CN102307031A - Magnetic suspension linear motion platform based on combination of permanent magnets and electromagnets - Google Patents

Magnetic suspension linear motion platform based on combination of permanent magnets and electromagnets Download PDF

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Publication number
CN102307031A
CN102307031A CN201110265907A CN201110265907A CN102307031A CN 102307031 A CN102307031 A CN 102307031A CN 201110265907 A CN201110265907 A CN 201110265907A CN 201110265907 A CN201110265907 A CN 201110265907A CN 102307031 A CN102307031 A CN 102307031A
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China
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suspended substance
electromagnet
line slideway
permanent
magnetic suspension
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CN201110265907A
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Chinese (zh)
Inventor
周海波
段吉安
瞿田华
郑蕾
王文祝
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Central South University
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Central South University
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Priority to CN201110265907A priority Critical patent/CN102307031A/en
Publication of CN102307031A publication Critical patent/CN102307031A/en
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Abstract

The invention discloses a magnetic suspension linear motion platform based on the combination of permanent magnets and electromagnets. The electromagnets are vertically installed in a suspensoid, array permanent magnets are arranged on the surface of a guide rail, the suspension of the suspensoid can be realized by utilizing the principle of holopolarity repulsion between the electromagnets and the permanent magnets; and meanwhile, an eddy current displacement sensor is combined to realize the stable suspension of the suspensoid above the guide rail; two pairs of electromagnets are horizontally installed in the suspensoid, which can provide guidance for the linear motion of the platform by combining with the eddy current displacement sensor; a linear motor stator is fixed on a base, a linear motor rotor is fixed on the suspensoid, a grating ruler is arranged on the surface of the guide rail, and the reading head of the grating ruler is installed on the suspensoid, thus the precise linear positioning motion of the suspensoid can be realized. The platform provided by the invention can realize the functions such as super cleaning, high speed, long stroke, precise positioning motion and the like, which can not be realized by the traditional scheme that a rotary servo motor is utilized to drive, a precise ball screw is utilized to transmit and a slide guide is utilized to support, and has the advantages of good load bearing characteristic and stable suspension performance.

Description

The magnetic suspension linear motion platform that a kind of permanent-magnetism electromagnetic combines
Technical field
The present invention relates to a kind of linear motion platform; Particularly relate to the magnetic suspension linear motion platform that a kind of permanent-magnetism electromagnetic combines, this magnetic suspension linear motion platform can be applicable to similar semiconductor lithography machine, chip bonding motion platform etc. at a high speed, in ultra clean, the ultraprecise setting movement platform.
Technical background
Modern Manufacturing Technology just develops towards high speed, precise treatment and modularization direction; New and high technology manufacturing industry such as information have not only proposed more and more higher requirement to process equipment performance such as locating accuracy and speed; And more and more stricter requirement has been proposed equally to manufacturing environment, all require completion processing and fabricating under ultra clean environment like microelectronic products such as opto-electronic device, semiconductor chips.In microelectronics Packaging equipment such as eutectic die Bonder, full-automatic gold wire bonder and IC chipset such as mask aligner, often need fast and very accurate localization and very fine motion, therefore need high performance ultra precise workbench as its technical support.
