201011182 ( 九、發明說明： 【發明所屬之技術領域】 I發明係關於—種線性滑軌行走平行度量測裝置，特別是 才曰一種1¾速高精度驅動系統同時量測線性單元的滑塊在行走時 所產生的水平與垂直誤差的量測裝置。 【先前技術】 近年來線性滑轨的應用趨向多元化、奈米化，所以線性滑 ❹車九的功能提昇為勢在必行的發展，一般量測方式藉由平面精2 較高-等級的花岗岩標準塊規當作基準面，將量表吸附在= 座上，移動滑塊並利用量表量測，由於一般線軌標準製造長度201011182 (IX. INSTRUCTIONS: [Technical field of invention] I invention relates to a linear slide walking parallel measuring device, in particular, a 13⁄4 speed high-precision driving system for simultaneously measuring a linear unit slider Measuring device for horizontal and vertical errors generated during walking. [Prior Art] In recent years, the application of linear slides has become diversified and nano-sized, so the function of linear sliding car nine has become an imperative development. The general measurement method is based on the plane standard 2 higher-grade granite standard block gauge as the reference surface, the gauge is adsorbed on the = seat, the slider is moved and measured by the gauge, and the length is made due to the general line gauge standard.
都非常長，因此利用此方式需採用分段式檢驗，而且认X -人m驗 . —種誤差’若要量測四米長的導軌將非常費時，而且此量測方 . 式不確定度很高，對於線軌最高等級UP級（行走平行度2 m/3_m)的量測，並不適用。以往國内相關廠商由於製程技: ⑩ #法突破，只能生產以一般產業及低階自動化業的需求為主要 市％的Η級及N級線性滑軌，造成國際間皆認為台灣只能掣告 低階的Η級及Ν級產品。 ° 【發明内容】 本發明之目的即在於提供一種具有空氣軸承且適用於低摩 擦力驅動的靜動態多功能量測裝置。 本發明之次一目的係在於提供一種線性滑執與滑塊行走涘 差且非接觸式的量測裝置。 、 201011182 本發明之另目的係在於提供一種渦電流探頭所組成的量 測裝置’其具備同時檢測出滑塊於線性滑轨行走時所產生的水 平與垂直誤差。 可達成上达七明目的之線性滑轨行走平行度量測裝置，包 括有·· ， 基座（f〇Undati〇n)，其一側邊設具有轨道； 多向，用動單元，係设置於基座及轨道上，亦以二支撐位置 e 在非接觸狀態下支持移動機構作檢測； '泉I·生馬達（llnear m〇t〇r)，其設置於基座上並提供驅動多 向滑動單元； 3 有感 W 70 件（sensinS element)的線性單元（linear Unit) ’與移動機構聯接’為具有感測S件的滑塊於滑轨上滑 動β玄感4 7G件月匕為二渦電流（eddy以感測滑軌二相 互垂直平面的行走平行度，該感測元件能為二並排的角隅反射 ❹1竟（咖町Cube)以提供光束接收與反射。 [實施方式】 -月參閱圖-與圖七，本發明所提供之線性滑軌行走平行度 量測裝置，主要包括左 . ^ . t 办 已栝有.一基座1、一多向滑動單元2、一線性 馬達3以及—含有感測元件的線性單元4所構成。 3亥基座1，為花崗岩基座，其一側邊設具有軌道u ; 如圖二與圖三所示，多向滑動單元2係設置於基座1及執 201011182 道11上，亦以二支撐位置2122在非接觸狀態下支持移動機構 作測各支標位置21，22設置空氣轴承提供非接觸狀能於 '基座1表面移動，其移動機構為包含有垂直移動機構25財平 移動機構24並用以連接二支撐位置21’22，使該水平移動機構 24可於夕向滑動早凡2上滑動，而該垂直移動機構25能於水平 移動機構24上滑動； ' 如圖四所示，該線性馬達3其設置於基座i上並提供驅動 ❹ 多向滑動單元2 ; 含有感測元件的線性單元4，與移動機構聯接，為具有感測 凡件的’月塊42於滑軌41上滑動，該感測元件能為二渦電流44 卩感測滑軌41二相互垂直平面的行走平行度，如圖五所示。 . 請再參閱圖二至圖四，多向滑動單元2的第一支撐位置 2卜第二支撐位置22與接觸基座j的各表面裝設有至少一空氣 軸承23 ’並藉由空氣軸承23提供多向滑動單元2於基座1與基 © 座軌道11各表面非接觸狀態移動，在本發明中，第—支樓位置 21與基座執道Π各接觸表面位置各設置二空氣軸承23，而第 二支撐位置22與基座1接觸表面設置一空氣軸承23,並利用壓 力閥以調整安裝於各支撐位置21，22内側之空氣軸承23與基座 1之間的間距，接著調整多向滑動單元2之水平，在調整完多向 π動單元2之後，再利用安裝基座1上的線性馬達3進行驅動， 即可順利帶動多向滑動單元2作往復運動； 201011182 其移動機構為包含有垂直移動機構25的水平移動機構 24’該水平移動機構24並用以連接二支撐位置2122，該移動 機構各具有滑軌座241，251以及滑塊座242 252,而該垂直移動 機構25的滑軌座251係固定於水平移動機構24的滑塊座撕 上，該垂直移動機構25的滑塊座252提供直接固定夾治具加， 在圖四中，為垂直移動機構25的滑塊座252直接固定夾治具％。 請再參閱圖四，該線性馬達3其設置於基座丨上並與多 © 向滑動單元2的第一支撐位置21聯接，利用線性馬達3趨動多 向滑動單元2,再由多向滑動單元2 一起帶動線性單元4的滑塊 42進行非接觸量測，如圖六所示。 如圖五所示，含有感測元件的線性單元4其感測元件能為 二渦電流44探頭以感測滑軌41二相互垂直平面的行走平行 度；為量測滑軌41底部誤差，先以固定座43架設於基座j上， 再將預檢測線性單元4的滑軌41架設於固定座43上，最後將 ❹ 渦電流44以第二夾治具46固定於線性單元4的滑塊42之上， 再經由多向滑動單元2其垂直移動機構25的滑塊座252以夾治 具26直接固定預檢測的滑塊42,利用線性馬達3趨動多向滑動 單兀2，再由多向滑動單元2 一起帶動線性單元4的滑塊與 渦電流44進行非接觸量測，當滑塊42於滑軌41上移動時，其 所產生的水平或垂直方向誤差便可由渦電流44探頭接收到訊號 的變化； 201011182 本發明所提供之線性滑軌行走平行度量測裝置，與〜， 證案及其他習用技術相互比較時，更具 、^弓| μ <優點： 1·利用空氣轴承方式，可使多向滑動 —^ 早凡移動時更為穩 疋，且為了使多向滑動單元能夠方便微調與载重。 “ ，可以達到同時檢測線性單 不再需要使用傳統花崗岩標 2·利用渦電流非接觸量測裝置 元行走時水平與垂直的行走誤差， 準規來測量。 ❹They are very long, so using this method requires a segmented test, and recognizes the X-person m test. - The error 'to measure the four-meter-long guide rail will be very time consuming, and the measurement method is very uncertain. High, not applicable for the measurement of the highest grade UP grade (walking parallelism 2 m/3_m). In the past, domestic related manufacturers, due to process technology: 10 #法 breakthrough, can only produce the graded and N-level linear slides with the demand of the general industry and the low-end automation industry as the main market, which caused the international to think that Taiwan can only Low-level Η grade and Ν grade products. [Disclosure] It is an object of the present invention to provide a static and dynamic multi-function measuring device having an air bearing and being suitable for low friction driving. A second object of the present invention is to provide a linear sliding and slider walking differential and non-contact measuring device. 201011182 Another object of the present invention is to provide a measuring device constituting an eddy current probe which is provided with simultaneous detection of horizontal and vertical errors generated when a slider travels on a linear slide. A linear slide walking parallel measuring device capable of achieving seven purposes, including a pedestal (f〇Undati〇n) having a track on one side thereof; a multi-directional, moving unit, system setting On the pedestal and the track, the moving mechanism is supported for detection in the non-contact state by the two supporting positions e; 'Spring I·sheng motor (llnear m〇t〇r), which is arranged on the base and provides driving multidirectional Sliding unit; 3 linear unit with sensinS element 'connected with moving mechanism' is a slider with sensing S piece sliding on the slide rail β 玄 感 4 4G The eddy current (the dydy is used to sense the parallelism of the parallel tracks of the slide rails, and the sensing element can be a side-by-side corner reflection ❹1 actually (Camachi Cube) to provide beam reception and reflection. [Embodiment] - Month Referring to Figures - and Figure 7, the linear slide walking parallel measuring device provided by the present invention mainly comprises a left. ^ . t has been installed. A pedestal 1, a multi-directional sliding unit 2, a linear motor 3 And - consisting of a linear unit 4 containing sensing elements. 3 Hai pedestal 1, for flowers The granite rock base has a track u on one side; as shown in Fig. 2 and Fig. 3, the multidirectional sliding unit 2 is disposed on the base 1 and the 201011182 road 11, and is also in contact with the two support positions 2122. In the state, the moving mechanism is supported to measure each of the branch positions 21, 22, and the air bearing is provided to provide a non-contact shape to move on the surface of the base 1. The moving mechanism is a vertical moving mechanism 25 including a vertical moving mechanism 24 and is used for connecting two supports. Position 21'22, the horizontal moving mechanism 24 can slide on the slanting direction 2, and the vertical moving mechanism 25 can slide on the horizontal moving mechanism 24; 'As shown in FIG. 4, the linear motor 3 is set On the base i and providing a driving ❹ multi-directional sliding unit 2; a linear unit 4 containing a sensing element coupled to the moving mechanism for sliding the month block 42 with the sensing element on