CN105765663B - A kind of high precision plane alignment system - Google Patents
A kind of high precision plane alignment system Download PDFInfo
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- CN105765663B CN105765663B CN201480033774.2A CN201480033774A CN105765663B CN 105765663 B CN105765663 B CN 105765663B CN 201480033774 A CN201480033774 A CN 201480033774A CN 105765663 B CN105765663 B CN 105765663B
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- linear motor
- sliding rail
- axis linear
- motor module
- electric mover
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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Abstract
The present invention proposes a kind of high precision plane alignment system, including pedestal, two X-axis linear motor modules, Y-axis linear motor module and load plate seat, two X-axis linear motor module symmetries are set on the base, Y-axis linear motor module wears load plate seat, and the first end and second end of Y-axis linear motor module connects two X-axis linear motor modules respectively；Y-axis linear motor module includes sliding rail installing plate, the first sliding rail, magnet, the first electric mover and the second electric mover, sliding rail installing plate is connect by the first sliding rail with load plate seat, first electric mover and the second electric mover are arranged in load plate seat, and the both sides of sliding rail installing plate set the first electric mover and the second electric mover by magnet card respectively.Y-axis linear motor module makes deformation well-balanced, improves the flatness of load plate seat, anti-anti-slip track installing plate stuck phenomenon occurs due to assymmetrical deformation using bi-motor and sliding rail installing plate unitary design.
Description
Technical field
The utility model is related to machinery field, more particularly to a kind of high precision plane alignment system.
Background technology
Chinese patent (CN103272739A) discloses a kind of 3 D locating device of view-based access control model guiding, is transported including X-axis
Dynamic system；Y-axis kinematic system, X-axis kinematic system movable supporting is in Y-axis kinematic system, the driving X-axis movement of Y-axis kinematic system
Axial movement of the system along Y-axis kinematic system.Wherein, X-axis kinematic system includes X-axis screw body and for driving X-axis screw
The X-axis stepper motor of mechanism；Y-axis kinematic system includes Y-axis screw body and for driving the Y-axis stepping of Y-axis screw body electric
Machine.The 3 D locating device employs plane center position information (i.e. the position of X/Y plane), improves the locating effect of system,
Can anti-locking system shake occurs at runtime and the problem of the overall offset of position location.
In addition to this, existing two-dimensional positioning system also has with lower structure, including two Y-axis and is arranged in two Y-axis
X-axis, Y-axis by belt or screw rod transmission, and pass through servo motor driving operation；X-axis passes through servo by screw rod transmission
Motor driving operation, axial movement of the X-axis along two Y-axis.
However there are following defects for the prior art：
First, by increasing the length of X-axis, meet the longer requirement of X-axis stroke, at this point, X-axis is vulnerable to gravity itself
It influences and flexural deformation, influences final positioning accuracy.If reduction flexural deformation, and increase the intensity of X-axis so that X-axis
Weight increases, and influences and reduce efficiency and sensitivity that X-axis is axially moved along Y-axis；
Second, the both ends of X-axis are directly anchored in the Y-axis of both sides, in high-speed cruising, are vulnerable to both sides y-axis motor and are gone out
Force compensating inconsistency and X-axis is caused to be blocked；
Third is used as the position feedback that X-axis is axially moved along Y-axis, at this point, grating by grating scale and encoder head
Ruler is all to be attached on the side of electric mover (it is the position feedback of electric mover that encoder is corresponding), and X-axis exists certain in itself
Toughness, this can lead to the position of encoder feedback and physical location, and there are deviations.
Utility model content
To solve the above-mentioned problems, the utility model provides a kind of high precision plane alignment system.
The technical solution adopted in the utility model is as follows：
A kind of high precision plane alignment system, including pedestal, two X-axis linear motor modules, Y-axis linear motor module and load
Disk seat, the two X-axis linear motor module symmetries are arranged on the pedestal, and the Y-axis linear motor module wears the load
Disk seat, the first end and second end of the Y-axis linear motor module connect the two X-axis linear motor modules respectively；
The first end of the Y-axis linear motor module connects the wherein one X-axis linear motor module by ball-and-socket joint；
The second end of the Y-axis linear motor module connects another X-axis linear motor module by axis joint.
Preferably, the Y-axis linear motor module include sliding rail installing plate, the first sliding rail, magnet, the first electric mover and
Second electric mover, the sliding rail installing plate are connect by first sliding rail with the load plate seat, first electric mover
It is arranged in the load plate seat with second electric mover, the both sides of the sliding rail installing plate are set respectively by the magnet card
First electric mover and second electric mover.
Preferably, the X-axis linear motor module includes the second sliding rail, track, electric mover, stent and track stent,
The track stent and second sliding rail are arranged on the pedestal, and the track is arranged on the track stent, described
Electric mover is fastened in the track, and connects the Y-axis linear motor module by the stent, on second sliding rail
It is provided with slider bracket.