Magnetic suspension ultraprecise straight line locating platform is to process and a kind of novel quick stepping, the precision positioning mechanism of development to the high-speed, high precision location and the ultra clean environment of work stage, mask platform in microelectronic industry high-precision IC chip manufacturing equipment such as the mask aligner.The traditional schemes such as the mechanical rigid way of contact that this type platform adopts rotating servo motor driving, precise ball screw transmission and rail plate to support more; There is fretting wear in this mode, produces metallic dust; And need lubricated; And when starting, adding (subtracting) speed, counter-rotating and stopping; The strain that intermediate link produced, friction, connection gap and backlass etc.; Can cause the hysteresis and the nonlinearity erron of feed motion, various joint gaps have influenced positioning accuracy.The appearance of linear electric motors has overcome the shortcoming that electric rotating machine adds the screw mandrel kind of drive, has improved its feeding property greatly, but the metallic dust that friction is produced still is unfavorable for the raising of the performance and the quality of integrated circuit (IC) chip.Though the air supporting supporting way of Recent study has been eliminated friction; But because air floating platform is to utilize control air to pass through valve to quicken to flow; To produce impulsive force to guide rail; Thereby impact resistance is low; Air floating platform only limits in the less relatively space of air flows simultaneously, can produce certain influence to its motion when extraneous air flows is big, and pneumatically supported in addition bearing capacity is low, support stiffness is little; And be not suitable for working under the vacuum environment, therefore also greatly reduce its advantage.And the precise motion that the magnetic suspension linear motion platform that utilizes permanent-magnetism electromagnetic to combine among the present invention is realized has obtained extensive concern owing to having the incomparable advantage of above-mentioned conventional method and in recent years.
Summary of the invention
Technical problem to be solved by this invention provides a kind of ultra cleaning, high-speed, big stroke, precision positioning campaign, support force is big, bearer properties good, suspension rigidity big and adapt to the magnetic suspension linear motion platform that the permanent-magnetism electromagnetic of the work under the vacuum environment combines.
In order to solve the problems of the technologies described above; The magnetic suspension linear motion platform that permanent-magnetism electromagnetic provided by the invention combines; Comprise pedestal and suspended substance; Line slideway is fixedly mounted on the described pedestal; Described suspended substance is suspended in the top of described line slideway; Evenly be provided with the permanent magnet of array on the described line slideway on the guide pass relative with described suspended substance, on the vertical direction of described suspended substance and on the described suspended substance along the electromagnet that is equipped with on the opposite flank direction of described line slideway with the corresponding repulsion of described permanent magnet; Described suspended substance is provided with the eddy displacement sensor that is used to detect described suspended substance all directions motion state; The stator of linear electric motors is fixed on the described pedestal along the direction of motion of described line slideway; The mover of described linear electric motors is fixed on the described suspended substance, on described suspended substance and described guide rail, is provided with grating chi and the grating ruler reading head of the described suspended substance of real-time measurement along the position of described line slideway horizontal direction.
Described electromagnet in the setting of described suspended substance vertical direction is an I type electromagnet; The electromagnet that is provided with on the horizontal direction is an E type electromagnet.
Described suspended substance adopts aluminium alloy U type member; The electromagnet that vertical direction is provided with is located on the inner plane of described aluminium alloy U type member symmetrically and evenly, and the electromagnet that the opposite flank direction is provided with is located on the opposite flank of described aluminium alloy U type member symmetrically and evenly.
Vertical direction at described suspended substance is provided with 6 electromagnet altogether, about 3 and be symmetrical distribution respectively; Described suspended substance the horizontal direction of opposite flank on 2 pairs of electromagnet are set.
The iron core of described electromagnet adopts stacked silicon steel structure, on described iron core, is furnished with cooling water pipe.
Described linear electric motors are 2, and described grating chi and read head thereof are 2 covers; Described eddy displacement sensor is 6; Wherein 4 described eddy displacement sensors be installed on the vertical direction of described suspended substance the above electromagnet near, the side that other 2 described eddy displacement sensors are placed in described suspended substance be equipped with described electromagnet near.Described grating chi is located on the guide pass of described line slideway, and described grating ruler reading head is located on the described suspended substance.
