CN103604028B - Precision positioning tandem one-dimensional platform - Google Patents
Precision positioning tandem one-dimensional platform Download PDFInfo
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- CN103604028B CN103604028B CN201310603633.7A CN201310603633A CN103604028B CN 103604028 B CN103604028 B CN 103604028B CN 201310603633 A CN201310603633 A CN 201310603633A CN 103604028 B CN103604028 B CN 103604028B
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Abstract
The invention provides a superspeed precision positioning tandem one-dimensional platform comprising a base, first and second motors serially connected with each other, and a compensation positioning platform driven by the first and second motors. The first and second motors are installed on the base respectively through shock absorbers. The compensation positioning platform comprises a positioning platform, a platform base fixedly connected with the base, and a flexible platform connected with the platform base through a first guide rail. The flexible platform is provided with a piezoelectric actuator and a flexible hinge connected with the piezoelectric actuator. The positioning platform is disposed on the flexible platform and connected with the flexible hinge. Motion measurement grating rulers are disposed on two sides of the platform base. Through the application of the superspeed precision positioning tandem one-dimensional platform, the problem that the prior art fails to break through higher acceleration in precision positioning is solved.
Description
Technical field
The present invention relates to a kind of platform, particularly relate to a kind of tandem precision positioning one-dimensional platform.
Background technique
Along with Ultra-precision Turning, the fast development of the precision engineerings such as micro-electronic manufacturing, Long Distances Ultra-precision positioning highlights, particularly in photoetching day by day as the significance of locator key equipment, in the microelectronics such as bonding, the platform fine positioning movements that equipment carries out under needing to do fast state.At present, locating platform high-speed motion develops into the limit, this restrict the raising of locating platform manufacturing efficiency.Under the condition meeting predetermined accuracy, improve platform speed and acceleration, shorten machine time, effectively boosting productivity is the direction that locating platform develops.
The location of high speed and precision domestic at present mainly linear electric motor and piezoelectric actuator etc. has been come, although these location improve for speed, acceleration can be restricted; Two voice coil motors and locating platform are coupled together by tandem, the restriction of tempo of penetration, realizes superelevation acceleration, and this application for modern field of microelectronic fabrication has certain application value.
Summary of the invention
The object of the invention is to the defect overcoming prior art, provide a kind of tandem precision positioning one-dimensional platform, this precision positioning one-dimensional platform solves the precision positioning problem that prior art cannot break through higher acceleration.
The present invention is achieved in that a kind of tandem precision positioning one-dimensional platform, comprise pedestal, first motor of mutual series connection and the second motor, by described first motor and the second motor-driven compensation locating platform, described first motor and the second motor are installed on described pedestal respectively by vibration damping equipment, described compensation locating platform comprises locating platform, the platform base be fixedly connected with described pedestal, the flexibility platform be connected by the first guide rail with described platform base, the flexible hinge that affiliated flexibility platform has piezoelectric actuator and is connected with described piezoelectric actuator, described locating platform to be positioned on described flexibility platform and to be connected with described flexible hinge, described platform base both sides are provided with motion measurement grating scale.
Further, described first motor and the second motor drive described compensation locating platform respectively by link arm, and described link arm one end connects described first motor or the second motor, and the described link arm the other end is connected with described flexibility platform.
Further, described first motor and the second motor are voice coil motor.
Further, have boss below described locating platform, described boss is fixedly connected with described flexible hinge.
Further, described motion measurement grating scale comprises
For measuring and feed back the coarse grating chi of the position signal that described locating platform obtains when described first motor and the second motor drive;
For measuring and feed back the smart grating scale of the position signal that described piezoelectric actuator drives described flexible hinge to drive described locating platform to obtain.
Further, described vibration damping equipment comprises the upper bed-plate be fixedly connected with described first motor or the second motor and the lower bottom base be fixedly connected with described pedestal, described upper bed-plate and described lower bottom base are slidably connected, described upper bed-plate both sides are provided with block, and described lower bottom base both sides are respectively equipped with the damping device be connected with described block.
Further, described lower bottom base is provided with the second guide rail along described first motor movement direction, and described upper bed-plate lower end is provided with can at the slide block of described second slide on rails.
Further, described second guide rail is two.
