CN103219049B - Precise positioning one-dimensional platform - Google Patents
Precise positioning one-dimensional platform Download PDFInfo
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- CN103219049B CN103219049B CN201310068434.0A CN201310068434A CN103219049B CN 103219049 B CN103219049 B CN 103219049B CN 201310068434 A CN201310068434 A CN 201310068434A CN 103219049 B CN103219049 B CN 103219049B
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Abstract
The invention provides a precise positioning one-dimensional platform. The precise positioning one-dimensional platform comprises a movement mechanism and a positioning platform connected with the movement mechanism, wherein the movement mechanism comprises a motor, a connecting frame arranged on the motor and a piezoelectric actuator arranged on the connecting frame, and the positioning platform is connected with the piezoelectric actuator. The precise positioning one-dimensional platform achieves high acceleration, high speed and long range of a voice coil motor, compensates errors of the voice coil motor through the piezoelectric actuator, eliminates the vibration of the voice coil motor in the movement process through a buffering vibration-absorption platform, and finally achieves one-dimensional movement with high acceleration, high speed, long range and extremely precise positioning.
Description
Technical field
The present invention relates to a kind of platform, particularly relate to a kind of precision positioning one-dimensional platform.
Background technology
Navigation system plays critical effect in various accurate mechanical equipment.Along with the development of the precision engineering such as micro-electronic manufacturing, various Ultra-precision Turning, large-stroke nanometer locating platform plays more and more important function in modern science and technology, is particularly one of the study hotspot in precision engineering field in recent years always.Particularly in photoetching, in the microelectronics such as bonding, equipment needs to do flatness and reciprocator setting movement, and this motion is the platform fine positioning movements carried out under high speed frequent start-stop state.Under the condition meeting predetermined accuracy, also to improve its speed and acceleration as much as possible, shorten machining time, reduce the operating time, effectively boost productivity.One dimension locating platform is the reciprocal pinpoint key foundation realizing plane.
The ultraprecise location of Long travel domestic at present has mainly been come by ball-screw and piezoelectric actuator or linear electric motors and piezoelectric actuator etc.These location be difficult to realize simultaneously high acceleration, at a high speed, Long travel and Ultra-precision positioning.This application for modern field of microelectronic fabrication has certain limitation.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide a kind of precision positioning one-dimensional platform, this precision positioning one-dimensional platform solves prior art and cannot realize high accelerating, at a high speed and the precision positioning problem of Long travel simultaneously.
Technical scheme of the present invention is achieved in that
A kind of precision positioning one-dimensional platform, it is characterized in that: the locating platform comprise motion, being connected with described motion, the piezoelectric actuator that described motion comprises motor, is arranged at the link on described motor and is arranged on described link, described locating platform is connected with described piezoelectric actuator.
Preferably, described motor is voice coil motor.
Preferably, described piezoelectric actuator is piezoelectric ceramic actuator.
Preferably, also comprise the buffer shock-absorbing platform be connected up and down with described motion, the lower bottom base that described buffer shock-absorbing platform comprises upper bed-plate, is connected with described upper bed-plate.
Preferably, described buffer shock-absorbing platform and described locating platform are arranged on marble base.
Further, described upper bed-plate is provided with slide block, is provided with buffer shock-absorbing block in the middle part of described upper bed-plate.
Further, described lower bottom base is provided with the guide rail matched with described slide block, is provided with the installing hole of buffer unit and the described buffer shock-absorbing block of accommodation in the middle part of described lower bottom base.
Further, the elastic component that described buffer unit comprises guide rod, described guide rod outside is locked, is set in the guide rod block be connected with described guide rod, the guide rod that is connected with the described guide rod other end.
Further, described elastic component is spring.
Preferably, described locating platform comprises the platform link be connected with described piezoelectric actuator, the location-plate be connected with described platform link, the platform base being arranged at described location-plate bottom, is arranged at the motion measurement grating scale of described platform base both sides.
