ultra-precise workbench disclosed by the invention can be widely applied to the fields of ultra-precise machine tools, ultra-precise measurement, micro-electronic manufacturing and the like.
Description
Technical field
The present invention relates to the ultra precise workbench field, be specially the ultra precise workbench that comprises gas suspension and Electromagnetic Drive.
Background technology
In fields such as semiconductor lithography, micromachine, accurate measurement, ultraprecise processing, miniature assembling, biological cell manipulation and nanometer technologies, need very accurate localization and very fine motion, therefore high performance ultraprecise positioning table becomes the technical support in these fields.Realize sub-micron even nano level location, the conventional driving and the kind of drive are no longer suitable.Such as, in order to realize conventional precision positioning, often adopt the scheme of driven by servomotor and precision lead screw transmission usually, yet this kind locate mode because the existence of screw thread idle running and gearing friction, its positioning accuracy generally can only reach micron order.Therefore, seek the special driving and the kind of drive, become necessary so that workbench is realized sub-micron even nano level motion positions.
Air bearing is to utilize the viscosity of air, the fully dry back of also filtering of the compressed air of outside is imported in the air bearing gap by some flow controllers of opening on bearing surface, make between the working face of air bearing to have constrictive air abrim, and come support load and realize steadily action by the pressure air film that forms.Little because of its frictional resistance, wear rate is almost equal to zero, noise is low, vibrations are little, motion is steady, precision is high, and by successful Application in many fields.According to the principle that pressure produces, gas bearing generally is divided into three kinds on dynamic pressure type, hydrostatic profile and pressing mold type, and at present widely used is dynamic pressure type and hydrostatic profile.Air-float guide rail belongs to pressure-feed air bearing, in the Precision Linear Moving system, has a wide range of applications.The air-float guide rails that adopt in big stroke precision stage, the sliding pair that air-float guide rail is made up of guide rail and slide block is gas film lubrication between guide rail and the slide block more.Air-float guide rail has does not in the course of the work has directly contact, frictional damping is little and approximately constant, characteristics such as operating temperature range is wide, adaptive capacity to environment is strong, precision is high, the life-span is long, so is widely used in the guide track system of ultra precise measurement and micro-nano process unit.Yet air-float guide rail has a shortcoming, and promptly the too small kinergety that causes of damping can't in time decay in motion process, causes bigger energy to pass to other structure member, thereby quotes distortion and vibration.
Compare with traditional feeding driving, linear electric motors drive and have the following advantages: omitted intermediate conversion mechanism, reduced mechanical wear, system can keep high-gain during operation, realize accurate feeding feedforward, can be with accurately following the tracks of at a high speed to given machining path, thus the high accuracy and the service life of lathe guaranteed.During operation, linear electric motors can be subjected to centrifugal action unlike electric rotating machine, so its space rate is unrestricted.The inertia of linear drives mainly is present in slide unit, and therefore adding can have very high acceleration man-hour.Linear electric motors drive by electromagnetic push, so system noise is very little, have improved work condition environment.Planar motor then directly utilizes electromagnetic energy to produce plane motion, have the high and low hear rate of the force density of going out, high-precision characteristics, because of having saved from the rectilinear motion that rotatablely moves again to the intermediate conversion device of plane motion, can have fast, highly sensitive, the servo-actuated of reaction and reach advantages of simple structure and simple well the control object with being made of one of motor structure.Yet,,, realize that sub-micron even nanoscale large travel high-speed degree motion positions have big technical difficulty if only adopt linear electric motors or planar motor in view of current techniques.
Piezoelectric is a kind of intellectual material that has positive inverse piezoelectric effect simultaneously concurrently, if it is applied active force, then will respond to the xenogenesis electric charge that produces equivalent on its two electrodes.Otherwise,, just can produce mechanically deform when it is subjected to the time spent of doing of applied voltage.Based on this characteristic, micrometric displacement actuator, the sensor made by piezoelectric have advantages such as compact conformation, volume is little, resolution ratio is high, control is simple, and simultaneously it does not have heating problem, so precision stage there is not the error that causes because of heat.Therefore, piezoelectric has huge application potential in precision optical machinery.
