CN102950474A - Liquid static pressure movement platform - Google Patents
Liquid static pressure movement platform Download PDFInfo
- Publication number
- CN102950474A CN102950474A CN2012104734895A CN201210473489A CN102950474A CN 102950474 A CN102950474 A CN 102950474A CN 2012104734895 A CN2012104734895 A CN 2012104734895A CN 201210473489 A CN201210473489 A CN 201210473489A CN 102950474 A CN102950474 A CN 102950474A
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- stator
- fluid pressure
- slide unit
- base
- read head
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Abstract
The invention provides a liquid static pressure movement platform which comprises a platform main body, a driving device and a position detection device; the platform main body comprises a sliding table, guide rails and a base; the guide rails are arranged on the base, and the sliding table is inlaid in the grooves of the guide rails; the driving device comprises a rotor, a stator and three oil distribution blocks; the stator is arranged on the base; one end of the rotor is inlaid in the groove of the stator, and the other end of the rotor is fixedly arranged on the lower surface of the sliding table; the three oil distribution blocks are arranged on the upper surface of the sliding table; the position detection device comprises a grating ruler and a reading head; the grating ruler is arranged on the side surface of the sliding table, and the scale surface of the grating ruler is jointed with the reading head; and the reading head is fixedly arranged on the guide rails. According to the liquid static pressure movement platform, because a linear motor is adopted to drive, the problem of hysterisis error in the transmission of a ball bearing lead screw is solved; and due to the position detection device for compensating movement errors, the movement precision of the platform is improved.
Description
Technical field
The present invention relates to the precision movement platform field, in particular to a kind of fluid pressure motion platform.
Background technology
The fluid pressure motion platform imports oil pocket with pressure with liquid, forms oil film between slide unit and guide rail, relies on oil film to make between slide unit and guide rail contact-making surface and is in state of liquid friction.Compare with mechanical guide rail platform, it all possesses advantage at aspects such as driving power, service life, bearing capacity, vibration resistance, flexibilities.
Relevant fluid pressure motion platform adopts open loop, semiclosed loop loop control mode, drives ball screw driving slide unit by electric rotating machine and moves at guide rail.Yet there is defective in this structure, and motor oscillating and lead screw transmission error all can impact the kinematic accuracy of platform.
Summary of the invention
The present invention aims to provide a kind of fluid pressure motion platform, to solve the above problems.
In an embodiment of the present invention, provide a kind of fluid pressure motion platform, having comprised: main body, it comprises slide unit, guide rail and base; Described guide rails assembling embeds described slide unit in its groove on described base; Drive unit, it comprises that mover, stator and three tunnel divide oil clot; Described stator is installed on the described base; Described mover one end embeds in the groove of described stator, and its other end is fixed on the lower surface of described slide unit; Described three the tunnel divide oil clot to be installed in the upper surface of described slide unit; Position detecting device, it comprises grating scale and read head; Described grating scale is installed in the side surface of described slide unit, and its scale face and described read head are fitted; Described read head is fixed on the described guide rail.
The present invention has eliminated the hysterisis error problem that ball screw brings because adopt linear electric motors to drive in the field of magnetic forece mode; Adopt simultaneously the high accuracy grating scale to carry out error compensation, so improved the kinematic accuracy of platform.
Description of drawings
Accompanying drawing described herein is used to provide a further understanding of the present invention, consists of the application's a part, and illustrative examples of the present invention and explanation thereof are used for explaining the present invention, do not consist of improper restriction of the present invention.In the accompanying drawings:
Fig. 1 shows the internal structure schematic diagram according to the fluid pressure motion platform of the embodiment of the invention.
The specific embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the present invention in detail.
Fig. 1 shows the fluid pressure motion platform according to the embodiment of the invention, comprising: main body, and it comprises slide unit 1, guide rail 2 and base 3; Described guide rail 2 is installed on the described base 3, embeds described slide unit 1 in its groove; Drive unit, it comprises that mover 4, stator 5 and three tunnel divide oil clot 6; Described stator 5 is installed on the described base 3; Described mover 4 one ends embed in the groove of described stator 5, and its other end is fixed on the lower surface of described slide unit 1; Described three the tunnel divide oil clot 6 to be installed in the upper surface of described slide unit 1; Position detecting device, it comprises grating scale 7 and read head 8; Described grating scale 7 is installed in the side surface of described slide unit 1, and its scale face and described read head 8 are fitted; Described read head 8 is fixed on the described guide rail 2.
