CN108213992B - Coplanar decoupling XY high-precision motion platform - Google Patents
Coplanar decoupling XY high-precision motion platform Download PDFInfo
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- CN108213992B CN108213992B CN201810241117.7A CN201810241117A CN108213992B CN 108213992 B CN108213992 B CN 108213992B CN 201810241117 A CN201810241117 A CN 201810241117A CN 108213992 B CN108213992 B CN 108213992B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/02—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby of table type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
Abstract
The embodiment of the invention provides a coplanar decoupling XY high-precision motion platform, which is characterized in that a first base, a first motion assembly, a second base, a second motion assembly and a motion platform are presented in a laminated structure, so that space can be effectively utilized, the framework of the whole platform is simplified, the components are simplified, the motion direction of the first motion assembly and the second motion assembly is vertical, the motion platform is split into three sub-assemblies, the motion of the motion platform and the relative motion between the sub-assemblies are controlled through the respective motions of the first motion assembly and the second motion assembly, double decoupling is realized by parallel driving of macro and micro two stages (four driving sources in total) on the same plane, macro and micro composite motion in the XY direction is realized, and the accurate positioning of the plane space position is realized.
Description
Technical Field
The invention relates to the field of microelectronic manufacturing and processing, in particular to a coplanar decoupling XY high-precision motion platform.
Background
Along with the high-speed development of the microelectronic manufacturing industry, microelectronic products are manufactured with high quality and high productivity, and microelectronic manufacturing equipment has very high comprehensive requirements on the aspects of space utilization rate, travel, speed, acceleration, movement stability and the like of a core movement platform and a system thereof.
The existing XY platform is formed by combining two motors in series, the structural system is not compact, the space utilization rate is not high, the defects of complicated links, multiple moving assemblies, large load and the like exist, and the requirements of high-speed movement and precise positioning are difficult to well meet.
Disclosure of Invention
The embodiment of the invention provides a coplanar decoupling XY high-precision motion platform, which can effectively utilize space and realize precision positioning in a high-speed motion environment.
The invention provides a coplanar decoupling XY high-precision motion platform, which comprises the following components: the device comprises a first base, a second base, a first motion assembly, a second motion assembly and a movable platform;
the first base, the first motion assembly, the second base, the second motion assembly and the movable platform are sequentially stacked from bottom to top;
the first movement direction of the first movement assembly and the second movement direction of the second movement assembly are perpendicular to each other;
the movable platform is formed by connecting a sub movable platform, a first auxiliary moving piece and a second auxiliary moving piece in pairs;
the first motion component is used for driving the movable platform to perform macro motion along the first motion direction;
the second motion component is used for driving the sub-motion platform and the first auxiliary motion component to perform macro motion along the second motion direction when the second auxiliary motion component is fixed;
the first motion component is further used for driving the sub-motion platform and the first auxiliary motion piece to perform micro motion along the first motion direction when the second auxiliary motion piece is fixed;
the second motion assembly is further used for driving the sub-motion platform to conduct micro motion along the second motion direction when the first auxiliary motion piece and the second auxiliary motion piece are fixed.
Preferably, the first motion assembly comprises: the first macro-motion piece and the first macro-motion piece are elastically connected with the first macro-motion piece, and a first piezoelectric ceramic is arranged between the first macro-motion piece and the first macro-motion piece;
the second motion assembly includes: the second macro-motion piece and the second macro-motion piece which is elastically connected with the second macro-motion piece are provided with second piezoelectric ceramics.
Preferably, the first macro motion piece is provided with a first extension piece, and the first extension piece is provided with a first empty slot; the first macro-micro moving part is provided with a first cavity for accommodating the first extending part, and a first bulge which is used for being embedded into the non-end part of the first empty slot is arranged on the first cavity;
the second macro motion piece is provided with a second extension piece, and the second extension piece is provided with a second empty slot; the second macro-micro moving part is provided with a second cavity for accommodating the second extending part, and a second bulge which is used for being embedded into the non-end part of the second empty groove is arranged on the second cavity.
Preferably, the first piezoelectric ceramic is arranged in the first empty groove and positioned at one side of the first bulge, and a first high steel spring is arranged in the first empty groove and at the other side of the first bulge;
the second piezoelectric ceramic is arranged in the second empty groove and is positioned on one side of the second bulge, and a second high steel spring is arranged in the second empty groove and on the other side of the second bulge.
Preferably, the first macro-motion piece is in sliding connection with the second auxiliary motion piece, and the first macro-micro motion piece is in sliding connection with the sub-motion platform;
the second macro-motion piece is in sliding connection with the first auxiliary motion piece, and the second macro-micro motion piece is in sliding connection with the sub-motion platform.