The beneficial effect that the present invention produces is: the present invention couples together formation motion voice coil motor and piezoelectric actuator by link, motion and locating platform are fastenedly connected, and motion and buffer shock-absorbing platform are fastenedly connected, while voice coil motor realizes high acceleration, high speed and Long travel, the error of voice coil motor is compensated by piezoelectric actuator, eliminated the vibration in motion process of voice coil motor simultaneously by buffer shock-absorbing platform, final realize highly accelerating, at a high speed, the motion in one dimension of Long travel and Ultra-precision positioning.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of a kind of precision positioning one-dimensional platform of the present invention embodiment;
Fig. 2 is the structure for amplifying schematic diagram of a kind of precision positioning one-dimensional platform of the present invention embodiment motion;
Fig. 3 is the structure for amplifying schematic diagram of a kind of precision positioning one-dimensional platform of the present invention embodiment vibration-damped table;
Fig. 4 is the structure for amplifying schematic diagram of a kind of precision positioning one-dimensional platform of the present invention embodiment upper bed-plate;
Fig. 5 is the structure for amplifying schematic diagram of a kind of precision positioning one-dimensional platform of the present invention embodiment lower bottom base;
Fig. 6 is the structure for amplifying schematic diagram of a kind of precision positioning one-dimensional platform of the present invention embodiment locating platform;
In figure: 1 motion; 11 voice coil motors; 12 links; 13 piezoelectric actuators; 2 locating platforms; 21 platform links; 22 location-plates; 23 first motion measurement grating scales; 24 second motion measurement grating scales; 25 platform bases; 3 buffer shock-absorbing platforms; 31 upper bed-plates; 311 slide blocks; 312 buffer shock-absorbing blocks; 32 lower bottom bases; 321 guide rails; 322 installing holes; 323 guide rods; 324 guide rod blocks; 325 guide rod locks; 326 springs; 327 spring stop pieces; 4 marble bases.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Preferred embodiment according to Fig. 1 ~ Fig. 6, a kind of precision positioning one-dimensional platform, comprise motion 1, the locating platform 2 be connected with motion 1, the buffer shock-absorbing platform 3 be connected with motion about 1, the marble base 4 that is connected with buffer shock-absorbing platform 3 and locating platform 2, the piezoelectric actuator 13 that motion 1 comprises motor, is arranged at the link 12 on motor and is arranged on link 12, locating platform 2 is connected with piezoelectric actuator 13.In the present invention, the preferred marble base 4 of base, but be not limited to marble base 4, the base of the materials such as granite is all within protection scope of the present invention.
The preferred voice coil motor 11 of motor in the present embodiment; the advantages such as it has at a high speed in Long travel motion, high acceleration; but it is not limited to voice coil motor; direct current generator with exchange 4V motor all within scope; piezoelectric actuator 13 is piezoelectric ceramic actuator preferably; piezoelectric actuator 13 stroke is in nanometer (nm) rank, and it is nano-scale motion, can realize the fine setting on locating platform 2.
The vibration owing to causing when voice coil motor 11 moves is eliminated in the effect proposing buffer shock-absorbing platform 3 in the present invention, buffer shock-absorbing platform 3 comprises upper bed-plate 31, the lower bottom base 32 be connected with upper bed-plate 31, upper bed-plate 31 is provided with slide block 311, buffer shock-absorbing block 312 is provided with in the middle part of upper bed-plate 31, in the present embodiment, upper bed-plate 31 is transversely symmetrically arranged with two groups of slide blocks 311, often organize slide block and comprise two the first slide blocks, the quantity of the first slide block can be 1, 3, 4 or other quantity, all within protection scope of the present invention, but the advantage of two the first slide blocks is convenient installation and is beneficial to the balance of guide rail.
Lower bottom base 32 is provided with the guide rail 321 matched with slide block 311, is provided with the installing hole 322 of buffer unit and accommodation buffer shock-absorbing block 312 in the middle part of lower bottom base 32.Buffer unit comprises guide rod 323, the guide rod block 324 be connected with guide rod 323 one end, the guide rod that is connected with the guide rod other end are locked 325, are set in the elastic component of guide rod 323 outside.In the present embodiment, elastic component is spring 326, buffer shock-absorbing block 312 has two grooves, the effect of groove is located by guide rod 323, be fixed in groove, guide rod 323 is made to do rectilinear motion in groove, guide rod 323 is divided into the left and right sides by buffer shock-absorbing block 312, the left and right sides is respectively equipped with the spring 326 for buffering vibration, spring 326 is connected by spring stop piece 327 with buffer shock-absorbing block 312, spring stop piece 327 is selected to be the effects protecting spring in the present embodiment, also the desired effect of the present invention can be reached without spring stop piece, therefore be also within protection scope of the present invention without spring stop piece, the effect of installing hole 322 is the installations facilitating guide rod and spring, the effect of guide rod lock 325 is location guides.
The course of work of buffer shock-absorbing platform 3 is that motion 1 motion drives buffer shock-absorbing platform 3 to move, guide rail 321 on lower bottom base 32 is along slide block movement, spring 326 is stretched or compressed simultaneously, when the ultimate range stretched to spring 326 or compress, start to move round about, thus can eliminate because motion 1 moves the vibration brought.