As one of key technology of precision optical machinery and precision instrument---micro-displacement work table technology, in recent years along with subject development such as microelectric technique, aerospace, bioengineering and develop by leaps and bounds.The sinking support micromotion mechanism is a kind of novel micro-displacement mechanism that development in recent years is got up, its feature be compact conformation, volume very little, can accomplish not have machinery friction, no gap, have higher displacement resolution, can reach 1nm.Use piezoelectric as driving element, not only control simple (only needing the control applied voltage), and can realize sub-micron even nano level precision, do not produce noise and heating simultaneously, applicable to various working environments, be micro-displacement mechanism desirable in the precision optical machinery.Propose a kind of micro-displacement work table that adopts in conjunction with flexible hinge and piezoelectric in the document " A new piezodriven precision micropositioning stage utilizing flexure hinges ", this micro-displacement work table can be realized the plane motion of X, Y both direction.But this workbench impulse stroke is minimum, can't satisfy the demand of big stroke, ultraprecise processing.
Summary of the invention
The object of the present invention is to provide a kind of ultra precise workbench, this workbench can satisfy the demand of big stroke and ultraprecise processing.
The invention discloses a kind of ultra precise workbench, it is characterized in that this ultra precise workbench comprises grand motion platform and micro-displacement work table, wherein the guide rail of grand motion platform adopts air-float guide rail, micro-displacement work table is connected with grand motion platform, and with grand motion platform along X to, Y to moving.
Isolate by air supporting between the mover of ultraprecise motion locating platform provided by the invention and stator, mover relies on gas suspension on stator, realize not have the relative motion that directly contacts between the two, this structure has the precision height, frictional resistance is little and approximately constant, advantage such as operating temperature range is wide, adaptive capacity to environment is strong, the life-span is long.The mover of ultraprecise motion locating platform is driven by electromagnetic force, realizes the motion with respect to stator.Electromagnetic force drives and directly electric energy is changed into straight line or plane motion mechanical energy, compare with conventional ADS driving, it has omitted intermediate conversion mechanism, reduced mechanical wear, system can keep high-gain during operation, realizing accurate feeding feedforward, can be with accurately following the tracks of at a high speed to given machining path, thus guaranteed the high accuracy and the service life of lathe.Owing to rely on electromagnetic force to drive,, thereby improved work condition environment in addition so system noise is very little.Yet, only adopt Electromagnetic Drive realization sub-micron even nanoscale to locate the difficulty that possesses skills.Comprise the piezo-electric intelligent structure micro-displacement work table and can realize submicron order even nanoscale location, but its movement travel is minimum, can't adapt to big stroke, ultraprecise processing.The micro-displacement work table that includes piezo-electric intelligent structure combines with the workbench that adopts gas suspension, Electromagnetic Drive and the ultraprecise motion locating platform formed, not only can realize the high speed and large stroke motion, and can realize submicron order even nanometer-level ultra-precise location.In addition, the prisoner who adopts piezo-electric intelligent structure to make can and be widely used in the ultra precise workbench as spring-damper system by element.This prisoner can the component structure compactness, the energy conversion rate height, can improve the dynamic property of kinematic system.Therefore, the ultraprecise motion locating platform that comprises gas suspension, Electromagnetic Drive, piezo-electric intelligent structure can be widely used in fields such as ultra-precision machine tool, ultra precise measurement, microelectronics manufacturing.