the sliding rail 41, the sensing The component can be the two eddy currents 44 卩 sensing the parallelism of the parallel planes of the slide rails 41, as shown in Fig. 5. Please refer to Fig. 2 to Fig. 4 again, the first support position of the multidirectional sliding unit 2 The second support position 22 and the surface of the contact base j are mounted There is at least one air bearing 23' and the multi-directional sliding unit 2 is provided by the air bearing 23 to move in a non-contact state with respect to each surface of the base 1 and the base rail 11, in the present invention, the first branch position 21 and the base Two air bearings 23 are disposed at each contact surface position, and an air bearing 23 is disposed on the contact surface of the second support position 22 and the base 1, and a pressure valve is used to adjust the air bearing installed inside each of the support positions 21, 22. 23 and the distance between the pedestal 1, and then adjust the level of the multi-directional sliding unit 2, after adjusting the multi-direction π moving unit 2, and then using the linear motor 3 on the mounting base 1 to drive, can smoothly drive more Reciprocating motion to the sliding unit 2; 201011182 The moving mechanism is a horizontal moving mechanism 24' including a vertical moving mechanism 25 for connecting the two supporting positions 2122, each having a sliding rail seat 241, 251 and The slider seat 242 252, and the slide rail seat 251 of the vertical movement mechanism 25 is fixed to the slider seat of the horizontal movement mechanism 24, and the slider seat 252 of the vertical movement mechanism 25 provides a direct fixing clamp In Figure IV, the slider holder vertically moving mechanism 25 is fixed directly to the fixtures 252%. Referring to FIG. 4 again, the linear motor 3 is disposed on the base cymbal and coupled with the first support position 21 of the sliding unit 2, and the multi-directional sliding unit 2 is driven by the linear motor 3, and then multi-directional sliding. Unit 2 together drives the slider 42 of the linear unit 4 for non-contact measurement, as shown in FIG. As shown in FIG. 5, the linear unit 4 including the sensing element can be a two-eddy current 44 probe to sense the parallelism of the parallel planes of the slide rails 41; for measuring the bottom error of the slide rails 41, The fixing base 43 is erected on the base j, and the sliding rail 41 of the pre-detecting linear unit 4 is mounted on the fixing base 43. Finally, the eddy current 44 is fixed to the slider of the linear unit 4 by the second clamping fixture 46. Above the 42th, the slider block 252 of the vertical moving mechanism 25 of the multi-directional sliding unit 2 is directly fixed to the pre-detected slider 42 by the clamping tool 26, and the linear motor 3 is used to drive the multi-directional sliding unit 2, and then The multi-directional sliding unit 2 drives the slider of the linear unit 4 together with the eddy current 44 for non-contact measurement. When the slider 42 moves on the sliding rail 41, the horizontal or vertical error generated by the slider 42 can be detected by the eddy current 44 probe. Receiving the change of the signal; 201011182 The linear slide walking parallel measuring device provided by the present invention is more suitable when compared with the ~, the testimony and other conventional techniques, and the advantages are: 1. The use of air Bearing mode, can make multi-directional sliding - ^ early shift When more stable piece goods, and in order to easily make multiple trims and the load to the sliding unit. “, it is possible to simultaneously detect linear singles. It is no longer necessary to use traditional granite standards. 2. The horizontal and vertical walking errors when walking with the eddy current non-contact measuring device are measured by the quasi-regulation.
3. 利用渴電流非接觸量縣置之㈣ 檢測中獲得水平與垂直的行走誤差，可縮減量„間1 可避免線性 4. 採用驗馬達慢速帶動祕單元之料移動，利用線性 馬達驅動具有低摩擦力之特性，使其在移動過程， 馬達對檢測出的行走平行度產生干擾。 5·無須如前述習知需要花❹基準岐可準確的檢測出行 走平行度誤差，而且對於未來維修保養，只f更換固定座.，無 須再研磨花岗岩基準面，大幅的降低了維修保養的時間與費用。 6·利用屑電流非接觸s測裝置，可以有效增加檢測裝置使 用壽命與提高檢測精度和準確性。 【圖式簡單說明】 圖一為本發明之整體系統架構圖； 圖一為低摩擦力驅動之多向滑動單元其立體示意圖； 圖二為本發明數空氣軸承與移動機構組成多向滑動單元立 201011182 體示意圖； 圖四為數线軸承與軸機触成多向㈣單元側面示意 圖； 圖五為含有感測元件的線性單元其側面示意圖， …。圖六為線性馬達驅動多向滑動單元聯結含有感測元件的線 性單元作檢測之示意圖； 圖七為線性滑轨行走平行度量測裝置之側面示意圖。 ® 【主要元件符號說明】 1基座 11執道 2多向滑動單元 21第一支撐位置 22第二支撐位置 2 3空氣軸承 24水平移動機構 241滑軌座 242滑塊座 25垂直移動機構 2 51滑軌座 2 5 2滑塊座 26夾治具 10 201011182 3線性馬達 4線性單元 41滑軌 42滑塊 4 3固定座 44滿電流 46第二夾治具3. Use the non-contact current of the thirst current. (4) Obtain the horizontal and vertical walking error during the test, and reduce the amount „1 can avoid the linearity. 4. Use the motor to slow the movement of the material of the secret unit, and use the linear motor to drive The low friction characteristic makes it interfere with the detected parallelism of the motor during the moving process. 5.·The need to calculate the parallelism error of the walking without the need of the flowering reference as described above, and for future maintenance Only f replace the fixed seat. It does not need to grind the granite reference surface, which greatly reduces the maintenance time and cost. 6·Using the chip current non-contact s measuring device, it can effectively increase the service life of the testing device and improve the detection accuracy and accuracy. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an overall system architecture diagram of the present invention; FIG. 1 is a perspective view of a multi-directional sliding unit driven by a low friction force; FIG. 2 is a multi-directional sliding of a plurality of air bearings and a moving mechanism of the present invention; Figure 2010 is a schematic view of the unit; Figure 4 is a schematic view of the multi-directional (four) unit of the linear bearing and the shaft machine; The side view of the linear unit of the measuring element is shown in Fig. 6. Fig. 6 is a schematic diagram of the linear motor driven multi-directional sliding unit coupling the linear unit containing the sensing element for detecting; FIG. 7 is a schematic side view of the linear sliding track walking parallel measuring device. ® [Main component symbol description] 1 pedestal 11 trajectory 2 multi-directional sliding unit 21 first support position 22 second support position 2 3 air bearing 24 horizontal movement mechanism 241 slide rail 242 slider holder 25 vertical movement mechanism 2 51 Slide rail seat 2 5 2 slider seat 26 clamp fixture 10 201011182 3 linear motor 4 linear unit 41 slide rail 42 slider 4 3 mount 44 full current 46 second fixture