Preferably, first grating scale is provided on the sliding rail installing plate, is provided on the load plate seat and described first
First encoder head of grating scale cooperation.
Preferably, the first end and second end bottom of the Y-axis linear motor module is respectively arranged with second encoder reading
Head is provided with the second grating scale coordinated with the second encoder read head on the pedestal.
Preferably, it is provided with flexible joint between first sliding rail and the load plate seat.
Preferably, first sliding rail is two.
Preferably, the pedestal is marble countertop.
The utility model compared with the existing technology, has the following advantages and beneficial effect：
The utility model high precision plane alignment system, Y-axis linear motor module is using bi-motor (including the first motor
Son and the second electric mover) and sliding rail installing plate unitary design, make deformation well-balanced, improve the flatness of load plate seat, anti-on-slip
There is stuck phenomenon due to assymmetrical deformation in rail installing plate；The first end of Y-axis linear motor module connects X-axis by ball-and-socket joint
Linear motor module, the second end of Y-axis linear motor module connect X-axis linear motor module by axis joint, effectively prevent
Sliding rail installing plate causes sliding rail to be pacified along in the second slide direction moving process because of the power inconsistency of electric mover output
Loading board stuck phenomenon；Feedback sliding rail installing plate is mounted in bottom along the second grating scale of the position offset in the second slide direction
On seat, second encoder read head is mounted in sliding rail installing plate bottom, and therefore, second encoder read head directly reads sliding rail installation
Plate along the deviation post in the second slide direction, avoid because sliding rail installing plate first end and second end respectively with X-axis straight line
The error that motor module junction is come by elastic webbing.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is a kind of front view of high precision plane alignment system described in the utility model；
Fig. 2 is a kind of bottom view of high precision plane alignment system shown in Fig. 1；
Fig. 3 is a kind of stereogram of high precision plane alignment system shown in Fig. 1；
Fig. 4 is the close-up schematic view of A in Fig. 2；
Fig. 5 is the section view enlarged structure schematic diagram of the line B-B along Fig. 1.
In figure：1 it is load plate seat, 2 be Y-axis linear motor module, 3 be sliding rail installing plate, 4 be the first sliding rail, 5 is that X-axis is straight
Line motor module, 6 be pedestal, 7 be first grating scale, 8 be stent, 9 be track, 10 be track stent, 11 be the second sliding rail, 12
It is second grating scale for axis joint, 13,14 be electric mover, 15 be ball-and-socket joint, 16 be second encoder read head, 17 is sliding block
Stent, 18 be the first sliding rail, 19 be magnet, 20 be the second electric mover, 21 be ball-and-socket joint.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without creative efforts
All other embodiments obtained shall fall within the protection scope of the present invention.
Referring to shown in Fig. 1 to Fig. 5, a kind of high precision plane alignment system, including pedestal 6, two X-axis linear motor modules 5,
Y-axis linear motor module 2 and load plate seat 1；Two X-axis linear motor modules 5 are symmetricly set on pedestal 6, Y-axis linear motor module
2 wear load plate seat 1, and the first end and second end of Y-axis linear motor module 5 connects two X-axis linear motor modules 5 respectively.
First key technology of the invention is that Y-axis linear motor module 5 includes sliding rail installing plate 3, the first sliding rail 4, magnet
19th, the first electric mover 18 and the second electric mover 20, sliding rail installing plate 3 are connect by the first sliding rail 4 with load plate seat 1, and first
18 and second electric mover 20 of electric mover is arranged in load plate seat 1, and the both sides of sliding rail installing plate 3 are set respectively by the card of magnet 19
First electric mover 18 and the second electric mover 20.
Preferably, sliding rail installing plate 3 is connect by two first sliding rails 4 with load plate seat 1.
More stablize so that load plate seat 1 is slided along 4 direction of the first sliding rail, at this point, the both sides of sliding rail installing plate 3 lead to respectively
It crosses the card of magnet 19 and sets the first electric mover 18 and the second electric mover 20, sliding rail installing plate 3 is bent by caused by gravity
It is symmetrical, also, it is also symmetrical to be deformed due to 19 suction of magnet.
The cross section of sliding rail installing plate 3 is in drum, and the both sides of sliding rail installing plate 3 set the first motor by magnet card respectively
18 and second electric mover 20 of son, magnet 19 are arranged on sliding rail installing plate 3.
Wherein, pedestal 6 is marble countertop, and marble countertop surface flatness is high, it is preferable that load plate seat 1 and marble
Table top is opposite to be slided, and the bottom of load plate seat 1 and marble countertop force of sliding friction are smaller, anti-anti-slip track installing plate 3 because length compared with
It grows and radially bending deformation, influences sliding between load plate seat 1 and sliding rail installing plate 3.