Description of drawings
Fig. 1 is a H type Working table structure of the present invention;
Fig. 2 is installed in structure chart on the stator for mover in the linear electric motors drive system;
Fig. 3 is a kind of micro-displacement work table that adopts piezo-electric intelligent structure of the present invention;
Fig. 4 is the embodiment of piezo-electric intelligent structure of the present invention;
Fig. 5 is a kind of planar working table structure of the present invention;
Fig. 6 is the distribution form of planar working table magnetic field array;
Fig. 7 is the distribution form of planar working table coil array;
Fig. 8 is for adopting the Working table structure of balance mass;
Fig. 9 can device for a kind of prisoner who comprises piezo-electric intelligent structure.
The specific embodiment
Core of the present invention is the big stroke workbench of ultraprecise that proposes to adopt gas suspension and Electromagnetic Drive.The motion positions form of platform is taked two-stage motion positions mode, promptly adopts grand motion platform and micro-displacement work table to combine, and has realized high position precision, high-resolution and big movement travel.Wherein the guide rail form of grand motion platform adopts air-float guide rail, promptly by static pressure air-bearing the mover in the grand motion workbench is floated on the stator in the grand motion platform, realizes contactless relative motion between the two.As the improvement of technical solution of the present invention, can comprise piezo-electric intelligent structure in the micro-displacement work table, wherein piezo-electric intelligent structure is realized little stroke, high accuracy, high-resolution motion positions as the micrometric displacement driving element.In addition, piezo-electric intelligent structure not only can be used for the micro-displacement work table of ultra precise workbench, and can make prisoner's energy mechanism of spring-like-damping system, is applied in the ultra precise workbench.The prisoner who is made by piezo-electric intelligent structure can mechanism can be used to connect the balance mass and the pedestal of ultra precise workbench, with the influence to the workbench dynamic property of the kinetic energy that reduces to be produced in the ultra precise workbench motion process.
Fig. 1 is illustrated in H type Working table structure of the present invention.This ultra precise workbench has adopted two cover kinematic systems, promptly grand motion platform and micro-displacement work table in order to realize big stroke, high-speed, high-accuracy motion positions.Grand motion platform adopts the linear electric motors drive system to realize, comprises piezo-electric intelligent structure in the micro-displacement work table.
Grand motion platform comprises Workbench base 2, and first, second Y is to linear motor stator electric 1a, 1b, and first, second Y is to linear motor rotor 5a, 5b, and X is to linear motor stator electric 6, and bindiny mechanism 7 and X are to linear motor rotor 3.
First, second Y evenly is furnished with permanent magnets 4 to the both sides that linear motor stator electric 1a, 1b lay respectively at Workbench base 2 among linear motor stator electric 1a and the 1b.Y is installed in Y on linear motor stator electric 1a to linear motor rotor 5a by gas suspension, and can be along Y to moving; Y is installed in Y on linear motor stator electric 1b to linear motor rotor 5b by gas suspension, and can be along Y to moving.X links to each other to linear motor rotor 5a, 5b with first, second Y respectively to the two ends of linear motor stator electric 6.Therefore, when two Y when linear motor rotor 5a and 5b are synchronized with the movement, X can be along Y to accompany movement to linear motor stator electric 6.X is installed in X on linear motor stator electric 6 to linear motor rotor 3 by gas suspension, and along X to moving.X links together by bindiny mechanism 7 to linear motor rotor 3 and micro-displacement work table 8.Therefore, overlap X to the H type Working table structure that the linear electric motors drive system is constituted to linear electric motors drive system and, realized the grand motion of big stroke micro-displacement work table 8 by two cover Y.
Fig. 2 represents that each mover shown in Figure 1 is installed in structure chart on the stator by gas suspension; Be that example is illustrated with Y to linear motor rotor 5a below.