Further, described damping device comprises guide rod, the guide rod that is connected with described guide rod two ends is respectively locked, described guide rod locking fixes on described lower bottom base, the guide rod pin be provided with for locking described guide rod locked by described guide rod, described block has through hole, described guide rod through described through hole, described block and described guide rod lock between guide rod on overlap flexible.
Further, elastic component catch is provided with between described block and described elastic component.
The invention provides a kind of tandem precision positioning one-dimensional platform, first motor and the second motor are connected to form serial kinematic mechanism by the form of series connection with compensation locating platform, and motion and vibration damping equipment are fastenedly connected, realize the increase at double of locating platform acceleration; While the first motor and the second motor realize superelevation acceleration and Long travel, the error of the first motor and the second motor is compensated by the piezoelectric actuator compensated in locating platform, eliminate the first motor and the vibration of the second motor in movement process by vibration damping equipment simultaneously, finally realize that superelevation is accelerated, the one dimensional motion of Long travel and Ultra-precision positioning.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technological scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is tandem precision positioning one-dimensional platform structural representation of the present invention;
The structure for amplifying schematic diagram of the vibration damper that Fig. 2 provides for the embodiment of the present invention;
The structure for amplifying schematic diagram of the base that Fig. 3 provides for the embodiment of the present invention;
The structure for amplifying schematic diagram of the base that Fig. 4 provides for the embodiment of the present invention;
The structure for amplifying schematic diagram of the compensation locating platform that Fig. 5 provides for the embodiment of the present invention;
The structure for amplifying schematic diagram of the locating platform that Fig. 6 provides for the embodiment of the present invention;
The structure for amplifying schematic diagram of the flexible hinge that Fig. 7 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technological scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
As Fig. 1, the embodiment of the present invention provides a kind of tandem precision positioning one-dimensional platform, comprise pedestal 4, first motor 1 and the second motor 5 of mutual series connection, the compensation locating platform 2 driven by described first motor 1 and the second motor 5, described first motor 1 and the second motor 5 are installed on described pedestal 4 respectively by vibration damping equipment 3, described compensation locating platform 2 comprises locating platform 19, the platform base 17 be fixedly connected with described pedestal 4, the flexibility platform 18 be connected by the first guide rail with described platform base 17, the flexible hinge 24 that affiliated flexibility platform 18 has piezoelectric actuator 23 and is connected with described piezoelectric actuator 23, described locating platform 19 to be positioned on described flexibility platform 18 and to be connected with described flexible hinge 24, described platform base 17 both sides are provided with motion measurement grating scale.In the present invention, described piezoelectric actuator adopts piezoelectric actuator, described pedestal 4 and platform base 17 preferably marble, but is not limited to marble, and the materials such as granite are all within protection scope of the present invention; Described first guide rail is arranged along described first motor 1 and the second motor 5 moving direction, makes described flexibility platform 18 can do straight line motion on described platform base 17.A kind of tandem precision positioning one-dimensional platform of the present invention, first motor 1 and the second motor 5 are connected to form serial kinematic mechanism by the form of series connection with compensation locating platform 2, and motion and vibration damping equipment 3 are fastenedly connected, realize the increase at double of locating platform 19 acceleration; While the first motor 1 and the second motor 5 realize superelevation acceleration and Long travel, the error of the first motor 1 and the second motor 5 is compensated by the piezoelectric actuator 23 compensated in locating platform 2, eliminate the first motor 1 and the second vibration of motor 5 in movement process by vibration damping equipment 3 simultaneously, finally realize that superelevation is accelerated, the one dimensional motion of Long travel and Ultra-precision positioning.
In a kind of tandem precision positioning of the present invention one-dimensional platform embodiment, described first motor 1 and the second motor 5 drive described compensation locating platform 2 respectively by link arm 6, described link arm 6 one end connects described first motor 1 or the second motor 5, and described link arm 6 the other end is connected by screw with described flexibility platform 18 and is connected.Further, described first motor 1 and the second motor 5 are voice coil motor.
As Fig. 5-Fig. 7, have boss 21 below described locating platform 19, described boss 21 is fixedly connected with described flexible hinge 24, and described locating platform 19 is moved with described flexible hinge 24; In the present embodiment, motion measurement grating scale has coarse grating chi 20 and smart grating scale 22, coarse grating chi 20 records the position signal that when the first motor 1 and the second motor 5 drive, locating platform 19 obtains and feeds back, thus realize that superelevation is accelerated, the function of Long travel and micron-sized precision location; Described coarse grating chi and smart grating scale are respectively by the coarse grating ruler reading head be arranged on described locating platform and smart grating ruler reading head reading, essence grating scale 22 records piezoelectric actuator 23 and drives flexible hinge 24, flexible hinge 24 is connected with the boss 21 above locating platform 19, the position signal that locating platform 19 obtains feeds back, compensate the error that voice coil motor produces, thus compensate the nanometer positioning of whole one-dimensional platform.
