TW201011182A - Parallelism measurement device for movements on linear slide-rail - Google Patents

Parallelism measurement device for movements on linear slide-rail Download PDF

Info

Publication number
TW201011182A
TW201011182A TW97134026A TW97134026A TW201011182A TW 201011182 A TW201011182 A TW 201011182A TW 97134026 A TW97134026 A TW 97134026A TW 97134026 A TW97134026 A TW 97134026A TW 201011182 A TW201011182 A TW 201011182A
Authority
TW
Taiwan
Prior art keywords
linear
measuring
slider
slide
moving
Prior art date
Application number
TW97134026A
Other languages
Chinese (zh)
Other versions
TWI326746B (en
Inventor
Wen-Yu Jue
Jian-Hong Liu
Dong-Xian Xie
Yun-Feng Deng
Original Assignee
Univ Nat Formosa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Formosa filed Critical Univ Nat Formosa
Priority to TW97134026A priority Critical patent/TWI326746B/zh
Publication of TW201011182A publication Critical patent/TW201011182A/en
Application granted granted Critical
Publication of TWI326746B publication Critical patent/TWI326746B/zh

Links

Abstract

A parallelism measurement device for movements of linear slide-rail includes: a base, a multi-directional slide unit, a linear motor, a linear unit including a detection element, and an optical measurement unit. The linear motor is used to drive the low-frictional multi-directional slide unit for providing the non-contacting-type parallelism measurement on the movements of the linear unit, the measurement on precision of linearity of the linear unit, and the measurement on vibrations of the linear unit in order to detect out the parallelism of movements of the linear unit, the precision of linearity of slide-rails, etc. Moreover, the present invention can be used to measure the errors in oscillation and rolling of the linear unit and the slide blocks.

Description

201011182 (IX. INSTRUCTIONS: [Technical field of invention] I invention relates to a linear slide walking parallel measuring device, in particular, a 13⁄4 speed high-precision driving system for simultaneously measuring a linear unit slider Measuring device for horizontal and vertical errors generated during walking. [Prior Art] In recent years, the application of linear slides has become diversified and nano-sized, so the function of linear sliding car nine has become an imperative development. The general measurement method is based on the plane standard 2 higher-grade granite standard block gauge as the reference surface, the gauge is adsorbed on the = seat, the slider is moved and measured by the gauge, and the length is made due to the general line gauge standard.