The magnetic suspension linear motion platform that the permanent-magnetism electromagnetic of employing technique scheme combines; Line slideway is installed on the pedestal; On the vertical direction of suspended substance, be provided with six electromagnet, about each three and be symmetrical distribution, be provided with two pairs of electromagnet along the line slideway horizontal direction; Suspended substance is provided with the eddy current displacement sensor that is used to detect suspended substance all directions motion state, suspended substance under solenoid actuated power, eddy current displacement sensor feedback effect stable suspersion above line slideway; The stator of linear electric motors is fixed on the pedestal along the guide rail direction, and the mover of linear electric motors is fixed on the suspended substance, does not have machinery between stator and the mover and contact, and the electromagnetic push driving suspended substance between stator and mover is done contactless straight line setting movement along line slideway.On the guide pass of line slideway, be provided with the grating chi, on suspended substance, be provided with grating ruler reading head, grating chi and read head thereof are measured the position of suspended substance along the guide rail horizontal direction in real time, are used to control the precision positioning campaign of suspended substance.Also evenly be provided with array permanent magnetism iron on the guide pass, through with suspended substance on the interact stable suspersion of the electromagnetic repulsion force implementation platform that produces of the electromagnet that is provided with of vertical direction.Workbench is placed in the through hole at suspended substance center, and this through hole also can be arranged to other form to adapt to the real needs of workbench.
Suspended substance is a U type member suspended substance.Electromagnet is installed on the suspended substance, and electromagnetic force all acts on the suspended substance.Connector is symmetrical set a lot of blind holes or groove alleviating suspended substance weight, through reinforcement being set and changing reinforcement quantity and thickness improves its rigidity.
Evenly be provided with the permanent magnet of array on the line slideway guide pass, through with suspended substance on electromagnet interact to produce electromagnetic repulsion force, the stable suspersion of implementation platform.
Electromagnet in the vertical direction setting of suspended substance is an I type electromagnet, totally 6, about each 3, and about be symmetrical distribution.The electromagnet of horizontal direction setting is an E type electromagnet, totally 2 pairs.Linear electric motors are 2, and the stator of linear electric motors is fixed on the pedestal along the guide rail direction, and the mover of linear electric motors is fixed on the suspended substance, drive suspended substance along the guide rail rectilinear motion.Eddy displacement sensor is 6, and wherein 4 eddy displacement sensors are installed near the electromagnet on the upper surface of suspended substance, and other 2 eddy displacement sensors are placed near the electromagnet of suspended substance side, are used for feeding back in real time the displacement of electromagnet.Grating ruler reading head and grating chi are 2 covers, are used for feeding back in real time suspended substance along the straight-line displacement of guide rail.Be respectively equipped with 15 permanent magnets on two faces about guide rail, be used for the stable suspersion of implementation platform.
Magnetic levitation technology is a kind of contactless, typical electromechanical integration new and high technology of friction free.This magnetic suspension linear motion locating platform can effectively be controlled through electromagnetic force; Thereby eliminate the friction problem of traditional platform; Solve the difficult problem that the air floating platform bearing capacity is low, suspension rigidity is little, have pollution-free, noise is little, easy care, the life-span is long, speed is fast, precision is high, movement travel is big, platform rigidity is strong and bearing capacity good, and is contactless; There is not friction; Suspension is good, good stability, and reliability is high; Can in vacuum environment, move, have following advantage:
(1) the present invention adopts the magnetic levitation technology that permanent-magnetism electromagnetic combines, and does not have friction, and suspension is good, good energy saving property, and control simple and convenient.
(2) this straight line setting movement is compared with traditional leading screw, directly produces thrust without any need for conversion equipment, does not have the machinery contact, reduces the parts loss, has improved transmission efficiency, reliability and life-span.Compare with electric rotating machine, do not produce centrifugal force, movement velocity is higher, can realize setting movement at a high speed, and noiseless.
(3) linear electric motors directly produce electromagnetic push through electric energy; Motion does not have the machinery contact between the stator of linear electric motors and the mover; Driving force produces in air gap; Make the transmission parts not have wearing and tearing; Thereby significantly reduced mechanical loss; Increase useful life, eliminated the influence that dust that lubricating oil and friction produced brings, be suitable for ultra clean processing environment.
(4) although the air supporting machining accuracy is also high, because air supporting utilizes the effect of air, can not be applied to vacuum processing, suspended substance suspension rigidity, bearing capacity, shock resistance antijamming capability are low, the invention solves this difficult problem, and have improved the robustness of suspended motion.