As Fig. 2-Fig. 4, the vibration owing to causing when the first motor 1 and the second motor 5 move is eliminated in the effect proposing vibration damping equipment 3 in the present invention, vibration damping equipment 3 comprises upper bed-plate 7, the lower bottom base 8 be connected with upper bed-plate 7, upper bed-plate 7 is provided with slide block 9, upper bed-plate 7 both sides are provided with vibration damping equipment 3 block 10, in the present embodiment, upper bed-plate 7 is transversely symmetrically arranged with two groups of slide blocks 9, along described first motor 1 moving direction, lower bottom base 8 is provided with the second guide rail 14 matched with slide block 9, often organize slide block 9 and comprise two the first slide blocks 9, the quantity of the first slide block 9 can be 1, 3, 5 or other quantity, all within protection scope of the present invention, but the advantage of two the first slide blocks 9 is convenient installation and is beneficial to the balance of the second guide rail 14, in other embodiments of the present invention, also slide block 9 can be arranged on described lower bottom base 8, described second guide rail 14 is arranged on described upper bed-plate 7.
Lower bottom base 8 bi-side are provided with damping device and hold the guide rod 16 of vibration damping equipment 3 block 10, and damping device comprises guide rod 16, the guide rod that is connected with guide rod 16 two ends is locked 11, is set in the elastic component 12 of guide rod 16 outside.In the present embodiment, elastic component 12 is spring, guide rod lock 11 on by guide rod pin 15 by guide rod 16 position and lock, vibration damping equipment 3 block 10 has a through hole, through hole is through guide rod 16, vibration damper block 10 is made to do straight line motion along guide rod 16, guide rod 16 is divided into both sides, front and back by block 10, both sides, front and back are respectively equipped with the elastic component 12 for buffering vibration, elastic component 12 is connected by elastic component catch 13 with buffer shock-absorbing block 10, elastic component catch 13 is selected to be the effects protecting elastic component 12 in the present embodiment, the effect of guide rod lock 11 is fixed guide bars 16.
The working procedure of vibration damping equipment 3 is that the motion of tandem motion drives vibration damping equipment 3 to move, guide rail on lower bottom base 8 moves along slide block 9, spring is stretched or compressed simultaneously, when arriving the ultimate range of spring elongation or compression, start to move round about, thus can eliminate because tandem motion moves the vibration brought.
Working procedure of the present invention is: in-line first motor 1 and the motion of the second motor 5 drive locating platform 19 to move, motion measurement grating scale is fed back by the position signal of locating platform 19 pairs of motions, thus realizes the precision positioning motion of whole one-dimensional platform.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a tandem precision positioning one-dimensional platform, it is characterized in that, comprise pedestal, first motor of mutual series connection and the second motor, by described first motor and the second motor-driven compensation locating platform, described first motor and the second motor are installed on described pedestal respectively by vibration damping equipment, described compensation locating platform comprises locating platform, the platform base be fixedly connected with described pedestal, the flexibility platform be connected by the first guide rail with described platform base, the flexible hinge that affiliated flexibility platform has piezoelectric actuator and is connected with described piezoelectric actuator, described locating platform to be positioned on described flexibility platform and to be connected with described flexible hinge, described platform base both sides are provided with motion measurement grating scale.
2. the tandem precision positioning one-dimensional platform as described in claim 1, it is characterized in that: described first motor and the second motor drive described compensation locating platform respectively by link arm, described link arm one end connects described first motor or the second motor, and the described link arm the other end is connected with described flexibility platform.
3. the tandem precision positioning one-dimensional platform as described in claim 1 or 2, is characterized in that: described first motor and the second motor are voice coil motor.
4. the tandem precision positioning one-dimensional platform as described in claim 1, it is characterized in that: have boss below described locating platform, described boss is fixedly connected with described flexible hinge.
