CN103639711A - High-bearing-capacity precise two-dimensional motion platform - Google Patents
High-bearing-capacity precise two-dimensional motion platform Download PDFInfo
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- CN103639711A CN103639711A CN201310667251.0A CN201310667251A CN103639711A CN 103639711 A CN103639711 A CN 103639711A CN 201310667251 A CN201310667251 A CN 201310667251A CN 103639711 A CN103639711 A CN 103639711A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract
本发明公开了一种高承载精密二维运动平台，解决了现有的二维运动平台在高承载下运动导向精度不能满足高精度的问题。包括在大理石底座板（1）上设置有横向导轨（2）和横向导轨活动滑块（3），T形横向移动台架（5）的顶端横梁固定设置在横向导轨活动滑块上，在T形横向移动台架的纵梁底端固定设置有支撑行走轮（15），在T形横向移动台架上分别设置有纵向导轨（6）和纵向驱动装置（8），矩形移动框架（9）的一侧边固定连接在纵向导轨活动滑块上，在矩形移动框架中活动设置有气浮台（12），气浮台的气浮台底座（16）活动设置在大理石底座板上的。本发明消除了高负载对导轨导向精度的影响，解决定位平台承载力和精度之间的矛盾。
The invention discloses a high-load precision two-dimensional motion platform, which solves the problem that the motion guidance precision of the existing two-dimensional motion platform cannot meet high precision under high load. The marble base plate (1) is provided with a transverse guide rail (2) and a movable slider of the transverse guide rail (3), and the top beam of the T-shaped lateral moving platform (5) is fixedly arranged on the movable slider of the transverse guide rail. The bottom end of the longitudinal beam of the T-shaped transverse mobile platform is fixedly provided with supporting walking wheels (15), and the longitudinal guide rails (6) and the longitudinal driving device (8) are respectively arranged on the T-shaped transverse mobile platform, and the rectangular mobile frame (9) One side of the side is fixedly connected to the movable slider of the longitudinal guide rail, and an air bearing platform (12) is movably arranged in the rectangular moving frame, and the air bearing platform base (16) of the air bearing platform is movably arranged on the marble base plate. The invention eliminates the influence of high load on the guiding precision of the guide rail, and solves the contradiction between the bearing capacity and the precision of the positioning platform.
Description
Technical field
The present invention relates to the accurate XY motion platform of a kind of high-mechanic, be applied in particularly Electronic Special Equipment field of precision optical machinery, is a kind of high precision motion locating platform of high-bearing capacity.
Background technology
On high accuracy reverse chip key binder, two-dimension moving platform is its key equipment, and this device needs to realize the exactitude position to chip and substrate, also will carry the pressure of maximum 150 kilograms simultaneously.Existing accurate two-dimensional motion platform, is all arranged on line slideway, and on the not only responsible accurately guiding of line slideway but also responsible carrying platform and platform, the weight of work package, when motion platform is under high-mechanic, exists the unappeasable problem of motion guide precision.
Summary of the invention
The invention provides a kind of high-mechanic precise 2-D motion platform, solved existing two-dimension moving platform motion guide precision under high-mechanic and can not meet high-precision technical problem.
The present invention solves above technical problem by the following technical programs:
A kind of high-mechanic precise 2-D motion platform, comprise marble bedplate, on marble bedplate, be provided with cross slide way, on cross slide way, be provided with cross slide way movable slider, on the marble bedplate in the outside of cross slide way, be provided with lateral driver device, the screw of lateral driver device is fixedly connected with cross slide way movable slider, the top crossbeam of T shape transverse shifting stand is fixedly installed on cross slide way movable slider, longeron bottom at T shape transverse shifting stand is fixedly installed support road wheel, on T shape transverse shifting stand, be respectively arranged with longitudinal rail and longitudinal driving device, on longitudinal rail, be provided with longitudinal rail movable slider, the screw of longitudinal driving device is fixedly connected with longitudinal rail movable slider, one side of rectangle movable frame is fixedly connected on longitudinal rail movable slider, in rectangle movable frame, be movably set with air floating table, the air floating table base of air floating table is movably arranged on marble bedplate.
On air floating table base, be provided with air floating table footstock, stretcher before being fixedly installed in the front side edge of air floating table footstock, stretcher after being fixedly installed in the back side edge of air floating table footstock, shell fragment bridge before being provided with on the front side frame end face of rectangle movable frame, shell fragment bridge after being provided with on the rear side frame end face of rectangle movable frame, front stretcher is movably arranged on front shell fragment bridge, and rear stretcher is movably arranged on rear shell fragment bridge.