(5) adopt dual linear motor to drive, increased the actuating force in the platform rectilinear motion process greatly, strengthened the bearing capacity of platform, improved straight-line acceleration, realize the easy motion of mobile platform.
(6) rectilinear motion stroke of the present invention can be accomplished endless in theory, also supports simultaneously a plurality of suspended substances on the same guide rail to work, accomplish simultaneously the straight line back and forth movement of a plurality of motion platforms side by side.
The magnetic suspension linear motion platform that permanent-magnetism electromagnetic proposed by the invention combines utilizes electromagnetic repulsion force, electromagnetism linear drives to make linear motion platform accomplish the quick straight line setting movement of round precision of no mechanical contact; Functions such as the ultra cleaning that the traditional scheme institute that can realize using that rotating servo motor drives, precise ball screw transmission and rail plate supports can't realize, high-speed, big stroke, precision positioning campaign have the suspension rigidity and better bearer properties bigger than gas suspension mask aligner mask platform.
Description of drawings
Fig. 1 is the magnetic suspension linear motion platform overall structure figure that a kind of permanent-magnetism electromagnetic combines.
Fig. 2 is the suspended substance structure chart.
Fig. 3 is the electromagnet distribution map.
Fig. 4 is pedestal and guide rail structure figure.
Fig. 5 is I type electromagnet structure figure.
Fig. 6 is E type electromagnet structure figure.
Embodiment
Below will combine accompanying drawing and practical implementation process that the present invention is explained further details.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6, form by granite ground 1, first line slideway 2, second line slideway 22,3 three parts of suspended substance from bottom to top.All adopt with the guide pass of corresponding first line slideway 2 of electromagnet and second line slideway 22 and to polish processing and homogenization processing, make processing guide rail surface flatness and perpendicularity all reach the micron order precision.The guide pass of first line slideway 2 is provided with first permanent magnet 121 of array; The guide pass of second line slideway 22 is provided with second permanent magnet 122 of array; The modular construction of suspended substance 3 as shown in Figure 2; It mainly is aluminium alloy U type member 300; 6 blocks of I type electromagnet; The one I type electromagnet 301; The 2nd I type electromagnet 302; The 3rd I type electromagnet 303; The 4th I type electromagnet 304; The 5th I type electromagnet 305 and the 6th I type electromagnet 306 (as shown in Figure 5); 4 blocks of E type electromagnet; Like an E type electromagnet 307A; The 2nd E type electromagnet 307B; The 3rd E type electromagnet 308A and the 4th E type electromagnet 308B (as shown in Figure 6); 6 eddy current displacement sensors; First eddy current displacement sensor 311; Second eddy current displacement sensor 312; The 3rd eddy current displacement sensor 313; The 4th eddy current displacement sensor 314; The 5th eddy current displacement sensor 315 and the 6th eddy current displacement sensor 316; 2 linear motor rotors; First linear motor rotor 321 and second linear motor rotor 322; 2 grating ruler reading heads, first grating ruler reading head 331 and second grating ruler reading head 332.Keep certain clearance between every block of electromagnet and the corresponding line slideway.At the vertical direction of suspended substance 3 is that the Z direction is provided with an I type electromagnet 301, the 2nd I type electromagnet 302, the 3rd I type electromagnet 303, the 4th I type electromagnet 304, the 5th I type electromagnet 305 and the 6th I type electromagnet 306; About 3 and be symmetrically and distribute respectively; Adopt the Differential Control mode; Differential working method can produce two-way control, improves workbench rigidity.Through with first line slideway 2 and second line slideway 22 on first permanent magnet 121 and second permanent magnet 122 interact and produce electromagnetic repulsion forces the vertical direction electromagnetic force is provided; Supporting whole suspended substance 3, and can be through regulating levitation position and the leveling of implementation platform that size of current in the solenoid changes electromagnetic force control suspended substance; The opposite flank of the aluminium alloy U type member 300 of suspended substance 3 is an E type electromagnet 307A, the 2nd E type electromagnet 307B, the 3rd E type electromagnet 308A and the 4th E type electromagnet 308B that directions