5. the tandem precision positioning one-dimensional platform as described in claim 1, is characterized in that: described motion measurement grating scale comprises coarse grating chi for measuring and feed back the position signal that described locating platform obtains when described first motor and the second motor the drive smart grating scale of position signal for measuring and feed back described piezoelectric actuator and driving described flexible hinge to drive described locating platform to obtain.
6. the tandem precision positioning one-dimensional platform as described in claim 1, it is characterized in that: described vibration damping equipment comprises the upper bed-plate be fixedly connected with described first motor or the second motor and the lower bottom base be fixedly connected with described pedestal, described upper bed-plate and described lower bottom base are slidably connected, described upper bed-plate both sides are provided with block, and described lower bottom base both sides are respectively equipped with the damping device be connected with described block.
7. the tandem precision positioning one-dimensional platform as described in claim 6, is characterized in that: described lower bottom base is provided with the second guide rail along described first motor movement direction, and described upper bed-plate lower end is provided with can at the slide block of described second slide on rails.
8. the tandem precision positioning one-dimensional platform as described in claim 7, is characterized in that: described second guide rail is two.
9. the tandem precision positioning one-dimensional platform as described in claim 6, it is characterized in that: described damping device comprises guide rod, the guide rod that is connected with described guide rod two ends is respectively locked, described guide rod locking fixes on described lower bottom base, the guide rod pin be provided with for locking described guide rod locked by described guide rod, described block has through hole, described guide rod through described through hole, described block and described guide rod lock between guide rod on overlap flexible.
10. the tandem precision positioning one-dimensional platform as described in claim 9, is characterized in that: be provided with elastic component catch between described block and described elastic component.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310603633.7A CN103604028B (en) | 2013-11-25 | 2013-11-25 | Precision positioning tandem one-dimensional platform |
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| CN201310603633.7A CN103604028B (en) | 2013-11-25 | 2013-11-25 | Precision positioning tandem one-dimensional platform |
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| CN103604028A CN103604028A (en) | 2014-02-26 |
| CN103604028B true CN103604028B (en) | 2014-12-24 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103995541B (en) * | 2014-04-16 | 2016-03-16 | 广东工业大学 | A kind of based on the online compensation device of piezoelectric ceramics to linear electric motors linearity |
| CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
| CN104019332B (en) * | 2014-05-30 | 2015-12-02 | 西安交通大学 | A kind of ultralong-stroke height accelerates high-accuracy location one-dimensional platform |
| CN106960690B (en) * | 2016-08-08 | 2019-02-15 | 哈尔滨工业大学 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
| CN107240422B (en) * | 2017-06-20 | 2019-09-10 | 南京工程学院 | A kind of Pneumatic precision positioning mechanism of piezoelectric micromotor bit shift compensation |
| CN107971765B (en) * | 2017-12-29 | 2023-06-27 | 河南工业大学 | Adjustable ultra-high acceleration macro-micro motion platform |
| CN112555340A (en) * | 2020-12-29 | 2021-03-26 | 苏州天准科技股份有限公司 | Automatic visual detection device for sucker assembly and flexible circuit board |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6753534B2 (en) * | 2000-12-08 | 2004-06-22 | Nikon Corporation | Positioning stage with stationary and movable magnet tracks |
| JP2007309783A (en) * | 2006-05-18 | 2007-11-29 | Yokogawa Electric Corp | Xy stage |
| CN1887686A (en) * | 2006-07-20 | 2007-01-03 | 天津大学 | Two-freedom air-floated precisely locating platform for IC packaging |
| CN101197197B (en) * | 2007-12-26 | 2010-06-16 | 西安交通大学 | Large moving range macro-micro dual drive locating platform |
| CN201397813Y (en) * | 2009-05-15 | 2010-02-03 | 东南大学 | Motion decoupling XY direction precision positioning platform |
| CN103219049B (en) * | 2013-03-04 | 2015-04-29 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN203615016U (en) * | 2013-11-25 | 2014-05-28 | 东莞华中科技大学制造工程研究院 | Tandem type ultra-high speed precision locating one-dimensional platform |
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Address after: 523000 nine hi tech Road, Songshan Lake hi tech Industrial Development Zone, Guangdong, Dongguan, 1 Patentee after: GUANGDONG HUST INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE Address before: 523000 Dongguan science and Technology Park, Songshan Lake, Guangdong province science and technology road, No. nine, No. 1 Patentee before: DG-HUST Manufacturing Engineering Institute |