Locating platform 2 comprises the platform link 21 be connected with motion 1, the location-plate 22 be connected with platform link 21, be arranged at the platform base 25 of location-plate 22 bottom, be arranged at the motion measurement grating scale of platform base 25 both sides, location-plate 22 is connected by positioning guide rail (not shown) with platform base 25, positioning guide rail makes location-plate 22 can do rectilinear motion on platform base, in the present embodiment, motion measurement grating scale has macroscopic motion to measure grating scale 23 and microscopic motion measures grating scale 24, grand dynamic motion measurement grating scale 23 records the position signalling that when voice coil motor 11 drives, location-plate 22 obtains and feeds back, thus realize high acceleration, at a high speed, the function of Long travel and micron-sized precision location, jogging motion measurement grating scale 24 records the position signalling that when piezoelectric actuator 13 drives, location-plate 22 obtains and feeds back, and compensates the error that voice coil motor 12 produces, thus compensates the nanometer positioning of whole one-dimensional platform.
The course of work of the present invention is: motion 1 moves and drives location-plate 22 to move, and motion measurement grating scale is fed back by the position signalling of location-plate 22 pairs of motions 1, thus realizes the precision positioning motion of whole one-dimensional platform.
The present invention is coupled together voice coil motor 11 and piezoelectric actuator 13 and forms motion 1 by link 12, motion 1 and locating platform 2 are fastenedly connected, and motion 1 and buffer shock-absorbing platform 3 are fastenedly connected, while voice coil motor 11 realizes high acceleration, high speed and Long travel, the error of voice coil motor 11 is compensated by piezoelectric actuator 13, eliminate the vibration of voice coil motor 11 in motion process by buffer shock-absorbing platform 3 simultaneously, final realize highly accelerating, at a high speed, the motion in one dimension of Long travel and Ultra-precision positioning.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. a precision positioning one-dimensional platform, it is characterized in that: the locating platform comprise motion, being connected with described motion, the piezoelectric actuator that described motion comprises motor, is arranged at the link on described motor and is arranged on described link, described locating platform is connected with described piezoelectric actuator; Described locating platform comprises the platform link be connected with described piezoelectric actuator, the location-plate be connected with described platform link, the platform base being arranged at described location-plate bottom, is arranged at the motion measurement grating scale of described platform base both sides; Also comprise the buffer shock-absorbing platform be connected up and down with described motion, the lower bottom base that described buffer shock-absorbing platform comprises upper bed-plate, is connected with described upper bed-plate; Described buffer shock-absorbing platform and described locating platform are arranged on marble base; Described upper bed-plate is provided with slide block, is provided with buffer shock-absorbing block in the middle part of described upper bed-plate; Described lower bottom base is provided with the guide rail matched with described slide block, is provided with the installing hole of buffer unit and the described buffer shock-absorbing block of accommodation in the middle part of described lower bottom base.
2. the precision positioning one-dimensional platform as described in claim 1, is characterized in that: described motor is voice coil motor.
3. the precision positioning one-dimensional platform as described in claim 1, is characterized in that: described piezoelectric actuator is piezoelectric ceramic actuator.
4. the precision positioning one-dimensional platform as described in claim 1, is characterized in that: the elastic component that described buffer unit comprises guide rod, described guide rod outside is locked, is set in the guide rod block be connected with described guide rod, the guide rod that is connected with the described guide rod other end.
5. the precision positioning one-dimensional platform as described in claim 4, is characterized in that: described elastic component is spring.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310068434.0A CN103219049B (en) | 2013-03-04 | 2013-03-04 | Precise positioning one-dimensional platform |
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| CN201310068434.0A CN103219049B (en) | 2013-03-04 | 2013-03-04 | Precise positioning one-dimensional platform |
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| CN103219049A CN103219049A (en) | 2013-07-24 |
| CN103219049B true CN103219049B (en) | 2015-04-29 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103604028B (en) * | 2013-11-25 | 2014-12-24 | 东莞华中科技大学制造工程研究院 | Precision positioning tandem one-dimensional platform |
| CN103995541B (en) * | 2014-04-16 | 2016-03-16 | 广东工业大学 | A kind of based on the online compensation device of piezoelectric ceramics to linear electric motors linearity |
| CN103982756A (en) * | 2014-05-30 | 2014-08-13 | 西安交通大学 | Serial-connection super-high-acceleration ultraprecise positioning two-dimensional platform |
| CN104019332B (en) * | 2014-05-30 | 2015-12-02 | 西安交通大学 | A kind of ultralong-stroke height accelerates high-accuracy location one-dimensional platform |
| CN113189482B (en) * | 2021-04-22 | 2022-12-02 | 深圳市泰道精密机电有限公司 | Voice coil motor detection equipment |
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| CN1731081A (en) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | Macro/micro driven large travel high-speed nano-precision plane positioning system |
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Address after: 523000 nine hi tech Road, Songshan Lake hi tech Industrial Development Zone, Guangdong, Dongguan, 1 Patentee after: GUANGDONG HUST INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE Address before: Science and technology Songshan Lake Science and Technology Industrial Park in Guangdong province Dongguan City nine road 523808 No. 1 Patentee before: DG-HUST Manufacturing Engineering Institute |
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