Micro-displacement work table can adopt the described version of document " A new piezodriven precisionmicropositioning stage utilizing flexure hinges ", also can adopt other form.The micro-displacement work table actuator can adopt existing various piezoelectric actuator, or adopts the described piezo-electric intelligent structure of Fig. 4 to replace described piezoelectric actuator, and other structure of micro-displacement work table remains unchanged.Fig. 3 represents a kind of configuration mode of the micro-displacement work table that the present invention is cited.Wherein, micro-displacement work table comprises first, second piezo-electric intelligent structure 31,32.First, second piezo-electric intelligent structure 31,32 is arranged vertically, and interface platform 33 is positioned at the centre of micro-displacement work table.First piezo-electric intelligent structure 31 can be measured the displacement of interface platform 33 along directions X, and can drive interface platform 33 according to its signal that records and move along directions X; Second piezo-electric intelligent structure 32 can be measured the displacement of interface platform 33 along the Y direction, and can move along the Y direction according to its signal that records driving interface platform 33.Therefore, when first, second piezo-electric intelligent structure 31,32 synergies, can measure the motion of interface platform 33, and can drive interface platform 33 and make two degrees of freedom ultraprecise motion positions on the XY plane on the XY plane.Fig. 4 represents the embodiment of piezo-electric intelligent structure shown in the present.This piezo-electric intelligent structure comprises first, second, third insulating barrier, 100,104,108, first, second, third, fourth electrode layers 101,103,105,107, piezoelectric transducer layer 102, piezoelectric actuator layer 106.The top one deck of piezo-electric intelligent structure is first insulating barrier 100, contacting with first insulating barrier 100 and being positioned at below it is first electrode layer 101, contacting with first electrode layer and being positioned at below it is piezoelectric transducer layer 102, contacting with piezoelectric transducer layer 102 and being positioned at below it is the second electrode lay 103, contacting with the second electrode lay 103 and being positioned at below it is second insulating barrier 104, contacting with second insulating barrier 104 and being positioned at below it is third electrode layer 105, contacting with third electrode layer 105 and being positioned at below it is piezoelectric actuator layer 106, contacting with piezoelectric actuator layer 106 and being positioned at below it is the 4th electrode layer 107, and contacting with the 4th electrode layer 107 and being positioned at below it is the 3rd insulating barrier 108.The position of piezoelectric transducer layer 102 and piezoelectric actuator layer 106 can exchange.
Wherein, the effect of first insulating barrier 100 is to avoid first electrode 101 to contact with extraneous conductor to cause conduction, and the effect of the 3rd insulating barrier 108 is to avoid the 4th electrode 107 to contact with extraneous conductor to cause conduction; First, second electrode layer 101,103 is two electrodes of piezoelectric transducer layer 102, connects first, second electrode layer 101,103 respectively by lead and realizes the signal of telecommunication that piezoelectric transducer layer 102 records is drawn; The effect of second insulating barrier 104 is to avoid second electrode 103 directly to contact with third electrode 104; Three, the 4th utmost point layer 105,107 is two electrodes of piezoelectric actuator layer 106, connects the 3rd, the 4th electrode layer 105,107 respectively by lead and realizes piezoelectric actuator layer 106 input electrical signal.Because piezoelectric transducer layer 102 can be measured power, displacement or acceleration along vertical direction, and piezoelectric actuator layer 106 can apply power, displacement along vertical direction, therefore adopt control system that this piezo-electric intelligent structure is implemented ACTIVE CONTROL, can make and to apply effects such as power, displacement on one's own initiative to external world again by signals such as can perception outer its power that applies of bound pair of this piezo-electric intelligent structure, displacement.Promptly realize the intelligent of this piezo-electric intelligent structure.
Therefore, H type Working table structure shown in Figure 1 had both comprised the grand motion platform that can realize the grand motion of big stroke, comprised the micro-displacement work table of realizing micromotion again, thereby H type workbench integral body had realized the large stroke and high precision motion positions.Wherein, micro-displacement work table can adopt configuration shown in Figure 4 or other to comprise the micro-displacement work table configuration of piezo-electric intelligent structure.