Preferably, the coplanar decoupling XY high precision motion platform provided by the invention further comprises: a first motor and a second motor;
the stator of the first motor is arranged on the first base;
the stator of the second motor is arranged on the second base;
the first macro-moving part is provided with a first L-shaped moving part, and the first L-shaped moving part is a rotor of the first motor;
the second macro-moving part is provided with a second L-shaped moving part, and the second L-shaped moving part is a rotor of the second motor.
Preferably, the sub-moving platform and the first auxiliary moving member are provided with sliding rails, and the second auxiliary moving member is provided with sliding grooves matched with the sliding rails of the sub-moving platform and the first auxiliary moving member.
Preferably, the sub-moving platform has a third protrusion, and the first auxiliary moving member has a groove to receive the third protrusion.
Preferably, a first guide rail is arranged at two sides of the stator of the first motor, and the first guide rail is used for arranging the first motion assembly;
and second guide rails are arranged at two sides of the stator of the second motor and are used for arranging the second motion assembly.
Preferably, the first motor and the second motor are both U-shaped groove linear motors.
From the above technical solutions, the embodiment of the present invention has the following advantages:
the invention provides a coplanar decoupling XY high-precision motion platform, which comprises the following components: the device comprises a first base, a second base, a first motion assembly, a second motion assembly and a movable platform; the first base, the first motion assembly, the second base, the second motion assembly and the movable platform are sequentially stacked from bottom to top; the first movement direction of the first movement assembly and the second movement direction of the second movement assembly are perpendicular to each other; the movable platform is formed by connecting a sub movable platform, a first auxiliary moving piece and a second auxiliary moving piece in pairs; the first motion component is used for driving the movable platform to perform macro motion along a first motion direction; the second motion assembly is used for driving the sub-motion platform and the first auxiliary motion piece to perform macro motion along a second motion direction when the second auxiliary motion piece is fixed; the first motion assembly is also used for driving the sub-motion platform and the first auxiliary motion piece to perform micro motion along the first motion direction when the second auxiliary motion piece is fixed; the second motion assembly is also used for driving the sub-motion platform to conduct micro motion along the second motion direction when the first auxiliary motion piece and the second auxiliary motion piece are fixed. According to the invention, the first base, the first motion assembly, the second base, the second motion assembly and the movable platform are presented in a laminated structure, so that space can be effectively utilized, the framework of the whole platform is simplified, the assembly is simplified, and the movable platform is disassembled into three sub-assemblies due to the fact that the motion directions of the first motion assembly and the second motion assembly are vertical, and the overall motion of the movable platform and the relative motion among the sub-assemblies are controlled through the respective motions of the first motion assembly and the second motion assembly, so that macro-micro motion in the XY direction is realized, and accurate positioning is realized.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a front view of a coplanar decoupled XY high precision motion stage according to the present invention;
FIG. 2 is an exploded view of a coplanar decoupling XY high precision motion stage according to the present invention;
fig. 3 is a schematic structural view of the first and second moving assemblies.
Detailed Description
The embodiment of the invention provides a coplanar decoupling XY high-precision motion platform, which can effectively utilize space and realize precision positioning in a high-speed motion environment.
In order to make the objects, features and advantages of the present invention more comprehensible, the technical solutions in the embodiments of the present invention are described in detail below with reference to the accompanying drawings, and it is apparent that the embodiments described below are only some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 to 3, in an embodiment of the coplanar decoupling XY high precision motion platform provided by the present invention, for convenience of explanation, a motion track of a first motion component is set to an X-axis direction, and a motion track of a second motion component is set to a Y-axis direction. The platform provided in this embodiment includes: the device comprises a first base 1, a second base 2, a first motion assembly 3, a second motion assembly 4 and a movable platform 5;
the first base 1, the first moving assembly 3, the second base 2, the second moving assembly 4 and the moving platform 5 are sequentially stacked from bottom to top, and a first moving direction of the first moving assembly 3 (in this embodiment, the direction is the X direction) and a second moving direction of the second moving assembly 4 (in this embodiment, the direction is the Y direction) are perpendicular to each other.
In order to realize macro motion and micro motion on the same platform, the movable platform 5 is divided into three parts, and the movable platform is formed by connecting a sub movable platform 51, a first auxiliary motion piece 52 and a second auxiliary motion piece 53 in pairs. Alternatively, the connection relationship among the sub-moving platform 51, the first auxiliary moving member 52 and the second auxiliary moving member 53 may be: the sub-moving platform 51 and the first auxiliary moving member 52 each have a slide rail, the second auxiliary moving member 53 has a slide groove matching the slide rails of the sub-moving platform 51 and the first auxiliary moving member 52, the sub-moving platform 51 has a third protrusion, and the first auxiliary moving member 52 has a groove for receiving the third protrusion.