Second key technology is that X-axis linear motor module 5 includes the second sliding rail 11, track 9, electric mover 14, stent
8 and track stent 10,10 and second sliding rail 11 of track stent be arranged on pedestal 6, track 9 is arranged on track stent 10, electricity
Motor-driven sub 14 are fastened in track 9, and pass through stent 8 and connect Y-axis linear motor module 2, and sliding block is provided on the second sliding rail 11
Stent 17, slider bracket 17 connect the Y-axis linear motor module 2.
Second sliding rail 11 is located at the lower section of track 9,17 connecting sliding rail of the slider bracket installation being arranged on the second sliding rail 11
The first end or second end of plate 3.
The first end and second end of sliding rail installing plate 3 is connect respectively by the second sliding rail 11 with pedestal 6, makes sliding rail installing plate
3 slide along 11 direction of the second sliding rail, then the first end and second end of connecting sliding rail installing plate 3 is distinguished by electric mover 14,
The electric mover 14 is fastened in track 9, and the axial bending when length is longer of sliding rail installing plate 3 is effectively prevent to deform.
Wherein, the first sliding rail 4 is vertically arranged with the second sliding rail 11, and load plate seat 1 can be driven to be moved along in plane XY axis directions.
Third key technology is that the first end of Y-axis linear motor module 2 connects a wherein X-axis by ball-and-socket joint 15
Linear motor module 5；The second end of Y-axis linear motor module 2 connects another X-axis linear motor module 5 by axis joint 12.
Further, the first end of sliding rail installing plate 3 connects a wherein X-axis linear motor module 5 by ball-and-socket joint 15；
The second end of sliding rail installing plate 3 connects another X-axis linear motor module 5 by axis joint 12.
The ball-and-socket joint 15 limits Y-axis linear motor module 2 along moving in XYZ axis directions, does not limit overturning；The axis
Joint 12 limits Y-axis linear motor module 2 along moving in YZ axis directions, does not limit along moving in X-direction and overturns, has
Effect cause when electric mover 14 being prevented to be synchronized with the movement Y-axis linear motor mould 2 slided along 11 direction of the second sliding rail occur blocking it is existing
As.
Technical solution further is that first grating scale 7 is provided on sliding rail installing plate 3, be provided on load plate seat 1 with
The first encoder head 21 that first grating scale 7 coordinates.
Further, the first end and second end bottom of Y-axis linear motor module 5 is respectively arranged with second encoder reading
First 16, the second grating scale 13 coordinated with second encoder read head 16 is provided on pedestal 6.
The position that first encoder head 21 feedback load plate seat 1 is slided along 4 direction of the first sliding rail, second encoder read head
The position that 16 feedback Y-axis linear motor modules 2 are slided along 11 direction of the second sliding rail, effectively prevents because of Y-axis linear motor mould
The error that the elastic webbing of 2 both ends junction of block comes.
Further, it is provided with flexible joint (not shown) between the first sliding rail 4 and load plate seat 1.
By setting flexible joint, load plate seat 1 will not be by the first electric mover 18 and the second electric mover 20 because of gravity
With magnet (magnet be arranged on track 9 magnet) suction and flexural deformation caused by interference in flatness, load plate
Seat 1 always with 6 keeping parallelism of pedestal.
During work, workpiece can be first mounted on load plate seat 1, be driven by the first electric mover 18 and the second electric mover 20
Load plate seat 1 is moved on 4 direction of the first sliding rail and (is moved along plane X-direction), and passes through the first encoder head 21 and
One grating scale 7 makees position feedback；Load plate seat 1 is driven to be moved on 11 direction of the second sliding rail (along plane Y-axis by electric mover 14
Move in direction), and pass through second encoder read head 16 and second grating scale 13 makees position feedback.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection domain within.
Claims (6)
1. a kind of high precision plane alignment system, including pedestal (6), two X-axis linear motor modules (5), Y-axis linear motor module
(2) it is symmetricly set on the pedestal (6) with load plate seat (1), the two X-axis linear motor modules (5), the Y-axis straight-line electric
Machine module (2) wears the load plate seat (1), and the first end and second end of the Y-axis linear motor module (2) connects two institutes respectively
State X-axis linear motor module (5)；It is characterized in that, the first end of the Y-axis linear motor module (2) passes through ball-and-socket joint
(15) the wherein one X-axis linear motor module (5) is connected；
The second end of the Y-axis linear motor module (2) connects another X-axis linear motor module by axis joint (12)
(5)；The Y-axis linear motor module (2) includes sliding rail installing plate (3), the first sliding rail (4), magnet (19), the first electric mover
(18) connected with the second electric mover (20), the sliding rail installing plate (3) by first sliding rail (4) and the load plate seat (1)
It connects, first electric mover (18) and second electric mover (20) are arranged in the load plate seat (1), the sliding rail peace
The both sides of loading board (3) set first electric mover (18) and second electric mover by the magnet (19) card respectively
(20)；
The X-axis linear motor module (5) includes the second sliding rail (11), track (9), electric mover (14), stent (8) and track
Stent (10), the track stent (10) and second sliding rail (11) are arranged on the pedestal (6), and the track (9) sets
It puts on the track stent (10), the electric mover (14) is fastened in the track (9), and passes through the stent (8)
The Y-axis linear motor module (2) is connected, slider bracket (17) is provided on second sliding rail (11).