Fig. 5 represents a kind of planar working table structure.Wherein, grand motion adopts the planar motor system to realize, the micrometric displacement motion adopts micro-displacement work table to realize.Planar motor partly is made up of stator, mover and supporting etc., and under the effect of restriction of supporting and electromagnetic push, the mover of planar motor can drive the rectilinear motion that load produces bidimensional.Planar motor has fast, highly sensitive, the servo-actuated of reaction and reaches advantages of simple structure and simple well, so it has broad prospect of application at ultraprecise two dimensional surface positioner.As shown in Figure 4, the planar motor system comprises planar motor stator 41 and planar motor mover 43, and planar motor stator 41 internal placement have permanent magnet array (perhaps coil array); Correspondingly, planar motor mover 43 internal placement have coil array (perhaps permanent magnet array).
First air supporting 44 that is positioned at planar motor mover 43 belows is bearing in planar motor mover 43 top of planar motor stator 41.Micro-displacement work table 42 is positioned at the top of planar motor mover 43, and both link together.Wherein, micro-displacement work table can adopt form shown in Figure 3 or other with the micro-displacement work table form of piezoelectric intelligent element as driving element.Because the motion positions mode that has adopted grand motion and micromotion to combine, so this planar working table can be realized big stroke, high-speed, high-precision motion positions.
Fig. 6 is the distribution form of planar working table permanent magnet array.The planar motor stator 44 shown in Figure 4 or the permanent magnet array of planar motor mover 41 can be arranged as form shown in Figure 5 or other permanent magnet array distribution form.
Fig. 7 is the distribution form of planar working table coil array.The planar motor stator 44 shown in Figure 4 or the coil array of planar motor mover 41 can be arranged as form shown in Figure 6 or other coil layout form.
Fig. 8 is for adopting the Working table structure of balance mass; Workbench comprises workbench 71, actuator 72, balance mass 73, flexible member 74, pedestal 75, second, third air supporting 76,77, and spring-damper system 78.
Fig. 9 is a kind of prisoner's energy device that comprises piezo-electric intelligent structure, and it can be used as a kind of embodiment of Fig. 8 medi-spring-damping system 78.Adopt the upper middle position place of metal flexible block 81 to have a square hole 82, a piezo-electric intelligent structure 83 is installed in the square hole 82.This piezo-electric intelligent structure 83 is a configuration form shown in Figure 3, it both energy measurement act on signals such as power on it, displacement, can apply power along direction of measurement, displacement etc. again.Folded spring 86 and 88 is in square hole 82 left and right sides symmetric arrangement, and they provide precompression to piezo-electric intelligent structure 83 jointly, causes disabler when being subjected to tensile force to prevent piezo-electric intelligent structure 83.The bottom of flexible block 81 is divided into two folded springs that are symmetrically arranged 87 and 89, and they have the elasticity of vertical direction, can be used as flexible member.The mechanical energy that acts on the piezo-electric intelligent structure can change into electric energy, if electric energy is incorporated in the circuit by lead, can effectively store or consumed energy, and therefore device shown in Figure 8 promptly has the ability of capturing energy.Piezo-electric intelligent structure 83 and folded spring 87,89 common formed a spring-damper system, and it has and stores or catabiotic ability.
The above is preferred embodiment of the present invention, but the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.So everyly do not break away from the equivalence of finishing under the spirit disclosed in this invention or revise, all fall into the scope of protection of the invention.
Claims (6)
1. ultra precise workbench, it is characterized in that this ultra precise workbench comprises grand motion platform and micro-displacement work table, wherein the guide rail form of grand motion platform adopts air-float guide rail, micro-displacement work table is connected with grand motion platform, and with grand motion platform along X to, Y to moving.
2. ultra precise workbench according to claim 1, it is characterized in that, described grand motion platform comprises Workbench base (2), first, second Y is to linear motor stator electric (1a, 1b), first, second Y is to linear motor rotor (5a, 5b), X is to linear motor stator electric (6), and bindiny mechanism (7) and X are to linear motor rotor (3);
First, second Y lays respectively at the both sides of Workbench base (2) to linear motor stator electric (1a, 1b), and first, second Y evenly is furnished with permanent magnets (4) in linear motor stator electric (1a, 1b); Y is installed in Y on linear motor stator electric (1a) to linear motor rotor (5a) by gas suspension, and along Y to moving; Y is installed in Y on linear motor stator electric (1b) to linear motor rotor (5b) by gas suspension, its along Y to moving; X links to each other to linear motor rotor (5a, 5b) with first, second Y respectively to the two ends of linear motor stator electric (6); X links together by bindiny mechanism (7) to linear motor rotor (3) and micro-displacement work table (8).