The present invention is because adopt linear electric motors to drive in the field of magnetic forece mode, so avoided the hysterisis error problem of ball leading screw driving; Adopt simultaneously the high accuracy grating scale to carry out error compensation, so improved the kinematic accuracy of platform.
Preferably, main body also comprises guide supporting part 9; Article two, guide rail 2 is installed on the base 3 symmetrically by two guide supporting parts 9; Slide unit 1 embeds respectively in two guide rails 2 by two sliding ends.
Preferably, drive unit also comprises mover mount pad 10, and mover 4 is installed in the lower surface of slide unit 1 by mover mount pad 10.
Preferably, drive unit also comprises stator installation seat 11, and stator 5 is installed on the base 3 by stator installation seat 11.
Preferably, drive unit also comprises drag chain 12, and its side and stator 5 are fitted, and the bottom surface is fixed on the base 3.
Preferably, position detecting device also comprises read head mount pad 13, and read head 8 is installed on the guide rail 2 by read head mount pad 13.
Preferably, grating scale 7 is the ceramic grating scale of resolution ratio 1nm.
This fluid pressure motion platform substitutes servomotor with linear electric motors and drives, and by field of magnetic forece mover and stator is interacted, thereby drives working table movement; The ceramic grating scale of configuration resolution ratio 1nm is as position detecting device.
The driving of this fluid pressure motion platform need not ball leading screw driving, so eliminated the hysterisis error problem that ball screw causes; Carry out error compensation by disposing high-precision position detecting device, so improved the kinematic accuracy of platform.
As can be seen from the above description, this fluid pressure motion platform has following beneficial effect:
1, dispose high-precision position detecting device, the error compensation of implementation platform motion process improves the precision of resetting;
2, adopt the type of drive of linear electric motors, carry out the loop control of closed-loop, reduce system energy consumption, extension device service life;
3, the part of composition platform all is independent, dismountable, can change flexibly design according to the actual conditions needs, reduces manufacturing cost.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. a fluid pressure motion platform is characterized in that, comprising:
Main body, it comprises slide unit (1), guide rail (2) and base (3); Described guide rail (2) is installed on the described base (3), embeds described slide unit (1) in its groove;
Drive unit, it comprises that mover (4), stator (5) and three tunnel divide oil clot (6); Described stator (5) is installed on the described base (3); Described mover (4) one end embeds in the groove of described stator (5), and its other end is fixed on the lower surface of described slide unit (1); Described three the tunnel divide oil clot (6) to be installed in the upper surface of described slide unit (1);
Position detecting device, it comprises grating scale (7) and read head (8); Described grating scale (7) is installed in the side surface of described slide unit (1), and its scale face and described read head (8) are fitted; Described read head (8) is fixed on the described guide rail (2).
2. fluid pressure motion platform according to claim 1 is characterized in that, described main body also comprises guide supporting part (9); Article two, described guide rail (2) is installed on the described base (3) symmetrically by two described guide supporting parts (9); Described slide unit (1) embeds respectively in two described guide rails (2) by two sliding ends.
3. fluid pressure platform according to claim 2 is characterized in that, described drive unit also comprises mover mount pad (10), and described mover (4) is installed in the lower surface of described slide unit (1) by described mover mount pad (10).
4. fluid pressure platform according to claim 3 is characterized in that, described drive unit also comprises stator installation seat (11), and described stator (5) is installed on the described base (3) by described stator installation seat (11).
5. fluid pressure platform according to claim 4 is characterized in that, described drive unit also comprises drag chain (12), and its side and described stator (5) are fitted, and the bottom surface is fixed on the described base (3).
6. fluid pressure platform according to claim 5 is characterized in that, described position detecting device also comprises read head mount pad (13), and described read head (8) is installed on the described guide rail (2) by described read head mount pad (13).