Alternatively, in order to drive the micro-motion of the sub-moving platform 51 in the XY two directions, the micro-motion is realized by the way that the piezoelectric ceramics are deformed after being electrified. The first movement assembly 3 comprises: the first macro-motion part 31 and the first macro-motion part 32 elastically connected with the first macro-motion part 31 are provided with a first piezoelectric ceramic 33 therebetween. The second movement assembly 4 comprises: the second macro-motion part 41 and the second macro-micro-motion part 42 elastically connected with the second macro-motion part 41 are provided with a second piezoelectric ceramic 43 therebetween.
Alternatively, in order to provide piezoelectric ceramics between the macro-micro moving element and the macro-moving element, the structures of the macro-micro moving element and the macro-moving element can be matched. The matched specific structure can be that the first macro motion piece 31 is provided with a first extension piece, and the first extension piece is provided with a first empty slot; the first macro-micro mover 32 has a first cavity for receiving the first extension member, and the first cavity has a first protrusion for engaging a non-end portion of the first recess. The second macro motion element 41 is provided with a second extension element 411, and the second extension element 411 is provided with a second empty slot 412; the second macro-micro moving member 42 has a second cavity 413 for accommodating the second extension member 411, and the second cavity 413 is provided with a second protrusion 414 for being inserted into the non-end portion of the second hollow groove 412.
Optionally, the first piezoelectric ceramic 33 is disposed in the first hollow groove and located at one side of the first protrusion, and the first high steel spring 34 is disposed in the first hollow groove and located at the other side of the first protrusion. The second piezoelectric ceramic 43 is disposed in the second hollow groove and located at one side of the second protrusion, and a second high steel spring 44 is disposed in the second hollow groove and located at the other side of the second protrusion. Here, the process of driving macro-micro moving parts after the piezoelectric ceramic is deformed is explained: because the piezoelectric ceramics and the high-steel springs are respectively arranged at the two sides of the bulge of the macro-micro moving part, when the piezoelectric ceramics are not electrified, the elasticity of the high-voltage springs at the moment extrudes the piezoelectric ceramics through the bulge (pushing the piezoelectric ceramics), so that the piezoelectric ceramics are prevented from being deformed. After the ceramic is electrified, the ceramic deforms to apply pressure to the bulge, and the pressure is larger than the elasticity of the spring at the moment, so that the macro-micro moving part moves, namely micro-movement, under the action of force.
Optionally, the first macro-motion member 31 is slidably connected to the second auxiliary motion member 53, and the first macro-micro motion member 32 is slidably connected to the sub-motion platform 51. The second macro-motion member 41 is slidably connected to the first auxiliary motion member 52, and the second macro-motion member 42 is slidably connected to the sub-motion platform 51. As shown in fig. 2, the upper end of the first macro motion member 31 is provided with a groove, the direction of which is consistent with the Y-axis direction, through which the first macro motion member 31 is slidably connected with the slide rail of the second auxiliary motion member 53. The connection between the first macro-micro moving member 32 and the sub-moving platform 51, the connection between the second macro-moving member 41 and the first auxiliary moving member 52, and the connection between the second macro-micro moving member 42 and the sub-moving platform 51 can be known in the same manner.
Optionally, the coplanar decoupling XY high precision motion platform provided by the invention further comprises: a first motor and a second motor. The stator 61 of the first motor is mounted on the first base and the stator 71 of the second motor is mounted on the second base. The first macro moving element 31 is provided with a first L-shaped moving element 62, the first L-shaped moving element 62 is a mover of a first motor, the second macro moving element 41 is provided with a second L-shaped moving element 72, and the second L-shaped moving element 72 is a mover of a second motor. The first motor and the second motor are both U-shaped groove linear motors. It should be understood that, for convenience of description, the motor herein may refer to the first motor and may refer to the second motor, where the mover of the motor extends into the stator of the electron, and after the stator is energized, magnetic force is generated between the two to push the mover to perform linear motion, that is, the macro-motion piece (the first macro-motion piece 31 and/or the second macro-motion piece 41) is driven to perform linear motion, and the macro-motion piece drives the linear motion of the whole motion assembly, so as to further drive the macro-motion of the moving platform.
