High-mechanic precise 2-D motion platform
Technical field
The present invention relates to the accurate XY motion platform of a kind of high-mechanic, be applied in particularly Electronic Special Equipment field of precision optical machinery, is a kind of high precision motion locating platform of high-bearing capacity.
Background technology
On high accuracy reverse chip key binder, two-dimension moving platform is its key equipment, and this device needs to realize the exactitude position to chip and substrate, also will carry the pressure of maximum 150 kilograms simultaneously.Existing accurate two-dimensional motion platform, is all arranged on line slideway, and on the not only responsible accurately guiding of line slideway but also responsible carrying platform and platform, the weight of work package, when motion platform is under high-mechanic, exists the unappeasable problem of motion guide precision.
Summary of the invention
The invention provides a kind of high-mechanic precise 2-D motion platform, solved existing two-dimension moving platform motion guide precision under high-mechanic and can not meet high-precision technical problem.
The present invention solves above technical problem by the following technical programs:
A kind of high-mechanic precise 2-D motion platform, comprise marble bedplate, on marble bedplate, be provided with cross slide way, on cross slide way, be provided with cross slide way movable slider, on the marble bedplate in the outside of cross slide way, be provided with lateral driver device, the screw of lateral driver device is fixedly connected with cross slide way movable slider, the top crossbeam of T shape transverse shifting stand is fixedly installed on cross slide way movable slider, longeron bottom at T shape transverse shifting stand is fixedly installed support road wheel, on T shape transverse shifting stand, be respectively arranged with longitudinal rail and longitudinal driving device, on longitudinal rail, be provided with longitudinal rail movable slider, the screw of longitudinal driving device is fixedly connected with longitudinal rail movable slider, one side of rectangle movable frame is fixedly connected on longitudinal rail movable slider, in rectangle movable frame, be movably set with air floating table, the air floating table base of air floating table is movably arranged on marble bedplate.
On air floating table base, be provided with air floating table footstock, stretcher before being fixedly installed in the front side edge of air floating table footstock, stretcher after being fixedly installed in the back side edge of air floating table footstock, shell fragment bridge before being provided with on the front side frame end face of rectangle movable frame, shell fragment bridge after being provided with on the rear side frame end face of rectangle movable frame, front stretcher is movably arranged on front shell fragment bridge, and rear stretcher is movably arranged on rear shell fragment bridge.
The present invention is simple in structure; In design, abandon the thought that traditional X-ray Y Platform Designing middle guide had not only led but also had been responsible for carrying.Motion adopts high precision ball guide rail to realize the accurate guiding of XY, between platform bearer main body and granite base plane, plane air-float guide rail is set, high-mechanic, high stability, low friction have been realized, eliminate the impact of high capacity on guide rail guiding accuracy, solved the contradiction between locating platform bearing capacity and precision.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of air floating table 12 of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail:
A kind of high-mechanic precise 2-D motion platform, comprise marble bedplate 1, on marble bedplate 1, be provided with cross slide way 2, on cross slide way 2, be provided with cross slide way movable slider 3, on the marble bedplate 1 in the outside of cross slide way 2, be provided with lateral driver device 4, the screw of lateral driver device 4 is fixedly connected with cross slide way movable slider 3, the top crossbeam of T shape transverse shifting stand 5 is fixedly installed on cross slide way movable slider 3, in the longeron bottom of T shape transverse shifting stand 5, be fixedly installed and support road wheel 15, on T shape transverse shifting stand 5, be respectively arranged with longitudinal rail 6 and longitudinal driving device 8, on longitudinal rail 6, be provided with longitudinal rail movable slider 7, the screw of longitudinal driving device 8 is fixedly connected with longitudinal rail movable slider 7, one side of rectangle movable frame 9 is fixedly connected on longitudinal rail movable slider 7, in rectangle movable frame 9, be movably set with air floating table 12, the air floating table base 16 of air floating table 12 is movably arranged on marble bedplate 1.
On air floating table base 16, be provided with air floating table footstock 17, stretcher 13 before being fixedly installed in the front side edge of air floating table footstock 17, stretcher 14 after being fixedly installed in the back side edge of air floating table footstock 17, shell fragment bridge 10 before being provided with on the front side frame end face of rectangle movable frame 9, shell fragment bridge 11 after being provided with on the rear side frame end face of rectangle movable frame 9, front stretcher 13 is movably arranged on front shell fragment bridge 10, and rear stretcher 14 is movably arranged on rear shell fragment bridge 11.
Patent of the present invention adopts marble bedplate 1 pedestal as XY motion platform, the motion platform of plane X direction, it is T shape transverse shifting stand 5, be arranged on marble bedplate 1, one end of T shape transverse shifting stand 5 is arranged on cross slide way 2, and the other end is arranged in the flat surface of marble bedplate 1 by supporting road wheel 15; The motion platform of plane Y-direction, longitudinal rail movable slider 7, are arranged on T shape transverse shifting stand 5; Air floating table 12 is supporting bodies of motion platform, be a plane floating cushion, be movably arranged on marble bedplate 1, air floating table 12 is filled with after clean compressed air, form air film with the flat surface of marble bedplate 1, can be without frictionally moving freely on plane X, Y both direction.One side of rectangle movable frame 9 is fixedly connected on longitudinal rail movable slider 7, in rectangle movable frame 9, be movably set with air floating table 12, and air floating table 12 is connected with rear stretcher 14 elasticity with the front stretcher 13 on air floating table 12 with rear shell fragment bridge 11 by front shell fragment bridge 10, by control cross slide way movable slider 3 and longitudinal rail movable slider 7 realize to the XY of rectangle movable frame 9 to accurate running fix.Because shell fragment bridge only limits the motion of XY direction, and the fine motion that the Z-direction load of air supporting seat produces, do not increase the load of XY platform, be directly delivered on marble bedplate 1, therefore load capacity and the precision of platform guarantee by two dissimilar guide rails, be independent of each other, solved the contradiction between platform bearer power and platform precision.
Described XY platform type of drive is not limited to motor and drives leading screw mode, and type of drive can be that linear electric motors or voice coil motor drive.Described XY platform guidance mode is not limited to spherical guide mode, and guidance mode can be also air-float guide rail.Support road wheel 15 guidance modes that described Y platform is one can also be spherical guide or floating cushion.Described air floating table 12 is not limited to monoblock floating cushion scheme, can be also that a plurality of stingy camels form floating cushion carrying group.