CN105865340B - Rolling linear guide precision self-operated measuring unit and method - Google Patents
Rolling linear guide precision self-operated measuring unit and method Download PDFInfo
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- CN105865340B CN105865340B CN201610344304.9A CN201610344304A CN105865340B CN 105865340 B CN105865340 B CN 105865340B CN 201610344304 A CN201610344304 A CN 201610344304A CN 105865340 B CN105865340 B CN 105865340B
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- guide rail
- sensor
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- lathe bed
- gantry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0004—Supports
Abstract
The invention discloses a kind of rolling linear guide precision self-operated measuring units.The device is mainly made of lathe bed platform, clamping device.It under the action of Z axis feeds part, is driven using between idler wheel rack, while under the guiding of air-float guide rail pair, portal frame and measuring table are moved along tested guide rail direction simultaneously；Under the action of Y-axis feeds part, using the transmission of ball-screw, measuring table is driven to make to move relative to the upper and lower directions of portal frame.When in measuring table motion process, placement is measured by each Form and position error of the fixed tested guide rail of clamping device on the table mounted in laser displacement sensor thereon, by carrying out relevant treatment to the data obtained, analysis obtains required data, to obtain each Form and position error of tested guide rail.The present invention uses automatic measurement method, tested guide rail to be installed without bolt, efficiency can be greatly improved, and versatility is stronger, can carry out Multiple Type rolling linear guide precision measure.
Description
Technical field
The present invention relates to a kind of accuracy detecting device, especially a kind of rolling linear guide precision self-operated measuring unit and side
Method.
Background technology
Linear rolling guide has many advantages, such as that simple in structure, static and dynamic friction coefficient is small, precision stability is good, is passed in machinery
Play the role of carrying and the motion guide of moving component in dynamic.The linear guide is linear rolling guide important component,
The accuracy of manufacture is one of the principal element that linear rolling guide system generates fluctuation during the motion, in raceway geometric dimension
The size of fitness directly influence the mechanical property of linear rolling guide.As linear rolling guide application field is got over
Come it is more extensive and high to linear rolling guide test specification, how accurately and fast ruler is carried out to rolling linear guide
Very little accuracy detection has become the common difficulty faced in industry.Therefore have to the detection and evaluation of rail shapes and site error
Meaning of crucial importance.
Currently, domestic the linear guide manufacturing firm mostly uses hand dipping mode and is measured to the Form and position error of guide rail,
When measuring the guide rail raceway depth of parallelism, by guide rail clamping on the fixture for measuring tablet, by gauge stand and rail-sides reference plane and lead
Rail mounting plane be aligned, and by gauge outfit be aligned guide rail roller surface on, then move gauge stand and measure, composite measurement maximum and
The shortcomings that minimum value can obtain the guide rail raceway depth of parallelism, the measurement method is：1) workloads such as guide rail, mobile gauge stand are installed
Greatly, measurement efficiency is low；2) when measuring, it can not ensure that measurement accuracy, measurement effect are poor；3) this method is to laboratory technician's competency profiling
Height, and it is poor to measure renaturation；4) different guide rails need to coordinate different fixtures, required cost higher.
Invention content
Technical problem solved by the invention is to provide a kind of rolling linear guide precision self-operated measuring unit and method.
The technical solution adopted by the present invention to solve the technical problems is：A kind of rolling linear guide dimensional accuracy is surveyed automatically
Measure device, including lathe bed platform, clamping device, portal frame, measuring table, Y-axis feeding part, Z axis feeding part and grating group
Part, wherein tested guide rail are positioned on lathe bed platform, when measurement, be fixed by clamping device and centering on the table,
A pair of parallel air-float guide rail pair is set above lathe bed component to realize portal frame together with measuring table along tested guide rail direction
(i.e. Z-direction) is for linear motion, and portal frame is fixed on aerostatic slide, and Y-axis feeding portion is provided on the inside of portal frame
Point, and part is fed in opposite outside setting Z axis, Y-axis feeding part is coupled by measuring table by pinboard, can
Realize that measuring table is moved relative to portal frame upper and lower directions (i.e. Y direction), Z axis feeding part passes through between rolling wheel and rack
Movement drive portal frame and measuring table to be moved along tested guide rail direction (i.e. Z-direction), while driving and being connected to measurement and put down
Grating assembly between platform and lathe bed platform moves synchronously；
The lathe bed platform includes marble lathe bed, aerostatic slide, rack support, rack, grating scale, matches with grating assembly
The line slideway auxiliary used is closed, air-float guide rail and workbench are connected in by adhesion process on marble lathe bed, on rack support
It is provided with the groove for installing single T-nut slot, two limited blocks are placed on T-nut slot；
The clamping device is for fixing tested guide rail automatically, having both certain centering effect.Oscillating cylinder works,
On driving gear drive driven gear and synchromesh gear to rotate simultaneously, drive its end fixed a pair by two connecting shafts
Cam driven rotates, and cam is placed on mounting plate, and mounting plate is equipped with arc groove and is oriented to for cam；
The portal frame includes gantry main side frame, gantry pair side frame and gantry head cover, and two are provided on the frame of gantry main side
Groove is used cooperatively for placing two limit switches with two limited blocks placed on T-nut slot；On the pair side frame of gantry
It is convenient for two limit switch adjusting positions placed thereon provided with U-type groove, makes with the limited block cooperation on measuring table
With in gantry main side, erection is equipped with the arched door frame for feeding part for fixing Z axis；
The measuring table includes measurement bay and seven laser displacement sensors being connected on it, and respectively main side senses
Device, secondary side senser, X distort sensing to compensation sensor, Y-direction compensation sensor, lower side senser, main twist sensors, pair
Device, major and minor side senser are respectively aligned to rail-sides benchmark one side and a certain cross section profile of guide rail measuring different phase, and X is to benefit
It repays X on sensor alignment workbench and compensates Y-direction plane (i.e. the faces B) on sensor alignment workbench to plane (i.e. the faces A), Y-direction, under
Side senser is directed at plane on guide rail through benchmark under the U-type groove alignment guide rail on workbench, major and minor twist sensors；
Y-axis feeding part includes the servo motor with retarder and brake, double flanged joint seats, shaft coupling, master
Bearing block assembly, supplementary bearing holder assembly, ball screw assembly, sliding block, nut set and pinboard；
Z axis feeding part includes servo motor, retarder, intermediate connecting shaft, idler wheel, is fixed by intermediate die plate
The clearance that type block adjusts rolling wheel and rack is carved on the arched door frame on the frame of gantry main side, and by the tune gap on arched door frame；
The grating assembly includes guide pillar support, guide sleeve bearing, steel ball guide sleeve component, sliding block, reading head, reading head branch
Frame；
The measurement bay uses marble material and has selected cantilever design；
The main side sensor, secondary side senser, X compensate the type of sensor and lower side senser to compensation sensor, Y-direction
It number is not quite similar with size, so at placement sensor position, ensures that sensor projects laser rays in the same plane, and
It is parallel that the face with the measurement bay of measuring table divides face equally.
The major and minor twist sensors are arranged symmetrically relative to above-mentioned plane, and along sensor big face vertical line direction phase
Away from 9mm.
The clamping device is set on workbench, adjacent spaces 200mm.
A kind of measurement method of the linear guide precision based on above-mentioned apparatus, specifically includes following steps：
Step 1, tested guide rail are only positioned over dead weight on table plane, are fixed by clamping device and are made tested lead
Rail and U-type groove centering on workbench；
Step 2 starts Z axis feeding part, and measuring table is made to be moved to calibrated bolck position；
Step 3, start sensor make main side sensor, it is secondary survey sensor, X to compensation sensor, Y-direction compensation sensor,
Lower survey sensor, main twist sensors, secondary twist sensors are aligned on calibrated bolck, and by sensor zero setting；
Step 4, Z axis feeding part drive portal frame and measuring table to move to other end, phase by lathe bed platform one end
Between in multiple position stop motions, the part of Y-axis feeding at this time drives measuring table past along vertical tested guide rail direction, that is, Y direction
Multiple movement, grating assembly are used to control the physical location of Z axis movement, that is, record Z axis coordinate position；
Step 5 is sensed using main side sensor, secondary survey sensor, X to compensation sensor, Y-direction compensation sensor, lower survey
Device, main twist sensors, secondary twist sensors measure tested guide rail, to collect measurement data；
Step 6 is calculated with related algorithm by data above and evaluates side and the bottom surface reference line of tested guide rail
Degree, raceway circular arc cylinder central line degree, raceway circular arc cylinder center line are relative to the depth of parallelism of side and bottom surface benchmark, raceway
Arc radius, height, width, distortion, mounting hole pitch-row.
Compared with prior art, the present invention its remarkable advantage is：1) it when the device of the invention measures, is not necessarily to multiple
Bolt is fixed, and, test efficiency height automatically fixed using cam is directly placed, easy for installation, reduces peace in a way
Dress up this；2) Y direction of the present invention uses the kind of drive of high precision ball leading screw, Z-direction to use idler wheel rack and air supporting
The kind of drive of guide rail；Idler wheel rack can make that back of tooth gap will not occur in forward and reverse limit, and can be with convenient for adjusting clearance
Realize the movement of long range high speed；Precision is high, with small vibration when walking for air-float guide rail, can break in measuring table bottom and top feed
Gas inhibits to vibrate when stopping；Have the characteristics that high-precision, low noise and low vibration, and can realize smooth motion, can preferably expire
The service requirement of sufficient testing stand；3) measuring device of the invention can utilize multiple sensor measurement datas and locate during the motion
Reason analysis is that dynamic accuracy measures, more meets practical measurement situation；4), efficiency easy to operate when being tested of the invention
Height, repeatability is strong, and economic and practical is strong, and conducive to popularization；5) the timely measurement of the invention by laser displacement sensor, instead
It has answered tested guide rail comprehensively and accurately dimension data, test data is continuously reliable again；6) measurement method of the invention and the world
It integrates with, it is more advanced reliable.
Present invention is further described in detail below in conjunction with the accompanying drawings.
Description of the drawings
Fig. 1 is the overall structure component diagram of rolling linear guide dimensional accuracy self-operated measuring unit of the present invention.
Fig. 2 is the lathe bed platform component figure of rolling linear guide dimensional accuracy self-operated measuring unit of the present invention.
Fig. 3 is the marble lathe bed sectional view of rolling linear guide dimensional accuracy self-operated measuring unit of the present invention.
Fig. 4 is rolling linear guide dimensional accuracy self-operated measuring unit measuring system structural schematic diagram of the present invention.
Fig. 5 is that rolling linear guide dimensional accuracy self-operated measuring unit Y-axis of the present invention feeds part-structure schematic diagram.
Fig. 6 is rolling linear guide dimensional accuracy self-operated measuring unit clamping device structural schematic diagram of the present invention.
Specific implementation mode
In conjunction with attached drawing, a kind of rolling linear guide precision self-operated measuring unit of the invention, including lathe bed platform I, clamping
Device II, portal frame III, measuring table IV, Y-axis feed unit V, Z axis feed unit VI and grating assembly VII, lathe bed platform I
Upper setting portal frame III, III outside setting Z axis feed unit VI of portal frame, which drives portal frame III along bed
Body platform I moves linearly, and III inside setting Y-axis feed unit V of portal frame and measuring table IV, Y-axis feed unit V drive
Measuring table IV is moved up and down along portal frame III, grating assembly VII is arranged between lathe bed platform I and measuring table IV, for measuring
The position of measuring table IV；Clamping device II is also set up on lathe bed platform I, for clamping tested guide rail Ⅸ.
The lathe bed platform I includes marble lathe bed 1, rack support 2, rack 3, grating scale 4, the linear guide 5, air supporting cunning
Block 6, air-float guide rail 7 and workbench 8, be connected on marble lathe bed 1 two air-float guide rails 7 being mutually parallel, every air-float guide rail 7
On be respectively provided with can also be connected along the aerostatic slide 6 that guide rail slides, marble lathe bed 1 rack support 2 and workbench 8, it is described solid
Even rack support 2 and workbench 8 are mutually parallel, and workbench 8 is located between two air-float guide rails 7 and is mutually parallel therewith, rack
Holder 2 is located at the outside of an air-float guide rail 7, and rack 3 is arranged on rack support 2, and the straight line that is also connected on marble lathe bed 1 is led
Rail 5, the linear guide 5 are located at the lower section of workbench 8, and parallel with workbench 8, and grating scale 4 is arranged in the lower section of the linear guide 5,
The grating scale 4 is mutually parallel with the linear guide 5.
The clamping device II includes oscillating cylinder 47, driving gear 48, driven gear 50, the company of synchromesh gear 49, first
Spindle 51-1, the second connecting shaft 51-2, mounting plate 52, the first cam 53-1 and the second cam 53-2,47 shaft end of oscillating cylinder peace
Fill driving gear 48, the end of the first connecting shaft 51-1 is connected driven gear 50, the other end setting of the first connecting shaft 51-1 the
The connected synchromesh gear 49 in the end of one cam 53-1, the second connecting shaft 51-2, the other end connected second of the second connecting shaft 51-2
Cam 53-2, the driving gear 48 are meshed with driven gear 50, and driven gear 50 is meshed with synchromesh gear 49, and above-mentioned two
Root connecting shaft both passes through mounting plate 52, which is fixed on the workbench 8 of lathe bed platform I, and above-mentioned two cam 53 is located at
The top of mounting plate 52.
The portal frame III includes gantry main side frame 10, gantry pair side frame 25, gantry head cover 19, arched door frame 14, gap is adjusted to carve
Type block 17, Y-axis limit switch 24 and Z axis limit switch 11；
Gantry main side frame 10 and gantry pair side frame 25, gantry main side frame 10 and gantry is respectively set in the both ends of gantry head cover 19
The other end of secondary side frame 25 is respectively fixedly connected on a pair of of aerostatic slide 6 on lathe bed platform I, 10 lower section outermost of gantry main side frame
A pair of of Z axis limit switch 11 of setting, the outside also centering of gantry main side frame 10 are provided with the arch for placing Z axis feed unit VI
Door frame 14 is also provided with one on the arched door frame and exchanges gap and carves type block 17, and a pair of of Y-axis limit of inside setting of gantry pair side frame 25 is opened
24 are closed, this is located at Y-axis limit switch on the central shaft of gantry pair side frame 25.
The measuring table IV include measurement bay 20, Y-axis limited block 29, main side sensor 26, secondary side senser 28, X to
Compensate sensor 27, Y-direction compensation sensor 23, lower side senser 30, main twist sensors 21, secondary twist sensors 22；
Measurement bay 20 is connected by Y-axis feed unit V with gantry main side frame 10, and main side is symmetrical arranged on measurement bay 20 and is passed
Sensor 26, secondary side senser 28, above-mentioned two sensor are oppositely arranged, and X is located at main side sensor 26 to compensation sensor 27
Lower section and the side for being directed toward workbench 8, on the basis of the side face, and the top setting Y-direction of measurement bay 20 compensates sensor 23, main torsion
Bent sensor 21, secondary twist sensors 22, the main twist sensors 21, secondary twist sensors 22 are directed toward the upper table of tested guide rail
Face, Y-direction compensate the upper reference plane that sensor 23 is directed toward workbench 8, lower side senser 30 are also set up on measurement bay 20, are directed toward quilt
Guide rail bottom surface is surveyed, the Y-axis limited block 29 being used cooperatively with Y-axis limit switch 24 is also set up on measurement bay 20.
Y-axis feeding part V includes Y-axis servo motor 39, double flanged joint seats 40, shaft coupling 41, main bearing seat group
Part 42, ball screw assembly, 43, nut set 44, sliding block 45, supplementary bearing holder assembly 46 and pinboard 37；
The output shaft of the Y-axis servo motor 39 is connected by shaft coupling 41 with the leading screw of ball screw assembly, 43, described double
40 one end of flanged joint seat is connected to the motor, and the other end is connected with main bearing seat component 42, main bearing seat component 42 and supplementary bearing
Holder assembly 46 is for supporting Y-axis to feed part V, and the center setting nut of pinboard 37 covers 44, which covers and ball wire
The nut of thick stick pair 43 matches, and sliding block 45 is arranged in 37 bottom surface both side of pinboard, which can be in the guide rail 38 of gantry main side frame 10
Upper sliding；The top surface of pinboard 37 is connected measuring table IV.
Z axis feeding part VI includes servo motor 18, retarder 16, intermediate connecting shaft 13, idler wheel 12, centre installation
Plate 15 is fixed on 14 top of arched door frame on portal frame III, and type face and the tune on portal frame III are carved in the inside of intermediate die plate 15
The type face of carving that gap carves type block 17 coincides, and 13 miner diameter end of intermediate connecting shaft is connect with idler wheel 12, on idler wheel 12 and lathe bed platform I
Rack 3 match, the other end of intermediate connecting shaft 13 is connected with retarder 16, the other end and servo motor of retarder 16
18 output shaft is connected.
The grating assembly VII includes guide pillar support 31, guide sleeve bearing 33, steel ball guide sleeve component 36, sliding block 32, reading head
34, head bracket 35 is read, guide pillar support 31 is fixed on measuring table IV, and steel ball guide sleeve component 36 is arranged in guide pillar support 31,
Steel ball guide sleeve component 36 is connect with 33 interference of guide sleeve bearing, and guide sleeve bearing 33 is fixed on sliding block 32, sliding block 32 and lathe bed platform I
On the linear guide 5 match, guide sleeve bearing 33 be also fixed with reading head bracket 35, read head bracket 35 on reading head is set
34。
The measurement bay 20 is marble material and is cantilever design.
A kind of rolling linear guide accuracy measurement method based on above-mentioned apparatus, specifically includes following steps：
Tested guide rail Ⅸ is only positioned over dead weight on 8 plane of workbench by step 1, is fixed simultaneously by clamping device II
In realizing on tested guide rail Ⅸ and workbench 8 that U-type groove is divided equally and faced；
Step 2 starts Z axis feeding part VI, and measuring table IV is made to be moved to Ⅹ position of standard rail；
Step 3, startup sensor make main side sensor 26, secondary side senser 28, X be compensated to compensation sensor 27, Y-direction
Sensor 23, lower side senser 30, main twist sensors 21, secondary twist sensors 22 are aligned on standard rail Ⅹ, and will be passed
Sensor zero setting；
Step 4, Z axis feeding part VI drive portal frame III and measuring table IV to be moved in addition by I one end of lathe bed platform
One end, during which in multiple position stop motions, the part V of Y-axis feeding at this time drives measuring table IV along vertical tested guide rail IX
Direction, that is, Y direction moves back and forth, grating assembly VII records Z axial coordinates position for controlling the physical location moved along Z axis
It sets；
Step 5 compensates sensor using main side sensor 26, secondary side senser 28, X to compensation sensor 27, Y-direction
23, lower side senser 30, main twist sensors 21, secondary twist sensors 22 measure tested guide rail Ⅸ, are surveyed to collect
Measure data；
In step 6, the side that tested guide rail Ⅸ is determined by data above and bottom surface reference line degree, raceway circular arc cylinder
Heart straightness, raceway circular arc cylinder center line are relative to the depth of parallelism of side and bottom surface benchmark, raceway arc radius, height, width
Degree, distortion, mounting hole pitch-row, to complete to measure.
Further detailed description is done to the present invention with reference to embodiment：
Embodiment
A kind of rolling linear guide dimensional accuracy self-operated measuring unit combined with Figure 1 and Figure 2, including lathe bed platform I, clamping
Device II, portal frame III, measuring table IV, Y-axis feeding part V, Z axis feeding part VI and grating assembly VII, wherein tested lead
Rail IX is positioned on lathe bed platform I, when measurement, is fixed and is centered on workbench 8 by clamping device II, lathe bed component
A pair of parallel aerostatic slide 6 and air-float guide rail 7 is arranged to realize that portal frame III is led along tested together with measuring table IV in I top
Ⅸ direction of rail (i.e. Z-direction) is for linear motion, and portal frame III is fixed on aerostatic slide 6, is set in the inside of portal frame III
It is equipped with Y-axis feeding part V, and part VI is fed in opposite outside setting Z axis, Y-axis feeds part V will by pinboard 37
Measuring table IV it is coupled, it can be achieved that measuring table IV relative to about III portal frame (i.e. Y direction) move, Z axis into
Drive portal frame III and measuring table IV along Ⅸ direction (i.e. Z axis of tested guide rail by the movement between idler wheel 11 and rack 3 to part
Direction) movement, while the grating assembly VII being connected between measuring table IV and lathe bed platform I being driven to move synchronously；
In conjunction with Fig. 2, the lathe bed platform I includes marble lathe bed 1, aerostatic slide 6, rack support 2, rack 3, grating scale
4, the linear guide 5 being used cooperatively with grating assembly VII, air-float guide rail 7 and workbench 8 are connected in marble by adhesion process
On lathe bed 1, it is provided with the groove for installing single T-nut slot 9 on rack support 2, two limits are placed on T-nut slot
Position block；
In conjunction with Fig. 5, the clamping device II is for fixing tested guide rail IX automatically, having both certain centering effect.Pendulum
Cylinder 47 of taking offence works, and driving gear 48 thereon drives driven gear 50 and synchromesh gear 49 to rotate simultaneously, is connected by two
Axis 51-1,51-2 drive its end fixed a pair of cams 53-1,53-2 to rotate synchronously, and cam is placed on mounting plate 52, install
Plate is equipped with arc groove and is oriented to for cam；
In conjunction with Fig. 4, the portal frame III includes gantry main side frame 10, gantry pair side frame 25 and gantry head cover 19, gantry master
Two grooves are provided on side frame 10 for placing two limit switches 11, with two limited blocks placed on T-nut slot 9
It is used cooperatively；It is provided with U-type groove on gantry pair side frame 25 and is convenient for two 24 adjusting positions of limit switch placed thereon,
X on measuring table IV is used cooperatively to compensation sensor 27, and in gantry main side, frame 10 is provided with for fixing Z axis feeding portion
Divide the arched door frame 14 of VI；
In conjunction with Fig. 4,5, the measuring table IV includes measurement bay 20 and seven laser displacement sensors being connected on it,
Respectively main side sensor 26, secondary side senser 28, X to compensation sensor 27, Y-direction compensation sensor 23, lower side senser 30,
Main twist sensors 21, secondary twist sensors 22, major and minor side senser 26,28 are respectively aligned to tested lead in measurement different phase
The quasi- one side of rail Ⅸ side group and a certain cross section profiles of tested guide rail IX, X on compensation 27 Alignment stage 8 of sensor X to plane face
(i.e. the faces A), Y-direction compensate Y-direction plane (i.e. the faces B) on 23 Alignment stage 8 of sensor, and lower side senser 30 is through on workbench 8
U-type groove alignment tested guide rail IX under benchmark, major and minor twist sensors 21,22 are directed at plane on tested guide rail IX；
In conjunction with Fig. 5, Y-axis feeding part V includes the servo motor 39 with retarder and brake, double flanged joints
Seat 40, shaft coupling 41, main bearing seat component 42, supplementary bearing holder assembly 46, ball screw assembly, 43, sliding block 45, nut cover 44 and turn
Fishplate bar 37.
In conjunction with Fig. 4, the Z axis feeding part VI includes servo motor 18, retarder 16, intermediate connecting shaft 13, idler wheel 12,
It is fixed on the arched door frame 14 on gantry main side frame 10 by intermediate die plate 15, and type is carved by the tune gap on arched door frame 14
Block 17 adjusts the clearance of idler wheel 12 and rack 3；
In conjunction with Fig. 4, the grating assembly VII includes guide pillar support 31, guide sleeve bearing 33, steel ball guide sleeve component 36, sliding block
32, reading head 34, reading head bracket 35.
The measurement bay 20 uses marble material and has selected cantilever design.
The main side sensor 26, secondary side senser 28, X are passed to compensation sensor 27, Y-direction compensation sensor 23 and downside
The model of sensor 30 is not quite similar with size, so at placement sensor position, ensures that sensor projects laser rays same
In plane, and with the measurement bay 20 of measuring table IV to divide face equally parallel in the face.
The major and minor twist sensors 21,22 are arranged symmetrically relative to above-mentioned plane, and along the big face vertical line side of sensor
To at a distance of 9mm.The clamping device II is set on workbench 8, adjacent spaces 200mm.
The measurement method of the linear guide precision based on above-mentioned apparatus, specifically includes following steps：
Step 1, tested guide rail IX are only positioned over dead weight on 8 plane of workbench, are fixed and are made by clamping device II
Tested guide rail Ⅸ and U-type groove centering on workbench 8；
Step 2 starts Z axis feeding part VI, and measuring table IV is made to be moved to Ⅹ position of standard rail；
Step 3, startup sensor make main side sensor 26, secondary side senser 28, X be passed to compensation sensor 27, Y-direction compensation
Sensor 23, lower side senser 30, main twist sensors 21, secondary twist sensors 22 are aligned on calibrated bolck X, and sensor are set
Zero；
Step 4, Z axis feeding part VI drive portal frame III and measuring table IV to be moved in addition by I one end of lathe bed platform
One end, during which in multiple position stop motions, the part V of Y-axis feeding at this time drives measuring table IV along vertical tested guide rail IX
Direction, that is, Y direction moves back and forth, and grating assembly VII is used to control the physical location of Z axis movement, that is, records Z axis coordinate position；
Step 5, using main side sensor 26, secondary side senser 28, X to compensation sensor 27, Y-direction compensation sensor 23,
Lower side senser 30, main twist sensors 21, secondary twist sensors 22 measure tested guide rail Ⅸ, to collect measurement number
According to；
Step 6, the side for being calculated with related algorithm by data above and evaluating tested guide rail Ⅸ and bottom surface benchmark are straight
Dimension, raceway circular arc cylinder central line degree, raceway circular arc cylinder center line are relative to the depth of parallelism of side and bottom surface benchmark, rolling
Road arc radius, height, width, distortion, mounting hole pitch-row.
The course of work of apparatus of the present invention is：
As shown in Figure 1, 2,1 middle part of marble lathe bed is provided with two grooves, is respectively configured to provide space and gives Y-axis feeding portion
Divide V servo motor 39 and grating assembly VII.1 upside one side stationary rack holder 2 of marble lathe bed, while on rack support 2
Equipped with rack 3, ensure portal frame III and measuring table IV along quilt by the guiding with the effect of idler wheel 12 and aerostatic slide 6
Survey the movement of Ⅸ direction of guide rail.8 top surface of workbench is embedded with a row mounting plate 52, guiding of the arc groove for cam 53 thereon.
As shown in Fig. 1,4, Y-axis is fed in part V to be started with the servo motor 39 of retarder and brake, passes through shaft coupling
Device 41 drives ball screw assembly, 43 to move.Pinboard 37 and measurement fixed thereon are driven using the nut set 44 being sleeved on nut
Platform IV makees the linear motion in Y direction.Z axis feeds the servo motor 18 in part and drives idler wheel by intermediate connecting shaft 13
12 movements, are driven, while under the guiding of aerostatic slide 6 and air-float guide rail 7 using between 12 rack 3 of idler wheel, make III He of portal frame
Measuring table IV is for linear motion along Ⅸ direction of tested guide rail.
As shown in Fig. 1,3,4, fixed 7 laser displacement sensors composition on the measurement bay 20 of measuring table IV.It measures
Three laser displacement sensors are fixed in IV top surface of platform, wherein main twist sensors 21, secondary twist sensors 22 are staggered back to putting
It sets：It is 9mm along tested guide rail Ⅸ width direction distance；Y-direction compensates the faces B of 23 Alignment stage 8 of sensor, is mended for benchmark
It repays.Main side sensor 26, X are located at the same side to compensation sensor 27, and wherein main side sensor 26 is aligned in Ⅸ phase of tested guide rail
Corresponding side, X are compensated to the faces B of compensation 27 Alignment stage 8 of sensor for benchmark.Other side fixed joint side senser
28, it is aligned in Ⅸ corresponding side of tested guide rail, the alignment of lower side senser 30 of lower end is through the U-type groove alignment on workbench 8
In the lower reference plane of tested guide rail Ⅸ；
As shown in Fig. 1,4, above-mentioned measuring device is to the automatic measurement method of the linear guide precision：Z axis feeds part
While VI drive portal frame III and measuring table IV move to other end by I one end of lathe bed platform, Y-axis feeds V band of part
Dynamic measuring table IV is moved along Y direction, and 7 in measuring table IV laser displacement sensor makees corresponding movement；Utilize master
Side senser 26, secondary side senser 28, lower side senser 30, main twist sensors 21, secondary twist sensors 22, X are passed to compensation
Sensor 27, Y-direction compensation sensor 23 and grating scale 4 and reading head 34 obtain the space coordinate of each location measurement point, into
And relevant treatment is carried out to the data obtained, the linear guide correlation Form and position error described in step 6 can be obtained.
As a shown in Figure 6, the driven gear 50 in clamping system II and synchromesh gear 49 are driven using oscillating cylinder 47.Peace
Loading board 52, the first connecting shaft 51-1, the second connecting shaft 51-2, driven gear 50 and synchromesh gear 49 are located at 8 lower section of workbench
In processing groove, oscillating cylinder 47 works, and driving gear 48 rotates, and driven gear 50 and synchromesh gear 49 is driven to rotate, by the
One connecting shaft 51-1, the second connecting shaft 51-2, to drive the first cam 53-1 and the second cam 53-2 to rotate synchronously, fixed quilt
Guide rail Ⅸ is surveyed, pinching action is completed.
From the foregoing, it will be observed that the device of the invention can test rolling linear guide dimensional accuracy, dynamic measures, test efficiency
Height, measurement data are true and reliable.
Claims (8)
1. a kind of rolling linear guide precision self-operated measuring unit, which is characterized in that including lathe bed platform [I], clamping device
[II], portal frame [III], measuring table [IV], Y-axis feed unit [V], Z axis feed unit [VI] and grating assembly [VII], bed
Portal frame [III] is set on body platform [I], Z axis feed unit [VI], the Z axis feed unit [VI] are set on the outside of portal frame [III]
Portal frame [III] is driven to move linearly along lathe bed platform [I], setting Y-axis feed unit [V] and measurement are flat on the inside of portal frame [III]
Platform [IV], Y-axis feed unit [V] drive measuring table [IV] to be moved up and down along portal frame [III], lathe bed platform [I] and measurement
Grating assembly [VII], the position for measuring measuring table [IV] are set between platform [IV]；Folder is also set up on lathe bed platform [I]
Tight device [II], for clamping tested guide rail [Ⅸ]；
The lathe bed platform [I] includes marble lathe bed [1], rack support [2], rack [3], grating scale [4], the linear guide
[5], aerostatic slide [6], air-float guide rail [7] and workbench [8], be connected on marble lathe bed [1] two air supportings being mutually parallel
Guide rail [7], being respectively provided on every air-float guide rail [7] can be also solid on the aerostatic slide [6] that guide rail slides, marble lathe bed [1]
Even rack support [2] and workbench [8], the connected rack support [2] and workbench [8] are mutually parallel, and workbench [8] is located at
It is mutually parallel between two air-float guide rails [7] and therewith, rack support [2] is located at the outside of an air-float guide rail [7], rack branch
Rack [3] is set on frame [2], and be also connected the linear guide [5] on marble lathe bed [1], which is located at workbench
[8] lower section, and, the lower section setting grating scale [4] of the linear guide [5] parallel with workbench [8], the grating scale [4] and straight line
Guide rail [5] is mutually parallel；
Measuring table [IV] includes measurement bay [20], Y-axis limited block [29], main side sensor [26], secondary side senser [28], X
To compensation sensor [27], Y-direction compensation sensor [23], lower side senser [30], main twist sensors [21], secondary distortion sensing
Device [22]；
Measurement bay [20] is connected by Y-axis feed unit [V] with gantry main side frame [10], and master is symmetrical arranged on measurement bay [20]
Side senser [26], secondary side senser [28], above-mentioned two sensor are oppositely arranged, and X is located at main side to compensation sensor [27]
The lower section of sensor [26] and the side for being directed toward workbench [8], on the basis of the side face, and Y-direction is arranged in the top of measurement bay [20]
Compensate sensor [23], main twist sensors [21], secondary twist sensors [22], the main twist sensors [21], secondary distortion
Sensor [22] is directed toward the upper surface of tested guide rail, and Y-direction compensates the upper reference plane that sensor [23] is directed toward workbench [8], measures
Lower side senser [30] is also set up on frame [20], is directed toward tested guide rail bottom surface, is also set up and Y-axis limit switch on measurement bay [20]
[24] the Y-axis limited block [29] being used cooperatively.
2. rolling linear guide precision self-operated measuring unit according to claim 1, which is characterized in that the clamping device
[II] include oscillating cylinder [47], driving gear [48], driven gear [50], synchromesh gear [49], the first connecting shaft [51-1],
Second connecting shaft [51-2], mounting plate [52], the first cam [53-1] and the second cam [53-2], oscillating cylinder [47] shaft end peace
Fill driving gear [48], the end of the first connecting shaft [51-1] is connected driven gear [50], the first connecting shaft [51-1] it is another
End the first cam of setting [53-1], the connected synchromesh gear [49] in end of the second connecting shaft [51-2], the second connecting shaft [51-2]
The other end be connected the second cam [53-2], the driving gear [48] is meshed with driven gear [50], driven gear [50]
It is meshed with synchromesh gear [49], above-mentioned two connecting shafts both pass through mounting plate [52], which is fixed on lathe bed platform [I]
Workbench [8] on, above-mentioned two cam [53] is located at the top of mounting plate [52].
3. rolling linear guide precision self-operated measuring unit according to claim 1, which is characterized in that the portal frame
[III] include gantry main side frame [10], gantry pair side frame [25], gantry head cover [19], arched door frame [14], adjust gap carve type block [17],
Y-axis limit switch [24] and Z axis limit switch [11]；
The both ends of gantry head cover [19] are respectively set gantry main side frame [10] and gantry pair side frame [25], gantry main side frame [10] and
The other end of gantry pair side frame [25] is respectively fixedly connected on a pair of of aerostatic slide [6] on lathe bed platform [I], gantry main side frame
[10] the outside also centering of a pair of of Z axis limit switch [11] of lower section outermost setting, gantry main side frame [10] is provided with for putting
The arched door frame [14] of Z axis feed unit [VI] is set, one is also provided on the arched door frame exchanges gap and carve type block [17], gantry pair side frame
[25] a pair of of Y-axis limit switch [24] of inside setting, this is located at Y-axis limit switch the central shaft of gantry pair side frame [25]
On.
4. rolling linear guide precision self-operated measuring unit according to claim 1, which is characterized in that the Y-axis feeding
Unit [V] includes Y-axis servo motor [39], double flanged joint seats [40], shaft coupling [41], main bearing seat component [42], ball
Lead screw pair [43], nut set [44], sliding block [45], supplementary bearing holder assembly [46] and pinboard [37]；
The output shaft of the Y-axis servo motor [39] is connected by shaft coupling [41] with the leading screw of ball screw assembly, [43], described
Double flanged joint seat [40] one end are connected to the motor, and the other end is connected with main bearing seat component [42], main bearing seat component [42]
With supplementary bearing holder assembly [46] for supporting Y-axis feed unit [V], the center of pinboard [37] that nut set [44] is arranged,
Nut set is matched with the nut of ball screw assembly, [43], and sliding block [45] is arranged in pinboard [37] bottom surface both side, which can
It is slided on the guide rail [38] of gantry main side frame [10]；The connected measuring table [IV] in the top surface of pinboard [37].
5. rolling linear guide precision self-operated measuring unit according to claim 3, which is characterized in that the Z axis feeding
Unit [VI] includes servo motor [18], retarder [16], intermediate connecting shaft [13], idler wheel [12], and intermediate die plate [15] is solid
Above the arched door frame [14] on portal frame [III], and carved on the inside of intermediate die plate [15] on type face and portal frame [III]
The type face of carving that gap carves type block [17] is adjusted to coincide, intermediate connecting shaft [13] miner diameter end is connect with idler wheel [12], idler wheel [12] and bed
Rack [3] on body platform [I] matches, and the other end of intermediate connecting shaft [13] is connected with retarder [16], retarder [16]
The other end be connected with the output shaft of servo motor [18].
6. rolling linear guide precision self-operated measuring unit according to claim 1, which is characterized in that the grating assembly
[VII] include guide pillar support [31], guide sleeve bearing [33], steel ball guide sleeve component [36], sliding block [32], reading head [34], reading head
Holder [35], guide pillar support [31] are fixed on measuring table [IV], and steel ball guide sleeve component [36] is arranged in guide pillar support [31],
Steel ball guide sleeve component [36] is connect with guide sleeve bearing [33] interference, and guide sleeve bearing [33] is fixed on sliding block [32], sliding block [32]
It is matched with the linear guide [5] on lathe bed platform [I], guide sleeve bearing [33] is also fixed with reading head bracket [35], reading head
Reading head [34] is set on holder [35].
7. a kind of rolling linear guide precision self-operated measuring unit according to claim 1, which is characterized in that measurement bay [20]
For marble material and it is cantilever design.
8. a kind of rolling linear guide accuracy measurement method based on claim 1 described device, which is characterized in that specifically include
Following steps：
Tested guide rail [Ⅸ] is only positioned over dead weight on workbench [8] plane by step 1, fixed by clamping device [II]
And in realizing on tested guide rail [Ⅸ] and workbench [8] that U-type groove is divided equally and faced；
Step 2 starts Z axis feed unit [VI], and measuring table [IV] is made to be moved to standard rail [Ⅹ] position；
Step 3, startup sensor make main side sensor [26], secondary side senser [28], X be compensated to compensation sensor [27], Y-direction
Sensor [23], lower side senser [30], main twist sensors [21], secondary twist sensors [22] are aligned in standard rail [Ⅹ]
On, and by sensor zero setting；
Step 4, Z axis feed unit [VI] drive portal frame [III] and measuring table [IV] to be moved to by lathe bed platform [I] one end
Other end, during which in multiple position stop motions, Y-axis feed unit [V] drive measuring table [IV] is along vertical tested at this time
The direction guide rail [IX], that is, Y direction moves back and forth, grating assembly [VII] records Z for controlling the physical location moved along Z axis
Coordinate positions；
Step 5 compensates sensor using main side sensor [26], secondary side senser [28], X to compensation sensor [27], Y-direction
[23], lower side senser [30], main twist sensors [21], secondary twist sensors [22] measure tested guide rail [Ⅸ],
To collect measurement data；
Step 6, the side that tested guide rail [Ⅸ] is determined by data above and bottom surface reference line degree, raceway circular arc cylinder center
Straightness, raceway circular arc cylinder center line relative to the depth of parallelism of side and bottom surface benchmark, raceway arc radius, height, width,
Distortion, mounting hole pitch-row, to complete to measure.
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| CN202074954U (en) * | 2011-04-08 | 2011-12-14 | 广东高新凯特精密机械股份有限公司 | Comprehensive precision detector for rolling linear guide rail pair |
| KR101185003B1 (en) * | 2012-03-21 | 2012-10-02 | (주)대흥정밀산업 | Measuring apparatus of sprayed coating thickness |
| CN104101491B (en) * | 2014-07-01 | 2017-02-15 | 华中科技大学 | Device for detecting performance of rolling linear guide rail pair |
| CN104236483B (en) * | 2014-09-22 | 2017-05-03 | 张家港斯克斯精密机械科技有限公司 | Device and method for measuring precision and friction force of rolling linear guide rail pair |
| CN205785065U (en) * | 2016-05-24 | 2016-12-07 | 南京理工大学 | Rolling linear guide precision self-operated measuring unit |
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