X is provided with two pairs of differential structures; The horizontal direction electromagnetic force is provided, to play the motion guide effect of Y direction.At an I type electromagnet 301; The 2nd I type electromagnet 302; The 5th I type electromagnet 305 and the 6th I type electromagnet 306 next doors are respectively equipped with first eddy current displacement sensor 311; Second eddy current displacement sensor 312; The 3rd eddy current displacement sensor 313; The 4th eddy current displacement sensor 314 feeds back the gap between every pair of electromagnet and the corresponding guide rail face in real time; From sensor acquisition to displacement signal change voltage signal into; In conjunction with the appropriate control algorithm; Control such as PID; Fuzzy control; ANN Control; The adjustment Control Parameter; Produce output voltage; Control the magnet exciting coil electrical current in real time through power amplifier and change the electromagnetic suspension force size; Make suspended substance 3 stable suspersions in first line slideway 2 and second line slideway, 22 tops, realize the leveling and focusing of working face.Fig. 4 is the base rail structure chart.Base is made up of granite ground 1, first line slideway 2, second line slideway 22 and first linear motor stator electric 131, second linear motor stator electric 132.First linear motor stator electric 131 and second linear motor stator electric 132 are fixed on the granite ground 1, and the dual linear motor of forming with first linear motor rotor 321 and second linear motor rotor 322 that are installed on the suspended substance 3 drives suspended substance 3 and moves along the quick straight line of line slideway direction.Adopt linear motor driving suspended substance 3 to move along the guide rail direction.Be affixed on the first grating chi 111, the second grating chi 112 on the first guide pass 103A and the first guide pass 103B and be installed on the reponse system that first grating ruler reading head 331 and second grating ruler reading head 332 on the suspended substance 3 form and feed back suspended substance rectilinear motion position in real time, thereby change the accurate location that the size of linear motor driving power realizes suspended substance along the guide rail movement direction.
Fig. 5 is I type electromagnet structure figure, and Fig. 6 is E type electromagnet structure figure.Electromagnet core adopts stacked silicon steel structure, and two block pressur plates 309 are compressed silicon steel sheet 307, and silicon steel sheet 307 is provided with solenoid 308, and pressing plate 309 is fastening with the extruding of silicon steel sheet 307 usefulness bolts, then pressing plate 309 is connected on the suspended substance 3.Help reducing magnetic field eddy current loss, and on iron core, arrange cooling water pipe 310, prevent that electromagnet is overheated.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6; Workbench is installed on the aluminium alloy U type member 300 of suspended substance 3; Five degrees of freedom on the suspended substance 3 are applied control realize stable suspersion, only keeping the degree of freedom that moves along the line slideway direction is direction of feed.The workbench of being made up of precise guide rail has six-freedom degree and can realize the progressively leveling and focusing of working face.Suspended substance 3 is to have 10 blocks of electromagnet (wherein six the one I type electromagnet 301, the 2nd I type electromagnet 302, the 3rd I type electromagnet 303, the 4th I type electromagnet 304, the 5th I type electromagnet 305 and the 6th I type electromagnet 306 are in vertical direction, and two couples four the one E type electromagnet 307A, the 2nd E type electromagnet 307B, the 3rd E type electromagnet 308A and the 4th E type electromagnet 308B are in the horizontal direction) in the magnetic suspension mask platform.Keep certain clearance between every block of electromagnet and the corresponding line slideway.Wherein, Six blocks of electromagnet of vertical direction and suspended substance 3 are connected through bolt; When the quick stepping of workbench, provide the whole flat suspension required magnetic force; When working face needs leveling and focusing; Change the i.e. I type electromagnet 301 of six blocks of electromagnet respectively; The 2nd I type electromagnet 302; The 3rd I type electromagnet 303; The 4th I type electromagnet 304; The electrical current of the 5th I type electromagnet 305 and the 6th I type electromagnet 306; To change the magnetic force of each electromagnet; And then finely tune gap length separately; Control suspended substance 3 thus along the fine motion of Z axle with around X; The minor rotation of Y-axis reaches