7. fluid pressure platform according to claim 6 is characterized in that, described grating scale (7) is the ceramic grating scale of resolution ratio 1nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104734895A CN102950474A (en) | 2012-11-20 | 2012-11-20 | Liquid static pressure movement platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104734895A CN102950474A (en) | 2012-11-20 | 2012-11-20 | Liquid static pressure movement platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102950474A true CN102950474A (en) | 2013-03-06 |
Family
ID=47760178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012104734895A Pending CN102950474A (en) | 2012-11-20 | 2012-11-20 | Liquid static pressure movement platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102950474A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106392750A (en) * | 2016-11-28 | 2017-02-15 | 无锡特恒科技有限公司 | Multi-point stopping sliding table mechanism |
| CN109095101A (en) * | 2018-08-23 | 2018-12-28 | 湖南农业大学 | Carry out the orbital position detection device and detection method of rail one transferring platform |
| CN110142647A (en) * | 2019-05-20 | 2019-08-20 | 华中科技大学 | A kind of hydrostatic slideway steady-state performance real-time measurement apparatus and method |
| CN116950996A (en) * | 2023-09-21 | 2023-10-27 | 无锡星微科技有限公司杭州分公司 | Bearing table and linear platform with same |
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| GB2194907A (en) * | 1986-09-10 | 1988-03-23 | W R Vaughan & Associates Limit | Machine tools and automatic loading equipment therefor |
| EP1714737B1 (en) * | 2000-01-17 | 2008-05-07 | JTEKT Corporation | Guiding apparatus for a slidable member driven by a linear motor |
| JP2008229773A (en) * | 2007-03-20 | 2008-10-02 | Honda Motor Co Ltd | Worktable moving device |
| EP2213891A1 (en) * | 2007-10-19 | 2010-08-04 | Bosch Corporation | Hydrostatic slide device and grinding device equipped with hydrostatic slide device |
| CN101905443A (en) * | 2010-07-16 | 2010-12-08 | 湖南宇环同心数控机床有限公司 | Direct-drive asymmetric closed rectangular hydrostatic guide rail |
| CN102092004A (en) * | 2010-12-17 | 2011-06-15 | 上海机床厂有限公司 | Grinding-carriage feed system of numerical control grinder |
| CN203102016U (en) * | 2012-11-20 | 2013-07-31 | 昆山允可精密工业技术有限公司 | Fluid static pressure motion platform |
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2012
- 2012-11-20 CN CN2012104734895A patent/CN102950474A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2194907A (en) * | 1986-09-10 | 1988-03-23 | W R Vaughan & Associates Limit | Machine tools and automatic loading equipment therefor |
| EP1714737B1 (en) * | 2000-01-17 | 2008-05-07 | JTEKT Corporation | Guiding apparatus for a slidable member driven by a linear motor |
| JP2008229773A (en) * | 2007-03-20 | 2008-10-02 | Honda Motor Co Ltd | Worktable moving device |
| EP2213891A1 (en) * | 2007-10-19 | 2010-08-04 | Bosch Corporation | Hydrostatic slide device and grinding device equipped with hydrostatic slide device |
| CN101905443A (en) * | 2010-07-16 | 2010-12-08 | 湖南宇环同心数控机床有限公司 | Direct-drive asymmetric closed rectangular hydrostatic guide rail |
| CN102092004A (en) * | 2010-12-17 | 2011-06-15 | 上海机床厂有限公司 | Grinding-carriage feed system of numerical control grinder |
| CN203102016U (en) * | 2012-11-20 | 2013-07-31 | 昆山允可精密工业技术有限公司 | Fluid static pressure motion platform |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106392750A (en) * | 2016-11-28 | 2017-02-15 | 无锡特恒科技有限公司 | Multi-point stopping sliding table mechanism |
| CN109095101A (en) * | 2018-08-23 | 2018-12-28 | 湖南农业大学 | Carry out the orbital position detection device and detection method of rail one transferring platform |
| CN109095101B (en) * | 2018-08-23 | 2020-05-08 | 湖南农业大学 | Track position detection device and detection method of track-track integrated transfer platform |
| CN110142647A (en) * | 2019-05-20 | 2019-08-20 | 华中科技大学 | A kind of hydrostatic slideway steady-state performance real-time measurement apparatus and method |
| CN110142647B (en) * | 2019-05-20 | 2023-09-29 | 华中科技大学 | Device and method for measuring steady-state performance of hydrostatic guideway in real time |
| CN116950996A (en) * | 2023-09-21 | 2023-10-27 | 无锡星微科技有限公司杭州分公司 | Bearing table and linear platform with same |
| CN116950996B (en) * | 2023-09-21 | 2023-12-29 | 无锡星微科技有限公司杭州分公司 | Bearing table and linear platform with same |
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Application publication date: 20130306 |