CN107052822A - It is a kind of to be applied to the accurate aerostatic guide way for boring milling platform - Google Patents
It is a kind of to be applied to the accurate aerostatic guide way for boring milling platform Download PDFInfo
- Publication number
- CN107052822A CN107052822A CN201710405344.4A CN201710405344A CN107052822A CN 107052822 A CN107052822 A CN 107052822A CN 201710405344 A CN201710405344 A CN 201710405344A CN 107052822 A CN107052822 A CN 107052822A
- Authority
- CN
- China
- Prior art keywords
- dynamic rail
- track
- rail
- pedestal
- guide way
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003801 milling Methods 0.000 title claims abstract description 22
- 238000007667 floating Methods 0.000 claims abstract description 31
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 241001074085 Scophthalmus aquosus Species 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 abstract description 8
- 238000003754 machining Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 7
- 230000003068 static effect Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 206010017389 Frotteurism Diseases 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008093 supporting effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
- B23Q1/017—Arrangements of ways
Abstract
The accurate aerostatic guide way for boring milling platform is applied to the present invention relates to a kind of, including pedestal, X is to dynamic rail, Y-direction dynamic rail, floating cushion, described X is movably connected on pedestal to dynamic rail, the first track is provided with two lateral walls of described pedestal, described X is movably connected on the first track of both sides to dynamic rail by first straight line motor, described Y-direction dynamic rail is movably connected in X in dynamic rail, described X is provided with the second track on the madial wall of dynamic rail back segment, described Y-direction dynamic rail is movably connected on the second track by second straight line motor, described X is both provided with floating cushion on the bottom of on two madial walls of the dynamic rail and rear end and bottom of Y-direction dynamic rail.The present invention is by setting linear motor and micro-feed mechanism to realize coarse motion and the dynamic organic assembling of essence, so as to improve the positioning precision and machining accuracy for boring milling platform.
Description
Technical field
Patent of the present invention is related to accurate brill milling platform technology field, particularly a kind of to be applied to the accurate air for boring milling platform
Hydrostatic slideway.
Background technology
The major function that precision bores milling platform is that precision positioning and Precision Machining can be realized in drilling and milling process.This
Comparatively ideal geometric accuracy, kinematic accuracy, positioning precision and accuracy of detection can be had by requiring each motion link of platform, wherein
The kinematic accuracy and positioning precision of guide rail are one of accurate core technologies for boring milling platform, directly determine the matter of platform converted products
Amount and processing efficiency, guide rail therein are one of critical components in precision optical machinery, are mainly used to ensure the phase of each moving component
To position, kinematic accuracy and the ability of load is born, its quality often directly affects the measurement accuracy of instrument, so in order to
A kind of aerostatic guide way for boring milling platform applied to precision of machining accuracy design for improving brill milling platform is just particularly important.
The content of the invention
Present invention solves the technical problem that being that linear motor and micro-feed mechanism realize coarse motion and essence is dynamic by setting
Organic assembling, so as to improve the machining accuracy for boring milling platform, add its practical performance, and invented one kind and be applied to
Precision bores the aerostatic guide way of milling platform.
To solve above-mentioned technical problem, led the invention provides a kind of static air pressure for being applied to accurate brill milling platform
Rail, including
Pedestal,
X is to dynamic rail, and described X is U-shaped to dynamic rail, and described X is movably connected on pedestal to dynamic rail, described pedestal
The first track is provided with two lateral walls, described X is movably connected in the first of both sides to dynamic rail by first straight line motor
On track, described X is flexibly connected to dynamic rail with first straight line motor,
Y-direction dynamic rail, the cross section of described Y-direction dynamic rail is square, and described Y-direction dynamic rail is movably connected in X to dynamic rail
On, described X is to the second track is provided with the madial wall of dynamic rail back segment, and described Y-direction dynamic rail passes through second straight line motor
It is movably connected on the second track, described described Y-direction dynamic rail is flexibly connected with second straight line motor,
Floating cushion, described X is set on on two madial walls of the dynamic rail and bottom of the rear end and bottom of Y-direction dynamic rail
Be equipped with floating cushion, described X to the floating cushion on on the madial wall of the dynamic rail two and bottom of the rear end and bottom of Y-direction dynamic rail all
Face pedestal.