Alternatively, the first motor is provided with a first guide rail 8 on both sides of the stator 61, and the first guide rail 8 is used for providing the first moving assembly 3. A second guide rail 9 is provided on both sides of the stator 71 of the second motor, which second guide rail is used for providing the second moving assembly 4. As shown in fig. 2, the lower surfaces of the first macro-motion member 31 and the first macro-motion member 32 are provided with sliding grooves for moving in cooperation with the first guide rail 8, and the connection manner between the second macro-motion member 41, the second macro-motion member 42 and the second guide rail is the same as that of the first macro-motion member and the first micro-motion member, and will not be described again here.
It should be noted that the platform provided by the invention can realize macro motion in the XY two directions, micro motion in the XY two directions, and the four processes can be performed one by one or simultaneously in any combination of the four processes, so as to realize macro-micro combination. Four processes are described below:
when macro motion in the X direction is required, the first motor drives the first macro motion part 31, the first macro motion part 32 and the movable platform 5 to realize macro motion in the X direction.
When the macro motion in the Y direction is required, the second auxiliary motion member 53 is fixed, and the second motor drives the second macro motion member 41, the second macro motion member 42, the sub-motion platform 51 and the first auxiliary motion member 52 to realize macro motion in the Y direction.
When micro-motion in the X direction is required, the second auxiliary motion element 53 is fixed, and the first piezoelectric ceramic 33 drives the first macro-micro motion element 32, the sub-motion platform 51, and the first auxiliary motion element 52 to realize micro-motion in the X direction.
When micro-motion in the Y direction is required, the first auxiliary motion element 52 and the second auxiliary motion element 53 are fixed, and the second piezoelectric ceramic 43 drives the second macro-micro motion element 42 and the sub-motion platform 51 to realize micro-motion in the Y direction.
In this embodiment, the first macro-micro moving member 32 is provided with a reading head mounting member, on which a reading head is mounted, and the first guide rail 8 is provided with a grating ruler along the X-axis, which is matched with the reading head. The reading head and the grating ruler can record displacement information in the X direction and feed back the displacement information to the computer.
The invention realizes XY two-axis motion on the same plane in a ring-buckle type structure mode, has simple structure, less motion components and small load, and greatly reduces the motion complexity. The invention adopts the design concept of macro-micro composite positioning, namely, a high-performance linear motor is adopted to drive an XY macro-motion part to realize macro-motion and micro-scale positioning precision, and then piezoelectric ceramics is used to drive the XY macro-micro-motion part to realize micro-motion and nano-scale positioning precision, so that a moving platform overcomes the contradiction of travel, speed and precision, and finally, precision generation under a high-speed motion environment is realized. The invention also realizes the precision measurement of macro-micro composite motion by coaxially driving the linear motor and the piezoelectric ceramic, and is easy to feedback control.
The invention has the following advantages:
(1) The structure is presented in a laminated structure, so that the framework of the whole platform is simplified, the components are simplified, the XY plane space can be effectively utilized, and the structure has great advantages in the microelectronics manufacturing industry with narrow space;
(2) And (5) macro-micro two-stage common rail driving and synchronous control. The switching problem of macro movement and micro movement and the error problem during macro and micro displacement compounding are effectively solved, the movement assembly is effectively reduced, the structure is simple and light, the platform load is small, the high-speed, high-acceleration and large-stroke advantages are achieved, the high-precision characteristic is achieved, and the precise generation under the high-speed movement environment is achieved;
(3) The three groups of subassemblies are designed on the same plane, so that macro motion decoupling and micro motion decoupling are realized, namely 'coplanar double decoupling' of macro and micro four driving sources is realized. The macro-micro composite motion in the XY direction is realized, and the accurate positioning of the plane space position is realized.
The above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A coplanar decoupled XY high precision motion stage comprising: the device comprises a first base, a second base, a first motion assembly, a second motion assembly and a movable platform;
the first base, the first motion assembly, the second base, the second motion assembly and the movable platform are sequentially stacked from bottom to top;
the first movement direction of the first movement assembly and the second movement direction of the second movement assembly are perpendicular to each other;
the movable platform is formed by connecting a sub movable platform, a first auxiliary moving piece and a second auxiliary moving piece in pairs;
the first motion component is used for driving the movable platform to perform macro motion along the first motion direction;
the second motion component is used for driving the sub-motion platform and the first auxiliary motion component to perform macro motion along the second motion direction when the second auxiliary motion component is fixed;
the first motion component is further used for driving the sub-motion platform and the first auxiliary motion piece to perform micro motion along the first motion direction when the second auxiliary motion piece is fixed;
the second motion assembly is further used for driving the sub-motion platform to conduct micro motion along the second motion direction when the first auxiliary motion piece and the second auxiliary motion piece are fixed.