accurate leveling and focusing effect.Two pairs of electromagnet in a line slideway side i.e. E type electromagnet 307A, the 2nd E type electromagnet 307B, the 3rd E type electromagnet 308A also are to be connected through bolt with the 4th E type electromagnet 308B with suspended substance 3; The guiding magnetic force of the required constant magnitude of mechanism is provided, the line of motion property during with the guarantee stepping when the quick stepping of workbench.Equally, then can change gap length separately, to realize the horizontal micrometric displacement of workbench and around the minor rotation of Z axle when changing its electrical current.The gap of each piece electromagnet and line slideway is all by an eddy current displacement sensor The real time measure independently on suspended substance 3 vertical direction; Along on the line slideway horizontal direction each to the gap of electromagnet and line slideway also all by an eddy current displacement sensor The real time measure independently; And convert determination data into size that digital signal is come real-time FEEDBACK CONTROL gap, promptly control the position of suspended substance.Be affixed on the grating chi on the guide pass and connect firmly the realization fast precise rectilinear motion of the motion state of the real-time detection of straight lines motor of reponse system that read head is formed on suspended substance with the control motor.
Suspended substance 3 adopts aluminium alloy U type member 300, and electromagnetic force all acts on the suspended substance 3.Be symmetrical set a lot of blind holes or groove on the suspended substance 3 to alleviate suspended substance weight, through reinforcement being set and changing reinforcement quantity and its rigidity of thickness raising.
The used I type electromagnet 301 of suspended substance 3, the 2nd I type electromagnet 302, the 3rd I type electromagnet 303, the 4th I type electromagnet 304, the 5th I type electromagnet 305 and the 6th I type electromagnet 306 and an E type electromagnet 307A, the 2nd E type electromagnet 307B, the 3rd E type electromagnet 308A and the 4th E type electromagnet 308B all adopt power amplifier to drive.Output current through control system adjustment power amplifier reaches the purpose of control electromagnet with respect to the suspension air gap of guide rail, obtains the straight-line feed motion of stable suspended motion and fast precise in conjunction with the appropriate control algorithm.

Claims (7)

1. magnetic suspension linear motion platform that permanent-magnetism electromagnetic combines; Comprise pedestal and suspended substance; It is characterized in that: line slideway is fixedly mounted on the described pedestal; Described suspended substance is suspended in the top of described line slideway; Evenly be provided with the permanent magnet of array on the described line slideway on the guide pass relative with described suspended substance, on the vertical direction of described suspended substance and on the described suspended substance along the electromagnet that is equipped with on the opposite flank direction of described line slideway with the corresponding repulsion of described permanent magnet; Described suspended substance is provided with the eddy displacement sensor that is used to detect described suspended substance all directions motion state; The stator of linear electric motors is fixed on the described pedestal along the direction of motion of described line slideway; The mover of described linear electric motors is fixed on the described suspended substance, on described suspended substance and described guide rail, is provided with grating chi and the grating ruler reading head of the described suspended substance of real-time measurement along the position of described line slideway horizontal direction.
2. the magnetic suspension linear motion platform that permanent-magnetism electromagnetic according to claim 1 combines is characterized in that: the described electromagnet in the setting of described suspended substance vertical direction is an I type electromagnet; The electromagnet that is provided with on the horizontal direction is an E type electromagnet.
3. the magnetic suspension linear motion platform that permanent-magnetism electromagnetic according to claim 1 and 2 combines; It is characterized in that: described suspended substance adopts aluminium alloy U type member; The electromagnet that vertical direction is provided with is located on the inner plane of described aluminium alloy U type member symmetrically and evenly, and the electromagnet that the opposite flank direction is provided with is located on the opposite flank of described aluminium alloy U type member symmetrically and evenly.