Further：Described X is equipped with two floating cushions, institute to being each provided on the bottom of on two madial walls of dynamic rail and rear end
Four floating cushions are provided with the bottom for the Y-direction dynamic rail stated.
Further：Plenum duct is offered in described floating cushion, the bottom of described floating cushion is provided with aperture section
Device is flowed, described plenum duct is connected with feeder, and described feeder is connected by plenum duct with orifice restriction device,
The orifice restriction device of described X to the floating cushion on the madial wall of dynamic rail two faces two lateral walls of pedestal respectively, described X to
The orifice restriction device of floating cushion on the bottom of dynamic rail rear end and on Y-direction dynamic rail bottom faces the upper surface of pedestal.
Further：The structure of described orifice restriction device is cone shaped countersink.
Further：Described X is to being each provided between dynamic rail and the first track and between Y-direction dynamic rail and the second track and put
There are two micro-feed mechanisms, described X is to two micro-feed mechanisms and Y-direction dynamic rail and second between dynamic rail and the first track
Two micro-feed mechanisms between track are all set in positive and negative both direction.
Further：Described micro-feed mechanism is piezoelectric ceramics.
After said structure, the present invention is by setting linear motor and micro-feed mechanism to realize what coarse motion was moved with essence
Organic assembling, so as to improve the machining accuracy for boring milling platform, adds its practical performance；And utilize static air pressure technology
Improve transmission accuracy and transmission efficiency, and because static air pressure technology is windage, reduce to quiet rail and dynamic rail
Abrasion, extends service life.
Brief description of the drawings
The present invention is further detailed explanation with reference to the accompanying drawings and detailed description.
Fig. 1 is structural representation of the invention.
Fig. 2 is structural representations of the X to dynamic rail.
Fig. 3 is the structural representation of Y-direction dynamic rail.
Embodiment
It is as shown in Figure 1 it is a kind of be applied to the accurate aerostatic guide way for boring milling platform, including pedestal 1, X are to dynamic rail 2, Y
To dynamic rail 4, floating cushion 6, described X is U-shaped to dynamic rail 2, and described X is movably connected on pedestal 1 to dynamic rail 2, described base
The first track 1-1 is provided with two lateral walls of seat 1, described X is movably connected in dynamic rail 2 by first straight line motor 3
On first track 1-1 of both sides, described X is flexibly connected to dynamic rail 2 with first straight line motor 3, and described X is in dynamic rail 2
It is provided with positioning hole, described first straight line motor 3 and is provided with the first locating dowel, described X is to dynamic rail 2 and first straight line
The change of height can occur between motor 3, described X carries out X side to dynamic rail 2 under the drive of first straight line motor 3
Upward motion, the cross section of described Y-direction dynamic rail 4 is square, and described Y-direction dynamic rail 4 is movably connected in X in dynamic rail 2,
Described X is to the second track 2-1 is provided with the madial wall of the back segment of dynamic rail 2, and described Y-direction dynamic rail 4 is electronic by second straight line
Machine 5 is movably connected on the second track 2-1, and described described Y-direction dynamic rail 4 is flexibly connected with second straight line motor 5, described
Y-direction dynamic rail 4 on be provided with the second locating dowel, described second straight line motor 5 and be provided with guide groove, described Y-direction is moved
The height of height can occur between rail 4 and second straight line motor 5, described Y-direction dynamic rail 4 is in second straight line motor 5
Drive the lower motion carried out in Y-direction, described X is on two madial walls of the dynamic rail 2 and bottom of rear end and Y-direction dynamic rail 4
Bottom on be both provided with floating cushion 6, described X is on 2 liang of madial walls of the dynamic rail and bottom of rear end and Y-direction dynamic rail 4
Floating cushion 6 on bottom all faces pedestal 1.Using X to dynamic rail 2 carry out X to it is mobile when, to X to dynamic rail 2 on floating cushion
The compressed air with certain rigidity is filled with 6, lubricant medium is used as by the use of compressed air so that X to dynamic rail 2 and pedestal 1 it
Between it is completely isolated by air film, the Frotteurism of metal and windage is formed, when using the progress Y-direction movement of Y-direction dynamic rail 4, to Y
The compressed air with certain rigidity is filled with into the floating cushion 6 in dynamic rail 4, lubricant medium is used as by the use of compressed air so that Y
To completely isolated by air film between dynamic rail 4 and pedestal 1, metal and the Frotteurism of windage are formed.The design utilizes air
Static pressure technology improves transmission accuracy and transmission efficiency, and because static air pressure technology is windage, reduces to quiet rail
With the abrasion of dynamic rail, service life is extended.
X as shown in Figures 2 and 3 is equipped with two air supportings to being each provided on the bottom of on two madial walls of dynamic rail 2 and rear end
It is provided with pad 6, the bottom of described Y-direction dynamic rail 4 in four floating cushions 6, described floating cushion 6 and offers plenum duct, institute
The bottom for the floating cushion 6 stated is provided with orifice restriction device, and described plenum duct is connected with feeder, described feeder
It is connected by plenum duct with orifice restriction device, described X divides to the orifice restriction device of the floating cushion 6 on 2 liang of madial walls of dynamic rail
Do not face two lateral walls of pedestal 1, described X is to floating cushion 6 on the rear end bottom of dynamic rail 2 and on the bottom of Y-direction dynamic rail 4
Orifice restriction device face the upper surface of pedestal 1, the structure of described orifice restriction device is cone shaped countersink.The present invention is by adopting
The problem of reducing right angle stress concentration with above-mentioned design, more reduces gas damage, improves gas effciency, and by making
Air-flow goes out along inclined-plane following current, serves the effect for improving the rigidity of floating cushion 6.
X in the design is to each between the track 1-1 of dynamic rail 2 and first and between the track 2-1 of Y-direction dynamic rail 4 and second
Two micro-feed mechanisms are provided with, described X is moved to two micro-feed mechanisms and Y-direction between the track 1-1 of dynamic rail 2 and first
Two micro-feed mechanisms between the track 2-1 of rail 4 and second are all set in positive and negative both direction, and described micro-feed mechanism is pressure
Electroceramics.The design to the piezoelectric ceramics on both forward and reverse directions by being powered, the dilatancy after being powered using piezoelectric ceramics
The micro-shifting carried out with X to dynamic rail 2 or Y-direction dynamic rail 4 on both forward and reverse directions is moved；The present invention using set linear motor and it is micro- enter
Coarse motion and the dynamic organic assembling of essence are realized to mechanism, conveying realizes the effect accurately conveyed by polarising, and improves it
Practical performance.
Claims (6)
1. a kind of be applied to the accurate aerostatic guide way for boring milling platform, it is characterised in that：Including
Pedestal (1),
X is to dynamic rail (2), and described X is U-shaped to dynamic rail (2), and described X is movably connected on pedestal (1) to dynamic rail (2), described
Pedestal (1) two lateral walls on be provided with the first track (1-1), described X passes through first straight line motor to dynamic rail (2)
(3) it is movably connected on the first track (1-1) of both sides, described X connects to dynamic rail (2) and first straight line motor (3) activity
Connect,
Y-direction dynamic rail (4), the cross section of described Y-direction dynamic rail (4) is square, described Y-direction dynamic rail (4) be movably connected in X to
In dynamic rail (2), described X is provided with the second track (2-1), described Y-direction dynamic rail (4) on the madial wall of dynamic rail (2) back segment
Be movably connected in by second straight line motor (5) on the second track (2-1), described described Y-direction dynamic rail 4) with it is second straight
Line motor (5) is flexibly connected,
Floating cushion (6), described X on two madial walls of dynamic rail (2) and the bottom of rear end and Y-direction dynamic rail (4) bottom
On be both provided with floating cushion (6), described (X) is on the madial wall of dynamic rail (2) the two and bottom of rear end and Y-direction dynamic rail (4)
Bottom on floating cushion (6) all face pedestal (1).
2. a kind of aerostatic guide way for being applied to accurate brill milling platform according to claim 1, it is characterised in that：It is described
X be equipped with two floating cushions (6), described Y-direction dynamic rail to being each provided on the bottom of on two madial walls of dynamic rail (2) and rear end
(4) four floating cushions (6) are provided with bottom.
3. a kind of aerostatic guide way for being applied to accurate brill milling platform according to any one of claim 1 or 2, it is special
Levy and be：Plenum duct is offered in described floating cushion (6), the bottom of described floating cushion (6) is provided with orifice restriction device,
Described plenum duct is connected with feeder, and described feeder is connected by plenum duct with orifice restriction device, described
The orifice restriction device of from X to the floating cushion (6) on the madial wall of dynamic rail (2) two face two lateral walls of pedestal (1) respectively, it is described
The orifice restriction device of from X to the floating cushion (6) on dynamic rail (2) rear end bottom and Y-direction dynamic rail (4) bottom face pedestal
(1) upper surface.
4. a kind of aerostatic guide way for being applied to accurate brill milling platform according to claim 3, it is characterised in that：It is described
Orifice restriction device structure be cone shaped countersink.
5. a kind of aerostatic guide way for being applied to accurate brill milling platform according to claim 1, it is characterised in that：It is described
X to being each provided between dynamic rail (2) and the first track (1-1) and between Y-direction dynamic rail (4) and the second track (2-1) and be equipped with two
Individual micro-feed mechanism, described X is to two micro-feed mechanisms and Y-direction dynamic rail between dynamic rail (2) and the first track (1-1)
(4) two micro-feed mechanisms between the second track (2-1) are all set in positive and negative both direction.
6. a kind of aerostatic guide way for being applied to accurate brill milling platform according to claim 5, it is characterised in that：It is described
Micro-feed mechanism be piezoelectric ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710405344.4A CN107052822A (en) | 2017-05-31 | 2017-05-31 | It is a kind of to be applied to the accurate aerostatic guide way for boring milling platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710405344.4A CN107052822A (en) | 2017-05-31 | 2017-05-31 | It is a kind of to be applied to the accurate aerostatic guide way for boring milling platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107052822A true CN107052822A (en) | 2017-08-18 |
Family
ID=59616161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710405344.4A Pending CN107052822A (en) | 2017-05-31 | 2017-05-31 | It is a kind of to be applied to the accurate aerostatic guide way for boring milling platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107052822A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2148634Y (en) * | 1992-05-30 | 1993-12-08 | 李鹏生 | Superprecious work-table |
| US6134981A (en) * | 1999-12-03 | 2000-10-24 | Nikon Research Corporation Of America | Precision scanning apparatus and method with fixed and movable guide members |
| CN1701925A (en) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | H type air floating workbench with synchronization driving of bilateral linear motor |
| CN102189413A (en) * | 2011-04-12 | 2011-09-21 | 华中科技大学 | Ultra-precise workbench |
| CN103592824A (en) * | 2013-11-29 | 2014-02-19 | 中国科学院光电技术研究所 | Two-degree-of-freedom high-precision large-stroke air-bearing workpiece platform |
| CN204595427U (en) * | 2015-02-28 | 2015-08-26 | 上海微电子装备有限公司 | A kind of work stage for exposing wafer |
| CN105252505A (en) * | 2015-11-30 | 2016-01-20 | 中国计量科学研究院 | Precise air-floatation displacement platform |
| CN207014005U (en) * | 2017-05-31 | 2018-02-16 | 朱小琴 | It is a kind of to be applied to the accurate aerostatic guide way for boring milling platform |
-
2017
- 2017-05-31 CN CN201710405344.4A patent/CN107052822A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2148634Y (en) * | 1992-05-30 | 1993-12-08 | 李鹏生 | Superprecious work-table |
| US6134981A (en) * | 1999-12-03 | 2000-10-24 | Nikon Research Corporation Of America | Precision scanning apparatus and method with fixed and movable guide members |
| CN1701925A (en) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | H type air floating workbench with synchronization driving of bilateral linear motor |
| CN102189413A (en) * | 2011-04-12 | 2011-09-21 | 华中科技大学 | Ultra-precise workbench |
| CN103592824A (en) * | 2013-11-29 | 2014-02-19 | 中国科学院光电技术研究所 | Two-degree-of-freedom high-precision large-stroke air-bearing workpiece platform |
| CN204595427U (en) * | 2015-02-28 | 2015-08-26 | 上海微电子装备有限公司 | A kind of work stage for exposing wafer |
| CN105252505A (en) * | 2015-11-30 | 2016-01-20 | 中国计量科学研究院 | Precise air-floatation displacement platform |
| CN207014005U (en) * | 2017-05-31 | 2018-02-16 | 朱小琴 | It is a kind of to be applied to the accurate aerostatic guide way for boring milling platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170818 |