They are very long, so using this method requires a segmented test, and recognizes the X-person m test. - The error 'to measure the four-meter-long guide rail will be very time consuming, and the measurement method is very uncertain. High, not applicable for the measurement of the highest grade UP grade (walking parallelism 2 m/3_m). In the past, domestic related manufacturers, due to process technology: 10 #法 breakthrough, can only produce the graded and N-level linear slides with the demand of the general industry and the low-end automation industry as the main market, which caused the international to think that Taiwan can only Low-level Η grade and Ν grade products. [Disclosure] It is an object of the present invention to provide a static and dynamic multi-function measuring device having an air bearing and being suitable for low friction driving. A second object of the present invention is to provide a linear sliding and slider walking differential and non-contact measuring device. 201011182 Another object of the present invention is to provide a measuring device constituting an eddy current probe which is provided with simultaneous detection of horizontal and vertical errors generated when a slider travels on a linear slide. A linear slide walking parallel measuring device capable of achieving seven purposes, including a pedestal (f〇Undati〇n) having a track on one side thereof; a multi-directional, moving unit, system setting On the pedestal and the track, the moving mechanism is supported for detection in the non-contact state by the two supporting positions e; 'Spring I·sheng motor (llnear m〇t〇r), which is arranged on the base and provides driving multidirectional Sliding unit; 3 linear unit with sensinS element 'connected with moving mechanism' is a slider with sensing S piece sliding on the slide rail β 玄 感 4 4G The eddy current (the dydy is used to sense the parallelism of the parallel tracks of the slide rails, and the sensing element can be a side-by-side corner reflection ❹1 actually (Camachi Cube) to provide beam reception and reflection. [Embodiment] - Month Referring to Figures - and Figure 7, the linear slide walking parallel measuring device provided by the present invention mainly comprises a left. ^ . t has been installed. A pedestal 1, a multi-directional sliding unit 2, a linear motor 3 And - consisting of a linear unit 4 containing sensing elements. 3 Hai pedestal 1, for flowers The granite rock base has a track u on one side; as shown in Fig. 2 and Fig. 3, the multidirectional sliding unit 2 is disposed on the base 1 and the 201011182 road 11, and is also in contact with the two support positions 2122. In the state, the moving mechanism is supported to measure each of the branch positions 21, 22, and the air bearing is provided to provide a non-contact shape to move on the surface of the base 1. The moving mechanism is a vertical moving mechanism 25 including a vertical moving mechanism 24 and is used for connecting two supports. Position 21'22, the horizontal moving mechanism 24 can slide on the slanting direction 2, and the vertical moving mechanism 25 can slide on the horizontal moving mechanism 24; 'As shown in FIG. 4, the linear motor 3 is set On the base i and providing a driving ❹ multi-directional sliding unit 2; a linear unit 4 containing a sensing element coupled to the moving mechanism for sliding the month block 42 with the sensing element on the sliding rail 41, the sensing The component can be the two eddy currents 44 卩 sensing the parallelism of the parallel planes of the slide rails 41, as shown in Fig. 5. Please refer to Fig. 2 to Fig. 4 again, the first support position of the multidirectional sliding unit 2 The second support position 22 and the surface of the contact base j are mounted There is at least one air bearing 23' and the multi-directional sliding unit 2 is provided by the air bearing 23 to move in a non-contact state with respect to each surface of the base 1 and the base rail 11, in the present invention, the first branch position 21 and the base Two air bearings 23 are disposed at each contact surface position, and an air bearing 23 is disposed on the contact surface of the second support position 22 and the base 1, and a pressure valve is used to adjust the air bearing installed inside each of the support positions 21, 22. 23 and the distance between the pedestal 1, and then adjust the level of the multi-directional sliding unit 2, after adjusting the multi-direction π moving unit 2, and then using the linear motor 3 on the mounting base 1 to drive, can smoothly drive more Reciprocating motion to the sliding unit 2; 201011182 The moving mechanism is a horizontal moving mechanism 24' including a vertical moving mechanism 25 for connecting the two supporting positions 2122, each having a sliding rail seat 241, 251 and The slider seat 242 252, and the slide rail seat 251 of the vertical movement mechanism 25 is fixed to the slider seat of the horizontal movement mechanism 24, and the slider seat 252 of the vertical movement mechanism 25 provides a direct fixing clamp In Figure IV, the slider holder vertically moving mechanism 25 is fixed directly to the fixtures 252%. Referring to FIG. 4 again, the linear motor 3 is disposed on the base cymbal and coupled with the first support position 21 of the sliding unit 2, and the multi-directional sliding unit 2 is driven by the linear motor 3, and then multi-directional sliding. Unit 2 together drives the slider 42 of the linear unit 4 for non-contact measurement, as shown in FIG. As shown in FIG. 5, the linear unit 4 including the sensing element can be a two-eddy current 44 probe to sense the parallelism of the parallel planes of the slide rails 41; for measuring the bottom error of the slide rails 41, The fixing base 43 is erected on the base j, and the sliding rail 41 of the pre-detecting linear unit 4 is mounted on the fixing base 43. Finally, the eddy current 44 is fixed to the slider of the linear unit 4 by the second clamping fixture 46. Above the 42th, the slider block 252 of the vertical moving mechanism 25 of the multi-directional sliding unit 2 is directly fixed to the pre-detected slider 42 by the clamping tool 26, and the linear motor 3 is used to drive the multi-directional sliding unit 2, and then The multi-directional sliding unit 2 drives the slider of the linear unit 4 together with the eddy current 44 for non-contact measurement. When the slider 42 moves on the sliding rail 41, the horizontal or vertical error generated by the slider 42 can be detected by the eddy current 44 probe. Receiving the change of the signal; 201011182 The linear slide walking parallel measuring device provided by the present invention is more suitable when compared with the ~, the testimony and other conventional techniques, and the advantages are: 1. The use of air Bearing mode, can make multi-directional sliding - ^ early shift When more stable piece goods, and in order to easily make multiple trims and the load to the sliding unit. “, it is possible to simultaneously detect linear singles. It is no longer necessary to use traditional granite standards. 2. The horizontal and vertical walking errors when walking with the eddy current non-contact measuring device are measured by the quasi-regulation.