4. the magnetic suspension linear motion platform that permanent-magnetism electromagnetic according to claim 1 and 2 combines is characterized in that: the vertical direction at described suspended substance is provided with 6 electromagnet altogether, about 3 and be symmetrical distribution respectively; Described suspended substance the horizontal direction of opposite flank on 2 pairs of electromagnet are set.
5. the magnetic suspension linear motion platform that permanent-magnetism electromagnetic according to claim 1 combines is characterized in that: the iron core of described electromagnet adopts stacked silicon steel structure, on described iron core, is furnished with cooling water pipe.
6. the magnetic suspension linear motion platform that permanent-magnetism electromagnetic according to claim 1 and 2 combines is characterized in that: described linear electric motors are 2, and described grating chi and read head thereof are 2 covers; Described eddy displacement sensor is 6; Wherein 4 described eddy displacement sensors be installed on the vertical direction of described suspended substance the above electromagnet near, the side that other 2 described eddy displacement sensors are placed in described suspended substance be equipped with described electromagnet near.
7. the magnetic suspension linear motion platform that permanent-magnetism electromagnetic according to claim 1 and 2 combines is characterized in that: described grating chi is located on the guide pass of described line slideway, and described grating ruler reading head is located on the described suspended substance.
CN201110265907A 2011-09-08 2011-09-08 Magnetic suspension linear motion platform based on combination of permanent magnets and electromagnets Pending CN102307031A (en)

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CN104092410A (en) * 2014-06-16 2014-10-08 浙江大学 Heating type boundary layer control resistance-reducing ultra-precise magnetic suspension guide rail working table system and method thereof
CN104400534A (en) * 2014-10-29 2015-03-11 北京工研精机股份有限公司 Machine tool feeding mechanism and large-stroke nanometer resolution movement feed driving device thereof
CN104600952A (en) * 2015-02-10 2015-05-06 浙江理工大学 Linear motor stator rail
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CN109494959A (en) * 2018-12-30 2019-03-19 南京尼欧科学仪器有限公司 A kind of novel driving motor based on electromagnetic technique
CN109510430A (en) * 2018-11-27 2019-03-22 西安工业大学 A kind of Precision Linear Moving platform
CN109870261A (en) * 2019-03-01 2019-06-11 西北工业大学 A kind of lower resistance magnetic suspension platform for microdriver thrust measurement
WO2021017570A1 (en) * 2019-07-31 2021-02-04 南京禹智智能科技有限公司 Double-station automatic glue dispensing robot and glue dispensing method therefor
CN112398304A (en) * 2020-11-23 2021-02-23 清华大学 Magnetic suspension planar motor

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Cited By (12)

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Publication number Priority date Publication date Assignee Title
CN104092410A (en) * 2014-06-16 2014-10-08 浙江大学 Heating type boundary layer control resistance-reducing ultra-precise magnetic suspension guide rail working table system and method thereof
CN104400534A (en) * 2014-10-29 2015-03-11 北京工研精机股份有限公司 Machine tool feeding mechanism and large-stroke nanometer resolution movement feed driving device thereof
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CN104600952A (en) * 2015-02-10 2015-05-06 浙江理工大学 Linear motor stator rail
CN105522400A (en) * 2016-01-22 2016-04-27 缪雪峰 Permanent magnet suspension slide guide for mini-type machine tool
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CN109494959A (en) * 2018-12-30 2019-03-19 南京尼欧科学仪器有限公司 A kind of novel driving motor based on electromagnetic technique
CN109870261A (en) * 2019-03-01 2019-06-11 西北工业大学 A kind of lower resistance magnetic suspension platform for microdriver thrust measurement
WO2021017570A1 (en) * 2019-07-31 2021-02-04 南京禹智智能科技有限公司 Double-station automatic glue dispensing robot and glue dispensing method therefor
CN112398304A (en) * 2020-11-23 2021-02-23 清华大学 Magnetic suspension planar motor

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