3. ultra precise workbench according to claim 1, it is characterized in that, described grand motion platform adopts the planar motor system to realize, this planar motor system comprises planar motor stator (41) and planar motor mover (43), and planar motor stator (41) internal placement has permanent magnet array or coil array; Correspondingly, planar motor mover (43) internal placement has coil array or permanent magnet array;
First air supporting (44) that is positioned at planar motor mover (43) below is bearing in planar motor mover (43) top of planar motor stator (41); Micro-displacement work table (42) is positioned at the top of planar motor mover (43), and both link together.
4. ultra precise workbench according to claim 1, it is characterized in that, piezoelectric actuator in the micro-displacement work table (8) is a piezo-electric intelligent structure, comprise first, second, third insulating barrier (100,104,108), first, second, third, fourth electrode layer (101,103,105,107), piezoelectric transducer layer (102), piezoelectric actuator layer (106); The top one deck of piezo-electric intelligent structure is first insulating barrier (100), contacting with first insulating barrier (100) and being positioned at below it is first electrode layer (101), contacting with first electrode layer and being positioned at below it is piezoelectric transducer layer (102), contacting with piezoelectric transducer layer (102) and being positioned at below it is the second electrode lay (103), contacting with the second electrode lay (103) and being positioned at below it is second insulating barrier (104), contacting with second insulating barrier (104) and being positioned at below it is third electrode layer (105), contacting with third electrode layer (105) and being positioned at below it is piezoelectric actuator layer (106), contacting with piezoelectric actuator layer (106) and being positioned at below it is the 4th electrode layer (107), and contacting with the 4th electrode layer (107) and being positioned at below it is the 3rd insulating barrier (108); The position of piezoelectric transducer layer (102) and piezoelectric actuator layer (106) can exchange.
5. ultra precise workbench according to claim 1, it is characterized in that, described grand motion platform comprises workbench (71), actuator (72), balance mass (73), flexible member (74), pedestal (75), second, third air supporting (76,77), and spring-damper system (78);
Workbench (71) is positioned at the top of balance mass (73), is used for clamping workpiece (70), and second air supporting (76) is positioned between workbench (71) and the balance mass (73); By the supporting role of second air supporting (76), workbench (71) can be implemented in above the balance mass (73) and with the non-contacting plane motion of balance mass (73); Actuator (72) along continuous straight runs connects workbench (71) and balance mass (73), and actuator (72) is used for driving workbench (71) and does plane motion on balance mass (73); Balance mass (73) is positioned at the top of pedestal (75), by the supporting role of the 3rd air supporting (77), workbench (73) can be implemented in above the pedestal (75) and with the non-contacting plane motion of pedestal (75); Pedestal (75) is supported by several active damper (79); Flexible member (74) and spring-damper system (78) along continuous straight runs be connected in parallel balance mass (73) and pedestal (75).
6. ultra precise workbench according to claim 5, it is characterized in that, described spring-damper system (78) is prisoner's energy device, its structure is: the upper middle position place of the flexible block that is made of metal (81) has a square hole (82), and a piezo-electric intelligent structure (83) is installed in the square hole (82); Folded spring (86) and (88) are in square hole (82) left and right sides symmetric arrangement, and they provide precompression to piezo-electric intelligent structure (83) jointly; The bottom of flexible block (81) be divided into two be symmetrically arranged have the flexible folded spring of vertical direction (87) and (89), piezo-electric intelligent structure (83) and folded spring (87,89) common formed a spring-damper system.
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