3. Use the non-contact current of the thirst current. (4) Obtain the horizontal and vertical walking error during the test, and reduce the amount „1 can avoid the linearity. 4. Use the motor to slow the movement of the material of the secret unit, and use the linear motor to drive The low friction characteristic makes it interfere with the detected parallelism of the motor during the moving process. 5.·The need to calculate the parallelism error of the walking without the need of the flowering reference as described above, and for future maintenance Only f replace the fixed seat. It does not need to grind the granite reference surface, which greatly reduces the maintenance time and cost. 6·Using the chip current non-contact s measuring device, it can effectively increase the service life of the testing device and improve the detection accuracy and accuracy. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an overall system architecture diagram of the present invention; FIG. 1 is a perspective view of a multi-directional sliding unit driven by a low friction force; FIG. 2 is a multi-directional sliding of a plurality of air bearings and a moving mechanism of the present invention; Figure 2010 is a schematic view of the unit; Figure 4 is a schematic view of the multi-directional (four) unit of the linear bearing and the shaft machine; The side view of the linear unit of the measuring element is shown in Fig. 6. Fig. 6 is a schematic diagram of the linear motor driven multi-directional sliding unit coupling the linear unit containing the sensing element for detecting; FIG. 7 is a schematic side view of the linear sliding track walking parallel measuring device. ® [Main component symbol description] 1 pedestal 11 trajectory 2 multi-directional sliding unit 21 first support position 22 second support position 2 3 air bearing 24 horizontal movement mechanism 241 slide rail 242 slider holder 25 vertical movement mechanism 2 51 Slide rail seat 2 5 2 slider seat 26 clamp fixture 10 201011182 3 linear motor 4 linear unit 41 slide rail 42 slider 4 3 mount 44 full current 46 second fixture

Claims (1)

  1. I 201011182 X. Patent application scope: 1. A linear slide walking parallel measuring device, comprising: a base with a track on one side; a multi-directional sliding unit is also disposed on the base and the track. The support position supports the moving mechanism for detecting in a non-contact state; the linear motor is disposed on the base and provides a multi-directional sliding unit; the linear unit including the sensing element is coupled to the moving mechanism and has a sensing element The slider slides over the rails. 2. Parallel metric for linear slide travel as described in item i of the patent application scope. (4) Four of the eight tooth positions in the 疋 setting air bearing provide a non-contact state to move on the base surface. 3. The linear sliding execution parallel measurement metric ' i ' as described in the scope of the patent application section wherein the support position is to provide a non-contact state of the air bearing to move on the base surface and the track surface.线性 4' is the linear slide walking parallel measuring device according to claim 1, wherein the moving mechanism is a horizontal moving mechanism including a vertical moving mechanism. 5. The linear slide walking parallel measuring device of claim 4, wherein the horizontal moving mechanism has a slide rail seat and a slider seat. 6. The linear slide walking parallel measuring device according to the fourth and fifth aspect of the invention, wherein the vertical moving mechanism has a slide rail seat and a slider seat. The slide rail mount is fixed to the horizontal movement mechanism. On the slider seat. 12 4 201011182 7 The linear slide walking parallel measuring and measuring device according to claim 6 of the patent application scope wherein the slider holder of the vertical moving mechanism provides a fixed clamp. 8' The linear slide walking parallel metric measuring device according to claim 1 or 4, wherein the horizontal moving mechanism further connects the two sets of support positions, so that the horizontal moving mechanism can slide on the multi-directional sliding unit And the vertical moving mechanism can slide on the horizontal moving mechanism. 9_ The linear slide walking parallel measuring and measuring device according to the first application of the patent scope, wherein the eddy current provides a linear accuracy measurement of the sliding surface of the detected sliding surface, so that the error can be detected. The signal is transmitted to the signal receiving end of the multi-directional sliding unit. 1D·If the towel is patented (4), the secret rail walking parallel measurement measuring device described in the second item is where the sensing element is a two-eddy current disposed on the slider, and the eddy current further provides the sensing rail 2 The parallelism of the planes that are perpendicular to each other. For example, the linear slide walking parallel measuring device described in item (4) of the scope is connected to the supporting position of the multi-directional sliding unit, and the linear motor is used to drive the multi-directional sliding unit, and then The non-contact measuring slide is driven to the slider of the sliding unit, which drives the linear unit. 12. The linear slide walking parallel measuring device as described in claim 1 wherein the horizontal or vertical block difference generated by the slider is received by the eddy current when the slider moves on the slide rail The change of the signal. 13
TW97134026A 2008-09-05 2008-09-05 TWI326746B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97134026A TWI326746B (en) 2008-09-05 2008-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97134026A TWI326746B (en) 2008-09-05 2008-09-05