2. The coplanar decoupled XY high precision motion stage according to claim 1, wherein the first motion assembly comprises: the first macro-motion piece and the first macro-motion piece are elastically connected with the first macro-motion piece, and a first piezoelectric ceramic is arranged between the first macro-motion piece and the first macro-motion piece;
the second motion assembly includes: the second macro-motion piece and the second macro-motion piece which is elastically connected with the second macro-motion piece are provided with second piezoelectric ceramics.
3. The coplanar decoupling zero XY high precision motion stage according to claim 2, wherein said first macro motion member has a first extension member thereon, said first extension member having a first void; the first macro-micro moving part is provided with a first cavity for accommodating the first extending part, and a first bulge which is used for being embedded into the non-end part of the first empty slot is arranged on the first cavity;
the second macro motion piece is provided with a second extension piece, and the second extension piece is provided with a second empty slot; the second macro-micro moving part is provided with a second cavity for accommodating the second extending part, and a second bulge which is used for being embedded into the non-end part of the second empty groove is arranged on the second cavity.
4. The coplanar decoupling high precision motion stage according to claim 3, wherein said first piezoceramic is disposed in said first recess and on one side of said first protrusion, and a first high steel spring is disposed in said first recess and on the other side of said first protrusion;
the second piezoelectric ceramic is arranged in the second empty groove and is positioned on one side of the second bulge, and a second high steel spring is arranged in the second empty groove and on the other side of the second bulge.
5. The coplanar decoupling zero XY high precision motion stage according to any one of claims 2 to 4, wherein the first macro-motion member is slidably connected to the second auxiliary motion member, and the first macro-micro motion member is slidably connected to the sub-motion stage;
the second macro-motion piece is in sliding connection with the first auxiliary motion piece, and the second macro-micro motion piece is in sliding connection with the sub-motion platform.
6. The coplanar decoupling zero XY high precision motion stage according to claim 5, further comprising: a first motor and a second motor;
the stator of the first motor is arranged on the first base;
the stator of the second motor is arranged on the second base;
the first macro-moving part is provided with a first L-shaped moving part, and the first L-shaped moving part is a rotor of the first motor;
the second macro-moving part is provided with a second L-shaped moving part, and the second L-shaped moving part is a rotor of the second motor.
7. The co-planar decoupled XY high precision motion platform of claim 1, wherein said sub-motion platform and said first auxiliary motion member each have a slide rail, and said second auxiliary motion member has a slide slot that mates with said slide rails of said sub-motion platform and said first auxiliary motion member.
8. The coplanar decoupling zero XY high precision motion stage according to claim 7, wherein the sub-motion stage has a third protrusion and the first auxiliary motion member has a recess that receives the third protrusion.
9. The coplanar decoupling zero XY high precision motion stage according to claim 6, wherein a first guide rail is disposed on each side of the stator of the first motor, the first guide rail being configured to mount the first motion assembly;
and second guide rails are arranged at two sides of the stator of the second motor and are used for arranging the second motion assembly.
10. The coplanar decoupling zero XY high precision motion stage according to claim 6, wherein the first motor and the second motor are both U-slot linear motors.
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| CN108747426B (en) * | 2018-07-16 | 2023-05-05 | 广东工业大学 | Co-stator large-stroke trans-scale three-degree-of-freedom parallel motion platform |
| CN108788792B (en) * | 2018-09-11 | 2023-07-25 | 广东工业大学 | Plane-driven pitching three-degree-of-freedom motion platform |
| CN109545271A (en) * | 2019-01-09 | 2019-03-29 | 广东工业大学 | A kind of precise motion compensator, XYZ three-dimensional precise motion compensator and compensation system |
| CN114865878B (en) * | 2022-05-05 | 2023-05-23 | 苏州艾科瑞思智能装备股份有限公司 | High-speed XYZ motion platform suitable for chip loading machine chip picking and placing |
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| JP2001116867A (en) * | 1999-10-19 | 2001-04-27 | Hitachi Ltd | Xy stage |
| CN102152131B (en) * | 2011-02-28 | 2012-06-13 | 西安理工大学 | Series macro-micro driving and guiding device for piezoelectric actuator of ball screw pair |
| CN104440344B (en) * | 2014-11-26 | 2017-05-10 | 广东工业大学 | Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor |
| CN208034111U (en) * | 2018-03-22 | 2018-11-02 | 广东工业大学 | A kind of XY high-precision movement platforms of coplanar decoupling |
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