2. high precision plane alignment system according to claim 1, which is characterized in that first sliding rail (4) is two.
3. high precision plane alignment system according to claim 1, which is characterized in that set on the sliding rail installing plate (3)
First grating scale (7) is equipped with, the first encoder coordinated with the first grating scale (7) is provided on the load plate seat (1) and is read
Head (21).
4. high precision plane alignment system according to claim 1, which is characterized in that first sliding rail (4) with it is described
Load plate seat is provided with flexible joint between (1).
5. high precision plane alignment system according to claim 1, which is characterized in that the Y-axis linear motor module (2)
First end and second end bottom be respectively arranged with second encoder read head (16), be provided on the pedestal (6) and described
The second grating scale (13) of two encoder heads (16) cooperation.
6. high precision plane alignment system according to claim 1, which is characterized in that the pedestal (6) is Dali Shitai County
Face.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2014/089808 WO2016065559A1 (en) | 2014-10-29 | 2014-10-29 | High-precision planar positioning system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105765663A CN105765663A (en) | 2016-07-13 |
| CN105765663B true CN105765663B (en) | 2018-06-12 |
Family
ID=55856379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480033774.2A Active CN105765663B (en) | 2014-10-29 | 2014-10-29 | A kind of high precision plane alignment system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN105765663B (en) |
| WO (1) | WO2016065559A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106448745B (en) * | 2016-08-31 | 2019-06-21 | 无锡信欧光电科技有限公司 | A kind of intelligence full-automatic accurate displacement platform |
| TWI664642B (en) * | 2018-08-20 | 2019-07-01 | 全研科技有限公司 | High precision linear motor for one-time positioning platform |
| CN111146917B (en) * | 2018-11-03 | 2021-01-01 | 全研科技有限公司 | High-precision linear motor one-time alignment platform |
| CN111380488B (en) * | 2020-04-09 | 2021-05-07 | 洛阳豫安金属结构有限公司 | Comprehensive measuring system for tin bath of electronic-grade float glass melting furnace |
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|---|---|---|---|---|
| CN1701925A (en) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | H type air floating workbench with synchronization driving of bilateral linear motor |
| CN201134045Y (en) * | 2007-11-30 | 2008-10-15 | 深圳市大族精密机电有限公司 | Double-shaft moving platform |
| CN101344730A (en) * | 2008-08-15 | 2009-01-14 | 上海微电子装备有限公司 | Position control method and device based on H type structure two-sided driving system |
| JP2014018961A (en) * | 2012-07-20 | 2014-02-03 | Advanced Power Electronics Corp | Method for lathe-turning a curve |
| CN204229843U (en) * | 2014-10-29 | 2015-03-25 | 雅科贝思精密机电(上海)有限公司 | A kind of high precision plane positioning system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102110631B (en) * | 2009-12-29 | 2013-01-16 | 上海微电子装备有限公司 | Precision workpiece table and pipeline facility drive device thereof |
| CN102723296A (en) * | 2012-05-11 | 2012-10-10 | 哈尔滨工业大学 | XY motion platform driven by double-layer linear motor |
| CN103683800B (en) * | 2014-01-06 | 2016-08-24 | 苏州大学 | A kind of Gas-adjustable iron core-free linear motor |
-
2014
- 2014-10-29 CN CN201480033774.2A patent/CN105765663B/en active Active
- 2014-10-29 WO PCT/CN2014/089808 patent/WO2016065559A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1701925A (en) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | H type air floating workbench with synchronization driving of bilateral linear motor |
| CN201134045Y (en) * | 2007-11-30 | 2008-10-15 | 深圳市大族精密机电有限公司 | Double-shaft moving platform |
| CN101344730A (en) * | 2008-08-15 | 2009-01-14 | 上海微电子装备有限公司 | Position control method and device based on H type structure two-sided driving system |
| JP2014018961A (en) * | 2012-07-20 | 2014-02-03 | Advanced Power Electronics Corp | Method for lathe-turning a curve |
| CN204229843U (en) * | 2014-10-29 | 2015-03-25 | 雅科贝思精密机电(上海)有限公司 | A kind of high precision plane positioning system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016065559A1 (en) | 2016-05-06 |
| CN105765663A (en) | 2016-07-13 |
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