Publications (2)

Publication Number Publication Date
TW201011182A true TW201011182A (en) 2010-03-16
TWI326746B TWI326746B (en) 2010-07-01

Family

ID=44828492

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97134026A TWI326746B (en) 2008-09-05 2008-09-05

Country Status (1)

Country Link
TW (1) TWI326746B (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102564562A (en) * 2011-12-09 2012-07-11 苏州工业园区高登威科技有限公司 Vibration test machine
CN103162791A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162789A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162812A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162797A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162799A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162800A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162801A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration test machine
CN103162792A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162796A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162802A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162793A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration test machine
CN103162798A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162790A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162794A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162795A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162788A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102564562A (en) * 2011-12-09 2012-07-11 苏州工业园区高登威科技有限公司 Vibration test machine
CN103162791A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162789A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162812A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162797A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162799A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162800A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162801A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration test machine
CN103162792A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162796A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162802A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162793A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration test machine
CN103162798A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162790A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162794A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162795A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162788A (en) * 2011-12-09 2013-06-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162790B (en) * 2011-12-09 2014-12-24 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162791B (en) * 2011-12-09 2014-12-24 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162802B (en) * 2011-12-09 2015-03-25 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162788B (en) * 2011-12-09 2015-03-25 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162798B (en) * 2011-12-09 2015-06-24 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162801B (en) * 2011-12-09 2015-07-08 苏州工业园区高登威科技有限公司 Vibration test machine
CN103162799B (en) * 2011-12-09 2015-08-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162795B (en) * 2011-12-09 2015-08-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162800B (en) * 2011-12-09 2015-08-19 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162796B (en) * 2011-12-09 2016-01-20 苏州工业园区高登威科技有限公司 Vibration testing machine
CN103162797B (en) * 2011-12-09 2016-01-20 苏州工业园区高登威科技有限公司 Vibration testing machine

Also Published As

Publication number Publication date
TWI326746B (en) 2010-07-01

Similar Documents

Publication Publication Date Title
CN103615984B (en) Comprehensive detection device of pipe body
US7752003B2 (en) Hysteresis compensation in a coordinate measurement machine
CN102889863B (en) A kind of screw mandrel straight linear degree automatic detector and application thereof
CN102620934B (en) Device and method for testing precision retention of precision rolling linear guide rail pair
CN103543010B (en) A kind of high-speed guide screw and lead screw pair Integrated Checkout testing table
CN201221938Y (en) Non-contact intelligent off-line testing instrument of large-scale cylinder workpiece
CN202753059U (en) Clamp jig of detection equipment
CN100595513C (en) Cylinder diameter and form and position error integrated measuring apparatus
CN201653691U (en) Bearing dynamic stiffness testing device
CN101216281B (en) Measuring apparatus for measuring bearing and its part surface appearance
CN103307962B (en) Flatness automatic measurement machine
CN203203556U (en) Shaft-category part detection device
CN103148822B (en) Multiple spot measuring thickness device and using method thereof
CN204788229U (en) Round detection device that beats
CN108267095A (en) The bilateral dislocation differential confocal detection method of free form surface pattern and device
CN103604710B (en) A kind of desk-top ring block friction and wear tester
CN102095346B (en) Lead screw thread pitch detector
CN103267477B (en) Adjustable rheostat structural plane apparatus for measuring three-dimensional profile
CN100541117C (en) The straightness correcting method of surface texture measuring instrument and surface texture measuring instrument
CN104236483A (en) Device and method for measuring precision and friction force of rolling linear guide rail pair
CN201583235U (en) Shape and position error contact-type detection measurement bracket device
CN102455249B (en) Stiffness testing device for gas bearing
CN102679916B (en) A kind of measuring device for surface roughness and measurement workbench thereof
CN103822837B (en) A kind of frictional testing machine
CN103616007B (en) A kind of micro parts flatness precision measurement apparatus

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees