CN108195321B - A kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method - Google Patents
A kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method Download PDFInfo
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- CN108195321B CN108195321B CN201810094148.4A CN201810094148A CN108195321B CN 108195321 B CN108195321 B CN 108195321B CN 201810094148 A CN201810094148 A CN 201810094148A CN 108195321 B CN108195321 B CN 108195321B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The present invention discloses a kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method, this method is using laser displacement sensor multiangular measurement same position at a distance from 3 points on the circular arc in groove-section, groove-section circular arc center of circle spatial value is calculated by trigonometric function relationship, the space line where the two neighboring raceway center of circle is fitted using least square method, and the depth of parallelism of two space lines in different vertical plane is calculated, adjacent raceway axis parallel degree relationship can be obtained.The indirect quickly accurate on-line measurement to the adjacent raceway depth of parallelism is realized in the invention, measurement accuracy depends on used laser displacement sensor measurement accuracy, may be implemented to raceway measurement of paralleism trueness error using high precision laser displacement sensor less than 0.1 micron.And detected using the workbench that there is numerically-controlled machine tool itself high-precision to be driven, it measures more acurrate.
Description
Technical field
The present invention relates to linear guide fields of measurement more particularly to a kind of ball line slideway auxiliary raceway depth of parallelism to survey online
Amount method.
Background technique
Currently, linear guide precision measure mostly uses greatly hand dipping or touch sensor to measure, to laboratory technician
Competency profiling height and measurement result poor accuracy.
Summary of the invention
In order to solve deficiency in the prior art, the purpose of the present invention is to provide a kind of accurate ball straight lines of measurement to lead
Rail pair raceway depth of parallelism On-line Measuring Method.
To achieve the above object, the invention adopts the following technical scheme:
A kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method, the On-line Measuring Method include following step
It is rapid:
1) first laser displacement sensor and second laser displacement sensor are passed through into fixture respectively and are mounted on numerically-controlled machine tool
Lathe bed on, and the measuring head of first laser displacement sensor and second laser displacement sensor is in perpendicular to linear guide
In one plane A of axis, wherein first laser displacement sensor is for measuring the first raceway, and second laser displacement sensor is used
In measuring the second raceway;The initial measurement locations for choosing first laser displacement sensor and second laser displacement sensor are respectively
Point O1And O21, wherein the measuring head of first laser displacement sensor can surround point O in the plane A1Any angle rotation, the
The measuring head of dual-laser displacement sensor can surround point O in the plane A21Any angle rotation;
2) when the ball race grinding of linear guide, linear guide is mounted on the workbench of numerically-controlled machine tool, using at molding sand
Wheel the first raceway of grinding and the second raceway, by the first raceway and the second raceway wiped clean after being ground;
3) first laser displacement sensor and second laser displacement sensor and the shifting for cooperating numerically controlled machine are utilized
It is dynamic, the section center of circle spatial value of the first raceway and the axially distinct position of the second raceway is repeatedly measured and calculated, is recycled
Least square method carries out straight line fitting to above-mentioned multiple centers of circle for measuring, fits the straight of the first raceway and the second raceway respectively
Line, and the depth of parallelism of above-mentioned two straight lines in different vertical plane is calculated, the first raceway and the second raceway axis can be obtained
The depth of parallelism relationship of line.
The specific method is as follows for the step 3):
A) first laser displacement sensor point O is utilized1Three point A on to the first raceway circular arc sequentially1、B1、C1's
Distance is denoted as l respectively1A、l1B、l1C, wherein measurement interval angles are θ every time, i.e. O1A1With O1B1、O1B1With O1C1Angle
It is θ;Similarly, second laser displacement sensor point O is utilized21Three point A on to the second raceway circular arc sequentially21、B21、
C21Distance, be denoted as l respectively21A、l21B、l21C, wherein measurement interval angles are also θ every time, i.e. O21A21With O21B21、O21B21
With O21C21Angle is also θ;
B) with point O1For coordinate origin, middle line O is measured1B1With coordinate system O1X coincides, the shifting of numerically controlled machine
Dynamic direction and coordinate system O1Z is parallel, O1O21With O1Y coincides, and establishes three-dimensional cartesian coordinate system XYZ, measurement point A1、B1、C1's
Coordinate is respectively (- l1Acosθ,l1Asinθ,0)、(-l1B,0,0)、(-l1Ccosθ,-l1CSin θ, 0), measurement point A21、B21、C21
Coordinate be respectively (- l21Acosθ,l21Asinθ-w,0)、(-l21B,-w,0)、(-l21Ccosθ,-l1CSin θ-w, 0), wherein O21
With O1The distance between be w;
C) trigonometric function relationship is utilized, the first raceway circular arc A is derived by1B1C1Centre point O '1Coordinate (x1,y1,
z1), wherein x1、y1、z1Specific exploitation it is as follows:
z1=0;
Similarly, available second raceway circular arc A21B21C21Center of circle O '21Coordinate position (x21,y21,z21), wherein
x21、y21、z21Specific exploitation it is as follows:
z21=0;
D) drive linear guide more to carry out along each moving distance d of Z axis positive direction using numerically-controlled machine tool control workbench
The measurement position of secondary measurement, first laser displacement sensor and second laser displacement sensor remains constant;
First laser displacement sensor moves distance d along Z-direction with respect to raceway last time measurement point, and n-th is taken to measure
First laser displacement sensor point relative position is point On, n is the integer equal to or more than 5, point OnRelative to point O1Along Z
Axis moves the distance of (n-1) d, and the method for repeating the 1st first three point of raceway circular arc of measurement obtains measurement point An、Bn、Cn
Coordinate be respectively (- lnAcosθ,lnAsinθ,-(n-1)d)、(-lnB,0,-(n-1)d)、(-lnCcosθ,-lnCsinθ,-(n-
1)d);
Using trigonometric function relationship, it is derived by the first raceway circular arc AnBnCnCentre point O 'nCoordinate (xn,yn,zn),
Wherein xn、yn、znSpecific exploitation it is as follows:
zn=-(n-1) d;
Similarly, second laser displacement sensor also moves distance d along Z-direction with respect to the second raceway last time measurement point,
Taking n-th measurement second laser displacement sensor point relative position is point O2n, n is the integer equal to or more than 5, point O2n
Relative to point O21The distance of (n-1) d is moved along Z axis, the method for repeating the 1st second three point of raceway circular arc of measurement obtains
Measurement point A2n、B2n、C2nCoordinate be respectively (- l2nAcosθ,l2nAsinθ-w,-(n-1)d)、(-l2nB,-w,-(n-1)d)、(-
l2nCcosθ,-l2nCsinθ-w,-(n-1)d);
Using trigonometric function relationship, it is derived by the second raceway circular arc A2nB2nC2nCentre point O '2nCoordinate (x2n,y2n,
z2n), wherein x2n、y2n、z2nSpecific exploitation it is as follows:
z2n=-(n-1) d;
E) according to the above-mentioned multiple centre point O ' for measuring and being calculated the axially distinct position of the first raceway1, O '2, O
′3..., O 'n, straight line fitting is carried out to above-mentioned centre point using least square method, if fitting space line Ls1Expression formula are as follows:
Wherein:
Similarly, according to the above-mentioned multiple centre point O ' for measuring and being calculated the axially distinct position of the second raceway21、O′22、
O′23…O′2n, straight line fitting is carried out to above-mentioned centre point using least square method, if fitting space line Ls2Expression formula are as follows:
Wherein:
According to two straight lines being fitted, the depth of parallelism of the first raceway and the second raceway in x and y direction can be obtained,
In the depth of parallelism △ of the first raceway and the second raceway in the X directionXAre as follows:
The depth of parallelism △ of first raceway and the second raceway in the Y directionYAre as follows:
Then the first raceway and the second raceway axis parallel degree △ can be indicated are as follows:
The linear guide is mounted on the workbench of numerically-controlled machine tool by magnetic absorption.
The forming grinding wheel is ground the first raceway and the complete rear alcohol that passes through of the second raceway for raceway wiped clean.
The present invention is using 3 points on the circular arc on laser displacement sensor multiangular measurement same position and groove-section
Distance calculates groove-section circular arc center of circle spatial value by trigonometric function relationship, fits phase using least square method
Space line where adjacent two raceway centers of circle, and the depth of parallelism of two space lines in different vertical plane is calculated,
Adjacent raceway axis parallel degree relationship can be obtained.The indirect quickly accurate online survey to the adjacent raceway depth of parallelism is realized in the invention
Amount, measurement accuracy depend on used laser displacement sensor measurement accuracy, use high precision laser displacement sensor can be with
It realizes to raceway measurement of paralleism trueness error less than 0.1 micron.And using numerically-controlled machine tool itself there is high-precision to be driven
Workbench is detected, and is measured more acurrate.
Detailed description of the invention
The present invention is described in further details below in conjunction with the drawings and specific embodiments;
Fig. 1 is the schematic diagram of On-line Measuring Method of the present invention.
Specific embodiment
As shown in Figure 1, a kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method of the present invention, On-line Measuring Method
The following steps are included:
1) first laser displacement sensor 4 and second laser displacement sensor 5 are mounted on numerical control machine by fixture respectively
On the lathe bed of bed, and the measuring head of first laser displacement sensor 4 and second laser displacement sensor 5 is in perpendicular to straight line
In one plane A of rail axis, wherein first laser displacement sensor 4 is for measuring the first raceway 3, and second laser displacement passes
Sensor 5 is for measuring the second raceway 6;Choose the initial measurement of first laser displacement sensor 4 and second laser displacement sensor 5
Position is respectively point O1And O21, wherein the measuring head of first laser displacement sensor 4 can surround point O in the plane A1Arbitrarily
The measuring head of angular turn, second laser displacement sensor 5 can surround point O in the plane A21Any angle rotation;
2) when the ball race grinding of linear guide 2, linear guide 2 is mounted on the workbench 1 of numerically-controlled machine tool by magnetic absorption
On, it is ground the first raceway 3 and the second raceway 6 using forming grinding wheel, with alcohol respectively by the first raceway 3 and the second rolling after being ground
6 wiped clean of road;
3) first laser displacement sensor 4 and second laser displacement sensor 5 are utilized and cooperates numerically controlled machine 1
It is mobile, the section center of circle spatial value of the first raceway 3 and the axially distinct position of the second raceway 6 is repeatedly measured and calculates, then
Straight line fitting is carried out to the above-mentioned multiple centers of circle measured using least square method, fits the first raceway 3 and the second raceway 6 respectively
Straight line, and calculate the depth of parallelism of above-mentioned two straight lines in different vertical plane, the first raceway 3 and the second rolling can be obtained
The depth of parallelism relationship of 6 axis of road.
The specific method is as follows for step 3):
A) 4 measurement point O of first laser displacement sensor is utilized1Three point A on to 3 circular arc of the first raceway sequentially1、B1、C1
Distance, be denoted as l respectively1A、l1B、l1C, wherein measurement interval angles are θ every time, i.e. O1A1With O1B1、O1B1With O1C1Institute is at folder
Angle is θ;Similarly, 5 measurement point O of second laser displacement sensor is utilized21Three point A on to 6 circular arc of the second raceway sequentially21、
B21、C21Distance, be denoted as l respectively21A、l21B、l21C, wherein measurement interval angles are also θ every time, i.e. O21A21With O21B21、
O21B21With O21C21Angle is also θ;
B) with point O1For coordinate origin, middle line O is measured1B1With coordinate system O1X coincides, the shifting of numerically controlled machine 1
Dynamic direction and coordinate system O1Z is parallel, O1O21With O1Y coincides, and establishes three-dimensional cartesian coordinate system XYZ, measurement point A1、B1、C1's
Coordinate is respectively (- l1Acosθ,l1Asinθ,0)、(-l1B,0,0)、(-l1Ccosθ,-l1CSin θ, 0), measurement point A21、B21、C21
Coordinate be respectively (- l21Acosθ,l21Asinθ-w,0)、(-l21B,-w,0)、(-l21Ccosθ,-l1CSin θ-w, 0), wherein O21
With O1The distance between be w;
C) trigonometric function relationship is utilized, 3 circular arc A of the first raceway is derived by1B1C1Centre point O '1Coordinate (x1,y1,
z1), wherein x1、y1、z1Specific exploitation it is as follows:
z1=0;
Similarly, available second raceway, 6 circular arc A21B21C21Center of circle O '21Coordinate position (x21,y21,z21), wherein
x21、y21、z21Specific exploitation it is as follows:
z21=0;
D) drive linear guide 2 along each moving distance d of Z axis positive direction to carry out using numerically-controlled machine tool control workbench 1
The measurement position of repeatedly measurement, first laser displacement sensor 4 and second laser displacement sensor 5 remains constant;
First laser displacement sensor 4 moves distance d along Z-direction with respect to raceway last time measurement point, and n-th is taken to measure
4 measurement point relative position of first laser displacement sensor is point On, n is the integer equal to or more than 5, point OnRelative to point O1Along Z
Axis moves the distance of (n-1) d, and the method for repeating the 1st measurement 3 three point of circular arc of the first raceway obtains measurement point An、Bn、Cn
Coordinate be respectively (- lnAcosθ,lnAsinθ,-(n-1)d)、(-lnB,0,-(n-1)d)、(-lnCcosθ,-lnCsinθ,-(n-
1)d);
Using trigonometric function relationship, it is derived by 3 circular arc A of the first racewaynBnCnCentre point O 'nCoordinate (xn,yn,
zn), wherein xn、yn、znSpecific exploitation it is as follows:
zn=-(n-1) d;
Similarly, second laser displacement sensor 5 also moves distance along Z-direction with respect to 6 last time of the second raceway measurement point
D, taking n-th measurement 5 measurement point relative position of second laser displacement sensor is point O2n, n is the integer equal to or more than 5, point
O2nRelative to point O21The distance of (n-1) d is moved along Z axis, the method for repeating the 1st measurement 6 three point of circular arc of the second raceway,
Obtain measurement point A2n、B2n、C2nCoordinate be respectively (- l2nAcosθ,l2nAsinθ-w,-(n-1)d)、(-l2nB,-w,-(n-1)
d)、(-l2nCcosθ,-l2nCsinθ-w,-(n-1)d);
Using trigonometric function relationship, it is derived by 6 circular arc A of the second raceway2nB2nC2nCentre point O '2nCoordinate (x2n,
y2n,z2n), wherein x2n、y2n、z2nSpecific exploitation it is as follows:
z2n=-(n-1) d;
E) according to the above-mentioned multiple centre point O ' for measuring and being calculated the axially distinct position of the first raceway 31, O '2, O
′3..., O 'n, straight line fitting is carried out to above-mentioned centre point using least square method, if fitting space line Ls1Expression formula are as follows:
Wherein:
Similarly, according to the above-mentioned multiple centre point O ' for measuring and being calculated the axially distinct position of the second raceway 621、O′22、
O′23…O′2n, straight line fitting is carried out to above-mentioned centre point using least square method, if fitting space line Ls2Expression formula are as follows:
Wherein:
According to two straight lines being fitted, the depth of parallelism of the first raceway 3 and the second raceway 6 in x and y direction can be obtained,
The wherein depth of parallelism △ of the first raceway 3 and the second raceway 6 in the X directionXAre as follows:
The depth of parallelism △ of first raceway 3 and the second raceway 6 in the Y directionYAre as follows:
Then the first raceway 3 and 6 axis parallel degree △ of the second raceway can be indicated are as follows:
Above-mentioned measurement method both can be applied to the depth of parallelism in sliding block raceway and linear guide ball race grinding process
On-line measurement also can be applied to the measurement of finished product sliding block raceway and the linear guide raceway depth of parallelism.
The indirect quickly accurate on-line measurement to the adjacent raceway depth of parallelism is realized in the invention, and measurement accuracy depends on being used
Laser displacement sensor measurement accuracy, may be implemented using high precision laser displacement sensor to raceway measurement of paralleism precision
Error is less than 0.1 micron.And detected using the workbench that there is numerically-controlled machine tool itself high-precision to be driven, it measures more quasi-
Really.
Claims (3)
1. a kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method, it is characterised in that: the On-line Measuring Method packet
Include following steps:
1) first laser displacement sensor and second laser displacement sensor are passed through into the bed that fixture is mounted on numerically-controlled machine tool respectively
With, and the measuring head of first laser displacement sensor and second laser displacement sensor is in perpendicular to linear guide axis
A plane A in, wherein first laser displacement sensor is for measuring the first raceway, and second laser displacement sensor is for surveying
Two raceway of flow control;The initial measurement locations for choosing first laser displacement sensor and second laser displacement sensor are respectively point O1
And O21, wherein the measuring head of first laser displacement sensor can surround point O in the plane A1Any angle rotation, second swashs
The measuring head of Optical displacement sensor can surround point O in the plane A21Any angle rotation;
2) when the ball race grinding of linear guide, linear guide is mounted on the workbench of numerically-controlled machine tool, is ground using forming grinding wheel
The first raceway and the second raceway are cut, by the first raceway and the second raceway wiped clean after being ground;
3) more using first laser displacement sensor and second laser displacement sensor and the movement for cooperating numerically controlled machine
Secondary measurement and the section center of circle spatial value for calculating the first raceway and the axially distinct position of the second raceway, recycle minimum two
Multiplication carries out straight line fitting to the multiple centers of circle measured, fits the straight line of the first raceway and the second raceway respectively, and calculate
The depth of parallelism of two straight lines in different vertical plane, can be obtained the depth of parallelism relationship of the first raceway and the second raceway axis;
The specific method is as follows for the step 3):
A) first laser displacement sensor point O is utilized1Three point A on to the first raceway circular arc sequentially1、B1、C1Distance,
It is denoted as l respectively1A、l1B、l1C, wherein measurement interval angles are θ every time, i.e. O1A1With O1B1、O1B1With O1C1Angle is
θ;Similarly, second laser displacement sensor point O is utilized21Three point A on to the second raceway circular arc sequentially21、B21、C21's
Distance is denoted as l respectively21A、l21B、l21C, wherein measurement interval angles are also θ every time, i.e. O21A21With O21B21、O21B21With
O21C21Angle is also θ;
B) with point O1For coordinate origin, middle line O is measured1B1With coordinate system O1X coincides, the moving direction of numerically controlled machine
With coordinate system O1Z is parallel, O1 O21With O1Y coincides, and establishes three-dimensional cartesian coordinate system XYZ, measurement point A1、B1、C1Coordinate point
It Wei not (- l1Acosθ,l1Asinθ,0)、(-l1B,0,0)、(-l1Ccosθ,-l1CSin θ, 0), measurement point A21、B21、C21Coordinate
Respectively (- l21Acosθ,l21Asinθ-w,0)、(-l21B,-w,0)、(-l21Ccosθ,-l1CSin θ-w, 0), wherein O21With O1It
Between distance be w;
C) trigonometric function relationship is utilized, the first raceway circular arc A is derived by1B1C1Centre point O '1Coordinate (x1,y1,z1),
Middle x1、y1、z1Specific exploitation it is as follows:
z1=0;
Similarly, available second raceway circular arc A21B21C21Center of circle O '21Coordinate position (x21,y21,z21), wherein x21、
y21、z21Specific exploitation it is as follows:
z21=0;
D) drive linear guide along each moving distance d of Z axis positive direction repeatedly to be surveyed using numerically-controlled machine tool control workbench
The measurement position of amount, first laser displacement sensor and second laser displacement sensor remains constant;
First laser displacement sensor moves distance d along Z-direction with respect to raceway last time measurement point, and n-th is taken to measure first
Laser displacement sensor measurement point relative position is point On, n is the integer equal to or more than 5, point OnRelative to point O1It is moved along Z axis
The distance of (n-1) d is moved, the method for repeating the 1st first three point of raceway circular arc of measurement obtains measurement point An、Bn、CnSeat
Mark is respectively (- lnAcosθ,lnAsinθ,-(n-1)d)、(-lnB,0,-(n-1)d)、(-lnCcosθ,-lnCsinθ,-(n-1)d);
Using trigonometric function relationship, it is derived by the first raceway circular arc AnBnCnCentre point O 'nCoordinate (xn,yn,zn), wherein
xn、yn、znSpecific exploitation it is as follows:
zn=-(n-1) d;
Similarly, second laser displacement sensor also moves distance d along Z-direction with respect to the second raceway last time measurement point, takes n-th
Secondary measurement second laser displacement sensor point relative position is point O2n, n is the integer equal to or more than 5, point O2nRelative to
Point O21The distance of (n-1) d is moved along Z axis, the method for repeating the 1st second three point of raceway circular arc of measurement obtains measurement point
A2n、B2n、C2nCoordinate be respectively (- l2nAcosθ,l2nAsinθ-w,-(n-1)d)、(-l2nB,-w,-(n-1)d)、(-l2nCcos
θ,-l2nCsinθ-w,-(n-1)d);
Using trigonometric function relationship, it is derived by the second raceway circular arc A2nB2nC2nCentre point O '2nCoordinate (x2n,y2n,z2n),
Wherein x2n、y2n、z2nSpecific exploitation it is as follows:
z2n=-(n-1) d;
E) according to the above-mentioned multiple centre point O ' for measuring and being calculated the axially distinct position of the first raceway1, O '2, O '3..., O 'n,
Straight line fitting is carried out to above-mentioned centre point using least square method, if fitting space line Ls1Expression formula are as follows:
Wherein:
Similarly, according to the above-mentioned multiple centre point O ' for measuring and being calculated the axially distinct position of the second raceway21、O′22、O′23…
O′2n, straight line fitting is carried out to above-mentioned centre point using least square method, if fitting space line Ls2Expression formula are as follows:
Wherein:
According to two straight lines being fitted, the depth of parallelism of the first raceway and the second raceway in x and y direction can be obtained, wherein the
The depth of parallelism △ of one raceway and the second raceway in the X directionXAre as follows:
The depth of parallelism △ of first raceway and the second raceway in the Y directionYAre as follows:
Then the first raceway and the second raceway axis parallel degree △ can be indicated are as follows:
2. a kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method according to claim 1, it is characterised in that:
The linear guide is mounted on the workbench of numerically-controlled machine tool by magnetic absorption.
3. a kind of ball line slideway auxiliary raceway depth of parallelism On-line Measuring Method according to claim 1, it is characterised in that:
The forming grinding wheel is ground the first raceway and the complete rear alcohol that passes through of the second raceway for raceway wiped clean.
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