The present invention is simple in structure; In design, abandon the thought that traditional X-ray Y Platform Designing middle guide had not only led but also had been responsible for carrying.Motion adopts high precision ball guide rail to realize the accurate guiding of XY, between platform bearer main body and granite base plane, plane air-float guide rail is set, high-mechanic, high stability, low friction have been realized, eliminate the impact of high capacity on guide rail guiding accuracy, solved the contradiction between locating platform bearing capacity and precision.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of air floating table 12 of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail:
A kind of high-mechanic precise 2-D motion platform, comprise marble bedplate 1, on marble bedplate 1, be provided with cross slide way 2, on cross slide way 2, be provided with cross slide way movable slider 3, on the marble bedplate 1 in the outside of cross slide way 2, be provided with lateral driver device 4, the screw of lateral driver device 4 is fixedly connected with cross slide way movable slider 3, the top crossbeam of T shape transverse shifting stand 5 is fixedly installed on cross slide way movable slider 3, in the longeron bottom of T shape transverse shifting stand 5, be fixedly installed and support road wheel 15, on T shape transverse shifting stand 5, be respectively arranged with longitudinal rail 6 and longitudinal driving device 8, on longitudinal rail 6, be provided with longitudinal rail movable slider 7, the screw of longitudinal driving device 8 is fixedly connected with longitudinal rail movable slider 7, one side of rectangle movable frame 9 is fixedly connected on longitudinal rail movable slider 7, in rectangle movable frame 9, be movably set with air floating table 12, the air floating table base 16 of air floating table 12 is movably arranged on marble bedplate 1.
On air floating table base 16, be provided with air floating table footstock 17, stretcher 13 before being fixedly installed in the front side edge of air floating table footstock 17, stretcher 14 after being fixedly installed in the back side edge of air floating table footstock 17, shell fragment bridge 10 before being provided with on the front side frame end face of rectangle movable frame 9, shell fragment bridge 11 after being provided with on the rear side frame end face of rectangle movable frame 9, front stretcher 13 is movably arranged on front shell fragment bridge 10, and rear stretcher 14 is movably arranged on rear shell fragment bridge 11.
Patent of the present invention adopts marble bedplate 1 pedestal as XY motion platform, the motion platform of plane X direction, it is T shape transverse shifting stand 5, be arranged on marble bedplate 1, one end of T shape transverse shifting stand 5 is arranged on cross slide way 2, and the other end is arranged in the flat surface of marble bedplate 1 by supporting road wheel 15; The motion platform of plane Y-direction, longitudinal rail movable slider 7, are arranged on T shape transverse shifting stand 5; Air floating table 12 is supporting bodies of motion platform, be a plane floating cushion, be movably arranged on marble bedplate 1, air floating table 12 is filled with after clean compressed air, form air film with the flat surface of marble bedplate 1, can be without frictionally moving freely on plane X, Y both direction.One side of rectangle movable frame 9 is fixedly connected on longitudinal rail movable slider 7, in rectangle movable frame 9, be movably set with air floating table 12, and air floating table 12 is connected with rear stretcher 14 elasticity with the front stretcher 13 on air floating table 12 with rear shell fragment bridge 11 by front shell fragment bridge 10, by control cross slide way movable slider 3 and longitudinal rail movable slider 7 realize to the XY of rectangle movable frame 9 to accurate running fix.Because shell fragment bridge only limits the motion of XY direction, and the fine motion that the Z-direction load of air supporting seat produces, do not increase the load of XY platform, be directly delivered on marble bedplate 1, therefore load capacity and the precision of platform guarantee by two dissimilar guide rails, be independent of each other, solved the contradiction between platform bearer power and platform precision.
Described XY platform type of drive is not limited to motor and drives leading screw mode, and type of drive can be that linear electric motors or voice coil motor drive.Described XY platform guidance mode is not limited to spherical guide mode, and guidance mode can be also air-float guide rail.Support road wheel 15 guidance modes that described Y platform is one can also be spherical guide or floating cushion.Described air floating table 12 is not limited to monoblock floating cushion scheme, can be also that a plurality of stingy camels form floating cushion carrying group.
Claims (2)
1. a high-mechanic precise 2-D motion platform, comprise marble bedplate (1), on marble bedplate (1), be provided with cross slide way (2), on cross slide way (2), be provided with cross slide way movable slider (3), on the marble bedplate (1) in the outside of cross slide way (2), be provided with lateral driver device (4), the screw of lateral driver device (4) is fixedly connected with cross slide way movable slider (3), it is characterized in that, the top crossbeam of T shape transverse shifting stand (5) is fixedly installed on cross slide way movable slider (3), in the longeron bottom of T shape transverse shifting stand (5), be fixedly installed and support road wheel (15), on T shape transverse shifting stand (5), be respectively arranged with longitudinal rail (6) and longitudinal driving device (8), on longitudinal rail (6), be provided with longitudinal rail movable slider (7), the screw of longitudinal driving device (8) is fixedly connected with longitudinal rail movable slider (7), one side of rectangle movable frame (9) is fixedly connected on longitudinal rail movable slider (7), in rectangle movable frame (9), be movably set with air floating table (12), the air floating table base (16) of air floating table (12) is movably arranged on marble bedplate (1).
2. a kind of high-mechanic precise 2-D motion platform according to claim 1, it is characterized in that, on air floating table base (16), be provided with air floating table footstock (17), in the front side edge of air floating table footstock (17), be fixedly installed front stretcher (13), in the back side edge of air floating table footstock (17), be fixedly installed rear stretcher (14), on the front side frame end face of rectangle movable frame (9), be provided with front shell fragment bridge (10), on the rear side frame end face of rectangle movable frame (9), be provided with rear shell fragment bridge (11), front stretcher (13) is movably arranged on front shell fragment bridge (10), rear stretcher (14) is movably arranged on rear shell fragment bridge (11).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310667251.0A CN103639711B (en) | 2013-12-11 | 2013-12-11 | High-bearing-capacitprecise precise two-dimensional motion platform |
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| CN201310667251.0A CN103639711B (en) | 2013-12-11 | 2013-12-11 | High-bearing-capacitprecise precise two-dimensional motion platform |
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| CN103639711A true CN103639711A (en) | 2014-03-19 |
| CN103639711B CN103639711B (en) | 2016-01-20 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106168493A (en) * | 2015-05-20 | 2016-11-30 | 冯黎 | Gantry measuring machine double crossbeam design structure of beam combination is driven by guide beam and load-bearing |
| CN109014457A (en) * | 2018-08-13 | 2018-12-18 | 中国纺织科学研究院有限公司 | A kind of air bearing for processing spinneret is guide locating device provided |
| CN109048028A (en) * | 2018-08-07 | 2018-12-21 | 航天恒星科技有限公司 | wire bonding method and system |
| CN113437008A (en) * | 2021-06-23 | 2021-09-24 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Bonding machine |
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| US4778143A (en) * | 1984-06-15 | 1988-10-18 | Omron Tateisi Electronics Co. | Apparatus for locking movable table |
| CN2148634Y (en) * | 1992-05-30 | 1993-12-08 | 李鹏生 | Superprecious work-table |
| CN1423810A (en) * | 1999-11-24 | 2003-06-11 | 多佛器械公司 | High-stability spin stand platform |
| CN101408732A (en) * | 2008-11-19 | 2009-04-15 | 哈尔滨工业大学 | Embedded type common basal plane two-dimension balance double-drive double-workpiece platform positioning system |
| CN102393610A (en) * | 2011-11-12 | 2012-03-28 | 哈尔滨工业大学 | Gyro precession type active stabilizing device for workbench of lithography machine |
| CN202317689U (en) * | 2011-11-15 | 2012-07-11 | 华中科技大学 | Aerostatically-borne and electromagnetically-driven ultraprecise working platform |
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2013
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4778143A (en) * | 1984-06-15 | 1988-10-18 | Omron Tateisi Electronics Co. | Apparatus for locking movable table |
| CN2148634Y (en) * | 1992-05-30 | 1993-12-08 | 李鹏生 | Superprecious work-table |
| CN1423810A (en) * | 1999-11-24 | 2003-06-11 | 多佛器械公司 | High-stability spin stand platform |
| CN101408732A (en) * | 2008-11-19 | 2009-04-15 | 哈尔滨工业大学 | Embedded type common basal plane two-dimension balance double-drive double-workpiece platform positioning system |
| CN102393610A (en) * | 2011-11-12 | 2012-03-28 | 哈尔滨工业大学 | Gyro precession type active stabilizing device for workbench of lithography machine |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106168493A (en) * | 2015-05-20 | 2016-11-30 | 冯黎 | Gantry measuring machine double crossbeam design structure of beam combination is driven by guide beam and load-bearing |
| CN106168493B (en) * | 2015-05-20 | 2019-04-23 | 冯黎 | The double crossbeam design structures of gantry measuring machine combined by guide beam with load-bearing driving beam |
| CN109048028A (en) * | 2018-08-07 | 2018-12-21 | 航天恒星科技有限公司 | wire bonding method and system |
| CN109014457A (en) * | 2018-08-13 | 2018-12-18 | 中国纺织科学研究院有限公司 | A kind of air bearing for processing spinneret is guide locating device provided |
| CN109014457B (en) * | 2018-08-13 | 2024-03-26 | 中国纺织科学研究院有限公司 | Air floatation guiding and positioning device for processing spinneret plate |
| CN113437008A (en) * | 2021-06-23 | 2021-09-24 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Bonding machine |
| CN113437008B (en) * | 2021-06-23 | 2023-11-17 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | bonding machine |
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| CN103639711B (en) | 2016-01-20 |
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